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Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems
Weiqiang Wang
Outline
Introduction
Lost silicon (Si) mold process for PZT ceramic
microstructures
PZT based piezoelectric micromachined switch
Conclusion
Introduction
Piezoelectric effect
direct piezoelectric effect converse piezoelectric effect
Exploiting the piezoelectric materials into microelectromechanical systems (MEMS) Lead zirconate titanate (Pb(ZrxTi1-x)O3, PZT) microstructures
Piezoelectric-based MEMS are generally attractive due to their high sensitivity and low electrical noise in sensing applications and high-force output in actuation applications
MicroElectroMechanical Systems (MEMS) denote systems that include one or more small microstructures (sub- μm to mm) that often are fabricated using a technology μnamed micromachining, and materials,that originates partly from the semiconductor industry’s processes and partly from precision mechanics.
Results
The PZT rods were 7 μm square in cross section with a 12 μm period. The resulting aspect ratio was more than 12.
Fig. 2. SEM images of PZT microrods
Advantages• Fine scale and high aspect ratio. (rods 95 μm in diameter
and 400 μm in height using lost plastic mold method. )
• Advantages of Si– high melting point (1440°C) and high strength
– Si mold can be used as a part of the device
– Si micromachining techniques have been well developed
in-mold sintering
Plastic mold: LIGA (lithography, galvanoforming, plastic molding)
• HIP of PZT was successfully conducted at a temperature as low as 800°C
Problems
X-ray diffraction (XRD) analyses showsthat perovskite PZT was the major phase, at the same time, certain amounts of undesired pyrochlore-type PZT phase was also observed.
Oxygen deficiency
But it is believed producing the same dense PZT rods at lower temperatures by increasing the HIPing pressures may suppress the formation of undesired phases.
PZT based piezoelectric micromachined switch
Fig. 3. Schematic view of cantilever
Fig. 4 Fabrication procedure
Fig. 5 SEM of PZT deposited on substrate
Principle of operation
Fig. 6 Schematic illustration of switch Fig. 7 SEM image of cantilever switch with transmission lines
Operation tests
Low frequency test High frequency test
Fig. 8 Switching response to a 1 Hz 20 V square wave
Fig. 9 Switching response to (a) 30-V and (b) 50-V 2-μs pulse.
Preliminary results using a gain-phase analyzer (HP4194A) have demonstrated that signals up to 100 MHz can be switched.
DiscussionA one-degree-of-freedom dynamic model
2
2
d z dzF m b kz
dt dt
0 0( ) cos( )nz t z z t
1
0 0
1cos (1 )
2on f z
The time required to close the gap(δ) between the contact and the transmission lines can be obtained from
(1) k: spring constant; b=0
(2)
(3)
n : natural frequency; 02n f
The calculated τon=3.3μs for this device, which is comparable to the
measured value.
Conclusion
Piezoelectric materials have been successfully applied in a variety of MEMS applications. The development of fabrication methods such as PZT structural micro-machining, low-stress silicon nitride deposition, and solution deposition of piezoelectric thin films has been essential. The MEMS applications described here compare favorably with other MEMS approaches based on commonly used electrostatic actuation. The continued promise for piezoelectric MEMS is attractive.