1
REQUEST FOR PROPOSAL
FOR CLEANROOM FACILITY
at
Centre for Excellence in Nanoelectronic Theranostic Devices
(CENTD)
Centre for Nanotechnology
Indian Institute of Technology Guwahati
Assam – 781039
India
Phone: +91 (0)361-258-3066
Fax: +91 (0)361-269-20762
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TABLE OF CONTENTS
Page
Section I General Details for Cleanroom & Utility Section 3
1 Introduction 4
2 Scope of Work 4
3 Design Details 5
4 Timeline for Project 5
5 Eligibility criteria 6
6 Special Terms and Conditions for Cleanroom and Utility Section 9
7 General Terms and Conditions 14
8 Additional Terms for Imported Goods 20
Section II Technical Details for Cleanroom & Utility Section 22
1 General Description 23
2 Details of Design data and Class of cleanroom zones 23
3 General Arrangements and Technical Specifications 29
4 Clean Room Accessories 41
5 Utility Section 44
6 Bulk and Process Gas systems 68
7 DI Water 84
8 House Vacuum 86
9 Process Tool Cooling Chiller 88
10 Process Extraction System 89
11 Effluent Treatment 92
12 Any Other Remaining Accessory 93
13 Validation and Commissioning 94
Annexures
A Layout for Cleanroom & Utilities 96 B Details of Interiors of Cleanroom & Utilities 97
C Details of Civil Construction 104
D Distribution of List of works 106
E Details of model components and Preferred makes 107
F Outside Environmental Conditions in Guwahati 114
G Electrical Load List 115
H Form for Technical Bid Submittal 118
I Form for Price Bid Submittal 127
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Section I
General Details for Cleanroom
&
Utility Section
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1. INTRODUCTION:
The Centre for Excellence in Nanoelectronic Theranostic Devices, Indian Institute of Technology
Guwahati (CENTD, IITG) invites proposals from vendors to build a cleanroom facility with allied
utilities on a TURNKEY basis at its planned building in the campus. The cleanroom is to be used for,
inter alia, research and development of materials and devices such as FET, SAW, and MEMS/NEMS
for micro/nanoscale electronic, therapeutic and diagnostic applications.
The prospective vendors are expected to be well versed with the state-of-the-art Cleanroom
technology and should have relevant experience in designing, supply, building, commissioning and
validating Cleanroom facilities on TURNKEY basis as per ISO-14644 in general and in
Conjunction with part - 1 to part - 4 (ISO – 14644-1, ISO-14644-2, ISO-14644-3 and ISO-14644-
4:2001 standards) and related facilities as per the requirements and specifications provided by IITG.
2. SCOPE OF WORK:
The proposal involves setting up the Cleanrooms, facility, and utilities as under:
[1] ISO 5 cleanroom (Class 100) of about 47 sq. m for Photolithography LAB
[2] ISO 6 Cleanroom (Class 1000) of about 133 sq. m for Diffusion LAB
[3] ISO 6 Cleanroom ( Class 1000) of about 8 sq. m for Air Lock
[4] ISO 7 (Class 10000) of about 8.7 sq. m for Changing Room
[5] Unclassified Area of about 325 sq. m (Service corridors: 123 sq. m, Locker Room: 63 sq. m,
Laundry Rooms: 27 sq. m, Hazardous gas room: 15 sq. m, Electrical & UPS Room (Utility
Building): 42 sq. m, Maintenance and BMS Room(Utility Building): 55 sq. m)
[6] HVAC and process Cooling
[7] Electrical lighting and power distribution system for complete clean room and related utility
areas.
[8] UPS.
[9] Bulk gases, Process gases and their distribution, piping system and gas management system
[10] Compressed Dry Air Generation and distribution System
[11] DI Water Generation and distribution system
[12] House Vacuum
[13] Exhaust system and scrubbers for Acidic, Alkali and General hot Air
[14] Effluent Treatment System
[15] Fire Detection and Suppression System
[16] CCTV Surveillance and Security System with DVR
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[17] Integrated Building Management System including access control, surveillance, public
address system etc.
[18] Intercom and Local area Network
[19] Distribution Network of all Utilities and facility.
As per the Utility Matrix and tool layouts provided in Annexure B, all the required services and
utility facilities shall be provided up to the point of use of each tool.
3. DESIGN DETAILS:
The facility comprises the following sections:
[1] The Cleanroom for process tools and accessories
[2] Utility Section
[3] Open yard to house the remaining facilities
The general layout of the cleanroom is shown in the drawing Annexure A. The detailed layout of the
cleanroom interiors is shown in the drawing Annexure B. The vendor may contact CENTD in case
any clarification is needed before submitting the proposal. IIT Guwahati is to provide with a
vibration-free foundation structure for the cleanroom building. The utility building has been
proposed to be constructed about 10 m away to isolate the cleanroom from the external noise arising
from the utility section. Provisional locations of Air Handlers, Chillers systems, related HVAC
systems, Utilities like CDA, DI water Plant, Bulk gases, Process gases, electrical distribution boards,
Scrubbers with Exhaust, DG set, UPS, etc., are clearly shown in the drawing layout plan. The
vendor may visit the site and contact IITG to ascertain the locations of AHUs, Condensing Chillers
etc.
4. TIMELINES FOR THE PROJECT:
A. Completion Period – 10 months, to be reckoned after 15 days from the date of issue of the PO.
B. Pre-Bid Meeting – 9th February 2016 (Before submission of the proposal, the vendors must appear
for a pre-bid meeting to assess the work to be undertaken. All technical queries regarding this
Request for Proposal must reach IITG before the pre-bid meeting.)
C. Last date of Submission of Bid – 3rd March 2016, 5.30 pm
D. Date of Opening of the Technical Bid – 7th March, 2016
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5. ELIGIBILITY CRITERIA:
Eligibility criteria for the prospective vendor(s)/ contractor(s) / firm(s) (hereafter, “vendor”) of the
cleanroom facility are noted below. The vendors must ensure that they satisfy all criteria in this
section before submitting their bids. If any of the conditions mentioned here is not met, the offer may
be rejected.
(I) The vendor must have at least five years of experience in design, supply, installation,
commissioning, testing and validating at site of cleanrooms and allied utilities.
(II) The vendor shall have an average annual turnover of at least INR 2.5 crore over last three years,
ending 31st March 2015. The relevant Assessment order / IT certificate should be attached.
(III) The vendor should be a registered Class 1 Contractor with CPWD/MES, any other government
authority, or a reputed private institute/reputed private organization in India.
(IV) The vendor should have completed, within the previous five years ending 31st December 2015:
At least one similar cleanroom project of not less than INR 6.5 crore in a single order,
OR
At least two similar cleanroom projects of not less than INR 4 crore each in a single order,
OR
At least three similar cleanroom projects of not less than INR 3 crore each in a single order.
In reference to above, the building cost (civil part) shall not be included in the value of cleanroom
project. The value of executed works shall be brought to current costing level by enhancing the
actual value of work at simple rate of 7 % per annum, calculated from the date of completion to the
last date of receipt of applications for tenders.
‘Similar cleanroom project’ means one which involved designing, supplying, building, installing,
commissioning, testing and validating ISO 5 (Class 100) or better cleanrooms, allied utilities and
integration of all relevant services in a turnkey manner. Out of these projects, at least one must have
been executed in a reputed government institute/ government department/ undertaking/ autonomous
body/ reputed private organization.
In each of the above case, documentary evidence in the form of Work Order/Purchase order
indicating the nature and value of along with reference/contact person & address, telephone/ E mail
details should be submitted for verification. The Completion Certificate of the job issued by the
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respective client is necessary. The experience certificate and statement showing the value of existing
commitments and on-going works as well as the stipulated period of completion, remaining for the
each of the works listed shall be issued by the firm. In support of experience in non-government
bodies-companies TDS certificates shall also be enclosed in addition to work order and completion
certificates.
(V) The vendor must have designed, installed, commissioned and validated at least one ISO 5 or
better class cleanroom as a turnkey project for MEMS/NEMS or similar Semiconductor fabrication
applications or any other applications having ISO 5 or better class cleanrooms within the previous
five financial years. The turnkey project must have included but not have been limited to the
following elements: HVAC, electrical and lighting, integrated Building Management System (BMS),
surveillance, fire detection and safety, gas based suppression system, bulk and specialty gas
distribution including flammable and toxic gases using high purity pipelines, toxic gas detection
system, scrubbers (wet, dry and general), effluent treatment plant (acidic, caustic and organic),
deionised water system, process cooling water systems and vacuum systems. The vendor should
have completed at least one similar class 100 (ISO 5) Cleanroom job or better class in all respect.
Documentary Evidence along with reference/contact person & address, telephone/ E mail details of
Clients should be submitted along with Technical Bid for verification. The documentary evidence
shall be in terms of Work Order/Purchase Order indicating the scope / nature of work, value of Work
Order /Purchase Order, value of contract & period of execution etc. The Completion Certificate of
the job issued by the respective client is a must.
(VI) The vendors who do not individually meet the criteria in clauses I – V, may form a consortium
of companies to qualify the above criteria. In such case, it is necessary that majority of the partners
of the consortium have comprehensively fulfilled all the qualifying criteria given in this document in
clauses I – V. Further, there should be one vendor (“lead bidder”) in the consortium who shall
submit the indent and shall take responsibility of bidding, commissioning, validation and operation.
The lead bidder shall be liable for the entire scope of work and risks involved thereof. The lead
bidder must have experience of executing clean room facility, supported by documentary evidence.
(VII) The Vendor shall furnish the list of service providers for the utility & service facilities, safety
and security systems to complete the project as per requirements of IITG. The vendor shall include
names of highly experienced and reputed service providers in the list and relevant documents in
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support of such experiences in clean room applications shall be enclosed. The institute reserves the
right to reject the bid in case any of the service providers is found to have inadequate experience in
the concern field.
(VIII) Foreign vendor(s) should have their establishment in India or at least have their branch office /
representative office in India for execution, follow-up, and maintenance. This establishment/ branch
office/ representative office shall be registered in India. They shall have technically skilled personnel
and project team in India. The details of the branch in India/representative in India shall be produced.
They shall produce documentary proof of MOU duly registered in India. If the relevant Documents
are not submitted, the offer is liable to be rejected by IITG authorities. Even after submission of
documents, if the foreign company does not possess the qualified personnel to take care the project
during Construction & their after Annual maintenance, the offer is liable to be rejected at the
discretion of IITG authorities.
(IX) The vendor should have the capability for measuring the facility as per the ISO-14644
guidelines and should possess instruments such as particle counter, DOP photometer with generator,
anemometer, LUX level meter, and sound level meter. The vendor should submit the list of
instruments and equipment available to execute the work and validation. In addition, one should have
the documentation ability as per DQ, IQ, OQ, and PQ standards.
OR
The vendor should hire / subcontract the validation work to a reputed validation firm/team having all
the above mentioned calibrated instruments with approval from IITG.
(X) The vendor(s) should have adequate technical, quality control and quality assurance staff for the
contract. Designation, Name of the Person and Total Years of relevant Experience at the current firm
should be provided for the following posts: Head - Execution, Head Design – Technical, Project
manager – Technical, Manager – Quality, Project Engineers – Execution, Safety Engineer, Site
Supervisor and Technicians, Validation Engineers, Documentation Engineer and Service Engineer.
(XI) The vendor should possess PF registration with Regional Provident Fund Commissioner in
force.
(XII) The vendor should have ESI registration with regional Director ESI Corporation in force.
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6. SPECIAL TERMS AND CONDITIONS FOR CLEANROOM and UTILITY SECTION:
(I) The vendor must attend the pre-bid meeting to visit the site of the proposed cleanroom with prior
permission/appointment from CENTD, IITG. During the pre-bid meeting, the vendors shall have to
make technical presentation(s) at IIT Guwahati. During such presentations, the vendor should clarify
all the technical queries raised by IITG. In case the vendor involves other service providers/ sub-
contractors, the technical personnel of such service providers/ sub-contractors should participate in
the pre-bid presentation.
(II) The vendor should provide details of the requirements to be met by IITG. For example, IITG
will provide the civil structure (Annexure C) required for the cleanroom facility. Water and power
supply to the nearest point of the site will be provided by IITG. The vendor should point out and
resolve all the relevant critical issues before the technical and price bid submission, which needs to
be addressed while establishing the cleanroom and its utilities.
(III) Vendors can also write to CENTD for any clarifications well before the submission of tenders.
(IV) Tenders shall be submitted employing the DOUBLE-BID process. In this system, quotations
will have to be submitted in TWO PARTS i.e. (a) Technical Bid and (b) Price Bid, in two separate
properly sealed covers; and both these covers will have to be again put in to a single sealed cover.
Also, the address of the firm submitting the quotation and the Officer to whom the quotation is
addressed, must appear distinctly on both the inner sealed covers, indicating also TECHNICAL
BID/PRICE BID as may be applicable. Further, on both the inner sealed covers and the outer sealed
cover the following are to be written:
QUOTATION FOR SUPPLY & INSTALLATION OF … FOR THE … IIT GUWAHATI.
VIDE REF NO. …/2015-16, LAST DATE FOR SUBMISSION …….DATE OF OPENING….(as
per Checklist)
NOTE: The bid documents are not transferable and the firm’s seal and signature of the authorized
official must appear on all the papers and envelopes submitted.
The technical bid should be complete with all the required information, drawing, literature etc.,
strictly as specified in the form in the Annexure H.
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(V) IITG may inspect any of the completed or ongoing similar projects for the vendor(s), for which
the vendor(s) shall have to provide cooperation/assistance (IITG may also take written inputs from
such clients). In case performance of the vendor(s) is found to be unsatisfactory, their bid is liable to
be rejected.
(VI) In the technical bid, the vendor shall submit all the technical details of the cleanroom and allied
utilities. For example, relevant heat load calculations and drawings showing reflected ceiling panel
layout indicating the FFU with HEPA filter and light fixtures, supply and return air ducting layout,
wall panel layout, location of AHU and condensing units and other necessary details are to be
provided.
(VII) The vendor shall have to provide details of sub-contractors/service providers for executing
specialized work included in scope of the contract. Details like project executed by such sub-
contractors/service provider and their technical capability in terms of trained manpower, tools and
equipment shall be enclosed along with the tender. Service providers, particularly for the piping /
tubing /plumbing shall have to be well versed with Orbital and PVDF welding. Coordination with the
service providers and implementation of work by them as per the required specifications shall be the
responsibility of the vendor.
(VIII) The vendor shall have to facilitate IITG in order to obtain all the necessary clearances/licenses
from Chief Controller of Explosives (CCOE) Nagpur.
(IX) The vendor shall quote for approved makes/models only as indicated in the tender document.
Deviation, if any, must be notified in the compliance statement. IITG shall hold the discretion to
accept any such deviation.
(X) The vendor shall have to provide test certificates for gas, water and other distribution systems for
compliance to the design specifications.
(XI) The vendor shall have to provide quality certificates from the OEM for all the materials and
equipment supplied, indicating all relevant details.
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(XII) The vendor shall bring all tools, consumables, and manpower required for implementation of
the cleanroom and its utility sections.
(XIII) All electrical works in connection with the installation of air conditioning plant shall be
carried out in accordance with the provision of Indian Electricity Act 1910 and Indian Electricity
Rules 1956, amended up-to-date and supply and regulations of the state electricity board, in
accordance with IEC/IS standards.
(XIV) The equipment and installation shall conform to Indian Standards wherever applicable. The
generally applicable Indian Standards are:
[1] IS 3615: glossary of terms used in Refrigeration & Air Conditioning
[2] IS 659: Air Conditioning safety code.
[3] IS 277: galvanized sheet metal.
[4] IS 660: Mechanical refrigeration safety code.
[5] IS 325: Three phase induction motor.
[6] IS 732: Code of practice for electrical wiring and fittings for the buildings.
[7] IS 1554 (Part 1): PVC Insulated heavy duty electrical cables for working voltages and
including 1100 V.
[8] IS 1367 Technical supply conditions for threaded fasteners.
[9] IS: 3043 Code for Earthing Practice.
[10] IS 4671: Expanded polystyrene for thermal insulation.
[11] IS 7240: Code of practice for industrial application and finishing of thermal insulating
material at temperature from -80 0C to 40 0C.
[12] IS 655: Metal Air ducts.
[13] Any other IS codes which is applicable for this work.
(XV) Materials and workmanship:
[1] All materials used in the manufacture shall be of high quality, free from defects and
imperfections, of recent manufacture, and unused. Materials shall conform to latest
specifications of the Indian Standards Institution or other equivalent specifications. Liberal
factors of safety shall be used throughout the design. Details of model components are given in
Annexure E.
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[2] The cleanroom and utilities shall be designed and manufactured for safe and continuous
operation. Their operation should be free from noise and vibration as far as possible.
[3] All the necessary fittings, assemblies, hardware, accessories such as clamps, foundation bolts,
terminal for electrical connections, cable glands, junction box, wall cowls, bird screen gaskets,
brackets, hangers, screws, nuts, bolts, washers which are useful and necessary for assembly and
efficient working of systems shall be supplied by the vendor and the cost of the same shall be
deemed to be included in the quote, whether specifically mentioned in the tender documents or
not. Any material and labor which may be necessary to complete the work in accordance with the
intent of the specification shall be furnished by the vendor without any extra cost as if they are
fully described and called for in this specification. The details of the components mentioned
above should be included in the BOQ of the bid, modeled after Annexure I.
[4] The vendor shall ensure that no damage will occur during shipment or storage prior to
installation under the climatic conditions prevailing.
[5] The vendor shall fully co-operate with the Engineering Section at IIT Guwahati in the mutual
exchange of information such as drawings, dimensions, calculations, and other information of
related equipment to ensure complete coordination in design, arrangements, manufacture and
installation of the cleanroom and its utilities.
(XVI) All the machinery installed should preferably have a service center in India with trained
personnel to carry out the servicing/repair of the machinery at the site or at their workplace.
(XVII) The instruments and accessories used during the commissioning and validation shall be
properly calibrated. The vendor shall produce relevant certificates to prove the capability of the
instruments /accessories fit for validation.
(XVIII) After commissioning the cleanroom facility, it will be submitted to a compulsory validation
under a reputed third-party validation organization/team in India to be suggested by IITG, for
evaluation of compliance to the design specification as per ISO-14644 standards. The installation
certificate for the cleanroom and its utilities will not be issued from IITG prior to such validation.
(XIX) The vendor should provide FIVE YEARS OF COMPREHENSIVE WARRANTY for all
cleanroom, its utilities, and workmanship from the date of handing over the facility in working
condition to IITG. During the warranty period, the vendor shall have to monitor the complete facility
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and installed services and carry out necessary corrections, repair or replacements, if required, for the
smooth operation of the cleanroom facility and services as per the specifications.
(XX) The vendor shall have to support the proposed cleanroom facility in all aspects after the
validation for minimum five years, including spares and services, for the equipment and services
supplied & commissioned, preferably through OEM. In case the vendor uses services of other service
providers or procures and uses material or equipment from other vendors, written agreements for the
same between service provider/OEM with the vendor to be provided.
(XIX) The vendor must extend appropriate training to IITG staff towards operation and maintenance
of the complete facility, including cleanroom, facilities/utility services, and BMS. The vendor must
train the IITG staff: (i) to run the utilities commissioned, (ii) to carry out routine measurement of
cleanroom environmental parameters, and (iii) maintain the cleanroom and its utilities. The vendor
must also provide a document detailing the cleanroom protocols and train the IITG staff about the
same.
IMPORTANT NOTE - vendors shall be liable to be disqualified without any notice in case of
noncompliance of any (or part thereof) of eligibility Criteria and/or in case of any
additional/irrelevant Documentary proof submitted in respect of eligible criteria. The vendor should
be capable of Designing, supplying /fabricating, installing, Commissioning & testing all the services
required for semiconductors processing. The vendors can identify the service providers for these
services subjected to approval of IITG. Else the vendors shall have to utilize the Services of the
service providers qualified by IITG. Vendors shall have to provide details of all the service providers
likely to be involved by the vendor for this Cleanroom project. Vendors should provide details of the
projects executed by the service providers & their technical capability in terms of trained manpower,
tools, equipment etc., Service providers, particularly for the piping/tubing/plumbing shall be well
versed with Orbital & PVDF welding.
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7. GENERAL TERMS AND CONDITIONS
(I) Rates: Rates quoted for indigenous items should be on FOR IIT Guwahati, on DOOR
DELIVERY basis, with break-ups as per details below (For import items please refer ‘Additional
Terms for imported goods’ at clause No. XXV below).
Break-ups of cost
A. Supply
(a) Basic Price showing break-up of individual items of clean room as well as safety, security and
utility
(b) (+) Central Excise Duty
(c) (+) VAT/ Central Sales Tax (On Sub-Total Price, including Excise Duty, if any)
(d) (+) Freight & Insurance Charge
(e) Grand Total for Supply F.O.R. IIT Guwahati
B. Installation, Testing, Commissioning and Validation for all the items mentioned in Part A
Note: Vague terms like “packing, forwarding, transportation etc. extra” without mentioning the
specific amount will not be accepted. Such offers shall be treated as incomplete and rejected.
