Table type SEM Normal SEM
Small footprint Reasonable price
User-friendly operationHigh-performance equipment
Easy installation of various options
Superior performance Reasonable priceQuick vacuum system
Reasonable price Easy to measure large sample
PS 230MH (M l)PS-210 PS-230MH (Manual) PS-250AH
PS-230AH (Motor)
1) Resolution : 5nm (30kV, SE Image)
2) Magnification : 30x ~ 100,000x
3) Accelerating Voltage : 0.5kV to 30kV (30 steps)
4) Detector : Secondary Electron Image / Backscattered Electron Image *optional4) Detector : Secondary Electron Image / Backscattered Electron Image optionalX-ray Image – High resolution EDS system *optional
5) Electron Gun : Tungsten (W) hair pin type filament (Precentered Cartridge exchange)
6) Lens system : Two-stage Electromagnetic : Condensor LensOne-stage Electromagnetic : Objective Lens
7) Detector type : E-T Detector (SEI), Solid state (4channel-BSE)
8) Stage Movement : 5-axis system (X, Y, Z, R, T 5-axis Motorized)X,Y-axis : 0 to 35mm, Z-axis : 5 to 35mm, R-axis : 360(Continuous) , T-axis : 45
9) Image shift : ± 50 µm at WD 10mm
10) Max specimen size m : 70mm diameter x 30mm height10) Max specimen size m : 70mm diameter x 30mm height
11) Data Display : Accelerating voltage, Spot size step, Magnification, Micron bar, Working distance, Date, Image mode
12) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment
13) Vacuum system : Full Automation / High VacuumRotary Pump or Diaphragm pump *optional / Turbo Molecular PumpHigh Vacuum : Start up in 3 minLow Vacuum *optional
14) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment
15) Easy Operation Function : Navigation system for easy operation by CCD camera imageMultiple sample holder (Max 7 sample stub possible)IR Chamber ScopeIR Chamber Scope
16) Power : 220V +/- 10%, 50/60Hz single phase
17) Consumption : 1.5kW
18) Room Temperature : 15 to 25 °C
19) Relative Humidity : 60% or less
20) Dimension & Weight : W x D x H = 480 x 624 x 722 mm / 100kg
1) Resolution : 3nm (30kV, SE Image)
2) Magnification : 30x ~ 300,000x
3) Accelerating Voltage : 0.5kV to 30kV (30 steps)
4) Detector : Secondary Electron Image / Backscattered Electron Image *optional4) Detector : Secondary Electron Image / Backscattered Electron Image optionalX-ray Image – High resolution EDS system *optional
5) Electron Gun : Tungsten (W) hair pin type filament (Precentered Cartridge exchange)
6) Lens system : Two-stage Electromagnetic : Condensor LensOne-stage Electromagnetic : Objective Lens
7) Detector type : E-T Detector (SEI), Solid state (4channel-BSE)
8) Stage Movement : 5-axis system (X, Y, Z, R, T 5-axis Motorized)X-axis : 0 to 50mm, Y-axis : 0 to 40mm Z-axis : 5 to 40mm, R-axis : 360(Continuous) , T-axis : -10 to 90
9) Image shift : ± 50 µm at WD 10mm
10) Max specimen size m : 100mm diameter x 35mm height10) Max specimen size m : 100mm diameter x 35mm height
11) Data Display : Accelerating voltage, Spot size step, Magnification, Micron bar, Working distance, Date, Image mode
12) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment
13) Vacuum system : Full Automation / High VacuumRotary Pump or Diaphragm pump *optional / Turbo Molecular PumpHigh Vacuum : Start up in 3 minLow Vacuum *optional
14) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment
15) Easy Operation Function : Navigation system for easy operation by CCD camera imageMultiple sample holder (Max 7 sample stub possible)IR Chamber ScopeIR Chamber Scope
16) Power : 220V +/- 10%, 50/60Hz single phase
17) Consumption : 4 kW
18) Room Temperature : 15 to 25 °C
19) Relative Humidity : 60% or less
20) Dimension & Weight : W x D x H = 600 x 80 x 1390 mm / 220kg
1) Resolution : 3nm (30kV, SE Image)
2) Magnification : 30x ~ 300,000x
3) Accelerating Voltage : 0.5kV to 30kV (30 steps)
4) Detector : Secondary Electron Image / Backscattered Electron Image *optional4) Detector : Secondary Electron Image / Backscattered Electron Image optionalX-ray Image – High resolution EDS system *optional
5) Electron Gun : Tungsten (W) hair pin type filament (Precentered Cartridge exchange)
6) Lens system : Two-stage Electromagnetic : Condensor LensOne-stage Electromagnetic : Objective Lens
7) Detector type : E-T Detector (SEI), Solid state (4channel-BSE)
8) Stage Movement : 5-axis system (X, Y, Z, R, T 5-axis Motorized)X-axis: 0 to 70mm, Y-axis: 0 to 60mm, Z-axis : 5 to 60mm, R-axis : 360(Continuous) , T-axis : -10 to 90
9) Image shift : ± 50 µm at WD 10mm
10) Max specimen size m : 140mm diameter x 55mm height10) Max specimen size m : 140mm diameter x 55mm height
11) Data Display : Accelerating voltage, Spot size step, Magnification, Micron bar, Working distance, Date, Image mode
12) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment
13) Vacuum system : Full Automation / High VacuumRotary Pump or Diaphragm pump *optional / Turbo Molecular PumpHigh Vacuum : Start up in 3 minLow Vacuum *optional
14) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment
15) Easy Operation Function : Navigation system for easy operation by CCD camera imageMultiple sample holder (Max 7 sample stub possible)IR Chamber ScopeIR Chamber Scope
16) Power : 220V +/- 10%, 50/60Hz single phase
17) Consumption : 4.5kW
18) Room Temperature : 10 to 30 °C
19) Relative Humidity : 70% or less
20) Dimension & Weight : W x D x H = 680 x 890 x 1460 mm / 240kg
Motion controlFunction controlSEM Image
H.V control / display
Vacuum display
Image control / Image photo
Image capture/ Video recording
Camera color Image
For Navigation control
IR Chamber Scope Live
Image
g
E-beam start S/W
Order of progress : PS-210 (PS-230/250 Camera mounting position is some diffrent)
Home positionImage taken for
navigationDoor openDoor close
Vacuum startE beam ONg E-beam ON
On the color image of the obtained sample holder,
Navigation function
On the color image of the obtained sample holder,If you click on the part you want to measure positionUser convenience function that automatically tracks to that location(Up to 7 samples can be mounted on multi holder)
Ability to select specific magnificationDirect input of desiredDirect input of desired magnification
It is possible to observe in real time whether or not a sample with a high height hits an bj ti lobjective lens.
You can observe in real time whether a collision with the sample occurs (ex : EDS/ BSED : protecting expensive system from collision)
IR Camera ImageIR Camera Image