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Page 1: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Course Notes

E&CE 730

Physics and Modeling of Semiconductor Devices

Table of Contents

1 Semiconductor Physics Review 1

2 PN-Junction Diodes 39

3 Bipolar Transistors 94

3 MOS Transistors 198

Prepared by:

Professor John S. HamelDepartment of Electrical & Computer Engineering

University of WaterlooWaterloo, Ontario, Canada

January, 2002

Page 2: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

ii

Principle Textbook References:

References

[Bipolar Diode and Transistor Physics] D. Roulston, Bipolar Semiconductor

Devices. McGraw Hill, 1990, TK7871.86.R68

[MOS Transistor Physics] Y. P. Tsividis, Operation and Modeling of the MOS

Transistor. McGraw-Hill, international edition ed., 1988, TK7871.99.M44T77

[Bipolar Transistor Modeling] I. Getreu, Modeling the bipolar transistor. NewYork, NY: Elselvier, 1978, TK7871.96.B55G47

[MOS Transistor Modeling] N. Arora,MOSFET Models for VLSI Circuit Sim-

ulation, Theory and Pratice. Springer-Verlag, 1993, TK7871.95.A76

[SPICE Models for Diodes, Bipolar, and MOS Transistors] P. Antognettiand G. Massobrio, Semiconductor Device Modeling with SPICE. McGraw Hill,1987, TK7867.S46

[Thin Film Transistors] David W. Greve, Field E�ect Devices and Applications

Prentice Hall, 1998, TK7871.95.G74 (pp. 276-288)

Additional References:

References

[1] P. Ashburn, Design and Realization of Bipolar Transistors. John Wiley & Sons,1988.

[2] J.Lindmayer and C. Wrigley, Fundamentals of Semiconductor Devices. VanNostrand, 1965.

[3] T. Ning and D. Tang, \Method of determining the emitter and base series resis-tances of bipolar transistors," IEEE Transactions on Electron Devices, vol. 31,pp. 409{412, apr 1984.

[4] J.-S. Park, A. Neugroschel, V. de la Torre, and P. Zdebel, \Measurement ofcollector and emitter resistances in bipolar transistors," IEEE Transactions on

Electron Devices, vol. 38, pp. 365{372, February 1991.

[5] Y. P. Tsividis, The MOS Transistor. McGraw-Hill, international edition ed.,1988.

[6] S. Sze, Physics of Semiconductor Devices. John Wiley & Sons, 2 ed., 1981.

Page 3: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

iii

[7] B. Johnson, T. Quarles, A. Newton, D. Pederson, and A. Sangiovanni-Vincentelli, SPICE3 Version 3e User's Manual. Department of Electrical Engi-neering and Computer Sciences, University of California, Berkeley, USA, 1991.

[8] B. Sheu, D. Scharfetter, P.-K. Ko, and M.-C. Jeng, \BSIM: Berkeley short-channel IGFET model for MOS transistors," IEEE Transactions of Solid-State

Circuits, vol. sc-22, pp. 558{565, August 1987.

[9] W. Liu, X. Jin, J. Chen, M.-C. Jeng, Z. Liu, Y.Cheng, K. Chen, M. Chan,K. Hui, J. Huang, R. Tu, P. K. Ko, and C. Hu, BSIM3v3.2 MOSFET Model

User's Manual. Department of Electrical Engineering and Computer Sciences,University of California, Berkeley, USA, 1998.

[10] BSIM3 Website: http://www-device.eecs.berkeley.edu/~bsim3/

Page 4: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

iv

Physical Constants

Electronic charge q = 1:6� 10�19CPlanck's constant h = 6:63� 10�34JsThermal voltage (300oK) VT = kT=q = = 0:026VElectron volt 1eV = 1:6� 10�19JAvogadro's number N = 6:02� 1026kg�1

Velocity of light c = 2:998� 108ms�1

Electronic rest mass mo = 9:11� 10�31kgPermittivity of free space �o = 8:85� 10�12Fm�1

= 8:85� 10�14Fcm�1

Permeability of free space �o = 4� � 10�7Hm�1

Boltzmann's constant k = 1:38� 10�23JoK�1

= 8:617� 10�5eV oK�1

Page 5: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

v

Properties of Some Common Semiconductors and SiO2 at 300o K

Property Si Ge GaAs InSb GaP SiO2

Atomic 28:09 72:60 144:6 236:6 100:7(molecular)weightAtomic density 5� 1022 4:4� 1022 2:21� 1022 2:9� 1022 4:94� 1022

(cm�3)Lattice 0:543 0:566 0:565 0:648 0:545constant (nm)Density 2:33 5:32 5:32 5:79 4:13 � 2:2 (depends upon(g cm�2) processing conditions)Melting 1415 937 1238 525 1470 � 1600point (oC)Energy gap (eV ) 1:12 0:67 1:424 0:18 2:26 8Gap type Indirect Indirect Direct Direct IndirectE�ectivedensity of states:� Nc (cm

�3) 2:8� 1019 1:04� 1019 4:7� 1017 | 1:7� 1019

� Nv (cm�3) 1:04� 1019 6:0� 1018 7:0� 1018 | 2:25� 1019

Intrinsic carrierconcentrationni (cm

�3) 1:5� 1010 2:4� 1013 2� 106 � 1016 8Relative 11:8 16 13:1 15:9 10:2 � 3:85 (depends upondielectric process conditions)constant (�r) (dielectric constant �s = �r�o)Mobility (cm2V �1s�1)(intrinsicsemiconductor)� electron (�n) 1350 3900 8500 8� 104 300� hole (�p) 480 1900 450 1250 150E�ective mass (kg):� electrons (me) 0:33mo 0:22mo 0:063mo

� holes (mh) 0:5mo 0:31mo 0:5mo

Breakdown � 3� 105 � 1� 105 � 4� 105 � 1� 107

electric�eld (V cm�1)

Page 6: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

vi

SPICE 2G Bipolar Transistor Model Parameters

Basic D.C. Parameters

IS Saturation CurrentBF Maximum ideal d.c. forward common-emitter current

gainBR Maximum ideal d.c. reverse common-emitter current

gainNF Forward collector current ideality factorNR reverse collector current ideality factor

Basic A.C. Parameters

RC Collector resistanceRE Emitter resistanceRB Base resistanceIRB Current where base resistance falls halfway

between its maximum and minimum valueRBM Minimum high current value of base resistanceCJE Zero bias emitter-base junction capacitanceVJE Emitter-base built-in junction voltageMJE Emitter-base capacitance voltage exponentCJC Zero bias collector-base junction capacitanceVJC Collector-base built-in junction voltageMJC Collector-base capacitance voltage exponentCJS Zero bias collector-substrate junction capacitanceVJS Collector-substrate built-in junction voltageMJS Collector-substrate capacitance voltage exponentFC CoeÆcient for depletion capacitance in forward biasTF Forward transit timeTR Reverse transit time

Gummel-Poon Model Parameters

IKF Knee current for forward current gain roll-o� athigh currents

IKR Knee current for reverse current gain roll-o� athigh currents

VAF Forward Early voltageVAR Reverse Early voltageXTF CoeÆcient to model impact of lateral base

widening on forward transit time at high currentsVTF Voltage describing dependence of forward transit time

on VBC under saturation conditionsISE Saturation current for emitter-base junction leakageNE Low forward base current ideality factorISC Saturation current for collector-base junction leakageNC Low reverse base current ideality factor

Additional Parameters

EG Semiconductor bandgap to model temperaturedependence of IS

XTI Temperature exponent for e�ect on ISXTB forward and reverse gain temperature coeÆcient

Page 7: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

vii

PTF excess phase shift in a.c. current gain at thetransition frequency

KF Flicker noise coeÆcientAF Flicker noise exponent

Page 8: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

viii

Parameters for SPICE MOSFET Models Levels 1,2 and 3

SPICE Default TypicalSymbol Keyword LEVEL Parameter Description Value Value UnitsVTO VTO 1-3 Zero-bias threshold voltage 1.0 1.0 VKP KP 1-3 Transconductance parameter 2� 10�5 3� 10�5 A=V 2

GAMMA 1-3 Body-e�ect parameter 0.0 0.35 V 1=2

2�F PHI 1-3 Surface inversion potential 0.6 0.65 V� LAMBDA 1,2 Channel length modulation 0.0 0.02 V �1

tox TOX 1-3 Gate oxide thickness 1� 10�7 1� 10�7 mNA NSUB 1-3 Substrate doping 0.0 1� 1015 cm�3

NSS NSS 2,3 Surface state density 0.0 1� 1010 cm�2

NFS NFS 2,3 Surface fast state density 0.0 1� 1010 cm�2

Neff NEFF 2 Total channel charge coeÆcient 1 5 |Xj XJ 2,3 Source/drain vertical junction depth 0.0 1� 10�6 mLD LD 1-3 Source/drain lateral di�usion length 0.0 0:8� 10�6 mTPG TPG 2,3 Type of gate material 1 1 |�o UO 1-3 Surface mobility 600 700 cm2=(V:s)Uc UCRIT 2 Critical electric �eld for mobility 1� 104 1� 104 V=cmUe UEXP 2 Exponential coeÆcient for mobility 0.0 0.1 |Ut UTRA 2 Transverse �eld coeÆcient 0.0 0.5 |

XQC 2,3 CoeÆcient of channel charge share 0.0 0.4 |vmax VMAX 2,3 Maximum carrier drift velocity 0.0 5� 104 m=secÆ DELTA 2,3 Width e�ect on threshold voltage 0.0 1.0 |� ETA 3 Static feedback on threshold voltage 0.0 1.0 |� THETA 3 Mobility modulation 0.0 0.5 V �1

Page 9: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

ix

Parameters for SPICE MOSFET Models Levels 1,2 and 3 (continued)AF AF 1-3 Flicker noise exponent 1.0 1.2 |KF KF 1-3 Flicker noise coeÆcient 0.0 1� 10�26 |IS IS 1-3 Bulk junction saturation current 1� 10�14 1� 10�15 AJS JS 1-3 Bulk junction saturation current 0.0 1� 10�8 A

per unit area�j PB 1-3 Bulk junction potential 0.8 0.75 VCj CJ 1-3 Zero-bias bulk capacitance 0.0 2� 10�4 F=m2

per unit areaMj MJ 1-3 Bulk-junction grading coeÆcient 0.5 0.5 |Cjsw CJSW 1-3 Zero-bias junction perimeter 0.0 1� 10�9 F/m

capacitance per unit lengthFC 1-3 Bulk junction forward bias 0.5 0.5 |

coeÆcientCGBO CGBO 1-3 Gate-bulk overlap capacitance 0.0 2� 10�10 F=m

per unit lengthCGDO CGDO 1-3 Gate-drain overlap capacitance 0.0 4� 10�11 F=m

per unit lengthCGSO CGSO 1-3 Gate-source overlap capacitance 0.0 4� 10�11 F=m

per unit lengthRD RD 1-3 Drain series resistance 0.0 10.0 RS RS 1-3 Source series resistance 0.0 10.0 Rsh RSH 1-3 Source/drain sheet resistance 0.0 30.0 per square

Page 10: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

x

Parameters for SPICE MOSFET Models Levels 4 (BSIM)

SPICE Length/WidthSymbol Keyword Parameter Description Units DependencyVfb VFB Flat-band voltage V yes2�F PHI Surface inversion potential V yes

K1 K1 Body e�ect coeÆcient V 1=2 yesK2 K2 Drain/source depletion charge-sharing coeÆcient | yes� ETA Zero-bias drain-induced barrier-lowering coeÆcient | yes

MUZ Zero-bias mobility cm2=V � s�L DL Shortening of channel length �m�W DW Narrowing of channel width �mUo UO Zero-bias transverse-�eld mobility degradation coeÆcient V �1 yesU1 U1 Zero-bias velocity saturation coeÆcient �m=V yes

X2MZ Sensitivity of mobility to substrate biasat VDS = 0 cm2=V 2

� s yesX2E Sensitivity of drain-induced barrier lowering e�ect to

substrate bias V �1 yesX3E Sensitivity of drain-induced barrier lowering e�ect

to drain bias at VDS = VDD V �1 yesX2U0 Sensitivity of transverse �eld mobility degradation e�ect

to substrate bias V �2 yesX2U1 Sensitivity of velocity saturation e�ect

to substrate bias �mV �2 yesMUS Mobility at zero substrate bias and at VDS = VDD cm2=V 2

� sX2MS Sensitivity of mobility to substrate bias

at VDS = VDD cm2=V 2� s yes

X3MS Sensitivity of mobility to drain bias at VDS = VDD cm2=V 2� s yes

X3U1 Sensitivity of velocity saturation e�ectto drain bias at VDS = VDD �m=V 2

tox TOX Gate oxide thickness �mT TEMP Temperature at which parameters were measured oC

VDD VDD Measurement bias range VCGDO CGDO Gate-drain overlap capacitance per channel width F=mCGSO CGSO Gate-source overlap capacitance per channel width F=mCGBO CGBO Gate-bulk overlap capacitance per channel length F=m

XPART gate-oxide capacitance-charge model ag |no NO Zero-bias subthreshold slope coeÆcient | yesnb NB Sensitivity of subthreshold slope to substrate bias | yesnd NB Sensitivity of subthreshold slope to drain bias | yesRsh RSH Drain and source di�usion sheet resistance per squareJs JS Source/drain junction current density A=m2

PB Built-in potential of source/drain junction VMJ Grading coeÆcient of source/drain junction |

PBSW Built-in potential of source/drain junction sidewall VMJSW Grading coeÆcient of source/drain junction sidewall |

Cj CJ Source/drain junction capacitance per unit area F=m2

Cjsw CJSW Source/drain junction sidewall capacitance per unit length F=mWDF Source/drain junction default width mDELL Source/drain junction length reduction m

Page 11: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 1

1 Semiconductor Physics Review

E&CE 730Physics & Modeling of Semiconductor Devices

Prepared by:

Professor John S. HamelDepartment of Elecrtrical & Computer Engineering

University of WaterlooWaterloo, Ontario, Canada, N2L 3G1

January, 2002

Page 12: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 2

Semiconductor Physics Review

Metals, Insulators, and Semiconductors

� When atoms combine to form solids, the outer most electrons (valence

electrons) of each atom interact between atoms to form bonds.

� Since quantum mechanics forbids electrons from occupying the same

precise quantum state, the allowed energies of the valence electrons

from all atoms comprising the crystal spread out into an energy band

called the valence band.

� The next allowed energy state of each individual atom in the solid also

spreads out due to the interaction between atoms forming another

higher energy band called the conduction band.

� If the temperature is above zero degrees Kelvin, electrons can be ex-

cited from the valence band to the conduction band leaving a vacant

position or hole in the valence band that appears to be a positively

charged particle.

� The di�erence in energy between the valence and conduction band

edges is known as the bandgap Eg.

� An insulator has a much larger bandgap than a semiconductor or metal

and is therefore much less conductive.

� A metal has a negative bandgap since the bottom of the conduction

band is lower in energy than the highest energy level in the valence

band resulting in a considerable number of electrons in the conduction

band giving rise to a high electrical conductivity.

� A semiconductor has a positive bandgap somewhere between that of

a metal and an insulator.

� A full or empty energy band cannot conduct electricity since there are

no vacant positions in the full band for electrons to move to and there

are no electrons available in an empty band for conduction.

Page 13: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 3

� A partially �lled energy band therefore is required to conduct electric-

ity, such as when some electrons transition from the valence band to

the conduction band.

ValenceBand

ConductionBand

ValenceBand

ConductionBand

Conduction

Band

Valence

Band

Eg

Eg (e.g. 8 eV)

Metal

Insulator

Semiconductor

(e.g. 1.12 eV for Silicon)

a)

c)

b)

o0 K

Valence and Conduction Bands for a) metal, b) insulator, and c)

semiconductor

Intrinsic and Extrinsic Semiconductors

� A semiconductor in which there are only the atoms which comprise

the semiconductor crystal (e.g. silicon atoms) is considered to be in-

trinsic.

� An intrinsic semiconductor has the same number for free electrons and

Page 14: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 4

holes since to create a free electron in the conduction band, an electron

must leave a hole behind in the valance band.

n = p = ni

� Since intrinsic semiconductors have very low conductivity at room tem-

perature, small quantities of impurity dopants (e.g. Phosphorus, (P),

Arsenic (As), and Boron (B) used in silicon and germanium) are in-

troduced to increase the number of free electrons or holes.

� An n-type dopant atom contains one more valence electron than the

semiconductor atoms (e.g. P, As in silicon) and therefore donates an

extra electron to the conduction band if it replaces a silicon atom in

the crystal lattice.

� A p-type dopant atom contains one less valence electron than the semi-

conductor atoms (e.g. B in silicon) and therefore leaves a vacancy or

hole in the valance band if it replaces a silicon atom in the crystal

lattice.

� Doped semiconductors are called extrinsic.

Page 15: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 5

+4 . . +4 . . +4

..

..

+4

..

. . . .

..

+4

..

..

+4 . . +4 . . +4

+5

. . . .

..

..

..

. . . .

..

..

. . . .

.

+3

+4 +4+4

+4

+4+4+4

+4

extra hole

.

extra electron

Donor Impurity

a)bond

silicon atom

b)

Acceptor Impurity

Crystal structure of silicon with a silicon atom displaced by a) a donor

impurity, and b) an acceptor impurity.

Page 16: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 6

E cEd

E v

E c

E v

|E = 1.12 eVg

|E = 1.12 eVg

Conduction Band Conduction Band

Valence BandValence Band

aE

0.05 eV 0.05 eV

Energy

Donor Level

AceeptorLevel

a) b)

n-type silicon p-type silicon

Energy band diagram of a) an n-type semiconductor and b) a p-type

semiconductor

Page 17: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 7

Direct and Indirect Bandgap Semiconductors

� Free electrons and holes in a semiconductor can be thought of as wave

packets in quantum mechanical terms.

� A wavenumber k can be associated with the free electrons and holes

that is proportional to the carrier momentum p such that,

p =h

�=hk

2�

� The crystalline structure and the type of atoms in the semiconductor

determine the relationship between what combinations of energy and

momentum an electron or hole can travel through the crystal in a

particular direction without being interfered with.

� These relationships between energy and momentum are referred to as

dispersion curves, E versus k diagrams, or energy band

diagrams.

� If the bottom of the conduction band in the E versus k diagram cor-

responds to the top of valence band at the same momentum, then the

semiconductor is referred to as an direct bandgap semiconduc-

tor.

� If the bottom of the conduction band in the E versus k diagram does

not correspond to the top of valence band at the same momentum, then

the semiconductor is referred to as an indirect bandgap semicon-

ductor.

Page 18: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 8

Eg

Conduction

Band

Valence

Semiconductor

E

kEg

Conduction

Band

Valence

Direct Bandgap

Semiconductor

E

k

Indirect Bandgap

a) b)

(1.42 eV for GaAs) (1.12 eV for Si)

Energy Band Diagram with E versus k for a) GaAs and b) Silicon

� The simplest approximation assumes that E depends upon the square

of the momentum resulting in parabolic shaped conduction and valence

bands.

E =1

2mv2 classical kinetic energy of a particle

/ (mv)2 = p2 classical momentum squared

Page 19: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 9

E = quantum kinetic energy of a particle

/ p2 / k2 quantum momentum squared

� The periodic electric potentials presented to free electrons and holes

by the charged nuclei of semiconductor crystal atoms in uence their

motions making them appear to have less mass than the actual rest

mass of a free electron in a vacuum.

� Electrons and holes are therefore assigned e�ective mass me and

mh that are expressed as fractions of the rest electron mass mo.

me(Si) = 0:33mo; mh(Si) = 0:5mo

Free Carrier Densities:

Fermi Distribution, Density of States

� To determine how many free electrons there are in the conduction

band and how many free holes there are in the valence band at a given

temperature it is necessary to know two things:

1. How many states are available for electrons and holes at a particular

energy level (density of states function Ne(E), Nh(E)).

2. The probability that an electron will exist at a particular energy

level (Fermi Probability Distribution f(E)).

� The probability that a hole will exist at an energy level in the valence

band is given by (1� f(E)) since a hole is the absence of an electron.

� Actual electron and hole concentrations are given by the product of

the density of states and the probability functions for the particular

carrier type.

� Assuming that energy in the conduction and valence bands is propor-

tional to the square of the momentum (parabolic band approximation):

Ne(E) =4�

h3(2me)

3=2(E �Ec)1=2

Page 20: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 10

Nh(E) =4�

h3(2mh)

3=2(Ev �E)1=2

� h = Planck's constant, me and mh = e�ective masses of electrons and

holes, Ec and Ev = bottom and top of conduction and valence energy

band.

� Fermi Distribution f(E) is given by:

f(E) =1

exp ((E �Ef)=kT ) + 1

� Ef is called the Fermi Energy Level and is de�ned as the energy

where there is a 1/2 probability that an electron will exist at that

energy level.

� If Ef � E, one obtains Boltzmann Statistics where f(E) is

approximated by:

f(E) � exp ((Ef �E)=kT )

oKoK

oK

f(E)1.00.50.0

Ef

E

T = 0 degrees Kelvin

100

300

400

Behaviour of Fermi-Dirac Distribution f(E) at di�erent

temperatures

Page 21: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 11

� Electron Density per unit volume is obtain by integrating the product

of the density of states function for electrons Ne(E) and the probabil-

ity of occupation function for electrons f(E) over all energies in the

conduction band:

no =Z1

Ecf(E)Ne(E)dE

= Nc exp

0B@(Ef �Ec)

kT

1CA if Ef < (Ec � 3kT )

� Likewise, integrating the product of the density of states function for

holes Nh(E) and the probability of occupation function for holes (1�f(E)) over all available energies in the valence band, gives the hole

concentration in the valence band:

po =Z Ev1

(1� f(E))Nh(E)dE

= Nv exp

0B@(Ev �Ef)

kT

1CA if Ef > (Ev + 3kT )

� po is the equilibrium free hole concentration that is determined by

thermally generated holes and doping.

� no is the equilibrium free electron concentration that is determined by

thermally generated electrons and doping.

Page 22: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 12

area = n i

area = n i

N (E)e

N (E)h

N (E)e

N (E)h

Ec

Ei

Ev

f(E)

E EE

kT

kT

a) b) c)

0.5 1.00.0 (1-f(E))

f(E)

a) Density of States Function N(E), b) Fermi-Dirac Function f(E), c)

Product of N(E)f(E) with shaded areas representing intrinsic carrier

concentration ni

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Semiconductor Physics Review, E&CE 730, January, 2002 13

area = p n

N (E)h

N (E)h(1-f(E))

N (E)e N (E)

ef(E)E

c

Ev

f(E)

E EE

a) b) c)

0.0

Ef E d

area = n n

0.5 1.0

Extrinsic carrier dependence on position of Fermi level in conduction and

valence bands.

� Nc and Nv are called the e�ective densities of energy states per

unit volume for electrons and holes, respectively.

Nc = 2

0@2�mekT

h2

1A3=2

Nv = 2

0@2�mhkT

h2

1A3=2

Page 24: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 14

� The Mass Action Law is obtain by multiplying n and p to obtain:

nopo = NcNv exp

0@�Eg

kT

1A = n2i

� Eg = Ec �Ev is the bandgap

� For an intrinsic semiconductor n = p = ni.

� Therefore, for an intrinsic semiconductor one can write,

no = ni = Nc exp

0B@(Ei � Ec)

kT

1CA

po = ni = Nv exp

0B@(Ev � Ei)

kT

1CA

� For an intrinsic semiconductor Ef � Ei, where Ei is approximately

halfway between Ev and Ec or in the mid-gap energy position.

� For an extrinsic semiconductor one can then write,

no = ni exp

0B@(Ef �Ei)

kT

1CA

po = ni exp

0B@(Ei �Ef)

kT

1CA

� The Mass Action Law also holds for extrinsic semiconductors since

nopo is independent of the Fermi Level.

� The Mass Action Law is valid for thermal equilibrium conditions

which implies no current ow or optical generation of excess free elec-

trons or holes.

� The Fermi Level Ef can be used to indicate the number of electrons

and holes.

� As Ef approaches Ec the number of free excess electrons increases,

but the number of free excess holes decreases.

� As Ef approaches Ev the number of free excess holes increases, but

the number of free excess electrons decreases.

Page 25: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 15

� Doping the semiconductor n-type therefore increases the number of

excess free electrons while simultaneously decreasing the number of

excess free holes in accordance with the Mass Action Law.

� The reverse is true for p-type doping.� If a semiconductor contains both n-type and p-type impurities that are

uniformly distributed throughout the semiconductor, then the number

of free electrons and holes per unit volume can be determined by re-

alising that the total net charge anywhere in the semiconductor must

sum to zero (Charge Neutrality Condition) such that,

no +N�

a = po +N+d

� Solving the Mass Action Law and Charge Neutrality Equations gives,

no =1

2

"(Nd �Na) +

r(Nd �Na)2 + 4n2i

#

po =1

2

"(Na �Nd) +

r(Na �Nd)2 + 4n2i

#

� If Nd � Na and Nd � ni, then no � Nd, po � n2i=Nd

� If Na � Nd and Na � ni, then po � Na, no � n2i=Na

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Semiconductor Physics Review, E&CE 730, January, 2002 16

T( K)o

n

N

n

d

100 200 300 400 500 600 7000

ni

Intrinsic

(Si)-3

N = 1x10 cm16

d

Ionization Freezeout

n

N

n

d

Extrinsic

Range

1.0

Electron density to donor concentration ratio as a function of

temperature for silicon

� Excess free electrons and holes can be introduced into the semiconduc-

tor above the equilibrium concentrations by either electrical injection

or optical generation.

� The electrical injection and/or optical generation of excess electrons

and holes places the semiconductor out of thermal equilibrium.

Page 27: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 17

� p̂ is the concentration of excess holes per unit volume above the equi-

librium value.

� n̂ is the concentration of excess electrons per unit volume above the

equilibrium value.

� The total number of free holes is equal to the excess plus the equilib-

rium value such that,

p = p̂ + po

� The total number of free electrons is equal to the excess plus the equi-librium value such that,

n = n̂ + no

� If excess electrons and holes are either injected or optically generated

than the pn product will be greater than nopo = n2i given by the Mass

Action Law.

Current Flow Mechanisms

� There are two mechanisms responsible for current ow within a semi-

conductor:

1. Drift Current - caused by applied electric �eld.

2. Di�usion Current - caused by free carrier concentration gradi-

ents.

Drift Current

� For zero applied electric �eld E = 0, thermal energy causes free carriers

to accelerate thereby resulting in the carriers gaining kinetic energy.

The accelerated carriers then lose the energy by being forced to change

direction (i.e. scattered) by the presence of charged and neutral atoms

in the semiconductor. This process of acceleration and de-acceleration

is repeated continuously.

� The net movement of thermally excited carriers results in zero cur-

rent ow in any particular direction since the direction of accelerated

motion is random.

Page 28: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 18

� If an electric �eld is applied, then this random thermal motion tends

to drift in the direction dictated by E .� The average thermal velocity vth imparted to free carriers thermally

is limited by the frequency with which carriers collide with atoms and

the temperature.

� vth � 107cm=sec for silicon.

Zero Electric Field

a)

Non-Zero Electric Field

b)

Typical path of electrons in a semiconductor crystal a) for no electric

�eld, and b) with electric �eld.

� On average, a free carrier cannot be accelerated in a semiconductor

by an externally applied electric �eld to a velocity faster than vthwhich sets a fundamental limit on the switching speed of conventional

semiconductor devices such as bipolar and MOS transistors.

Page 29: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 19

� For low electric �elds, where the drift velocity vd is much less than

vth, it can be assumed that vd depends linearly upon E such that,

vd = �E� � is referred to as the carrier mobility.

Drift Velocity 10 cm/sec6

10

20

1.0 2.0

Electric Field 10 V/cm4

Electron (Si)

Hole (Si)

Electron (GaAs)

Drift velocity as a function of the electric �eld.

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Semiconductor Physics Review, E&CE 730, January, 2002 20

� The mobility depends upon many factors including:

1. the e�ective mass of the free carrier

2. the type of semiconductor

3. the concentration of impurity dopant atoms

4. the temperature

� Since the e�ective masses of electrons and holes are di�erent, a mobility

for electrons �n and for holes �p must be de�ned.

� The e�ective masses for electrons and holes take into account the in u-

ence of the periodic potential of the semiconductor lattice atom nuclei

on the movement of free carriers.

� Temperature causes the lattice atoms in the semiconductor to vibrate

about their central lattice sites which further reduces the mobility of

carriers | Lattice or Phonon Scattering.

� Ionised and therefore charged �xed impurity dopant atoms further

reduce mobility | Impurity Scattering.

� As temperature increases, the impact of lattice scattering becomes

greater.

� As temperature decreases, the impact of impurity scattering becomes

greater.

� In highly doped semiconductors at lower temperatures, the mobility is

limited by impurity scattering mechanisms.

� In lightly doped semiconductors at higher temperatures, the mobility

is limited by lattice scattering mechanisms.

� The total mobility for a particular carrier is determined empirically by,

1

�=

1

�I+

1

�L

� �I is the mobility if carrier scattering were only in uenced by impurity

scattering.

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Semiconductor Physics Review, E&CE 730, January, 2002 21

� �L is the mobility if carrier scattering were only in uenced by lattice

atom scattering.

T

Mobility Limited by

Impurity Scattering OnlyMobility

Scattering Only

Mobility Limited by Lattice

Mobility as a function of temperature in silicon.

Page 32: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 22

N = 10 cm-313

d

Temperature, K

100 200 300 400 50010

10

2

104

3

Electron

Mobilty

cm /V.sec2

5 x 10

10

10

10

18

18

17

16

Mobility variation with temperature showing the e�ect of lattice and

impurity scattering.

Page 33: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 23

102

103

104

102

103

104

102

103

104

Impurity Concentration, cm-3

Mobility, cm /V-sec

1014

1015

1016

1017

1018

1019

2

Ge

Si

GaAs

T = 300 K

electron

hole

electron

electron

hole

hole

Electron and hole mobilities versus impurity concentration for Ge, Si,

and GaAs at 300 K.

� Electron drift current is given by,

In = �qAnvd = qAn�nE� Hole drift current is given by,

Ip = qApvd = qAp�pE� A is the cross-sectional area perpendicular to current ow.

� Electron current moves opposite to the positive electric �eld and posi-

tive current is de�ned as the direction of positive charge ow which is

Page 34: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 24

opposite to negative electron ow.

� Hole and electron currents add together to form the total current I =

In + Ip.

In

In

A

L

-3n, cm

Current conduction in a semiconductor bar.

� The resistance of a bar of semiconductor of cross-sectional area A and

length L, and that is uniformly doped with Nd and Na impurities per

unit volume is given by,

R =V

I=

V

qA(p�p + n�n)E=

V

qA(p�p + n�n)V=L

=L

qA(p�p + n�n)

= �L

A

Page 35: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 25

� � is the resistivity in ohm� cm and is given by,

� =1

q(p�p + n�n)� cm

� � is the conductivity and is given by,

� =1

��1cm�1

10 1010

1

10

10

10

1016 18 2014

-4

-2

2

Impurity Concentration, cm-3

p GaAs

p Si

n Sin GaAs

T = 300 K

Resistivity, ohm-cm

Resistivity versus impurity concentration in Si and GaAs at 300 K.

