Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
PolyMEMS:
Plastics in Action
Andreas Richter
18
Andreas Richter
Technische Universität Dresden
Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
Dresden, 20 October 2010
1 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
Polymer synthesis µfluidics & energy sources
182 /
LSI systemsHuman machine confluence Unconventional computing
R. Luther S. Klatt
G. Paschew M. Fischer
R. Greiner
M. Allerdißen
M. Tietze
W. Haas
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
⇒ located at Andreas-Schubert-
Bau with the
polymer chemistry of TUD
182 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
⇒ located at Andreas-Schubert-
Bau with the
polymer chemistry of TUD
Research topics:
Novel approaches of actuator-
182 /
Novel approaches of actuator-
based microsystems
� large-scale integration
� human machine confluence
(virtual and augmented reality)
� unconventional computing
� microfluidics
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
⇒ located at Andreas-Schubert-
Bau with the
polymer chemistry of TUD
Research topics:
Novel approaches of actuator-
182 /
Novel approaches of actuator-
based microsystems
� large-scale integration
� human machine confluence
(virtual and augmented reality)
� unconventional computing
� microfluidics
Presentation:
Microsystems based on smart
polymers
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Intrinsically active polymers
Gel looper„Smart“ or intrinsically active polymers
⇒⇒⇒⇒ extraordinary and fascinating
properties
⇒ spectacular examples
⇒ Insider´s tip in the actuator community
However:
⇒ Technical sensor and actuator
183 /
Gong, J.-P. et al.
Hokkaido University, Sapporo
http://altair.sci.hokudai.ac.jp/g2/gelmachine4_e.html
⇒ Technical sensor and actuator
applications of these materials are
very rare
What are smart polymers and which
properties do they have?
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Intrinsically active polymers
Shape memory
polymerConductive
polymers
0V
„Smart“ or intrinsically active polymers
⇒⇒⇒⇒ extraordinary and fascinating
properties
⇒ spectacular examples
⇒ Insider´s tip in the actuator community
However:
⇒ Technical sensor and actuator
183 /
Lendlein, A. et al.
Angew. Chem. 2002, 41, 2034
Smela, E. et al.
Sens. Act. B 2006, 115, 596
0V
-1VWell-known examples
⇒ shape memory polymers
⇒ conductive polymers
⇒ most suitable characteristics profiles
for microsystems applications:
stimuli-responsive hydrogels
⇒ Technical sensor and actuator
applications of these materials are
very rare
What are smart polymers and which
properties do they have?
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Stimuli-responsive hydrogels
… cross-linked plastic materials
- able to change their volume reversibly and
reproducible more than one order of
magnitude by small alterations of certain
environmental parameters
⇒ highest volume change of solid-state
materials
Ela
sti
cit
y
Range of phase transition
184 /
Reason: Volume phase transition behavior
Vo
lum
e,E
las
tic
ity
Physical Value (T, c, pH)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Stimuli-responsive hydrogels
… cross-linked plastic materials
- able to change their volume reversibly and
reproducible more than one order of
magnitude by small alterations of certain
environmental parameters
⇒ highest volume change of solid-state
materials
184 /
Reason: Volume phase transition behavior
Precondition:
Polymer is at a critical swelling equilibrium
⇒ appears in two phases
⇒ small impairments of the polymer-solution
interactions, e.g., by small changes of T
or c lead to a general change into the
second swelling equilibrium
Separated phase
Polymer-Polymer
interactions
⇒ as smallest volume
as possible
Mixed phase
Polymer-Solution
interactions
⇒ as biggest volume
as possible
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Triggering factors of phase transition
Concentrations of solvents
- neutral hydrogels
10
12
14
16MethanolEthanol1-Propanol2-PropanolAceton
De
gre
e o
f s
we
llin
g
Poly(N-Isopropylacrylamide)