Bidders shall indicate their rates in clear/visible figures as well as in words and shall not
alter/overwrite/make cutting in the quotation. In case of a mismatch, the rates written in words will
prevail.
(II) Validity (Both foreign & indigenous): Quoted rates must be valid for 120 days.
(III) Earnest Money Deposit (EMD) (Both foreign & indigenous):
All firms who are not specifically registered for required stores as specified, either with DGS&D or
with NSIC, are required to submit Earnest Money along with the Technical Bid as per EMD deposit
options provided below. The EMD of unsuccessful bidders shall be returned after award of contract.
All tenders received without EMD shall be summarily rejected. EMD of the successful bidder will be
released on submission of the PBG. Firms claiming exemption from depositing earnest money must
enclose copies of ‘One Time Earnest Money Deposit Certificate’ given by IITG or their valid
DGS&D/NSIC registration Certificate. Offers received without these details and without earnest
money are liable to be ignored.
Option-I: Refundable earnest money deposit, amounting to minimum 2.5% of the total
quoted value rounded off to the nearest thousand rupees) - whichever is more, through
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demand draft drawn in favor of Indian Institute of Technology, Guwahati, payable at
Guwahati, will have to accompany all quotations to be submitted. Quotations submitted
without appropriate amount of earnest money are likely to be rejected.
Option-II: Those vendors who do not want to avail earnest money deposit scheme under
Option-I, may make a refundable one-time earnest money deposit for Rs.50,000/- in the form
of a demand draft drawn in favor of Indian Institute of Technology Guwahati, payable at
Guwahati against which the S&P branch of the institute will issue a One-Time Earnest
Money Deposit Registration Certificate (OEMDRC). For all subsequent cases of submission
of quotations, the vendor may simply enclose the self-attested copy of its OEMDRC in lieu of
submission of individual-case-specific earnest money deposits. Also, the vendors availing
option-ii for earnest money deposit for the first time, will have to enclose the original demand
draft of Rs.50,000/- for one-time earnest money deposit, in a separately sealed envelope with
a marking on the outer side of the envelope as “demand draft for one-time earnest money
deposit” [i.e. the third envelope within the common outer envelope, the other two being price
bid and technical bid] .
Please note that earnest money deposit under both Option-I and Option-II, will (a) not bear any
interest, and (b) have to be in the form of demand draft only.
(IV) Performance Bank Guarantee (Both foreign & indigenous): The successful bidder shall
furnish an unconditional Performance Bank Guarantee valid till 60 days after the warranty period
from a scheduled Bank for 5% of the Purchase Order value within 21 days of placement of order
failing which the contract shall be deemed as terminated (APPLICABLE ONLY TO ORDERS
COSTING MORE THAN INR 5,00,000.00). That,
The Vendor shall provide a Certificate of Guarantee guaranteeing XXX (Name of equipment)
of the satisfactory operation of the components and against poor workmanship, bad quality of
materials used, faulty designs, and performance figures given by the Vendor.
This guarantee shall be operative for a period of 60 days after the warranty period. The
performance guarantee would be to the extent of 5 % of the order value.
The Vendor shall at his own cost rectify the defects/replace the items supplied, for defects
identified during the period of guarantee
While clauses 3(a),3(b) and 3(c) are applicable to all orders worth Rs.5 Lakhs or more,
competent authority may take appropriate decisions on exceptional cases.
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(V) PENALTY FOR DELAY IN COMPLETION (for both foreign & indigenous): In the event of
delay in completion of the project i.e. after the expiry of the period as agreed by both the parties, the
vendor shall be liable for a penalty deduction at a percentage of the total value subject to a maximum
of 10% (ten percent) as detailed below:
@ 1% up to one week;
@ 2.5% up to two weeks;
@ 5% up to three weeks;
@ 10% for four weeks and above
For the purpose of this clause, part of the week is considered as a full week.
(VI) In case of indigenous supplies, the goods should be insured against theft, loss or breakage
during transit and insurance charges should not exceed 1% of the cost of material supplied, the rates
of Sales Tax, Excise Duty etc. (as applicable) should be clearly indicated. Form C & D is not
applicable to us. However, we are exempted from payment of Excise Duty and certificate to this
effect can be provided.
(VII) Penalty for delay (Both foreign & indigenous): The completion period shall be strictly
adhered to. IITG reserves the right to claim liquidated damages of 1% per week subject to maximum
of 10% of the total value of supply.
(VIII) Pre-installation requisites (Both foreign & indigenous): Pre-installation requisites
(electrical/floor/space/air-conditioning etc.) if any should invariably be mentioned clearly.
Installation/ Training will be the full responsibility of the supplier/ Indian Agent.
(IX) Short Shipment (Both foreign & indigenous): If any short-shipment etc. is noticed, the same
will be arranged immediately with all charges to this effect to be borne by supplier/Indian agent.
(X) Genuine Pricing (Both foreign & indigenous) :Vendor is to ensure that quoted price is not more
than the price offered to any other customer in India to whom this particular item has been sold,
particularly to IIT/Institutes and other Government Organization. Copy of the latest price list for the
quoted item, applicable in India, must be enclosed with your offer.
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(XI) Excise Duty and Service Tax: The Institute is exempted from payment of Central Excise
Duty vide GOI Notification No. 10/97-Central Excise, dated 01.03.97 with Regn.No. TU/V/RG-
CDE (351)/2006, dated 14.09.2006.
Service Tax at applicable rate shall be paid extra and the same shall be considered in the price
evaluation.
(XII) VAT: For a vendor within the State of Assam, appropriate VAT (to be deducted at source) will
be applicable. For exemption from Octroi, wherever required, the Institute will issue necessary
certificates.
(XIII) Entry Tax : Assam Govt. Entry Tax – usually @4% [to be paid by IIT Guwahati, not by the
vendor], wherever applicable, will be added while evaluating cost status of the concerned equipment
to be supplied by vendors from outside the State of Assam.
(XIV) Delivery:
(a) The goods and equipment shall be delivered to site so as to adhere to the schedule of
completion of the project as stated in clause 4 (‘Timelines for the Project’) of Section I of this
document.
(b) Safe delivery and storage of goods: All aspects of safe delivery shall be the exclusive
responsibility of the vendor. The vendor will also have to take responsibility for safe storage of
the items/ goods until handing over the entire project to IITG.
(XV) Mode of Payment
Payment will be made as follows:
a. Against supply of material and construction: 75% of the value of the material item as per
assessment made by IITG.
b. After installation and commissioning: The payment for the balance amount will be made.
(XVI) Quotation by Fax/Mail is not Acceptable (Both foreign & indigenous): The offers submitted
by telex/ telegram/ fax/ E-mail shall not be considered. No correspondence will be entertained on this
matter.
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(XVII) Late and delayed tender (Both foreign & indigenous): Late and delayed tender will not be
considered. In case any unscheduled holiday occurs on prescribed closing/opening date the next
working day shall be the prescribed date of closing/opening.
(XVIII) Conditional tenders are not acceptable (Both foreign & indigenous): Conditional tenders
shall not be accepted on any ground and shall be rejected straightway. In other word, printed
conditions mentioned in the tender bids submitted by vendors will not be binding on IITG. All the
terms and conditions for the supply, payment terms, penalty etc. will be as those mentioned herein
and no change in the terms and conditions by the vendors will be acceptable.
(XIX) Specifications are basic essence of the product (Both foreign & indigenous): It must be
ensured that the offers are strictly as per our specifications. At the same time it must also be kept in
mind that merely copying advertised specifications in their quotation shall not make firms eligible
for consideration. A quotation has to be supported with the printed technical leaflet/literature
(wherever applicable) and the specifications mentioned in the quotation must be reflected/ supported
by such printed technical leaflet/literature model quoted/tendered specifications should invariably
be highlighted in the leaflet/literature for easy reference.
(XX) Enquiry during the course of evaluation not allowed (Both foreign & indigenous) : No
enquiry shall be made by the bidder(s) during the course of evaluation of the tender till final decision
is conveyed to the successful bidder(s). However, the Committee/its authorized representative and
office of IIT GUWAHATI can make any enquiry/seek clarification from the bidders. In such a
situation, the agency shall have to extend full co-operation. The bidders can also be asked to arrange
demonstration of the offered items, in a short period notice, as such the bidders have to be ready for
the same.
(XXI) The acceptance of the quotation (Both foreign & indigenous): Will rest solely with the
Director, IITG, who in the interest of the Institute is not bound to accept the lowest quotation and
reserves the right to himself to reject or partially accept any or all the quotations received without
assigning any reasons.
(XXII) Force Majeure (Both foreign & indigenous): (a) If the performance of the obligation of
either party is rendered commercially impossible by any of the events hereafter mentioned that party
19
shall be under no obligation to perform the agreement under order after giving notice of 15 days
from the date of such an event in writing to the other party, and the events referred to are as follows:
(a) Any law, statute or ordinance, order action or regulations of the Government of India.
(b) Any kind of natural disaster.
(c) Strikes acts of the Public enemy, war, insurrections, riots, lockouts, sabotage.
(XXIII) Termination for default (Both foreign & indigenous): Default is said to have occurred,
(a) If the supplier fails to deliver any or all of the services within the time period(s) specified in
the purchase order or any extension thereof granted by IIT.
(b) If the supplier fails to perform any other obligation(s) under the contract
If the vendor, in either of the above circumstances, does not take remedial steps within a period
of 30 days after receipt of the default notice from IIT (or takes longer period in-spite of what IIT
may authorize in writing), IIT may terminate the contract / purchase order in whole or in part and
forfeit the EMD/PBG as applicable. In addition to above, IIT may at its discretion also take the
following actions: IIT may procure, upon such terms and in such manner, as it deems appropriate,
goods similar to the undelivered items/products and the defaulting supplier shall be liable to
compensate IIT for any extra expenditure involved towards goods and services obtained.
(XXIV) Applicable Laws (Both foreign & indigenous) :
(a) The contract shall be governed by the laws and procedures established by Govt. of India and
subject to exclusive jurisdiction of Competent Court and Forum in Guwahati, India only.
(b) Any dispute arising out of this purchase shall be referred to the Director IIT Guwahati, and if
either of the parties hereto is dissatisfied with the decision, the dispute shall be referred to the
decision of an Arbitrator, who should be acceptable to both the parties, to be appointed by the
Director of the Institute. The decision of such Arbitrator shall be final and binding on both the
parties.
(XXV) Extension of time: If the contractor shall desire an extension of the time for completion of
the work on the grounds of his having been unavoidably hindered in its execution or on any other
grounds, he shall apply in writing to IITG within ten days of the date of the hindrance on account of
which he desires such extension as aforesaid, and if IITG is satisfied that reasonable grounds have
been shown thereof, authorize such extension of time as may be necessary or proper without any
extra cost / liability to IITG.
20
No compensation for any resources, labourers etc. brought to site in idle period will be paid to the
contractor.
8. ADDITIONAL TERMS FOR IMPORTED GOODS
Following terms besides the fore-mentioned terms will be applicable in case of foreign purchases:
(I) Rates: Quoted rates should be in CIF/CIP Kolkata or CIF Guwahati terms and charges to be
stated in the following break-ups -
(a) Ex-works value
(b) + Documentation & Handling Charge, if any
(c) + Estimated Overseas Freight to be paid at actual against authentic documents and
monetary receipt
(d) + Estimated Overseas Insurance Charge to be paid at actual against authentic documents
and monetary receipt (In case the firm holds open insurance policy, the Insurance Certificate
relating to the consignment will have to be provided).
(e) Total CIP/CIF Kolkata or CIF Guwahati values.
(II) After Sales Service: In case of imported stores, foreign manufacturing firms should indicate
facilities available for after sales service in India without which their offers are liable to be ignored.
(III) Delivery:
(a) The goods and equipment shall be delivered to site so as to adhere to the schedule of
completion of the project as stated in clause 4 (‘Timelines for the Project’) of Section I of this
document.
(b) Safe delivery and storage of goods: All aspects of safe delivery shall be the exclusive
responsibility of the vendor. The vendor will also have to take responsibility for safe storage of
the items/ goods until handing over the entire project to IITG.
(IV)Customs Duty: The Institute is generally exempted from payment of Customs Duty vide GOI
Notification No.51/96-Customs, dated 23.07.96, with Regn. No. TU/V/RG-CDE (351)/2006, dated
14.09.2006. CUSTOMS DUTY EXEMPTION CERTIFICATE WILL BE MADE AVAILABLE BY
THE INSTITUTE IN REGARD TO QUOTES IN FOREIGN CURRENCY ONLY [ NOT
AGAINST QUOTES MADE BY A FIRM IN INDIAN CURRENCY, UNLESS THE
21
CONCERNED FIRM IS A FOREIGN HOLDING COMPANY WITH `FDI’ CERTIFICATE
ISSUED BY THE MINISTRY OF FINANCE, GOVT. OF INDIA ].
(V) Agency Commission: The percentage of ex-works value to be paid to Indian agent in equivalent
Indian currency as agency commission as applicable will have to be clearly stated in the
quotation.
(VI) After Sales Service: For equipment to be imported the quotation will have to clearly state the
available nearest after sales service center and contact no. in India.
(VII) Country of Origin: While Country of Origin Certificate will not be insisted, the same
however will have to be stated in the Original Invoice for payment through LoC.
(VIII) LoC Amendment: LoC/FDD amendment charges due to mistake on the part of the supplier,
if any, will have to be borne by the supplier.
22
Section II
Technical Details of Cleanroom
&
Utility Section
23
1. GENERAL DESCRIPTION
The following detailed technical specification pertains to the design, engineering, manufacture,
delivery, handling, fabrication, erection/installation, commissioning, validation, and carrying out
acceptance tests at site (including transportation from storage place to works) of all the plants,
equipment and other items required for the cleanrooms and its utilities at IITG. The
specifications/numbers/data provided in this technical document may not contain all details of design
and installation/commissioning of cleanrooms and its utilities at IITG. The vendors should treat the
specified quantities/numbers/data for various segments of the cleanroom and utility as a guideline to
initiate their calculations. The vendors are supposed to provide IITG with the accurate estimate of
each and every component related to the cleanroom and its utility during their bid submittal.
2. DETAILED DESIGN DATA
2.1 The proposed cleanroom facility at IITG shall consist of cleanrooms and comfort areas as per the
layout shown in Drawings Annexures A & B. Details of the zones including their desired class of
cleanliness, space constraints and projected usage are shown in the Tables I & II.
2.2 The vendor has to verify the proposed design parameters for the required cleanliness conditions
of the clean room and its utility section. The deviations identified by the vendors should be clearly
specified in the techno-commercial bid vide “Schedule of Deviations”.
24
Table I: Design Data for the ISO-classified areas of the cleanroom
Description Photolithography Lab Diffusion Lab Airlock 1 Changing Room
1. Approximate Area (m2) 47.0 133.0 8.0 9.0
2. Class of cleanliness 100 (ISO 5) 1000 (ISO 6) 1000 (ISO 6) 10000 (ISO 7)
3. Inside Room Temperature 22 ± 1 ºC 22 ± 2 ºC 22 ± 2 ºC 22 ± 2 ºC
4. Inside Room Relative humidity 45 ± 5% (Dehumidifier
required )
50 ± 5% (Dehumidifier
required )
50 ± 5% (Dehumidifier
required )
50 ± 5% (Dehumidifier
required )
5. Inside Room Positive pressure (+
Pa) w.r.t. atmosphere
+ 40 ± 5 Pa (+15 Pa
higher than Air Lock)
+ 40 ± 5 Pa (+15 Pa
higher than Air Lock)
+ 25 ± 5 Pa (+15 Pa
higher than Changing
room)
+ 10 ± 5 Pa ( +10 Pa
higher than Corridor)
6. Roof height from FFL of
perforated flooring. 5700 mm 5700 mm 5700 mm 5700 mm
7. False ceiling height from FFL of
perforated flooring. 3300 mm 3300 mm 3300 mm 3300 mm
8.
Depth of perforated/solid floor
from FFL ( height of
perforated/solid floor tiles from
Ground)
600 mm 600 mm --NA (Solid Flooring only
with ESD PVC)
-- NA (Solid Flooring only
with ESD PVC)
9. Supply Airflow Pattern downward unidirectional downward
unidirectional
downward random
mixed
downward random
mixed
10. Supply Air change rate per hour Based on 100% HEPA
H-14 coverage 130 ACPH 130 ACPH 60 ACPH
11. Supply Air Velocity 0.45 meters per second ±
20%
Not less than 90 fpm ±
20% (0.45 mps ± 20%)
Not less than 90 fpm ±
20% (0.45 mps ± 20%)
90 fpm ± 20% (0.45 mps
± 20%)
25
12. % Filter Coverage 100 % HEPA H-14
coverage Minimum 30 % Minimum 30 % Minimum 15%
13. Particle Counts as per ISO 14644
Standard
< 3520 Particles/m³ of
size 0.5µm (100
particles/cubic ft of size
0.5µm )
< 35200 Particles/m³ of
size 0.5µm (1000
particles/cubic ft. of size
0.5µm.)
< 35200 Particles/m³ of
size 0.5µm (1000
particles/cubic ft of size
0.5µm .)
< 352000 Particles/m³ of
size 0.5µm (10000
particles/cubic ft. of size
0.5µm.)
14. Types & Quality of Filters
HEPA (H -14) filter
efficiency @ 99.995%
down to 0.3 µm size
particle
HEPA (H -14) filter
efficiency @ 99.995%
down to 0.3 µm size
particle
HEPA filter (H- 14) with
efficiency @ 99.995%
down to 0.3 µm size
particle
HEPA filter ( H-14) with
efficiency @ 99.995%
down to 0.3 µm size
particle
15. Sound pressure level 55 ±5 db 55 ±5 db 55 ±5 db 55 ±5 db
16. Supply Air plenum
Negative pressure plenum
type airflow using FFU
with HEPA H-14 Filters
Negative pressure
plenum type airflow
using FFU with H-14
HEPA Filters
Negative pressure
plenum type airflow
using FFU with H-14
HEPA Filters
Negative pressure
plenum type airflow
using FFU with H-14
HEPA Filters
17.
Connected Equipment load
heat load by other components of
HVAC & Air management System
is to be added by the Vendor in
Heat load calculation
35 kW 170 kW Nil 5 kW
18. Diversity factor for equipment load
for Heat Load calculation 0.4 0.4 0.4 0.4
19. Number of people Four Eight Four eight
20. Min number of fresh air changes
per hour (ACPH) Three three three three
26
21. Lighting
~ 250 LUX Yellow light
(Teardrop, Imported);
blocking all radiations
below 500 nm.
~ 550 LUX white LED
light
~ 550 LUX white LED
light
~ 550 LUX white LED
light
22. Process exhaust of air 600 cfm 1750 cfm Nil Nil
23. Outside design conditions to be
considered
Data as per
ISHRAE/relevant
standard as per Annexure
F for Guwahati
conditions
Data as per
ISHRAE/relevant
standard as per
Annexure F for
Guwahati conditions
Data as per
ISHRAE/relevant
standard as per
Annexure F for
Guwahati conditions
Data as per
ISHRAE/relevant
standard as per
Annexure F for
Guwahati conditions
27
Table II: Design Data for the unclassified areas of the cleanroom and utilities
Description Cleanroom Corridors a) Locker Room,
b) Laundry & Sorting,
Room
Dangerous/ Toxic
Gas Room
a) UPS & Electrical
room.
b) Maintenance office
& BMS Control Room
(Utility Building)
1. Approximate Area (m2) 123.0
90.0
a) Locker room 63 m2
b) Laundry & Sorting
Room 27 m2
15.0
97.0
a) UPS & Elec room: 42
m2
b)Maintenance office &
BMS : 55 m2
2. Inside Room Temperature 22 ± 2 ºC 22 ± 2 ºC
Outside Ambient
condition is OK.
(only ventilation)
with effective exhaust
once through system
22 ± 2 ºC
3. Inside Room Relative humidity Maximum 65% Maximum 65% NA ( as per outside
Ambient conditions) Maximum 65%
4. Roof height from FFL 5700 mm 5700 mm 4000 mm 4000 mm
5. False ceiling height from FFL 3000 mm 3000 mm 3500 mm N/A
6. Supply Air
Through SA ducting
with SA Diffusers &
VCD.
Through SA ducting with
SA Diffusers & VCD.
Through SA
Diffusers Independent Split A/C
7. Return Air Through RA ducting
with RA Diffusers with
Through RA ducting
with RA Diffusers with
Once through system
no recirculation Independent Split A/C
28
VCD closed loop VCD closed loop
8. Supply and Return Airflow
Pattern Random flow Random flow
Once through no
return or recirculation Independent Split A/C
9. Supply Air change rate per hour 10 10 10 NA
10. Min number of fresh air
changes per hour (ACPH) three three four NA
11. Additional Filters at AHU
95% efficiency HEPA
filters at the outlet of
AHU
95% efficiency HEPA
filters at the outlet of
AHU
HDPE Rough filters
of 20/10 um in supply
fan.
