Overview of PV Standards Activities at SEMI November 2012 ... of PV Standards... · PV Ribbon TF...

Overview of PV Standards Activities

at SEMI

Updated 19 November 2012

Updated November 19, 2012

Outline

• Why PV Standards?

• Why SEMI?

• Global SEMI PV Standards Organization and Charters

• Regional Updates

• Background Information


The Need for PV Standards• The PV industry has few standards to support the manufacturing

process and help achieve cost reduction and process efficiency goals

• The PV market, already large, is growing rapidly, with many new

companies entering the manufacturing supply chain

• Different applications and processes lead to diverse manufacturing

challenges –this is where industry standards can play a critical role

by:

– Bringing the global supplier and customer communities together

– Collectively reducing the number of options in a given process

– Agreeing on common parameters and terminology


Outline


• Why SEMI?





Why SEMI?• Similarity between semiconductor, FPD and PV manufacturing – many SEMI Standards immediately applicable

• Well-established (35+years), transparent process for developing international consensus manufacturing Standards

• Global infrastructure serving major PV manufacturing regions

• Over 500 volunteer experts working in SEMI PV Standards Activities, led by PV industry veterans


PV Standards Developing Organizations


Outline


• Why SEMI?





Notable Companies Involved in Developing SEMI PV Standards

acp-IT AG

Air Liquide

Air Products

AIS Automation Dresden GmbH

AIST

Applied Materials

Asahi/America, Inc.

ATMI

Bosch Solar Energy AG

BP Solar

Brewer Science

CA Solar

Canon ANELVA Corporation

CH2M Hill

China Sunergy

Chroma ATE INC

Cimetrix

Corning

Covalent Materials Corporation

Daihen Corporation

Dainichi Shoji K.K.

DAINIPPON

Delsolar

Despatch Industries

Deutsche Solar AG

Dow Corning

DuPont

Entegris, Inc.

Evans Analytical Group

Ever Energy Co. Ltd.

Evergreen Engineering

First Solar

Fraunhofer

Freiberg

GCL

George Fischer

GT Solar

Hemlock Semiconductor

Hirata Corporation

Hitachi Kokusai Electric Inc.

Hynix Semiconductor Inc.

ICL Performance Products LLC

IMEC

ITRI

Japan Solar Silicon

Jonas&Redmann Automation

KANEKA CORPORATION

KLA-Tencor

Korea Institute of Lighting Technology

LDK

LG. Display

Linde LLC

M+W Zander FE GmbH

Manz Automation AG

Matheson Tri-Gas

MEMC Electronic Materials, Inc.

Meyer Burger

Mitsubishi Heavy Industries,LTD

Motech (Solar Division)

Nippon Steel Corp.

Nisshinbo Mechatronics Inc.

NIST

NREL

OC Oerlikon Balzers AG

OCI

Pall Corporation

Parker Hannifin

PEER Group GmbH

Q-Cells SE

REC Silicon

RENA GmbH

Renesola

Roth & Rau - Ortner GmbH

Schiller Automation

Schott Solar AG

Semilab

Sinton Instruments

Solar World

SUMCO

Sunicon AG

Suntech

Swagelok

Tokuyama corporation

Tokyo Electron Ltd.

Trina Solar

TUV

UL

ULVAC

Wacker Chemie AG


SEMI PV Standards Organization [1]

North America

PV Materials

Committee

Japan

PV Materials

Committee

Europe

PV Materials

Committee

PV Ribbon TF

Int’l PV Analytical

Test Methods TF

PV

Silicon Materials

TF

Int’l PV Analytical

Test Methods TF

PV Electrical &

Optical Properties

TF

Japan PV

Materials

TF

TF – Task Force



Taiwan

PV Committee

c-Si Cell

Appearance

TF

PV Module

Vibration Test

Method TFPV Wafer

Measurement

Method TF

PV Cell Vibration

Test Method TF

China

PV Committee

Polysilicon

Packaging

Materials TF

PV Diffusion

Furnace Test

Methods TF

PV Package

Performance TF

PV Silicon Raw

Materials TF

PV Silicon Wafer

TF

Silicon Thin Film

PV Module TF

Metal Paste for

Crystalline Silicon

Solar Cells TF

Anti-reflective

Coated Glass TF

Crystalline Silicon

PV Module TF



Japan

PV Automation

Committee

Int’l PV Equipment

Interface Spec. TF

Europe

PV Automation

Committee

Int’l PV Equipment

Interface Spec. TF

Int’l PV Transport

Carrier TF

PV Wafer Traceability

TF

Int’l PV Transport

Carrier TF


Global PV Standards Committee

• Formation approved July, 2007.

• Initial Committee in Europe. Committees also now formed in

China, Japan, NA, and Taiwan.

• Charter - Explore, evaluate, discuss, and create consensus-

based standard measurement methods, specifications,

guidelines, and practices that, through voluntary compliance,

will:

• promote mutual understanding and improved communication between users and suppliers of photovoltaic manufacturing equipment, materials and services, and

• enhance the manufacturing efficiency and capability so as to reduce manufacturing cost of the photovoltaic (PV) industry.


Global PV Automation Standards

Committee• Formation approved June 1, 2010.

• Initial Committees in Japan and Europe.

• Charter - To explore, evaluate, discuss, and create consensus-based standard measurement methods, specifications, guidelines, and practices that, through voluntary compliance, will:– promote mutual understanding and improved communication

between users and suppliers of photovoltaic automation systems, components and capabilities, and

– enhance the manufacturing efficiency and capability and shorten time-to-market so as to reduce manufacturing cost of the photovoltaic (PV) industry.


Global PV Materials Standards

Committee• Formation approved Dec, 2010.

• Initial Committee in Japan. Committees also now formed in NA,

and Europe.