185 /
0 10 20 30 40 50 60 70 80 90 1000
2
4
6
8
Aceton
De
gre
e o
f s
we
llin
g
Solvent content in vol%
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Triggering factors of phase transition
Concentrations of solvents
- neutral hydrogels
Concentrations of ions, pH value
- polyelectrolyte hydrogels
1,6
1,8
2,0
2,2
Fil
m t
hic
kn
es
s i
n µ
m
Polyvinyl alcohol – polyacrylic acid
185 /
0 2 4 6 8 10 12 14
1,2
1,4
1,6
Fil
m t
hic
kn
es
s i
n
pH value
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Triggering factors of phase transition
Concentrations of solvents
- neutral hydrogels
Concentrations of ions, pH value
- polyelectrolyte hydrogels
Temperature 10
12
14
16
18
De
gre
e o
f s
we
llin
g
PNIPAAm
PVME
185 /
Temperature
- hydrogels with:
- LCST
- UCST (not really available)
0 10 20 30 40 50 600
2
4
6
8
10
Temperature in °C
De
gre
e o
f s
we
llin
g
PVME
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Alterable properties
Optical properties
- refractive index
- transmission
- color
Range of phase transition
186 /
n,
Physical value (T, c, pH)
swollen: Refractive index = 1,36
shrunken:Refractive index = 1,46
Kuckling et al., Macromol. 2002, 35, 6377
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Alterable properties
Optical properties
- refractive index
- transmission
- color
Mechanical properties
- Young´s modulus
- softness
Range of phase transition
186 /
- softness
n,
Physical value (T, c, pH)
swollen: E = 13 kPa
shrunken:E = 85kPa
E,
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Alterable properties
Optical properties
- refractive index
- transmission
- color
Mechanical properties
- Young´s modulus
- softness
Range of phase transition
186 /
- softness
Size
- volume
- length, height n,
Physical value (T, c, pH)
swollen: QV = 16
shrunken:QV = 2,1
E,V
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator properties
Muscle-like actuator type
- big volume change
- medium energy density
-3]
101
102
103
SMAMetall
Magn.Formge-dächtnis
Ac
tua
tor
str
en
gth
σσ σσm
ax
[MP
a]
Energy density [Jm -3]
101
102
10
SMAmetall
Hydrau-
licsMagn.
shape
memory
σσ σσ
Electrostriction
Therm. exp.10K
Magnetostriction
Therm. expansion100K
186 /
10-510-6 10-310-4 10-110-2 101110-2
10-1
1
Hydro-gele
dächtnis
Max. Strain εεεεmax
Ma
x. A
ctu
ato
r s
tre
ng
th
Piezo-LS
Piezo
10-510-6 10-310-4 10-110-2 101110-2
10-1
1
-
memory
Piezo
polymer
Piezo
LS
Pneumatics
Human
muscle
Solenoid
Hydro-gels
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator properties
Muscle-like actuator type
- big volume change
- medium energy density
Time behavior
- swelling is diffusion controlled
⇒ size dependent
1cm
Response time
min - hours
hours - days
186 /
⇒ size dependent
⇒ Centimeter size: response time
in h or days
⇒ Micro size: response time
in 100 ms range can be
obtained
1mm
1µm
200µm
-
1µm ms
100 ms – sec.
Microsystems
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Hydrogel-based platform technology
Preconditions:
Fabrication technology
Mechanisms to control
active elements
187 /
active elements
Active elements
in microfluidics:
- micro pumps
- microvalves
- …
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Micro structuring of hydrogels
Photo lithography
- dry films: UV crosslinking
- prepolymer solution:
UV polymerisation
⇒ monolithic microsystems
Microgel preparation
Photo lithography
UV crosslinking UV polymerisation
188 /
Microgel preparation
- Suspension, dispersion, emulsion
polymerisation
size: 20nm … mm
Further methods:
- Electron beam lithography
- moulding polymerisation
- plasma polymerisation
- …
100µm
50µm
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Controllability
Electric controlScience 218 (1982), 467
⇒ ∆V = 90 %
… in 4 days !!
Control of hydrogel microactuators
189 /
Tanaka, T. et al., Science 218 (1982),467
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Controllability
Electric controlScience 218 (1982), 467
⇒ ∆V = 90 %
… in 4 days !!
Optical controlNature 346 (1990), 347
⇒ ∆
Control of hydrogel microactuators
18
⇒ ∆V = 70 %
… limited reversibility !!