95% efficiency HEPA
filters at the outlet of
AHU
12.
Connected Equipment load
heat load by other components
of HVAC & Air management
System is to be added by the
Vendor in Heat load calculation
37 kW 5 kW in Locker room +
4kW in Laundry NA
220 kVA UPS, and
5 kW for BMS
13. Diversity factor for equipment
load 0.4 0.4 NA 0.4
14. Number of people Ten Twelve Four Twelve
15. Lighting ~ 550 LUX white LED
light
~ 550 LUX white LED
light
~ 550 LUX white
LED light
~ 550 LUX white LED
light
16. Process exhaust of air 720 cfm NIL
Ventilation exhaust
required for safety
purpose
NIL
17. Outside design conditions As per ISHRAE/
Annexure F
As per ISHRAE/
Annexure F
As per ISHRAE/
Annexure F
As per ISHRAE/
Annexure F
29
3. GENERAL ARRANGEMENTS & TECHNICAL SPECIFICATIONS
3.1 General arrangements for construction of Modular Cleanroom
The cleanroom shall be self-contained pre-fabricated modular system containing wall panels, ceiling
panels and suitable number of FFU with HEPA filters to provide cleanliness level of classes indicated
above. The clean air shall travel/enter the clean space through FFU having HEPA H-14 in ISO 5, ISO 6
& 7 cleanrooms, housed in the false ceiling of the cleanroom. The vendor shall provide the necessary
cutouts in the wall panel, ceiling panel, and flooring as required for fixing/installing utilities &
accessories such as electrical items, light fixtures, LAN ports etc.
3.2 Supply air scheme
In the Photolithography Lab, Diffusion Lab, Air Lock & Changing Room, the ‘Negative Pressure
Plenum’ will be achieved using Fan Feed Modules (FFMs). The supply air shall have a unidirectional
vertical downward flow with negative pressurized plenum located over the proposed “clean spaces” of
ISO 5, ISO 6 & 7 cleanrooms to deliver filtered air into the above areas.
For Unclassified Areas: The proposal is Turbulent flow air supply system having SA Diffusers with
VCD housed in the false ceiling system to deliver the air into the proposed Unclassified Areas.
3.3 Recirculating Air Handlers
3.3.1 Air Handlers for Cleanrooms: Suitable recirculating air handlers are to be located out-board
of the fabrication (fab) area envelope in the utility building, fitted with cooling coil, dehumidifiers,
stages of filters etc., to maintain the required temperature and RH. The required quantity of
dehumidified air should be delivered through suitably sized SA ducts, which penetrate into the
building and run horizontally over the fab area in the overhead interstitial space, from where the air is
supplied to the negative pressurized plenum.
3.3.2 Air Handlers for Unclassified Areas: The required quantity of dehumidified air is delivered
through suitably sized SA ducts, Supply Air Diffusers with VCD located in the overhead interstitial
space into the Unclassified Areas. A dedicated Recirculating Air Handler shall be provided for these
areas.
3.3.3 Details of the Dedicated Air Handlers:
30
AHU 1: Dedicated recirculating Air Handler for Photolithography Lab.
AHU 2: Dedicated recirculating Air Handler for Diffusion Lab, Air Lock & Changing Room.
AHU 3: Dedicated recirculating Air Handler for unclassified Areas (Corridors & Locker Room,
Laundry and Sorting Room)
VAH: Ventilation Air Handler/FAN -- For Dangerous/toxic Gas Room such that the air shall not
mix with other rooms. VAH shall consist of Supply Air-handler with pre-filters of 20 μm and 10
μm, and shall be a once-through system.
DSA: Ductable Split A/C system: For the following spaces in the Utility Building: a) UPS &
Electrical Room b) Maintenance office and BMS Control Room
3.4 Local recirculation Air Management System in Cleanrooms
The following system is proposed for local recirculation:
Double wall panel system with a void of ~ 200 mm between the inner and the outer panels on the
peripheral walls of the cleanrooms.
The outer wall panels installed up to the true ceiling of the cleanroom shell to avoid ingress of
contaminated air from the uncovered areas in between the true and the false ceilings. This will
also isolate the air recirculating from the Photolithography lab (critical process area) from
mixing with the air of the other areas and thus avoid the cross-contamination.
Negative pressurized plenum with a cladding of the true ceiling, beams and any brick wall
between true ceiling & false ceiling with 25 mm/50 mm thick cleanroom compatible ceiling/wall
cladding material having PUF as infill material in order to provide a clean plenum where FFUs
are housed.
3.5 Return air scheme
Option 1: The Clean air from the Fan Filter Units (FFUs) will flow in a unidirectional manner
downward into the Cleanroom to enter the return path through perforated access floor tiles having
volume control dampers. The return air will pass through the perforated access floor and will be
recirculated by FFUS housed in the false ceiling via the 200 mm void between the double wall panels.
Then the return air will rise up in the void to enter into the Negative Pressure plenum, wherein the FFUS
recirculate the clean air.
31
The required quantity of the dehumidified air which is required to maintain the temperature and RH
shall be drawn from the Cleanrooms through the dedicated Return Air Risers situated at different
locations in between the 200 mm void. This return air will then be drawn through the Return Air Ducts
located in the space between the false ceiling and the true ceiling. From there, the air shall pass through
Return Air mixing chamber, dehumidifier, treated fresh air chamber, and cooling coil of AHUs.
Option 2: Return Air from the Diffusion Lab shall be through grilles made out of Aluminum along with
VCD and having GI Powder coated collars, located at about 200 MM above the floor level, fixed on the
periphery of the cleanroom wall panels and also via Fabricated Return Air Raisers made out of 18 G
thick GI material duly insulated along with suitable supports & accessories.
3.6 Dehumidifiers
Desiccant-based dehumidifier units need to be provided in the return air path to maintain RH at 45% +
5% and 50% + 5% in Photolithography Lab and Diffusion Lab respectively, as the moisture content is
high at Guwahati, especially during and after monsoon. Pre-cooling Coils shall be provided for the fresh
air before sending it into the Dehumidifier.
The preferred type is the desiccant-impregnated wheel based dehumidifiers with a process side and a
reactivation side. The desiccant is reactivated through passage of high temperature air. The whole unit is
mounted on a single skid with necessary microprocessor based control panels for operation of process
and reactivation blowers, heaters and the rotation of desiccant beds. The system operates automatically
to maintain the RH inside the cleanroom with the required humidistat. This Dehumidifier is provided in
the return air path with required bypass arrangement to ensure the required quantity of air will be
dehumidified and the remixing at the inlet of the air handling unit mixing chamber.
3.7 Fresh Air
Treated fresh air needs to be provided in order to compensate the air required for process extract, ex-
filtration, and to maintain spatial positive pressure required in the Cleanrooms. Precooling Coils with
suitable pre filters, VCD & mixing box etc. shall be provided for the fresh Air intake of each Air handler
separately. Note: A common Treated Fresh air system in not required as individual Air handler is to be
provided with fresh air as mentioned above.
32
3.8 FFUS with HEPA Filters
Desired configuration of the filter modules:
FFUs: Overall size around 1195 mm × 595 mm × 311 mm, MOC: Galvanized Aluminium –
Zinc Alloy
Filters of approximate size 1210 × 600 × 152 mm depth; H-14 HEPA filters efficiency of
99.995% down to 0.3 micron equivalent to EN22 for Photo lithography Lab, Diffusion lab, Air
lock & Changing room,
Minimum flow rate/ air quantity: ~ 650 cfm to 700 cfm.
Pre- filter of 10 microns at the inlet of the FFUs in order to protect the HEPA filters.
Motor: EC Brushless NADI, German make or Equivalent.
Noise level; 60 dBA at filter face at 0.45 m/sec, acoustically treated.
Filter pressure drop- [email protected] m/s Constant outlet velocity throughout the filter face
Filter should be replaceable from beneath the ceiling and should be suitable for both turbulent
and laminar flow applications.
Power: ~ 300 W connected, operating 170 W - 220 W, Power source- 220 V AC, 50 Hz. Impeller
balanced as per DIN ISO 1940.
Controller box should be provided for each FFU, with speed control based on pressure drop
across filter, Individual controls through PC interface, Control of on/off of assigned units
remotely
PAO point for checking the integrity of the filter, Software for operation
RS 485 ebmBUS control system, Graphic user inter-phase, Area-wise and sequential operation as
required during holidays
3.9 Technical specification for internal fabrication of classified areas
The areas considered in this section are: Photolithography lab, Diffusion lab, Air lock 1, and
Changing room. The desired specifications for the materials and their assembly are noted below.
3.9.1 Wall Panels:
Following two options should be considered for the Material of Construction (MOC) of the wall
panels, and included in the technical and price bid accordingly.
33
Option (A): Aluminium honeycomb - The MOC should be aluminum honeycomb infill
sandwiched between 0.6 to 0.8 mm aluminum skin sheets, and have a powder coat with epoxy
finish.
Option (B): GI PUF - The MOC should be self-extinguishing quality Poly-Urethane Foam
(PUF) of density not less than 38 kg/m3. The inner and outer skin should be of powder coated GI
steel sheet, the thickness of inner skin and outer skin of the panel should not be less than 0.8 mm.
The powder coated steel sheet shall be hot dip galvanized with zinc coating not less than 180
gm/sq. m.
All wall panels should possess the following configuration:
Non- progressive (demountable), studless, smooth, cleanable, air tight, modular, structurally
stable, static-dissipative, without outgassing.
Compatible with ISO 5 cleanroom, without silicone sealant joints.
Minimum thickness: 44 mm/50 mm, standard white color; minimum width 1100 mm and
suitable length for continuous lamination.
The height of wall panel system shall be 3300 mm high from FFL in the areas of the raised
access floor & 3300 mm from FFL of the solid floor in the Air Lock Room & Changing Room.
The wall panel height shall be 6300 mm high from FFL where the cleanroom wall system is
required to go below the raised access floor (600 mm below the raised access floor).
The Wall panels shall be fixed between the suspended false ceiling and the perforated flooring
using gasket ceiling and floor head track with intermediate posts, corner posts & covering strips
made out of powder coated anodized aluminum material matching the panels.
There shall be provision for accommodating doors, electric sockets, conduits, boxes, ducts,
utility piping, and process machines/tool penetration etc.
3.9.2 Doors:
Airtight, Swing configuration, flush type, double glazed with see-through portion at the top half
of the door using 6 mm thick tempered glass
Minimum door thickness: 44 mm.
Door panels: static dissipative, double skin with minimum 0.8 mm thick powder coated anodized
aluminium with in-fill of aluminium honeycomb between the aluminium skin sheets OR self-
34
extinguishing quality Poly-Urethane Foam between 0.8 mm thick powder coated GI steel sheet
(same as Wall Panel material).
Door frames: extruded anodized aluminium; shall include concealed door closures, handles, lock
& key sets with option of both side access.
Single door size: 900mm × 2100 mm;
Emergency Double Door # 1 size: 2500 mm (w) × 3000 mm (h) (Diffusion Lab)
Emergency Double Door # 2 size: 2200 mm (w) × 3000 mm (h) (Photolithography lab)
Emergency Doors shall have Panic Bar arrangements.
Door sizes should be measured from inner to inner of frames.
For photolithography Lab, the view panes on doors shall be covered with imported yellow films
which shall completely block all radiation below 500 nm, and shall yield a high transparency for
wavelengths above 540 nm.
3.9.3 Windows / view panels:
MOC: Toughened and tempered double glass of minimum 6 mm thickness.
Minimum size: 1000 mm width × 1000 mm height.
View Panels should be placed at ~ 1000 mm – 1200 mm above the finished floor level on the
wall panels.
All the joints between toughened glass and wall panels should be sealed.
View panels/Windows of Photolithography LAB: All the Windows/ view panels of
photolithography Lab covered with imported yellow films which shall completely block all
radiation below 500 nm, to match the required process of photolithography area.
3.9.4 Coving:
Radius 75 mm/50 mm.
MOC: anodized Aluminium.
To be fixed along the joints between walls panels, walls & the false ceiling joints, and 3D
covings at the Corners as required.
3.9.5 False Ceiling Grid:
35
Walkable, rigid, cleanroom compatible, inverted T-grid, gasket-type.
MOC: heavy-duty anodized aluminium extruded alloy.
Components: hanging rods, connectors, level adjusters, L and inverted T Connectors suitable for
housing FFUs with HEPA filters, suitable Light fixtures, blind ceiling panels, smoke detectors &
sprinklers, aluminium extruded cross connector with hammer head bolts and nuts, M8 bolt and
matching square hanger and other standard accessories.
Dimensions: inverted T 56 mm width × 70 mm height; configuration - 1200 mm × 1200 mm
hanging; minimum 56 mm wide aluminium extrusions.
3.9.6 Ceiling Panels:
Double skin, walkable, static dissipative, flush type panels in false ceiling.
Dimensions: 44 mm / 50 mm thick of size 600 × 1200 mm, with min. 0.5 mm thick steel skin roll
coated with type; with aluminium honeycomb core material.
Provision in the false ceiling grid to fix light fixtures and sprinkler heads.
3.9.7 Cutout in Wall panel and ceiling panel: Suitable factory made cutouts wherever required shall
be provided in the wall/ceiling panels. For example, cutouts will be required for fan filter modules,
return air risers, AC ducts, view panels, doors, electrical sockets/cables, gauges, building security
components, cleanroom tool inlet, and exhaust pipes etc. All cutouts made in the wall panel and ceiling
shall have a smooth finish as required for the clean room environment. The rate towards the same is
deemed to be included in the offer.
3.9.8 Surface Finish of Negative Pressurized Plenum: The inner surface of the true ceiling & wall
surface above false ceiling (negative pressurized plenum) shall be provided with cladding of 25 mm
/50 mm thick cleanroom compatible cladding material having PUF as infill material.
3.9.9 Lighting System for Photolithography Lab: The teardrop light fixtures with cleanroom
compatible yellow LED type, providing 250 lux on the working table level in the photolithography
area should be provided underneath the false ceiling bar system. Provision should be made for a few
selected light fixtures to provide emergency/ standby illumination in case of power failure. In the
36
event of mains power failure, distribution should be provided to support the lighting installation, and
local flush mounted light switches should be provided, grouped in the Changing Room area.
3.9.10 Lighting System for Diffusion Lab and other areas around the clean zones: Flat diffuser
type/surface mounting type white LED fixtures should be provided at appropriate levels in other areas
of diffusion lab, air lock, changing room, service corridors and locker rooms (i.e. except the
Photolithography Lab). Light fixtures shall be suitable for housing in the heavy duty aluminium false
ceiling grid, with intensity level around 500-600 lux, surface mount type of size 600 mm x 1200 mm.
Provision shall be made for a few light fixtures to provide emergency illumination in the event of
mains power failure.
3.9.11 Flooring in Classified Cleanroom areas:
Perforated and solid tile panels are to be installed inside the photolithography and diffusion labs in
appropriate ratios to maintain general design considerations according to Table I. All tiles shall be
completely interchangeable and easily removable with a lifting tool. The tiles shall have precise
dimensional accuracy.
Desired specifications of the flooring:
The raised access flooring of the cleanroom areas shall be aluminium die cast.
Perforated or solid tile floor panels as required should be of size 600 mm × 600 mm, 44 mm /50
mm thickness
The floor panels should have minimum 2 mm thick antistatic vinyl surface finish. Surface
resistivity should be 104 to 107 ohm.cm between the top structure and under-structure of the tile.
The static conductive vinyl coating tile shall be fabricated in one piece with edge trimmed with
ESD conductive PVC for containment of Static charges.
Uniform distributed load capacity: minimum 15000 N/m2 with deflection less than 1.02 mm.
The floor tiles shall be capable of carrying the following loads:
Concentrated load > 5000 N with deflection < 2.0 mm.
Rolling load > 3000 N for 10000 times; with deflection < 0.5 mm.
Ultimate load > 14000 N/m2 at center.
Perforated tiles shall have minimum 15 – 22 % free opening for the free flow of air. Air volume
Control dampers underneath the perforated tiles shall be provided wherever required.
37
3.9.12 Solid steel Pedestals: Desired specifications:
Height: 600 mm with provision for height adjustment up to ± 20 mm.
Powder coated; pedestal head to have a conductive vinyl grounding pad.
Pedestal heads to be equipped with a conductive vinyl grounding pad.
Pedestals shall conform to the panel specifications with regard to the load bearing characteristics.
Pedestals assemblies shall be capable of supporting a 2250 kg axial load without deformation.
In order to prevent lateral movement, pedestals head should provide interlocking of Pedestals &
access floor tile panels.
The pedestals can be fixed to the ground floor slab with epoxy adhesive.
Earth clamps and bare copper wire to earth all floor pedestals and interconnections of the access
floor system to a separate earth point isolated from other earth points through PVC insulated
copper earth cable should be provided.
The ground cement floor below the perforated & solid tiles shall be levelled by applying suitable
filler material for levelling the ground before installation of Pedestals.
Self levelling epoxy paint on the cement floor over & above filler material shall be applied.
Tap off points to be provided for various utilities can be provided at site.
3.9.13 The flooring for the Diffusion Lab
Solid concrete floor (not perforated) on which Electro Static Conductive type, vinyl tiles, of 2 mm
thick and 600 mm x 600 mm should be laid. The surface to ground resistance of ESD floor shall
not be more than 1 M ohm as per EN 1081 or equivalent standard. The color of the floor tiles shall
be as approved by IITG.
Electrostatic (EC) type flexible homogenous, compressed ESD Vinyl floor tiles in flooring/skirting,
having minimum size 610 mm x 610 mm x 2 mm (thick) .
The ESD tiles shall have electrical conductive resistance in the range of 2.5x104 Ω to 1x106 Ω and
shall have dimensional stability of 0.05% minimum decay time of 0.25 sec as per ASTM /DIN/EN
standards and shall be resistant to acids, chemicals and fire.
The ESD floor tiles should be laid on existing cement concrete flooring including providing and
laying of approved conductive primer including necessary conductive adhesive. Joints between the
tiles should be PVC welded and copper foils shall be provided and laid. The copper net shall be
grounded.
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The floor should be laid after preparation of surface by abrading the surface manually/mechanically
to remove dirt, oil and other contaminations. All dust and debris should be swept or vacuumed
from the surface. The copper strip should be laid by cutting a groove connected to earthing point.
3.9.14 Epoxy Painting below the raised assess floor surfaces:
Epoxy paint of cleanroom-compatible quality with one layer of putty and two layers of self-levelling 2
mm thick epoxy paints shall be provided on the existing civil flooring and side walls beneath the
raised access floor to provide a smooth dust free surface.
3.10 Technical specification for internal fabrication of unclassified areas in the
cleanroom building:
The areas considered in this section are Cleanroom Corridors, Locker Room, Laundry & Sorting Room
and Dangerous/ Toxic Gas Room.
3.10.1. Finishing of the Wall Surface of the unclassified Areas in the cleanroom building:
The exposed surfaces of the brick walls in the unclassified areas of the cleanroom (service corridors,
locker rooms etc.) need to have a smooth, dust-free surface finish. Following options shall be
considered for this finishing:
(a) Epoxy painting: one layer of putty and two layers of self-levelling, 2 mm thick epoxy paint.
OR
(b) Cladding with cleanroom compatible wall panels. Desired configuration of the cladding:
Double skin, 50 mm thick panel, with PUF core (minimum density 38 kg/m3).
Skin MOC: powder coated steel; minimum thickness: 0.8 mm; coating: hot dip galvanized zinc
(minimum amount 180 g/m2).
Panel both side finishing: smooth; color: off-white; minimum width 1100 mm; length: suitable
for continuous lamination.
Panel construction: recessed male edge on one side and roll-formed female edge on the other
side to create an interlock, ensuring a snug insulated fit. Wall joints to be filled with suitable
sealant. Appropriate reinforcement shall be provided between the panels from the floor to ceiling
near the doors.
39
Panels to be covered with peel-off film to ensure that the material is protected against scratches
and indentation during transit and storage.
3.10.2. False Ceiling Grid System for Unclassified Areas in the cleanroom building
Desired configuration:
Walkable, rigid, inverted T-grid, suitable for accommodating individual Module of Supply &
return Air Diffusers, light fixture, blank panels etc., with virgin neoprene or PVC gasket.
MOC: heavy-duty anodized aluminium extruded alloy comprising of hanging rods, wall angles,
connectors, level adjusters, turnbuckle, nuts, bolts, anchor fasteners and other standard
accessories.
Shall be able to accommodate hooded SA diffusers,, suitable Light fixtures, blind ceiling panels,
smoke detectors & sprinklers,
Dimensions: inverted T 56 mm width × 70 mm height; configuration - 1200 mm × 600 mm
hanging.
3.10.3. False ceiling blank panels for unclassified areas in the cleanroom building
Desired configuration:
Walkable panels with interlocking edges, Dimensions: 600 × 1200 mm.
Double skin, 50 mm thick panel PUF core (minimum density 38 kg/m3).