� Sheet ResistanceRs is the resistance of a square of a semiconductor

layer of thickness t such that,

Rs = �L

A= �

L

t� L=�

t per square

� Sheet resistance is a convenient parameter with which to calculate

the total resistance of layers of semiconducting material that have a

complicated shape.

Page 36: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 26

I

t

LL

Area = L t

Resistivity

A single square of semiconductor layer for sheet resistance calculation

Di�usion Current

� Di�usion is a phenomenon whereby particles in regions of high con-

centration tend to move to regions of lower concentration thereby con-

stituting a di�usion current.

� Free excess electrons and holes will di�use from regions of higher con-

centration to regions of lower concentration, the rate of ow depending

upon the slope of the concentration as a function of position.

� Electron di�usion current In is given by,

In = qADndn

dx

� Hole di�usion current Ip is given by,

Ip = �qADpdp

dx

Page 37: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 27

� Dn and Dp are the electron and hole di�usivities, respectively.

� Di�usivity is related to mobility by Einstein's Relation:

Dn =kT

q�n; Dp =

kT

q�p;

kT

q� VT

� VT is called theThermal Voltage, and is the equivalent voltage that

would have to be applied externally to obtain a drift current equal to

that which is caused by thermally driven di�usion current.

� VT � 26mV at room temperature of 300o K.

Total Current

� Total electron and hole current is the sum of the drift and di�usion

components such that,

In = qA

0@�nnE +Dn

dn

dx

1A

Ip = qA

0@�ppE �Dp

dp

dx

1A

Page 38: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 28

Generation and Recombination of Excess Carriers

� Generation is the process of creating electron-hole pairs by exciting

an electron from the valence band into the conduction band thereby

simultaneously creating a free electron and hole.

� Generation can by caused both thermally and optically.

� Recombination is the process whereby a free electron in the conduc-

tion band moves back into a vacant position (hole) in the valence band,

whereby a free excess electron and hole are annihilated simultaneously.

> E gh

E

E

c

v

GL

Gth

Rth

U

Band-to-band generation and recombination of electron-hole pairs in a

semiconductor

� Under thermal equilibrium conditions, the rate of thermal generation

of free electron-hole pairs Gth exactly equals the rate of recombination

Rth.

Page 39: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 29

� If excess electrons and/or holes, in excess of the background thermal

equilibrium values, are introduced to the semiconductor by either op-

tical generation at a rate of G or electrical injection, then there will be

additional recombination of carriers at a rate of U as the semiconductor

will attempt to regain thermal equilibrium conditions.

� To optically generate excess carriers, a photon with at least enough

energy to equal the bandgap energy Eg must excite an electron from

the valence band into the conduction band such that,

Ephoton = h� =hc

�� Eg

� � is the frequency of light, c is the speed of light, and � is the wave-

length of light.

� Excess electrons and holes can recombine by either direct or indirect

recombination mechanisms.

� Before recombination can occur, the electron and hole must have the

same momentum since momentum must always be conserved in any

physical process.

� If an electron and hole can recombine without any change in momen-

tum, then the recombination is considered to be direct.

� If an electron can recombine directly, then the energy loss by the elec-

tron will be equal to the bandgap energy Eg which is radiated as visible

light in the form of a photon.

� Indirect recombination occurs if either the electron or hole need to

experience a loss in momentum before recombination is possible.

� The change in momentum is usually accompanied by a loss of energy

as well to a third entity preventing the emission of a photon during

the recombination process.

� One entity that can carry away excess momentum are lattice atom

vibrations which can be thought of as particles called phonons.

Page 40: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Semiconductor Physics Review, E&CE 730, January, 2002 30

� Recombination which involves phonons results in the excess electron

energy being converted into increased lattice vibration which is dissi-

pated as heat.

Eg

Conduction

Band

Valence

Semiconductor

E

kEg

Conduction

Band

Valence

Direct Bandgap

Semiconductor

E

k

Indirect Bandgap

a) b)

(1.42 eV for GaAs) (1.12 eV for Si)

Energy Band Diagram with E versus k for a) GaAs and b) Silicon

� Direct recombination is only possible in semiconductors in which the

lowest energy in the conduction band coincides with the same momen-

tum k as the highest energy level in the valence band.

� These types of semiconductors are called direct bandgap semicon-

ductors (e.g. GaAs).

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Semiconductor Physics Review, E&CE 730, January, 2002 31

� Semiconductors in which the lowest energy level in the conduction

band does not coincide with the same momentum as the highest en-

ergy level in the valence band are known as indirect bandgap semi-

conductors e.g. (Si, Ge).

� Indirect recombination mechanisms dominate in indirect bandgap semi-

conductors making these semiconductors ineÆcient generators of visi-

ble light.

� Phonon-assisted recombination in indirect bandgap semiconductors

does not occur with a very high probability.

� Another entity, referred to as traps, is principally responsible for car-

rier recombination in indirect semiconductors.

� A trap is caused by defects in crystalline structure or certain foreign

impurities (such as metals) that enable an electron or hole to exist at

an energy level in the forbidden gap.

� A trap can therefore capture or trap an electron and a hole to facilitate

recombination.

� A trap assisted recombination will not in general produce visible light

since the energy given o� by the electrons and holes is less than the

bandgap and is usually too small for a visible photon to emerge.

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Semiconductor Physics Review, E&CE 730, January, 2002 32

Valence Band

Conduction Band

Ev

Ef

Ei

E c

E t

1 2

3 4

Generation and recombination via intermediate states or traps

� Trap assisted indirect recombination is the most common form of re-

combination in indirect semiconductors and can be calculated using

the Shockley-Read-Hall (SRH) formula:

U =cmNt(pn� n2i )

n + p + 2ni cosh[(Et �Ei)=kT ]

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Semiconductor Physics Review, E&CE 730, January, 2002 33

� cm is a capture cross-section area, Nt is the concentration of trapping

centres per unit volume, and Et is the allowed energy level of the trap

in the forbidden gap.

� Maximum recombination rate per unit volume of excess carriers U

occurs if the trap energy Et is halfway between the conduction and

valance band edges (i.e. Et = Ei).

� It can be shown that if there are many more excess electrons than

excess holes n � p and n � ni, then recombination is controlled by

the number of excess holes (which are minority carriers) such that,

Up =p̂n�p

� For the opposite case where p � n the recombination rate per unit

volume of excess electrons (which are minority carriers) is,

Un =n̂p�n

� �p and �n are called the hole and electron lifetimes and represent the

average length of time that a free excess hole or electron is expected

to exist before recombining.

� Indirect recombination can also occur at the surface of a semiconduc-

tor.

� In addition to the types of unwanted impurities (e.g. metal ions) that

are found in the bulk of a semiconductor, traps at the surface can

result from unsatis�ed semiconductor atom bonds (dangling bonds)

which gives rise to surface states.

� Most of these dangling bonds can be passivated by the growth of oxide

(e.g. SiO2) at the surface greatly reducing the amount of indirect

carrier recombination at the semiconductor surface.

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Semiconductor Physics Review, E&CE 730, January, 2002 34

a)

b)

x

p

x=0

Surface States

p

pn

E v

Ec

no

Surface

A semiconductor surface depicting the minority carrier distribution

in the vicinity of a surface with surface states.

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Semiconductor Physics Review, E&CE 730, January, 2002 35

Electro-Static Fields and Potentials in Semiconductors

� The electro-static �eld E is given by the negative of the gradient of the

electro-static potential or voltage .

E = �d dx

� Recognising that force F = qE and that work or energy E is de�ned

as force time distance one can write,

E =ZFdx = q

ZEdx = �q

Z d dxdx = �q

� A free electron at energy equal to the lowest available energy level in

the conduction band Ec has only potential energy.

� If an electric �eld is applied, then the free electron gains kinetic energy

which moves it upwards in energy in the conduction band.

� A free hole at energy equal to the highest available energy level in the

valence band Ev has only potential energy.

� If an electric �eld is applied, then the free hole gains kinetic energy

which moves it downwards in energy in the valence band.

� An electric �eld therefore has the e�ect of titling the energy bands as

a function of distance so that the lower energies correspond to higher

positive voltage.

� It is normal to de�ne the zero potential level in a semiconductor to

correspond in energy to the intrinsic energy level Ei midway between

the valence and conduction band edges such that,

= �Ei

q

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Semiconductor Physics Review, E&CE 730, January, 2002 36

potential energy

potential energy

kinetic energy

kinetic energy electric field

a) b)

E v

Ei

E c

Ev

Ei

Ec

of holes

of holes

of electrons

of electrons

Energy band diagram of a semiconductor with a) zero electric �eld, and

b) an electric �eld.

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Semiconductor Physics Review, E&CE 730, January, 2002 37

Poisson's Equation

� The potential or voltage within a semiconductor can be related to the

net charge at any location by Poisson's Equation,

@E@x

= �@2

@x2=q(p +N+

d � n�N�

a )

�s

� �s is the semiconductor permittivity and is given by the product of the

semiconductor relative permittivity �r and the permittivity of free

space �o such that,

�s = �o�r

� For silicon,�s = �o�r = (8:85� 10�14)(11:8) = 1:04� 10�12 Farads per cm

Continuity Equation

� Continuity equations can be written for holes and electrons in order to

keep track of how many holes and electrons are generated, recombine,

and pass through a particular region of a semiconductor from current

ow.

� The continuity equations can be derived by recognising that charge

must be conserved.

� The electron continuity equation is given by,

�1

q

@Jn@x

= G� Un � @n

@t

� The hole continuity equation is given by,

1

q

@Jp@x

= G� Up � @p

@t

� Jn and Jp are electron and hole current densities normalised with

respect to the cross-sectional area perpendicular to current ow.

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Semiconductor Physics Review, E&CE 730, January, 2002 38

J p(x)

q

x

x + x

q

J p

(x + x)

x

lim= 0 x

J p(x)

q q

J p

(x + x)1 1q

x

J p=

Up

x

p (x)

G

Current continuity in a semiconductor.

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PN -Junction Diodes, E&CE 730, January, 2002 39

2 PN-Junction Diodes

E&CE 730Physics & Modeling of Semiconductor Devices

Prepared by:

Professor John S. HamelDepartment of Elecrtrical & Computer Engineering

University of WaterlooWaterloo, Ontario, Canada, N2L 3G1

January, 2002

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PN -Junction Diodes, E&CE 730, January, 2002 40

The PN-Junction in Thermal Equilibrium

DonorAcceptorIon

Hole

IonElectron

Junction

Space Charge Layerp-neutral region n-neutral region

metalcontact

metal

n-sidep-side

contact

Formation of Space Charge Layers and Neutral Regions in a

PN -Junction Diode

� A pn-junction is formed when p-type and n-type semiconductors are

joined together.

� The mechanical boundary between the p and n sides is referred to as

the metallurgical junction or simply the junction.

� The concentration di�erence between holes on the p and n sides results

in holes on the p side near the junction di�using across the junction

to the n side.

� The concentration di�erence between electrons on the n and p sides

results in electrons on the n side near the junction di�using across the

junction to the p side.

� When the holes leave the p side they leave behind un-compensated

ionised acceptor dopant atoms which have a net negative charge.

Page 51: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 41

� When the electrons leave the n side they leave behind un-compensated

ionised donor dopant atoms which have a net positive charge.

� These charged ions (called space charge) give rise to an electric �eld

which eventually becomes large enough to oppose any further di�usion

of holes and electrons across the junction.

� The charged layer in the vicinity of the junction is referred to as the

space charge layer or depletion region since it is nearly depleted of

free electrons and holes.

� Actually, holes and electrons continue to di�use across the junction,

but the electric �eld in the space charge layer results in an opposing

drift current of holes and electrons in the opposite direction resulting in

zero net current in the pn-junction when no externally applied voltage

is present.

� Previously derived expressions for free equilibrium electron and hole

concentrations are given by,

no = ni exp

0@Ef �Ei

kT

1A ; po = ni exp

0@Ei � Ef

kT

1A

� Using V = �Ei=q and de�ning the fermi potential �f = Ef=q � 0

one can write,

no = ni exp

0@ VVT

1A ; po = ni exp

0@�VVT

1A

Page 52: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 42

x

0

-W p Wn

npo

pno

Metal

Contact

Metal

Contact

W

np

( x )p

n( x )

ppo

= N An

no= N

D

-W pnp

( ) Wnp

n( )

p-neutral region space charge layer n-neutral region

x

x

0

0 W

Co-ordinate Systems and Conventions Used for Space Charge Layer

and Neutral Regions in a PN -Junction Diode

� For a pn-junction with a space charge layer that is Wp wide on the p

side and Wn wide on the n side where x = 0 in the centre allows one

to write,

V (Wn) = VT ln

0B@no(Wn)

ni

1CA ; V (�Wp) = �VT ln

0B@po(�Wp)

ni

1CA

� The total potential drop across the junction or built-in voltage Vbi is,

Vbi = V (Wn)� V (�Wp) = VT ln

0B@no(Wn)po(�Wp)

n2i

1CA

Page 53: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 43

� For a uniformly doped p and n sides where p � n on the p side and

n� p on the n side, no(Wn) = ND and po(�Wp) = NA giving,

Vbi = V (Wn)� V (�Wp) = VT ln

0@NDNA

n2i

1A

Energy Band Diagrams for a PN-Junction

� If the Fermi energy level Ef is de�ned as the zero voltage level, then

the electric �eld E becomes the slope of the intrinsic energy level Ei

such that,

E =1

q

dEi

dx= �dV

dx

� where V is de�ned as,

V � �Ei

q

� Hole current density Jp is given by,

Jp = q�ppE � qDpdp

dx

� The di�usion component of hole current can be expressed in terms of

the Fermi and intrinsic levels such that,

qADpdp

dx= ADp

q

kT

0@dEi

dx� dEf

dx

1Ani exp

0@Ei �Ef

kT

1A

= ADppq

kT

0@dEi

dx� dEf

dx

1A

� Likewise, the drift component of hole current can be expressed as,

qA�ppE = Aq

kTDpp

dEi

dx

Page 54: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 44

� Combining the drift and di�usion components of hole current one ob-

tains,

Jp = �ppdEf

dx

� Likewise, one can write for electron current,

Jn = �nndEf

dx

� Therefore, under thermal equilibrium conditions (zero current), the

Fermi level is constant with respect to position, or,

dEf

dx= 0

� It should be noted that, strictly, the concept of a Fermi level Ef is

only valid under thermal equilibrium conditions.

� The concept of a Fermi level can be extended to the case where current

is owing or when light is used to generate excess holes and electrons

such that carrier concentrations are above thermal equilibrium condi-

tion values.

� This is done using separate Quasi Fermi Levels for electrons and

holes.

� For a zero biased pn-junction diode, since no current ows, the Fermi

level must be constant everywhere in the diode.

� Since the Fermi level is constant, the conduction and valence bands

must vary with position across the space charge layer in order to align

with one another across the pn-junction.

Page 55: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 45

Ec

Ev

Ef

iE ( q n

)

qo

( q )p

c)

Ef

Ef

Ec

Ec

Ev

Ev

Ec

Ev

Ef

p-type

Ef

n-type

q(Nd

N a )

p-region

neutral

neutral

n-region

b)

neutral

p-region

neutral

n-region

Depletion Region

xBoundary

Layer

BoundaryLayer

d)

a)

a) Energy bands for isolated p- and n-type regions before contact, b)

Fermi-level alignment, c) energy band diagram after contact, and d)

depletion and neutral regions

Page 56: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 46

Calculating Electric Field and Potential Distribution in an

Abrupt Uniformly Doped PN Junction Space Charge

Layer:

x

0

-W p Wn

npo

pno

Metal

Contact

Metal

Contact

W

np

( x )p

n( x )

ppo

= N An

no= N

D

-W pnp

( ) Wnp

n( )

p-neutral region space charge layer n-neutral region

x

x

0

0 W

Co-ordinate Systems and Conventions Used for Space Charge Layer and

Neutral Regions in a PN -Junction Diode

� Poisson's equation can be used to determine the nature of the internal

electric �eld, internal potential distribution, and width of the space

charge layer.

� To calculate the space charge layer width, the following approximations

will be made:

1. the space charge layer is completely depleted of free carriers | the

depletion approximation.

2. uniform doping on both sides.

3. an abrupt junction.

4. all the applied voltage is dropped across the space charge layer

which implies that the electric �eld outside the depletion region

Page 57: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 47

is zero and the regions outside the space charge layer are charge

neutral.

� Poisson's Equation:

dEdx

=q(p +N+

D � n�N�

A )

�s= �qd

2V

dx2

� for 0 < x < Wn:

dEdx

=qND

�s; En(x) = qNDx

�s+ C1; En(Wn) = 0 =) C1 =

�qNDWn

�s

� therefore,

En(x) = �qND

�s(Wn � x)

Vn(x) = �Z Wn

0En(x)dx =

qND

�s(Wnx� x2

2) + C2

=qND

2�s(2Wnx� x2) + C2

C2 =�qND

2�s(2W 2

n �W 2n) + Vn(Wn) =

�qND

2�sW 2

n + Vn(Wn)

Vn(x)� Vn(Wn) =�qND

2�s(W 2

n � 2Wnx + x2)

=�qND

2�s(Wn � x)2

� similarly, for �Wp < x < 0:

Ep(x) = �qNA

�s(Wp + x)

Vp(x)� V (�Wp) =qNA

2�s(Wp + x)2

Page 58: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 48

� at x = 0 (at the metallurgical junction) Vp(0) = Vn(0):

� therefore,

Vp(0)� Vp(�Wp)� Vn(0) + Vn(Wn) =qNA

2�sW 2

p +qND

2�sW 2

n

= Vbi (built{in voltage)

� at x = 0:

Ep(0) = En(0) =) NAWp = NDWn

� �nding Wn and Wp:

Vbi =qNAW

2p

2�s+qNDW

2n

2�s; Wn =

NA

NDWp

=

0B@qNA

2�s+qND

2�s

N 2A

N 2D

1CAW 2

p =q

2�s

0B@NA +

N 2A

ND

1CAW 2

p

=q

2�s

0B@NAND +N 2

A

ND

1CAW 2

p =q

2�s

0B@NA(ND +NA)

ND

1CAW 2

p

� therefore,

Wp =

vuuuut 2�sNDVbiqNA(ND +NA)

; Wn =

vuuuut 2�sNAVbiqND(ND +NA)

Wscl = Wp +Wn

Page 59: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 49

N d

W p

W nN a

dN N a

x

x

x

np

c)

b)

a)

m

p

nV

VVbi

0

0

0

The step pn junction showing a) space charge distribution, b) electric

�eld, and c) potential diagrams.

Page 60: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 50

Reverse Biased PN-Junction Diode

� if a voltage is applied to reverse bias the pn-junction (negative voltage

applied to the p-side and positive voltage applied to the n-side of the

diode), then the barrier voltage is e�ectively increased by the amount

of the applied reverse bias (VR) above the built-in voltage.

VR = applied reverse bias

Therefore, VR + Vbi =qNAW

2p

2�s+qNDW

2n

2�s

=) Wp =

vuuuut2�sND(Vbi + VR)

qNA(ND +NA)and Wn =

vuuuut2�sNA(Vbi + VR)

qND(ND +NA)

Junction Capacitance

� the space charge on either side of the junction in the depleted space

charge layer behaves electrically like a parallel plate capacitor.

� the following formula for junction capacitance is strictly valid only for

a fully depleted space charge layer. In reality, there are free carriers in

the space charge layer, particularly for forward bias, since electrons and

holes are being injected across the space charge layer under forward

bias conditions.

� the following formula for junction capacitance is most accurate for

reverse bias and can generally be used for low forward biases up to

approximately one half the built-in voltage.

Cj =dQp

dVR=dQn

dVR; Qp = qANAWp; Qn = qANDWp

� A = diode area, Qp = net positive charge on n-side of space charge

layer, and Qn = net negative charge on p-side of space charge layer.

Cj =dQp

dVR= qANA

dWp

dVR= qANA

d

dVR

8>>><>>>:

0B@ 2�sND

qNA(ND +NA)

1CA12

(Vbi + VR)12

9>>>=>>>;

Page 61: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 51

= qANA

0@12

1A0B@ 2�sND

qNA(ND +NA)

1CA12

(Vbi + VR)�12

= A

0B@ q�sNAND

2(ND +NA)

1CA120@ 1

Vbi + VR

1A12

= A

0B@ q�sNAND

2(ND +NA)Vbi

1CA120B@ 1

1 + VR=Vbi

1CA12

=Cjo

(1 + VR=Vbi)12=

Cjo

(1� VF=Vbi)12

� VF = forward bias = �VR

Cjo

Cj

V biV bi /

Simple

More Accurate

Reverse Bias Forward Bias

Theory

Calculation

2 V A

Behaviour of pn junction depletion-layer capacitance Cj as a function of

bias voltage VR.

Page 62: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 52

Forward Biased PN-Junction Diode

----

------

+++++++

+++

F (drift)p

F (diff)p

F (diff)n

F (drift)n

o

o

+++++++

+++

----

------

F (diff)n

F (drift)n

F (diff)p

F (drift)p

oq( V)

qV

++

--

Hole

Electron

Energy

Energy

Depletion

Layer

p n

a)

---

+++

--

++

b)

Energy band diagram of the pn junction under a) thermal equilibrium,

and b) forward bias.

� the e�ect of applying a forward voltage bias (VF ) on the pn-junction

(positive voltage on the p-side and negative voltage on the n-side of

the diode) is to cause the built-in potential barrier to be lowered to an

amount Vbi � VF .

Principle of Detailed Balance

� concentration gradients of holes and electrons between n- and p-sides

result in holes di�using from p- to n-side and electrons di�using from

n- to p-side.

� the electric �eld in the space charge layer results in electrons drifting

from p- to n-side and holes drifting from n- to p-side.

� in thermal equilibrium (no bias), di�usion and drift currents are exactly

balanced and oppose one another to yield zero net ow of current in

the diode.

Page 63: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 53

� if a forward bias voltage is applied, then the balance is upset in favour

of the di�usion currents.

� the e�ect of forward bias is to increase the concentrations of holes and

electrons at the space charge layer edges of the n-neutral and p-neutral

regions, respectively, above their thermal equilibrium values.

Carrier Concentrations in a Forward Biased PN Junction

Diode

x

0

-W p Wn

npo

pno

Metal

Contact

Metal

Contact

W

np

( x )p

n( x )

ppo

= N An

no= N

D

-W pnp

( ) Wnp

n( )

p-neutral region space charge layer n-neutral region

x

x

0

0 W

Carrier Concentrations at Edges of Space Charge Layer in Neutral

Regions in a PN -Junction Diode under Forward Bias Conditions

Page 64: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 54

nno = equilibrium electron concentration on n{side

ppo = equilibrium hole concentration on p{side

npo = equilibrium electron concentration on p{side

pno = equilibrium hole concentration on n{side

� Using the Mass Action Law (for zero bias):

nno(Wn)pno(Wn) = n2i ; ppo(�Wp)npo(�Wp) = n2i

Vbi = VT ln

0B@nno(Wn)ppo(�Wp)

n2i

1CA

= VT ln

0B@ nno(Wn)

npo(�Wp)

1CA

= VT ln

0B@ppo(�Wp)

pno(Wn)

1CA

� therefore for zero bias:

nno(Wn) = npo(�Wp) exp

0@VbiVT

1A

ppo(�Wp) = pno(Wn) exp

0@VbiVT

1A

� for forward bias VF :

nn(Wn) = np(�Wp) exp

0@Vbi � VF

VT

1A

pp(�Wp) = pn(Wn) exp

0@Vbi � VF

VT

1A

Page 65: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 55

� for low to moderate forward bias:

nn(Wn) � nno(Wn) and pp(�Wp) � ppo(�Wp)

np(�Wp) = nno(Wn) exp

0@�VbiVT

1A exp

0@VFVT

1A = npo(�Wp) exp

0@VFVT

1A

� excess minority carrier electron concentration n̂p at the edge of the

p-neutral region near the space charge layer under forward bias condi-

tions is,

n̂p(�Wp) = np(�Wp)� npo(�Wp) = npo(�Wp)

24exp

0@VFVT

1A� 1

35

� also, for holes,

pn(Wn) = pno(Wn) exp

0@VFVT

1A

� therefore, the excessminority carrier hole concentration p̂n at the edge

of the n-neutral region near the space charge layer under forward bias

conditions is,

p̂n(Wn) = pn(Wn)� pno(Wn) = pno(Wn)

24exp

0@VFVT

1A� 1

35

Page 66: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 56

Di�usion Approximation

Metal

Contact

Metal

Contact

ppo

= N An

no= N

D

minority carriers minority carriers

p-neutral region space charge layer n-neutral region

majority carriers majority carriers

Majority Carrier Cancelation of Electric Fields in Neutral Regions | the

Di�usion Approximation

� to calculate the diode current that will result for a given forward bias

voltage VF , the diode can be split into a space charge layer (depleted

of free carriers) and neutral regions.

� the neutral regions are charge neutral in that there are an equal num-

ber of positive and negative charges per unit volume at all positions

within the neutral regions.

� when minority carriers are injected into a neutral region (e.g. holes

into the n-neutral region), charges of opposite sign must be added from

the metal contact to compensate the extra injected charge to maintain

charge neutrality.

� this compensation of injected minority carrier charge eliminates electric

�elds which would otherwise arise within the neutral region.

� if the impurity concentration in a neutral region is constant with posi-

tion (i.e. uniform), then to a good approximation only di�usion current

need be considered as drift current arising from electric �elds will be

negligible.

Page 67: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 57

D.C. Forward Current for a PN-Junction

Wide Diode Case

x

0

-W p Wn

npo

pno

Metal

Contact

Metal

Contact

W

ppo

= N An

no= N

D

pn

( 0 )

pn

( x )n

p( x )

np

( 0 )

p-neutral region space charge layer n-neutral region

x

x

0

0 W

Minority Carrier Distributions in Neutral Regions Under Forward Bias

Conditions

� in n{neutral region, neglecting hole drift current:

Ip(x) = qA(�ppnE �Dpdpndx

) � �qADpdpndx

� also,

� 1

qA

dIpdx

=pn � pno�p(x)

=p̂n(x)

�p(x)

� pn(x) =total minority carrier hole concentration in n{neutral region.

� p̂n(x) = excess minority carrier hole concentration in n{neutral region

� pn(x) = p̂n(x) + pno(x)

� �p(x) = position-dependent hole lifetime in n{neutral region

Page 68: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 58

� A = diode area

� for a uniformly doped pn junction (n-side doped ND),

pno(x) =n2iND

= constant

� therefore,dpndx

=dp̂ndx

; Ip(x) = �qADpp̂ndx

;�1qA

dIpdx

=p̂n(x)

�p(x)

� combining equations yields a second order linear di�erential equation:

Dpd2p̂ndx2

� p̂n�p

= 0

� re-arranging gives,d2p̂ndx2

� p̂nDp�p

= 0

� de�ne Lp �qDp�p which is called \Di�usion Length."

� the di�erential equation can then be written,

d2p̂ndx2

� p̂nL2p

= 0

� assume a form of the solution for p̂n(x) that is exponential:

p̂n(x) = C exp(mx); C = a constant

� therefore,dp̂ndx

= mC exp(mx);d2p̂ndx2

= m2C exp(mx)

� substituting the above into the di�erential equation yields:

m2C exp(mx)� C exp(mx)=L2p = 0

� solving for m yields:

Page 69: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 59

m2 =1

L2p

; m = � 1

Lp

� there are two possible values for m which implies that one needs two

constants of integration C such that the solution for p̂n(x) becomes,

p̂n(x) = C1 exp

0B@�xLp

1CA + C2 exp

0B@ xLp

1CA

� to �nd C1 and C2, one needs \boundary conditions":

� a \Wide" diode by de�nition means that all minority carriers will

recombine with majority carriers before reaching metal contact.

� therefore, the second part of solution involving C2 must always be zero

or,

p̂n(x = W ) = 0 =) C2 = 0

� the constant C1 can be determined from a knowledge of p̂n(0) which is

simply the value of the hole concentration injected into the n-neutral

region at the space charge layer edge.

� therefore,

C1 = p̂n(x = 0) = pno

24exp

0@VFVT

1A� 1

35

� therefore, for a wide diode:

p̂n(x) = pno

24exp

0@VFVT

1A� 1

35 exp

0B@�xLp

1CA

= p̂n(0) exp

0B@�xLp

1CA

� similarly in p{neutral region, for a wide diode:

n̂p(x0) = npo

24exp

0@VFVT

1A� 1

35 exp

0B@�x

0

Ln

1CA

= n̂p(00) exp

0B@�x

0

Ln

1CA

Page 70: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 60

� Ln �pDn�n

� a wide neutral region implies that the width of the neutral region is

much larger than the minority carrier di�usion length (i.e. W >> Lp

or W 0 >> Ln).

� the minority carrier currents then become:

� in the n-neutral region:

Ip(x) = �qADpdpndx

=qADpp̂n(0)

Lpexp

0B@�xLp

1CA

� in the p-neutral region:

In(x0) = qADn

dnpdx

=qADnn̂p(0

0)

Lnexp

0B@�x

0

Ln

1CA

� the total diode current ID is then:

ID = total current = �In(x0) + Ip(x) = In(x) + Ip(x)

� under d.c. bias conditions, the total diode current ID must be constant

everywhere in the external circuit and in the diode.

� neglecting space{charge layer recombination (i.e. hole and electron

currents are constant in space charge region), ID can be conveniently

calculated using the following method:

ID = Ip(x = 0) + In(x = 00) =qADpp̂n(0)

Lp+qADnn̂p(0

0)

Ln

=qADpn

2i

LpND

0@exp

0@VFVT

1A� 1

1A + qADnn

2i

LnNA

0@exp

0@VFVT

1A� 1

1A

= qAn2i

0B@ Dp

LpND+

Dn

LnNA

1CA0@exp

0@VFVT

1A� 1

1A = Io

0@exp

0@VFVT

1A� 1

1A

� if ND >> NA, then I � In(x = 00) =) total diode current is mostly

electron current due to di�usion of electrons in the p-neutral region.

Page 71: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 61

� if NA >> ND, then I � Ip(x = 0) =) total diode current is mostly

hole current due to di�usion of holes in the n-neutral region.

� for diodes where one side is doped much more heavily than the other

side, the low-doped side will determine the amount of current that will

ow for a given bias.

� If one assumes that there is no carrier recombination in the space

charge layer, the electron and hole currents will be constant with po-

sition in the space charge layer.

Page 72: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 62

x 0 0 x

p type

n

p

pno

p

n

n po

n type

a)

x 0

x 0

In

Ip

In

Ip

Ip

In

Ip

In

Carrier Concentration

Minority Carrier Currents

Space Charge

Layer

0 x

0 x

+

b)

c)

I =

Forward biased pn junction showing a) minority carrier distributions, b)

minority carrier currents, and c) electron and hole currents on both sides

of the junction in the neutral regions.

