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Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

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Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA
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Page 1: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Prof. Shi Wenkang

SAW Technologyand

Its Applications

Shanghai Jiao Tong University

P.R.CHINA

Page 2: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 3: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

What is SAW ? SAW----Surface Acoustic Wave

Concept

Page 4: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Concept: What is SAW?

Mechanical Wavepropagate in the surface

Energy Concentrated in the thin layer (<1λ)Different Modes:

RSAW,LSAW,LLSAW, SH-SAW, Love Wave,

LAMB Wave….Much lower velocity than Electromagnetic

Wave’s (1: 105)

Page 5: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Concept: Physical Principal

Based on:1. Piezoelectric effect and Converse Piezoelectric effect

Mechanical Electrical

2. Wave reflected at discontinuity media

Page 6: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Concept: Historical Review

1885 Discovery by British Physicist Releigh In Research on

seismic Wave

1949 Bell Lab Discovery LiNbO3

1965 Exciting SAW artificially by American Scientist

R.M.White and Voltmer Using Interdigital Transducer(IDT)

Since 1970’s Wide Applications in Telecommunication, Radiobroadcast,

TV etc.

Since 1980’s SAW Sensor Development

Page 7: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Concept: Advantages

High Sensitivity High Accuracy Passive Wireless Digitalized Mass Production Many Application-Possibilities

Page 8: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 9: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Materials

Piezo-Materials: Quartz LiNbO3 LiTaO3 LGSQuartz LiNbO3 LiTaO3 LGSThe Properties SAW related: 1. Mechanical-Electronic Coupling Coefficient. 2. Temperature Related Factor ( TCF ) 3. Dielectric Factor 4. Phase Velocity 5. Yang’s Model 6. Density 7. Insertion Loss 8. Elastic Coefficient

Different Materials, Different Cut Orientation has different properties, so Optimum,Compromise Design be Needed.

Page 10: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 11: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Mathematic Model

Force Equilibrium Equation

Electronic Charge Equilibrium Equation

Cristoffel Equation

Page 12: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 13: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Type of SAW devices

Page 14: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 15: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Typical Applications

sensor

Delay line

Convolver

Oscillator

filter

Page 16: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Vibration and Acceleration SAW Sensor

Page 17: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Torque SAW Sensor

Page 18: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

SAW Voltage Sensor

Page 19: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Flow SAW Sensor

Page 20: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

SAW Gyroscope

Page 21: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

2 、 coriolis力

产生第二次

声表面波

x

vF

z

y

Page 22: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Liquid SAW Sensor

Page 23: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Gas SAW Sensor

SO2 、 H2S 、 CO 、 NO2 、H2 etc.

Page 24: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Application Examples of SAW technology in Automobile

Electronic ID

Smart Tire

Exhaust-gas Detection

Page 25: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Electronic ID

Page 26: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Smart Tire

Page 27: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Exhaust-gas detection

Page 28: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 29: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

New material, new technology;

Suitable SAW models, suitable packaging;

Intelligence, minimization, multi-function, matrixing;

Industrialization.

Development Tendency

Page 30: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Outline

Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Page 31: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTU

Theoretical work: --- Numerical method to solve Christoffe equation --- Various wave characteristics --- Optimal design --- Phase detection criterion --- Coupling mode theory

Page 32: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTU

Laboratory work: --- Fabrication and test of SAW devices ID-Tag prototype Lamb wave device (measuring liquid density) --- Circuit design and implementation wireless data transmission platform for conventional sensors

Page 33: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Lamb wave liquid density sensor

Page 34: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Lamb wave liquid density sensor

Page 35: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

SAW device prototype

Page 36: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Electronic Circuit

Page 37: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Schematic of transceiver circuits

Page 38: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Experiment System

Page 39: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Results - Lamb Liquid Density

Frequency Response of Substrate in Two Different Conditions

1 - Liquid-covering2 - No liquid-covering

Page 40: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Results - Lamb Liquid Density

The relation between the

Phase Bias and Liquid Density

Page 41: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Results - ID-Tag

Measured impulse response vs. time

of an ID-tag with bits 1111Measured impulse response vs.