Skin MOC: powder coated steel; minimum thickness: 0.8 mm; coating: hot dip galvanized zinc
(minimum amount 180 g/m2).
Provision in the false ceiling grid to fix light fixtures and sprinkler heads.
Necessary services/trap doors shall be provided to the false ceiling for maintenance on the top of
the false ceiling.
3.10.4. Lighting in unclassified areas in the cleanroom building: Flat diffuser type/surface
mounting type white LED fixtures should be provided at appropriate levels in the unclassified areas.
Light fixtures shall be suitable for housing in the heavy duty aluminium false ceiling grid, with
intensity level around 500-600 lux, surface mount type of size 600 mm × 1200 mm. Provision shall
be made for a few light fixtures to provide emergency illumination in the event of mains power
failure. In the Dangerous/ Toxic Gas Room, all the electrical installation should follow IS 5571.
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3.10.5. Flooring of unclassified areas in the cleanroom building
Desired configuration:
Flexible, homogenous, color-matched vinyl flooring/skirting to be laid on the cement-concrete
flooring after layering approved primer and self-levelling compound.
Dimensions: min. 2 mm thick sheets with min. width of 1.5 m.
The joints between the Laid PVC sheets shall be welded with the Similar Material that of PVC
which should have the same color.
3.11 Technical specification for internal fabrication of unclassified areas in the
Utility Building
The areas considered in this section are: a) UPS & Electrical room b) Maintenance office & BMS
Control Room.
3.11.1. Finishing of the Wall Surface of the unclassified Areas in the Utility Building:
The exposed surfaces of the brick walls in these rooms should be coated with epoxy painting.
3.11.2. Lighting in unclassified areas in the Utility Building
Flat diffuser type/surface mounting type white LED fixtures with intensity level around 400-500 lux
should be provided at appropriate levels in these rooms. Provision shall be made for a few light
fixtures to provide emergency illumination in the event of mains power failure.
3.11.3. Flooring of unclassified areas
Vitrified Tiles: The tiles shall be of approved make like Marbonite / Granamite or equivalent and
shall generally conform to the approved standards. They shall be flat and true to shape, free from
cracks, crazing spots, chipped edges and corners. The tiles shall be square or rectangular of nominal
sizes such as: 600 x 600 mm; 900 x 900 mm or as per directed by the Engineer-in-Charge. Thickness
shall be as per recommendations of the approved manufacturers. Technical specifications of the tiles
shall be generally conforming to the following standards:
NO PROPERTY EXPECTED STANDARD
1 Deviation in length (+/-) 0.6% 2
2 Straightness of sides (+/-) 0.5% 3
3 Rectangularity (+/-) 0.6% 4
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4 Surface flatness (+/-) 0.5% 5
5 Water absorption < 0.50%
6 Mohs. hardness > 6
7 Flexural strength > 27 N / mm2
8 Abrasion resistance < 204 mm2
9 Skid resistance (friction coefficient) > 0.4
10 Glossiness Min. 85% reflection
4. CLEANROOM ACCESSORIES
4.1 Air Shower
Desired configuration:
Fully automatic, electrically operated unit to de-contaminate the personnel entering the clean
area.
Minimum dimensions: 750 mm (W) × 750 mm (D) × 2000 mm (H). The air shower should fit
within the dimensions provided in the layout plan in Annexure B.
Pre-filters: Washable HDPE (efficiency 90% down to 10 micron).
Main filters: HEPA (efficiency of 99.997% down to 0.3 micron).
MOC: Cleanroom compatible coatings; low-outgassing epoxy or urethane sealant; CRCA
Powder Coated main body and door; aluminum blower impeller; FRP/equivalent blower casing;
SS 304 adjustable type Nozzles.
Minimum 18 nozzles; minimum velocity 4800 fpm/ nozzle; shower cycle duration 10 to 990 s.
Double Inlet Double Width Blower with statically and dynamically balanced motor.
Maximum sound level measured at 1 m from air shower with blower on should be 75 dBA±10%.
Suitable for 415 VAC 3 Phase, 50 Hz power supply.
Double skin PUF insulated doors with viewing window; the doors should include Magnehelic
Gauge to measure differential pressure of 0 – 100 mm.
Fitted with fluorescent LEDs with diffusers.
Flooring: solid platform having pre-filters on the sides.
Panic switch for emergency cut off with hooter system and emergency door release switch.
Remote Mechanism to deactivate all switches while the shower is on except the panic switch.
4.2 Garment storage Locker/Cubicle
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Desired configuration:
Vertical downward flow type, modular construction.
MOC: 18 SWG GI Powder coated CRCA material.
Dimension: Overall Size- 1000 mm (w) × 500 mm (d) ×1950 mm (h) with door and view
window.
Components: statically & dynamically balanced blower with functioning indicators, CFL
Lighting through diffusors, Microprocessor based PCB Card, Pre-filters: Washable HDPE
(efficiency 90% down to 10 micron); Main filters: HEPA (efficiency of 99.97% down to 0.3
micron); 0-250 Pascal Digital Pressure Gauge; CRCA-coated perforated shelves (removable
type) with height-adjustable leveling jack arrangement.
4.3 Pass Box/Transfer Hatch
Static pass box; SS 304 with pencil coving; suitable aluminum supports for floor mounting
Internal dimension: 600 mm W × 600 mm D × 600 mm H.
Fitted with lighting; Electronic interlocks.
4.4 Cross-over Bench
MOC: SS 304 with 04 Grade Finish.
Overall size: 300 mm (W), 1000 mm (L), 550 mm (H).
4.5 Shoe racks
MOC: SS 304 with 04 Grade Finish.
Overall size: 450 mm (W), 600 mm (L), 600 mm (H).
4.6 Motorized Shoe-cleaner
Multiple internal brushes for thorough cleaning
Internal vacuum system to remove dust/contaminant particles from shoes
Waist-high handle for on/off operation
4.7 Dispensers for Shoe covers
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Wall-mountable
MOC: electropolished 304 stainless steel
4.8 Dispensers for gloves
Wall-mountable
Four-compartment acrylic body for housing different sizes of gloves
4.9 Safety Glass Holders
Wall-mountable, with minimum 24 compartments
MOC: Durable, non-contaminating 304 stainless steel
4.10 Emergency Showers
Emergency drench shower with eyewash should be provided in the both Photolithography and Diffusion
labs. Water supply should be gravity fed via a storage header tank on the upper ground floor level of the
supply plenum perimeter walkway. Waste water should be contained in a bonded area in the Cleanroom
raised access floor void with a gravity drain to the Utilities Section via the process waste water
pipework.
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5. UTILITY SECTION:
5.1 HVAC System
5.1.1 Air Cooled Water Chiller:
NOTES:
(a) Wherever the words Air Cooled Water Chiller / Water Chiller Units are mentioned in the tender
specification it shall be considered as “factory-made air cooled chiller unit”.
(b) Wherever the capacity of the “factory-made air cooled chiller unit” has been mentioned as “ --
TR” capacity in the tender specification it shall be read/considered as “Capacity not less than ----
TR as the specified rating/ conditions.
(c)Wherever the word “Specification Rating condition” is mentioned in the tender specification it
shall be the rating conditions as indicated in the description.
(d) The unit shall be suitable for outdoor service and would be installed on the first floor of the Utility
Building.
(e) To introduce redundancy, two such units of suitable capacity should be provided; one working
and one as a standby.
Desired Configuration of Air Cooled Water Chillers:
Multiple Screw compressors suitable for R-407C or better refrigerant, with independent
refrigerant circuits, suction, discharge valves, relief valve, oil filter, suction filter, dual pressure
switch, oil safety switch, and crank case heater, integrated motor.
Components: liquid inlet, liquid outlet, purge valve, pressure relief valve, water chillers with
anti-freeze thermostat, cooling thermostat, thermostatic expansion valves, liquid line strainers,
shut-off valves, chiller insulation, air cooled condenser with condenser coil, protection guard,
condenser fan motors, interconnecting refrigerant piping, fittings, suction line insulation, panel
with VFD control, first charge of refrigerant and oil, thermostats for tripping the compressors
after reaching the temperature in conditioned areas and with insulation of the suction line etc.
Components should be assembled together in a common factory fabricated GSS framework and
casing mounted frame work, include casing mounted on vibration /helical spring isolators.
The chiller shall have a machine-mounted starter panel incorporating incoming main and
disconnect switch, contactors, over load relays, timers, single phasing preventers etc., separately
for each motor including condenser fans, all housed in a weather proof double door sheet metal
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enclosure conforming to IP-55 grade of protection. All exposed surfaces of the chiller package
shall be given 2 coats of anticorrosive paint.
The noise level of Chiller should not exceed 75 dB.
5.1.2 Pumps for HVAC: Two end-suction pumps with appropriate capacity are needed for chilled
water circulation; one working and the other as standby.
Components: completely enclosed fan-cooled motor, base plates, couplings, coupling Guard with
Base frame and mechanical seal.
5.1.3 Chilled Water Piping for HVAC: Chilled Water should have the temperature of 5 0C - 7 0C. .
Chilled water distribution to first floor of Utility Building where the AHUs are located shall be from
chillers located in the open space between the utility building and the cleanroom.
Desired Configuration:
Above ground piping with CS (Carbon steel) as per ASME standard 36.10 and ASTM material
specification ASTM A105, fluid flow velocity is maintained to 1.5 - 2.0 m/s which is acceptable
for pipes less than or equal to 125 mm OD.
Pressure and temperature gauges at all inlet and outlets.
Insulation work for chilled Water piping shall be carried out for chilled water piping as per IS
Standards Codes - IS 8183, IS7413 & IS3144 for thermal insulation materials and finishing
materials abiding to Codes of Industrial Applications.
Insulation for the chilled water piping above the ground and inside the building limit shall be
done by preformed PUF pipe sections of appropriate thickness, having a cladding of 24 gauge
aluminium sheets. Generally, PUF insulation thickness is 50 mm for pipe sizes more than 25mm
OD, a thickness of 25 mm is used for insulating pipes of sizes = 20 mm OD.
Thermal conductivity of the insulation should not be more than 0.032kcal/m² hr °C at 0°C mean
temperature.
The insulation shall be applied only after the piping system has been satisfactorily tested for
leaks as per specifications.
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5.1.4 Valves for HVAC: The HVAC System shall include all the required components and
accessories such as ball valves, 'y' type strainer, 3-way modulating valve, balancing valve, non-return
valve etc.
5.1.5 Magnehelic Gauges: The magnehelic gauge shall be clean room compatible, accurate within
5% and able to measure relevant pressures in the HVAC system as necessary.
5.1.6 Digital temperature and RH indicator: The digital temperature and RH indicator shall be
cleanroom compatible with range of 0 to 50 0C and 0 to 90% RH with display.
5.1.7 Air handling unit (AHU):
According to the general description in Section 3.3 of this document, following separate AHUs are
required for different areas:
AHU 1: For Photolithography Lab.
AHU 2: For Diffusion Lab, Air Lock & Changing Room.
AHU 3: For unclassified Areas in the Cleanroom building (Corridors & Locker Room, Laundry
and Sorting Room)
VAH: Ventilation Air Handler/FAN -- For Dangerous/toxic Gas Room
DSA: Ductable Split A/C system: For the following spaces in the Utility Building: a) UPS &
Electrical Room b) Maintenance office and BMS Control Room
Desired configuration of the AHUs:
Cabinet type, factory-built, horizontal, floor-mounted, ductable, double-skinned with thermal
break profile and internal coving.
Components: Fresh Air cutout with damper, Mixing Chamber, EU-4 filter section with Filters,
Coil Section, with 6/8 Row Chilled water coil, Bypass damper, PVC Moisture Eliminator, 24 G
SS 304 drain pan, Blower section with DIDW, Plug fan, TEFC squirrel cage motor with
provision for VFD, EU-9 fine filter section and final H-11 filters with 95% efficiency. (Three
stages of Filters EU 4, EU 9 & H-11 are needed for Supply, Return, Fresh Air and Bleed.)
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Sheet thickness for internal sheets shall be 22 G GSS Plain and for outer skin, it should be 22G
GSS pre-coated. Panel thickness shall be minimum 43 mm thick, with PUF insulation section in
between inner & outer skin.
The AHU shall be mounted on a common base frame with vibration isolator pads, suitable
inspection doors for filter, coil & blower sections, heaters with humidistat & thermostat and
controls with electrical strip heaters. The AHU shall have provision to connect Fresh air system,
Mixing chambers & Dehumidifiers. The filter area shall be suitable for twice the quantity of
fresh air. Air Handling Units shall be of Double Skin units with thermal break profile and
internal coving.
There shall be a bypass arrangement in order to balance the air quantity by passing the Cooling
Coil in case the Supply Air Quantity is more than the Dehumidified Air Quantity as per Heat
Load Calculations.
For VFD controlled motor: the minimum air changes per hour (ACPH) required in order to
maintain the cleanliness class of the clean zones should be strictly maintained. The VFD should
take control only when the ACPH requirement is higher than this minimum value.
Further specifications of AHU components:
(A) Pre-cooling coil for the Fresh Air System of Photolithography Lab:
It shall comprise fresh air pre -cooling coil system of suitable cfm capacity for photolithography
lab, with modular boxing made out of double skin with thermal break profile and internal coving.
Sheet thickness for internal sheet shall be 22 G Galvanized Steel Sheet (GSS) Plain & 22G GSS
Pre coated for outer skin. The panel thickness shall be minimum 43 mm with PUF insulation. It
shall comprise Fresh Air cutout with damper, EU 4 filter section, Coil Section with 6/8 row
chilled water coil of suitable capacity TR. It shall include PVC Moisture Eliminator and SS
drain pan. It should have suitable VCD, Rough Filters (G4 Filters), Fine Filters (F9 Filters) Bird
Cowl & mesh etc.
(B) Pre-cooling coil for the Fresh Air System of Diffusion Lab:
It shall comprise fresh air pre -cooling coil system of suitable cfm capacity for diffusion lab, with
modular boxing made out of double skin with thermal break profile and internal coving. Other
specifications should be the same as mentioned under point (A) above.
(C) Fresh Air Intake Louver & Bird Mesh :
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Rain protection type modular panel, free from waves and buckles, with additional supports to
prevent sagging / vibrating.
A bird wire screen made of 12 mm mesh in 1.6 mm steel wire held in angle or channel frame
shall be fixed to the rear face of the louver & complete with G2 type panel filter with fixing
frame.
(D) Cooling coil:
Heavy gauge seamless, plain/corrugated copper tubes, minimum 6 rows deep for each circuit.
Area of coils shall be such that the face velocity of air across the cooling coil does not exceed 2.8
m/sec (550 FPM).
‘U’ bends shall be of forged copper and shall be brazed to tubes using silver solder only.
Mist eliminator to be provided after cooling coil.
(E) Fans:
Double inlet, double width centrifugal fan with forward curved steel blades.
The impeller shall be mounted on a steel shaft of adequate size, the shaft shall be supported with
minimum two bearings mounted on the outside of casing for easy access and maintenance.
The fans shall be statically and dynamically balanced.
(F) Fan drive:
AHU shall be equipped with fan plug as per manufacture standard for achieving desired results.
(G) Fan motor:
The impeller shaft shall be driven by an enclosed fan-cooled squirrel cage induction motor
having speed not greater than 1470 rpm. The AHU motor shall be suitable for continuous duty
rating and base mounting type.
(H) Mixing Chambers for all the AHUs:
The two way mixing chamber should be designed, Supplied & made out of 20G GI, for efficient
mixing of fresh air and return air and to connect the dehumidifiers to AHUs or wherever needed,
by means of interconnecting dampers.
(I) Canvas connection
The fan shall be isolated from casing by flexible connection; it should be made of temperature
resistant (up to 160 °C) fabric with high tearing strength.
These should be connected on both sides with surrounding air tight duct connection flanges. The
vendor should provide a sample of canvas connection after getting the order.
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The flexible connection should be provided with counter flange to connect the duct on the
discharge side Dampers.
(J) Dampers
Damper composition: MOC extruded Aluminium, Low Leakage, and Aerofoil Volume Control
Dampers with extended shaft suitable for Manual & Motorized operation. May include Bleed
Module with EU-9 filter.
The manually operated dampers should be provided with Graduation & locking arrangement.
The locking device to remain perfectly locked at all operational conditions of AHU.
The dampers should be provided with following accessories.
1. Mechanical Lock with handle and graduation of opening marked on handle. Identification of
open and close is must on damper handle side.
2. Suitable Cover for Gear Train to avoid dust accumulation.
(K) Dehumidifier
Non-cyclic, rotary, desiccant type dehumidifier.
The dehumidifier shall be able to dry the air by process of continuous physical adsorption to
control humidity.
The desiccants used shall be nontoxic, nonflammable having maximum moisture removal
capacity. The throughput of Dehumidifier should be calculated separately for the
photolithography lab and the diffusion lab.
(L) Electric Strip/ Duct Heaters for AHU:
Electric Tubular SS Heaters, duly insulated in ducts Complete with mounting arrangement in the
AHUs as per standard sizes of the respective zones which they would serve.
(M) AHU name plate
Containing Fan details with all capacities, Static pressure, Filtration level, Motor HP, Coil
details, Arrows for air directions, AHU No. and the area it is feeding.
Each compartment is to be separately named including filtration level, filters, initial and final
pressure drop, cooling coil data, heating coil data etc.
(N) Schematic Airflow diagrams
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Each AHU Shall be provided with laminated colored AHUGA drawings showing all the
Components / Airflow Drawings duly pasted on AHU.
(O) BMS integration
All AHU’s shall have provision (Like instrumentations pocket) for integration with BMS system
and for measuring the parameters like temperature, pressure drop across filters, speed etc.
5.2 Ducting
Desired specifications for factory fabricated/ machine-fabricated at site ducts:
All ducts transformation pieces and fittings shall be made on CNC profile cutters.
Maximum length of duct section: 1200 mm.
Duct sections up to 1200 mm length may be used with bracing angles omitted. Ducts larger than
1200 mm shall be cross-broken or straight beaded.
All the transverse duct connectors and accessories shall be leak-proof, galvanized, 4-bolt system.
AC-application grade P.E or PVC gaskets shall be provided between all mating flanged joints.
5.2.1 Duct Installation:
The joints should be kept to the minimum possible number while adhering to the recommended
constraints of duct length.
All joints should be butted firmly against each other and sealed with self-adhesive 75 mm wide
reinforced aluminium tape.
The vendor shall provide supporting steel structure for the duct located outside the building in
open space, running from AHU located on the first floor of the Utility Building.
5.2.2 Duct supports and Hangers
Rectangular duct shall be supported from roof/perlins/truss/ceiling using hanger rods.
Ducts shall rest on supporting MS slotted angle or channel. The supporting angle or channel shall
be supported by MS rods with threads.
Supporting details for ducts:
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Large side
of duct
in mm
Supporting
angle (min size
of angle to be
used ) in mm
Vertical rod
diameter
in mm
Maximum
spacing
between
supports in mm
Up to 1000 35 × 35 × 3 10 3000
1001 to 2250 50 × 50 × 6 10 3000
2250 and above 65 × 65 × 6 12 2400
The size of angle and round rod above are indicative of general requirement. Higher sizes of MS
angle and MS rod shall be provided for duct supports if required. Lock nuts (double nuts) shall
be provided to each MS or GI rods supporting the ducts.
Steel anchor fasteners shall be provided by vendor for duct hanging (wherever required), and the
fasteners shall be loaded to maximum 20% of the maximum rated capacity specified by the
manufacturer.
5.2.3 Duct transformation shall be used to change the shape of duct and shall be made for easy and
noiseless flow of air. Maximum slope of transformation shall be 1:4.
5.2.4 Bends, offsets and branch connections
All bends offsets and branch connections shall be made for smooth and noiseless flow of air and
minimum pressure drop.
In case of full radius elbow, optimum ratio of centerline radius of elbow to duct dimension of
1.25 shall be considered. However due to space constraint shorter radius elbow or square elbow
with guide vanes may be provided.
All curved elbows shall be provided with air turning vanes consists of curved metal blades of
vanes arranged so as to permit the air to make abrupt turns without appreciable turbulence.
All right angle elbows shall be provided with double thickness aerofoil turning vanes extending
over at least 50 percent of the while curvature of the elbow. The turning vanes shall have a flange
covering the whole base be riveted to the duct at not more than 60 mm centers.
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Every duct tap-off from supply and return air duct shall be complete with opposed blade volume
control damper.
5.2.5 Caulking and drain: All the openings between masonry and duct work shall be neatly caulked
or sealed by the vendor to prevent movement of air from one space to the adjoining space.
5.2.6 Scope of Work for Duct Insulation:
The vendor should supply all necessary insulating materials, with accessories including scaffolding /
weather protection as necessary.
Insulation Type: Electron Beam (physically) cross linked polyolefin foam insulation with factory
applied reinforced aluminium foil facing on one side. Thickness of the insulation material should
be in conjunction with manufacturer’s recommendation.
The density of the foam should be not less than 25kg/m3 and the maximum thermal conductivity
should be 0.032W/mK at 23 0C.