Page 73: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 63

Narrow Diode Case

( 0 )pn

edge

space charge layer

metal

contact

( )pn

x

n-type neutral region

0 W

ND

Minority Carrier Distribution in a Uniformly-Doped \Narrow" Neutral

Region

� if the width of a neutral region is much less than the minority carrier

di�usion length, then most of the minority carriers in that region will

di�use across the neutral region and recombine at the metal contact

instead of in the semiconductor.

� e.g. for holes in an n-type neutral region this condition implies that:

W << Lp =rDp�p

� mathematically, the assumption thatW << Lp is the same as assum-

ing in�nite minority carrier lifetime so that:

Dpd2p̂ndx2

� p̂n�p�= Dp

d2p̂ndx2

= 0:

� the same boundary conditions as for the wide diode are used for the

narrow diode case such that:

Page 74: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 64

p̂n(0) = pno

0@exp

0@VFVT

1A� 1

1A ; p̂n(W ) = 0

� the excess carriers at the metal contact are still assumed to be zero

since they will recombine at the metal contact.

� therefore the excess hole concentration in the n-neutral region for a

\narrow" neutral region becomes,

p̂n(x) = p̂n(0) 1� x

W

!

� the hole current in the n-neutral region is calculated, as before, at

x = 0.

Ip(x) = Ip(0) = �qADpdpndx

1Ax=0

= qADpp̂n(0)

W

=qADppno

W

0@exp

0@VFVT

1A� 1

1A =

qADpn2i

NDW

0@exp

0@VFVT

1A� 1

1A

� since there is no recombination of holes as they di�use across the n-

neutral region, the hole current given above is constant with respect

to position in the diode.

� if n{neutral region is also \narrow" (W 0 << Ln):

n̂p(x0) = n̂p(0

0)

0B@1� x0

W 0

1CA ; and

In(x0) = In(0

0) =qADnn

2i

NAW 0

0@exp

0@VFVT

1A� 1

1A

� it is possible to have a diode where one neutral region is \wide" and

the other is \narrow."

Page 75: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 65

0 W n

n (0)p

p (0)n

P (W n )n

Depletion Layer

a)

+p n

0

b)

W p

A p+n diode with a short n neutral region showing a) structure, and b)

minority carrier distribution in the neutral regions, with the dashed line

corresponding to the hole distribution for a small surface recombination

velocity at the contact.

Page 76: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 66

Reverse Bias Breakdown in PN-Junction Diodes

� two mechanisms are principally responsible for breakdown in reverse

biased pn-junction diodes:

1. Avalanche Breakdown

2. Zener Breakdown

x

0

-W p Wn

nno

ppo

= N A= N

D

Metal

Contact

Metal

Contact

W

npo

pno

p-neutral region space charge layer n-neutral region

x

x

0

0 W

np

( )xp

n( )x

Minority Carrier Charge Concentrations at Space Charge Layer

Edges Under Conditions of Reverse Bias

� to understand how Avalanche Breakdown occurs, it is �rst necessary

to consider the minority carrier concentrations at the edges of space

charge layers for reverse biased junctions.

� for VF << 0 (reverse bias):

p̂n(0) = pno

0@exp

0@VFVT

1A� 1

1A � �pno

Page 77: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 67

� therefore, pn(0) = total hole concentration at s.c.l. edge of n{neutral

region � pno � pno = 0 for large reverse bias.

� also, np(00) = total electron concentration at s.c.l. edge of p{neutral

region � npo � npo = 0 for large reverse bias.

� since np(00) and pn(0) are less than thermal equilibrium values under

reverse bias conditions, carriers are thermally generated within the

neutral region where pn(x) < pno in an attempt to re{attain equilib-

rium.2666664in thermal equilibrium pn = n2irecombination occurs if pn > n2igeneration occurs if pn < n2i

Avalanche Breakdown

� thermally generated carriers in the neutral region at the edges of the

space charge layer, where the total minority carrier concentrations are

less than thermal equilibrium values, are swept across a reverse biased

junction by the build-in electric �eld giving rise to a reverse leakage

current.

� these carriers are replaced by di�usion currents of minority carriers in

the neutral region.

� for reverse bias conditions (VF << 0) this source of leakage current is

given by,

I = Io

24exp

0@VFVT

1A� 1

35 = �Io

� additional leakage current results from carriers being thermally gener-

ated within the space charge layer.

� if the reverse electric �eld in the space charge layer is large enough

(e.g. > 3 � 105V=cm) electrons moving across the junction will gain

enough kinetic energy to ionise atoms creating electron-hole pairs.

� the newly created electron-hole pairs are also accelerated by the electric�eld which can lead to more ionisation and the creation of additional

Page 78: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 68

electron-hole pairs resulting in a chain reaction | avalanche multi-

plication process.

� avalanche multiplication is modeled empirically by,

M =1

1� (VR=VBR)n

� whereM is the multiplication factor, VR is the reverse bias, and VBRis the junction breakdown voltage.

� when VR = VBR, M approaches in�nity which implies that the diode

is in complete breakdown where current is limited only by external

resistance.

� n is an empirical factor which usually takes on values ranging from 3

to 6 for silicon devices.

� the maximum electric �eld Emax occurs at the metallurgical junction

in the space charge layer, and for a uniformly doped abrupt junction

is given by,

Emax =0B@2qNAND(Vbi + VR)

�s(NA +ND)

1CA1=2

� from the equation for maximum electric �eld it can be seen that VBRdecreases with increased doping.

� electric �eld lines tend to concentrate at curvatures in di�used pn-

junction resulting in higher electric �elds in these locations and there-

fore lower breakdown voltages than predicted by the above equation.

Page 79: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 69

reverse saturation

current

breakdown

voltage

VBR

0

I

VF

D

( Io

)

Reverse Bias Diode Current Depicting Breakdown Voltage

Concentrated Field Lines

in Curved Space Charge Layer RegionsIncreased Electric Field Line Density at Curved Sidewall Regions of a

PN -Junction

Page 80: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 70

Zener Breakdown

E c

Ec

q VR

p-side

n-side

Ef

Ef

E

tunneling electrons

E v

v

Electron Tunnelling from Valence Band to Conduction Band Through

Narrow Reverse Biased Space Charge Layer in Zener E�ect

� if the impurity concentrations in the vicinity of the junction are high

enough, then the space charge layer will become very narrow, even for

reverse bias voltages.

� if the space charge layer is narrow enough, electrons from the valence

band on the p-side can be made to tunnel through the potential barrier

of the space charge layer to the conduction band on the n-side resulting

in a reverse current which appears to be avalanche breakdown but is

actually reverse tunnelling current.

Page 81: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 71

� for tunnelling to occur the reverse bias voltage must be such that �lledstates in the valence band are at the same energy level (or potential)

as empty states in the conduction band so that electrons can tunnel

from the valence band on the p-side to the the conduction band on the

n-side.

� diodes which break down at 6 volts or less are generally breaking downdue to the Zener e�ect.

� usually all diodes designed to be used in breakdown mode (e.g. voltage

references) are called Zener diodes, although only the ones which break

down at the lower voltages are actually doing so because of the reverse

tunnelling e�ect.

Page 82: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 72

Transient Diode Behaviour

( 0 )pn

( )pn

x

edge

space charge layer

metal

contact

pa

( x , )ω

p ( x , )ω ej tω

a

n-type neutral region

0 W

ND

A.C. Small Signal Minority Carrier Hole Distribution in an n-Neutral

Region

� stored minority carrier charge in the neutral regions of a pn-junction

diode contribute to capacitance, known as di�usion capacitance Cd,

in addition of the junction capacitance of the space charge layer.

� the di�usion capacitance can be determined from a small signal a.c.

solution to the time dependent minority carrier continuity equation in

each of the two neutral regions.

v(t) = time dependent applied bias

= d.c. bias plus small signal a.c. voltage

= VF + vaej!t

Page 83: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 73

� for uniform doping in the n-neutral region the hole current and conti-

nuity equations are,

Jp(x; t) = �qDpdp̂n(x; t)

dx;

1

q

@Jp(x; t)

@x= G� Up � @p̂n

@t

� the hole current equation gives,

dJp(x; t)

dx= �qDp

d2p̂n(x; t)

dx2

� if there is no light incident upon the semiconductor then G = 0.

� if there is no recombination in the neutral region (i.e W << Lp) then

Up = 0:

� under these conditions, the continuity equation for holes in the n-

neutral region yields a second order time-dependent di�erential equa-

tion (often called simply the time-dependent minority carrier continu-

ity equation):

Dpd2p̂n(x; t)

dx2� @p̂n(x; t)

@t= 0

� assuming the small signal approximation, the time-dependent hole con-

centration in the n-neutral region can be expressed as the addition of

a d.c. component and an a.c. component such that,

p̂n(x; t) = p̂n(x) + pa(x; !)ej!t

� pa(x; !) is the position and frequency dependent magnitude of time

varying minority carrier concentration in the n-neutral region.

� therefore, the small signal a.c. continuity equation becomes:

Dpd2pa(x; !)

dx2� j!pa(x; !) = 0

� to solve the small signal a.c. continuity equation assume that the

solution pa has the form C exp(mx; !).

Page 84: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 74

dpadx

= mC exp(mx; !);d2padx2

= m2C exp(mx; !)

� substituting the above into the di�erential equation yields,

Dpm2C exp(mx; !)� j!C exp(mx; !) = 0

� therefore,

Dpm2 � j! = 0; m = �

vuuuutj!Dp

� the two solutions for m requires two constants C1 and C2.

� the position and frequency dependent amplitude of the time varying

changes in hole concentration in the n-neutral region then takes on the

form,

pa(x; !) = C1 exp

0BB@x

vuuuutj!Dp

1CCA + C2 exp

0BB@�x

vuuuutj!Dp

1CCA

� the boundary conditions are determined as follows:

� at the space charge layer edge (x = 0):

p̂n(0; t) = pno exp

0B@v(t)VT

1CA = pno exp

0B@VF + vae

j!t

VT

1CA

= pno exp

0@VFVT

1A exp

0B@vae

j!t

VT

1CA (for VF >> VT )

� pno exp

0@VFVT

1A0@1 + va

VTej!t

1A for va << VT

= p̂n(0) + pa(0; !)ej!t

Page 85: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 75

� therefore,

pa(0; !) =vaVTpno exp

0@VFVT

1A

� at the metal contact (x = W ) where all the excess holes recombine

one obtains:

pa(W;!) = 0

� �nd C1 and C2 using above boundary conditions:

� let pa(0; !) � pa1; h =rj!=Dp; k = hW .

� at x = 0:

C1 + C2 = pa1; C2 = pa1 � C1

� at x = W :

C1ek + C2e

�k = 0; C1ek + (pa1 � C1)e

�k = 0

C1 =�pa1e�kek � e�k

; and C2 =pa1e

k

ek � e�k

� therefore,

pa(x; !) = pa(0; !)

0B@e

Whe�xh � e�Whexh

eWh � e�Wh

1CA

� a.c. hole current is given by:

jp(0; !) = �qDpdpadx

1Ax=0

= qDppa(0; !)h

0B@e

Wh + e�Wh

eWh � e�Wh

1CA

= qDp

0@ vaVT

1A pno exp

0@VFVT

1A0@ 1

W

1Avuuuutj!W

2

Dpcoth

vuuuutj!W2

Dp

� for diode area A:

Page 86: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 76

ip(0; !) = Ip(0)

0@ vaVT

1Avuuuutj!W

2

Dpcoth

vuuuutj!W2

Dp

� y = diode input admittance:

y =ip(0)

va=

Ip(0)

VT

vuuuutj!W2

Dpcoth

vuuuutj!W2

Dp

= G(!) + j!Cdh(!)

� G(!) = frequency dependent input conductance.

� Cdh(!) = frequency dependent di�usion capacitance.

� di�usion capacitance =) capacitance due to stored minority carrier

charge in diode.

� using a Taylor Series Expansion for coth:

� (i.e. coth(u) = 1=u + u=3� : : :)

� letrj!W 2=Dp = u.

y =Ip(0)

VTu

0@1u+u

3� : : :

1A

=Ip(0)

VT

0B@1 + u2

3� : : :

1CA

� for low frequencies (!W 2=Dp << 1):

y � Ip(0)

VT

0B@1 + j!W 2

3Dp

1CA =

1

re

0B@1 + j!W 2

3Dp

1CA

=1

re+j!W 2

3reDp= G + j!Cdh

� where re = VT=Ip(0) = low frequency small signal a.c. diode input

resistance.

� Cdh = W 2=3reDp = low frequency small signal a.c. diode input ca-

pacitance.

Page 87: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 77

Transit Time

( 0 )pn

edge

space charge layer

metal

contact

( )pn

x

Qh

n-type neutral region

0 W

ND

Stored Minority Carrier Hole Charge in a Uniformly Doped n-Neutral

Region

� total minority carrier charge stored in n{type neutral region:

Qh =qAp̂n(0)W

2(A = diode area)

� d.c. hole current is given by:

Ip(0) =qADpp̂n(0)

W

Page 88: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 78

� the ratio of stored minority carrier charge to minority carrier current

yields:

Qh

Ip(0)=qAp̂n(0)W

2� W

qADpp̂n(0)=W 2

2Dp

� the ratio of Qh to Ip(0) has the units of time and can be thought of

as the length of time it takes to move Qh holes through the neutral

region from x = 0 to X = W

� this time constant is called transit time.

� transit time �h for holes in a uniformly doped narrow n-neutral region

is then given by:

�h =W 2

2Dp

� the di�usion capacitance associated with stored charge in the n-neutralregion Cdh can be re-written in terms of the transit time for holes such

that,

Cdh =1

re

0B@W

2

3Dp

1CA =

1

re

0@23�h

1A =

2

3gd�h

� gd is the low frequency small signal input conductance of the diode

and is given by:

gd =1

re=dIDdVF

=d(Io exp(VF=VT ))

dVF=IDVT

� in general there is also a transit time for electrons in p-neutral region

(�e)

Page 89: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 79

� the total transit time of minority carriers in the diode �d is given by

the addition of the transit times for electrons in the p-neutral region

and the holes in the n-neutral region such that,

�d = �e + �h

� the total di�usion capacitance of the diode Cd is then given by the

addition of the di�usion capacitances associated with the electrons

and holes.

� for a uniformly doped diode where both the n- and p-neutral regions

are narrow, one obtains:

Cd = Cde + Cdh =2

3gd(�e + �h)

� where the individual electron and hole transit times are given by:

�e =(W 0)2

2Dn; �h =

W 2

2Dp

re C

jC

d

A.C. Small Signal Equivalent Circuit for a PN -Junction Diode

� Cj = junction capacitance, Cd = di�usion capacitance, re = input

resistance (a.c.)

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PN -Junction Diodes, E&CE 730, January, 2002 80

Low Forward Bias

Space Charge Layer Recombination

0

n(x)

n(0)

p(0)

W p Wn

p(x)

x

space charge layer

Free Electron and Hole Concentrations in the Space Charge Layer of a

Forward Biased PN -Junction

� in forward bias, carriers are being injected from the n- and p-sides

across the junction into opposite sides of the junction to form the

di�usion currents in the neutral regions.

� some of the electrons and holes recombine in the space charge layer as

they transit across it, giving rise to additional recombination currents

that add to the diode di�usion currents.

� this space charge layer recombination current is particularly important

for low forward biases.

� electron continuity equation

1

q

@Jn@x

=n̂(x)

�n� integrating across space charge layer:

Inr = In(Wn)� In(�Wp) = qAZ Wn

�Wp

n̂(x)

�ndx

� qA

�nav

Z Wn

�Wpn̂(x)dx =

Qe

�nav

Page 91: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 81

� where Qe = total number of electrons in the space charge layer, �nav =

average lifetime of electrons in the space charge layer, and Inr = elec-

tron recombination current in the space charge layer.

� likewise for holes:

Ipr � Qh

�pav

� to �nd the amount of electrons Qe and holes Qh in the space charge

layer, one must estimate the free electron and hole concentrations per

unit volume in the space charge layer under forward bias conditions:

n(x) = ni exp

0B@V (x)VT

1CA ; p(x) = ni exp

0B@�V (x)

VT

1CA

� where V (x) � �Ei(x)=q and the zero voltage reference is taken at the

Fermi level.

n(Wn) = ni exp

0B@V (Wn)

VT

1CA

=) n(x) = n(Wn) exp

0B@V (x)� V (Wn)

VT

1CA

p(�Wp) = ni exp

0B@�V (�Wp)

VT

1CA

=) p(x) = p(�Wp) exp

0B@V (�Wp)� V (x)

VT

1CA

� therefore the product of n(x) and p(x) in the space charge layer be-

comes:

n(x)p(x) = n(Wn)p(�Wp) exp

0B@V (x)� V (Wn) + V (�Wp)� V (x)

VT

1CA

= n(Wn)p(�Wp) exp

0B@V (�Wp)� V (Wn)

VT

1CA

Page 92: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 82

� recognising that V (Wn)� V (�Wp) = Vbi one can write the

Law of the Junction:

n(x)p(x) = n(Wn)p(�Wp) exp

0@VFVT

1A exp

0@�VbiVT

1A

� if n(Wn) = ND and p(�Wp) = NA then

Vbi = VT ln

0@NAND

n2i

1A

exp

0@�VbiVT

1A = exp

24�VTVT

ln

0@NAND

n2i

1A35 = exp

264ln

0B@ n2iNAND

1CA375

=n2i

NAND� n2inn(Wn)pp(�Wp)

� therefore, in the space charge layer,

n(x)p(x) = n2i exp

0@VFVT

1A

� for VF = 0; n(0) = p(0) = ni.

� for VF > 0; n(0) = p(0) = ni exp�VF2VT

� Qe and Qh are proportional to exp�VF2VT

� therefore Inr and Ipr are proportional to exp�VF2VT

� the total space charge layer current Iscl is then given by:

Iscl = Inr + Ipr = Ior exp

0@ VF2VT

1A

� Ior is a constant.� therefore, the total diode current ID including both neutral region

di�usion current and space charge layer recombination current is given

by:

I = Io

0@exp

0@VFVT

1A� 1

1A + Ior

0@exp

0@ VF2VT

1A� 1

1A

� the �rst term is the ideal neutral region di�usion current, and the

second term is the non-ideal space charge layer recombination current.

Page 93: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 83

� the ratio of ideal neutral region di�usion current to non-ideal space

charge layer recombination current can be expressed as,

I(di�usion)

Iscl/ ni exp

0@ VF2VT

1A

� from the above ratio it can be seen that the smaller ni is (i.e. the

larger the bandgap Eg of the semiconductor is), the larger the forward

bias for which non-ideal space charge layer recombination current will

dominate the total diode current.

e.g. ni(Si) << ni(Ge)

� the total diode current ID can be expressed using an ideality factor n

that takes on a value between 1 and 2 to combine the e�ects of neutral

region di�usion current and space charge layer recombination current

such that,

I = Io

0@exp

0@VFVT

1A� 1

1A + Ior

0@exp

0@ VF2VT

1A� 1

1A

= I 0o

0@exp

0@ VFnVT

1A� 1

1A ; 1 < n < 2

Page 94: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 84

slope = 1

2 VT

slope = 1

VT

non-ideal diode current

ideal diode current

I

I

VF

0

ln ID

ln

ln

o

or

Forward Diode Current Behaviour including Low Forward Bias

Non-Ideal Current Region due to Space Charge Layer Recombination

Page 95: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 85

High Forward Bias

High Level Injection

0 W

nop

DN

space charge layer edge

n-neutral region

metal contact

(x) = nn

(x)n

p

High Level Injection Hole and Electron Concentrations in n-Neutral

Region

� if the forward bias voltage VF is large enough, it is possible to inject

enough minority carriers into the neutral region such that the injected

minority carrier concentration exceeds the impurity concentration |

a condition known as high level injection.

� if the injected minority carrier concentration exceeds the impurity con-

centration in a neutral region, an electric �eld will result.

� even in high level injection, a neutral region will still attempt to remain

charge neutral such that a majority carrier charge of opposite polarity

to the minority carrier charge will be inserted from the metal contact

for every minority carrier charge injected into the neutral region from

the space charge layer side.

� for n{neutral region in HLI:

p+n (x) +N+D = n�n (x); pn(x) >> ND

� therefore, for charge neutrality in HLI:

Page 96: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 86

pn(x) � nn(x)

� consider a pn junction diode where NA >> ND (also known as a p+n

diode):

� for such a junction in low level injection when p̂n(x) << ND, we can

write:

In =qADnn

2i

W 0NAexp

0@VFVT

1A << Ip =

qADpn2i

WNDexp

0@VFVT

1A

� if NA >> ND then In � 0 compared to Ip.

� therefore, in the n-neutral region,

In = AJn = qA(�nnnE +Dndnndx

) � 0

� the electric �eld in the n-neutral region is then given by:

E =�Dn

�n

1

nn

dnndx

= �VT 1

nn

dnndx

� for low level injection (LLI): nn(x) � ND:

� therefore, for LLI:dnndx

=dND

dx= 0 for uniformly doped diode; and E = 0

� for high level injection (HLI): pn(x) � nn(x)

� therefore, for HLI:

E = �VT 1

pn

dpndx

Page 97: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 87

� the hole current in the n-neutral region for HLI is then given by:

Jp = q�ppnE � qDpdpndx

= q

0@��pVT dpn

dx�Dp

dpndx

1A = �2qDp

dpndx

Vj

VF

n-sidep-side

( in HLI )

anV

0 W

High Level Injection Voltage Drop

� a non-zero electric �eld E in the neutral region results in a voltage drop

Van across the neutral region given by,

Van = V (0)� V (W ) = �Z 0

WEdx = VT

Z 0

W

1

pn

dpndx

dx

= VTZ 0

Wd ln(pn(x)) = VT ln

0B@ pn(0)pn(W )

1CA

� at the metal contact, since the region is in high level injection pn(W ) =

nn(W ).

Page 98: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 88

� at the metal contact all of the excess carriers will recombine with

the contact so that the electron concentration is equal to its thermal

equilibrium value such that nn(W ) = ND.

� therefore,

Van = VT ln

0B@ pn(0)pn(W )

1CA = VT ln

0B@pn(0)ND

1CA

� the total applied forward bias VF in HLI equals the applied bias across

the junction plus the voltage drop across the neutral region due to HLI

e�ects such that:

VF = voltage across junction + Van

= VT ln

0B@pn(0)pno

1CA + VT ln

0B@pn(0)ND

1CA

= VT ln

0B@ p

2n(0)

pnoND

1CA = VT ln

0B@ p2n(0)

(n2i=ND) �ND

1CA

= 2VT ln

0B@pn(0)ni

1CA

� the minority carrier concentration at the space charge layer edge of the

n-type neutral region in HLI is:

pn(0) = ni exp

0@ VF2VF

1A

� since the hole current in HLI Ip(0) is proportional (/) to pn(0), thediode current will take on the form:

ID / exp

0@ VF2VT

1A

Page 99: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 89

slope = 1

2 VT

slope = 1

VT

ln ID

non-ideal diode current

ideal diode current

I

I

VF

0

ln

ln

o

or

non-ideal diode current

(high level injection)

(scl recombination)

Forward Diode Current Behaviour including Low Forward Bias and High

Forward Bias Non-Ideal Current Regions

Page 100: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 90

SPICE Model for PN-Junction Diode

Static Model

jC

dC = C

D

Rs

+

I

SPICE Diode Equivalent Circuit

� the simple static model is based in the following diode equation:

ID = IS

24exp

0@ qVDnkT

1A� 1

35

� where VD is the forward bias, and IS is the saturation current.

� non-ideal space charge layer recombination is modeled using an emis-

sion coeÆcient or non-ideality factor n, where n is between 1 and

2.

� high level injection is not explicitly modeled in SPICE. Instead the

e�ect if modeled by �tting an e�ective series resistance RS to model

the e�ect of high level injection and series resistance simultaneously,

since both phenomenon result in a similar behaviour of ID at high

currents.

� in practise, RS is estimated at several values of ID and averaged since

the series resistance depends on diode current.

� high currents are then modeled using,

V0

D = RSID + VD

Page 101: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 91

0

I

V

D

-IBV

-5 kT/q

(d)

(b) (a)

(c)

D

-BV

SPICE Reverse Bias Model

� large reverse bias and breakdown are modeled using the following equa-

tions,

ID = IS�exp

�qVDnkT

�� 1

�for � 5VT � VD � 0

= �IS for �BV < VD < �5VT= �IBV for VD = �BV

= �IS�exp

��q(BV +VD)

kT

�� 1 + qBV

kT

�for VD � �BV

Page 102: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 92

Large Signal Model

Cj

Cjo

VJ

VJ

FC

Reverse Bias Forward Bias

VD

depletion model

linear extrapolation

SPICE Junction Capacitance Model

� the large signal model allows time-dependent e�ects to be included.

The simplest implementation in SPICE consists of a large signal ca-

pacitance in parallel with the static model.

� the large signal capacitance in comprised of the addition of the di�usion

capacitance and junction capacitance such that,

C = Cd + Cj

= �d

0@dIDdVD

1A + CJO

0@1� VD

VJ

1A�m for VD � FCVJ

� where FC is a factor less than one (usually about 0.5), VJ is the built-

in voltage, and m is an empirical parameter �tted to measured ca-

pacitance data for reverse bias voltages where di�usion capacitance is

negligible.

� For forward voltages VD beyond FCVJ , the junction capacitance Cj

is determined by linearly extrapolating beyond the depletion model

Page 103: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

PN -Junction Diodes, E&CE 730, January, 2002 93

using a slope for the linear extrapolation that is equal to the slope of

the depletion model at VD = FCVJ .

� the �rst term of C is the di�usion capacitance Cd which is given by the

product of the total transit time �d of minority carriers for both neutral

regions and the large signal input conductance gd which is given by,

gd =dIDdVD

=ISnVT

exp

0@ VDnVT

1A

Small Signal Model

� the small signal model is a linearisation of the large signal model, and

is valid only at a particular d.c. bias voltage and current.

� the junction capacitance is modeled in the same manner as for the large

signal model, however, the di�usion capacitance is modeled using,

Cd = �dgd

� where gd becomes the the small signal low frequency input conductance

given by,

gd =dIDdVD

1A(VD;ID)

� note that gd is the slope of the ID versus VD curve.

Page 104: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 94

3 Bipolar Transistors

E&CE 730Physics & Modeling of Semiconductor Devices

Prepared by:

Professor John S. HamelDepartment of Elecrtrical & Computer Engineering

University of WaterlooWaterloo, Ontario, Canada, N2L 3G1

January, 2002

Page 105: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 95

Basic Theory and Operation of Bipolar Transistors

W e W b

W e W b

region

emitter

neutral

Nc

Nb

Ne

metal

contact

metal

contact

Xj1

Xj2

0 0

Wscl

region

baseneutral

N(x)space charge layer

emitter-base

space charge layer

collector-base

holeconcentration

electron

concentration

Uniformly Doped Bipolar Transistor

� consider a uniformly doped npn bipolar transistor:

� the collector current Ic is comprised of minority carrier (electron) cur-

rent in the neutral base.

� the base region of a bipolar transistor must be narrow enough so that

there is very little recombination of electrons and holes such that most

of the minority carriers injected from the forward biased emitter-base

junction will survive the trip across the base to the reverse biased

collector-base junction.

� the collector current Ic can be then be calculated using the \narrow"

diode approximation which is valid if the minority carrier di�usion

length Ln in the p-type base region is much larger than the base width

Wb.

Ic = �qAEDndn̂

dx

1Ax=0

=qAEDn(n̂p(0)� n̂p(Wb))

Wb

Page 106: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 96

=qAEDnn̂p(0)

Wb=qAEDnnpo

Wb

24exp

0@VbeVT

1A� 1

35

=qAEDnn

2i

WbNb

24exp

0@VbeVT

1A� 1

35

� AE = emitter area, Wb = neutral base width, np = electron concen-

tration in the p-type base region.

� np(Wb) � 0 since the collector-base junction is reverse biased.

W e W b

region

emitter

neutral

Nc

Nb

Ne

metal

contact region

baseneutral

np

(0)p

n(0)

np(W b

)

I cI

b1

pn

(W e ) 0 0

N(x)

Uniformly Doped Bipolar Transistor Depicting Neutral and Space

Charge Regions

Page 107: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 97

� the base current Ib is comprised of three principal components:

1. hole current Ib1 due to back injection of holes from the p-type base

into the n-type emitter across the forward biased emitter-base junc-

tion,

2. neutral base recombination current Ib2 (usually this component is

negligible for modern bipolar transistors).

3. emitter-base space charge layer recombination current (dominates

at low forward emitter-base bias voltages).

� if the hole di�usion length Lp in the n-type emitter is considerably

larger than the neutral emitter width We (shallow emitter), then,

Ib1 =qAEDpn

2i

WeNe

24exp

0@VbeVT

1A� 1

35

� if the hole di�usion length Lp in the n-type emitter is considerably

smaller than the neutral emitter width We (deep emitter), then,

Ib1 =qAEDpn

2i

LpNe

24exp

0@VbeVT

1A� 1

35

� considering only the Ib1 component of base current, for a shallow emit-

ter transistor the d.c. common-emitter current gain � is given by,

� =IcIb

=IcIb1

=DnWeNe

DpWbNb

� simple theory predicts that to obtain a high current gain, one needs

a wide, highly doped emitter region and a narrow, lowly doped base

region, or in other words,

WeNe >> WbNb for high �

Page 108: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 98

Vbe

slope = 1 / VT

ln Ib

ln I c

cI

Ib

0

Ideal Gummel Plot

� the neutral base recombination component of base current Ib2 can be

calculated from the electron continuity equation,

@In@x

= qAEn̂p�n

� where n̂p is the excess electron concentration in the neutral base regionand �n is the electron lifetime.

Page 109: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 99

np

(0)n (x)p

Qn W

bemitter-base

space charge layer edge

space charge layer edge

collector-base

p-type base neutral region

0

Stored Minority Carrier Charge in Uniformly Doped Neutral Base

Region

� integrating the continuity equation gives,

Ib2 = �[In(0)� In(Wb)] = qAE

Z Wb

0

n̂p(x)

�ndx

=qAEn̂p(0)Wb

2�n=qAEn

2iWb

2�nNb

24exp

0@VbeVT

1A� 1

35

Page 110: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 100

Heavy Doping E�ects in the Emitter

Ec

Ev

Ed

low-doped

bandgap

Eg

Eg

donor energy level spreading E

g(eff)narrowed bandgap

Bandgap Narrowing in Heavily n-Doped Semiconductor

� if the emitter doping Ne >> 1018cm�3 for silicon, then the bandgap

Eg appears to decrease (by an amount �Eg) due to the impurity atom

energy levels spreading into the conduction or valence bands.

� this apparent bandgap narrowing increases the intrinsic carrier concen-tration, and therefore the equilibrium minority carrier concentration,

making the region appear to be more lightly doped then it really is.

� to take this e�ect into account, the base current due to back injection

into the emitter becomes for a deep emitter,

Ib1 =qAEDpn

2i exp (�Eg=(kT ))

LpNe

24exp

0@VbeVT

1A� 1

35

� bandgap narrowing due to heavy doping results in a dramatic decrease

in current gain compared to simple theory.