time of an ID-tag with bits 1011

Page 42: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

SAW Pressure Sensor

Page 43: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

SAW Pressure Sensor Experiment System

Page 44: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Discussion on Key Problems

Pressure sensitive coefficient distribution of substrate on

(0o,90o, 0o)

Page 45: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Discussion on Key Problems

Pressure sensitive coefficient distribution of substrate on (7o,143.6o, 31.8o)

Page 46: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Projects1. 上海市科委项目,声表面波微传感器研究,沪科

鉴 [2001]G0005b.2. 上海市科委项目,声表面波微传感器技术中信号

流得生成、传播和处理研究,沪科鉴 [2003] 第 0107.3. 国家自然科学基金面上项目“全 LGS 封装的声表面

波高温压力传感器研究”。编号: 60274062.4. 国家自然科学基金青年基金项目“格林函数精确仿

真并优化新波动模式和谐频下的标签器件“。编 号 :10304012

5. 航天创新科技基金项目。

Page 47: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTUPublications:

1 SAW sensors and applications, 声表面波传感器及应用,施文康,刘艾,蔡萍,杨明,仪器仪表学报, Vol.20(4) , 1999

2 Temperature Sensitive Cuts for Surface Acoustics Wave in Quartz, Ma Weifang, Shi Wenkang, IEEE trans on UFFC, Vol.(48)1,2001

3 基于声表面波技术的微传感器,施文康,马伟方,刘艾,第四节全国微米 / 纳米技术学术会议, 2002

4 A New Member of Micro-sensor Family ----SAW Sensor, Shi Wenkang, Ma Weifang, Liu Ai, International Symposium on Smart Structures & Micro-system, 2000.

5 Analysis and Design of Radio SAW ID-tags , Han Tao Shi Wenkang Wu Jiahui ,Chinese Journal of Scientific Instrument, 2003.01

6  Digital Quadrature Demodulation for the Wireless SAW Sensing Information ,Wu Jiahui, Han tao, Shi Wenkang, Measurement & Control Technology , 2002.03

7  A Novel Wireless Measurement System Based on Surface-Acoustic-Wave Devices , HAN Tao, LIN Xiao kun, SHI Wen kang , Journal of Shanghai Jiaotong University , 002.08

8 声表面波目标无线识别系统中 PC-DSP 通信电路设计 ,Design of Communication Circuit between PC and DSP in Wireless Identification Tags System Based on SAW ,邓勇 , 韩韬 , 施文康 , 马伟方 , 刘艾 DENG Yong,HAN Tao, SHI Wenkang ,传感技术学报 Journal of Transcluction Technology , 2001.04

Page 48: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTUPublications:

9          一种基于 SAW 的无线标签识别系统,马伟方 , 施文康 MA Wei fang,SHI Wen kang, 工业仪表与自动化装置 Industrial Instrumentation & Automation , 2001.03

10    新型无线测量系统研究 , 马伟方 , 施文康 , 计量技术 Measurement Technique , 2001.0211 基于声表面波传感的无线标签识别系统 ,Wireless Identification Tags System Based on Surfa

ce Acoustic Wave Sensors, 刘艾 , 马伟方 , 施文康 LIU Ai, MA Wei fang, SHI Wen kang, 上海交通大学学报 Journal of Shanghai Jiaotong University 2001.05

12 基于兰姆波技术的液体密度声传感器Liquid Density Sensor Based on Lamb Wave Technology, 施文康 , 马伟方 , 侯毅 SHI Wen kang, MA Wei fang, HOU Yi, 上海交通大学学报 Journal of Shanghai Jiaotong University , 2001.09

13 液体 - 压电晶片界面上电边界条件对兰姆波激发的影响Influence of electrical boundary conditions on lamb wave excitation at the interface of liquid and piezoelectric substrate, 马伟方 , 侯毅 , 施文康 , 邓明晰 MA Wei fang 1,HOU Yi 1,SHI Wen kang 1,DENG Ming xi 2, 声学技术 Technical Acoustics , 2001.01