The water vapors permeability should be better than 0.8gm/m2 /24hrs (90%RH, 38 0C).
The minimum fire rating property of the insulation material when tested to BS 476 part 6 & 7
should be Class O.
The insulation material should pass through the smoke toxicity test as per BS 6853 and ISO 5659
standards.
Insulation must be installed in accordance with manufacturer’s instruction.
All joints should be butted firmly against each other, seal all joints with overlapping self-
adhesive 75 mm wide reinforced aluminium tape, procured from the manufacturer of same
material as the base insulation.
Insulate each duct separately, flanges should be insulated with a 120 mm wide strip of insulation
material, ensuring joints are sealed with 75 mm reinforced aluminium foil tape, procured from
the manufacturer of same material as the base insulation.
All supporting hangers should be lined with the same insulation material to avoid excess
compression of insulation.
It should be ensured that no air pockets remain during the installation of the insulation to the
duct. Any minor surface cuts should be covered with aluminium foil tape.
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5.2.7 Aluminium Cladding: For the insulated Supply Air and Return Air ducts exposed to outside
atmosphere, 26 G aluminium cladding is required for protection against rain and other extreme
atmospheric conditions at Guwahati.
5.2.8 Fire Dampers:
Suitable fire dampers with fusible links shall be provided with at least 60 minutes fire rating.
The damper shall consist of outer frame, damper blades, SS Spring, plated steel linkage, Twin
Micro Switch, UL stamped fusible linkage, handle, and sleeves. Fire damper blades shall be
made in one piece, from high strength galvanized steel.
The thrust from closing of the damper shall operate one of the two limit switches mounted in the
bottom frame of the fire damper. Closing of this limit switch shall shut off the power supply to
the AHU, stopping all air flow instantaneously. The second limit switch shall give a signal to the
main switchboard for shutting off the power supply to the AHU.
5.2.9 Volume Control Dampers:
Volume control dampers shall be placed at all suitable points in Supply and Return Air duct for
proportional volume control of the system.
Configuration: lockable, louvered zero leakage, multiple opposed blade type with extended lever,
tightly fitted in epoxy painted MS angle iron frame.
Where required, dampers shall have an indicating device, clearly showing the damper position at
all times like open/close position indication.
Dampers shall be placed in ducts and at every branch (whether or not indicated on the drawings)
for the proper volume control and for balancing the system. Neoprene rubbers seals at tips of
blades shall be provided.
5.2.10 Fabrication of Return Air Risers:
Return air Risers shall be provided at selected locations in Cleanrooms to allow the required
dehumidified Air quantity to be returned from Cleanrooms to the recirculating Air Handler
having the Cooling Coil & dehumidifier, in order to maintain the required temperature & relative
humidity in clean rooms. Return Air Risers with suitable supports shall be made out of 22 G,
GSS Material.
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Adequate insulation for fabricated return air riser shall be provided.
The return air volume control shall be possible by operating the RA Volume Control damper with
the help of a lever Manually from Room side.
Return Air Riser Grilles:
Suitable size and number of Return Air Grilles shall be fixed to the RA rises to collect only the
required quantity of Air from the cleanrooms.
Return Air Riser Grilles shall be selected for an aerodynamic noise power value not in excess of
NC 35. Return air diffusers shall incorporate volume control dampers. Return Air velocity
through RA grilles through shall not exceed 400 fpm.
Return Air grilles shall be of linear type with 15 deg deflection angle; made out of Aluminium
along with 20G GI powders coated Collar, with Volume control damper for mounting on
Fabricated Return air Riser. The return air volume control shall be possible by operating the RA
Volume Control Damper with the help of a lever manually from room side.
Construction of frame: extruded aluminium (corrosion resistant and rigid) profile with 30 mm
flange width. Face bars shall be of high quality aluminium profiles of 15°- 1way throw and 15°-
2way throw. Bar spacing can be 6mm/12mm, and shall be compatible with grille width as
required.
Horizontal face bars with 0°, 15°-1 way throw and 15°-2 way throw are to be fixed rigidly to the
frame with suitable sized pipes.
Vertical aluminium aerofoil blades should be fixed at the rear side of the frame by nylon bushes.
These aerofoil blades can be adjusted individually in the vertical plane to obtain optimum air
distribution. The structure shall be a rigid assembly and be of straight line Configuration. It can
be attached with clamps for proper fixing.
5.2.11 Velocity of Air in Main Supply and Return Ducts:
The Supply Air Velocity of the Main Duct of air handlers shall not exceed 1200-1300 fpm, and
the ducts shall be sized accordingly.
The return air Velocity considered to design the size of RA risers shall not exceed 500 fpm and
the velocity for RA grills shall not exceed 400 fpm. These velocity values are of an indicative
nature; the vendor should verify these depending upon the design conditions.
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5.2.12 Supply air and Return air Diffusers for unclassified areas
For unclassified areas, Supply Air diffusers should be of powder coated extruded aluminium
construction. They should have volume control dampers of aluminium mounted directly on the
return air duct fixed in the false ceiling. The vanes shall be 3 mm thick and 25 mm deep
horizontal type. The width of the perimeter flanges shall be 25 mm.
Return Air diffusers shall also be powder coated extruded aluminium construction. They shall
be complete with volume control dampers of aluminium mounted directly on grilles & there shall
be provision for operating the VCD from room side of the Unclassified Areas. The perimeter
flanges shall be 25 mm width. The vanes shall be 3 mm thick and 25 mm deep.
5.3 Power Systems:
5.3.1 Diesel Generator: Diesel generator sets will provide facility power to maintained circuits in the
event of a main power failure.
Desired configuration:
Function: to provide the backup power to Emergency and Normal categories of loads as well as
to the UPS.
Start-up control: through automatic mains failure panel (AMF).
DG set comprising all ancillary equipment, accessories, instruments, and associated controls.
Fuel oil system complete with appropriate L. day tank, feed pump, priming pump, necessary
piping, valves, filters and strainers, instruments and accessories.
Lubricating oil (L.O.) system comprising L.O. sump, L.O. Pump, necessary piping, valves and
fittings, filters and strainers, L.O. heat exchanger, instruments, accessories etc.
Air intake and exhaust system, comprising filters, silencers, ducts, pipe fittings & accessories
and supporting arrangement for exhaust system. The silencer should be cleanroom compatible.
Independent control panel with controls and instruments for each engine and alternator
comprising AMF facility for starting of the engine and with necessary controls, interlocks,
protections, metering and indications as per functional requirement of AMF feature. If the main
power shuts off the DG should automatically work with a maximum delay of 13 seconds.
Automatic and Manual synchronizing equipment
Anti-vibration pads for mounting the DG set.
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Mounting: on a separate concrete plinth designed to take the load, with weatherproof enclosures
PLC control system with SCADA function for remote operation of the DG system with facilities
for event logging, trending, mimics alarm etc.
Power rating: 430V, 3phase, 50Hz output. Power should be calculated as necessary to support the
electrical load given in Annexure G.
Note:-The vendor should provide the generator and raw power feeding arrangements. DG should be
designed to operate worst condition is expected under starting of the highest motor rating. While
working out the capacity of the DG set, provision should be made for soft start of heavy loads in
order to clip the maximum demand during start-up.
5.3.2 Electrical Systems:
The work shall be carried out in conformity with the relevant specifications / codes of practice of
the Indian standards.
IITG will provide incoming raw power 415V, 3Phase, 50 Hz. after this point the further
distribution and relevant utilities shall be the responsibility of the vendor.
All material, fittings, application, accessories to be supplied by the vendor shall be of best
quality.
Main Distribution Board (DB) components include switch-gears, relays, control panels and
indicators.
Main DB and auxiliary DB shall use superior grade material, metal and electrical components;
The electrical panels should incorporate monitoring and display of Voltage, Current, kWh,
Frequency and the Power Factor.
Separate auxiliary DB should be provided Critical load and for separate zones.
DB panel should provide for all the individual process equipment’s load in utility area as well as
cleanroom area
The panels should concentrate local process control and monitoring functions from within a
given area. Control panels should provide automatic/manual control of process equipment.
Control panels should be designed to permit interfacing with the field equipment and the remote
terminal units.
Panel types should be compatible with and suitable for the environment of IITG, and should
protect instruments and equipment as described in this document.
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Indicating devices should include panel meters, panel indicators, digital readouts, and graphic
displays, etc.
Selector switches, pushbuttons, and indicating lights should be of similar appearance.
Accessories, like Modular type switch/ sockets should be cleanroom compatible.
Switchgears and control gears should be selected as per electrical load list in Annexure G and
should conform to IS 4237.
All the metering and protection instruments should have low percentage of errors.eg: -CL0.1.
Cable sizing and selection for the utilities building should be designed to sustain the maximum
short circuit current in the system. The cables should be laid in built up trenches, directly buried
underground, on cable trays, in pipes and clamped directly to the walls or stable structures.
Maximum voltage drop permissible is 5%.
Underground cables: Power cables for use in 415v system shall be of 1100 v grade aluminum
standard conductor and PVC insulated as per IS 694
Cables have as few joint in it as necessary.
Wiring from electrical panels up to the process tools in the cleanroom should be provided.
earthing can be provided in accordance with the overall electrical system and to individual loads
if it need. Electrical details can be found the Annexure G.
All circuits are to be protected with suitable circuit breakers.
The electrical supplies should be configured for auto-change over in the event of mains power
failure within 30 seconds.
Motor control centres should be provided complete with all associated circuit breakers, contactor
terminals, overloads, selector switches and indicator lamps.
Underground cables: Power cables for use in 415v system shall be of 1100 v grade aluminum
standard conductor and PVC insulated
A suitable bus bar ducted system should be designed above the false ceiling for distribution of
power to the lighting and for the tools located inside the clean rooms. This system will ensure
that electrical interference to equipment and tools will be minimal.
Cleanroom compatible power outlets (3-phase and single phase) should be installed on the wall
panels for all the cleanroom equipment as well as corridor equipment. The details of the
cleanroom instruments are given in Annexure G, Table G.1.
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Conductors shall be securely attached to the building or other object to be protected by fasteners
which shall be substantial in construction, not subjected to breakage and shall be made of
galvanized steel or other substantial material. Some samples of fasteners are shown in IS:2309-
1969.
Earth pits with ISI standard GI pipes and Copper plates with suitable rating should be
constructed around the cleanroom building at an interval of 3 meters in triangular points. The
required clay, salts, activated carbon should be added to the pit according to IS: 3043.
Dangerous toxic gas area is considered as a Hazard area as per IS: 5572 and all electrical
equipment selection should pertain to IS: 5571, all the electrical insulation in the room should be
EXD (flame-proof).
PLC control system with SCADA function for remote operation of the Electric panel with
facilities for event logging, trending, mimics alarm etc.
All relevant electrical controls should be integrated with BMS.
Dangerous notice plate as per IS 2551.
Option: - Improvement of power factor by using capacitive bank IS: 7752.
5.3.3 Online UPS
Option A
One online UPS with appropriate rating requirements for the facility, specifically for the
equipment and tools as per specification by IITG.
The Delta Conversion On-Line UPS
Transfer time of < 5 millisecond, to supply critical load to the cleanroom tools.
With tubular battery and a minimum backup of 10 minutes.
The unit should have minimum 95% efficiency with non-linear loads.
The harmonics should be contained within 3%.
Variable Frequency Drives Supply and extract fans should be controlled via variable frequency
drives for the benefits of managing energy consumptions and automatic system control.
Power rating: 430V, 3phase, 50Hz for feeding to all critical loads.
The capacities of the UPSs should be calculated by the vendor.
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Design for appropriate Inrush current and crest factor.
Noise level shall be < 65 dB or better
Option B
One online UPS with appropriate rating requirements for the facility, specifically for the
equipment and tools as per specification by IITG.
The Double Conversion On-Line UPS
Transfer time of < 5 millisecond, to supply critical load to the cleanroom tools.
Tubular battery or better and a minimum backup of 10 minutes.
The unit should have minimum 95% efficiency with non-linear loads.
The harmonics should be contained within 3%.
Variable Frequency Drives Supply and extract fans should be controlled via variable frequency
drives for the benefits of managing energy consumptions and automatic system control.
The capacities of the UPSs should be calculated by the bidder.
Power rating: 430V, 3phase, 50Hz for feeding to all critical loads.
Design for appropriate Inrush current and crest factor.
Noise level shall be be <65 dB or better
5.4 Lighting
Cleanroom teardrop light fittings for Lithography lab and surface mounted fittings to be provided
throughout the facility to achieve the desired lighting levels.
All the light in the Lithography lab should be LED. The teardrop & surface mounted light
fittings will comprise of a powder coated extrude aluminium body and clear acrylic diffusers.
UV filtration film should be applied to the Lithography area lighting.
LED flat diffuser type light fixture for diffusion lab and unclassified areas, all the fixture is same
like Lithography lab
Open space in the utility should have floodlights.
Selected fittings in each area should be provided with a maintained supply to ensure emergency
illumination in the event of a mains power failure.
Lighting should be switched from within the Control Room and also integrated with BMS.
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5.5 Fire Detection and Suppression System
5.5.1 Fire Detection System: An automatic fire detection system using electronic sensors to detect
smoke, heat, or flames from a fire to provide an early warning should be combined with other
elements of an emergency response and evacuation plan.
Desired configuration of fire detectors: digital, quantum electro-optical multi-spectral Wide Band
IR in order to detect all hydrocarbon and non-hydrocarbon fires; minimum sensor range of 120°
within 8 feet.
All the warnings should be linked to the BMS.
Detectors should be housed in a heat-sealed, cleanroom grade polypropylene material to protect
against acids or caustics.
5.5.2 Fire Alarms, Fire Suppression and Extinguishing (Gas):
ALERT-1: External audible and visual signals when a fire with a heat energy output of 3 kW is
exceeded. These alarms alert the operator that a fire exists before suppression begins, but gives
non-hazardous fires time to self-extinguish before invasive fire suppression is activated. The fire
detector should record a time- and date-stamped digital fire signature.
ALARM-2 If the fire does not self-extinguish, and grows to the second-level heat energy
threshold of 13 kW, this second-stage response signals suppression release. In applications with
wet benches, electrical power is shut down. In systems that incorporate electronic CO2
extinguishers, a low-voltage signal activates fire suppression.
5.6 Access Control System
A networkable access control system will be provided and installed at entry and exit of all the Air
Showers. For data logging, the card readers will be interfaced with either BMS system or local
area network server/controller. Requisite number of card readers, related hardware and software
will be provided in the proposed system.
Proposed 6 nos. of proximity Readers for 3 nos. of clean room doors in & out. All Emergency
exit and Equipment access doors, Emergency rescue team and EHS officer, N1 Control, Laundry,
Air shower, changing room’s doors we have not considered as access control door. Consider 4
nos. 4 doors controller in network to handle 6 nos. Proximity reader and 3nos. EM lock.
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Lobby access doors should be managed with a traffic light access control system, indicating
‘green’ for authorized access and ‘red’ for no entry, with an audible alarm in the event of
opposite doors being opening simultaneously.
5.7 EPBX Telephone System
Suitable lines and analogue extension EPBX system
Proposed one Telephone RJ-11 socket for each room.
5.8 Local Area Network
Complete networking system included hardware and software’s with minimum 2 No’s of
networking points in each bay of Cleanroom facility and 6 No’s of networking points in the
seating area will be provided and installed by us.
Proposed 15 U Rack with front glass door plinth/ Caster wheels 19” mounting angles, side
panels, 1Fixed shelf with 4 nos. 10 port switches.
local area network infrastructure cabling should be provided within the cleanroom raised access
floor void, connecting to a patch panel and switch within the control room
5.9 Public Address System
Proposed 240 W Amplifier with three zone call station and pre amplifier installed in rack.
Consider 7 nos. of 4 W ceiling mounted speakers. A public address system should be provided
within the facility with a speaker in each Cleanroom area, with the public address
announcements being made from the control room.
5.10 Personal Assistance Alarm
A personal assistance alarm system should be provided within the facility to summon assistance.
Within each area a call point will raise an alarm within the Control Room, allowing a PA
announcement to be made to direct help from within the Cleanroom facility Proposed 4 nos. of
addressable Emergency alert button in all rooms.
Control Panel with LCD display and LED indication.
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5.11 Intercom System
25 lines intercom exchange will be provided and connected to the instruments along with public
address system. The Public address system will have all required accessories and the speakers
(ceiling/wall mountable).
Proposed EPBAX digital exchange system, with 4 incoming lines and outlet extensions of 12/24
analog extensions for each area.
The telephones will be with clean room compatible handsets as located as per the requirements
in each of the areas of the clean room and utility area.
The cabling will be with required 2 core screen telephone cables which will be terminated RJ-11
sockets as required kin each of the areas of clean rooms and utility area.
5.12 Building Management System (BMS)
The BMS should monitor all major units of the cleanroom and the utilities. The following are its desired
specifications and functions:
Able to monitor and display humidity, pressure, and temperature across all eleven zones shown
in Annexure B.
Provide instrumentation and RTUs/PLCs for asset or process solutions
Based around outstations with associated I/O modules and a PC (SCADA) supervisor station
within the Control Room. Control cabling should be routed throughout the facility on a suitable
cable management system.
PLC’s controller should have a CPU with communication port for logic development and
communication with supervisory controller or HMI and smart device connection. Inbuilt and
extended I/O modules are to support remote field I/O e.g Sensors, Transmitters, Actuators,
Drives etc.
High electrical noise rejection threshold as compared to other programming devices.
PLC shall communicate with Slave controller (Life Safety Controller) and Supervisory controller
(SCADA) to retrieve field instruments values continuously and shall take a proper action.
All field devices and slave controller shall be interlocked with hooter and final control element
for process i.e. SOV and shall take necessary action as per safety norms.
Testing Documentation as CE, FAT and control system wiring.
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GA drawing and Internal Electrical drawings.
5.12.1 Communication Protocols: General used communication protocol MODBUS, TCP/IP,
Profinet and RS 232 or better.
5.12.2 Logic: Logic will be based on client application and need of process and process safety.
5.12.3 PLC Housing:
Housing for PLC has front facia LED for power check, three tier hooter for signal indication as
healthy, warning and critical.
PLC is powered up through MCB (for 240 Vac) followed by SMPS and 2nd MCB (for 24 Vdc).
Mounting DIN rail and rack to install MCB, SMPS, PLC and extended I/Os module.
Internal wiring of PLC controller to Relay board and terminal block to connect remote field I/Os
of process control and safety devices.
5.12.4 SCADA
Specifications and description of the SCADA system is as follows:
Employ open standards to further ease the integration of assets within a SCADA system.
The system should give exact real time data of Field I/Os.
It should communicate with Master Controller to retrieve remote field I/Os reading and alarm
events.
It should mimic representation of distribution facility as amended with all I/Os for status.
It should possess operator interface machine that logs all alarms, events and provide visible
readings from sensors / Instruments etc.
It should allow feeding value (range, set points) manually to I/O’s as per process control and
process safety.
Layer authentication to control process, Process safety and confidential information from
SCADA.
It should be able to show Real Time and Historical Trends; Graphical representation and
animation
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The makeup air plant supply fan speed should be VFD controlled, with the VFD proportional
drive signal being derived from the Building Management System via the input of velo-probs
and pressure transducers to maintain a constant makeup air velocity (and associated volume) as
filer pressure drop increases. The makeup air plant fan speed will also respond to the facility
positive differential pressure cascade to prevent over pressurizing the facility in the event of
exhaust volume not meeting design.
Airflow proving differential pressure switches will establish that the makeup air fan is running
and delivering a suitable pressure differential. Once airflow is proven associated plant should be
available to run via the dictates of the control interlocks. Filter status pressure switches should be
incorporated to provide guidance on preventative maintenance. Cooling and dehumidification
control should be at the dictates of fresh air, supply air, return air, dry bulb temperature and dew
point sensors, which will call for cooling/dehumidification of the makeup air volume to maintain
the Cleanroom environment within design tolerances.
Process extract fans should be interlocked with the makeup air and supply system to ensure that
the facility cannot run at negative differential pressure. The process extract fans should be VFD
controlled, with the VFD proportional drive signal being derived from the BMS via the input of
veloprobs and pressure transducers to maintain a constant extract air velocity In the event of the
makeup air supply being lost, the extract fans will automatically shutdown to prevent the
Cleanroom being negatively pressurized. Airflow proving differential pressure switches will
establish that the extract fans are running and delivering a pressure differential. Once airflow is
proven associated plant should be available to run via the dictates of the control interlocks. The
extract scrubber system should be interlocked with the associated extract system to provide
airflow proving.
Process Cooling Water Temperature control should be done through BMS. Process cooling water
flow temperature will regulate the control of the primary chilled water to the heat exchanger and
speed of the duty pump. Flow and return water temperatures should be monitored as analogue
inputs by the BMS.