• Charter - To explore, evaluate, discuss, and create consensus-

based standard measurement methods, specifications, guidelines,

and practices that, through voluntary compliance, will:

– promote mutual understanding and improved communication between users and suppliers of photovoltaic materials and related

metrology equipment, and



SEMI PV Standards [1]• PV1-0211 – Test Method for Measuring Trace Elements in Silicon

Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry

– First standard test method that specifically addresses the evaluation of some types of PV Silicon feedstock.

• PV2-0709E – Guide for PV Equipment Communication Interfaces

– Unified communication standard between PV production equipment and the shop floor

• PV4-0311 – Specification for Range of 5th Generation Substrate Sizes for Thin Film Photovoltaic Applications

– Provides a range of substrate sizes for equipment applicable to 5th generation substrates


SEMI PV Standards [2]• High Purity Water

– PV3-0310 - Guide for High Purity Water Used In Photovoltaic Cell Processing

• Chemicals– PV5-1110 - Guide for Oxygen (O2), Bulk, Used In Photovoltaic Applications– PV6 -1110 - Guide for Argon (Ar), Bulk, Used In Photovoltaic Applications– PV7 -1110 - Guide for Hydrogen (H2), Bulk, Used In Photovoltaic Applications– PV8 -1110 - Guide for Nitrogen (N2), Bulk, Used In Photovoltaic Applications– PV14-0211 - Guide For Phosphorus Oxychloride, Used In Photovoltaic Applications– PV21-1011 - Guide for Silane (SiH4), Used In Photovoltaic Applications– PV24-1011 - Guide for Ammonia (NH3) In Cylinders, Used In Photovoltaic Applications– PV26-1011 - Specifications for Hydrogen Selenide (H2Se), Used In Photovoltaic Applications– PV27-1011 - Specifications for Ammonium Hydroxide (NH4OH), Used In Photovoltaic Applications– PV30-0212 - Specifications for 2-Propanol, Used in Photovoltaic Applications– PV36-0912 - Specifications for Hydrogen Peroxide, Used In Photovoltaic Applications– PV37-0912 - Guide for Fluorine (F2), Used In Photovoltaic Applications

• Acids– PV11-1110 - Specifications for Hydrofluoric Acid, Used In Photovoltaic Applications– PV12-1110 - Specifications for Phosphoric Acid, Used In Photovoltaic Applications– PV16-0611 - Specifications for Nitric Acid, Used In Photovoltaic Applications– PV20-1011 - Specifications for Hydrochloric Acid Used In Photovoltaic Applications– PV33-0212 - Specifications for Sulfuric Acid, Used in Photovoltaic Applications


SEMI PV Standards [3]

• PV9-0611 – Test Method For Excess Charge Carrier Decay In PV Silicon Materials By Non-Contact Measurements Of Microwave Reflectance After A Short Illumination Pulse

– Quantifies test method to obtain consistent results from the measurement of silicon materials

• PV10-1110 – Test Method For Instrumental Neutron Activation Analysis (INAA) Of Silicon

– Defines explicitly sample preparation, measurement procedure and data analysis of silicon

• PV13-1111 - Test Method for Contactless Excess-Charge-Carrier Recombination Lifetime Measurement in Silicon Wafers, Ingots, and Bricks Using an Eddy-Current Sensor

– Carrier lifetime measurements provide one of the most sensitive metrics for evaluating feedstock quality

• PV15-0211 - Guide for Defining Conditions for Angle Resolved Light Scatter Measurements to Monitor the Surface Roughness and Texture of PV Materials

– Provides a way to define light scattering. Light scatter is a sensitive indicator of surface roughness or texture



• PV17-0312 - Specification for Virgin Silicon Feedstock Materials for Photovoltaic Applications

– Specifies virgin silicon feedstock materials for growing of single crystalline ingots and casting or other methods of growing multicrystalline Si, used for producing Si wafers for solar cells.

• PV18-0811- Guide for Specifying a Photovoltaic Connector Ribbon

– Guide for tabbing and bus ribbons to interconnect cells into strings in crystalline and thin film modules

• PV19-0811 - Guide for Testing Photovoltaic Connector Ribbon Characteristics

– Describes all necessary test methods for defined ribbon characteristic, which are necessary to verify the actual ribbon quality

SEMI PV Standards [5]• PV22-1011- Specification for Silicon Wafers for Used in Photovoltaic Solar

Cells

– Requirements for silicon wafers for use in PV solar cell manufacture

• PV23-1011 - Test Method for Mechanical Vibration of Crystalline Silicon Photovoltaic (PV) Modules in Shipping Environment

– Evaluation of damaging to PV modules due to mechanical vibration during

transportation

• PV25-1011- Test Method for Simultaneously Measuring Oxygen, Carbon, Boron and Phosphorus in Solar Silicon Wafers and Feedstock by Secondary Ion Mass Spectrometry

– Measuring impurities in silicon by Second Ion Mass Spectrometry (SIMS)

• PV28-0212 - Test Methods for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge

– Measure resistivity in substrate used in PV devices using Eddy-Current



• PV29-0212 - Specification for Front Surface Marking of PV Silicon Wafers with Two-Dimensional Matrix Symbols

– Defines geometric and content of mark in 2-D code, machine-readable

• PV31-0212 - Test Method for Spectrally Resolved Reflective and Transmissive Haze of Transparent Conducting Oxide (TCO) Films for PV Application

– Measures haze in TCO film to characterize properties of material

• PV32-0312- Specification for Marking of PV Silicon Brick Face and PV Wafer Edge

– Defines brick slice code (BSC) mark for identifying and tracking wafers and bricks

• PV34-0712 - Practice for Assigning Identification Numbers to PV Si Wafer and Solar Cell Manufacturers

– Covers the assignment of identification numbers for crystalline PV Si wafer as well as

solar cell manufacturers and their locations.