Page 111: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 101

� combining the equations for Ic and Ib for a uniform doped transistor

with a deep emitter and bandgap narrowing one obtains a reasonably

realistic expression for current gain,

� =

26412

0@Wb

Ln

1A2 + DpWbNb

DnLpNeexp

0@�Eg

kT

1A375�1

Realistic Transistor Impurity Pro�le Modeling

Gaussian Profile

Diffused

(x p =0)

(peak at x p )

Implanted

Gaussian Profile

xp0

No

N(x)

Gaussian Impurity Pro�le for Di�used and Implanted Impurities

� realistic bipolar transistors seldom have uniform impurity pro�les, par-

ticularly in the emitter and base regions.

Page 112: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 102

� the methods normally used to introduce n and p-type impurity dopant

atoms to the semiconductor to form a bipolar transistor can result in

complicated vertical and lateral impurity concentrations as a function

of position.

� the concentration of impurity atoms per unit volume as a function of

position within a semiconductor is referred to as the impurity distri-

bution or impurity pro�le.

� the actual shape of the impurity distributions greatly a�ect transistor

behaviour and performance.

� impurities which have been introduced from di�usion and implanta-

tion processes can be modeled approximately by the use of Gaussian

distributions.

� a vertical npn bipolar transistor can be fabricated by di�using a p-

type impurity (e.g. B) into a semiconductor layer of n-type uniform

background concentration to form a base region above the collector.

� the uniform background doping is usually formed by the growth of a

thin n-doped epitaxial layer that becomes the collector on top of a

semiconductor wafer or substrate.

� the emitter is then formed by di�using an n-type impurity (e.g. As or

P) into the top of the base impurity layer.

� each di�usion results in an impurity concentration per unit volume

N(x) that can be approximated by a Gaussian function such that,

N(x) = No exp

264�

0@ xxo

1A2375

� No is the peak impurity concentration, and xo is the characteristic

length.

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Bipolar Transistors, E&CE 730, January, 2002 103

� the surface of the wafer from which the impurity is introduced cor-

responds to x = 0 where N(x) takes on its maximum value or peak

concentration of No.

� to model implantation of impurities where the peak may reside below

the surface at some distance x = xp one can use a modi�ed Gaussian

expression for N(x) such that,

N(x) = No exp

264�

0@x� xp

xo

1A2375

� xp then becomes the depth where Nx has its peak value of No.

N e

Nb

Nepi

Xj2X

j1

wafer

surface

emitter

base

collector

x0

N(x)

n

p

n

Double Di�used Gaussian Vertical Impurity Pro�le for an npn

Bipolar Transistor

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Bipolar Transistors, E&CE 730, January, 2002 104

� the net electrical impurity concentration resulting from the superposi-

tion of the collector, base, and emitter impurity distributions are what

determines the actual impurity pro�le of the transistor.

� the �nal net impurity pro�le N(x) for the entire transistor can then

be modeled by,

N(x) = Ne exp

264�

0@ xxe

1A2375�Nb exp

264�

0@ xxb

1A2375 +Nepi

� Nepi is the collector background doping, Ne and xe describes the dif-

fused emitter impurity pro�le, and Nb and xb describe the di�used

base impurity pro�le.

� the above transistor pro�le is referred to as a Double Di�used Gaus-

sian.

� the impurity concentration for the base di�usion is negative since the

base is comprised of negatively charge acceptor atoms.

� the characteristic lengths and the peak concentrations Ne, Nb along

with the collector concentration Nepi determine the entire vertical

structure of the bipolar transistor.

� a pnp vertical transistor would be modeled using the same equation

by with reversed signs.

� other, more complicated analytic functions are often used to model

realistic impurity pro�les including the use of Gaussians which have

peak concentrations below the surface of the wafer (x > 0), error

functions, multiple Gaussians for the same di�usion, etc.

� numerical programs which are used to model transistor behaviour can

use actual point by point impurity data in tabular form to model the

transistor impurity pro�le more accurately.

� the emitter-base junction xj1 and the collector-base junction xj2 can

be determined for a double di�used Gaussian pro�le by equating the

emitter and base di�usions such that,

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Bipolar Transistors, E&CE 730, January, 2002 105

Ne exp

264�

0@xj1xe

1A2375 = Nb exp

264�

0@xj1xb

1A2375

� which gives for xj1:

xj1 =

0@ln Ne

Nb

1A12 �1=x2e � 1=x2b

�12

� the collector-base junction can be determined in a similar manner by

equating the base and collector impurity pro�les such that,

Nb exp

264�

0@xj2xb

1A2375 = Nepi

� which gives for xj2:

xj2 = xb

0B@ln Nb

Nepi

1CA12

Moll-Ross Relation and the Gummel Integral

� real bipolar transistors seldom, if ever, have uniform base impurity

pro�les.

� the shape of the impurity distribution can have a signi�cant impact

on the collector current.

� consider a bipolar transistor with an arbitrarily doped base region withposition-dependent p-type impurity concentration Nb(x).

� if the current gain � >> 1 then one can write,

Jp � 0 = q

0@�ppE �Dp

dp

dx

1A

� for low level injection conditions (i.e. np(x) << Nb(x)), p(x) � Nb(x).

� the electric �eld resulting from the non-uniform p-type doping in the

base is therefore given by,

E =Dp

�p

1

p

dp

dx= VT

1

Nb(x)

Nb(x)

dx

Page 116: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 106

� the electron (collector) current density is then given by,

Jn = �q0@�nnE +Dn

dn

dx

1A = �q

0@�nVT n

p

dp

dx+Dn

dn

dx

1A

= �qDn

p

0@ndpdx

+ pdn

dx

1A = �qDn

p

d(pn)

dx

� if recombination of electrons in the base is negligible, then the collectorcurrent density Jn is constant with respect to position within the base.

Therefore, one can write the relation, (which was �rst attributed to

Moll and Ross),

Jnq

Z Wb

0

p

Dndx = (pn)x=0 � (pn)x=Wb

� Using the Law of the Junction (where VF is the bias across a pn-

junction):

p(x)n(x) = n2i exp

0@VFVT

1A

� one can write for each the emitter-base and collector-base junction:

(pn)x=0 = n2i exp

0@VbeVT

1A ; (pn)x=Wb

= n2i exp

0@VbcVT

1A

Jn =IcAE

=qn2iRWb

0 p=Dndx

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

� for low level injection p(x) � Nb(x) and using an average electron

di�usivity Dnav (Dn in general will vary with position since it is varies

with impurity concentration) one can write

Jn =IcAE

=qDnavn

2iRWb

0 Nb(x)dx

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

� the integral in the denominator is referred to as the Gummel Integral

or Gummel Number which is simply the total amount of the neutral

base impurity atoms.

Page 117: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 107

� the collector current does not depend upon the shape of the base

impurity pro�le, but depends only upon the total quantity of impurity

atoms.

� the Gummel Number can be related to the base sheet resistance Rbesq

which is an easily measurable quantity.

Rbesq = qZ Wb

0�pNb(x)dx

!�1

= q�pav

Z Wb

0Nb(x)dx

!�1

ohms per square

� if one ignores the di�erences between electron and hole mobilities, one

can compared base sheet resistance directly to the Gummel Number.

� transistors of a given area with larger base sheet resistances will have

larger collector currents and larger current gains.

Page 118: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 108

Ebers-Moll Model

IE I

C

αR

ICR

IEF

αFI

EF

ICR

VBCVBE

electrons

electrons

emitter base collectorn p n

BE C

E C

Currents De�ning Injection Version of Ebers-Moll Model

� the Ebers-Moll model was the �rst widely adopted comprehensive

model developed for the bipolar transistor that could be used for circuit

design.

� it is based on the physical fact that a bipolar transistor is simply

two pn-junction diodes connected back-to-back that share a common

neutral region (the base region of the resulting transistor) that inter-

act electrically because the shared neutral region (the base) is narrow

enough to allow minority carriers to cross it without completely re-

combining with majority carriers.

� this survival of minority carriers transiting the shared base region be-

tween the two back-to-back diodes is the key mechanism responsible

for transistor action and underlies all bipolar semiconductor device

operation.

� the interaction between the two diodes allows for the input of the

transistor to exist at a di�erent level of impedance than the output

Page 119: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 109

| hence trans-resistance or transistor, which is the fundamental

principle behind all transistors of any type.

� to achieve this trans-resistance requires energy which comes from the

power supply | hence, transistors are referred to as active devices.

� simple equations can be written to describe the terminal currents of

the transistor (IE for emitter current and IC for collector current). All

currents are de�ned as positive going into the terminals.

IE = �(IEF � �RICR) = �IES24exp

0@VbeVT

1A� 1

35 + �RICS

24exp

0@VbcVT

1A� 1

35

IC = �(ICR � �FIEF ) = �ICS24exp

0@VbcVT

1A� 1

35 + �FIES

24exp

0@VbeVT

1A� 1

35

� IES | emitter-base diode saturation current

� ICS | collector-base diode saturation current

� �F | forward common-base current gain

� �R | reverse common-base current gain

Page 120: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 110

αR

ICR

IEF

αF

IE

IC

IEF

ICR

IB

Vbc

beV

C

E

B

Injection Version of D.C. Equivalent Circuit for Ebers-Moll Model

Page 121: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 111

� recalling the Moll-Ross formulation one can write,

Icoll =qAEDnavn

2iRWb

0 Nb(x)dx

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

= IS

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

� if Vbc = 0 one can write,

Icoll = IC = �FIES

24exp

0@VbeVT

1A� 1

35 = IS

24exp

0@VbeVT

1A� 1

35

� if Vbe = 0 one can write,

Icoll = �IE = ��RICS24exp

0@VbcVT

1A� 1

35 = �IS

24exp

0@VbcVT

1A� 1

35

� comparing the Moll-Ross formulation of the collector current and the

Ebers-Moll model allows one to write the reciprocity relation which

is valid for any multi-dimensional arbitrarily doped bipolar transistor

such that,

IS = �RICS = �FIES

� using the reciprocity relation one can re-write the Ebers-Moll model

such that,

IE = �(IS=�F )24exp

0@VbeVT

1A� 1

35 + IS

24exp

0@VbcVT

1A� 1

35

IC = �(IS=�R)24exp

0@VbcVT

1A� 1

35 + IS

24exp

0@VbeVT

1A� 1

35

� using this formulation of the Ebers-Moll model implies that only three

parameters need be measured to characterise the �rst order d.c. be-

haviour of the transistor at a given temperature | namely,

1. IS | collector saturation current

2. �F | forward common-base current gain, (or �F | forward common-

emitter current gain)

Page 122: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 112

3. �R | reverse common-base current gain, (or �R | reverse common-

emitter current gain)

� the d.c. common-emitter forward and reverse current gains, �F and

�R, can be expressed such that,

�F =

������ICIB

������ =�F

1� �F; �R =

������IEIB

������ =�R

1� �R

IE

IC

IB

αR

αF

Vbc

beV

ICC

IEC

ICC

IS

IEC

beV

VT

IS

Vbc

VT

C

E

B

=

=

1exp

1exp

Transport Version of D.C. Equivalent Circuit for Ebers-Moll Model

Page 123: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 113

Regions of Operation for a Bipolar Transistor

forward bias

forward bias

V

VBC

BE

reverse bias

reverse bias

Active Forward Region

Saturation RegionActive Inverse Region

Cut-Off Region

Regions of Operation of a Bipolar Transistor

� there are four distinct regions in which a bipolar transistor can operatewhich are de�ned combinations of forward and reverse emitter-base Vbeand collector-base Vbc bias.

� the most commonly used region of operation is the forward active

region where the emitter-base junction is forward biased (Vbe > 0),

and the collector-base junction is reversed biased (Vbc � 0).

� the transistor can also be used in reverse where the emitter becomes

the collector and the collector becomes the emitter in terms of func-

tionality.

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Bipolar Transistors, E&CE 730, January, 2002 114

� this region of operation is known as the reverse active region where

the emitter-base junction is reversed biased (Vbe � 0), and the collector-

base junction is forward biased (Vbc > 0). Although the electrical roles

of the emitter and collector regions are reversed for this region of op-

eration, the part of the transistor which functions as an emitter in the

forward active region of operation is always referred to as the emitter

for the other regions of operation.

� if both the emitter-base and collector-base junctions are forward biased

(Vbe > 0, Vbc > 0), then the transistor is said to be saturated.

� if both the emitter-base and collector-base junctions are reverse biased

(Vbe � 0, Vbc � 0), then the transistor is said to be in cuto� since the

transistor is completely o�.

Gummel-Poon Model

� the general form of the Moll-Ross relation involves an integral of the

total hole concentration in the neutral base to model the collector

current Ic.

� this expression is valid for arbitrary levels of carrier injection, includinghigh level injection when the concentration of injected minority carriers

from the forward biased emitter-base junction exceed the background

base impurity concentration.

Ic =qAEDnavn

2iRWb

0 p(x)dx

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

� for the base region to remain charge neutral, the total number of pos-

itive charges (holes) must equal the total number of negative charges

(electrons and ionised acceptor atoms) in a p-type neutral base region

at each position.

Page 125: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 115

� mathematically this can be written,

p+(x) = n�(x) +N�

b (x)

� as the forward emitter-base voltage Vbe increases, the number of holes

begins to increase above Nb(x) in an attempt to retain charge neu-

trality, and according the model for collector current, this will increase

the Gummel Number in the Moll-Ross relation decreasing the collector

current.

� the Moll-Ross relation also predicts that the width of the neutral base

region Wb will a�ect collector current. This width will be a�ected

by the space charge layer widths on the base side of the emitter-base

and collector-base junctions, which in turn will be in uenced by the

voltages, Vbe and Vbc applied to the junctions.

� the Moll-Ross relation can therefore account for all of the variations

in collector current with changes in Vbe and Vbc for a bipolar transistor

with an arbitrarily doped base region and for arbitrary current levels

through the Gummel Integral term.

� the Gummel-Poon model allows for the calculation of this integral from

externally measured transistor terminal characteristics as opposed to

a numerical integration of the actual base impurity pro�le.

� in principle, all of these a�ects can be taken into account from the

Ebers-Moll model through the parameters IS, �F and �R, however,

the Ebers-Moll model provides no means to extract parameters which

are independent of current level or applied voltages.

� the Gummel-Poon model de�nes parameters which are, instead, re-

lated to the Moll-Ross relation, and are therefore independent of cur-

rent level and applied junction voltages.

Page 126: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 116

� the Moll-Ross relation can be re-written as,

Ic =qAEDnavn

2iRXco

XeoNb(x)dx

26664qAE

RXcoXeo

Nb(x)dx

qAERXc(Vbc)Xe(Vbe)

Nb(x)dx

3777524exp

0@VbeVT

1A� exp

0@VbcVT

1A35

=qAEDnavn

2iRXco

XeoNb(x)dx

24Qbo

Qb

3524exp

0@VbeVT

1A� exp

0@VbcVT

1A35

=ISqb

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

� Qb is the actual total majority carrier charge in the neutral base which

will change with current level and applied voltages at the junction.

� Qbo is de�ned to be the total majority carrier charge due to impurities

alone for zero applied voltage at each junction.

� qb is the ratio of the actual neutral base majority carrier charge to the

zero-bias base majority carrier charge.

qb =Qb

Qbo

Page 127: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 117

Qf

Qbo

Xj2

Qc

Qr

pr

(x)p(x)

Qe

N b(x)

pf

(x)

X eoX e (Vbe

)Xj1 X co X

c(V

bc)

Physical Sources of Base Charges for Gummel-Poon Model

Page 128: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 118

� the total neutral base impurity charge Qb is comprised of several com-

ponents such that,

Qb = Qbo +Qe +Qc +Qf +Qr

� Qe = the majority carrier charge in the neutral base region between

the position of the emitter-base space charge layer for Vbe = 0 and for

the actual applied Vbe.

� if Vbe < 0 (reverse bias), then Qe will be negative.

� Qc = the majority carrier charge in the neutral base region between

the position of the collector-base space charge layer for Vbc = 0 and

for the actual applied Vbc.

� if Vbc < 0 (reverse bias), then Qc will be negative.

� Qf is the extra majority carrier charge in the neutral base region above

the background impurity charge that compensates the extra negative

electrons injected from the forward biased emitter-base junction to

maintain charge neutrality when Vbc = 0 and Vbe > 0.

� Qr is the extra majority carrier charge in the neutral base region above

the background impurity charge that compensates the extra negative

electrons injected from the forward biased collector-base junction to

maintain charge neutrality when Vbe = 0 and Vbc > 0

� qb can be divided into separate normalised charges (ratios of charges)

such that,

qb =Qb

Qbo= 1 +

Qe

Qbo+Qc

Qbo+Qf

Qbo+Qr

Qbo= 1 + qe + qc + qf + qr

� Qe and Qc can be related to the emitter-base and collector-base junc-

tion capacitances, Cje and Cjc such that,

Qe =Z Vbe0

Cje(V )dV ; Qc =Z Vbc0

Cjc(V )dV

qc =1

Qbo

Z Vbc0

Cjc(V )dV � CjcavVbcQbo

� VbcVAF

Page 129: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 119

qe =1

Qbo

Z Vbe0

Cje(V )dV � CjeavVbeQbo

� VbeVAR

� Cjeav and Cjcav are average capacitances, VAF and VAR are known as

the forward Early Voltage and the reverse Early Voltage, respec-

tively, which are measurable model parameters.

Qf = qAE

Z Xc(Vbc)

Xe(Vbe)[pf(x)�Nb(x)]dx

= qAE

Z Xc(Vbc)

Xe(Vbe)nf(x)dx � Qnf = �bfIc

Qr = qAE

Z Xc(Vbc)

Xe(Vbe)[pr(x)�Nb(x)]dx

= qAE

Z Xc(Vbc)

Xe(Vbe)nr(x)dx � Qnr = �brIc

� pf(x) is the majority carrier and nf(x) is the minority concentration in

the neutral base region for a forward biased emitter-base junction and

zero biased collector-base junction, Qnf is the total stored minority

carrier concentration under these bias conditions.

� �bf is the forward base transit time.

� pr(x) is the majority carrier and nr(x) is the minority concentration

in the neutral base region for a forward biased collector-base junction

and zero biased emitter-base junction, Qnr is the total stored minority

carrier concentration under these bias conditions.

� �br is the reverse base transit time.

� the normalised forward and reverse injected charges then become,

qf =Qf

Qbo=�bfIcQbo

=�bfISQboqb

24exp

0@VbeVT

1A� 1

35

qr =Qr

Qbo=�brIcQbo

=�brISQboqb

24exp

0@VbcVT

1A� 1

35

� qb then becomes,

Page 130: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 120

qb = 1 +VbeVAR

+VbcVAF

+1

Qboqb

0@�bfIS

24exp

0@VbeVT

1A� 1

35 + �brIS

24exp

0@VbcVT

1A� 1

351A

= q1 +q2qb

q1 = 1 +VbeVAR

+VbcVAF

q2 =

0@�bfISQbo

24exp

0@VbeVT

1A� 1

35 + �brIS

Qbo

24exp

0@VbcVT

1A� 1

351A

� solving for qb yields,

q2b � q1qb � q2 = 0; qb =

0BB@q12+

vuuut q12

!2+ q2

1CCA

� for low level injection, q2 << q1 and qb � q1, and for Vbc = 0 and

Vbe >> VT ,

Ic � ISq1

24exp

0@VbeVT

1A� 1

35 � IS

1 + Vbe=VARexp

0@VbeVT

1A

� IS exp

0@VbeVT

1A assuming

VbeVAR

<< 1

� for high level injection, q2 >> q1 and qb � pq2.

Ic � ISpq2

24exp

0@VbeVT

1A� 1

35 � IS

vuuuut Qbo

�bfISexp

0@VbeVT� Vbe

2VT

1A

=

vuuuutQboIS�bf

exp

0@ Vbe2VT

1A

� de�ne Vbe = Vkf where the current changes from low to high level

injection.

� for high level injection the slope of ln(Ic) versus Vbe changes from 1=VTto 1=(2VT ).

Page 131: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 121

� call the collector current where this change in the slope of ln(Ic) occursthe forward knee current IKF .

� since both the low level and high level injection forms of Ic are valid

at the transition from low to high level injection one can write,

IKF = IS exp

0@VkfVT

1A =

vuuuutQboIS�bf

exp

0@Vkf2VT

1A

=

vuuuutQbo

�bf

pIKF

� similarly, in inverse active operation (Vbe = 0; Vbc = Vkr > 0),

IKR = IS exp

0@VkrVT

1A =

vuuutQboIS�br

exp

0@ Vkr2VT

1A

=

vuuutQbo

�br

pIKR

� therefore,

IKF =Qbo

�bf; IKR =

Qbo

�br

� the �nal Gummel-Poon model then becomes,

Ic =ISqb

24exp

0@VbeVT

1A� exp

0@VbcVT

1A35

qb =

0BB@q12+

vuuut q12

!2+ q2

1CCA

q1 = 1 +VbeVAR

+VbcVAF

q2 =ISIKF

24exp

0@VbeVT

1A� 1

35 + IS

IKR

24exp

0@VbcVT

1A� 1

35

� the measurable parameters for the Gummel-Poon model then become,

Page 132: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 122

1. IS | collector saturation current

2. VAF | forward Early voltage

3. VAR | reverse Early voltage

4. IKF | forward Knee current

5. IKR | reverse Knee current

IE

IC

IB

Vbc

beV

ICC

IEC

βR

βF

beV

VT

Vbc

VT

ICC

IEC

IC

ICC

IS

qb

IEC

IS

qb

C

E

B

1exp 1

=

exp= =

D.C. Equivalent Circuit for Gummel-Poon Model

Low D.C. Forward Bias Voltage Modeling

(Space Charge Layer Recombination Currents )

� both the Ebers-Moll and Gummel-Poon models can be augmented to

include the e�ects of space charge layer recombination on the base

current for low values of forward biasing.

� considering a bipolar transistor operating in the forward active region

of operation (Vbe > 0, Vbc < 0), the base current is comprised of three

components, two of which have already been discussed:

Page 133: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 123

1. hole current Ib1 due to back injection of holes from the p-type base

into the n-type emitter across the forward biased emitter-base junc-

tion,

2. neutral base recombination current Ib2 (usually this component is

negligible for modern bipolar transistors).

3. non-ideal recombination current in the emitter-base space charge

layer resulting from the recombination of electrons and holes as

they pass through the space charge layer on their way to the base

and emitter neutral regions, respectively.

� the emitter-base space charge layer recombination is identical to the

space charge layer recombination already discussed for pn-junction

diodes.

surface

recombination

bulkrecombination

emitter-basespace charge layer

oxide layer

emitter

base

Sources of Non-Ideal Emitter-Base Space Charge Layer

Recombination Current

Page 134: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 124

Vbe

slope = 1 / VT

ln Ib

ln I c

Ib

cI

0emitter-base

space charge layer

recombination dominates

ideal region

high current effects

(high level injection)(Kirk Effect)

(series resistance)

Realistic Gummel Plot Depicting Low Forward Bias Non-Ideal

Current

� in a realistic bipolar transistor, this e�ect arises from recombination

partly in the space charge layer in the bulk of the silicon below the

emitter di�usion, and partly at the interface between the space charge

layer and the surface �eld oxide used to passivate the silicon surface.

� the amount of recombination depends upon the electron and hole life-

time which is reduced by metallic contamination in the silicon, and

by unsatis�ed silicon and silicon-dioxide bonds at the silicon surface

which provide trapping centres.

� metal contamination arises from processes which a�ect the surface of

the wafer such as metal contacting and metal from processing ma-

chines.

� simple theory predicts that space charge layer recombination current

will vary as exp(Vbe=(2VT )), whereas the recombination currents in the

Page 135: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 125

neutral emitter and base regions that make up the remainder of the

base current will vary as exp(Vbe=VT ).

� space charge layer recombination can be included in the models simply

by adding two more \non-ideal" diodes between the base-emitter and

base-collector terminals which have currents given by,

ISE exp

0@ VBENEVT

1A ; ISC exp

0@ VBCNCVT

1A

� the SPICE model parameters for space charge layer recombination

current are:

1. ISE = emitter-base space charge layer recombination saturation

current.

2. NE = non-ideality factor (between 1 and 2) for emitter-base space

charge layer recombination current.

3. ISC = collector-base recombination saturation current.

4. NC = non-ideality factor (between 1 and 2) for collector-base space

charge layer recombination current.

� the diode between the emitter and base terminals models emitter-

base space charge layer recombination current when the emitter-base

junction is forward biased.

� the diode between the collector and base terminals models collector-

base space charge layer recombination current when the collector-base

junction is forward biased.

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Bipolar Transistors, E&CE 730, January, 2002 126

IE

IC

Vbc

beV

ICC

IEC

βR

βF

ICC

IEC

IC

IB

VT

N E

ISE

N CV

T

ISC

C

E

=B

exp 1

exp 1V

BC

VBE

D.C. Equivalent Circuit for Gummel-Poon Model Including E�ects of

Space Charge Layer Recombination

Small Signal Model of the Bipolar Transistor

Small Signal Criterion

� a bipolar transistor is usually operated in the forward active region

of operation where Vbe > 0 and Vbc < 0 in applications where small

signal a.c. models are needed.

� the following model parameters are then applicable to this region of

operation; however they also apply to reverse active operation Vbe < 0

and Vbc > 0).

� small signal analysis applies when the input and output signals of a

device are small enough to avoid non-linear e�ects.

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Bipolar Transistors, E&CE 730, January, 2002 127

� it is possible to derive a rigorous de�nition of what is meant by \small"

for the input signal to a bipolar transistor biased to operate in the

forward active region of operation (Vbe > 0, Vbc < 0) in common-

emitter con�guration.

Ic = IC + ic = IS exp

0@VbeVT

1A = IS exp

0@VBE + vbe

VT

1A

= IS exp

0@VBEVT

1A exp

0@vbeVT

1A

= IS exp

0@VBEVT

1A2641 + vbe

VT+1

2

0@vbeVT

1A2 + :::

375

� IS exp

0@VBEVT

1A241 + vbe

VT

35 if vbe << VT (small signal criterion)

= IC

0@1 + vbe

VT

1A = IC +

ICvbeVT

� Vbe = the total time-dependent input voltage, VBE = the d.c. bias

voltage, vbe = the small signal a.c. voltage superimposed on the d.c.

bias voltage such that Vbe = VBE + vbe

� Ic = the total time-dependent collector current, IC = the d.c. collector

current, ic = the small signal a.c. collector current superimposed on

the d.c. collector current such that Ic = IC + ic

Small Signal Transconductance gm

gm =dICdVBE

=d

dVBE

0@IS

24exp

0@VBEVT

1A� 1

351A =

ICVT

ic =ICVTvbe = gmvbe

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Bipolar Transistors, E&CE 730, January, 2002 128

Small Signal a.c. Input Resistance r�

r� =dVBEdIB

=dVBEdIC

dICdIB

=�ogm

� IB = d.c. base current, �o = small signal a.c. common-emitter current

gain.

Small Signal a.c. Output Resistance ro

ro =dVCEdIC

� VAIC

� VCE = d.c. collector-emitter voltage, VA = Early Voltage.

� for forward operation VA = VAF | the forward Early voltage, and for

reverse operation VA = VAR | the reverse Early Voltage.

Small Signal a.c. Collector-Base Resistance r�

� the collector-emitter voltage will alter the space charge layer width

of the collector-base junction. This will in turn alter the width of

the neutral base and also the total quantity of stored minority carrier

charge in the neutral base. If neutral base recombination is signi�cant,

then changing the quantity of stored minority carrier charge in the

neutral base will change the component of base current Ib2 = Qdb=�nthat arises from neutral base recombination.

r� =dVCEdIb2

� this term is usually only important for lateral bipolar transistors that

have a large base width, and has also been found to be important in

some types of vertical SiGe heterojunction bipolar transistors.

� usually, even for transistors with signi�cant neutral base recombina-

tion, r� >> ro.

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Bipolar Transistors, E&CE 730, January, 2002 129

Charge Storage E�ects

(Junction and Di�usion Capacitances)

� charge storage e�ects on bipolar transistor time-dependent behaviour

are modeled by:

� three nonlinear junction capacitances including,

1. Cje | the emitter-base junction capacitance

2. Cjc | the collector-base junction capacitance

3. Cjs | the collector- substrate junction capacitance

� two nonlinear di�usion capacitances to account for stored minority

carrier charge including,

1. CDE | di�usion capacitance in forward active operation

(Vbe > 0, Vbc < 0).

2. CDC | di�usion capacitance in reverse active operation

(Vbc > 0, Vbe < 0).

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Bipolar Transistors, E&CE 730, January, 2002 130

rb

rb

rex

Cje

Cjc

Cjs

Cjs

Cjs

rc

rc

rc

E

Bn +

n+

p

epin

C

p +p

+

-

n

p

Source of Parasitic Capacitances and Resistances in a PN -Junction

Isolated Bipolar Transistor Process

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Bipolar Transistors, E&CE 730, January, 2002 131

Junction Capacitances

Cje(Vbe) =CJE

(1� Vbe=VJE)ME

Cjc(Vbc) =CJC

(1� Vbc=VJC)MC

Cjs(Vcs) =CJS

(1� Vcs=VJS)MS

� the junction capacitance SPICE model parameters are,

1. CJE | zero bias (Vbe = 0) emitter-base junction capacitance

2. VJE | emitter-base junction built-in voltage

3. ME | emitter-base junction exponential factor

4. CJC | zero bias (Vbc = 0) collector-base junction capacitance

5. VJC | collector-base junction built-in voltage

6. MC | collector-base junction exponential factor

7. CJS | zero bias (Vcs = 0) collector-substrate junction capacitance

8. VJS | collector-substrate junction built-in voltage

9. MS | collector-substrate junction exponential factor

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Bipolar Transistors, E&CE 730, January, 2002 132

Di�usion Capacitance

W e W b

region

emitter

neutral

Wscl

region

base

N(x)space charge layer

emitter-base

space charge layer

collector-base

neutral

collectorQ Q

Q

de db

dc

debQ

Sources of Minority Carrier Stored Charge in a Bipolar Transistor

� stored minority carrier charge in various regions of the bipolar transis-

tor contribute to the overall delay in response of the bipolar transistor

to time varying signal inputs.

� the charge storage regions are,1. emitter neutral region | Qde = emitter stored di�usion charge

2. base neutral region | Qdb = base stored di�usion charge

3. emitter-base space charge layer |Qdbe = emitter-base space charge

layer stored di�usion charge

4. collector-base space charge layer | Qdc = collector-base space

charge layer stored di�usion charge

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Bipolar Transistors, E&CE 730, January, 2002 133

� in general the total stored charge Qdf in the forward active region of

operation (Vbe > 0, Vbc < 0) is di�erent from the total stored charge

Qdr in the reverse active region of operation (Vbc > 0, Vbe < 0),

� the small signal a.c. di�usion capacitance for forward active operation

Cde is de�ned as,

Cde =dQdf

dVbe=dQdf

dIc

dIcdVbe

= �FgmF

� the small signal a.c. di�usion capacitance for reverse active operation

Cdc is de�ned as,

Cdc =dQdr

dVbc=dQdr

dIc

dIcdVbc

= �RgmR

� �F and �R are the overall forward and reverse transit times of the

transistor which can be measured using high frequency techniques.