Chilled water temperature control should be a function of the integrated chiller controller. The
chiller will control on water flow temperature. The chiller will provide the status feed back to the
BMS for monitoring and alarm purposes. Flow and return water temperatures should be
monitored as analogue inputs by the BMS
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The compressed dry air system should incorporate an integrated controller, which will provide
all necessary control functions for the safe operation of the system and will indicate; pressure,
dew point, compressor/drier status. The integrated controller will provide status feed back to the
BMS as digital inputs to monitor status/alarm conditions. The BMS will incorporate a pressure
transducer in the compressed dry air distribution pipework to monitor available operational
pressure.
The ultra-pure water system should incorporate an integrated controller, which will provide all
necessary control functions for the safe operation of the system. The integrated control will
provide status feed back to the BMS as digital inputs to monitor status/alarm conditions. The
BMS will incorporate a water resistively transducer in the ultra-pure water distribution pipe to
monitor available water quality.
Power monitoring devices within the switchgear will provide an input to the BMS for the remote
display of plant power status at the supervise station.
General Alarm Monitoring plant status alarms and parent facility alarms should be announced in
the Control Room either within the BMS local workstation or alarm panels. Magnehelic type
differential pressure indicators should be positioned in the Control Room to indicate the positive
differential pressure cascade of the facility to the ambient perimeter walkway.
Portable Particle Counter should be provided within the facility for the routine assessment of
local cleanliness. The particle counter should be provided with a stainless steel transit trolley,
local thermal printer and temperature/relative humidity transducer. The particle counter should
be provided with data interrogation software to enable result to be downloaded to a local PC
within the facility, with data being available to the Control Room staff via local area network.
Complete BMS control system (with both auto and manual operation facilities) should be
provided for control to HVAC, Process Exhaust and scrubbers, Compressed Dry air system, Fire
detection and suppression system, House vacuum, UPW system, Gas system, HVAC Chiller
The chiller shall be enabled to run whenever the outside air temperature is greater than the
specified temperature. The chiller shall run subject to its own internal safeties and control.
Emergency Shutdown: chiller shall shut down and an alarm generated upon receiving an
emergency shutdown signal status.
Chilled Water Pump: The chilled water pump shall run anytime the chiller is called to run. The
chilled water pump shall also run for freeze protection whenever the outside air temperature is
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less than a user definable set point. The chilled water pump shall start prior to the chiller being
enabled and shall stop only after the chiller is disabled. The delay times shall be set appropriately
to allow for orderly chilled water system start-up, shutdown, and sequencing.
Alarms shall be provided to Chilled Water Pump Failure: Commanded on, but the status is off.
Chilled Water Pump Running in Hand: Commanded off, but the status is on. Chilled Water Pump
Runtime Exceeded: Status runtime exceeds a user definable limit.
The chiller shall be enabled a user adjustable time after pump statuses are proven on. The chiller
shall therefore have a user adjustable delay on start. The delay time shall be set appropriately to
allow for orderly chilled water system start-up, shutdown, and sequencing. The chiller shall run
subject to its own internal safeties and controls.
Alarms shall be provided as follows: Chiller Failure: Commanded on, but the status is off.
Chiller Running in Hand: Commanded off, but the status is on. Chiller Runtime Exceeded: Status
runtime exceeds a user definable limit.
Chiller Chilled Water Supply set-point: The chiller shall maintain a chilled water
supply temperature set point as determined by its own internal controls. Chilled Water
Temperature & Pressure Monitoring:
The following temperatures & Pressures shall be monitored: Chilled water supply. Chilled water
return.
Alarms shall be provided to High Chilled Water Supply Temp: If the chilled water supply
temperature is greater than specified temperature. Low Chilled Water Supply Temp: If the chilled
water supply temperature is less than specified temperature. Consider Integration chillers (max.
250 soft points) with BMS with proper Communication Protocol. Through which data from
chiller panel shall be made available on BMS server for monitoring
The vendor should provide ladder diagrams and separate alarms for controlling the following
components: Make up air unit, Make up Fan, Supply Air Duct Velocity Control, chilled water
coil valve, Electrical Strip Heaters, Return Air Humidity and temperature, Pumps for process
cooling, Room Parameters, Process Extract Fan Control, Compressed Dry Air System, Fan Filter
Units, Ultra-Pure Water System, Power Monitoring System.
5.13 CCTV Surveillance and Security System with DVR
System Requirement:
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The CCTV system should be IP based system with four monitoring with sixteen monitoring
cameras units coupled to a low voltage weather proof external PIR motion detector designed to
simultaneously or individually control switchers and video recorders.
It should easily locate incident video, then transfer to external storage via USB or network.
It should be capable of displaying live view or playback video in high definition on HDTV, LCD
screen or monitor via HDMI connection or VGA port.
DVR specifications
Video Input 16 Channels
Video Output VGA, HDMI
Display Resolution 1080p
Audio Input/ Output 1 RCA
Recording Mode Manual / Motion / Schedule
Recording Resolution 720p / better
Multi Tasking Recording/Playback / Network Simultaneously
Compression Format H.264
Frame Rate Up to real-time 30fps /25fps
Hard Drive Capacity 3TB SATA HDD/ better
Camera specifications
Viewing Angle Better than 62°
Night Vision Distance Better than 100ft / 30m
IR Cut Filters needed
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6. BULK & PROCESS GAS SYSTEMS:
The vendor should design both bulk and process gases facilities based on the details such as per details
given and Cleanroom layout plan with equipment footprints. The facilities should be built to meet the
norms of The Static & Mobile Pressure Vessels (Unfired) Rules, 1981, Department Of Explosives and
SEMI standards.
Nitrogen:
Sl. No. Gas Flow rate
1. UHP Nitrogen About 240 SLPM at 10 Kg/cm2 Pressure
6.1 Desired configuration of the Bulk gas & UHP Nitrogen facility
1. Ultra-High Purity Nitrogen of (99.9999% purity), Commercial Nitrogen & 2 banks of UHP
Nitrogen (2 cylinders in each bank & of 99.9999 % purity) cylinder manifolds with changeover
system one manifold as a backup to Dewar to be installed near Dewar & one more manifold
exclusively for Gas Management to be installed near the Gas Cabinets & Panels Room. For
nitrogen the vendor shall provide change over Panels (2 banks).
2. Seamless SS 316L, internal electro polished 10Ra micro inches (RMS) pipes/tubes with VCR
fittings. Headers should have double stage regulators.
3. The distribution pipeline network from the manifolds to the cleanrooms for the UHP gases for
UHP Nitrogen and Oxygen to be of seamless SS 316L, internal electro polished 10Ra micro
inches (RMS) pipes/tubes fitted with appropriate isolation valves and 0.3 and 0.5 micron line
filters as given in the equipment footprint drawing. For commercial Nitrogen, distribution
pipeline shall be of SS304. Vendor to provide a wall mounted isolation valve, in line regulator,
high flow valve and non-return valves in each gas line.
4. A suitable (preferably double wall SS306 vacuum sealed) insulated distribution pipeline should
be installed for Liquid nitrogen from the storage vessel to the cleanroom. Vacuum insulated
tanks and purifiers for storing and extracting Liquid Nitrogen should be procured and installed
by the vendor. There shall be Provision for installation of Phase separator.
5. Suitable control panels should be provided which can be integrated with the access control
systems
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6. UHP Nitrogen system shall include: Liquid Nitrogen Dewar – 2 numbers of 500 litres +/- 10%
capacity /each; Liquid Vaporizer, related accessories, valves & regulators and complete
hardware; Moisture Sensors, pressure sensors, suitable filters, isolation valves & flow meters
7. Technical Specification for Liquid Nitrogen Dewar:
Based on the requirement of 240 SLPM UHP gaseous Nitrogen for the Process & optimum
logistics, it is proposed to install 2 numbers of Liquid nitrogen Dewar. The Dewar should be able to hold
500 litre +/- 10% of Liquid Nitrogen of purity 99.995%- 2 numbers. The gas delivery from this system
shall meet demand of 240 SLPM. It shall be built with tough and durable Stainless Steel. It should be
encompassed with high performance insulation for maintaining the liquid N2 temperature for longer
durations in idle conditions.
Components/hardware for operations: Liquid Vaporizer, Safety Relief Valve, Rupture Disc,
Differential Pressure Gauge, Liquid Filling Valve, Economizer Pressure Regulator, Pressure Building
Regulator, Pressure Building Valve, and Manual vent Valve. Additionally Castor wheel trolley for easy
movement of Liquid Dewar and Vacuum Insulated Hose for Liquid filling should be supplied. The
entire system should be installed with all necessary interconnecting piping for Dewars with Evaporator
and outlet of the system shall be provided with Isolation Ball Valve.
The above system should also have a back-up N2 Supply Changeover Panel to accommodate 2 +
2 cylinders. This system should be taken on online manually in the event of Liquid Nitrogen
unavailability for the process or Maintenance shutdown for Liquid N2 system as mentioned at Clause 6.1
(Desired configuration of the Bulk gas & UHP Nitrogen facility).
One more N2 Supply Changeover Panel should also be provided in order to accommodate 2 + 2
cylinders to be used exclusively for Gas Cabinets purge etc in the Toxic gas supply management System
as mentioned at Clause 6.1.
NOTE: Total Gaseous Nitrogen requirement is around 240 LPM. This includes 120 LPM of UHP
nitrogen (PN2) & 120 LPM of General (Commercial) Nitrogen (GN2). To convert 120 LPM of UHP
Nitrogen, a suitable Purifier is being proposed & described at Clause 6.2 of this Document.
6.2 Specification of Automatically Regenerating Nitrogen GAS Purifier – 20 Nm3/hr
The following impurities shall be removed - O2, CO, CO2, H2, H2O, NMHC to < 1 ppb. Appropriate
Particle Filtration should be provided at the outlet of the Purifier. Pressure Drop across the Purifier
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shall not exceed ~10 psig. Purifier shall have internal arrangement for Twin adsorption towers such
that they will alternate between purification and regeneration modes, thus ensuring continuous
purification. Regeneration of adsorber is achieved by reverse flushing using purified Nitrogen at an
elevated temperature. The Entire Assembly shall be Safe for installation inside the building or Clean
Room conditions. There shall be Safety Relief valve for blocked gases inside the Purifier heater zone
to avoid over Pressure inside the purifier. The Purifier will have interlocks for trip / shutdown in
eventuality of Temperature rise beyond set point. The Purifier skid must be compatible to use 230 V,
50 Hz AC Power.
The design standards adopted for fabrication of the Purifier internal vessels shall comply with SEMI
Standards. Following features are must:
There should be a Gas Moisture Sensor to provide continuous confirmation of outlet moisture
content.
Auto or Manual Bypass should allow process gas flow to bypass the purifier vessels.
Particle Filter with removal efficiency rating of 0.003 Micron should be provided at the outlet of
purifier.
There should be MODBUS Data communication port for capturing performance data output.
The Purifier should be equipped with Inlet/Outlet Pressure sensors to provide process gas
pressure indication.
The Purifier should be preinstalled with Inlet Mass Flow Meter provides process gas flow rate
and total flow indication.
The Purifier should be pre-engineered with internal bypass column.
Inlet and Outlet Isolation Valves should exist for manual purifier isolation.
Suitable rating Electric Gas Preheaters should be provided to meet the objective of purification.
The Purifier Assembly should come with Hydrogen Blending Station which provides hydrogen
regeneration gas mixture for the purifier.
Electrical Fault protection should be provided.
The Purifier Cabinet should have external emergency shutdown switch.
The Controller for Purifier should be a Microprocessor PLC with Color Touch Screen Human
Machine Interface (HMI).
The Foot Print of the Purifier should not exceed 1400 mm (H) × 450 mm (D) × 850 mm (W).
The End Connections of Purifier should match with the following:
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Feed Inlet: ½” FVCR
Purified Outlet: ½” FVCR
Regeneration: ½” FVCR
Relief Vent: ½” FVCR
H2 Inlet: ¼” Tube
Cabinet Extraction Vent: 4” duct
Pneumatic Air Inlet: 3/8” FNPT
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6.3 Process gases
Process gases will comprise Inert, Toxic, Flammable and Corrosive gases. The vendor should design,
fabricate, supply, install, and commission the requisite Gas facilities. Complete requirements of gas
facility, safety and the distribution network must be met as per the specifications given below.
Table 6.3.1: Process gases, characteristics and distribution:
Sl. No. Gas Property Photolithography Lab Diffusion Lab
1. Ammonia (NH3) Corrosive
2. SiH2CL2 Flammable, toxic
3. 1% B2H6 in Helium Irritant
4. AsH3 Toxic
5. GeH4 Flammable, toxic
6. B2H6 Spontaneously ignites
in moist air; irritant
7. PH3 Pyrophoric, Toxic
8. SILANE (SiH4) Pyrophoric, Toxic
9. 5% SiH4 in Helium Toxic
10 Nitrous oxide
(N2O)
Inert
11 Oxygen Inert
12 Argon Inert
13 CF4 --
14 C4F8 --
15 SF6 Inert
16 Helium Inert
17 CHF3 --
18 Hydrogen Inert
19 Nitrogen Inert
IMPORTANT NOTE: The vendor should provide suitable Gas cabinets along with safety precautions
and the relevant “Abatement” for all the gases from serial no. 1 to 9 in order to neutralize the gases
before exhausting through Extraction and also supported on an appropriate management system. The
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vendor should also design and build/supply wall mountable Gas supply (control) panels without Gas
cabinets for the process gases listed at serial no. 10 to 19 above. For nitrogen the vendor shall provide 2
no’s of changeover N2 Panels having 2 banks & each bank having 4 N2 Cylinders.
Table 6.3.2. Process gas facility matrix with Process Tools:
Sr.
No. Gas
Cabinet and Panels
configuration. Tools Name
1. Ammonia (NH3) Single Cyl. Cabinet PECVD,RIE
2. SiH2CL2 Single Cyl. Cabinet RIE
3 1% B2H6 in Helium Single Cyl. Cabinet O2 Furnace
4 AsH3 Double Cyl.Cabinet
RIE
5 GeH4 RIE
6 B2H6 Double Cyl.Cabinet
RIE
7 PH3 RIE
8 SILANE (SiH4) Double Cyl.Cabinet
RIE
9 5% SiH4 in Helium PECVD
10. Oxygen Single Cyl.Gas Panel PECVD,RIE,O2 Furnace, RF
Sputtering
11. Argon Single Cyl.Gas Panel PECVD,RIE,RF Sputtering,
Thermal Evop.
12. CF4 Single Cyl.Gas Panel PECVD,RIE
13 Nitrous oxide (N2O Single Cyl.Gas Panel PECVD,RIE,O2 Furnace
14. C4F8 Single Cyl.Gas Panel RIE
15. SF6 Single Cyl.Gas Panel RIE
16. Helium Single Cyl.Gas Panel RIE
17. CHF3 Single Cyl.Gas Panel RIE
18. Hydrogen Single Cyl.Gas Panel O2 Furnace
19. Nitrogen Change over panel 2 NOs One panel for Gas Management
& one for Process Tools.
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VMB & VMPs shall be included wherever required for effective distribution & safety.
6.4 Gas cabinets
The Gas Cabinets shall be designed to suit single / dual cylinder of Ultra High Purity Gas. Dual
cylinder gas cabinets are needed to house one cylinder of the process gas and one cylinder of purge
gas each. The gas cabinets are to be designed as per SEMI standards. The gas cabinet should have
manual purge system, and both high-pressure side and low-pressure side vent facilities should go
through venturi drive valves. The vent lines should be connected to exhaust. The gas cabinets should
be user friendly for maintenance of gas control panels without removing the gas cylinders.
The gas cabinets are to be 12 gauges or better Zintec coated mild steel and painted with an organosol
finish to provide a durable surface. The door should be self-latching and should have a two point
locking mechanism. The doors need to be key operated to disable unauthorized entry.
Seamless Stainless Steel pipes/tubes of grade 316L, eletropolished 10Ra micro inches (RMS) and
Face-Seal fittings should be used.
6.4.1 Essential features of the Gas Cabinets:
Automatic access window door closure to ensure containment of leaks
Lockable access panel and wire reinforced safety glass viewing window fitted with gaskets.
Neoprene gaskets fitted snugly around door to ensure a positive seal.
Standard inlet air louver fitted with an inlet filter.
Flat top design with exhaust stack.
Fire sprinkler head, for extra protection with a fuse rating of 1550F
Cylinder restraints to ensure that all cylinders are held securely in place during storage and
operation.
Fusible Link to respond immediately in the event of a fire. Once the heat melts the fusible link, a
guillotine damper blocks the inlet air supply
(Liquefied Gases) Adjustable Cylinder Shelf in order to provide a convenient means of installing
small cylinder. Perforation in the shelf allows cabinet air to sweep around the entire cylinder.
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All manifolds to be orbital welded and fully leak checked to 1E-9 standard cubic centimeter/second.
The gas control panels inside gas cabinets to have CGA connections, flow limit switch , diaphragm
valves, pneumatic bellow valves, filters (pre-filter :0.4 micron article filter and final filter:0.003
micron particle filter), regulators with pressure gauges, pressure relief valve, check valves,
emergency shut off valve etc.
The gas cabinets must be accompanied by Test certificates, Certificate of conformity, Operating
manual, and general assembly drawings from the OEM.
Vendor to use double stage regulators in gas cabinets and gas distribution panels.
Gas cabinets to have provision to place toxic gas leak detection sensor head.
Gas cabinets must be process gases compatible.
Gas cabinets must meet SEMI Standards and vendor must provide SEMI S2 certification for the gas
cabinets.
Gas cabinets to have the facility of automatic shutoff of gas in the event of toxic gas leak and alarm.
Gas Detection System — a gas detection system installed in your cabinet can provide you with an
early warning to avoid a hazard or reportable discharge from developing
Vendor to provide regulator and line heater systems with control units for low pressure gas cylinders
wherever required.
6.4.2 Specifications for the supply panels of Hazardous Gas cabinets:
The Supply Panel within the Gas Cabinet should have the following features:
Primary Pressure Regulator with inlet and out let pressure gauges and isolation valves
Pigtails with DISS / CGA connectors and filter gaskets of 1µ rating
Pneumatically operated Emergency Shut off Valve at the outlet which should be activated during
any life Safety warnings coming from BMS.
Necessary isolation valves (Diaphragm type) for Pneumatic, Purge and Process.
Check valves to avoid cross contamination of process gas.
Electro-polished internal surfaces of all components with min. surface roughness of 10 micron
The Enclosure should be fitted with Gas Leak detector and Rate Rise Heat Detector
The Supply panel should be monitored for life safety situations through PLC integrated with HMI
taking actions in event of Gas Leak, ROR Sensor, Exhaust Failure, and Fire or accept remote
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shutdowns during any exigency. The PLC shall provide alarms for pre-set conditions and provide
Modbus compatible communication to integrate with Process Tool / SCADA
The enclosure should be made of Cold Rolled Steel (min 12 SWG) and designed for fire resistance
for 90 minutes
The enclosure should have an Exhaust Port to meet exhaust flow rate of min. 200 CFM.
The enclosure should be corrosion resistant, and should have wire mesh braided view glass.
The enclosure should have self-closing door closures and Latch with lock
The panel should arrive after being tested for Pressure Decay Test, Helium Leak Test with leak
integrity of less than 1 x 10-9 mbar l/sec
Additionally in case of Silane Gas Cabinet, it should be equipped with UVIR Flame Sensor
integrated to PLC for detecting the fires and shutting down the system.
6.5 Specifications for Inert Gas Supply Panels
The Supply Panel for inert gas should have following features:
Primary Pressure Regulator with inlet and out let pressure gauges and isolation valves to provide
flow rates up to 5 SLPM and pressure of 100 psig.
Cross-purge bleed valves to remove entrapped moisture before charging process gases.
Pigtails with DISS/CGA connectors and filter gaskets of 1 micron rating.
Necessary isolation valves (Diaphragm type), Purge and Process.
Check valves to avoid cross contamination of process gas.
Electro-polished internal surfaces of all components with min. surface roughness of 10 micron
The panel should arrive after being tested for Pressure Decay Test, Helium Leak Test with leak
integrity of less than 1 x 10-9 mbar l/sec
All joints in panel shall be either orbital welded or face seal (VCR) connections.
All panels shall be tested for particle content (less than 10 particles for size above 0.1 micron).
Panel shall be tested and certified for Trace moisture & Trace oxygen content for less than 1 ppm.
All panels shall be assembled in class 100 clean room with third party certification.
6.6 Gas control panels
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Gas control panels (without gas cabinets) should be provided for process gases listed at serial no.'s
10 to 17 of table 6.3.1 above. Gas control panels to have minimum features like CGA connections,
diaphragm valves, filters (prefilter: 0.4 micron particle filter and final filter: 0.003 micron particle
filter), double stage regulators with pressure gauges, pressure relief valve, check valves , high
pressure and low pressure side vent facilities through venture drive valve. The vent lines shall be
connected to exhaust lines. Continuous gas supply even during cylinder change, Fast manual switch-
over to the reserve side, For inert, reactive, flammable and oxidizing gases and gas mixtures
designed to minimize contamination.
The gas control panels shall meet SEMI Standards and vendor to provide SEMI S2 certification for
the gas control panels.