• PV35 - Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication System

– Horizontal communication standard between PV equipment

• PV38 - Test Method for Mechanical Vibration of c-Si PV Cells in Shipping Environment

– Evaluation of damaging to PV cell due to mechanical vibration during transportation

• PV39 - Test Method for In-Line Measurement of Cracks in PV Silicon Wafers by Dark Field Infrared Imaging

– Inline measurement of crack on PV wafer

• PV40 - Test Method for In-Line Measurement of Saw Marks on PV Silicon Wafers by a Light Sectioning Technique Using Multiple Line Segments

– Inline measurement of saw mark on PV wafer

• PV41 - Test Method for In-Line, Non-Contact Measurement of Thickness and Thickness Variation of Silicon Wafers for PV Applications Using Capacitive Probes

– Inline measurement of thickness and thickness variation of PV wafer


SEMI PV Auxiliary Information

• AUX017-0310E – Contactless Carrier-Lifetime Measurement in Silicon Wafer, Ingots, and Blocks

– Summary of a common framework for contactless carrier lifetime measurement in silicon photovoltaic

• AUX019-0211 – Interlaboratory Study Results For Determining the Precision of SEMI PV1

– Eight laboratories reports to establish precision for PV1

• AUX022-0611 - Conversion of Units For Impurity Concentrations In Silicon

– Converting concentration units (ppma, ppba or ppta) and absolute units (atoms/cm3)

• AUX024-0712 - List of PV and Semiconductor Shared Gases and Liquid Chemicals Standards

• AUX025-0712 - List of suppliers of Si bricks, Si Wafers and Photovoltaic c-SI Solar Cells for Use in the PV Industry


Other SEMI Standards Applicable for

PV Manufacturing [1/2]• SEMI E10 - Specification for Definition and Measurement of Equipment

Reliability, Availability, and Maintainability (RAM)

• SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity

• SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications

• SEMI M6 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells

• SEMI M44 - Guide to Conversion Factors for Interstitial Oxygen in Silicon

• SEMI MF391 - Test Method for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-State Surface Photovoltage

• SEMI MF1188 - Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline


Other SEMI Standards Applicable for

PV Manufacturing [2/2]• SEMI MF1619 - Test Method for Measurement of Interstitial Oxygen

Content of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle

• SEMI MF1708 - Practice for Evaluation of Granular Polysilicon by Melter-Zoner Spectroscopies

• SEMI MF1727 - Practice for Detection of Oxidation Induced Defects in Polished Silicon Wafers

• SEMI MF1809 - Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon

• SEMI MF1810 - Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers

• SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

• SEMI S26 - Environmental, Health, and Safety Guideline for FPD Manufacturing System


Topics currently being worked on include

• Aluminum and silver pastes

• Analytical test methods

• Anti-reflective coated glass

• Cell appearance and defect detection

• Connector ribbon

• Equipment to equipment communication

• Minority carrier lifetime

• Process chemicals and gases

•Thin-film silicon module light soaking test method

• PV diffusion furnace test method

• PV wafer defect metrology

• PV wafer and cell transport carriers

• PV wafer mark and ID

• PV wafer and brick traceability

• Polysilicon and modules packaging

• Mono-like silicon wafer for PV cells

• Single substrate tracking

• Solar grade silicon feedstock

• Transparent conductive oxide

• Wafer defect in-line test methods


Outline


• Why SEMI?

• Global SEMI PV Standards Organization and

Charters




Europe PV Materials Standards Committee

• Co-Chairs

– Peter Wagner – Self

– Hubert Aulich – PV Crystalox Solar

• Task Forces

– PV Silicon Materials

– PV Ribbon

– PV Analytical Test Methods

EUROPE


PV Silicon Materials TF [1/3]• Leader:

– Peter Wagner

– Several PV silicon producers are involved in the activity: Dow Corning, Elkem Solar, Hemlock, PV Crystalox Solar Silicon, Wacker Chemie, REC, Siliken and Sunicon.

• Charter: Develop and maintain standards regarding specifications for bulk silicon materials used in manufacturing solar cells.

– Identify missing standardized test methods for PV Silicon Materials

– Define and develop common understanding of terms used in PV industry

– Educate industry about new standards

– Develop new standardized test methods for PV Si Materials

EUROPE


PV Silicon Materials TF [2/3]• Standards Published:

– PV17-1012 - Specification for Virgin Silicon Feedstock Materials

for Photovoltaic Applications

– PV39-0912 -Test Method for In-Line Measurement of Cracks in

PV Silicon Wafers by Dark Field Infrared Imaging

– PV40-0912 -Test Method for In-Line Measurement of Saw

Marks on PV Silicon Wafers by a Light Sectioning Technique

Using Multiple Line Segments

– PV41-0912 - Test Method for In-Line, Non-Contact

Measurement of Thickness and Thickness Variation of Silicon

Wafers for PV Applications Using Capacitive Probes

EUROPE


PV Silicon Materials TF [3/3]

• New Activities:

– Ballot 5333, Test Method for In-Line Measurement of Waviness

on PV Silicon Wafers by a Light Sectioning Technique

• Approved by TC in October 2012, pending ISC A&R SC

review

– Doc. 5432, Test Method for In-Line Characterization of PV

Silicon Wafers by Using Photoluminescence

– Doc. 5433, Test Method for In-line Characterization of PV

Silicon Wafers Regarding Grain Size

– Doc. 5434, Test Method for In-Line Measurement of Lateral

Dimensions of PV Silicon Wafers for PV Applications

– Doc. 5530, Specification for Orientation Fiducials for PV Silicon

Wafers

EUROPE


Other EU PV Materials Committee Task Forces• PV Ribbon TF

– Leader

• Christian Prischmann/Ulbrich

– Charter: Identify standardization needs for connector ribbon specifications and ribbon quality testing procedures

– Current Activities

• Guide for Specifying a Photovoltaic Connector Ribbon

– published as PV18-0912

• Guide for Testing Photovoltaic Connector Ribbon Characteristics

– published as PV19-0712

• Int’l PV Analytical Test Methods TF

– Refer to NA slides for latest update

EUROPE


Europe PV Automation Committee

• Co-Chairs

– Eberhard Teichmann – Peer Group

• Task Forces

–PV Equipment Interface Specification (EIS)

–PV Transport Carrier

–PV Wafer Traceability

EUROPE


PV Equipment Interface Specification

(EIS) Task Force [1/2]• Leader:

– C. Born/Viltronic

• Charter: Specify and define a unified equipment

communication interface for photovoltaic production

systems.