9 /
Tanaka, T. et al., Nature 346 (1990), 347
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Heating meander
Channel
Controllability
Electric controlScience 218 (1982), 467
⇒ ∆V = 90 %
… in 4 days !!
Optical controlNature 346 (1990), 347
⇒ ∆
Control of hydrogel microactuators
18
Electrothermic interface
⇒ standard method of electronic control of
hydrogel actuators Gel actuator
Polym. Adv. Techn. 11 (2000), 496-505.
⇒ ∆V = 70 %
… limited reversibility !!
⇒⇒⇒⇒ microfluidic basic elements
9 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Inlet Outlet
Problem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
Microfluidic propulsion
18
Pump chamberHeating
meander
Lab Chip 9 (2009), 613
10 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Inlet
Actuator
Elastic
Membrane
Heating element
FelastFquellProblem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Lab Chip 9 (2009), 613
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
10 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Inlet
Actuator
Elastic
Membrane
Heating element
FelastFquellProblem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Lab Chip 9 (2009), 613
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
10 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
6
8
10
12
14
Vo
lum
e [
µl]
Peristaltic: 0,54µlmin-1
Pulsatile:
Long-time 1,2µlmin-1
1 Stroke 3,31µlmin-1
Problem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Pumping pressure
• pmax = f (Felast) = 1,3kPa
0 2 4 6 8 10 120
2
4
6
Vo
lum
e [
µl]
Time [min]
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
Lab Chip 9 (2009), 613
10 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Problem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
Inlet
Hydrogel actuator
Movable
membranePump chamber
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Lab Chip 9 (2009), 613
b) Displacement micropump
•Due to the membrane the actuator
displaces the liquid
Pumping pressure
• pmax = f (Fswell) = 15kPa
Pump chamberHeating meander
Outlet
Actuator
chamber
Lab Chip 9 (2009), 613
Pumping pressure
• pmax = f (Felast) = 1,3kPa
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
10 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Open
Heater
Actuator chamber
TH ≥ TPT Hydrogel
(shrunken)
Microvalves•Actuator directly placed within the channel
Principle
•Open valve: Heating the valve seat above
TPT
⇒ Hydrogel actuator shrinks
•Closing: switch-off the heater
⇒ below T the hydrogel actuator swells
Microfluidic switching
18
J. Microelectromech. Syst. 12 (2003), 748
(shrunken)
TH < TPT Hydrogel
(swollen)
Closed
Heater
⇒ below TPT the hydrogel actuator swells
11 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
20
25
30
35
20
25
30
35
Tem
pera
ture
in
°C
Flo
w in
µl/
min
Microvalves•Actuator directly placed within the channel
Principle
•Open valve: Heating the valve seat above
TPT
⇒ Hydrogel actuator shrinks
•Closing: switch-off the heater
⇒ below T the hydrogel actuator swells
Microfluidic switching
18
J. Microelectromech. Syst. 12 (2003), 748
0 2 4 6 8 10 12 14 16 18 200
5
10
15
0
5
10
15
Tem
pera
ture
in
Flo
w in
µl/
min
Time in min
⇒ actuator absorbs the liquid during
swelling
⇒ valve closes displacement free
•Excellent properties
• Back pressure up to 8 bar
• Particle tolerance and leakage free
• Response time:
- opening: 300ms
- closing: 1s (uncooled)
⇒ below TPT the hydrogel actuator swells
11 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Microfluidic switching
Microvalves•Actuator directly placed within the channel
Principle
•Open valve: Heating the valve seat above
TPT
⇒ Hydrogel actuator shrinks
•Closing: switch-off the heater
⇒ below T the hydrogel actuator swells
18
Microscopy tool MicCell of GeSiM mbH containing 6
hydrogel microvalves
⇒ since 2004 commercialized by
GeSiM mbH11 /
⇒ actuator absorbs the liquid during
swelling
⇒ valve closes displacement free
•Excellent properties
• Back pressure up to 8 bar
• Particle tolerance and leakage free
• Response time:
- opening: 300ms
- closing: 1s (uncooled)
⇒ below TPT the hydrogel actuator swells
