Model OEM Part Number Part Description Image PacTec Part #

5500(116539-8501/321)

4022.454.73941Included:116539-

0003.020/376

Blocking Filter Assy (may be called WG UV Filter Halter 400

c Zeiss, 4022.454.7394.1),

82014

5500 SERV.502.27023OFF-AXIS RED

LASER(JDSU

1135P,10mW)85001

5500 SERV.455.09864OFF-AXIS GREEN

LASER4711-050-1001

(silver controller)4802-1001

85006

5500 SERV.455.09864OFF-AXIS GREEN

LASER (bronze controller)

85002 - RE

5500 4022.454.3311.1 Interference Filter(Exchange Frame) 82011

5500 4022.454.3311.1 Interference Filter(Frame Included) 82013

5500/300/350/500/550

/700/750454.48131

Position A248nm (KrF)

UVFS82003

ASMLNew Replacement Parts

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Ed West (360) 719-1822 11/12/2015

Model OEM Part Number Part Description Image PacTec Part #

5500/300/350/500/550

/700/750454.48121

Position B248nm (KrF)

UVFS82004

5500/300/350/500/550

/700/750454.48111

Position C248nm (KrF)

UVFS82005

5500/300/350/500/550

/700/750454.48131

Position A248nm (KrF)

CaF286001

5500/300/350/500/550

/700/750454.48121

Position B248nm (KrF)

CaF286002

5500/300/350/500/550

/700/750454.48111

Position C248nm (KrF)

CaF286003

PAS + AT 5500800/850/860 4022.456.12101

Position A248nm (KrF)

UVFS82018

PAS + AT 5500800/850/860 4022.456.12112

Position B248nm (KrF)

UVFS82019

PAS + AT 5500800/850/860 4022.456.12122

Position C248nm (KrF)

UVFS82020

ConfidentialPage 2

Ed West (360) 719-1822 11/12/2015

Model OEM Part Number Part Description Image PacTec Part #

PAS + AT 5500800/850/860 SERV.456.12101

Position A248nm (KrF)

CaF286010

PAS + AT 5500800/850/860 SERV.456.12112

Position B248nm (KrF)

CaF286011

PAS + AT 5500800/850/860 SERV.456.12122

Position C248nm (KrF)

CaF286012

PAS + AT 1100 4022.456.00752Position A

193nm (ARF) S03CaF2

82015

PAS + AT 1100 4022.456.00762Position B

193nm (ARF) S03CaF2

82016

PAS + AT 1100 4022.456.00772Position C

193nm (ARF) S03CaF2

82017

XT 1400/1400i/1450

GSERV.486.25383

Position A 193nm (ARF) DryCYMER XLA-165

CaF286015

XT 1400/1400i/1450

GSERV.486.25393

Position B193 nm (ARF) DryCYMER XLA-165

CaF286016

ConfidentialPage 3

Ed West (360) 719-1822 11/12/2015

Model OEM Part Number Part Description Image PacTec Part #

XT 1400/1400i/1450

GSERV.486.25403

Position C193nm (ARF) DryCYMER XLA-165

CaF2 86017

5500/300/350/500/550

SERV.454.543714022.454.54371

Beam Delivery Entrance Window BS Assy 248nm

82006

5500/60/80/125 4022.435.6771.1 Blockfilter 1000W

Stepper, UV Filter 82010

5500/300,/350,/500,/550,/700,/750,/800,/850,/860,/8TFH-

SERV.454.548324022.454.54832

BMU Coupling MirrorBeam Measuring

Unit Mirror 1%82023

5500/500/550/700/750/800/850/860/8T

FH-ASERV 455.809024022.455.80902

Beam Delivery Entrance Window

BMUStepper, 248nm

82026

ConfidentialPage 4

Ed West (360) 719-1822 11/12/2015