• Published

– SEMI PV2-0709E Guide for PV Equipment Communication

Interfaces, simplifying the application of the original SECS/GEM

(Semiconductor Equipment Communication Standards/Generic

Equipment Model)

EUROPE


PV Equipment Interface Specification

(EIS) Task Force [2/2]

• Other ballots under development:

– Subordinate Standard "Data Definition specifications for a Horizontal Communication between equipment for crystalline photovoltaic fabrication system"

– Subordinate Standard "Profibus implementation specification for a Horizontal Communication between equipment for crystalline photovoltaic fabrication system"


PV Transport Carrier TF • Leaders:

– Joachim Seidelman/Fraunhofer

– Jurgen Lundgren/Entegris

• Charter: Develop standards for unified transport entities

(boxes, cassettes, carriers) for production systems of the PV

industry.

– First standard will focus on 156 mm x 156 mm product

size for Wafer and Cell Transport Carriers for use in

crystalline PV Manufacturing

EUROPE


PV Wafer Traceability TF [1/2]

• Leader

– Andreas Behr/Innolas Semiconductor

• Charter: Define standards for PV-wafer identification from the cut ingot (wafer) to the end of - and including - module production.

• Published

– PV29-0212 Specification for Front Surface Marking of PV Silicon Wafers with Two-Dimensional Matrix Symbols

– PV32-0312 Specification for Marking of PV Silicon Brick Face and PV Wafer Edge

– PV34-0712 Practice for Assigning Identification Numbers to PV Si Wafer and Solar Cell Manufacturers

EUROPE


PV Wafer Traceability TF [2/2]

• Ballot under development– Ballot 5388 – Revision of PV34, Practice for Assigning Identification Numbers to PV Si Wafer and Solar Cell Manufacturers

• Approved by TC in October 2012, pending ISC A&R SC review

– Ballot 5418A - Revision of PV29, Specification for Front Surface Marking of PV Silicon Wafers with Two-Dimensional Matrix Symbols

• To be issued in cycle 1-2013 for review at PVFMF meeting

– Ballot 5151, Specification to Transfer Wafer Mark Reader Data To Host System (MES)

• Future work may include

– Investigation of anti-counterfeiting possibilities and PV recycling issues

EUROPE


Crystalline Technology and

Manufacturing (CTM) Group• European group of eight crystalline solar cell manufacturers

(Q-Cells, Deutsche Cell, Bosch Solar Energy, Schott Solar, Sovello,

Sunways, SolarWatt and Solland) is working together within SEMI.

• The priority of the CTM Group will be the definition of the

development processes for raw materials, cell technology and cell

manufacturing.

• The CTM Group has established a crystalline solar cell technology

roadmap up to the year 2020

– www.itrpv.net

EUROPE


NA PV Materials Standards

Committee• Co-Chairs

– Lori Nye (Brewer Science)

– John Valley (MEMC)

• Task Forces– PV Analytical Test Methods

– PV Electrical and Optical Properties Measurements

NORTH AMERICA


PV Analytical Test Methods TF [1]• Leader

– Hugh Gotts/Balazs Analytical Services

• Charter: develop standard analytical test methods for PV industry– Standards published

• PV1-0211, Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry

• PV9-0611, Test Method for Excess Charge Carrier Decay in PV Silicon Materials by Non-Contact Measurements of Microwave Reflectance After a Short Illumination Pulse

• PV10-1110, Test Method For Instrumental Neutron Activation Analysis (INAA) Of Silicon

• PV13-1111, Test Method for Contactless Excess-Charge-Carrier Recombination Lifetime Measurement in Silicon Wafers, Ingots, and Bricks Using an Eddy-Current Sensor

• PV25-1011, Test Method for Simultaneously Measuring Oxygen, Carbon, Boron and Phosphorus in Solar Silicon Wafers and Feedstock by Secondary Ion Mass Spectrometry

•

NORTH AMERICA


PV Analytical Test Methods TF [2]

• Published Auxiliary Information

– AUX017-0310, Contactless Measurement of Carrier Recombination Lifetime in Silicon

Wafers and Ingots

– AUX019-0211, Interlaboratory Study Results for Determining the Precision of PV1

– AUX022-0611, Conversion of Units for Impurity Concentrations in Silicon

• Drafting:

– Ballot 4675C, Test Method for Inductively-Coupled-Plasma Mass Spectrometry (ICP-MS) in Silicon Feedstock

• To be issued for Cycle 1-13 for review at NA Spring 2013

– Ballot 5438, Test Method for the Measurement of Oxygen Concentration in PV Silicon Materials by Inert Gas Fusion Infrared Detection Method

• Approved by TC in October 2012, pending ISC A&R SC review

NORTH AMERICA


PV Analytical Test Methods TF [3]

• Drafting Auxiliary Information:

– Round Robin Report (Multi-laboratory Test) of SEMI PV9-1110, Test Method for Excess Charge Carrier Decay in PV Silicon Materials by Non-Contact Measurement of Microwave Reflectance After a Short Illumination Pulse

– Round Robin Report (Multi-laboratory Test) of SEMI PV25-1011, Test Method for Simultaneously Measuring Oxygen, Carbon, Boron and Phosphorus in Solar Silicon Wafers and Feedstock by Secondary Ion Mass Spectrometry

– Round Robin Report (Multi-laboratory Test) of doc. 5438, Test Method for the Measurement of Oxygen Concentration in PV Silicon Materials for Silicon Solar Cells by Inert Gas Fusion Infrared Detection Method

NORTH AMERICA


PV Electrical and Optical Properties Measurements TF

• Leaders

– Chris Moore/Semilab and Austin Blew/LEI

• Charter: To develop standards or practices for non-destructive electrical properties measurements for the PV industry.