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
Sens. Actuat. B 99 (2004), 579
Sensors 8 (2008), 561
Time
∆∆ ∆∆z
12 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Da
mp
ing
sh
ift
in k
Hz
Fre
qu
en
cy s
hif
t in
kH
z
15
20
25
30
15
20
25
30
⇒⇒⇒⇒ within the area of phase
transition the accuracy of
measurement is ± 0,042 pH units
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
2.50 2.75 3.00 3.25 3.50
Da
mp
ing
sh
ift
in k
Hz
Fre
qu
en
cy s
hif
t in
kH
zpH value
0
5
10
0
5
10
measurement is ± 0,042 pH units
Sens. Actuat. B 99 (2004), 579
Sensors 8 (2008), 561
12 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
1.5
2
2.5
Fre
qu
en
cy s
hif
t in
kH
z
pH 3.11pH 3.19
⇒⇒⇒⇒ within the area of phase
transition the accuracy of
measurement is ± 0,042 pH units
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
0 50 100 150 2000
0.5
1
Fre
qu
en
cy s
hif
t in
kH
zTime in s
pH 1.84 pH 1.84
•Time behavior:
- Solutions with high ionic strength
tResponse = (500 … 800) ms
⇒ real-time measurements
measurement is ± 0,042 pH units
Sens. Actuat. B 99 (2004), 579
Sensors 8 (2008), 561
12 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
⇒⇒⇒⇒ within the area of phase
transition the accuracy of
measurement is ± 0,042 pH units
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
•Time behavior:
- Solutions with high ionic strength
tResponse = (500 … 800) ms
⇒ real-time measurements
measurement is ± 0,042 pH units
12 /
⇒ commercialized by SITA Messtechnik
GmbH
Dresdner Transferbrief 01/2010, 8
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
1mm
•Control device to regulate a concentration
•Design similar to microvalves
• hydrogel acts as both sensor and actuator
Chemical transistor
18
Adv. Mater. 19 (2007), 1109
Inlet
Outlet
T-Sensor
Heater
Hydrogel
Fabricated by GeSiM
1mm
Sens. Actuat. B 125 (2007), 569
13 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
•Control device to regulate a concentration
•Design similar to microvalves
• hydrogel acts as both sensor and actuator
• Transistor characteristics:
- opens if the threshold concentration is
reached50
60
70
µl/
min
]
Transistor characteristics
Regulation of a methanol
concentration in H2O (27°C)
Chemical transistor
18
- closes below the threshold concentration
13 /
2 3 4 5 6 7 8-10
0
10
20
30
40
50
Flo
w r
ate
[µ
l/m
in
cMetOH [mol/l]
cThreshold
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
26
30
34
co
ntr
ol[°
C]
Methanol Ethanol
1-Propanol
•Control device to regulate a concentration
•Design similar to microvalves
• hydrogel acts as both sensor and actuator
• Transistor characteristics:
- opens if the threshold concentration is
reached
Chemical transistor
18
0 2 4 6 8 10 12
14
18
22
Tco
ntr
ol
cAlcohol [mol/l]
Adv. Mater. 19 (2007), 1109
⇒Threshold concentration is adjustable
by control the temperature of the
hydrogel actuator
⇒ different from the fixed threshold of
electronic transistors
⇒ precondition of broad practical use
13 /
- closes below the threshold concentration
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
Intermediate conclusion
18
Chem. Sensors
Chemical
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
14 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
But what is the potential to realize
integrated microsystems?
⇒ new features ?
Intermediate conclusion
18
Chem. Sensors
Hydrodynamic
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
⇒ new features ?
⇒ can be solved big challenges?
14 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
But what is the potential to realize
integrated microsystems?
⇒ new features ?
Intermediate conclusion
18
Chem. Sensors
Hydrodynamic
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
⇒ new features ?
⇒ can be solved big challenges?
Of particular interest are:
• Medium-scale integrated (MSI) systems
(10-100 active components)
•Large-scale integrated (LSI) systems
(>100-10.000 active components)
14 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
But what is the potential to realize
integrated microsystems?
⇒ new features ?