The gas control panels to be process gases compatible. The gas control panels must be accompanied
by Test certificates, Certificate of conformity, Operating manual and general assembly drawings
from OEM.
6.7 Distribution pipeline network
MOC: Seamless Stainless Steel pipes/tubes of grade 316L, Electropolished 10Ra micro inches
(RMS) and Face-Seal fittings.
Co-Axial pipelines for pyrophoric gases.
One spare Nitrogen gas line of SS304, ¼" size with requisite controls to be provided in each Lab.
One spare CDA line of SS304, ½" size with requisite controls to be provided in each Lab.
6.8 Gas Detection System
Electro-Chemical detectors should be provided in the gas cabinets, local valve manifold boxes
(VMB) and at the point of use
The gas cabinets should be equipped with secondary UVIR flame detectors, which will interface
with the associated electro-chemical detector.
The gas cabinets should be equipped with Pyrolyzers to create a reactive gas for leak detection of
gases that are not detected at normal conditions.
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The electro-chemical detectors should be wired back to the control panel located in the BMS Control
Room on a suitable cable management system in 4 core cable (2 x twisted pair). The control panel
will incorporate input modules, output modules, and web data visualization software. The system
will cater for up to 24 detector inputs and will take an input from the Cleanroom fire detection
system to shut down the gas cabinet in the event of a fire alarm condition.
The system should be monitored by Control Room staff on a local PC via a LAN connection using
the controller’s integrated web page. The toxic/hazardous gas detection system will require a single-
phase supply with UPS backup. Nitrogen concentration and oxygen depletion monitors should be
provided in the facility, being monitored in the Control Room.
6.9 Toxic gas monitoring system
The Vendor should provide Toxic gases monitoring system, preferably using Electro-Chemical
Technology for gas cabinets, Process Equipment exhaust, VMBs and process bays with following
features:
Directly display gas concentration in PPB, PPM or % Volume.
User settable dual alarm levels.
Latching Relays.
Common reset buttons.
Key switch for disabling external alarms.
Multiple monitoring systems with central control unit.
System to have visual and audible alarms.
Alarm system should be integrated with gas cabinets’ emergency Shut-off valve any other facility
alarms/Building Monitoring System in order to cut-off the source.
Advanced communications: Built-in configurable PLCs, Capable of providing physical evidence
of gas event, Automated leak test with line integrity option, Touch screen, Radio frequency
identification tag (RFID) to ensure eliminating human error
6.10 Specifications for Valve Manifold Box (VMB)
Valve Manifold Box (VMB) should be designed to suit distribution of one incoming gas into multiple
streams of up to 4 outlets of Ultra High Purity Gas (Toxic /Corrosive/Flammable). Both the fully
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automatic and the manual operation options may be quoted by the vendor. The Supply Panel within the
VMB should have following features:
Each Gas Stick shall have Pressure Regulator with outlet pressure gauges and isolation valves to
provide flow rates up to 5 SLPM and pressure of 30 psig
The Panel should comprise Purge and Vacuum Generator on the Low pressure side to ensure
impurity free delivery of High Purity Gas to the process
Emergency Shut off Valve (pneumatically operated) at the outlet which should be activated during
any life Safety warnings coming from BMS.
Necessary isolation valves (Diaphragm type), Purge and Process.
Check valves to avoid cross contamination of process gas.
Electro-polished internal surfaces of all components with min. surface roughness of 10 micron
The Enclosure should be fitted with Gas Leak detector, Rate Rise Heat Detector
The VMB should be monitored for life safety situations through Life Safety Board – Embedded
Controller taking actions in event of Gas Leak, ROR Sensor, Exhaust Failure, and Fire or accept
remote shutdowns during any exigency. The Life Safety Board shall provide alarms for pre-set
conditions and provide Modbus compatible communication to integrate with Process Tool / SCADA
The enclosure should be made of Cold Rolled Steel (min 14 SWG) and designed for fire resistance
for 90 minutes
The enclosure should come with Exhaust Port to meet exhaust flow rate of 300 CFM.
The enclosure should be corrosion resistant, and should have wire mesh braided view glass.
The enclosure should have self-closing door closures and Latch with lock
The panel should arrive after being tested for Pressure Decay Test, Helium Leak Test with leak
integrity of less than 1 x 10-9 mbar l/sec
6.11 Abatement /Scrubber for Toxic Gas Cabinet Management
The Abetment/Dry Scrubber for Toxic Gas cabinets purging/vent shall comprise dry scrubbing purge
canisters providing the highest destruction and removal efficiency (> 99.99%) along with high level of
safety to the changing of gas cylinders.
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The scrubber canisters should have heavy stainless construction. They should comprise non-flammable
adsorbents in order to adsorb high concentrations of toxic, flammable, or corrosive gases effectively and
safely with no risk of fire or explosion.
The process gases that are being used are as under:
1) Ammonia
2) Arsine
3) Diborane
4) Phosphine
5) Silane
6) Dichlorosilane
7) Germane
6.12 Dedicated PLC For Safety:
A dedicated programmable logic controller (PLC) is needed for the management of the process gases.
6.12.1 Safety System Details:
Gas Leak Detector Specifications: for Toxic, Corrosive, and Flammable gases: The detection
should be based on electrochemical reaction principle. Gas leak detectors should take continuous
samples via pump installed inside detectors. The Instrument shall have alphanumeric displays with
separate measurement units. The output should have Visual Alarm, Power and Fault lights as well
as back-lit LCD with all gas readings and events. The sample flow rate should be above 400 ml /
min and should be less than 30 seconds. The Cartridge should have calibration certificate. The
product should have suitable certification such as CE Marked meeting EN 50270:1999 (Type 2). It
shall be designed to meet UL 2075.
Controller Specifications:
a. PLC Controller:
PLC controller should have CPU (relay logic based) with communication port for logic
development and communication with supervisory controller and smart device connection.
Inbuilt and extended I/Os modules should support remote field I/O e.g Sensors, Transmitters,
Actuators, and Drives etc.
High electrical noise rejection threshold
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PLC shall communicate with Slave controller (Life Safety Controller) and Supervisory controller
(SCADA) to retrieve field instruments values continuously and shall take a proper corrective
action.
All field devices and slave controller shall be interlocked with hooter and final control element
for process i.e SOV and shall take necessary action as per safety norms.
Testing Documentation as CE, FAT and control system wiring should be provided.
GA drawing and Internal Electrical drawings should be provided.
b. Communication Protocols: General used communication protocol MODBUS, TCP/IP,
Profinet and RS 232.
c. Logic: Logic should be based on client application and need of process and process safety.
PLC Housing:
Housing for PLC should have front facing LED for power check, three tier hooter for signal
indication as healthy, warning and critical.
Mounting DIN rail and rack to install MCB, SMPS, PLC and extended I/Os module.
Internal wiring of PLC controller to relay board and terminal block to connect remote field I/Os
of process control and safety devices.
Life Safety Controller:
Life safety controller should have embedded micro-controller to control GC or VMB parameters
to monitor and control the process operation.
Life Safety System should be able to control or shut down process pneumatic valve when critical
situation reaches based on installed instruments (Gas Leak Detector, PT, Magnehelic or exhaust
sensor, Excess Flow Switch and Emergency Shut Down).
It should work as a slave controller on remote field and receive a counter signal continuously
from Mater controller to ensure safety.
Life safety controller should communicate with Master controller on MODBUS and share
continuous real data of instruments connected.
Safety Logic: Gas Leak Detector (GLD) shall be installed at point of use and source i.e. Gas
Cabinet. If standard gas cabinet accommodates its own GLD then GLD at source is not required.
Local controller / Life safety of gas cabinet, GLD (POU) & hooter shall be interlocked using a
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common controller. The common controller should take necessary action (shutdown) in case of
critical situation as per safety norms. Pressure transmitter and Excess Flow switch shall be
installed in Process outlet. It shall be interlocked with solenoid valve and visual Hooter
indication when sudden exceed in pressure (from set value) and flow from set point flow rate.
Magnehelic or Exhaust sensor is for continuous observation of negative suction in gas cabinet
and VMBs, so that if any gas leaks inside this enclosure, it will be thrown out in a safe manner.
6.13 Compressed Dry Air (CDA):
Two units should be provided, one working and another standby (lag & lead operations).
Dry, Clean & oil free air is required for processing the Semiconductors at nanoscale. Hence the CDA
units should meet the following specifications:
Air-cooled oil injected rotary screw compressors having capacity 20 CFM free air at a working
pressure of minimum 10 bar at point of use, driven by motor having online/offline control. This
compressor is for continuous duty. The unit shall be pre piped, wired and base plate mounted
with star-delta starter and control panel and microprocessor based control system.
The unit should have in built condensate separation unit like moisture separator and the moisture
shall be discharged through the automatic condensate solenoid drain valve.
The unit should be quiet in operation through a complete sound attenuating enclosure.
For easy maintenance, quick-latch panels should be provided.
6.13.1. Air Dryer (Desiccant type): The compressor should be fitted with Desiccant type air dryer
for consistent delivery of dry process air & having a minimum dew point of – 31 °C PDP.
The quality of CDA at the point of use shall comply with Class 1 grade of the International
Standard ISO 8573 (i.e. Oil aerosol and vapor Content ≤ 0.01 mg/m3. In each cubic meter of
compressed air, the particulate count should not exceed 20,000 particles in the 0.1 - 0.5 micron
size range, 400 particles in the 0.5 - 1 micron size range and 10 particles in the 1 - 5 micron size
range.)
Final Filtration level should comprise Activated Carbon Filter with maximum particle size 0.01
µm, ability to reduce oil concentration ≤ 0.005 mg/m3, and having optional auto drain
The Compressor should be Energy efficient, duly incorporated with VSD/VFD,
PLC/Microprocessor based with an ability to interface to BMS.
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It should include air receiver (Accumulator) of suitable capacity of working pressure 12 bar and
is equipped with safety valves, water drain and pressure indicator. The construction of the tank
will be 20 mm thick MS plate. The tank is pressure tested up to 1.5 times of working pressure.
The compressed dry air shall be supplied to the process area through SS304 distribution piping
with accessories like pressure regulators and indicators Isolation valves, etc.
The unit should also possess 1 number of adsorption type air dryer
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7. DI WATER
Specification of DI Water: Ultra-Pure Water generation & Distribution system to be installed and the
quality and quantity of DI Water required at the Point of use are as follows:
1. Water flow rate Min. 30 liters/hr
2. Final filtration 0.5 micron
3. Delivery pressure after final filtration at point of use 3.0 bar
4. Resistivity at 25 ºC at point of use > 18.2 Mega Ohm-cm
5. TOC < 0.01 ppm
6. Dissolved Silica < 0.01 ppm
7. Total Dissolved Solids <0.03 ppm
8. Bacteria < 10 cfu / ml
9. pH 6.5 - 7.2
10. Permanganate Reduction (min) 60
11. Sodium 0.1 mg/lit
12. Silicate 0.05 mg/lit
13. Heavy metals 0.01 mg/lit
14. Particles count < 1 no. of >0.1 micron
15. Tank capacity 200 liters
Water produce should pass as per ASTM Type I and CAP/NCCLS Type I. The complete system shall
include all the items required to provide the DI water as per the Specification mentioned above. System
shall include items like,
[1] Raw water storage tank to produce the DI Water
[2] Feeding Pump
[3] 5 Micron Cartridge Filter
[4] Activated Carbon Filter
[5] High pressure Pump
[6] RO Modules
[7] Instruments for the RO
[8] Plastic Tank polypropylene
[9] Feeding Pump
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[10] Mixed Bed unit
[11] Mixed Bed unit
[12] Ultra-filtration Unit
[13] Ultraviolet Unit
[14] PLC based Electronics device including Instruments etc.
Note: And any other item required to provide the DI water as per above Specification
The instrumentation panel shall consist Pr. Gauges, Rotameter, Conductivity meter digital Type PLC
base controller shall include automatic flushing on the set timing, Recirculation, Level controller,
Conductivity Controller, etc. The proposed ultra-pure water system Shall include sodium hypo chloride
dosing unit, raw water transfer pumps, multi grade filters, softener, CIP tank, micron filters, pre ultra-
pure system, pre ultra-filter pumps, UV sterilizers anti-sealant dosing unit, RO feed pump, reverse
osmosis system, Hi pressure pump, PH dosing unit, RO conductivity meter, Electro Deionization unit
and polishers and super Q to achieve the above conditions of water outlet mounted as common skid. The
resistivity meter, pH meter along with pressure gauges (instrumentation) for automatic control of
required water quality. The entire system shall be microprocessor based controlled system which can be
connected to BMS. The pumps also can be operated with VFDs thereby ensuring energy saving.
The required stand by for pumps, filters have to be considered accordingly. The Outlet water from the
polishers and Super Q which will be of distributed by high purity PVDF piping of required sizes for the
ring mail and similarly for the point of use with required accessories like connectors, bends, Tees, Shut
off valves of required sizes.
The unit should possess fully automated PLC interface for DI water generation system with Control
panels & there shall be provision for manual Override.
The UPW system should be integrated to the point of use as per the requirement of the process tools in
the Cleanroom.
The vendor shall carry out trial runs & analysis of UPW for permeate quality from different sub systems
like Softener, RO, EDI & Final filtration to ensure quality as per the Specification.
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8. HOUSE VACUUM
8.1 House Vacuum (Cleaning) System – for regular cleaning of Cleanrooms
Capacity: 1100 cum/hour Air flow rate, Max vacuum 4400 mm of H2O, for Continues duty Vac
rate 2900 mm of H2O, Industrial Heavy Duty type. An integrated house vacuum (cleaning)
system should be provided to serve the Cleanroom. The dust collection unit and blower should
be positioned on the Ground Floor behind the Main Building / in the Service Corridor.
House vacuum (cleaning) pipework should be distributed through the adjoining underground
utilities trench and void of the Cleanroom raised access floor, on an appropriate management
system in galvanized mild steel tube, terminating with spring loaded, self-closing cover in the
Cleanroom raised access floor. A remote run/standby selector with indicator should be provided
adjacent to each connection point. 2 qty flexible hoses should be provided within the Cleanroom
for connection into the system for cleaning purposes. A House vacuum unit, Pocket filtering
system and the Control board suitable and movable by Wheels, composes the unit.
8.2 Vacuum unit
The frame is made of electro-welded sheet stiffened to withstand the vacuum. Several openings allow
the access to the internal parts consists of Side Channel blower, three phase electric motor, Pocket Filter,
Air silencers, Vacuum Pressure Gauge, Integrated hopper, Control board, Manual Filter Cleaning.
8.3 Filter chamber
The lighter particle of the material mixture comes into the lower portion of the filter chamber
whereas the heaviest dust falls to the bottom. The dust particles are conveyed to the sleeves where
they are collected. The inspection and maintenance operations are easy. The Polyester pocket filter
enhances a large filtering surface area. The Manual Filter cleaning system enhances the periodic filter
cleaning.
8.4 Collection Container
The Collection Container should be fixed on bottom of the filter chamber. This will collect the dust
particles fall down from filter. The same can be removed by mechanical easy removal system.
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Ten cleaning ports shall be provided. Distribution pipelines should be provided, and these are to be
connected to the Central Vacuum System.
8.5 Control board
As per CE normative with mechanical protection IP 55, the control board consists of Buttons, Pilot
lights, Safety devices: Vacuum Pressure Gauge, overload tripping device. The desired accessories are:
Iron Reducer
Super flex PU Antistatic Hose
Rubber connections for accessories
Flexible hose
Hand curved tube
PVC adaptor
Extension tube
Floor dust tool
Floor wet tool
Flat lance
Round brush
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9. PROCESS TOOLS COOLING CHILLER.
One unit is needed by is to be installed with the following specifications:
Chilled Water Flow rate is 15 USGPM Pressure at the point of use required is 3 bar Inlet
temperature to process cooling required is 19 0C. Outlet temperature to process cooling is 26 0C.
The system should Comprise Air Cooled Process Chiller with Scroll Compressor with Complete
Electricals & Controls.
It should have Provision for Auto stand by Compressor automatically start in case of running
compressor fails.
It should use Refrigerant shall be R407 / R134 A (non CFC).
It should Comprise of Condenser Air Cooled type with Copper Tube & Aluminium Fins (Air
Cooled 3 Rows with Copper Tube) along with suitable capacity Stainless Steel Tank with
suitable Pumps & fans.
It should include Evaporator of Shell and Tube High Heat Transferable (Tank in Coil &
Removable bundle type).
It should have Thermostatic Expansion Valve, Filter drier, pressure Switches, and Shut off valve,
gauges, temperature Controllers, Actuators, relays, Contactors, Indicators. Proper insulations for
piping etc.
It should include suitable piping duly insulated along with valves, fittings, fittings & regulators
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10. PROCESS EXTRACTION SYSTEM
Process extraction system should comprise: (a) Wet Extraction 2 no’s (b) Dry Extraction 1 no, and
(c) General Process Extraction 1 no. (Optional)
For flammable exhaust, the material of construction shall be SS 304. Control dampers should be
provided in the Exhaust system near the relevant Process Equipment. Note-The exhaust distribution
system from process equipment other than flammable & toxic will be PVC/ PP. Details of process
exhaust both flammable & nonflammable to be fixed in consultation with IITG.
10.1 Wet Extraction System: 2 nos. one for acid & Other for Alkali.
This system shall serve for the process extraction from wet benches of process of Photolithography Lab
and Diffusion Lab. The process extracts from Wet operation area will be mainly acidic/Alkaline in
nature. For the above purpose, wet extraction system of capacity of 1800 CFM should be provided. The
extraction system should be of packed bed type, made out of 8mm Thick casing of poly propylene or
(3mm PP + 5mm FRP), recirculation tank ok 11 mm thick (3 mm PP + 8 mm FRP) with suitable
packing material of PP Intallox saddle, PP spray nozzles, automatic Dozing pumps to control PH along
with sensor, flow meter, pressure gauge, differential pressure gauges etc. It should have recirculation
pump and MOC of pump with suitable motor. The shaft of SS316 should be directly coupled to electric
motor.
The extraction system shall comprise blower, casing, and ducting of non-corrosive material to
overcome the action of acids & gases.
The system should include suitable centrifugal blower having - capacity of 1800 CFM with SP of
300 mm wg. MOC of casing is PP/FRP lined, with impeller and base frame MS with FRP lined
with suitable motor. Desired accessories: suction inlet dropper, inlet flexible connection, silencer
etc.
Ducting: For wet acid extraction, the diameter of the duct considered should be varied depending
upon process extraction capacity using standard polypropylene (PP) pipes which will connect the
acid generating sources to the wet scrubber. Accessories: dampers made of material
PP/FRP/SS304, duct supports made of SS304 and PVC hoses with clamps.
Extraction Distribution System from different process tools: PP round ducts along with Control
Dampers, Flexible ducts wherever required and magnehelic gauges. PP ducts wherever exposed
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to outside ambient should be covered/ insulated with FRP material. The ducts should be firmly
supported with galvanized brackets & rods. The length of the extraction Ducts should be
calculated by the vendor by careful study of duct routing from process tools to the point of outlet
of the extraction system.
The system noise shall not exceed 75 dB.
The system is to be interfaced with BMS.
10.2 Dry Extraction System
Process & Gas Cabinet Extraction
The Dry Extraction system shall serve for the process extraction from different process in areas & from
Process Gas Cabinets through Abatement Systems.
The system consists of the following:
Dry scrubber: - 1500 CFM capacity and made out of SS304.
Centrifugal blower: - SISW shall be with minimum air discharge capacity of 1 m3/sec. having
Static Pressure of 300 mm w.g. The casing and the impeller are made out of SS 304 material and
having suitable drive motor including other accessories like suction inlet dampers inlet flexible
connection, silencer etc.
Bag Filter: The purpose of the bag filter is to filter dry powder without moisture of capacity
1500 CFM. The filter body shall be made out of SS 304 with spun bonded polyester with PTFE
coating on filter fabric, and pleated cartridge. The dust discharge shall be through rotary airlock
valve and to a dust collection drum of SS make which is movable on wheels.
Rotary Air Lock
Valve for discharge: - With a drive motor and MOC in SS304.
Ducting: - The four suction points from the process equipment shall be connected through
ducting to the main Header duct is SS 304 with accessories like dampers, duct suspender, and
PVC hoses with clamps.
General system configurations should be as follow:
The extraction system shall comprise of Blower, Casing & ducting of non-Corrosive material to
overcome the action of acids & gases.
91
Extraction Distribution System from different process / Gas Cabinet exhaust system shall
Comprise SS 304 round ducts, Control Dampers, Flexible ducts and Magnehelic gauges.
The ducts should be firmly supported with galvanized brackets & rods. The length of the
extraction Ducts should be calculated by the vendor by careful study of duct routing from
process tools to the point of outlet of the extraction system.
The length of the extraction Ducts should be calculated by the vendor by careful study of duct
routing from process tools/ Gas Cabinets to the point of outlet of the Extraction system.
The system noise shall not exceed 75 dB; the system is to be interfaced with BMS.