– Standards Published

• SEMI PV15-0211 - Guide for Defining Conditions for Angle Resolved Light Scatter Measurements to Monitor the Surface Roughness and Texture of PV Materials

• SEMI PV28-0212 - Test Methods for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge

• SEMI PV31-0212 - Test Method for Spectrally Resolved Reflective and Transmissive Haze of Transparent Conducting Oxide (TCO) Films for PV Application

• Drafting

– Doc. 4825, New standard: Test Methods for Hg Probe Measurements of Crystalline Silicon PV Materials and Devices

– Doc. 5394, New Standard: Test Method for QSS Microwave PCD measurements of Carrier Decay and Lifetime

NORTH AMERICA


PV Materials Committee

– Published PV22-1011, Specification for Silicon Wafers for Use as Photovoltaic Solar Cells

• Withdrawal of SEMI M6-1108 Specification for Silicon Wafers for Use as Photovoltaic Solar Cells, was approved by Silicon Wafer Committee

NORTH AMERICA


Japan PV Automation Committee• Formation approved June 1, 2010• Co-Chairs

– Terry Asakawa/Tokyo Electron– Emi Ishikawa/Atelier Ishikawa– Makoto Ishikawa /Nisshinbo Mechatronics

• Charter - To explore, evaluate, discuss, and create consensus-based standard measurement methods, specifications, guidelines, and practices that, through voluntary compliance, will:– promote mutual understanding and improved communication between

users and suppliers of photovoltaic automation systems, components and capabilities, and


• Task Forces– PV Equipment Interface Specification

– PV Transport Carrier

JAPAN


PV Equipment Interface Specification (EIS) Task

Force

• Leader

– Mitch Sakamoto/Tokyo Electron

• Charter: Study and development of standards for equipment

communication interface for photovoltaic (PV) production

systems

– Drafting doc. 4848: Generic Equipment Model for Thin Film PV

Manufacturing (GEM-PV) currently available for comment

– Liaison with EU PV EIS TF

• Published

– SEMI PV35-1012 Specification for Horizontal Communication

between Equipment for Photovoltaic Fabrication System

JAPAN


PV Transport Carrier Task Force

• Leaders

– Shuichi Inoue/Miraial

– Koji Ohyama/DNS

• Counterpart to European TF

JAPAN


Japan PV Materials Committee

• Co-Chairs

– Takashi Ishihara/Mitsubishi Electric

– Kazuhiko Kashima/Covalent Materials

– Tetsuo Fukuda/Advanced Industrial Science and Technology

• Task Force

– PV Materials

JAPAN


Japan PV Materials Task Force

• Leaders

– Tetsuo Fukuda/Advanced Industrial Science & Technology

– Takashi Ishihara/ Mitsubishi Electric

• Charter: Identify standardization needs and priorities for specifications, guidelines and procedures related to Materials used for manufacturing PV

cells/modules and systems.

– Published PV4-0311: Specification for Range of 5th Generation Substrate Sizes for Thin-Film Photovoltaic Application

• Drafting– Ballot 5417: Test Method for Measurement of Defects in PV Silicon Wafers in

PV Modules by Electroluminescence Imaging

– Ballot xxxx: Test Method for Measurement of Cracks in PV Silicon Wafers in

PV Modules by Laser Scanning

JAPAN


Taiwan PV Technical Committee

• Leadership– J.S. Chen/TeraSolar

– Ray Sung/UL Taiwan

– B.N Chuang/ITRI

• Task Forces– c-Si Cell Appearance

– Module Vibration Test Method

– Cell Vibration Test Method

– PV Wafer Measurement Method

– PV Package Performance

TAIWAN


c-Si Cell Appearance TF

• Leader

– Jeff Lee/Chroma

• Charter: Due to increasing demand for quality, c-Si solar cell appearance characteristics such as chipped cell, stain on cell surface, cell color etc., have become standard test requirements for c-Si solar cell manufacturing. However, no standard has been set in this field. As a result, c-Si solar cell manufacturers may receive very different specs from different customers, which dramatically increases the cost and add loading in process control. This standard aims to gather industry consensus and provide a qualification and/or classification criteria for c-Si cell appearance.

– Drafting a Specification for Color reference cell and Detection of c-Si PV cell surface visible defects

TAIWAN


Module Vibration Test Method TF

• Leader

– Teng-Chun Wu/ITRI

• Charter: To develop technical standard specifications and

guidelines related to vibration test methods and

characterization of PV modules due to vibrational stress.

– Published PV23-1011, Test Method For Mechanical

Vibration of c-Si PV Modules In Shipping Environment

TAIWAN


Cell Vibration Test Method TF

• Leader


• Charter: The objective is to develop technical standard specifications and guidelines related to vibration test methods and characterization of PV cells due to the stress during shipping.

– Published PV35-0912 Test Method for Mechanical

Vibration of c-Si PV Cells in Shipping Environment

TAIWAN


PV Wafer Measurement Method TF

• Leader– J.C Lin/Chunson

• Charter: Due to increasing demand for quality, PV Si Wafer

Metrology such as Geometry (Dimensions, TTV, Warp/Sori)

Electrical Character (Resistivity, Carrier Lifetime), Visible and

Non-Visible Defect, Saw-Mark, Stain on Wafer Surface, etc.,

have become standard test requirements for c-Si (both

Mono- and Multi- ) wafer manufacturing. However, no

standard has been set in this field.