� gmF and gmR are the low frequency small signal transconductances

given by,

gmF =ISVT

exp

0@VbeVT

1A ; gmR =

ISVT

exp

0@VbcVT

1A

� the di�usion capacitance SPICE model parameters are,

1. �F | forward transit time

2. �R | reverse transit time

� considering forward active operation (VBE > 0, VBC < 0), the forward

transit time �F can be broken down into sub-components of transit

time for each charge storage region such that,

�F = �e + �b + �be + �c

� �e = emitter delay or emitter transit time.

� �b = base delay or base transit time.

� �be = base-emitter space charge layer delay or emitter-base space charge

layer transit time (usually negligible).

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Bipolar Transistors, E&CE 730, January, 2002 134

� �c = collector delay or collector transit time.

� for a uniformly doped shallow emitter transistor in low level injection:

�e =Qde

IC

Qde =qAEn

2iWe

2Neexp

0@VbeVT

1A ; IC =

qAEDnn2i

NbWbexp

0@VbeVT

1A

�e =WeWbNb

2DnNe

� IC is the d.c. collector current.

� AE is the emitter area, We is the neutral emitter width, Wb is the

neutral base width, Ne is the emitter doping, Nb is the base doping,

Dn is the electron di�usivity in the neutral base region.

�b =Qdb

IC

Qdb =qAEn

2iWb

2Wbexp

0@VbeVT

1A ; IC =

qAEDnn2i

NbWbexp

0@VbeVT

1A

�b =W 2

b

2Dn

�be =Qdbe

IC; usually negligible

�c =Wscl

2vth

� Wscl = width of reverse biased collector-base space charge layer, vth =

thermal drift velocity (� 107 cm=sec for silicon).

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Bipolar Transistors, E&CE 730, January, 2002 135

Parasitic Resistances

(Emitter, Base and Collector Series Resistance)

� parasitic refers to electrical behaviour of transistors which originates

from physical sources that are not responsible for transistor action and

which usually decrease transistor performance.

� series resistance arises from the physical material which is required to

contact the emitter, base, and collector regions of a bipolar transistor,

such as semiconductor, metal, silicides, etc.

� in general these resistances can depend upon current and voltage bias

levels; however, for small signal operation it is assumed that they are

constant for a particular bias.

� rb = base series resistance (e.g. 50 to 500 ), rex = series emitter

resistance (e.g. 1 to 10 ), and rc = series collector resistance (e.g. 20

to 500 ).

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Bipolar Transistors, E&CE 730, January, 2002 136

Small Signal Hybrid-� Equivalent Circuit

v πr

πr

oC

dC

je

Cjc

Cjs

rb

rc

rex

gm

v π

bc

e

Hybrid-� Small Signal A.C. Equivalent Circuit Including Parasitic

Capacitances and Terminal Series Resistances

� by far the most widely used small signal equivalent circuit for the

bipolar transistor is the hybrid-� equivalent circuit.

� this particular circuit model applies only for a particular bias point in

an active region of operation (usually forward active operation), and is

generally valid up to the frequency where the a.c. current gain drops

below unity.

� the basic hybrid-� equivalent circuit includes only the active transistor

elements:

r� =�ogm; ro =

VAIC; cd = gm�f ;

r� usually neglected; gm =ICVT;

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Bipolar Transistors, E&CE 730, January, 2002 137

� cd is the forward di�usion capacitance (same as Cde in the SPICE

model), and �f is the forward transit time (same as �F in the SPICE

model).

� all parameters can be determined from quantities which depend only

upon d.c. bias and not frequency.

� the model parameters which must be extracted from a transistor in

order to determine the hybrid-� equivalent circuit for a particular bias

point are therefore: IC (d.c. collector current), VT = kT=q (thermal

voltage), VA (Early voltage), and �o (a.c. common-emitter current gain

which is not necessarily equal to the d.c. common-emitter current gain

�F ).

� to properly account for the impact of parasitics on high frequency

behaviour, junction capacitances and series resistances must be added.

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Bipolar Transistors, E&CE 730, January, 2002 138

Transition Frequency fT

v πr

πr

oC

dC

je

Cjc

Cjs

rb

rc

rex

gm

v π

bc

e

Hybrid-� Small Signal A.C. Equivalent Circuit for Transition Frequency

fT Calculation

� by de�nition, the transition frequency fT is the frequency where the

magnitude of the a.c. common-emitter current gain �(!) equals one

in forward active operation in common-emitter con�guration with the

collector terminal a.c. shorted to the emitter terminal (a.c. ground).

� the transition frequency is an important �gure of merit that describes

the absolute highest frequency of operation at which the transistor can

provide useful current gain, and therefore, current ampli�cation.

� the hybrid-� equivalent circuit can be used to determine a simple ex-

pression for fT in terms of device parameters.

� neglecting rex and r� the hybrid-� circuit becomes:

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Bipolar Transistors, E&CE 730, January, 2002 139

v πr

πr

oC

dC

je

Cjc

Cjs

rc

gm

v π

cb

ib

ic

� notice that the collector terminal has been a.c. shorted to ground.

� assuming that the frequency is low enough that the a.c. impedance

of the small signal collector-base capacitance cjc is much larger than

the collector resistance rc, cjc appears in parallel with the small signal

emitter-base junction capacitance cje and the di�usion capacitance cd.

� since cje and cd always appear in parallel, they are often lumped to-

gether as a single input capacitance c� = cje + cd.

� the complex a.c. input impedance z� then becomes,

z� = r�== [1=(j!(c� + cjc))] =r�

1 + j!r�(c� + cjc)

� (== means \in parallel with").

� �(!) = ic=ib.

� neglecting base series resistance rb the a.c. input voltage vbe becomes,

vbe = z�ib =r�ib

1 + j!r�(c� + cjc)

ic = gmvbe =gmr�ib

1 + j!r�(c� + cjc)

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Bipolar Transistors, E&CE 730, January, 2002 140

� since r� = �o=gm:

�(!) =icib=

gmr�1 + j!r�(c� + cjc)

=�o

1 + j!�o(c� + cjc)=gm

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Bipolar Transistors, E&CE 730, January, 2002 141

� for high frequency and large �o,

!�o

0@c� + cjc

gm

1A >> 1

�(!) � gmj!(c� + cjc)

j�(!)j = 1 when ! = !T = 2�fT =gm

c� + cjc

� therefore, the transition frequency is given by,

fT =gm

2�(c� + cjc)

� the magnitude of the a.c. current gain is usually expressed in decibels:

� for

!�o

0@c� + cjc

gm

1A >> 1

20 log10 j�(!)j = 20 log10

0B@ gm!(c� + cjc)

1CA dB

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Bipolar Transistors, E&CE 730, January, 2002 142

log10

f

20 log10

βo( )

slope =

20 dB per decade

( 6 dB per octave )

dB20 log10

β ( ω )

βo 2

20 log10

)(

f1 f

110

fT

0

current gain

unity

20 dB

10 times increase in frequency

linear extrapolation

3 dB

A.C. Common Emitter Current Gain �(!) versus Frequency

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Bipolar Transistors, E&CE 730, January, 2002 143

� in this frequency range:

{ if the frequency changes by a factor of 10 (one decade), then the

a.c. current gain changes by 20 dB.

{ if the frequency changes by a factor of 2 (one octave), then the a.c.

current gain changes by 6 dB.

{ the current gain{bandwidth product is constant such that:

j�(!)j � ! =gm

(c� + cjc)= !T

� f� is the frequency at which the magnitude of the common-emitter

a.c. current gain reduces by a factor ofp2 of its low frequency value

of �o.

j�j = �or1 + [!�o(c� + cjc)=gm]2

=1p2

� this occurs when

!��o

0@c� + cjc

gm

1A = 1

f� =!�2�

=fT�o

� f� is often called the beta cut-o� frequency and is approximately

the frequency above which one obtains the constant current gain {

bandwidth product discussed above.

� fT can be measured by plotting the measured magnitude of � versus

the logarithm of the frequency. When the frequency is high enough to

obtain a constant current gain { bandwidth product, one can simply

extrapolate the line to higher frequencies until the current gain is 1 and

then read o� the transition frequency from the frequency axis without

having to actually drive the transistor at the fT .

� the hybrid-� equivalent circuit can also be used to determine how the

fT changes with collector current.

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Bipolar Transistors, E&CE 730, January, 2002 144

� the parasitic capacitances cje, cjc in uence the fT at low currents.

�T =1

!T=c� + cjegm

=cje + cjcgm

+cdgm

=cje + cjcgm

+gm�fgm

=cje + cjcgm

+ �f =VTIC

(cje + cjc) + �f

� �T is the total delay time associated with the transistor which includes

the e�ects of both the stored minority carrier charges and the parasitic

junction capacitances.

� the junction capacitances cje; cjc are only weakly dependent on col-

lector current, and forward transit time is, to a �rst approximation,

independent of collector current for low level injection conditions.

IC

π2 τF

1

fT π2 τ

1

Τ=

Cjc+C je

VT )(π2

slope =1

Transition Frequency versus D.C. Collector Current

� plotting the the measured transition frequency fT versus the collector

current IC will yield an approximately straight line for low collector

currents with a slope of 1=(2�VT (cje + cjc)).

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Bipolar Transistors, E&CE 730, January, 2002 145

� at higher collector current, the di�usion capacitance will become signif-

icantly larger than the junction capacitances as more stored minority

carrier charge builds up in the transistor where the fT will reach its

maximum theoretical value of the forward transit time �f .

� in reality, at very high collector currents, the fT begins to fall-o� again

due to other physical e�ects not discussed here. These e�ects can

become important before a bipolar transistor reaches its theoretical

maximum performance frequency.

� usually, bipolar transistors are designed and biased to operate at the

maximum possible fT for maximum speed of operation.

� the variation of fT at low currents can be exploited to extract the cjeand �f if cjc is known.

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Bipolar Transistors, E&CE 730, January, 2002 146

Large Signal Operation

Forward Active Operation

VBE

VBC

V CEI

B

IC

IE

npn

Terminal Current and Voltage Conventions for NPN Bipolar Transistor

�F =ICIE

=IC

IB + IC=

IC=IB1 + IC=IB

=�F

1 + �F

( )BE

T

B

E

C

BEV exp

V

VI=I

IB

C S

=C

I

βF

Ideal Large Signal Model for npn

Bipolar Transistor

Ideal D.C. Large Signal Equivalent Circuit for NPN Bipolar Transistor

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Bipolar Transistors, E&CE 730, January, 2002 147

Early E�ect

log10

Nnet

(x)

cm -3( )

∆VBE

> 0( )

electrons (minority carriers)

0 bW

n

p

n

E

B

C

W b

VCB

electron concentration profile changes

thereby changing collector current

Impact of Changing Collector-Base Voltage on Neutral Base Region

Width Giving Rise to the Early E�ect

� Change in Vcb for a constant VBE results in a change in the neutral

base width Wb which in turn causes IC to change.

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Bipolar Transistors, E&CE 730, January, 2002 148

VAF

CI

VCE

V

VBE3

V

VBE4

BE5

BE2V

BE1

0

Graphical Representation of the Forward Early Voltage VAF

IC(0) = IS exp

0@VBEVT

1A

IC(VCE) = IC(0) +@IC@VCE

VCE

= IC(0) +IC(0)

VAF + VCEVCE

� IC(0) +IC(0)

VAFVCE for VAF >> VCE

� IS

0@1 + VCE

VAF

1A exp

0@VBEVT

1A

� VAF can be less than 20 V for high performance bipolar transistors.

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Bipolar Transistors, E&CE 730, January, 2002 149

Saturation and Inverse Active Operation

� in saturation both the emitter-base and collector-base junctions are

forward biased.log

10N

net(x)

cm -3( )

VBE

> 0

IBE

BCI

nr

(x)

nr

(x)

holes (minority carriers)

W e 0 0 bW

n

p

n

( ) ( VBC

0 )

E

B

C

>

= +n(x) nf

(x)

nf

(x)

p(x)

electrons (minority carriers)

Minority Carrier Distributions Under Saturation Conditions in a Bipolar

Transistor

IC =qAEDnavn

2iRWb

0 p(x)dx

24exp

0@VBEVT

1A� exp

0@VBCVT

1A35

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Bipolar Transistors, E&CE 730, January, 2002 150

� in saturation:

1. VCE is low (typically 0.05 to 0.3 V ).

2. output resistance is low.

3. �F is low (called forced current gain) due to decreasing IC and

increasing IB = IBE + IBC .

IB

= 0

IB

= 0

IC

V CE

Saturation Region

Saturation Region

Inverse Action Region

Forward Active Region

IB4

IB3

IB2

B1I

0

Collector Current versus Collector-Emitter Voltage in Forward Active

Operation for Common Emitter Con�guration

Page 161: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 151

Common-Base Avalanche Breakdown in Bipolar

Transistors

VCBI

E

IC

Bipolar Transistor Biased in Forward Active Operation in Common-Base

Con�gurationI

C

IE

= 0

V CB

B V CBO

IE1

IE3

IE2

Collector Current versus Collector-Base Voltage in Forward Active

Operation for Common-Base Con�guration

Page 162: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 152

� for IE = 0 (open emitter), the collector-base junction breaks down at

VCB = BVCBO.

� for non-zero emitter current, the common-base current gain becomes

greater than unity during avalanche breakdown.

� de�ning �0

F to be the actual common-base current gain during break-

down and �F to be the current gain for no breakdown,

�0

F =M�F

IC = �F IEM = �0

FIE

where

M =1

(1� VCB=BVCBO)n ; n = 3 to 6, typically for silicon

� For Nepi >> Nb,

BVCBO =�sE2crit2qNepi

� Vbicb

� Ecrit � 3� 105 V=cm, Vbicb = the built-in voltage of the collector-base

junction.

Page 163: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 153

Common-Emitter Avalanche Breakdown in Bipolar

TransistorsI

B

VCE

IB

= 0I

B4

IB3

IB2

B1I

0CEV

IC

maxββ <

BV BV<CBO

( )CEO

Common-Emitter Forward Active Output Characteristics under

Conditions of Breakdown

Page 164: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 154

log10

Nnet

(x)

cm -3( )

Xj1

Xj2

0 x

CBV

Cn

B

p

E

n

Internal Electron-Hole Generation in Collector-Base Space Charge Layer

under Conditions of Avalanche Breakdown

� electron-hole pairs generated in the collector-base space charge layer

during avalanche breakdown results in holes being swept into the neu-

tral base region.

� these holes further forward bias the emitter-base junction increasing

IC .

� avalanche generated holes swept into the neutral base opposes normal

base current resulting in a net reduction in terminal base current and

an increase in �F .

Page 165: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 155

cI

log10

Ic

log10

I b

Ib

0 VBE

base current reduction

due to Avalanche Breakdown

Gummel Plot Depicting Base Current Reduction under Avalanche

Breakdown Conditions

BVCEO � BVCBO

(�F )1n

� e.g. if n = 4 and �F = 100, then BVCEO = BVCBO=3.

Page 166: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 156

Zener Breakdown in Bipolar Transistors

� Zener breakdown is most likely to occur across the emitter-base junc-

tion since this junction is usually the most highly doped on either

side.

� as a rule of thumb, Zener breakdown mechanisms can be expected to

occur if both sides of the emitter-base junction are doped over 1018

cm�3.

Punch-Through

� punch-through will occur when the emitter-base and collector-base

space charge layers meet which produces an electrical e�ect similar to

avalanche breakdown except for the base current reduction.

� punch-through is most likely to occur in narrow base transistors for

high reverse collector-base voltages or low forward emitter-base volt-

ages.

Page 167: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 157

Temperature Dependence of Common-Emitter Current

Gain

µ A1 Aµ10 100 Aµ 1 mA 10 mAI

C

βF

300

200

100

log10

T = 25 C

T = 125 C

T = -55 C

Typical Temperature and Collector Current Dependence of Forward

D.C. Current Gain

�F / exp

0B@Eg emitter �Eg base

kT

1CA

� typical temperature coeÆcient of �F = + 7000 ppm=C.

Page 168: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 158

High Level Injection

n(x)

p(x)

eN

bN

Nepi

0 Wb

depth

x

n-type

p-type

n-type

Electron and Hole Distributions in the Neutral Base of a Bipolar

Transistor under Conditions of High Level Injection

� When the emitter-base junction is suÆciently forward biased, the car-

rier concentration injected into the base rises above the base impurity

concentration.

Page 169: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 159

� for p{neutral region in HLI:

n�(x) +N�

A = p+(x); n(x) >> NA

� where NA is the acceptor doping Nb in the base, n are the minority

carrier electrons, and p are the majority carrier holes.

� for charge neutrality in HLI:

n(x) � p(x)

� Since IC >> IB, one can assume that the hole current Ip in the base

region is nearly zero compared to the electron current In.

IB = AEJp = qAE(�ppE �Dpdp

dx) � 0

� the electric �eld in the base region is then given by:

E =Dp

�p

1

p

dp

dx= VT

1

p

dp

dx

� where Einstein's relation Dp=�p = VT has been used.

� for High Level Injection, since n(x) � p(x),

E = VT1

n

dn

dx

� therefore the electron current (which makes up the collector current)

is given by,

IC = AEJn = qAE

0@�nnE +Dn

dn

dx

1A

= 2qAEDndn

dx= 2qAEDn

n(0)� n(Wb)

Wb

= 2qAEDnn(0)�Nb

Wb� 2qAEDn

n(0)

Wb

� a non-zero electric �eld E in the neutral region results in a voltage drop

Van across the neutral region given by,

Page 170: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 160

Van = V (Wb)� V (0) = �Z Wb

0Edx = �VT

Z Wb

0

1

n

dn

dxdx

= �VTZ Wb

0d ln(n) = VT ln

0B@ n(0)

n(Wb)

1CA

= VT ln

0B@n(0)Nb

1CA

� The total applied forward bias VF is comprised of the voltage Vj across

the junction itself plus the neutral region voltage drop Van.

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Bipolar Transistors, E&CE 730, January, 2002 161

� The electron concentration n(0) injected into the base region is given

by,

n(0) =n2iNb

exp

0@VjVT

1A ; Vj = VT ln

0B@n(0)Nb

n2i

1CA

VF = Vj + Van

= VT ln

0B@n(0)Nb

n2i

1CA + VT ln

0B@n(0)Nb

1CA

= VT ln

0B@n

2(0)Nb

n2iNb

1CA = 2VT ln

0B@n(0)ni

1CA

n(0) = ni exp

0@ VF2VT

1A

IC =2qAEDnni

Wbexp

0@ VF2VT

1A

� By de�nition, high level injection begins when the electron concentra-

tion injected into the base equals the base doping (i.e. n(0) = Nb).

� The collector current IHLI for which this occurs is therefore given by,

IHLI =2qAEDnNb

Wb

Page 172: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 162

The Kirk E�ect

ε

ε

ε

epiN

epiN

epiN

area = V cb

area = V cb

area = V cb

nc N

epi<

nc N

epi=

nc N

epi>

n c

n c

Wbo

Wbo

W kW

b

N(x)

x

N(x)

x

N(x)

x

Page 173: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 163

dEdx

=p� n +ND �NA

�s

for nc < Nepi;dEdx

=Nepi � nc

�s> 0

for nc > Nepi;dEdx

=Nepi � nc

�s< 0

� Reversal of the electric �eld in the collector-base space charge layer

results in the space charge layer moving to the Nepi - n+ buried layer

boundary thereby electrically widening the neutral base.

� The collector current IK for the onset of the Kirk E�ect when the

electron concentration in the collector space charge layer equals the

collector epitaxial doping (i.e. nc = Nepi) can be shown to be,

IK = qAEvthNepi

0B@1 + Vcb

Vrt epi

1CA

� where vth = 107 cm=sec is the the drift saturation velocity for silicon,

and Vrt epi is the reverse collector-base voltage required to cause the

collector-base space charge layer to reach through to the edge of the

buried layer.

Vrt epi =qNepiW

2epi

2�s

Page 174: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 164

Lateral Base Widening

(The Van der Ziel and Agouridis E�ect)

L L

Wbo

L

Wb

emitterbase

B

� Once collector current exceeds the Kirk current IK , the vertical com-

ponent of IC will increase much more slowly since IC is inversely pro-

portionally to the electrically neutral base width Wb = Wbo +Wk.

� For currents above IK , IC will therefore tend to ow more outside the

portion of base region directly beneath the emitter di�usion, resulting

in appreciable laterally directed or sidewall electron current ow.

� A simple model for the behaviour of IC above the Kirk current can be

derived assuming the the vertical portion of IC beneath the emitter

remains constant at IK .

Page 175: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 165

IC = JKBL + JKBL0

= JKB(L + L0

)

L0

=ICJKB

� L = L

0@ICIK� 1

1A

W0

b =rW 2

bo + (L0)2=4

B = emitter stripe length

L = emitter stripe width

L0

= lateral current widening dimension

Wbo = vertical neutral base width before Kirk e�ect

Wb = vertical neutral base width after Kirk e�ect

W0

b = e�ective base width due to lateral current ow

JK = Kirk current density (A=cm2).

Page 176: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 166

Quasi-Saturation

VBC internal

V CB applied

IC I

C R epi

� When the ohmic drop ICRepi across the collector epitaxial layer at-

tains a value greater than the applied collector-base junction terminal

voltage, the internal collector-base junction becomes forward biased.

� The undepleted vertical epitaxial layer below the collector-base space

charge layer contributes signi�cantly to the overall internal collector

resistance.

ICRepi � VBC internal = VCB applied

� Assuming that the collector-base junction becomes noticeably forward

biased when its internal voltage exceeds 0.5 volts, one can write an

expression for the collector current at which quasi-saturation occurs,

ICQS =VCB applied + 0:5

Repi

Repi =1

q�nNepi

0@Wepi �Wscl

AE

1A

Page 177: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 167

Emitter Current Crowding

IB

IB

Jcentre

VBE centre

Jedge

V BB

base

b b

emitter

� Lateral ohmic drops along the undepleted intrinsic pinched base region

beneath the emitter di�usion results in a de-biasing of the centre of

the emitter-base junction.

� This results in emitter current being larger near the edge of the emitter-

base junction sidewalls than in the centre { a condition referred to as

\emitter current crowding".

VBE centre = VBE edge � VBB0

JedgeJcentre

= exp

0@VBB0VT

1A

� If VBB0 > VT = 26mV then signi�cant emitter current crowding oc-

curs.

� High current e�ects which result in decreasing current gain and tran-

sition frequency are driven by current density phenomena.

� Emitter current crowding reduces the overall e�ective emitter area

resulting in the onset of high current e�ects for lower collector currents.

Page 178: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 168

� The e�ective emitter area resulting from emitter current crowding can

be estimated by a formula [Hauser] which is modelled in SPICE as,

Leff

L=

sinZ cosZ

Z; Z tanZ =

IBRB

2VT

RB for two base contacts =L

4B�bWb

�b = base conductivity

Wb = neutral base width

B = emitter stripe length

L = emitter stripe width

� For Z tanZ � 1,

Leff � L

1 + (IBRB)=(2VT )

b b

emitter

basep

n

collector-base

space charge layer

localised base widening due to Kirk Effect and Emitter Current Crowding

buried layern +

Non-Uniform \Base Push-out" at High Collector Currents in the

Presence of Emitter Current Crowding

Page 179: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 169

Increase in Forward Transit Time �F at High Currents

Ic

ln

τ F

IKF

� Lateral Base widening from the Van der Ziel and Agouridis E�ect

reduces the transition frequency by increasing the base transit time �b.

� The increased base transit time �0

b resulting from lateral base widening

is given by,

�0

b =(W

0

b)2

2Dn=W 2

bo

2Dn+(L

0

)2=4

2Dn

= �b

2641 +

0@ L

2Wbo

1A2

0@ ICJKBL

� 1

1A2375

Page 180: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 170

� In SPICE the increase in forward transit time (of which base transit

time is one component) with collector current is modelled by,

�FF = �F

2641 +XTF

0@ ICIC + ITF

1A2 exp

0@ VBC1:44VTF

1A375

�F is the low current forward transit time.

XTF corresponds to the geometrical terms involving L and Wbo.

ITF corresponds approximately to the Kirk current.

VTF models the in uence of extra stored charge in the neutral base from

a forward biased collector-base junction in saturation conditions.

� Model parameters XTF , ITF , and VTF are usually determined from

indirect methods (i.e. �tting to measured fall-o� in fT versus IC at

high collector currents).

Page 181: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 171

Base Resistance

emitter

bb

lb

b

B

L

R

base

RBX BI

Components of Base Resistance in a Bipolar Transistor

� Base resistance limits the rate at which the input capacitance of a

bipolar transistor can be charged and discharged, thereby limiting the

response speed.

RBX =RSBX(lb=bb) +Rcontact

nb

RSBX = extrinsic base di�usion sheet resistance.

nb = number of base contacts.

Rcontact = base contact resistance.

Page 182: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 172

� RBI is the intrinsic base resistance of the \pinched" neutral base region

beneath the emitter di�usion, and for low currents can be estimated

by,

RBI =

0@ 1

Fb

1A0B@ L=B

q�pNbWb

1CA

� Fb is a factor which takes into account the number of base contacts

and the distributed ow of base current underneath the emitter region.

� For two base contacts, Fb = 12 (a factor of 2 for parallel base current

ow from two base contacts, a factor of 2 since each base current

component ows half the width of the emitter stripe width L, and

a factor of 3 assuming a linearly decreasing lateral base current ow

underneath the emitter).

� For one base contact Fb = 3.

� Emitter current crowding decreases the intrinsic base resistance RBI

and can be modelled by the following [Hauser],

RBI = RBM + 3 (RB �RBM)

0@tanZ � Z

Z tan2Z

1A

RBM = minimum base resistance that occurs at high currents.

RB = the base resistance for low currents.

Page 183: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 173

� In SPICE, Z is modelled approximately by,

Z � �1 +r1 + (144IB)=(�2IrB)

(24=�2)rIB=IrB

IrB = the base current where the base resistance falls halfway to its

minimum value.

� If IrB is set to zero in SPICE then RBI is modelled using,

RBI = RBM +RB �RBM

qb

where qb is the same normalise charge used for the Gummel-Poon model

of IC .

Page 184: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 174

SPICE Model Parameter Extraction

VBC

= 0

VBE V

T

slope = 1 N F

slope = 1 N SE

ln ISE

0

ideal region

CI

IB

ln IC

ln IB

ln I S

Extraction of NF , NE , IS, ISE

Page 185: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 175

Measurement Set-up to Obtain Gummel Plots

A

AA

A

VBE

IB

IC

VBE

IB

IC

Page 186: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 176

Forward Output Characteristics including Measurement

Set-up

IB

VCE

IB

= 0I

B4

IB3

IB2

B1I

0CEV

IC

maxββ <

BV BV<CBO

( )CEO

Page 187: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 177

Extraction of Maximum Forward Common-Emitter

Current Gain �F

βF

VBC

= 0

IC

log10

( )

VBC

= 0

VBE

βF

= IC

I B

0

ideal region

CI

IB

ln IC

ln IB

� �F is the d.c. value of the maximum forward common-emitter current

gain as opposed to the a.c. value.

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Bipolar Transistors, E&CE 730, January, 2002 178

Extraction of Series Resistances

� Series resistances RE, RB, and RC should be extracted as close as

possible for the operating conditions under which the transistor will

operate in the particular application.

Measurement Set-up to Extract D.C. Emitter Resistance

RE

VCE

IB

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Bipolar Transistors, E&CE 730, January, 2002 179

Extraction of Emitter Resistance RE (\Fly-Back E�ect")

slope =

1

R E

βR is small during saturation

βR

VCE

BI

0

rapidly increases as

transistor comes out ofsaturation

VCE = VT ln

0@1 + �R

�R

1A + IBRE

� The emitter resistance should be obtained from the inverse of the slope

of the IB versus VCE characteristic for open collector as close as possible

to the yback region.

Page 190: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 180

Extraction of D.C. Collector Resistance RC

slope = 1

slope =

1

RC sat

RC linear

CEV

CI

B1I

IB2

IB3

IB4

0

� RC linear is the normal active operation value of RC which is used for

linear operation of the transistor (e.g. small signal a.c. operation).

� RC linear is obtained from the inverse of the slope of the line drawn

through the \knees" of the output characteristics.

� RC linear should be used for correct modelling of the fT and charge

storage e�ects.

� It is often diÆcult to determine precisely where the \knees" of the

output characteristics actually are.

� RC sat is obtained from the inverse of the slope of the saturation line

in the output characteristics.

� If RC sat is determined in this fashion, corrections must be made for

internal saturation e�ects.

VCE sat = VT ln

0B@1 + (IC=IB)(1� �R)

�R[1� IC=(�FIB)]

1CA + IERE + ICRC

Page 191: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 181

� First term in above equation for VCE sat can be eliminated if IB versus

VCE is measured for di�erent forced values of IC such that the forced

current gain IC=IB remains constant but less than the maximum for-

ward active region current gain �F .

� This approach assumes that RE << RC and that �R, �F , RE, and

RC are all constant over the range of base and collectors currents used

in the measurement.

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Bipolar Transistors, E&CE 730, January, 2002 182

Alternative More Accurate Method to Extract RC

VCE

BI

( 2 µA/div )I

C

used to

determine

RC linear

slope =

1

R E

VCE

0(5 mV/div)

= 0( 0.2 mA/div)

used to

determine

R C sat

IB

CIforced steps

IC

forced

VBE

Page 193: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 183

Expanded View of RC Extraction Method Using Forced

Collector Current Steps

VCE

BI

IB2

B1I

IC1

IC2

IC1

B1I I

B2

IC2

∆ V

∆ V

IC2

IC1

0

=

RC

=

� RC sat is determined for high values of IB where the transistor is

saturated.

� RC linear is determined for low values of IB as close as is practical to

the \knees" of the forced collector current IB versus VCE curves.

� Changes in IB and IC for the measurement should be small.

� The output characteristics should be inspected to determine the bias

operating point before measuring RC .

Page 194: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 184

Collector Resistance Components in an Integrated Bipolar

Transistor

n

n

n

p

emitter

base

buried layer RCL

n RCV

collectort

epi

p

N epi

Rcontact

� RC can be divided roughly into two principal components:

1. RCL which is bias independent and comprised of the heavy doped

buried layer and collector sinker regions.

2. RCV which is bias dependent and comprised of the low doped un-

depleted portion of the collector epitaxial region below the emitter.

Page 195: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 185

� RCV changes with:

1. the width of the collector-base space charge layer (due to changes

in VCB),

2. conductivity modulation in saturation due to a forward biased

collector-base junction, and

3. conductivity modulation from electrons in the neutral epitaxial col-

lector at high collector currents.

� Advanced methods exist to determine these separate components of

RC such as exploiting the substrate current from the parasitic pnp

transistor in pn-junction isolated bipolar processes [Park].