14 声板波密度传感器及系统设计Acoustic Plate Mode Sensor and System design, 侯毅 , 施文康 , 马伟方 Hou Yi Shi Wenkang Ma Weifang, 仪表技术与传感器 Instrument Technique and Sensor 2001.02

15 兰姆波切向特性理论研究Theoretical Study on Crystal Orientation Characteristics of Lamb Wave, 马伟方 , 施文康 ,侯毅 , 邓明晰 MA Wei-fang1,SHI Wen-kang1,HOU Yi1,DENG Ming-xi2, 压电与声光 Piezoelectrics & Acoustooptics , 2001.02

16 利用 SAW 技术实现极低功耗无线数字通信Ultra-low Power Comsumption Wireless Digital Communication Using SAW Technology, 李磊源 , 施文康 , 马伟方 LI Lei yuan,SHI Wen kang,MA Wei fang, 压电与声光

Page 49: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTUPublications:

17 一种新型的声表面波目标识别系统研究Study on Novel ID-Tag System based on Surface Acoustic Wave Technology, 刘艾 , 马伟方 , 施文康 Liu Ai; Ma Weifang; Shi Wenkang, 传感技术学报 JOURNAL OF TRANSCLUCTION TECHNOLOGY , 2000.02

18 基于声表面波技术的无线测量系统研究Research on a wireless measurement system based on SAW technology

19 延迟线型声表面波传感器的研究,施文康 , 刘艾 , 传感技术学报 JOURNAL OF TRANSCLUCTION TECHNOLOGY , 1999.4

20 液体 - 压电晶片界面兰姆波激发的理论研究Theoretical Research on Lamb Wave Excitation at the Interface of Liquid and Piezoelectric Substrate ,马伟方 , 施文康 , 邓明晰 MA Wei fang 1,SHI Wen kang 1,DENG Ming xi 2 ,压电与声光 Piezoelectrics & Acoustooptics, 2000.06

21 声表面波器件温度敏感性研究Study on Temperature Sensitivity of Surface Acoustic Wave Devices ,马伟方 , 施文康 , 刘艾 MA Wei fang,SHI Wen kang,LIU ,压电与声光 PIEZOELECTRICS & ACOUSTOOPTICS , 2000.05

22 声表面波器件体波效应抑制理论研究Study on Bulk-wave Effects in Surface Acoustic Wave Devices , 马伟方 , 施文康 MA Wei-fang, SHI Wen-kang, 压电与声光 PIEZOELECTRICS & ACOUSTOOPTICS , 2000.01

23 一种谐振型声表面波传感器A Kind of Resonance Surface Acoustic Wave Sensor , 蔡萍 , 马伟方 , 施文康 Cai Ping Ma Weifang Shi Wenkang, 仪表技术与传感器 INSTRUMENT TECHNIQUE AND SENSOR, 2000.07

24 基于辨识标签原理的无源声表面波传感器技术要点与发展趋势The Key Technologies and Trends in Passive ID-Tags Based SAW Sensors, 韩韬 , 施文康 Han Tan Shi Wenkang, 传感技术学报 Journal of Transcluction Technology , 2000.04

Page 50: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTUPublications:

25 Tire Pressure Monitoring system Based on SAW Technology, Zhang guowei, Shi Wenkang, Ji Xiaojun, ISIST, 2002.

26 Properties of LGS Crystal and Its Applications in High-temperature sensors, Ji Xiaojun, Shi Wenkang, ISTM,2003.

27 硅酸镓镧、钽酸镓镧和铌酸镓镧的声表面波传播特性研究 Investigation of SAW propagation properties of LGS,LGT,LGN ,张国伟,韩韬, Journal of Shanghai Jiaotong university 交大学报

28 La3Ga5SiO4 中声表面波传播的温度特性研究 temperature properties of SAW propagation in LGS, PIEZOELECTRICS & ACOUSTOOPTICS 压电与声光

29 Comparison Characteristics of SAW Propagation on LGT Quartz Substrates, Zhang guowei, Shi Wenkang ,声学学报英文版

30 Temperature characteristics of Surface Acoustic Waves Propagating on La3Ga5SiO4 Substrates material science and technology 材料科学与技术

