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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY. Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB. Heat and Power Technology, Stockholm, Sweden. - PowerPoint PPT Presentation
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1 POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB Heat and Power Technology, Stockholm, Sweden
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Page 1: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

Chuanfeng Liu

Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB

Heat and Power Technology, Stockholm, Sweden

Page 2: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Content

Heat and Power Technology, Stockholm, Sweden

1. Objectives of thesis

2. Current UPW system in semiconductor industry

3. Principle of air gap membrane distillation

4. Xzero test facility of Air Gap Membrane Distillation

5. Integrated MD in cogeneration cycle

6. Conclusion

Page 3: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Objectives

•Integrate MD technology into traditional heat and power cogeneration cycle to produce UPW for semiconductor industry

•Theoretical study of membrane distillation

•Experimental study of air gap membrane distillation

•Economic analysis

Page 4: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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UPW Consumption in Semiconductor Industry

Heat and Power Technology, Stockholm, Sweden

•50% of total UPW market worldwide.

• More than 6000 liters UPW for one eight-inch wafer

•1.4-4.8 million liters UPW per day

•The cost of a UPW system in a fab is more than $10 million.

Page 5: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Present UPW Production System

Heat and Power Technology, Stockholm, Sweden

•Reverse osmosis (RO) and Electro-deionization (EDI)

•10-20 KWH per cubic meter UPW

•2-3MW-- 6% of total fab energy consumption

Page 6: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Make-up Section

RawWater

Tank

MultiMedia

Filter

Carbon

Filter Heat

Exchanger Cartridge

Filter

ReverseOsmosisand EDI

BreakTank with NitrogenBlanket

Degas

Primary MixedBed

Exchange

UVSystem

Cartridge

Filter

RejectTo Polishing Loop Section

Page 7: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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UPW Polishing Loop Section

UPWWater Tank

With nitrogenblanket

TOCUV

Heat Exchanger

Polishing Mixed

BedIon

Exchange

GermicidalUV

CartridgeFilter

Ultra Filter

FabTool Use

UPW return line

Drains & Rinse

From Make up section

Page 8: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Principle of Membrane Distillation

Membrane

Hot

Sid

e

Cold side

Page 9: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Advantages of MD

Heat and Power Technology, Stockholm, Sweden

• 100% (theoretical) rejection of non-volatile matters

• lower operating temperatures

• lower operating pressure

• reduced chemical interaction

• reduced vapor spaces compared distillation processes

Page 10: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Flow Diagram Of Xzero Test Facility

Page 11: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Computer Simulation of Membrane Distillation

Hot side

Membrane

Cold Side

Ultra Pure Water

Feed water in

Feed water out

Cold water in

Coldwater out

Heat exchangerHeat Exchanger

Expansion tank

Water_tank

Heatin

Heatout

Module emplyed in Aspen Utilites

Page 12: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Integrated Cogeneration of MD in the Semiconductor Industry

• The power requirement of one typical semiconductor fabrication plant is equal to what 7500 single-family homes consume.

• The average power consumption for the fab is 2.18 KW/m2, and the average cooling load is 1.53 KW/m2.

Page 13: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Combined Heat Recovery Chiller With MD Units

P

Compressor

Expansion Valve

CondenserEvaperator

Air conditioner system MD Water Purification

Heat recovery chiller

Waste Heat From Fab

Page 14: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Combined MD With Waste Heat From Fab

• Total 35-40 MW

• Air conditioner system 4-5MW

• Condenser side 12 MW

• 20,000 l/hour possible with readily available waste heat sources

• About 1/3 of fab UPW requirement

Page 15: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Integrated MD With Power Production

HTCA

JW

LO

LTCA

Membrane Module:

Gas Engine

heat recorvery

JW heat exchanger

LO heat exchanger

Layout for the combined Gas Engine with MD unitGas Engine: 18v34sgA2, WÄRTSILÄ

MD unit: AGMD,XzeroLayout NO.1 with flue gas heat recovery

STAGE1

STAGE2

STAGE3STAGE4STAGE5

STAGE6

Pure Water

Cooling water in

Coolin water out

H eat R ecovery

C oolingW a te r O ut

•36 Mwei (fab electricity demand covered )

•48,000 L/hr (2/3 UPW demand)

Page 16: POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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Conclusion

• Polygeneration is promising in semiconductor industry.

• With CHP and waste heat utilization , up to 65 m3/hr UPW possible for a fab with 5000 wafers production per week.

• Capital cost is around $3 per cubic meter UPW.


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