Page 196: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 186

Base Resistance (RB) Extraction

� The measured value of RB depends strongly upon the operating point

of the transistor as well as the technique used to measure it.

� RB should be measured using a technique which corresponds to the

operating conditions under which the transistor is expected to operate

in an application.

� Several categories of techniques exist to measure RB including,

1. noise measurement techniques which should be used if RB is being

measured to determine its contribution to noise.

2. pulse measurement techniques which should be used if the transis-

tor is to be operated in switching applications (e.g digital).

3. small signal measurement techniques which should be used if the

transistor is to be used in linear small signal applications.

Page 197: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 187

Input Impedance Circle Method to Extract rb

rog

mv π

cπv π

b

e

c

Small Signal Hybrid-Pi Equivalent Circuit of a Bipolar Transistor Biased

in the Forward Active Region

Zin = rb +r�

1 + j!r�c�

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Bipolar Transistors, E&CE 730, January, 2002 188

Extraction of A.C. Base Resistance rb

πr+brr

bRe (Z in )

in)Im (Z

cπ c

π

infinityωω 0( = short circuit )

open circuit=( )

deviation from lumped hybrid-pi

equivalent circuit at high frequencies

due to distributed effects

Page 199: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 189

\Ning and Tang" Method for Extracting Emitter and Base

Resistance [Ning]

ln Ib

ln I c

∆ V

0BE

V

Ibo

coI

CI

BI

1.21.00.8

Page 200: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 190

Components of Emitter and Base Resistance Involved in

\Ning and Tang" Method

VBE

IB

EI

VCER

BI+ R BX

RE

base

b

emitter

R

R BX BIR

E

IBo = IB exp

0B@IERE + IB(RBI +RBX)

VT

1CA

VTIC

ln

0@IBoIB

1A =

IERE + IBRBI + IBRBX

IC

=(IC + IB)RE + IBRBI + IBRBX

IC

= RE +RBI

�+RE +RBX

� RBI=� is assumed to be approximately constant with respect to bias.

Page 201: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 191

RE

RE

)V T

(

1

β

+

RBI

β

+ RBX

slope =emitter current crowding

effect of

ln

I

IIC

Bo

B

Extraction of D.C. Resistance Components Using \Ning and Tang"

Method

� RBI=� is usually 1 to 2 ohms.

� Usually RBX >> RE and RE >> RBI=�.

� RBI can be determined from geometrical consideration.

� Ignores e�ects of emitter current crowding.

Page 202: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 192

Junction Capacitance Model Parameter Extraction

0V

A

Cjo

Cj

reverse bias forward bias

Extraction of Zero Bias Junction Capacitances

Cj(VA) =Cjo

(1� VA=Vbi)m

� m = 0.5 for an abrupt step junction, m = 0.33 for a linear junction.

� Vbi = typically 0.5 to 0.7 V .

� To measure the various junction capacitances connect the respective

two transistor terminals to a capacitance bridge and leave the other

terminals open.

� Measurement frequency for a bridge is usually small enough to ignore

series ohmic losses.

Page 203: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 193

Extraction of Junction Capacitance Parameters

V A V bi

log10

( C meas C k )

slope = - m

log10

( 1 )

Cmeas =Cjo

(1� VA=Vbi)m + Ck

� Ck is comprised of stray capacitance, pin capacitance, and pad capac-

itance, which are all assumed to be independent of transistor bias.

� One way to eliminate Ck is to plot log10(Cmeas�Ck) versus log10(Vbi�VA) using guess values for Ck and Vbi iteratively until a straight line is

obtained from which the slope will give the m power law.

� There is no unique solution for Vbi and m for a given Ck and Cj,

however, this is not important provided the model gives the correct

junction capacitance.

Page 204: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 194

Extraction of Early Voltages VAF and VAR

VBE V

CE

VBE

C( V BC

= 0 )

VCE

( V BC= 0 )

IB

IC

I

=

slope = goF

IC =IS

1 + VBE=VAR + VBC=VAF

24exp

0@VBEVT

1A� exp

0@VBCVT

1A35

Page 205: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 195

� The small signal forward output conductance is given by,

goF =dICdVCE

1AVBE=constant;VBC=0

= � d

dVBC

0B@ IS1 + VBE=VAR + VBC=VAF

24exp

0@VBEVT

1A� 1

351CA

=IC(VBC = 0)

VAF (1 + VBE=VAR)

� The small signal reverse output conductance is given by,

goR =dIEdVEC

1AVBC=constant;VBE=0

= � d

dVBE

0B@ IS1 + VBE=VAR + VBC=VAF

24exp

0@VBCVT

1A� 1

351CA

=IE(VBE = 0)

VAR (1 + VBC=VAF )

� Solving expressions for forward and reverse output conductances si-

multaneously yields for the forward and reverse Early voltages,

VAF =IC(VBC = 0)IE(VBE = 0)� goFgoRVBEVBC

goFIE(VBE = 0) + goFgoRVBE

VAR =IC(VBC = 0)IE(VBE = 0)� goFgoRVBEVBC

goRIC(VBC = 0) + goFgoRVBC

Page 206: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 196

Knee Current Extraction

ln Ib

ln I c

corrected I C

BI

CI

0BE

V

IE

RE

= VBE

VB EB

RB

I

BoI

Correcting Gummel Plot for Series Resistance Losses

� Corrections must be made to the measured Gummel Plots to allow for

the voltage drops across the series resistances before the model knee

currents IKF and IKR can be extracted.

� Extrapolate the ideal portion of the IB curve to higher currents and

assume that this plot is a plot of IB versus the internal emitter-base

voltage VB0E0 .

� Subtract the voltage drop between the measured IB and the extrap-

olated ideal IBo from the IC curve for a various measured VBE 's to

obtain a corrected IC curve.

� Sometimes this technique produces a corrected IC curve which has an

ideality less than unity due to emitter sidewall injection e�ects.

Page 207: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

Bipolar Transistors, E&CE 730, January, 2002 197

ln I c

VB E

0V T

slope = 1ln I

KF

slope = 1 2

Extraction of \Knee" Currents IKF and IKR

� Use the corrected IC versus VB0E0 Gummel Plots in active forward and

inverse operation to determine IKF and IKR.

� IKF is extracted for VBC = 0 and IKR is extracted for VBE = 0

� One can also use �F versus IC to �t IKF and �R versus IE to �t IKR

using the Gummel-Poon model at high currents.

Page 208: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 198

4 MOS Transistors

E&CE 730Physics & Modeling of Semiconductor Devices

Prepared by:

Professor John S. HamelDepartment of Elecrtrical & Computer Engineering

University of WaterlooWaterloo, Ontario, Canada, N2L 3G1

January, 2002

Page 209: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 199

Band Diagrams of an MOS Capacitor

(n-channel enhancement mode MOSFET)

x0

E c

E fs

Ev

E iE

fm

gateelectrode

gateoxide

semiconductor substrate

tox

(p-type)

Positive Energy E

Positive Voltage V

� Fermi level Ef is \ at" for zero gate current.

� Efm, Efs are the gate electrode (metal or polysilicon) and substrate

Fermi levels.

� "Flat Band" conditions imply that the energy bands are \ at" such

that there are no internal potential changes within the substrate.

� If there is a contact potential di�erence �ms between the gate electrodeand substrate, and/or �xed oxide and interface charges, a gate voltage

must be applied to reach \ at band".

Page 210: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 200

Accumulation in an MOS Capacitor

(n-channel enhancement mode MOSFET)

E i

E fs

E c

Ev

V s < 0

holes

Positive Voltage V

Efm

(VGS < 0)

Efm

(VGS = 0 )

Positive Energy E

x0

Vox

p-type

� For negative gate voltage (VGS < 0), the negative potential induced at

the gate oxide { substrate interface attracts holes above the equilibrium

hole concentration associated with the substrate doping NA.

V =�Ei

q; Efs = 0

p = ni exp

0@Ei �Efs

kT

1A = ni exp

0@� V

VT

1A

ps = ni exp

0@�Vs

VT

1A

� where Vs < 0 is the \surface" potential at the substrate surface at the

gate oxide { substrate interface.

Page 211: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 201

Depletion in an MOS Capacitor

(n-channel enhancement mode MOSFET)

Vox

E iE fs

EvV s > 0E

fm(VGS > 0 )

Efm

(VGS = 0 )

Positive Energy E

Positive Voltage V

Wdep

E c

x0

φf

p-type

� For positive gate voltage, a positive induced voltage at the substrate

surface repels majority carrier holes in the p-type substrate resulting

in a depletion or space charge layer forming beneath the gate oxide.

� The width of the depletion layer can be approximated by,

Wdep =

vuuut2�sVsqNA

� The space charge layer contains negative �xed p-type ionic charge thatis not compensated by free positively charged holes.

Page 212: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 202

Strong Inversion in an MOS Capacitor

(n-channel enhancement mode MOSFET)

Vox

E iE fs

Ev

E c

Efm

(VGS = 0 ) φf

x0

W m

Efm

(VGS = Vth

)

electrons

V s φf= 2

φf

Positive Voltage V

Positive Energy E

p-type

� A suÆciently large positive gate voltage increases the concentration

of free electrons at the surface which electrically \screen" holes in the

substrate such thatWdep =Wm, whereWm is the maximum depletion

width.

� When Vs = 2�F , the concentration of electrons per unit volume at the

surface becomes equal to the concentration of equilibrium holes in the

substrate bulk, and Wdep is assumed to be equal to Wm.

� \Strong Inversion" is de�ned to be when Vs = 2�F , where a \channel"

of free conducting electrons is formed.

�F = VT ln

0@NA

ni

1A ; Wm =

vuuuut2�s(2�F )qNA

Page 213: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 203

MOS Diode Capacitance

(n-channel enhancement mode MOSFET)

C ox

Co

����������������������������������������������������������������������

����������������������������������������������������������������������

gate electrode

gate oxidetox

substrate

depletion layer

B

G

G

S

Cdfixed interfacecharge

Cox =�oxtox

per unit area; area = WL

Cd = depletion capacitance =�sWdep

per unit area

� Total MOS diode capacitance CT is given by,

1

CT=

1

Cox+

1

Cd + Co

� where Co is the capacitance associated with interface charge which can

be trapped in energy states caused by crystalline imperfections at the

surface.

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MOS Transistors, E&CE 730, January, 2002 204

Variation of Gate Capacitance with Gate Voltage

for an MOS Diode

(n-channel enhancement mode MOSFET)

Cox

Cmin

accumulation strong inversion

depletion

C gate

V g0

� Neglecting trapped interface charge capacitance Co,

1

CT=

1

Cox+

1

Cd

Cd =�sWdep

=

vuuutq�sNA

2Vs

Page 215: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 205

Threshold Voltage (Vth)

in an Enhancement Mode n-Channel MOSFET

Level 1 Model

Vox

E iE fs

Ev

E c

Efm

(VGS = 0 ) φf

x0

W m

Efm

(VGS = Vth

)

electrons

V s φf= 2

φf

Positive Voltage V

Positive Energy E

p-type

� The threshold voltage Vth is the gate voltage VGS that results in the

onset of strong inversion where Vs = 2�F .

� When VGS = Vth, it is assumed that there are no free electrons at the

surface, and that Wdep = Wm.

� The total depletion charge Qd per unit area is,

Qd = �qNAWm = �2rq�sNA�F ; �F = VT ln

0@NA

ni

1A

� Using,

VGS = Vox + Vs; Vox =�Qd

Cox; Vs = 2�F

� Therefore,

Vth =�Qd

Cox+ 2�F

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MOS Transistors, E&CE 730, January, 2002 206

E�ects of Contact Potential �msand Oxide and Interface Charges on Vth

� The work function of a material is the energy required to remove an

electron from the material.

� Physically, the work function is the energy di�erence between the Fermi

level of the material and an energy level known as the vacuum level

Evac where it is assumed that the material no longer has any in uence

on the energy of the removed electron.

� When two materials are brought into contact, electrons move from one

material to the other because the energy of these carriers is in general

di�erent in the two materials.

� Since no net electric �eld exists in the separate materials before com-

ing into contact, the transfer of electrons from higher to lower energy

after the materials come into contact results in an electric �eld arising

between the two materials.

� The material with the largest work function has the electrons with

the lowest energy, since it takes more energy to remove them from the

material then from a material with a smaller work function.

� This results in the material with the smaller work function being at a

higher potential relative to the material with the larger work function.

� This potential di�erence is referred to as the \contact potential".

� If the work function of the gate electrode is less than that of the sub-

strate, then the potential of the gate will be higher than that of the

substrate.

� If the work function energy di�erence between gate electrode and sub-

strate �m � �s = �ms is negative, then a net negative electron charge

will transfer to the substrate from the gate (via outside source-body

connections) for VGS = 0.

Page 217: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 207

� A negative �ms will therefore decrease the positive VGS required to

reached strong inversion in an n-channel enhancement mode MOS-

FET. Therefore a negative �ms will decrease Vth such that,

Vth = �ms +�Qd

Cox+ 2�F

� where in the Vth formula, �ms is expressed in units of voltage V =

�E=q and is actually the negative of the contact potential.

� Other charges exist within the gate oxide and at the interface that will

also cause Vth to deviate from simple theory.

� These charges are always positive and are denoted by an e�ective in-

terface charge Qi per unit area. Qi can be comprised of:

{ Qm: \mobile" ionic charge trapped (due to impurities such as

Sodium) in the gate oxide that can move under high electric �elds

and at elevated temperatures which can cause Vth to drift over pe-

riods of minutes to hours to days, and even over periods of months.

{ Qot: \trapped" oxide charge due to structural imperfections.

{ Qf : \�xed" oxide charges due to non-stoichiometric SiOx from

excess silicon ions.

{ Qit: dangling bonds at the Si{SiO2interface due to termination of

the silicon lattice.

� Since Qi is always positive, it e�ectively decreases the required gate

voltage to achieve strong inversion. Therefore,

Vth =

0@�ms � Qi

Cox

1A + �Qd

Cox+ 2�F = Vfb +

�Qd

Cox+ 2�F

� whereVfb =

0@�ms � Qi

Cox

1A

� Vfb is the \ at band" voltage, or the gate voltage required to eliminate

any internal potential in the substrate such that the energy bands do

not change with position in the vicinity of the substrate surface.

Page 218: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 208

� At VGS = Vfb, all gate voltage appears across the gate oxide and

Vs = 0.

� The above formula for Vth is valid for both n and p-channel MOSFET's.

� For a p-channel MOSFET, however, �F is negative and Qd is positive

such that,

�F = �VT ln0@ND

ni

1A ; Qd = 2

rq�sND�F

� where ND is the n-type substrate doping.

� In SPICE, PHI = 2�F is usually taken to be always positive such that,

�F = VT ln

0@NSUB

ni

1A

� where NSUB is either the n- or p-type substrate doping level.

� To account for the changes in sign for Vth calculations, an internal typeparameter is used where type = 1 for n-channel and type = �1 for

p-channel devices.

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MOS Transistors, E&CE 730, January, 2002 209

E�ect of Substrate Voltage on Vth(The \Body E�ect")

��������������������������������������������������������

��������������������������������������������������������

p-type

substrate VBS < 0

Wm

depletion layergate oxide

� If the body (or substrate bulk contact) to source di�usion voltage VBSis negative, the width of the depletion layer between the gate Wm will

increase for a given applied gate voltage VGS.

� The increased negative charge in the depletion layer requires an in-

creased VGS to reach inversion thereby increasing Vth.

� The maximum depletion layer width Wm at the onset of strong inver-

sion is,

Wm =

vuuuut2�(2�F � VBS)

qNA

� The depletion charge per unit area is then,

Qd = �qNAWm = �r2q�sNA(2�F � VBS)

� resulting in a modi�ed expression for Vth such that,

Vth = Vfb � Qd

Cox+ 2�F

= Vfb +

0B@p2q�sNA

Cox

1CAr2�F � VBS + 2�F

Page 220: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 210

= Vfb + r2�F � VBS + 2�F

� where the \Body E�ect" parameter is given by,

=

p2q�sNA

Cox

� To implement the above expression for Vth so that it can be used for

both n-channel and p-channel devices it can be written,

Vth = VTO +GAMMA

�pPHI � VBS �

pPHI

� where the zero substrate bias threshold voltage VTO is given by,

VTO = Vfb + type�GAMMA

pPHI + PHI

� and where is denoted by GAMMA in SPICE, and PHI = 2�F .

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MOS Transistors, E&CE 730, January, 2002 211

MOSFET Drain Current IDSLevel 1 Model

X j

Leffy = y = 0

VBS

V DS

VGS

x

y

VGS thV-=DSV

����������������������������������������������

��������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

����������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

n+ Source n+ Drain

W

L

l (y)

Substrate or Bulkp-

SourceDrain

Gate

gate oxide

location where

pinch-off

� For VGS > Vth, it is assumed that signi�cant free electron charge Qn

exists within the channel.

� The gate voltage then becomes,

VGS = Vfb �0B@Qd(y) +Qn(y)

Cox

1CA + 2�F + Vc(y)

� where Qd(y) and Qn(y) vary with position along the channel beneath

the gate due to a changing channel potential Vc(y).

� The channel potential varies with position if there is a non-zero drain-

to-source voltage VDS which tends to reduce the voltage di�erence

between gate and substrate reducing the net charge at position y along

the channel.

Page 222: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 212

Vc (y)

VGS Vth-

VDS

yLeff

� Solving for the depletion charge per unit area Qd(y) gives,

Qd(y) = �r2q�sNA(2�F � VBS + Vc(y))

� Neglecting e�ect of channel potential on Qd results in,

Qd(y) � �r2q�NA(2�F � VBS)

� The gate-to-source voltage is then approximated by,

VGS =

0@Vfb � Qd

Cox+ 2�F

1A� Qn(y)

Cox+ Vc(y)

= Vth � Qn(y)

Cox+ Vc(y)

� yielding for the channel inversion charge Qn(y),

Qn(y) = �Cox (VGS � Vth � Vc(y))

� Drain current IDS is composed primarily of electron drift current under

conditions of strong inversion such that,

IDS = In drift = qA(y)�n(y)nchannel(y)E(y)� �n(y) � an average constant channel mobility �n.

� The lateral electric �eld E(y) = �dVc(y)=dy

Page 223: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 213

� Qn(y) = �qn(y)l(y), where l(y) is the thickness of the inversion layer

which gets progressively thinner towards the drain end of the channel.

� Cross-sectional area for current ow is A(y) = Wl(y).

� IDS then becomes,

IDS = �nWQn(y)dVc(y)

dy

� Substituting for Qn(y) yields,

IDSdy = ��nWCox [VGS � Vth � Vc(y)] dVc(y)

� Using the fact that IDS must be constant along the entire channel

from the source where y = 0 to the end of the e�ective channel length

y = Leff , integration yields,

�IDSZ Leff0

dy = ��nWCox

Z VDS0

[VGS � Vth � Vc(y)] dVc(y)

� giving for the Level 1 drain current model,

IDS =�nWCox

Leff

264(VGS � Vth)VDS � V 2

DS

2

375

� The above equation for IDS is valid provided a continuous channel

exists between the source and drain.

� Once VDS � VGS�Vth, the channel region closest to the drain end is nolonger in strong inversion thus creating a \pinch-o�" region adjacent

to the drain di�usion.

� When pinch-o� occurs, to a �rst order approximation IDS no longer

increases since the potential at the drain end of the inversion layer will

remain at VGS � Vth.

Page 224: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 214

VDS (V)

IDS µA( )

V GS =

V DS VGS Vth VDSAT= - =

0 1 2 3 54

Linear Region

Saturation Region

1.5 V

2 V

3

4

5 V

V

V

� The drain current versus drain voltage characteristic IDS versus VDSthen becomes divided into two regions of operation.

� A \linear" region exists for small VDS where IDS is approximately

linearly related to VDS.

� A \saturation" region exists where to �rst order the drain current

\saturates" or is independent of the drain voltage. This occurs for

higher drain voltages where VDS > VGS � Vth, such that:

IDS =�nWCox

2Leff(VGS � Vth)

2

Page 225: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 215

Implementation of the SPICE Level 1 MOSFET Model

( e.g. in Berkeley SPICE 3)

� The Threshold voltage is modelled by,

Vth = VTO +GAMMA

�pPHI � VBS �

pPHI

� In the linear region for VGS > Vth and VDS � VDSat, IDS is modelled

by,

IDS =KPW

(L� 2LD)

24VGS � Vth � VDS

2

35VDS(1 + LAMBDAVDS)

� In the saturation region where VDS > VDSat, IDS is modelled by,

IDS =KPW

2(L� 2LD)(VGS � Vth)

2 (1 + LAMBDAVDS)

� where VDSat is given by,

VDSat = VGS � Vth

� VTO is the threshold voltage for VBS = 0.

� KP = UOCox, Cox = �ox=TOX

� UO is the channel mobility �n for n-channel and �p for p-channel

devices.

� GAMMA = =p2q�sNSUB=Cox.

� PHI = 2�F .

� LD = lateral di�usion of source and drain di�usions.

� NSUB = NA = substrate doping.

� The e�ective channel length Leff is modelled by,

Leff =

0@L� 2LD

1 + �VDS

1A

� LAMBDA (�) models e�ective channel length shortening with increas-

ing VDS.

Page 226: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 216

� The channel length modulation parameter is included in both the linear

and saturation regions so that the current and its �rst derivative are

continuous.

� VTO and GAMMA are known as \electrical parameters" while NSUB

and TOX are \process parameters". For all SPICE models, both kinds

of parameters can be entered with the convention that electrical param-

eters will always override the value computed from process parameters.

� For example if KP is not speci�ed but UO is, KP will be computed

from the entered TOX or its default value.

Page 227: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 217

IDS µA( )

VGS(V)

VTO = 1 V

VTO = 1.2 V

VBS =

VBS =

0 1 2 3 54

1

2

3

40 V

-5 VW = 100 micons

L = 100 microns

Variations in drain current with VTO in transfer characteristics for Level

1 model.I

DS µA( )

VDS (V)

VTO =

VTO =

0 1 2 3 54

10

20

30

401 V

1.2 V

GS =

3 V

4 V

5 V

V 2 V

Variations in drain current with VTO in output characteristics for Level 1

model.

Page 228: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 218

IDS µA( )

VGS(V)

VBS =

VBS =

µo= 800

µo = 850

0 1 2 3 54

1

2

3

40 V

-5 V

( )

)(

KP = 29.30

KP = 34.60

Variations in drain current with KP or � in transfer characteristics for

Level 1 model.I

DS µA( )

VDS (V)

0 1 2 3 54

10

20

30

40

GS =

3 V

4 V

5 V

V 2 V

KP = 29.30

KP = 34.60

Variations in drain current with KP or � in output characteristics for

Level 1 model.

Page 229: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 219

IDS µA( )

VGS(V)

VBS =

VBS =

N B = 1015 cm -32 x

= 0.744 V1/2γ

N B = 1015 cm -3

= 0.526 V1/2γ

0 1 2 3 54

1

2

3

40 V

-5 V

Variations in drain current with or NA in transfer characteristics for

Level 1 model.I

DS µA( )

VGS(V)

Tox = 120 nm

Tox = 100 nm

VBS = 0 V

VBS = -5 V

0 1 2 3 54

1

2

3

4

Variations in drain current with tox in transfer characteristics for Level 1

model.

Page 230: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 220

IDS µA( )

VDS (V)

TOX = 120 nm

TOX = 100 nm

0 1 2 3 54

10

20

30

40

GS =

3 V

4 V

5 V

V 2 V

Variations in drain current with tox in output characteristics for Level 1

model.I

DS µA( )

VDS (V)

GS =V 2 V

λ = 0.02 V -1

= 0 V -1

λ

0 1 2 3 54

10

20

30

40

3 V

4 V

5 V

Variations in drain current with � in output characteristics for Level 1

model.

Page 231: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 221

Physical Basis of the SPICE Level 2

MOSFET Model

� Level 2 includes the e�ect of channel potential Vc(y) on the depletion

charge Qd(y) and drain current IDS.

Qd(y) = �q2q�sNA [2�F � VBS + Vc(y)]

12

� The electron charge in the channel Qn(y) then becomes,

Qn(y) = �Cox [VGS � Vfb � 2�F � Vc(y)]�Qd(y)

= �Cox [VGS � Vfb � 2�F � Vc(y)]

+ Cox [2�F � VBS + Vc(y)]12

� where Cox =p2q�sNA has been used.

� Drain current is expressed as per the derivation for the Level 1 model,

IDS = �nWQn(y)dVc(y)

dy

� Integrating along the length of the e�ective channel yields,

�IDSZ Leff0

dy = ��nWCox

Z VDS0

[VGS � Vfb � 2�F � Vc(y)]

� [2�F � VBS + Vc(y)]12 dVc(y)

� The Level 2 drain current model then becomes,

IDS =�nWCox

Leff

264(VGS � Vfb � 2�F )VDS � V 2

DS

2

�2

3 "(2�F � VBS + VDS)

32 � (2�F � VBS)

32

#35

Page 232: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 222

Saturation Drain Voltage VDSatin the SPICE Level 2 Model

� Including the e�ect of channel potential on the depletion charge Qd(y)

allows for a more accurate determination of the drain voltage VDSatwhere drain current enters the saturation region.

� Assuming that saturation occurs when the channel potential Vc(y) =

VDSat at the same place in the channel where the channel charge

Qn(y) = 0 yields,

Qn(y) = �Cox [VGS � Vfb � 2�F � VDSat]�Qd(y)

= �Cox [VGS � Vfb � 2�F � VDSat]

� Cox [2�F � VBS + VDSat]12

= 0

� Solving for VDSat yields,

VDSat =

264VGS � Vfb � 2�F +

2

2

375�

264VGS � Vfb � VBS +

2

4

37512

� To compare, the Level 1 Model assumes a VDSat of,

VDSat = VGS � Vth

= VGS � Vfb � r2�F � VBS � 2�F

Page 233: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 223

Calculation of Work Function Di�erence (�ms)

� SPICE MOSFET models Levels 2 and 3 allow for the inclusion of the

in uence of the work function di�erences between the gate electrode

and the substrate on Vth.

� It is easier to calculate �ms if initially units of energy are assumed.

Conversion to units of voltage are then required for inclusion in Vthmodels.

φm

φs

χs

E c

E v

E g

2

φf

E fs

vacE

Evac

Efm

gateoxide

gate electrode semiconductor substrate

(p-type)(metal)

E i

Work function calculation for NMOS transistor with metal gate

electrode and p-type substrate.

� For a metal gate electrode and a p-type substrate in an n-channel

MOSFET, it is easy to see that,

�ms = �m � �s = �m � (�s + Eg=2 + �F )

� where �s is referred to as the \electron aÆnity" of the semiconductor

substrate, and Eg is the band gap energy.

� For an Al gate and a p-type silicon substrate, �m � 4:1 eV , �s = 4:05

eV , and Eg = 1:12 eV . Therefore,

�ms = �m � (�s + Eg=2 + �F )

= 4:1� 4:05� 0:56� �F = �0:51� �F

Page 234: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 224

� �F is the contact potential of the doped silicon relative to intrinsic

silicon. For SPICE this quantity is generally treated as a positive

quantity for both p- and n-type substrates and is given by,

�F = VT ln

0@NSUB

ni

1A

Page 235: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 225

� For a metal gate electrode in PMOS transistor (n-type substrate) a

similar approach yields for �ms.

φm

vacE

Efm

gateoxide

χs

E c

E v

Evac

E fs

iEφ

f

E g 2

φs

semiconductor substrate(n-type)

gate electrode(metal)

� Therefore, for the metal gate p-channel MOSFET,

�ms = �m � �s = �m � (�s + Eg=2� �F )

= 4:1� (4:05 + 0:56� �F ) = �0:51 + �F

� If the gate electrode is made from polysilicon, there are four more

possibilities for �ms, namely, an n-doped polysilicon gate with either

an n-doped substrate or a p-doped substrate, and a p-doped polysilicon

gate with either an n-doped or p-doped substrate.

� Polysilicon gates are usually heavily doped (either n or p type) such

that the silicon is \degenerately doped".

� The Fermi level in a degenerately doped semiconductor is assumed to

be coincident with either the conduction band energy Ec for a heavily

doped n+ polysilicon electrode, or coincident with the valence band

energy Ev for a heavily doped p+ polysilicon electrode.

Page 236: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 226

φs

χs

E c

E v

vacE

Evac

gateoxide

E g 2χ

m

E v

iE

E cE

fmφ

f

iE

E fs

semiconductor substrategate electrode

=

(n+ polysilicon)

=

(p-type)

� For an n+-doped polysilicon gate electrode and a p-type substrate, �msis given by,

�ms = �s � (�s + Eg=2 + �F ) = �Eg=2� �F

Page 237: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 227

vacE

gateoxide

χs

φm

E v

iE

E cE

fm

φs

χs

E c

E v

Evac

E g 2

iE

φf

E fs

semiconductor substrategate electrode

=

=

(n-type)(n+ polysilicon)

� For an n+-doped polysilicon gate electrode and an n-type substrate,

�ms is given by,

�ms = �s � (�s + Eg=2� �F ) = �Eg=2 + �F

Page 238: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 228

vacE

E v

iE

E c

χsφ

m

E g

Efm

gateoxide

φs

χs

E c

E v

Evac

E g 2

iE

φf

E fs=

semiconductor substrate

(n-type)(p+ polysilicon)

gate electrode

� For an p+-doped polysilicon gate electrode and an n-type substrate,

�ms is given by,

�ms = (�s + Eg)� (�s + Eg=2� �F ) = Eg=2 + �F

Page 239: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 229

vacE

E v

iE

E c

χsφ

m

E g

Efm

gateoxide

φs

χs

E c

E v

Evac

E g 2

iE

φf

E fs=

semiconductor substrate(p-type)

gate electrode(p+ polysilicon)

� For a p+-doped polysilicon gate electrode and a p-type substrate, �msis given by,

�ms = (�s + Eg)� (�s + Eg=2 + �F ) = Eg=2� �F

� A general formula for �ms neglecting the work function for metal gates

can be written as,

�ms = type

24�TPGEg

2� kT

qln

0@NSUB

ni

1A35

� TPG is the user-speci�ed gate electrode type:

{ TPG = 0 for metal gate.

{ TPG = -1 for polysilicon gate doped the same type as substrate.

{ TPG = +1 for polysilicon gate doped the opposite type to substrate.

� and type is an internal parameter which is equal to�1 for an n-channeldevice and +1 for a p-channel devices.

� The above formula does not include the work function of the metal

electrode, however, many versions of SPICE include this e�ect as well.

Page 240: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 230

Basic Threshold Voltage Implementation

in SPICE Level 2 Model

� For an n-channel device (ignoring the internal type parameter), the

zero substrate bias threshold voltage VTO is modelled by,

VTO = �ms � qNss

Cox+ 2�F +

r2�F

�ms = �TPGEg

2� kT

qln

0@NSUB

ni

1A

� qNss = Qi = e�ective interface charge, where Nss is the surface state

density.

� TPG is the gate electrode type:

{ TPG = 0 for metal gate.

{ TPG = -1 for polysilicon gate doped the same type as substrate.

{ TPG = +1 for polysilicon gate doped the opposite type to substrate.