Intermediate conclusion
18
Chem. Sensors
Hydrodynamic
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
⇒ new features ?
⇒ can be solved big challenges?
Of particular interest are:
• Medium-scale integrated (MSI) systems
(10-100 active components)
•Large-scale integrated (LSI) systems
(>100-10.000 active components)
⇒⇒⇒⇒ a LS system integration will be introduced
by an example outside the microfluidics
14 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Infrared image of a resistive heater on
Polymer substrate
Electrothermic interface
Problem:
If dS < dcritical
⇒ than the functionality of the neighbor
component can be affected
Question: Is the electrothermic control
suitable to realize small spacings between the
Actuator
Large-scale system integration
18
RHeat
15 /
suitable to realize small spacings between the
active components?
1mm
ds
ds – Spacing between two hydrogel
components
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
swollenshrunken
Electrothermic interface
Problem: If the
If dS < dcritical
⇒ than the functionality of the neighbor
component can be affected
Question: Is the electrothermic control
suitable to realize small spacings between the
Large-scale system integration
18
• to switch a hydrogel actuator from the fully
swollen state to fully shrunken ⇒ ∆T = 6K
Temperature [°C]
10 20 30 40 50 600
4
8
12
16
Sw
ell
ing
de
gre
e
Adv. Mater. 21 (2009), 979
• active cooling
⇒ dissipates excess heat and keeps the
controlling temperature field stable
⇒ independency from the environment
15 /
suitable to realize small spacings between the
active components?
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Time behavior
Electrothermic interface
• light-induced T-field controlled by
a business video projection system
⇒ black substrate converts the absorbed light
into heat and transmits it directly to the
actuators
Large-scale system integration
18
Adv. Mater. 21 (2009), 979
15 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• T-field occurs nearly in real-time
Time behavior
Electrothermic interface
• light-induced T-field controlled by
a business video projection system
⇒ black substrate converts the absorbed light
into heat and transmits it directly to the
actuators
Large-scale system integration
18
• T-field occurs nearly in real-time
t = 400ms
• stable for a desired period of time
Adv. Mater. 21 (2009), 979
15 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
33
34
35
36
Tem
pera
ture
[°C
]
xA2
x = 6
K• T-field occurs nearly in real-time
Time behavior
Electrothermic interface
• light-induced T-field controlled by
a business video projection system
⇒ black substrate converts the absorbed light
into heat and transmits it directly to the
actuators
Large-scale system integration
18
100 300 500 700 900 110013001500170028
29
30
31
32
Tem
pera
ture
[Distance [µm]
xRes
xA1
xP
∆∆ ∆∆T
Wo
rk
∆∆ ∆∆T
= 6
K
xP = xRes + xA1 + xA2
Pitch
Actuator sizeResolution
Obtained maximum parameters:
DA = 566 A cm-2
xP = 420 µm Adv. Mater. 21 (2009), 979
15 /
• T-field occurs nearly in real-time
t = 400ms
• stable for a desired period of time
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
tactile:
Multimodal modulators
⇒ intermodal display providing
impressions about
⇒ Softness of surfaces
∆E ≈ 70kPa
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
tactile:
Multimodal modulators
⇒ intermodal display providing
impressions about
⇒ Softness of surfaces
∆E ≈ 70kPa
⇒ Outlines
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Knobs
Adv. Mater. 21 (2009), 979
16 /
tactile:
Multimodal modulators
⇒ Outlines
⇒ intermodal display providing
impressions about
⇒ Softness of surfaces
∆E ≈ 70kPa
⇒ Profils and Textures
∆l = 250µm
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Virtual and augmented reality
Haptic touchpad• free programmable keypad
⇒ smart phones
⇒ tablet PCs
⇒ operating consoles
1817 /
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Virtual and augmented reality
Haptic touchpad• free programmable keypad
⇒ smart phones
⇒ tablet PCs
⇒ operating consoles
3D- Percept-System
1817 /
3D- Percept-System• convey the impression,
⇒ to see a virtual object really
and
⇒ touch it and feel it with bare
hands as if it was the real
three-dimensional object
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Thank you for your
attention !
18
attention !
18 /