TAIWAN

PV Package Performance TF

• Leader


• Charter: The objective is to develop technical standard criteria related to PV wafer, cell and module package performance.

• Drafting:

– Ballot 5431: Test Method for Performance Criteria of

Photovoltaic (PV) Wafer, Cell, and Module Package

TAIWANUpdated November 19, 2012


China PV Technical Committee

• Formation of China SEMI PV Standards Committee approved December 8, 2011, at SEMICON/PV Japan.

• Leadership– Guangchun Zhang/Suntech and Jun Liu/CESI

• Task Forces– Anti-Reflective Coated Glass – Crystalline Silicon PV Module– Metal Paste for Crystalline Silicon Solar Cells– Polysilicon Packaging Materials– PV Diffusion Furnace Test Methods– PV Silicon Raw Materials– PV Silicon Wafer– Silicon Thin Film PV Module

CHINA


Anti-reflective Coated Glass TF

• Leaders

– Yin Bing/Suntech

– Zhu Xiaogang/CPVT

• Charter: Identify standardization needs and priorities and

develop specifications, guides and test methods for Anti-

reflective coated glass used in the manufacturing of crystalline

silicon solar modules.

• Drafting:

– Ballot 5475: Specification for Anti-Reflective Coated Glass, Used in Crystalline Silicon Photovoltaic Modules

CHINA


Crystalline Silicon PV Module TF

• Leaders

– Wei Zhou/Trina Solar, Qiang Huang/Trina Solar

– Yingtang Tang/Suntech, Binglin/China Packaging Research

• Charter: To develop technical standard specifications and

guidelines related to crystalline silicon PV modules.

• Drafting:

– Ballot 5384: Specification for Package Protection Technology for PV Modules

– Ballot 5385: Test Method for the Content of Vinyl Acetate (VA) in Ethylene-Vinyl Acetate (EVA) applied in PV modules—Thermal Gravimetric Analysis (TGA)

CHINA


Metal Paste for Crystalline Silicon

Solar Cells TF• Leaders

– Chen Rulong/Suntech, Zhang Weiming/Heraeus

– Wang Mao/DuPont, Xu Shan/Rutech


develop specifications, guides and test methods for metal

pastes used in the manufacturing of crystalline silicon solar

cells.

• Drafting:

– Ballot 5426: Specification for Aluminum Paste, Used in Back Surface Field of Crystalline Silicon Solar Cells

– Ballot 5427: Specification for Front Surface Silver Paste, Used in P-Type Crystalline Silicon Solar Cells

CHINA


Polysilicon Packaging Materials TF

• Leaders

– Jinbiao Lv/GCL Poly

– Xiaoxia Liu/GCL

• Charter: Based on the input and feedback of polysilicon

manufacturers, develop standards for materials used for

packaging polysilicon.

• Drafting:

– Ballot 5428: Specification for Impurities in Polyethylene

Packaging Materials for Polysilicon Feedstock

CHINA


PV Diffusion Furnace Test Methods TF

• Leaders

– Liu Liangyu/48th Institute


develop test methods related to diffusion furnaces to help

evaluate the performance of heater tubes.

• Drafting:

– Ballot 5429: Test Method for In-line Monitoring of Flat

Temperature Zone in Horizontal Diffusion Furnaces

CHINA


PV Silicon Raw Materials TF

• Leaders

– Dazhou Yan/SINOSICO and Li He/CPVT

• Charter: Identify standardization needs and priorities for

specifications, guides and test methods related to silicon raw

materials used for manufacturing solar-grade polysilicon.

• Drafting:

– Ballot 5476: Test Method for Determination Of Total Carbon Content in Silicon Powder by Infrared Absorption After Combustion in an Induction Furnace

– Ballot 5477: Test Method for Determining B, P, Fe, Al, Ca Contents in Silicon Powder for PV Applications by Inductively-Coupled-Plasma Optical Emission Spectrometry

CHINA


PV Silicon Wafer TF

• Leaders

– Yuepeng Wan/LDK, Xiaoyong Wang/JAsolar

– Jingang Lu/Suntech,

• Charter: Identify standardization needs and priorities for

specifications, guidelines and procedures related to silicon

wafer used for manufacturing PV cells. Develop standards for

measuring electrical, physical and optical properties of silicon

wafer used for manufacturing PV cells.

• Drafting:

– Ballot 5382: Specification for Mono-Like Silicon Wafer for Use in Photovoltaic Solar Cells

CHINA


Silicon Thin Film PV Module TF

• Leaders

– Mai Yaohua/Baoding Tianwei Solarfilms

– Niu Xinwei/Chint Solar

– Wu Zhenyu/Hanergy

• Charter: To develop new standardized test methods,

technical specifications and guides for thin film silicon PV

modules.

• Drafting:

– Ballot 5478: Test method for thin-film silicon PV modules

light soaking

CHINA

Participating Companies

• Increasing participation

from major Chinese PV

companies

Industry Segment Company Name

Wafer/C-Si Cell/Module Suntech

Wafer/C-Si Cell/Module JA Solar

Poly/Wafer/C-Si

Cell/ModuleYingli

Wafer/C-Si Cell/Module Trina

C-Si Cell/Module/TF Astronergy

Poly/Wafer/C-Si

Cell/ModuleLDK

Poly/Wafer/Installation GCL

Poly/Wafer Sinosico

Equipment/C-Si

Cell/ModuleCETC-48

Equipment Sevenstar

Standardization Institute CESI

Equipment Jingyuntong

C-Si Cell/Module Canadian Solar

PVApplication ERI of NDRC


CHINA


Korea

• PV Standards WG in the process of forming– Industry open forum in 2010

• Participating segments included: equipment, polysilicon, wafer-based cell/module

