Home-Made DC Magnetron Sputtering System
Chamber and Gas supply
Chamber, pumps and gas supply
Plasma ON
Mo Target,
2kV
Surface Science Group
Dual magnetron sputtering of mixed oxidesdraftugentbe.webhosting.be/File/presentation_Mexico.pdf · 2012. 7. 4. · Dual magnetron sputtering of mixed oxides D. Depla Linköping(SE)
Documents
REACTIVE PULSE MAGNETRON SPUTTERING FOR THE DEPOSITION …mbedewy/2006_bedewy_reactiveDPMS_Al… · REACTIVE PULSE MAGNETRON SPUTTERING FOR THE DEPOSITION OF HIGH ... Characterization
Energy flux measurements in high power impulse magnetron sputtering
carbon nitride deposition by magnetron sputtering: structural ...
High power impulse magnetron sputtering: Current … power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering André
Structural and mechanical properties of vanadium carbide obtained by DC reactive magnetron sputtering
Technology
Plasma diagnostics focused on new magnetron sputtering ...
livrepository.liverpool.ac.uklivrepository.liverpool.ac.uk/3007522/1/Emergent... · Web viewMetals are grown via DC magnetron sputtering, C 60 is thermally evaporated and amorphous
Magnetron Sputtering Technology - ispc- · PDF filere-radiated heat U-factor. ... 10 / 89. Basics for magnetron sputtering. Ion-surface interaction ... Magnetron Sputtering Technology
Fundamentals of High Power Impulse Magnetron Sputtering · Fundamentals of High Power Impulse Magnetron Sputtering Johan Böhlmark Plasma & Coatings Physics Division Department of
Y2SiO5 coatings fabricated by RF Magnetron Sputtering version SCT_18799.pdf · Y2SiO5 coatings fabricated by RF Magnetron Sputtering Peter Mechnich1, Annika Lange, Reinhold Braun,
A comparative study of direct current magnetron sputtering ...liu.diva-portal.org/smash/get/diva2:929591/FULLTEXT01.pdfReactive direct current magnetron sputtering (DCMS) and high
Discharge Physics of High Power Impulse Magnetron Sputtering/67531/metadc836980/...Discharge Physics of High Power Impulse Magnetron Sputtering André Anders Lawrence Berkeley National
MAGNETRON SPUTTERING OF MULTICOMPONENT …
Reactive High Power Impulse Magnetron Sputtering of Metal
Reactive High Power Impulse Magnetron Sputtering (HiPIMS)langmuir.raunvis.hi.is/~tumi/ps/hipims_gec65th.pdf · Reactive High Power Impulse Magnetron Sputtering (HiPIMS) Reactive High
High Power Density Pulse Magnetron Sputtering Process and ... › wcc › 002 › 021 › wcc12002021.pdf · Keywords: HIPIMS, HPPMS, high power density pulse magnetron sputtering,TiO.
Measurement setup for High Power Impulse Magnetron Sputtering