31 LGS 压电晶体及其声表面波特性的理论分析, LGS piezoelectric crystal and investigation of its SAW properties 吉小军,施文康, PIEZOELECTRICS & ACOUSTOOPTICS 压电与声光

32 无线声表面波传感信号的正交采样处理, Quadrature coherent detection of the wireless SAW sensor signals 杜锋,施文康, journal of Shanghai Jiaotong university 交大学报

Page 51: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTUPublications:

34 Han,Tao and Shi,Wenkang, “Surface acoustic wave devices based wireless measurement platform for sensors”, International Symposium on Optoelectronics and Microelectronics, Vol.4601, SPIE, COEMA and Southeast University, Nov.9th Nanjing, China, 2001 pp14-19

35 Han,Tao and Shi,Wenkang, “Review of passive and telemetric surface acoustic wave sensors and system”, International Conference on electronic Measurement & Instruments, ICEMI’2001, Nov. 20th , Guilin, China pp446-449

36 Han,Tao Shi,Wenkang “Reflection of impedance loaded SAW IDT and its application in wireless information transmission of sensors” (Accepted by Chinese Journal of Electronics)

37 Han,Tao Shi,Wenkang Wu,Jiahui and Li,Hanjun, “Coupling-of-modes theory and its application in the analysis of wireless ID-tag” Piezoelectrics & Acoustooptics Vol.24 (2) 2002 pp89-91 (in Chinese)

38 Han,Tao and Shi,Wenkang, “Design of surface acoustic wave based wireless measurement system”, Piezoelectrics & Acoustooptics Vol.23 No.5, pp 327-329,369 2001(in Chinese)

39 Han,Tao Shi,Wenkang Wu,Jiahui and Li,Hanjun “High-resolution information extraction of wireless SAW sensor and its hardware implementation”, Journal of Sensor Technology Vol.14 No.4, 2001 (in Chinese)

40 Han,Tao and Shi,Wenkang, “The application of surface acoustic wave devices in wireless measurement system” Optics and Precision Engineering Vol.9(6) pp576-579 (in Chinese)

41 Han,Tao and Shi,Wenkang, “Study on a novel surface-acoustic-wave based wireless measurement system”, Journal of Shanghai Jiaotong University, Vol.36(8) pp1165-1168 (in Chinese)

42 Han,Tao and Shi,Wenkang, “Analysis and design of radio SAW ID-Tags”, Chinese Journal of Scientific Instrument (in Chinese, to be accepted )   

Page 52: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Research on SJTUPublications:

43   Lu, Wenbo Han,Tao “ An algorithm on amplitude and phase estimation of sine signal” Journal of Shanghai Jiaotong University, (in Chinese, to be accepted )

44 Han,Tao Shi,Wenkang and Ma, Weifang, “Lamb wave in piezoelectric plate loading with a liquid layer and its potential as liquid density sensor”

45 Han Tao Shi Wenkang Wu Jiahui Analysis and Design of Radio SAW ID-ags Chinese Journal of Scientific Instrument

46 Han Tao, shi Wenkang,Design of Surface Acoustic Wave Based Wireless Measurement System , Piezoelectrics & Acoustooptics 2001, 23(5), 327-329,369.

47 Han Tao, shi Wenkang Application of Surface Acoustic Wave Devices in Wireless Measurement System Optics and Precision Engineering ,2001,9(6), 576-579.

48 Han Tao, shi Wenkang ,Compensation of Temperature-caused Cross Sensitivity of Eddy Current Transducer INSTRUMENT TECHNIQUE AND SENSOR 2000, (2) 10-12

49 Han Tao, shi Wenkang ,The design of a kind of non-contact type molten aluminum resistivity measuring system Industrial Instrumentation & Automation, 164(2) 10-12

50 Han Tao, shi Wenkang ,Sensing Scheme of Minim Liquid Density Based on Lamb-Wave Chinese Journal of Medical Instrumentation2002,26(3) 172-173,209

Page 53: Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA.

Thanks !


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