� VTO can also be user speci�ed as per Level 1 which overrides calculation

using above model.

� Early versions of SPICE appear to require VTO to be user speci�ed in

the Level 1 model.

Page 241: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 231

Drain Current Implementation

in SPICE Level 2 Model

� For VDS < VDSat

IDS =KPW

(1� LAMBDAVDS)(L� 2LD)

264(VGS � Vfb � PHI)VDS � V 2

DS

2

�2

3GAMMA

"(PHI � VBS + VDS)

32 � (PHI � VBS)

23

#35

� For VDS = VDSat, VDS is simply replaced by VDSat in the above equa-

tion to calculate IDSat, where

VDSat =

264VGS � Vfb � PHI +

G2AMMA

2

375

�GAMMA

264VGS � Vfb � VBS +

G2AMMA

4

37512

� For VDS > VDSat

IDS =IDSat

(1� LAMBDAVDS)

� The at-band voltage Vfb does not appear to be a user de�ned model

parameter in common versions of SPICE for the Level 2 model, but

can be calculated using

Vfb = �ms � qNSS

Cox

� The drain current model for Level 2 (including the formula for VDSat)

gives better results than the Level 1 model, but still does not give suf-

�cient agreement with experimental data even when short and narrow

channel e�ects are absent.

Page 242: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 232

Variation of Channel Mobility with Gate Electric Field

SPICE Level 2 Model

� The electric �eld resulting from the potential di�erence between the

gate electrode and the inversion layer in the channel reduces carrier

mobility for high vertical electric �eld strengths.

Qn

Qd

QG

������������������������������������������������

n+ drainn+ source

x

= 0

x

y

� This phenomenon is modelled in the Level 2 model by reducing the

KP parameter at high electric �elds.

K0

P = KP

2640@ �s�ox

1A UcTOX(VGS � Vth � UtVDS)

375Ue

� The above equation can be derived approximately by using Gauss's

law such that the electric �eld perpendicular to the channel Ex(y) ata position y along the channel is given by,

jEx(y)j = jQn(y)j�sWL

� where the channel inversion charge is given by,

jQn(y)j = Cox [VGS � Vth � Vc(y)]

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MOS Transistors, E&CE 730, January, 2002 233

� The Vc(y) term in the above equation indicates that the electric �eld

perpendicular to the channel charge will depend upon both the gate

and drain bias voltages.

� An average electric �eld can be calculated assuming that Vc(y) �UtVDS.

� The above equations lead to an average electric �eld perpendicular to

the channel such that,

jExj �0@�ox�s

1A264(VGS � Vth � UtVDS)

tox

375

� Uc is the critical electric �eld above which the mobility is assumed to

decrease.

� Combining these equations, the modi�ed KP0

term can be seen as the

ratio of the critical electric �eld to the average electric �eld perpendic-

ular to the channel multiplied by the unmodi�ed KP term with an

additional �tting parameter Ue.

Page 244: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 234

Theory of Sub-Threshold Conduction

� Drift current dominates for VGS > Vth, however di�usion current dom-

inates for gate voltages below the threshold voltage.

� The dependence of drain current on gate and drain voltages can be ap-proximated by using a simple di�usion equation involving the gradient

of channel charge across the channel length.

IDS diffusion =qA(y)Dn(y) [n(y = 0)� n(y = Leff)]

Leff

� wheren(0) =

0B@ n

2i

NA

1CA exp

0@VsVT

1A ; n(Leff) =

0B@ n

2i

NA

1CA exp

0@Vs � VDS

VT

1A ;

� The cross sectional area of current ow is,

A(y) = Wxeff

� where xeff is the e�ective channel thickness in the vertical direction.

xeff can be estimated by calculating the vertical distance over which

the channel charge concentration n decreases by 1=e.

� The channel charge in the vertical x direction is related to the vertical

potential (x) across the channel by,

n(x) =

0B@ n

2i

NA

1CA exp

0B@ (x)VT

1CA

� which decreases by 1=e when (x) decreases by VT = kT=q.

� The surface electric �eld Es is then approximately,

Es � VTxeff

=

vuuut2qNAVs�s

� yielding for xeff ,

xeff � VT

vuuut �s2qNAVs

Page 245: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 235

� The cross sectional area A(y) then becomes,

A(y) = Wxeff = WVT

vuuut �s2qNAVs

� Substituting into the di�usion expression for IDS diffusion yields,

IDS diffusion =

0BB@WV 2

T �nL

0@ niNA

1A2

vuuutq�sNA

2

1CCA

�241� exp

0@�VDSVT

1A35 exp

0@VsVT

1AV �1=2

s

� To �rst order, the subthreshold drain current dependents exponentiallyon gate voltage much in the same manner as a bipolar transistor's

collector current is exponentially dependent upon emitter-base bias.

� In fact, in subthreshold conduction, a MOSFET is actually a low gain

bipolar transistor where the base width is de�ned by the e�ective chan-

nel length.

� Also, it can be seen that drain current becomes virtually independent of

VDS once VDS >> VT , where the thermal voltage VT is approximately

26 mV at room temperature.

� The term exp(Vs=VT ) introduces a \non-ideality" to the drain current

in subthreshold conduction, since the surface potential Vs is only a

fraction of the applied gate voltage VGS. This non-ideality has seri-

ous implications for how much voltage swing on the gate it takes to

e�ectively turn o� a MOSFET.

� In low voltage applications this can severely limit the reduction in o�-

state leakage current (and therefore battery lifetime) in low voltage

low power memory and microprocessor chips intended for portable

products.

� The gate voltage swing required to reduce the drain current by an orderof magnitude (factor of ten) is known as the \subthreshold swing" S,

which ideally we would like to be as small as possible.

Page 246: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 236

� The surface potential Vs can be expressed in terms of the gate volt-

age VGS by considering the MOS diode as two capacitances in series,

namely the gate oxide capacitance Cox and the depletion layer capac-

itance Cd in the substrate at the gate oxide { substrate interface.

Q G

Q G

V = VGS ox V+ s

Vox

V sC d

C ox

B = S

G

VGS

� Recognising the following relationships,

Vox =QG

Cox; Vs =

QG

Cd; VGS =

QG

CT; VGS = Vox + Vs

� where CT is the total gate capacitance comprised of Cox in series with

Cd such that,

CT =CoxCd

Cox + Cd=

Cd

1 + Cd=Cox

� a relationship between Vs and VGS can be obtained such that,

Vs =

0B@ 1

1 + Cd=Cox

1CAVGS =

1

nVGS

� where n is an ideality factor that depends upon the ratio of gate oxide

to depletion layer capacitance.

� In other words, if the gate oxide capacitance is much larger than the

depletion layer capacitance, most of the gate voltage drops across the

substrate (e.g. VGS � Vs) and will therefore have the largest in uence

on turning the MOSFET o� in subthreshold conduction.

� Any fraction of the VGS dropped across the gate oxide layer will not

contribute to variations in Vs that are required to reduce the drain

current in subthreshold conduction.

Page 247: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 237

� The same phenomenon occurs in bipolar transistors, where the emitter-

base junction capacitance partially reduces the emitter-base bias volt-

age required to inject minority carriers into the base region for control-

ling the collector current. Any potential dropped across the emitter-

base junction capacitance is e�ectively moving majority carrier charge

and not in uencing minority carrier transport.

� The subthreshold swing is related to the ideality factor and can be

estimated to be,

S = ln 10

0@ dVGSd ln IDS

1A � nVT ln 10

� The larger S is, the larger the gate voltage swing required to reduce

the drain current by a �xed ratio.

� Ignoring the impact of VDS on subthreshold drain current, and ignoring

the V �1=2s term, the subthreshold drain current takes on the simple

approximate form of,

IDS subthreshold = Ion exp

0@VGS � Von

nVT

1A

� The basic Level 2 model assumes this dependence, where IDS is cal-

culated using the strong inversion model for VGS � Von where Von is

given by,

Von = Vth + nVT

� andn = 1 +

qNFS

Cox+Cd

Cox

� qNFS is the capacitance associated with \surface fast state charges"

that are associated with traps at the interface which can �ll and empty

with mobile carrier charge during changes in VGS. This capacitance

appears electrically in parallel with the depletion capacitance and is

characterised by a density per unit area factor NFS.

Page 248: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 238

� Recognising that the depletion charge Qd(y) is given by,

jQd(y)j =q2q�sNA

r2�F � VBS + Vc(y)

= Cox

r2�F � VBS + Vc(y)

� Cd can be approximated (for a zero channel potential Vc(y)) by,

Cd =dQd

dVBS=

Coxp2�F � VBS

� The basic Level 2 model introduces a discontinuity between subthresh-

old and strong inversion regions of operation which can lead to non-

convergent circuit simulations.

� More advanced models introduce continuous models over the two re-

gions of operation such that the total drain current (di�usion plus

drift) components are included in all operating regions (at the expense

of additional computational e�ort).

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MOS Transistors, E&CE 730, January, 2002 239

Short and Narrow Channel E�ects in MOSFETs

X j

Leffy = y = 0

VBS

V DS

VGS

x

y

l d

l d

���������������������������������������

���������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

��������

��������

���������������

���������������

��������������������

��������������������

��������

n+ Source n+ Drain

W

L

l (y)

Substrate or Bulkp-

SourceDrain

Gate

gate oxide

pinch-off

-

source depletionlayer drain depletion layer

� As the channel length is reduced, departures from \long channel" be-

haviour may occur.

� These departures arise as a result of a 2-D potential distribution and

high electric �elds in the channel region.

� For a given channel doping concentration, the channel length is more

strongly a�ected by source and drain depletion layer widths when these

widths become comparable to the channel length.

� Potential distributions in the channel now depend on both the trans-

verse electric �eld Ex (which is controlled by the gate and body biases)

and the longitudinal electric �eld Ey (which is controlled by the drain

bias).

Page 250: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 240

� The gradual channel approximation assumes that the transverse elec-

tric �eld perpendicular to the channel is much larger than the longi-

tudinal electric �eld parallel to the channel.

� The Level 1 and Level 2 models are implicitly assuming the gradual

channel approximation in determining the channel charge solely from

transverse �eld considerations, followed by drain current determina-

tion from longitudinal �eld considerations, where the two-dimensional

coupling between �elds is ignored.

� In MOSFET's which exhibit short and/or narrow channel e�ects, this

approximation cannot be used to model transistor behaviour.

� The 2-D channel potential distribution results in a number of complex

characteristics including,

{ subthreshold behaviour degradation.

{ dependence of Vth on channel length and biasing voltages.

{ failure of current saturation due to punch-through where source

and drain depletion layer potentials meet beneath the gate.

� Small geometry MOSFET's also lead to higher internal electric �elds

if the bias voltages are not also decreased to compensate.

� As electric �elds are increased parallel to the channel, channel mobil-

ity becomes �eld-dependent as the relation between drift velocity and

�eld deviates from a linear behaviour. Eventually the drift velocity

saturates at the thermal velocity for high electric �eld.

Page 251: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 241

� For very high electric �elds, avalanche breakdown phenomena in the

drain depletion layer results in carrier multiplication and electron-hole

production. Holes are then attracted to the body or substrate contact

resulting in substrate current.

� Holes generated from carrier multiplication can also forward bias a

parasitic bipolar transistor formed between the n+ source { p substrate

{ n+ drain structure.

� High electric �elds also produce \hot" electrons that are capable of

jumping the potential barrier of the gate oxide resulting in oxide charg-

ing and gate currents.

� Oxide charging can in turn lead to threshold voltage shifts.

Page 252: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 242

Variation of Channel Length in the Saturation Region of

Operation

DS(for V = V Dsat )

Point C assumed to be wherecarriers reach saturated driftvelocity.

Point P assumed to be transitionbetween linear and saturated drain current models.

������������������������������������������������

��������

��������

������������������

���������������������������� ������������

n+ drainn+ source

x

y

L eff

l d

Gate

DSV

substrate or body

PC

LD LD

L

� Increases in VDS beyond VDSat results in the channel pinch-o� point

P moving towards the source decreasing channel length.

� This phenomenon is known as \channel length modulation".

� The channel potential Vc(y = P ) = VDSat, with VDS � VDSat being

dropped across the depletion layer between the substrate and the drain

along the channel.

� Leff = L� 2LD is then replaced by Leff � ld in drain current expres-

sions.

� If the dependence of IDS on VDS in saturation is assumed to be of the

form,

IDS =IDS (for ld = 0)

1� �VDS

� then � becomes,

� =ld

LeffVDS

� The most general approach to solve for ld is to solve the 2-D Poisson

Page 253: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 243

equation,

@2V (x; y)

@2x+@2V (x; y)

@2y=��(x; y)

�s

� where V (x; y) is the 2-D potential distribution beneath the gate in

the vicinity of the pinch-o� region, and �(x; y) is the 2-D net charge

(space charge and free carriers) beneath the gate in the vicinity of the

pinch-o� region.

� The simplest model for ld is obtained if it is assumed that the potential

and net charge distributions are 1-D and that the net charge originates

only from a space charge layer in a uniformly doped substrate such

that,

ld =

vuuuut2�s(VDS � VDSat)

qNA

� This simple model over estimates the output conductance (or variation

in drain current versus drain voltage) since it ignores the presence of

fringing �elds due to the gate electrode.

� An improved model assumes a �nite electric �eld boundary condition

Ep (as oppose to a zero electric �eld) in the channel at the point P

arising from the gate bias.

� This assumption results in,

ld =

vuuuut0@ 2�sqNA

1A (VDS � VDSat) +

0@ �sqNA

1A2 E2p �

0@ �sqNA

1A Ep

� The Level 3 Model assumes that Ep is given by,

Ep = IDSatK

GDSatLeff

� and that ld is given by,

ld =

vuuuut0@2�sKqNA

1A (VDS � VDSat) +

0@ �sqNA

1A2 E2p �

0@ �sqNA

1A Ep

Page 254: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 244

� where K is a �tting parameter (used to multiply the �rst term in the

ld expression as well as to calculate Ep), and where the conductance

term GDSat is evaluated from,

GDSat =dIDSdVDS

1AVDS=VDSat

� The e�ects of drift velocity saturation can be included to model the

impact of free charge in the vicinity of the pinch-o� region on channel

length modulation by assuming that the electric �eld at the pinch-o�

point Ep is given by,

Ep = vsat2�

� where vsat is a user speci�ed parameter (VMAX) that represents the

value of the saturated drift velocity.

� The Level 2 model uses this approach where ld is given by,

ld =

vuuuut0B@ 2�sK

qNANeff

1CA (VDS � VDSat) +

0B@ �sqNANeff

1CA2 0@vsat2�

1A2

�0B@ �sqNANeff

1CA0@vsat2�

1A

� where Neff is a unit-less �tting parameter to modify the substrate

doping NA.

� Typical values of VMAX are 5� 106 cm=sec.

� If VMAX is not speci�ed, then some versions of SPICE will calculate

it dependent upon the bias levels present and the geometry of the

MOSFET.

Page 255: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 245

E�ects of Channel Length and Width

on Threshold Voltage

W = 20 micronsL varying

L = 20 micronsW varying

0.5

0.8

0.3

thV

Channel Length L or

Channel Width W

1 2 3 4 5 180

� For a �xed channel widthW , the threshold voltage Vth decreases with

decreasing L.

� For a �xed channel length L, the threshold voltage Vth increases with

decreasing W .

� A decrease in Vth with decreasing L becomes noticeable when L be-

comes comparable to Xsd and Xdd, the source and drain depletion

widths, respectively. When this happens, a MOSFET is considered to

be a \short channel" device.

� When W becomes comparable to Wm, the maximum depletion layer

width in the saturation region of operation, the MOSFET begins to

behave as a \narrow channel" device.

Page 256: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 246

Variation of Vth with Channel Length L

in the SPICE Level 2 Model

DSV = 0.1 V

Wm

X jX j Xc cX

Wm

X j X j

Wm

Wm

∆ Qd

2

Qd

2

∆ Qd

Qd

∆ QdQ

d= +

x

y

substrate or body

W m

L

L

n+ source n+ drain

� For short channels, source and drain depletion regions reduce the de-

pletion charge that the gate voltage is required to induce to reach

strong inversion in the channel.

� Simple models assume that the depletion charge per unit area induced

by the gate voltage at VGS = Vth is simply Qd = qNAWm.

� In short channel devices, the source and drain depletion regions reduce

this charge to Q0

d which is less than Qd thereby reducing Vth.

� \charge sharing" and \empirical approaches" are two modelling ap-

proaches used to estimate the true Q0

d to use in determining Vth in

short channel devices.

� Charge sharing models account for reduction in Vth through the shar-

ing of the channel depletion region charge between the gate and the

source/drain junctions.

� The models assume a priori geometrical forms for the source and drain

depletion regions and their boundaries.

Page 257: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 247

� Channel depletion charge is divided into two regions: one associated

with the gate and one associated with the source and drain junctions.

� The simplest charge sharing approach assumes the following:

{ substrate is uniformly doped.

{ source and drain are at zero or low potential

(i.e. VDS = 0).

{ source and drain junction geometry is cylindrical with radius Xj.

{ charges at source and drain ends of the channel are shared equally

between gate and source/drain junctions resulting in a trapezoidal

shape for the gate controlled depletion charge.

{ channel depletion width is equal to that of the source/drain deple-

tion width.

(i.e. Xds = Xdd = Wm =r(2�s(2�F � VBS)=(qNA)).

� Based upon the above assumptions, Q0

d can be calculated as follows:

Qd = qNAWm

Q0

d = Qd(Trapezoid Area)

LWm= qNAWm

0BB@Wm(L + L

0

)

2

1CCA0@ 1

LWm

1A

= qNAWm

0BB@(L + L

0

)

2L

1CCA

� Using trigonometry,

Xc = Xj

0BB@vuuuut1 + 2Wm

Xj� 1

1CCA

� Recognising that L = L0 + 2Xc yields,

Q0

d = qNAWm

26641� Xj

L

0BB@vuuuut1 + 2Wm

Xj� 1

1CCA3775

= qNAWmFl

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MOS Transistors, E&CE 730, January, 2002 248

� Using,

Wm =

vuuuut2�s(2�F � VBS)

qNA; =

p2q�sNA

Cox

� gives,Q

0

d = CoxFlr2�F � VBS

where,

Fl =

26641� Xj

L

0BB@vuuuut1 + 2Wm

Xj� 1

1CCA3775

� A modi�ed can be de�ned such that,

0

= Fl

� The channel length dependent Vth then becomes,

Vth = Vfb + 2�F + 0r2�F � VBS

X jX j

X j X j

X sdX

dd

X cdXcs L

DSV

Wm (y)x

y

X sd

Xdd

substrate or body

L

n+ source n+ drain

� Dependence on source and drain voltages can be included by using

Xsd and Xdd for the source and drain depletion widths, respectively,

instead of Wm in the simpler model, where,

Xsd =

vuuuut2�s(2�F � VBS)

qNA; Xdd =

vuuuut2�s(2�F � VBS + VDS)

qNA;

Page 259: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 249

� Using a similar derivation method as for the simpler model,

Xcs = Xj

0BB@vuuuut1 + 2Xsd

Xj� 1

1CCA ; Xcd = Xj

0BB@vuuuut1 + 2Xdd

Xj� 1

1CCA

� Recognising that L = L0

+Xcs +Xcd gives the dependence of Vth on

channel length L in the Level 2 model such that,

Fl = 1�2664Xj

2L

0BB@vuuuut1 + 2Xsd

Xj� 1

1CCA + Xj

2L

0BB@vuuuut1 + 2Xdd

Xj� 1

1CCA3775

� It is instructive to calculate the change in threshold voltage �Vth whicharises from including the in uence of short channel e�ects.

� Vth for a long channel device is,Vth long channel = Vfb + 2�F +

r2�F � VBS

� Vth including short channel e�ects is given by,

Vth short channel = Vfb + 2�F + Flr2�F � VBS

� Therefore,�Vth = Vth long channel � Vth short channel

= r2�F � VBS (1� Fl)

= r2�F � VBS

2664Xj

L

0BB@vuuuut1 + 2Wm

Xj� 1

1CCA3775

=

0@Qd

Cox

1A0@Xj

L

1A0BB@vuuuut1 + 2Wm

Xj� 1

1CCA

� From the above equation for �Vth several conclusions can be made

regarding the in uence of device structure on short channel e�ects:

{ Greater gate oxide thickness results in smaller Cox and therefore

greater short channel e�ects. For this reason, as channel length is

decreased in deep sub-micron MOSFET's, the gate oxide should be

made thinner to assist in suppressing short channel e�ects.

Page 260: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 250

{ Lower substrate doping NA results in greaterWm for given terminal

voltage magnitudes which increases short channel e�ects. For this

reason small geometry MOSFET's require higher substrate doping

levels.

{ Larger source and drain junction depths Xj result in greater short

channel e�ects. For this reason source and drain junctions depths

must be decreased as channel length is decreased.

{ Higher body-to-source bias voltage VBS results in larger Wm and

greater short channel e�ects.

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MOS Transistors, E&CE 730, January, 2002 251

Variation of Vth with Channel Width W

in the SPICE Level 2 Model

������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

2

∆ Q w

2

∆ Q w

����������������������������������������������������������������������

����������������������������������������������������������������������

����������������������������������������������������������������������

����������������������������������������������������������������������

Wm

W

Field Oxide Field Oxidegate oxide

Gate Electrode

p+ dopant p+ dopant

� Tapering of gate oxide from thin to thick oxide at the sides of the

active channel region results in a gate controlled depletion region at

the edges of the device near the isolation oxide (LOCOS) resulting in

increased Vth.

� When the gate width W becomes comparable to the depletion layer

thickness Wm, the extra depletion charge at the gate edges �Qw out-

side the active gate area becomes a signi�cant part of the total deple-

tion charge Qd.

� The narrow channel e�ect can be taken into account by modifying the

expression for Vth such that,

Vth = Vfb + 2�F + 0r2�F � VBS +

�Qw

Cox

� Modelling the narrow channel impact of Vth amounts to estimating

�Qw.

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MOS Transistors, E&CE 730, January, 2002 252

Wm

Wm

2

∆ Q w

2

∆ Q w

2

∆ Q w

π2

Wm

W

L

W m

AA

� Ignoring short channel e�ects, the total depletion charge is,

QT = Qd +�Qw = qNAWmWL+�Qw

� where Qd is the total depletion charge here (as opposed to per unit

area in previous derivations) in the absence of any short or narrow

channel e�ects.

� Therefore,Qd

QT=

Qd

Qd +�Qw=

1

1 + (�Qw=Qd)

� Also,Qd

QT=

qNAWmWL

qNAL(WmW + 2A)=

1

1 + (2A)=(WWm)

Page 263: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 253

� Therefore, assuming that the cross-sectional area of �Qw=2 forms a

quarter circle,

�Qw

2=

QdA

WmW=qNAWm(�=4)W

2m

WmW

=q�NAW

2m

4W=q�NA

4W

0B@2�s(2�F � VBS)

qNA

1CA =

��s(2�F � VBS)

2W

� Therefore,

�Qw =��s(2�F � VBS)

W

� The threshold voltage taking into account short and narrow channel

e�ects is then,

Vth = Vfb + 2�F + 0r2�F � VBS +

��sWCox

(2�F � VBS)

� The Level 2 model uses a slightly di�erent model for the narrow chan-

nel e�ect which involves an empirical parameter Æ (called DELTA in

SPICE) such that,

Vth = Vfb + 2�F + 0r2�F � VBS +

��sÆ

4WCox(2�F � VBS)

Page 264: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 254

IDS µA( )

VGS(V)

W = 100 micronsL = 100 micronsVDS = 50 mV

VBS = 0 V

VBS = -5 V

UC = 10 4

V/cm

UC = 10 5

V/cm

0 1 2 3 54

1

2

3

4

Variations in drain current with Uc in transfer characteristics for Level 2

model.I

DS µA( )

VGS(V)

Ue = 0

Ue = 0.1

Ue = 0.2

VBS = 0 V

VBS = -5 V

0 1 2 3 54

1

2

3

4

Variations in drain current with Ue in transfer characteristics for Level 2

model.

Page 265: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 255

IDS µA( )

VDS (V)

GS =V 2 V

Ue = 0.2

Ue = 0

0 1 2 3 54

10

20

30

40

3 V

4 V

5 V

Variations in drain current with Ue in output characteristics for Level 2

model.I

DS

VGS(V)0 0.5 1.0 1.5 2.0 2.5

NFS = 0 (default)

NFS-3

= 2 x 10 11

cm

NFS = 5 x 1011cm -3

NFS = 1011

cm -3

V DS = 0.5 V

VBS = 0 V

(A)

10

10

10

10

10

10

10

10

-5

-6

-7

-8

-9

-10

-11

-12

Transfer characteristics in weak inversion region for Level 2 model.

Page 266: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 256

VSB (V)

(V)V TH

W = 100 micronsL = 5 microns

X j= 1.5 microns

W = 100 micronsL = 5 microns

X j = 1 micron

W = 100 microns= 0.8 micronsDL

V = 0.05 VDS

0 2 4 6 8 10

0.5

1.0

1.5

2.0W = L = 100 microns

Impact of body e�ect on Vth for short-channel MOS transistor according

to Level 2 model.

VSB (V)

(V)V TH

0 2 4 6 8 10

-0.3

0.0

-0.2

-0.1

X = 0.5 microns

X j

j= 0.1 microns

Measurements

Dependence of Vth on XJ and VDS as predicted by Level 2 model

compared with measurements for a short channel MOSFET.

Page 267: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 257

IDS µA( )

VGS(V)

VDS = 2 V

W = 100 microns

L = 5 micronsV BS = 0 V

X j = 2 microns

X j = 2 microns

VBS = -5 V

X j = 0 microns

VBS = -5 VV BS = 0 V

X j = 0 microns

0 1 2 3 54

1/2

1

2

3

4

Square root drain current dependence on XJ and VBS in transfer

characteristics for a short channel MOSFET according to Level 2 model.

VGS(V)

VBS = -5 V

X j = 0 microns

X j = 2 microns

X j = 0 microns

VBS = 0 V

IDS µA( )

L = 5 microns

VDS = 50 mV

W = 100 microns

0 1 2 3 54

60

80

40

20

Drain current dependence on XJ and VBS in transfer characteristics for a

short channel MOSFET according to Level 2 model.

Page 268: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 258

W = 100 micrions

L = 5 microns

VDS (V)

IDS µA( )

VGS = 1.5 V

X j = 2 microns

X j = 2 micronsVGS = 1.2 V

X j = 0 microns

VGS = 1.2 V

X j = 0 microns

VGS = 1.5 V

0 1 2 3 54

5

20

10

15

Drain current dependence on XJ and VBS in output characteristics for a

short channel MOSFET according to Level 2 model.I

DS µA( )

VDS (V)

V =GS

2 V

V =GS

3 V

V =GS

4 V

V =GS

5 V

v max = 5 x 10 4

m/sv max =

0 1 2 3 54

250

500

750

1000

W = 100 microns

L = 5 microns

0

Variations of drain current with VMAX in output characteristics

according to Level 2 model.

Page 269: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 259

IDS µA( )

VGS(V)

δ = 0

δ = 1

BS = 0 VV

= -5 VBSV

0 1 2 3 54

0.20

0.15

0.10

0.05

VDS = 50 mV

W = 5 microns

L = 100 microns

Variations of drain current with Æ in transfer characteristics according to

Level 2 model.

Page 270: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 260

Gate Capacitance

QD

QS

QG

QB

Drain

Source

Gate Bodyi

i

i

ig

d

b

s

� The total internal charge associated with the source, drain, gate and

bulk charges is a function of the terminal voltages such that,

Qj = f(vg; vs; vd; vb)

� where vg is the gate voltage, vs is the source voltage, vd is the drainvoltage, and vb is the bulk or body voltage.

� All voltages include time dependence.

� Charge conservation demands,

QG +QS +QD +QB = 0

� where QG is the charge on the gate electrode controlled by the gate

voltage, QS is the internal charge controlled by the source voltage ,

QD is the internal charge controlled by the drain voltage, and QB is

the internal charge controlled by the bulk voltage ,

� Current conservation demands,

ig + is + id + ib = 0

� where ig is the gate current, is is the source current, id is the drain

current, and ib is the bulk current,

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MOS Transistors, E&CE 730, January, 2002 261

� The \quasi-static approximation" is used which implies that steady

state charge distributions are established instantaneously when the

terminal voltages change. It assumes that the total quantity of charge

takes times to change, but the time the charge takes to reach a partic-

ular distribution is neglected.

� The quasi-static approximation works well except if time constants

associated with the free carrier stored charge in the channel becomes

comparable to time constants associated with charges from space charge

regions and overlap capacitances (i.e. in long channel devices at high

frequencies).

� The various time-dependent terminal currents are,

ig(t) = �IG(v(t)) + dQG

dt; is(t) = �IS(v(t)) + dQS

dt

id(t) = �ID(v(t)) + dQD

dt; ib(t) = �IB(v(t)) + dQB

dt

� where IG(t), IS(t), ID(t), and IB(t) are the quasi-static conduction

currents which have the same value at a particular time t as they

would under steady state conditions for given instantaneous values of

terminal voltages v(t).

� IG(t) and IB(t) are assumed to be equal to zero.

� Therefore,

is + id = IDS(v(t)) +dQI(t)

dt

� where QI(t) = QS(t) +QD(t).

� Assuming that the source and drain regions do not contribute signif-

icantly to the depletion charge beneath the gate, it can be assumed

that QI(t) is comprised of only free channel inversion charge, leaving

QB(t) to represent the entire space charge layer or depletion charge

beneath the gate.

Page 272: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 262

� Charge conservation still demands that,

QG(t) +QI(t) +QB(t) = 0

� whereQI = W

Z L0QI(y)dy; QB = W

Z L0QB(y)dy

� The most basic model implemented in Level's 1, 2, 3, and 4 (BSIM)

in SPICE is the Meyer Model.

� The Meyer model su�ers from charge conservation and does not take

into account the fact that the free channel inversion charge is shared

between the source and drain terminals (i.e. charge partitioning).

� In the Meyer model the gate capacitance is broken into three compo-

nents, namely the gate-to-source capacitance CGS, the gate-to-drain

capacitance CGD, and the gate-to-bulk capacitance CGB.

Page 273: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 263

Strong Inversion Meyer Model for Gate Capacitance in the

Linear Region of Operation

� In strong inversion, the inversion channel charge QI(y) is given by,

QI(y) = Qn(y) = �Cox[VGS � Vth � V (y)]

� where V (y) is the lateral channel potential Vc(y).� A change of integration variables yields,

�WZ Leff0

Qn(y)dy = �WZ VDS0

Qn(y)dy

dVdV

� From previous derivations for drain current in the Level 1 model,

IDSdy = �nWCox[VGS � Vth � V ]dV

� Therefore,dy

dV=

�nWCox(VGS � Vth � V )

IDS

=Leff(VGS � Vth � V )

(VGS � Vth)VDS � V 2DS=2

=2Leff(VGS � Vth � V )

(VGS � Vth)2 � (VGD � Vth)2

� where VDS = VGS�VGD was used in the last line of the above equation.

