Precision Vacuum Transmitter
Variation of SCM2100
SCM2100
SCM2100-TPSCM2100 -H
SCM2100-H-TP
SCM2100 -HH
New Product Vacuum Sensor
Jewelry came to sensing element
Saffire TM is Crystal sapphire diaphragm
Newly developed Sapphire element
Sapphire Element
New Material toward next generationConvert flex pressure of sapphire into electronic signalHighest stability due to high temperature immunity of sapphireProvide high stability in range from low to high temperatureHigh anti-corrosivenessPackaged by Tem-Tech’s own technology
Capacitance sensor
Upper electronic pole
Built-in Temp. sensor
Real sized picture
Signal terminalStandard Electronic pole
Structure of sapphire diaphragm
Advantage of rectangular diaphragm
Rectangular sapphire Sensor
Conventional diaphragm
Since detecting diaphragm is situated
at the upper side, Ion matter is blown
onto the diaphragm and deposited
Since the diaphragm is rectangular and situated vertically, less deposition of Ion matter on The diaphragm is seen.
Relative sensing at both sides of diaphragm minimizes off-set.
When the deposition increased, off-set came out and due to it sufficient sensitivity would lose.
Sensing Diaphragm
4.SCM2100 Structure D-SUB
MKS Connector Compatibility
CV Conversion and ASIC Device
MCU ,Analog Circuit
Sapphire Sensor Element
Baffle Board
VCR Connector
KF-16、TUBE etc
High TEMP Model
UP to 200℃
Original Floating Heater construction
High performance at 0.015 to 0.2 Torr(High vacuum)
0℃ 10℃ 20℃ 30℃ 40℃ 50℃
10T Range Calibration Data
MKS (10Torr)
627B
45℃
high Accuracy
SCM2100 10Torr
-10
10
30
50
70
90
0 1000 2000 3000 4000 5000 6000 7000 8000 9000 10000
OUT(mV)
Err
or(m
V)
0.2%reading
sample1
sample2
sample3
sample4
One sensor with very high resolution and stability provides functions of multi-ranges 2ch as option
10V
10Torr500Torr
6V
4V
2V
8V
2Ch OUTPUT Range
10Torr500Torr
㈱テムテック研究所
Modeling:
SCM2100- Model- Sw- Range -Fitting
V :VCR 1/2 (8 VCR) FemaleK :KF-16, (NW 16KF)
OPTIONKF-25 ICF-34 ,others
Pressure Ranges:
11T: 10Torr20T: 20Torr12T: 100Torr13T: 1000Torr
OPTION X kPaA
_ : Normal Type H : 100℃ HeatingHH : 150℃ Heating
_ : No Relay SWTP : with Relay SW
Piston gauge
Standard pressure gauge DHI RPM4
Calibration Station
Standard pressure gauge RPM4 Accuracy 0.008% reading
Serial P3-54553 Date calibrated 06/DEC
http://www.dhinstruments.com/