– Next steps

• Additional polysilicon suppliers invited for next meeting

• Once consensus on standards activities is reached, a PV Standards WG will be formed

– Target 4th quarter of 2012

KOREA


Next PV Standards Committee and Task Force Meetings 2012 & 2013• Japan

– PV Japan, December 5-7, 2012

• Taiwan

– SEMI Taiwan office, December 21, 2012

• Europe

– PV Fab Managers Forum, Berlin, March 12-13, 2013

• China

– Solarcon China, Shangai, March 18, 2013

• NA

– Spring Standards Meetings, San Jose, CA, April 2-3, 2013

• www.semi.org/standards (calendar of events)


International PV Module Quality

Assurance Forum• Environment-Specific Module Durability Testing

• July 15-16, 2011, San Francisco, CA, USA (Completed)

• Hosted By NREL and AIST, supported by SEMI PV Group.

• There are currently no standards that quickly assess a module’s ability to withstand regional stresses or a module’s durability over decades of use.

• A rating system that provides comparative information about the durability of PV modules against a variety of stresses will be a useful tool to PV consumers and provide a starting point for improving the accuracy of quantitative PV lifetime predictions.

• Proceedings at

– http://www.nrel.gov/ce/ipvmqa_forum/proceedings.cfm


International PV Module Quality

Assurance Forum

• A standard PV module rating system would be valuable for:

– Incentive programs: define a minimum durability for module designs

– Investors: reduce interest rates for modules meeting a minimum criterion

– Insurance companies: reduce rates for modules meeting a minimum criterion

– Community: reduce installed PV cost by providing durability standards that lead to the desired durability without adding unnecessary cost

– PV module suppliers: optimize module design to minimize cost and secure desired reliability for specific market/customer

– PV module materials suppliers: reduce cost of materials by better communication with customers.


For more information:

• www.pvgroup.org/standards

• www.semi.org/standards


Contact Information• PV Standards – General

– James Amano ([email protected])

• PV Standards – Europe

– Yann Guillou ([email protected])

• PV Standards – North America

– Kevin Nguyen ([email protected])

• PV Standards – Japan

– Hiro’fumi Kanno ([email protected])

• PV Standards – China

– Kris Shen ([email protected])

• PV Standards – Taiwan

– Catherine Chang ([email protected])

• PV Standards – Korea

– Natalie Shim ([email protected])

• PV Standards – India

– Vijay Kundaji ([email protected])


Outline


• Why SEMI/PV Group?

• Global SEMI PV Committee Organization and

Charter




SEMI : The Global Association

• SEMI products and services include:• Expositions: SEMICON®, FPD, PV• International Standards

• Market research & statistics• Public policy/EHS• Technical & Business Conferences • Website: semi.org

SEMI is the industry association serving the

manufacturing supply chains for the

microelectronic, display and photovoltaic

industries.

HsinchuHsinchu

SeoulSeoul TokyoTokyo

SingaporeSingapore

BeijingBeijing

San JoseSan Jose BrusselsBrussels

MoscowMoscow

Washington DCWashington DC

ShanghaiShanghai HsinchuHsinchu

BerlinBerlin

BangaloreBangalore


About PV Group

•SEMI members actively involved in PV manufacturing form the PV Group to address opportunities and obstacles to bringing low-cost PV technology and sustainable clean energy to the world.


Why Standards?

• Define interfaces (hardware and software)

• Clearly characterize materials

• Improve supply chain communication

• Optimize environment, health and safety for the operators and others in the industry

• Results

– Cost reduction

– Focus on product differentiation

– Acceleration of product development

– Accepted verification procedures (test methods)


Economic Impact of Standards• US National Institute of Standards and Technology (NIST)

Study

– Calibration, Standard Test Methods, and Software Standards

• $9.6 billion in benefits between 1996 and 2011

• Association Française de Normalisation (AFNOR) Study

– Over 70% of companies participating in standardization reported that it enabled them to anticipate future market requirements

• German Industry Study (DIN)

– Standards contribute more to economic growth than patents and licenses

• UK Department of Trade and Industry

– Standards contribute £2.5 billion annually to economic growth in the UK


SEMI International Standards

Program History• Key Topics

– 1973• Silicon Wafers

– Late 1970’s• Chemicals and Gases• Metrology• Facilities

– Late 1980’s• Factory Automation

– Early 1990’s• Safety Guidelines

– 1994• 300mm

– 2007• Photovoltaics

– 2008• 450mm

– 2011• HB LED and 3DS-IC

• New Regions– 1973

• United States

– 1980’s

• Japan

• Europe

– 1990’s

• Taiwan

• Korea

– 2010

• China


Document Development Path

• Technology Trends

• Suppliers

• Users

• Other Stakeholders

INDUSTRY NEEDS

Use

Ballot

Submission

Ballot Distribution

Approval

Draft

(Task Force)

Idea to

Committee

Ballot

Voting /Tallying

Publishing

Ballot

Adjudication

Procedural

Review


The SEMI Standards Program Today

• All aspects of an automated fab are addressed

• Over 4000 volunteer experts

– 23 global technical committees

– 200 task forces

• Currently over 800 SEMI Standards and Safety Guidelines available


High Profile SEMI Standards

• Wafer Dimensions

• Metrics

– Factory efficiency, equipment reliability, and availability

• Equipment Interface

– SEMI Equipment Communication Standards (SECS)

– Generic Equipment Model (GEM)

• Environmental, Health and Safety

– Safety for semiconductor (S2) and FPD (S26)

– Energy conservation (S23)

• 300 mm, 450 mm

– Automated Material Handling Systems

• Photovoltaic

– Materials, equipment communications

• Anti-counterfeiting / Product Authentication


Organizational Structure

SEMI Board of Directors Oversees the SEMI Standards Program

International Standards

Committee

Develops and maintains the SEMI Standard Regulations. Oversees

program coordination among geographical regions

Regional Standards

Committee

Provides continuing supervision of standards development in a

given geographical area

Technical Committees Provides the technical expertise in the standards process

Subcommittees Oversees task force activities and submits their reports to the

technical committee

Task Forces Develops and maintains most of the standards


Get involved!

