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Reliable, tuneable andinexpensive antennas by
collective fabrication processes
RF-MST Cluster Meeting, June 30th, 2008 – Heraklion, Greece
V. Ziegler
EADS Innovation Works, Munich, GermanyThales Aeronautic Division, Elancourt, FranceIMEC, Leuven, BelgiumESIEE, Paris, FranceCoventor, Paris, FranceEPFL, Lausanne, SwitzerlandJSI, Ljubljana, SloveniaHYB, Sentjernej, Slovenia
EADS Innovation Works, Munich, GermanyThales Aeronautic Division, Elancourt, FranceIMEC, Leuven, BelgiumESIEE, Paris, FranceCoventor, Paris, FranceEPFL, Lausanne, SwitzerlandJSI, Ljubljana, SloveniaHYB, Sentjernej, Slovenia
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RETINA – Project data
Contract Nr.: AST4-CT-2005-516121
Total Cost: 5.189.032 €
EU Contribution: 3.170.000 €
Starting Date: 01/02/2005
Ending Date: 29/02/2008
Duration: 37 months
Website: http://dolomit.ijs.si/RETINA
Coordinator: Dr. Volker ZieglerEADS Innovation Works Germany
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- no additional drag- electrical beam-steering- bi-directional broadband
RETINA – SatCom antenna for AIRBUS
The specifications:
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Reflect-Array – Principle functionality
AIRCRAFT CABIN
MAST
T/R MODUL
REFLECTARRAY +RADOME
Radiating element
Phase shifter
Reflect
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Phase shifting topologies in RETINA
Influence the wave inside thewaveguide by a small component.
Sideview of unit cell
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Tasks to realize the demonstrator
• Develop (layout, fabricate and test) single devices in both technologies.RF-MEMS switches and tunable capacitances, ferroelectric tunable capacitances
• Assess the reliability performance of the devices
• Develop waveguide phase shifters based on the single devices
• Design and fabricate the demonstrator (DC-control unit, RF-unit)
• Characterize the RF-performance of the demonstrator
The demonstator of the RETINA project is a planar reflect array, whichis able to perform electrical beam-steering based on advanced phaseshifting technologies.
Tasks from Year 1 to Year 3
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Phase shifting devices
2 main technologies were developed in the project
Ferroelectric technology RF-MEMS technology
Ferroelectrictunable capacitor
RF-MEMStunable capacitor
RF-MEMSswitch
Tunabilityup to 3.5
Insertion losses < -0.2dB
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Waveguide phase shifters
Waveguide phase shifters were designed, fabricated and measured
Ferroelectric tunable capRF-MEMS tunable cap.
RF-MEMS switches
Design:
Realized andmeasuredphase shifters:
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Waveguide phase shifters – Achievements after Year 2
Key technical requirements for the phase shifters in the demonstrator:• Cover the whole frequency range from 10.95 – 12.75GHz• Exhibit low losses• Perform the required phase shift (3Bit) over the bandwidth
Bandwidth: o.kLosses: acceptablePhase shift: lowTechnology: more complex
Bandwidth: lowLosses: decentPhase shift: acceptableTechnology: simple
Ferro RF-MEMS
Go for demonstratorwith improved bandwidth
Reduce size and improvepackaging for higher phase shift
Achie
ved
perfo
rman
ce
afte
r year
2
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Technology optimisation example: RF-MEMS capacitors
Good RF-performances achieved :tunability up to 3,5 ---- IL~2dB ---- electrical resonance frequency >18GHz
1. Tunability between 3 to 3.5 with small Capacitor values (~100fF)
2. Pull-in voltage Vp <25V3. Low mechanical stress4. Sort of on-wafer packaging5. Reduced chip size (2,5x2mm2 packaged with interconnect pads)
• dual-gap process (Silicon/glass technology)• metal thickness optimization to reduce stress
3rd year
Results after Year 3:
2.5 x 3mm 2 x 2.5mm
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Technology optimisation example: RF-MEMS switches:
Excellent RF-performance achieved (IL = -0.19dB, IS = 18.0dB) by:
1. Enhanced lifetime (109 switching cycles)2. High temperature of operation (120°C for 48h)3. RF-power handling ( >6W hot-switching)4. on-wafer low dielectric packaging5. reduced chip size (1.0x0.8mm2 packaged with interconnect pads)
• changing metal composition• metal thickness• substrate thickness
3rd year
Results after Year 3:
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Reliability tests – examples from Year 3
RF-MEMS switch operationat elevated temperatures
Ferroelectric capacitance lifetimeactuation cycles
RF-MEMS switch power handlingunder hot-switching conditions
• RF-MEMS switches were testedextensively during years 1 and 2.
• Year 3 was focussed on ferroelectrics.
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Development: Software tool „Design for reliability“ for RF-MEMS
Material and Process Characterization
Test structure Design, Modeling,Experimental Data Extraction
System-Level Design
Stable statebefore drop
drop
shockacceleration
time
Shock-test, switching cycle, IC/package-co-design, non-linearities etc.
Mask Layout Virtual Prototyping
SEM image SEMulator3D image
Failure analysis, process defects,mask misalignment etc.
FEM/BEM Analysis
Mechanical Stress, chargedistributions, temperature cycles etc.
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RETINA Demonstrator – Partial reflect array antenna
SatCom antenna mock-up with demonstrator
Linear reflect array with 24 waveguide phase shifters
Demonstrator layout
Electr. beam steering
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Conclusions
• Different waveguide phase shifters were fabricated and testedusing the components under evaluation:- Tunable RF-MEMS capacitors- RF-MEMS switches- Ferroelectric thin film tunable capacitors
• A simulation tool “Design for Reliability” for RF-MEMSwas developed (incl. Shock analysis)
• Extensive reliability testing and technology optimization lead toremarkable improvement of the device performances after Year 3
• Demonstrator was designed, fabricated and successfully measured
• 42 papers and publications were made
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Acknowledgement for a very successful project
The project “RETINA” was supported bythe European Commission under theFramework Program 6.2003 AERO1 #516121
Contact: [email protected]