� The total inversion charge then becomes,

QI = �WZ Leff0

Qn(y)dy

=2WLeffCox

(VGS � Vth)2 � (VGD � Vth)2

Z VDS0

(VGS � Vth � V )2dV

=

0@2WLeffCox

3

1A264(VGS � Vth)

3 � (VGD � Vth)3

(VGS � Vth)2 � (VGD � Vth)2

375

� where VDS = VGS � VGD was again used in the last line of the above

equation.

� The total gate charge QG is the addition of the inversion charge and

the bulk charge such that,

QG = �QI �QB

Page 274: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 264

� In strong inversion it is assumed that the bulk or depletion charge

does not change due to the free carrier channel charge screening the

depletion charges beneath the gate from any changes in gate voltage.

� The components from gate capacitance then become,

CGS =@QG

@VGS

1AdVGD=dVGB=0

=2

3WLeffCox

2641� (VGD � Vth)

2

(VGD + VGS � 2Vth)2

375

CGD =@QG

@VGD

1AdVGS=dVGB=0

=2

3WLeffCox

2641� (VGS � Vth)

2

(VGD + VGS � 2Vth)2

375

CGB =@QG

@VGB

1AdVGS=dVGD=0

= 0

Page 275: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 265

Meyer Model for Gate Capacitance in the Saturation

Region of Operation

� In saturation, the Level 1 model assumes the simple form of VDSat =

VGS � Vth.

� Recognising that VDS = VGS � VGD, implies that VGD = Vth in satu-

ration.

� Substituting VGD = Vth into the strong inversion linear region capaci-

tance equations yields,

CGS =2

3WLeffCox; CGD = 0; CGB = 0

� Extrinsic components of capacitance are also added to the above in-

trinsic components.

� The extrinsic components arise from drain and source electrodes over-

lapping the gate oxide along the gate width, as well as the gate elec-

trode overlapping the transition from gate oxide to �eld oxide along

the gate length.

� Therefore,CGS = CGS intrinsic +GGSOW

CGD = CGD intrinsic +GGDOW

CGB = GGBOLeff

� where CGSO is the overlap capacitance per unit length of gate width

W of the source electrode, CGDO is the overlap capacitance per unit

length of gate widthW of the drain electrode, and CGBO is the overlap

capacitance per unit length of gate length Leff of the gate electrode,

Page 276: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 266

CGB

C

CGSO C GS C

GDC

GDO

JI dsC

J

BS

Extrinsic Part

Intrinsic Part

S D

G

B

C GBO

BD

Large Signal Model for a MOSFET Including Capacitances

Page 277: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 267

Threshold Voltage in Non-Uniformly Doped MOSFETs

� Vth is usually adjusted to a desired value by implanting the surface of

the substrate to increase its doping.

Potential

Surface

1.00.1

0yL

eff

L eff y

S D

0

L = 6.25 microns

L = 1.25 microns

L = 1.25 microns, VDS = 5 Volts

, V

, DSV = 0.5 Volts

DS = 0.5 Volts

� a deeper implant is sometimes used to reduce the e�ect of \drain-

induced-barrier-lowering" (DIBL) which can a�ect short channel MOS-

FET's.

� For large VDS in short channel MOSFET's, the extension of the drain

depletion layer into the channel region reduces the gate controlled

charge.

� Electric �eld penetration into the channel region lowers the potential

barrier at the source resulting in increased injection of electrons by the

source giving rise to an increased drain current.

� The impact of DIBL on Vth can be accounted for by assuming a linear

dependence on VDS such that,

Vth(VDS) = Vth(VDS < 0:1V )� �VDS

� Sometimes the drain is referred to as a \second gate" and the param-

eter � is referred to as the \coeÆcient of static feedback".

Page 278: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 268

� DIBL can be the principle factor dominating the output resistance in

short channel MOSFET's in saturation.

� If the substrate doping is non-uniform beneath the gate, the conven-

tional model for Vth is not valid, i.e.

Vth = Vfb + 2�F + r2�F � VBS

N(x)

N o

0.62 N o

xR p

� Ion-implantation results in a Gaussian-like impurity pro�le beneath

the gate.

� Assuming a true Gaussian impurity pro�le, the peak impurity concen-

tration No at the \range" depth RP can be expressed in terms of the

total \dose" of impurity atoms implanted per unit area Di and the

straggle �RP such that,

No =Di

�RPp�

� The resulting impurity pro�le for a Gaussian is,

N(x) = No exp

264�(x�RP )

2

2�R2P

375

� Typical doses can range from 1010 to 1012 atoms per cm2.

Page 279: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 269

1018

1017

1016

1015

1014

Nb

N A

N(x)

x

0.0 1.0microns

sN

Xi

Channel Impurity Profilefor nmos with n+ poly gateor pmos with p+ poly gate

or

� To avoid intractable analytic expressions for Vth, the non-uniform im-

purity pro�le can be approximated by a step pro�le such that the

area under the step pro�le plot is the same as that under the true

non-uniform pro�le.

� Equal areas in a plot of impurity pro�les versus depth amounts to

maintaining the same dose Di between the true and step pro�les.

� For enhancement mode MOSFET's, two possible scenarios can arise.

� One scenario is for a substrate pro�le of one conductivity type (p or

n-type) which could appear in an NMOS with an n+ polysilicon gate

electrode or a PMOS with a p+ polysilicon gate electrode.

1018

1017

1016

1015

1014

X i

sN

Nb or N

A

N(x)

x

0.0 1.0microns

0x

N(x)

Channel Impurity Profilefor pmos with n+ poly gate

p-type

n-type

Page 280: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 270

� Another scenario would involve a substrate that has been counter-

doped at the substrate surface to adjust Vth such that a pn-junction

forms beneath the gate, which could appear in a PMOS with an n+

polysilicon gate electrode.

� Di�erent models are required for the di�erent substrate doping scenar-

ios.

Dose = 12 x 1011

cm-2

8 x 1011

4 x 1011

4

6

Vth

2 φF

- VBS

V1/2

0

V

0

� Altering the impurity pro�le at the surface of the substrate results in a

more complex behaviour in threshold voltage with respect to changes

in VBS.

� As the depletion layer moves deeper into the substrate with increasing

VBS, the e�ective at �rst appears higher in the higher substrate dop-

ing at the surface, and then decreases as the depletion layer penetrates

the lower uniformly doped portion of the substrate.

� The general physical relation for Vth used to develop a model for a

uniformly-doped substrate still holds for non-uniformly doped sub-

strates such that,

Vth = Vfb + Vsi � Qb

Cox

� where Vsi is the surface potential at strong inversion and is not neces-

sarily equal to 2�F as for the uniform-doped substrate case.

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MOS Transistors, E&CE 730, January, 2002 271

� Vfb is the \ at-band" voltage which is the gate voltage which results

in zero space charge beneath the gate.

� The at-band voltage Vfb is generally treated as a parameter for MOS-

FET's with a non-uniformly doped substrate.

� There are several de�nitions which can lead to a model for Vsi,

1. The substrate doping NA (or Nb) can be replaced by the surface

doping Ns such that,

Vsi = 2VT ln

0@Ns

ni

1A

2. The minority carrier concentration at the surface is equal to the

majority carrier concentration N(Wm) at the boundary of the de-

pletion layer when the depletion layer is at its maximum depthWm.

This leads to expressions such as,

Vsi = VT ln

0B@N(Wm)NA

n2i

1CA

3. The variation in the inversion and depletion layer charge densities

Qn and Qd with respect to surface potential Vs are equal such that,

dQn

dVs=dQd

dVs

which can be shown to be equivalent to,

Vsi = VT ln

0@NavNA

n2i

1A ; Nav =

1

Wm

Z Wm

0N(x)dx

� The above three de�nitions can lead to di�erences in Vth by as much

as 0.2 Volts.

� The �rst de�nition is often used due to simplicity but can be inaccurate

for heavy implant doses.

� The depletion charge Qd can be evaluated using,

Qd = �qZ Wm

0N(x)dx

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MOS Transistors, E&CE 730, January, 2002 272

� Vth then becomes,

Vth = Vfb + Vsi � q

Cox

Z Wm

0N(x)dx

XiN

A

Ns

x

N (x)

0

� Assuming an equivalent step pro�le containing the same dose Di as

the true implanted pro�le, the \areas" of the pro�le are equated to the

dose such that,

(Ns �NA)Xi =Z1

0(N(x)�NA)dx = Di

� yielding an equivalent uniformly doped surface concentration Ns of

Ns =Di

Xi+NA

� where Di and Xi become new model parameters.

� In a \shallow implant" model it is assumed that the implanted dose

forms an in�nitely thin sheet of dopant (i.e a delta function) resulting

in a simple expression for Vth such that,

Vth = Vfb + 2�F +qDi

Cox+

r2�F � VBS

� Here it is assumed that and Vsi are still controlled by the uniform

substrate doping NA as per non-implanted MOSFET's.

� The in�nitely thin shallow implant implicitly assumes that the thresh-

old voltage changes without any change in depletion layer width Wm.

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MOS Transistors, E&CE 730, January, 2002 273

� Various empirical approaches have been adopted.

� Recognising that the slope of Vth decreases with increasing back bias

VBS in MOSFET's with non-uniformly doped substrates, the SPICE

Level 4 (BSIM) model uses,

Vth = Vfb + 2�F + r2�F � VBS + o(2�F � VBS)

� where in general o will be a negative number.

� Comparing the BSIM model for Vth with the Level 1 model, it can

be seen that the a modi�ed im has been introduced which is VBSdependent such that,

im = + or2�F � VBS

� In the SPICE Level 4 (BSIM) model, Vth including user-de�ned pa-

rameters is modelled by ,

Vth = VFB + PHI +K1

r2�F � VBS �K2(PHI � VBS)� �VDS

� where PHI = 2�F .

� The body e�ect coeÆcient K1 and the drain/source depletion charge-

sharing coeÆcient K2 together model the e�ects of non-uniform dop-

ing, and DIBL is included via the zero bias drain-induced barrier-

lowering coeÆcient �.

� In BSIM, o is replaced by�K2 to handle both the non-uniform doping

e�ect (in conjunction withK1) as well as other e�ects which can reduce

Vth such as the drain and source depletion charges.

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MOS Transistors, E&CE 730, January, 2002 274

Drain Current Expressions

for SPICE Level 3 and Level 4 (BSIM) Models

Using Taylor Series Expansions

� The 3/2 power in the drain current expression of the Level 2 model

results in a computationally complex IDS equation as well as making

it nearly impossible to arrive at closed form current and capacitance

equations for short-channel devices.

� The square root dependence of depletion charge Qd(y) on channel po-

tential V (y) is the source of the 3/2 power in the �nal IDS expressions

of the Level 1 and 2 models.

Qd(y) = �Cox [2�F � VBS + V (y)]1=2

� Qd(y) can be approximated by a �rst order Taylor series expression.

� The Taylor series expansion of a function f(x) about a point a is givento �rst order by,

f(x) = f(a) + f0

(a)(x� a) + :::

� Let x = V + Vo and a = Vo, such that x � a = V , where Vo =

2�F � VBS. Therefore,

f(V + Vo) = [2�f � VBS + V (y)]1=2 = [V (y) + Vo]1=2 =

� The �rst derivative of f(V + Vo) is,

f0

(V + Vo) =1

2[2�F � VBS + V (y)]�1=2

� V (y) = 0 at x = Vo. Therefore,

f(a) = [2�F � VBS]1=2

� and,f0

(a) =1

2[2�F � VBS]

�1=2

Page 285: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 275

� Therefore, to a �rst order approximation,

[2�F � VBS + V (y)]1=2 � [2�F � VBS]1=2 +

1

2[2�F � VBS]

�1=2V (y)

=r2�F � VBS + ÆV (y)

� whereÆ =

0:5p2�F � VBS

� The depletion charge Qd(y) is then approximated by,

Qd(y) �r2�F � VBS +

0:5V (y)p2�F � VBS

� The above expression for Qd(y) over-estimates the depletion charge

controlled by the gate for large VDS due to the assistance given by the

drain depletion charge.

� A modi�ed semi-empirical expression forQd(y) is sometimes employed

with an added g parameter to reduce Qd(y) such that,

Qd(y) � �Cox

264r2�F � VBS +

0:5gV (y)p2�F � VBS

375

� The correction factor g is found to vary from 0.5 to 0.8.

Page 286: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 276

� Neglecting the g parameter for simplicity (g = 1), the inversion charge

Qn(y) is then approximated by,

Qn(y) = �Cox[VGS � Vfb � 2�F � V (y)]�Qd(y)

= �Cox[VGS � Vfb � 2�F � V (y)]

+Cox [2�F � VBS + V (y)]1=2

� �Cox[VGS � Vfb � 2�F � V (y)]

+Cox [(2�F � VBS)1=2 + ÆV (y)]

= �Cox[VGS � Vfb � 2�F � (1 + Æ )V (y)]

+Cox [2�F � VBS]1=2

= �Cox[VGS � Vfb � 2�F � (2�F � VBS)1=2 � (1 + Æ )V (y)]

= �Cox[VGS � Vth � (1 + Æ )V (y)]

= �Cox[VGS � Vth � �V (y)]

� where � = (1 + Æ ) and Vth is,

Vth = Vfb � 2�F � (2�F � VBS)1=2

� The drain current IDS can then be derived from,

IDS = �nWQn(y)dV (y)

dy

� Substituting the simpli�ed expression for Qn(y) and integrating leads

to,

�Z Leff0

IDSdy = ��nWCox

Z VDS0

[VGS � Vth � �V (y)]dV

� Since IDS is not a function of y, integration yields a new model for

drain current in the linear region of operation not including short or

narrow channel e�ects such that,

IDS =�nWCox

Leff

�(VGS � Vth)VDS � 0:5�V 2

DS

= ��(VGS � Vth)VDS � 0:5�V 2

DS

� where,� =

�nWCox

Leffand � = (1 + Æ ):

Page 287: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 277

� The Level 3 SPICE model assumes,

Æ =0:5p

2�F � VBS

� The Level 4 (BSIM) SPICE model assumes,

Æ =0:5p

2�F � VBS

2641� 1

a1 + a2(2�F � VBS)

375

� where a1 and a2 give a best least square �t tor2�F � VBS + V (y).

� The drain current in saturation is determined by assuming,

@IDS@VDS

1AVGS

= 0

� when VDS = VDSat.

@IDS@VDS

1AVGS

= � [(VGS � Vth)� �VDSat] = 0

� Thus VDSat ignoring small geometry e�ects is given by,

VDSat =VGS � Vth

� The saturated drain current then becomes,

IDSat = IDS(VDS = VDSat) = �(VGS � Vth)

2

2�

� This model for drain current is a \piece-wise" model in that there is

a discontinuity between linear and saturation regions as in the lower

level models.

Page 288: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 278

Short Channel E�ects in Drain Current SPICE Level 3 and

Level 4 (BSIM) Models

Drift Velocity 10 cm/sec6

10

1.0 2.0

Electric Field 10 V/cm4

Hole (Si)

Electron (Si)

critical electric field c

v sat

� Degradation of channel surface mobility �s due to vertical electric �elds

resulting from the gate voltage in the channel is modelled by,

�s =�o

1 + �(VGS � Vth)

� The drift velocity in the direction of the channel is also a�ected by the

lateral electric �eld Ey since in principle drift velocity is not linearly

related to electric �elds for high �elds above the critical electric �eld

Ec.� The drift velocity of channel carriers can be modelled with reasonable

accuracy for Ey > Ec by,

vdrift =�sEy

[1 + (Ey=Ec)v]1=v

� where v = 2 for electrons and v = 1 for holes.

� Typical saturated drift velocities vsat for n-channel MOSFET's range

from 6 to 9 � 106 cm=sec, and for p-channel MOSFET's from 4 to

8� 106 cm=sec.

� The above expression is too complicated to incorporate into closed-

form short channel expressions for drain current.

Page 289: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 279

� Instead it has been assumed that v = 1 for both electrons and holes,

and that Ec = vsat=�s resulting in,

vdrift �0B@ �sEy1 + �sEy=vsat

1CA

� In strong inversion, drain current is dominated by drift current such

that,

IDS = �qn(y)A(y)vdrift(y) = �WQn(y)vdrift(y)

= �WQn(y)

0B@ �sEy1 + �sEy=vsat

1CA

� where,Qn(y) = �Cox[VGS � Vth � �V (y)]

� and,� = (1 + Æ Fl); Vth = Vfb + 2�F + Fl

r2�F � VBS � �VDS

� where Fl is used to model short channel e�ects on Vth and �, and �

includes e�ects of DIBL.

� Using Ey = dV=dy and substituting into the drain current expression

yields,

IDS

241 + �s

vsat

dV

dy

35 = �sWCox[VGS � Vth � �V (y)]

dV

dy

� Integration yields,

IDSZ Leff0

241 + �s

vsat

dV

dy

35 dy = IDS

Z Leff0

dy +Z VDS0

�svsat

dV

= �sWCox

Z VDS0

[VGS � Vth � �V (y)]dV

� Therefore,

IDS =�sWCox

Leff [1 + (�sVDS)=(vsatLeff)]

�(VGS � Vth)VDS � 0:5�V 2

DS

� where Leff = L� 2LD.

Page 290: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 280

� Using,

� =�sWCox

Leff; Ec = vsat

�s

� the most popular form for the drain current model in the linear region

of operation used in Level 3 and Level 4 (BSIM) SPICE models is

given by,

IDS =�

[1 + VDS=(LeffEc)]�(VGS � Vth)VDS � 0:5�V 2

DS

� From the above expression for drain current it can be seen that if the

product of LeffEc is much larger than VDS, then the MOSFET will

behave like a long channel device.

� If the gate oxide is thinner, then �s will be lower resulting in a larger

Ec = vsat=�s since vsat is constant. This will in turn increase the

LeffEc product resulting in improved MOSFET behaviour commen-

surate with long channel behaviour.

� For long channel MOSFET's the saturation condition was arrived at

by assuming either,

Qn(Leff) = 0 or@IDS linear

@VDS

1AVDS=VDSat

= 0

� The above de�nition can no longer be assumed for a short channel

device where the drift velocity is assumed to saturate at some limited

velocity, which in turn implies that Qn(Leff) is not zero at the pinch-

o� point when VDS = VDSat.

� An alternative de�nition for saturation more appropriate to short chan-

nel devices is to assume that IDS = IDSat when the drift velocity at

y = Leff (i.e. at the drain end of the channel) reaches vsat.

� Using this de�nition, IDSat can be expressed as,

IDSat = �WQn(y)vdrift(y) = �WQn sat � vsat = �WQn sat�sEc

Page 291: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 281

� where Qn sat is the inversion charge per unit area at y = Leff where

the channel potential V (y) = V (Leff) = VDSat such that,

Qn sat = �Cox[VGS � Vth � �VDSat]

DS(for V = V Dsat )

Point C assumed to be wherecarriers reach saturated driftvelocity.

Point P assumed to be transitionbetween linear and saturated drain current models.

������������������������������������������������

��������

��������

������������������

���������������������������� ��������������

n+ drainn+ source

x

y

L eff

l d

Gate

DSV

substrate or body

PC

LD LD

L

� At a point just to the left of where the carriers reach the saturated

drift velocity vsat, the drain current is still given by the linear region

model but where VDS = VDSat so that current continuity is maintained

across the channel. Therefore,

IDSat =�sWCox

Leff [1 + (�sVDSat)=(vsatLeff)]

�(VGS � Vth)VDSat � 0:5�V 2

DSat

� Equating the two expressions for IDSat, VDsat can be solved yielding,

VDSat = LeffEc2664vuuuut1 + 2(VGS � Vth)

�LeffEc � 1

3775

� Multiplying the numerator and denominator of the above expression

by,2664vuuuut1 + 2(VGS � Vth)

�LeffEc + 1

3775

� yields a more appropriate expression for VDsat which is used in the

Page 292: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 282

SPICE Level 4 (BSIM) model,

VDSat =2(VGS � Vth)

2664vuuuut1 + 2(VGS � Vth)

�LeffEc + 1

3775�1

= 2VDSat; lc

2664vuuuut1 + 2(VGS � Vth)

�LeffEc + 1

3775�1

� where VDSat; lc is the long channel VDSat.� For large LeffEc products, this expression approaches the long channelVDSat as expected.

� For small LeffEc products which occur in short channel devices, this

expression shows that VDSat will decrease relative to the long channel

VDSat with increasing gate voltage.

� The SPICE Level 3 model uses a slightly di�erent approach to arrive

at VDSat.

� The drift velocity dependence on lateral electric �eld Ey is assumed to

be of the form,

vdrift =�sEy

[1 + Æo(Ey=Ec)]� which amounts to assuming that vsat = �sEc=Æo, or that vsat is higherthan �sEc for Æo < 1.

� Following the same procedure as before, a more general expression for

VDsat can be derived such that,

VDSat =(1� Æo)Vge + LeffEc

(1� 2Æo)

2664�1 +

vuuuut1 + 2VgeLeffEc(2Æo � 1)

((1� Æo)Vge + LeffEc)23775

� where,

Vge =VGS � Vth

Page 293: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 283

� After all of this complexity, the SPICE Level 3 model assumes that

Æo = 0 resulting in,

VDSat = Vge + LeffEc �rV 2ge + (LeffEc)2

� where Ec reverts to vsat=�s. vsat is called VMAX as a user speci�ed

parameter in the Level 3 model.

Page 294: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 284

IDS

VGS(V)

-6x 10

= -5 VBSV

BS = 0 VVV = 1 V

VDS = 50 mV

µ O= 800 cm2 / (V.s)

TO

Level 3

= 0.05 V-1θ

= 0.08 V-1

θ

0 1 2 3 54

(A)

1

2

3

4

Variations of drain current in linear region with � in transfer

characteristics according to Level 3 model.

VDS (V)

IDS µA( )

η = 1.0

VGS = 3 V

VGS = 4 V

VGS = 5 V

VGS = 2 V

η = 1.5

0 1 2 3 54

5

10

Variations of drain current with � in output characteristics according to

Level 3 model.

Page 295: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 285

VDS (V)

IDS

VGS = 3 V

VGS = 4 V

VGS = 5 V

VGS = 2 V

v max = 3 x 103

m/s

2 x 103

m/sv max =

0 1 2 3 54

5

10

(mA)

Variations of drain current with VMAX in output characteristics

according to Level 3 model.

Page 296: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 286

Hot-Carrier E�ects in MOSFETs

and Fowler Nordheim Tunnelling

��������������������������������������������������������

holeselectrons

I b

I gI ds

V GSDS

V

n+ source n+ drain

substrate or body

GateOxide Injection

Impact Ionisation

minority carriers

ParasiticBipolar Transistor

p-type

� The maximum electric �eld experienced by carriers in the channel

region near the drain end increases as channel length decreases if the

supply voltage is kept constant.

� As carriers move from the source to drain they can acquire enough

kinetic energy in the high �eld region to have an energy higher then

the thermal equilibrium energy kT - hence becoming \hot carriers"

giving rise to \channel hot carrier e�ects".

� Hot carriers result in impact ionisation in the vicinity of the drain

resulting in the creation of additional electron-hole pairs.

� The extra electrons contribute to increased drain current.

� The holes will be collected at the substrate contact giving rise to a

substrate or body current IB.

� Holes travelling through the substrate can raise the potential of the

substrate relative to the source, forward biasing the source-body diode

and turning on the source-body-drain parasitic bipolar transistor in

parallel with the MOSFET.

Page 297: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 287

� Turning on of the parasitic bipolar transistor can lead to latch-up

conditions in circuits.

� Substrate currents from a large number of MOSFET's can a�ect vari-

ous MOSFET circuits (e.g. DRAM's).

GateOxideSilicon

cE

vE

Fowler-Nordheim

Direct Tunnelling

Tunnelling

Injection Over Barrier

Hot Carriers

� Some of the hot carriers can acquire enough kinetic energy to surmount

the Si � SiO2 interface barrier (approx 3.2 eV for electrons and 4.9

eV for holes) and thus become injected into the gate oxide.

� Most of the carriers injected into the gate oxide will be collected as

gate current IG.

10-4

10-5

10-3

10-2

10-7

10-6

I

I g

Ib

d

31 5 7 9 11 1310

-16

10-15

10-14

10-13

10-12

10-11

L = 1.3 microns

VDS

= 7.5 V

bI

dI

(A)

I g (A)

Gate Voltage, V

ox = 200 Ao

t

GS (V)

Page 298: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 288

� Gate current is usually orders of magnitude smaller than substrate

current due to the high energy that must be acquired to surmount the

gate oxide energy barrier.

� Carriers can also tunnel through the gate oxide energy barrier by ei-

ther direct tunnelling or �eld-assisted tunnelling known as \Fowler-

Nordheim Tunnelling".

� For direct tunnelling to occur the gate oxide must be very thin (less

then 100 angstroms) and the electric �eld must be very high (greater

than 106 V=cm).

� Fowler-Nordheim Tunnelling can occur for thicker oxides where carriers

posses kinetic energy closer to the energy barrier height.

� Hot carriers injected into the gate oxide can be trapped by electrically

active defects in the SiO2 thus modifying the �xed oxide charge density

that will in turn cause a shift in the threshold voltage.

� Hot carriers accelerated towards the gate oxide can generate new de-

fects at the silicon-oxide interface increasing the fast-interface state

density. These fast interface states will cause a threshold voltage shift

and will decrease channel mobility due to increased Coulombic scat-

tering.

� Hot carriers injected towards and into the gate oxide will cause signif-

icant device degradation over time with shifts in threshold voltage, a

reduction in transconductance, and an increase in sub-threshold swing.

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MOS Transistors, E&CE 730, January, 2002 289

Correlation of Process Parameters and Model Parameters

� In integrated circuit technology, the �nal dimensions of structures on

�nished wafers usually di�er from their intended drawn dimensions due

to several processing e�ects such as lateral expansion of local oxidation,

imperfect etching, mask alignment tolerances, etc.

������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������������

��������������������������������������������

��������������������������������������������

������������������������������������

������������������������������������

������������������������������������������������������������������������

������������������������������������������������������������������������

������������������������

������������������������

������������������������

������������������������

V

V out

ssddV

Gate Poly Electrode

P-WellMask

p+ p+ n+ n+

p-well

n-substrate

polysilicon gate

gate oxide

field oxide

L

W S D SD

Metal

P+ Mask

� Further, since MOS transistor dimensions are determined by the width

of the crossing polysilicon and by the lateral di�usion of source and

drain, transistor width to length ratioW=L can vary appreciably from

the intended value.

� In addition to line-width variations, there are many other process re-

lated variations such as changes in oxide thickness, sheet resistances,

threshold voltage, etc., which result in the spread in device perfor-

mance.

� Process variations can be accounted for in circuit design from simula-

tions that use statistical MOS device models.

� Traditionally the statistical models, which represent the process uc-

tuations, are simply the worst-case and best-case device model param-

eters which represent the worst and best case device performance.

Page 300: Principle - University of Waterloojhamel/notes_730.pdf · 2002. 1. 7. · Engineering Univ ersit y of W aterlo o W aterlo o, On tario, Canada Jan uary, 2002. ii Principle T extbook

MOS Transistors, E&CE 730, January, 2002 290

� \Interdie" and \intradie" uctuations can exist, interdie uctuations

occurring between individual die on a particular wafer, between wafers,

and also between process lots.

� Several methods exist to generate worst case parameters.

� If the circuit functions are known, ascertaining the worst-case condi-

tions is not generally diÆcult.

� For example, the transistor current drive Idrive resulting from satu-

rated drain current, is a convenient transistor performance parameter

in MOS digital circuit design. Higher Idrive results in faster switching

transistors.

� For a given nominal device length L and width W , Idrive will be a

function of the n model parameters p1; p2; :::; pi; :::pn corresponding

to the adopted MOSFET model equations.

� The purpose is to �nd sets of these parameters pi (i = 1; 2; :::; n)

which lead to optimum circuit performance and maximum yield.

� It is common to take account of the statistical variation in the process

through worse case parameters, sometimes referred to as \corner design

parameters" or \worse case �les" (WCF).

oxt

V th

L∆

∆W

Low

Low

High

Low

High

High

Low

High

oxt

V th

L∆

∆W

TYPICAL

(TT)

FS

SLOW(SS)

FAST(FF)

SF

� There are �ve types of WCF related to the relative performance of

the p-channel and the n-channel MOSFET's, namely, FF for both

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MOS Transistors, E&CE 730, January, 2002 291

devices being \fast", SS for both devices being \slow", SF for the

PMOS being slow and the NMOS being fast, FS for the PMOS being

fast and the NMOS being slow, and TT for both devices being typical

or nominal.

� Ideally these WCF should be based on parameters extracted from a

large data set that represents the true statistical variation of the circuit

performance parameters due to process variations.

� Since chip design and process development often proceed in parallel, it

is often necessary to determine the WCF from a data set which gives

transistor performance variation on a limited number of devices.

� A limited set of measured model parameter data, or model parameter

data generated from a CAD package which can accurately relate tran-

sistor behavior to random process parameter variations, can be used

in conjunction with statistical device models to generate the WCF.

� The �rst step is to extract optimised model parameters from all of the

test devices using either measured or simulated device characteristics.

� Then, using standard statistical analysis, the mean and standard de-

viation of each model parameter is determined.

� Model parameters which are more than three standard deviations are

excluded.

� A sensitivity analysis is then carried out to determine the relationship

between a particular model parameter and the circuit performance

parameter (e.g. Idrive).

� For example, the sensitivity Si of Idrive to a model parameter pi is

given by,

Si = pi

0@�Idrive

�pi

1A

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MOS Transistors, E&CE 730, January, 2002 292

T

F

S

V DS

IDS

.

.........

.

..

Data Generated from Process Modelling

Measured Data

or

� The WCF are then the set of complete model parameter �les which

result in the �ve cases FF; SF; FS; SS; TT .

� The drawbacks of using this approach include the inability to pre-

dict how many devices on a wafer will exhibit the predicted perfor-

mance limits, the lack of accounting for correlations between the var-

ious model parameters, and the tendency to over-estimate the actual

process spread.

� For example, parameter sets may be obtained which cannot occur

in a real device due to correlations which exist between the various

parameters.

� In an attempt to address the correlation diÆculties with the above

method to determine WCF, the \Principal Factor Method" uses the

observation that most of the device parameter variations can be ex-

plained by considering variations in four parameters or principal factors

�L, �W , Cox, and Vfb.

� An advantage of the Principal Factor Method is that these principal

factors are essentially statistically independent of one another.

� The other model parameters pi are then related to these four principal

factors by,

pi = ao + a1�L + a2�W + a3Cox + a4Vfb

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MOS Transistors, E&CE 730, January, 2002 293

� where ao, a1, a2, a3, and a4 are called the regression coeÆcients which

are estimated using a measured data set from a large number of devices.

� The Principal Factor Method is useful when there is not a large mea-

sured statistical data set available and is superior to simple sensitivity

analysis, but still generates conservative WCF.

� Statistical analysis with parameter correlation is required to improve

upon the accuracy of generating the WCF over the above methods,

which requires the study of the probability distribution of each indi-

vidual parameter.


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