• Get your company support

• Register at http://www.semi.org/standards

– Sign up for Standards Watch Newsletter

• Establish ties with other regions’ Technical Committees and Task Forces

– Gather information on activities and trends

– Attend regional meetings

• Use SEMI Standards

– Benefit from cost reduction

– Download from SEMI Standards Web Site

– Purchase a SEMIViews license


Chroma ATE INC

CI Industrial Safety Consulting, LLC

CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH

CMS/ITRI

Conexant Systems

Cook Engineering, Inc.

Covalent Materials Corporation

Daewon SPIC

Daihen Corporation

Dainichi Shoji K.K.

DAINIPPON

Delsolar

Despatch Industries

Deutsche Solar AG

Dow Corning

DuPont De Nemours International S.A.

DuPont Teijin Films

ECN Solar Energy

Energy Innovation Associates

ENspring

Entegris, Inc.

Evans Analytical Group

Ever Energy Co. Ltd.

Evergreen Engineering

Exponent Inc.

Fraunhofer

Freiberg

Fuji Electric Advanced Technology Co., Ltd.

GEASOL ltd

Gintech Energy Cooperation

Gnostic Systems

Complete list - Companies Involved in

Developing SEMI PV Standards [1/2]6N Silicon Inc

a2peak power Co.,Ltd.

Accademia Europea Bolzano

acp-IT AG

Adema Technologies Inc

advanced clean production Information Technology

Air Liquide

Air Products

Air Products and Chemicals, Inc.

AIS Automation Dresden GmbH

AIST

Applied Materials

Applied Spectra, INC

Asahi/America, Inc.

Ascari Limited

Atelier Ishikawa

ATMI

BayTech Group

BEIJING SEVENSTAR ELECTRONICS CO.LTD

Bosch Solar Energy AG

BP Solar

Brewer Science

Bruce Technologies Inc

BT Imaging

CA Solar

camLine

Canon ANELVA Corporation

centrotherm photovoltaics Asia

Centrotherm Thermal Solutions GmbH + Co. KG

C-Gerhards GmbH i.G

CH2M Hill

Gnostic Systems

GTsolar

Haas Training Solutions

Hager + Elsässer

Heltina AG

Hemlock Semiconductor Corporation

Hirata Corporation

Hitachi Kokusai Electric Inc.

Hong Ming Technology Co., Ltd.

Hynix Semiconductor Inc.

IAPMO

ICL Performance Products LLC

IE&S GmbH

IIT Roorkee

Industrial Technology Research Institute

InnoLas Semiconductor GmbH

InReCon AG

Institut für Solarenergieforschung

Instituto Tecnologico Superior de Irapuato

ITRI

Japan Radio Co.,Ltd.

Japan Solar Silicon

JC's Chunson Limited

Jonas&Redmann Automationstechnik GmbH

KANEKA CORPORATION

KesslerConsult

KEYENCE

King Design Industrial Co., Ltd.

KLA-Tencor


Companies Involved in Developing

SEMI PV Standards [2/2]Korea Institute of Lighting Technology

Lanco Solar Pvt Ltd

Lewis Bass International Inc

LG Electronics, Inc.

LG. Display

Linde LLC

M+W Zander FE GmbH

Malema Engineering

Manz Automation AG

Materials & Metrology

Matheson Tri-Gas

MEMC Electronic Materials, Inc.

Meyer Burger AG

Micronit

Mitsubishi Electric Corporation

Mitsubishi Heavy Industries,LTD

Mitsuishi Bussan Corporation Limited

Mizuho Information & Research Institute, Inc.

MOSERBAER PHOTOVOLTAIC LIMITED

Motech (Solar Division)

Nippon Steel Corp.

Nisshinbo Mechatronics Inc.

NIST

Nokia Siemens Networks

NREL

NS Solar Material Co., Ltd.

NSN

OC Oerlikon Balzers AG

OCI

Omron

Op-tection GmbH

OptiSolar

Orient Service Corporation

Pall Corporation

Parker Hannifin

PEER Group GmbH

Polar Star Research, LLC

Prediktor AS

PVTC/ITRI

Q-Cells SE

QSES Inc.

R.A.Smythe, Management Consultants

RAPT Industries, Inc.

Raytex Corporation

REC Silicon

RENA GmbH

Roth & Rau - Ortner GmbH

RTS Corporation

Safe Techno Limited

Salmon Leap Associates India (p) Ltd

Salus

Schott Solar AG

Semilab

Semisol

SEMITRAC

Sentech Instruments GmbH

Sigma-Aldrich

Silicon Solar

Siliken Chemicals

SINTEF Materials and Chemistry

Sinton Instruments

SITEX 45 SRL

Sixtron Advanced Materials

Solar World

SolarTech

Solland Solar Cells GmbH

SPIL

SUMCO

Sunicon AG

Suntech Power Holdings Co., Ltd.

Swagelok

Tainergy Tech Co., Ltd

TAIYO NIPPON SANSO CORPORATION

The Scatter Works, Inc.

TNO Industrie en Techniek

Tokuyama corporation

Tokyo Electron Ltd.

Toray Research Center,Inc.

Tronic International Pte Ltd

TUV

ULVAC

Underwriters Laboratories Taiwan

UNI3 Ssytem Co., Ltd.

Universidad Carlos III de Madrid

University of Oxford

Voltaix. LLC

VQC

Wacker Chemie AG

Yaskawa Electric Corporation

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