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MIT Solution Team Manager -
September 2013 / SAP Manufacturing
Shop FlooThe Road to Integrated Man
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Introducing ASMLA cornerstone of the chip industry
Impact on OperationsA lean program to streamline production processes
Program: Shop Floor Control
The IT enabler for achieving business value
Questions
Agenda
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Introducing ASML
A cornerstone of the chip industry
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ASML - A cornerstone of the chip industry
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ASML employees
in US:1,617
Source: VLSI Research/ASML Q4 2012
Over 55 sales and service offices located worldwide
ASML employees
in Europe: 5,068
ASML em
in Asia:
Salesto Europe
27%
sales
to US
69%
sales
to ASI
4%
ASML:
Worlds largest semiconductor equipment vendor
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Moores Law holds steady for more than 40 years
Double
computpower p
At equivpowerconsum
For halfprice
Every 12 years
1970 1975 1980 1985 1990 1995 2000 2005 2010
101
102
103
104
105
106
107
108
109
1010
100
Tra
nsistorsperDie
Memory
Microprocessor
This graphic
shows how h
transistor sh
realized over
Source: Intel
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Overlay down to
2 nanometers
1 nm = 4 silicon atoms
The technical challenges
Stacking layers: what does that mean
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m/sec2
0 10 20 40 7030 50 60 80 90 100 110 120 130
The technical challenges
Acceleration: a comparison...
A stone drops at 9.8 m/sec2
A dragster accelerates at 33 m/sec2
A jet fighter in a catapult at 44 m/sec2
An attack missile at 50 to 120 m/sec2
A TWINSCAN NXT reticle stage at 150 m/sec2
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resulting in the systems that conquered the ma
1984:
PAS 2000Resolution:
>1m
Overlay: 250 nm
1989:
PAS 5000Resolution:
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Impact on Operations
A lean program to streamlineproduction processes
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Or do you want to become the best factory?Does your factory look like this?
What makes the differ
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ASML Manufacturing process
WH
SuppliersBuild OperationsDelivery Operations
+/- 350 Suppliers
Added Value >90%
60 Partners (80%)
+/- 10.000 People
9 Modules /system
18000 m2
2000 Buy in Items /system
+/- 300 goods receipts /day
6-12 months Training / Engineer
2 shifts per day /wk, 1 shift per d
7x24 Test Area
3-8 Systems / week
Suppl iers Bui ld Operations Delivery Op
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ASML Manufacturing process
WH
What makes manufacturing @ ASML special?
Suppl iers Bui ld Operations Delivery Op
Dynamic Master Data - high number of Engineering Changes (100
Rework, Recovery, Repair - continuously due to searching the limitMaster Production Sequences - contain all possible technical depe
Operators - highly educated
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Flow: 8 key changes
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FLOW - High level impact
The "blueprint" is introduced
TaktsRegular rebalanced to improve
cycletime and delivery
Kits are adjusted onbasis of the Takts
After approval:the changes are
implemented
Support andissue resolution
are improved
ImprovedTransparency
Takted way ofworking isintroduced
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Program: Shop Floor Control
The IT enabler for achieving business v
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Shop Floor Control program @ASML
Work InstructionsDynamic customized per machine configuration
Introducing SAP ME
- Fair work packages per operator per shift- Blueprinting & Sequencing tooling
- Real-time monitoring / progress tracking
Production Orders- Customized per customers order
Detailed integral planningof materials, skills, people, cabins, etc.
Alert ManagementReal-time logging & progress trackingof disturbances in production
Management ReportingBased on a single source of truth
MES Machine InterfacingFully automated system qualification
Increased dplanning re
Reduced c
Reduced s
Improved p
Transparen
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Shop Floor Control functions mapped on ISA95
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
Production
OperatorDashboard(GU
I)
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
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Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Production
OperatorDashboard(GU
I)
SAP MII
QuintiqOperational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work PreparationCreate and Release Routing in E
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Work Preparation - Create sub-routings in GRE
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Production
OperatorDashboard(GU
I)
SAP MII
QuintiqOperational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
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Work preparation:RoutingSub-routingWork package per operator
1 2 3 8
4 5
6 7
10 20Main routing in SAP-ECC
Sub-routing in Graphical Routing Editor
Optimized Work Package in SAP-ME1 4 5 8
2 3 6
Operator A
Operator B
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Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Production
OperatorDashboard(GU
I)
SAP MII
QuintiqOperational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work Preparation - Create optimal sequence per ope
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Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Production
OperatorDashboard(GU
I)
SAP MII
QuintiqOperational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Work PreparationRelease routing to SAP ME,report to SAP ECC
M f i E i
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Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Production
OperatorDashboard(GU
I)
SAP MII
QuintiqOperational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: Create Production Order in
M f t i E ti R l O d t SAP
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Manufacturing Execution: Release Order to SAP
Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Production
OperatorDashboard(GU
I)
SAP MII
Quintiq
Operational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
QuintiqOperational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
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M f t i E ti St t 1st R ti St i t
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Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
ProductionOperatorDashboard(GU
I)
SAP MII
Quintiq
Operational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: Start 1stRouting Step in tProduction Operator Das
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Manufacturing Execution: POD d hb
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Machine - Level 1 & 2
MES - Level 3
ERP - Level 4
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
ProductionOperatorDashboard(GU
I)
SAP MII
Quintiq
Operational
Planning
SiemensTCE
Indicenter /
Coach
Test Scripts
SAP
Manufacturing
Execution
SAP ECC
Graphical Routing
Editor
Quintiq
Shift Planning
Quintiq
Operational
Planning
SiemensTCE
RSuite / Coach
Test Scripts
SAP MII - Manufacturing
Integration & Intelligence
Manufacturing Execution: POD accesses dashboarreports, work instructions
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Shop Floor Control impact on FLOW improvemen
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Shop Floor Control impact on FLOW improvemen
Graphical Rodefine bluep
Calculate opt
(in 2 min. ins
Fair Work Packages
per operator, per shift
Dynamic sequencing
Real-time progress tracking
(even available for operator during shift)
Monitoring and reporting
Escalate disturbance
notifications
Assure production
progress
Trigger the just-in-time
delivery of kit carts
Dynamic Work inst
Operator assignme
Execute Work Packages in takt
Disturbance
resolution process
Whats next ?
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What s next ?
This week : Start of Work preparation in PRD
Next week : Final UAT
Sept. 30 : Start Roll-out to 1st
workcentersTill end Q1 : Roll-out in ASML Netherlands
To be planned / follow-up projects:
- Potential enhancements after pilot in EUV factory;
- MESMachine interfacing;
- World-Wide roll-out:USA - Wilton
USA - San Diego
Taiwan - Linkou
- Next step for disturbance resolution (QIM ??)
- Workplace efficiencyUse of Mobile / iPad
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Questions
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