10.3 General Process Extraction Systems (Optional)
The general extraction system is for the purpose of general exhaust connected to the tools of different
equipment. The General Extraction system capacity shall be 750 CFM. This system shall comprise of
main body, centrifugal blower, ducting, and other accessories.
It shall have a suitable centrifugal blower with capacity of 750 CFM and Static Pressure of 250
mm WG and be SISW type.
The blower casing shall be made up of MS with FRP Lining and impeller with MS with FRP
lining with suitable dry motor, belt driven with accessories like suction inlet damper and inlet
flexible connection.
The ducting shall have main header. This ducting system will connect to all process rooms to the
main blower. The exhaust duct shall have rain protection cowl.
MOC of ducting shall be polypropylene, 2 mm thick. Accessories include individual dampers of
GI material, suitable duct supports made of MS/GI and PVC hoses with dampers.
Extraction Distribution System from different process system with polypropylene, 2 mm thick
round ducts along with Control Dampers, Flexible ducts wherever required & Magnehelic
gauges. The ducts shall be firmly supported with Galvanized brackets & rods. The length of the
extraction Ducts to be calculated by the vendor by careful study of Duct routing from process
tools to the point of outlet of the Extraction system.
The extraction system shall comprise of Blower, Casing & ducting of non-Corrosive material to
overcome the action of acids & gases.
The system noise shall not exceed 75dB, and the system should be interfaced with BMS.
92
11. EFFLUENT TREATMENT
Effluent Drain System: A Suitable drain system for various effluents from the process equipment, Wet
benches, Fume hoods, and sinks etc should be connected to Effluent Treatment Plant or collection
chambers with corrosion resistant pipe lines, fittings, and proper supports.
Location of Effluent Treatment Plant: The effluent treatment plant should be positioned on the
Ground Floor adjacent to the Main Building. The effluent drain lines shall be for Acidic, Alkaline, and
organic effluents.
Based on the type of effluent constituents, MOC of drains line and related accessories such as flow
control valves, non-return valves etc. should be designe (e.g. Polypropylene).
From the drains of wet benches / fume hoods / chemical benches of the labs will be connected to the
Effluent Treatment Plant (ETP). The effluent treatment plant should be positioned on the Ground Floor
adjacent to the Main Building. The effluent treatment plant will neutralise contaminated process waste
and separate solids for safe disposal. All wastewater from the Cleanroom should be handled by the
effluent treatment plant. The piping for this effluent as listed above will be with
vulcathene/Polypropylene material of construction piping of nominal bore 50 Nb with required
connectors, equal tee, elbow, pipes, pipe caps, connection hose with accessories and hardware. The
piping will be designed to take the required flow to the holding tanks with suitable sized branch lines
and main pipe line to the ETP. The vendor should prepare a detailed matrix of wastes and chemicals
based on the inputs from IITG and design and install the ETP to treat all the effluents coming out of the
cleanroom and its utilities, which include solvents, alkali, acid, and other chemicals.
Provisional data of Chemicals used:
Sl. No Name of Chemicals Maximum Flow
rate (LPM)
Remarks
(Acid/Alkali/Solvent)
1 Hydrochloric acid 2 Acid
2 Sulfuric acid 5 Acid
3 Nitric Acid 2 Acid
4 Hydrofluoric Acid 2 Acid
5 Sodium Hydroxide 5 Alkali
6 Potassium Hydroxide 2 Alkali
93
12. ANY OTHER REMAINING ACCESSORY:
The vendor must add/specify any of the accessories/components, which are not described in the RFP but
is necessary to develop the turnkey cleanroom. The vendor must raise all these aspects during the pre-
bid meeting and include them in their technical and price bids in consultation with IITG.
94
13. VALIDATION & COMMISSIONING
The vendor should validate the Cleanroom as per ISO14644 standard.
Validation of the following parameters should be mandatorily submitted:
Temperature
Relative Humidity
Particle count
Filter Integrity test
Air velocity test
Differential room pressure test (pressure Zoning)
(DQ, IQ, and OQ, Documents should be submitted as and when required.)
95
Annexures
ALL the AUTOCAD DRAWINGS/Design Layout/ Data
are Available on the WEB Location
http://www.iitg.ernet.in/nano/CENTDi/advt-RFP.html
96
Annexure A: Layout for Cleanroom & Utilities
97
Annexure B:
Details of Interiors of Cleanroom & Utilities
98
Layout showing walls and doors along with Utilities Lines
99
Table B.1: List of Instruments along with Details of Utilities
UTILITY MATRIX OF PHOTOLITHO LAB
Sl. No.
INSTRUMENT
Nitrogen Compressed/ Clean Dry Air
Vacuum Process Coling Water DI Water
Tool Exhaust
(cfm)
Hours of Operation
per day
Flow rate
Lpm/cfm
Pressure Flow rate Lpm
pressure flow rate pressure Flow rate Lpm
Pressure
Inlet / out let Tempareture deg C
Flow Rate Lpm
pressure Produc
tion Rate
1
Electron Beam Lithography (EBL)
1 LPM
2 to 10 bar
1 LPM 10 bar 1000 sccm
10^-5 mbar
3 Lpm 2 bar 20-26°C NA NA 20 14
2 Mask Writer (MW)
5 LPM
10 bar 2 LPM 10 bar 200 sccm 0.5 bar Not
needed NA NA
15 12
3 Double Sided Mask Aligner (DSMA)
1 lpm 5 bar 1 LPM 6 bar Not
needed
Not needed NA NA 50 12
4 Wet Bench (+ spin coater, hot plate)
1 LPM
2 bar 5 LPM 10 bar 1 cfm 10^-4 mbar
1 Lpm 1 bar 30 lph 490 12
SUB Total 8
LPM 9 lpm NA NA NA NA NA 575
100
UTILITY MATRIX OF DIFFUSION LAB DATA
Sl. No.
INSTRUMENT
Nitrogen Compressed/C
lean Dry Air Vacuum Process Coling Water DI Water
Special Gases
Tool Exhaust
(cfm)
hours of operation
per day Flow rate Lpm
Pressure
Flow rate
Lpm/
pressure
flow rate
pressure
Flow rate Lpm
Pressure
Inlet / out let Tempareture deg C
Flow Rate Lpm
pressur
e
Production Rate
1 PECVD 25 lpm 5
mbar 10 lpm
5 to 7 bar,
water and oil
free
600 sccm
min. 10^-5 mbar, Process 20-100 Pa
4 lpm max 4 bar
20-25°C NA NA
5% SiH4 In Helium/N20/NH3 /CF4/ O2/Ar./N2
50 8
2
RF- Magnetron Sputter (RF-MS)
1 LPM 1 bar 2 LPM 6 bar upto 2000sccm
min. 10^-5 mbar, Process 20-100 Pa
8-12 LPM
min. 3 bar
20-25°C NA NA Nitrogen and Argon
85 12
3 RIE 50 lpm 5 bar 10 lpm
5-7 bar,
water and oil
free
upto 2000sccm
min. 10^-6 mbar, Process 01-10 Pa
12 lpm
max 4 bar
20-25°C NA NA
hazardous gases needed:
SiH4, GeH4, SiH2Cl2, PH3,
B2H6, AsH3/SF6/C4F
8
50 8
101
4
Oxidation Diffusion Furnace (ODF)
160 Lpm
1 bar N/A N/A 4 cfm 10^-5 bar
10 lpm
2 to 4 bar
20-25°C NA NA
Nitrogen/Hydrogen/Oxygen/N2O and 1% Diborane in Helium
400 10
5
Thermal Evaporation (The Eva)
1LPM 1BAR NIL NIL
5x10^-7 mbar SINCE CHILLER UNIT IS
PROVIDED THESE DETAILS ARE NOT REQUIRED
NIL NIL Evaporation Unit-Nitrogn /O2 and Ar.
60 8
thermal evap. (2nd component)
1LPM
1BAR NIL
NIL 1x10^-6 mbar
NIL NIL NIL 60 8
6
Electrospinning Device(ESD)
NA NA 2 lpm 6 bar 100
sccm 0.5 bar
25 8
7
Control Enviornment Chamber (CEC)
NA NA NA NA
0
24
8
Laser Micro Machining (LMM)
5 lpm NA 20 lpm 7 bar 80 8
9 Wet benches
2 LPM 10 lpm 10 bar
1 lpm ? Nitrogen is require for GUN
900 8
sub total
~ 250 LPM 54 lpm
1710
102
102
Table B.2: Design Data for Cleanroom and Utility Building Areas
S. N
o.
AH
U N
o.
Ro
om
De
scri
pti
on
Are
a (s
qft
)
He
igh
t (
ft )
Occ
up
ancy
(N
os)
Ligh
tin
g Lo
ad (
wat
t/sf
t)
Tota
l co
nn
ect
ed
Eq
uip
me
nt
Load
(kW
)
+ P
ress
ure
(P
a)
De
sign
Te
mp
.(°C
) (+
/- 2
)
De
sign
R H
(%
) (+
/-5
)
Air
Cah
ange
s p
er
Ho
ur(
AC
PH
)
Min
imu
m F
resh
Air
Ch
ange
Mac
hin
e E
xhau
st (
cfm
)
Cle
anlin
ess
Gra
de
REM
AR
KS
1 AHU
1 PHOTOLITHO LAB 506 10.8 4 1.0 35 40 22 45 3 600
ISO 5
ACPH based on 100 % HEPA Coverage & Dehumidifier required to achieve RH
AHU
1 SUB TOTAL 506 4 35 600
2 AHU
2 DIFFUSION LAB 1,427 10.8 8 1.5 170 40 22 50 130 3 1,750
ISO-6
Dehumidifier required to achieve RH
3 AHU
2 AIR LOCK 1 87 10.8 4 1.5 0 25 22 50 130 3 0
ISO-6
Dehumidifier required to achieve RH
4 AHU
2 CHANGING ROOM 94 10.8 8 1.5 5 10 22 50 60 3 0
ISO-7
Dehumidifier required to achieve RH
103
AHU
2 SUB TOTAL 1,608 20 175 1,750
5 AHU
3 CORRIDOR 1 280 10.0 10 1.5 12 5 22 65 10 3 240 UC NA
6 AHU
3 CORRIDOR 2 699 10.0 10 1.5 13 5 22 65 10 3 240 UC NA
7 AHU
3 CORRIDOR 3 344 10.0 10 1.5 12 5 22 65 10 3 240 UC NA
8 AHU
3 LOCKER ROOM 678 10.0 12 1.5 5 5 22 65 10 3 0 UC NA
9 AHU
3 LAUNDRY & SORTING ROOM
291 10.0 12 1.5 9 5 22 65 10 3 0 UC NA
AHU
3 SUB TOTAL 2,292
22 (max)
51 720
10 VAH DANGEROUS/TOXIC GAS ROOM
161 11.5 4 1.5 5
Ambient Ambient
4
UC Ventilation exhaust needed for safety
GRAND TOTAL 4,567 50 257 3,070
11 DSA
1
UPS/ELEC ROOM IN
UTILITY BUILDING 452 13.0 12 1.5 220
22 65
N/A UC
Independent split A/C
12 DSA
2
BMS CONTROL
ROOM IN UTILITY
BUILDING
592 13.0 6 1.5 5
22 65
N/A UC Independent split
A/C
104
Annexure C:
Details of Civil Construction
105
106
Annexure D:
Distribution of List of works for the fabrication clean room in IIT Guwahati
No Item Supplied by Vendor
Supplied by IITG
Third Party
1. Land, Approach Road to Site Y
2. Building and all Civil Works Y
3. Foundation of HVAC Equipment Y
4. HVAC System & Exhaust System Y
5. Waste Water Treatment Y
6. Fire Detection System Y
7. Electrical System Inside Lab Y
8. BMS and Access Control Y
9. GAS Manifold & Pipelines to be Provided for
all the Gases
Y
10. DI Water Plant (20 l/Hr) Y
11. Emergency Power (DG, UPS) Y
12. Supply of 3 Phase Power to Lab Y
13. Supply of Water to Site Y
14. Cleanroom Protocol Y
15. Maintenance for 5 years Y
16. Antistatic Flooring Y
17. Chemical Scrubber/Wet Scrubber Y
18. Equipment Installation at IIT Guwahati Y
19. Process Tool Hook Up Y
20. Testing & Validation Y
21. Commissioning of Cleanroom Facility Y
22. Third Party Authorization
(ISO certification)
Y
23. 5 Years Comprehensive Warranty Y
24. Manpower for Maintenance Y
25. Safety Requirements Y
26. Turn-key based Project (Detailing by the
Vendor)
Y
107
Annexure E:
Any one of the following makes of equipment/components/items are acceptable to the company subject
to meeting the technical specifications specified in the tender. Please note that any other makes which
are specified as EQUIVALENT should be approved by the IITG after submitting required sample and
technical specification sheet.
I. Preferred Makes of HVAC & Cleanroom Fabrics/Interiors
Air cooled Chiller units Carrier/McQuay/Climaventa/Voltas/Bluestar
Trane/York
Chiller Compressors Carrier/Trane/Bitzer
Chiller Motors ABB/SIEMENS/CROMPTON GREAVES
Chilled water pumps Grundfoss/Armstrong
Chilled Water Pipes Class C SAIL/TATA/Jindal
Globe Valve/Gate Valve/Butterfly Valve
/Check valve/
Castle/Advance/Audco/Alfa Laval
3 Way Control/Mixing Valve Honeywell/Siemens
Balancing Valves/ flow Measuring devices Bell & Gossett/Tour & Anderson
Water flow Switch Honeywell/Siemens
Air handling Units CITIZEN/VTS/FLAKTWOODS/EDGETECH/
SYSTEMAIR/ZECO
AHU Fan blower NICOTRA/KRUGER/Flakt woods
Motors for AHU CROMPTON GREAVES/ABB/SIEMENS/BHARAT
BIJILI
Starter Siemens/ABB/L&T/SCHNEIDER
Fire Dampers Air Master/Caryaire/Ajanta/System Air
Ducting – GI Sheets SAIL/TATA/Jindal
Duct Insulation ARMAFLEX/K FLEX/SUPREME/
TROCELLENE
Damper Actuators Honey Well/Siemens
Grilles/Diffusers/VCD/Ducting fittings Air Master/Caryaire/Ajanta/System Air /Flakt wood
FFM with ULPA filters U-15 & HEPA Filters
H-14, HEPA filters H – 11, with 95 %
efficiency
CAMFIL/KLENZAIDEs/AAF/SAGICOFIN/ENVIRC
O/FLANDERS/TERRA UNIVERSAL
Air shower KLENZAIDES/ICLEAN/GMP/CRP/
CHEMPHARMA/TERRA UNIVERSAL/FAB TECH
Air Curtain ALMONARD/FABTECH/THERMODYNE
Pass Box KLENZAIDES/ICLEAN/GMP/CRP/CHEMPHARMA/
108
TERRA UNIVERSAL
Garment cubicle KLENZAIDES/ICLEAN/GMP/CRP/CHEMPHARMA/
TERRA UNIVERSAL
Shoe Racks KLENZAIDES/ICLEAN/GMP/CRP/CHEMPHARMA/
TERRA UNIVERSAL
Aluminium Honey Comb Wall/Ceiling system,
Heavy duty Aluminium T ceiling grid, vision
panels, Doors, Emergency Doors, Door Closures
etc (internal Fabrics for Cleanroom)
CHANNELSYSTEM/FLEXICON/PLASCORE/AMER
ICAN CLEANROOM SYSTEM
Wall & Ceiling Cladding/False ceiling Panel in
Unclassified Areas 25mm /50mm thick
GMP/ICLEAN/NICOMAC/FABTECH/AHLADA
Yellow films for glazed surfaces in
Photolithography lab
UVPROCESSUSA/CHANNEL SYSTEM/PLASCORE
Clean room Raised Flooring & Pedastals Hae Kwang/Tate/Veroveria / Access / Microtek
Homogeneous Vinyl Flooring for Unclassified
Areas
Wonder floor /GERFLOR/Stat clean/
Chempharma/Doy Yee/ or Equivalent
Tear Drop Light Fixtures CHANNELSYSTEM/MICROTEK/ASTRA/
AAF/LIBERTY/SOLITE
Cleanroom Flat Diffuser Lights CHANNELSYSTEM/MICROTEK/ASTRA/
AAF/LIBERTY/SOLITE
Flat Light Fixtures in Unclassified Areas WIPRO/SOLITE/PEARLITE/OSRAM/PHILIPS/HAV
ELS
RH and temperature indicator WAREE/HTA
Magnahaulic gauge WAREE/DWYER/Terra Universal
Pressure gauges WiKA/forbesmarshall
Flexible duct ATCO/GP SPIRO/ ROLASTAR
Pre filter and Fine filter AAF/KLENZIDE/SAGICOFIN/ASHRAECRP
SAGICOFIN / ENVIRCO
Thermostats/Humidistat SAUTER/SIEMENS/JOHNSONS/HONEYWELL
DEHUMIDIFIERS Bry- Air/White Washinghouse/Appidi/Dry Air
Pan type humidifier RAPID COOL/NORDAMANN/Walter Meier
Electrical Strip Heaters HEATCON/DASPASS/ESCORTS
Temperature/RH/Pressure Sensors Honeywell/Siemens/Johnson
BMS & access control Honeywell/Siemens/Johnson
109
Switch Trunking MK Electric/GE Electric
Thermostat & Humidistat SAUTER/SIEMENS/JOHNSONS /HONEYWELL
Electrical LT Panels REPUTED MANUFACTURES CPRI TEST
APPROVED
Air Circuit Breaker & Bus Couplers L & T/SIEMENS/SCHNEIDER/ABB
MCCB L & T/SIEMENS/SCHNEIDER/ABB/CG
MCB’s L & T/SIEMENS/SCHNEIDER/ABB/CG/HAGGER
Power/Control Contacts, Over load Relays,
Timers, etc.
L & T/SIEMENS/SCHNEIDER/ABB
Fuses CG/L & T/SIEMENS
Energy Meters L & T/CONSERVE
Power Cables/Control Cables/Wires etc. FINOLEX/UNIVERSAL/polycab/Unistar/Nicco
Electrical Conduits BHARAT/GUPTA OR EQUIVALENT MAKE WITH
ISI STD.
Switches & Sockets
MK/HAGGER/LINGGUARD
Cleanroom Intercom Philips/Panasonic/Miran/Jie Jia
Air Compressors Atlas Copco/ Ingersol Rand
Air Compressor piping SS 304 Non EP Sandvik/Valex/Swagelok
House Vacuum Roots/Electrux
Exhaust System Flaktwoods/Kruger/ebm- NADI/ Alpha Projects Pvt
Ltd/ Pilani Envirotech
Exhaust Ducting UPVC with FRP lining Finolex/Durapipe
Process Vacuum Leybold/Edward
Process Vacuum Piping – SS 304 Sandvik/Valex/Swagelok
Dry Scrubber Flaktwoods / CS CleanSystem/Edwards Vacuum
UK/Techharmonic/JupiterScience/Kanken
Singapore/DAS Environmental Expert GmbH
110
Wet Scrubber Transtech/Thermax/Alpha Projects Pvt Ltd/Pilani
Envirotech /JR Fibreglass
Note: Vendors should choose only among the approved makes of all the items mentioned above
II. Preferred Makes for Utilities
Sr.No Description Makes
1 DI Water Systems Millipore/Komal / Graur &weil, / Purelab-Elga /
PAL
2 Compressed Dry Air Atlas Copco/IngersolRand
3 Air Compressor piping SS 304 Non
EP
Sandvik/Valex/Swagelok
3
Wet Extraction System.
Trans tech/Thermax /Alpha Projects Pvt Ltd/Pilani
Envirotech /JR Fibreglass
4 Dry Extraction System.
Flaktwoods / CS CleanSystem/Edwards Vacuum
UK/Techharmonic/JupiterScience/Kanken Singapore/
DAS Environmental Expert GmbH
5 General Process Extraction System.
Trans tech/Thermax/ Alpha Projects Pvt Ltd/ Pilani
Envirotech/Flaktwood
6 House Vacuum Roots/Electrux
7 BMS, Access control HONEY WELL/SIEMENS
7 Effluent Drain Bionics/Advance Equipment & Projects/SSP Pvt
Ltd/OR Equivalent
8 DG set Caterpillar/Kirloskargreen/Mahindra/Cummins/
Powerica/
9 UPS Emerson/Fuji Electric/Hitachi/APlab/Microtek
10 Process Chiller Climaventa/ESKIMO/Voltas/Blue star/ or Equivalant
11 PLC & SCADA Honey Well/MIDAS/COMOs/DRAEGER
111
12 CONTROLLERS SIEMENS/ABB/Mitsubishi/GE
13 Fire detection & Suppression Inergen /FM 200
III. Preferred Materials & Makes for Bulk & Process Gases:
Sr.No Description Material of Construction
1 Corrosive Gases – Cl2, HBr etc., SS316L, Electropolished, Coaxial Tubing, Coaxial
2 Flammable Gases - Hydrogen,
Methane, Propane, Butane, Ethylene
etc.,
SS316L, Electropolished Tubing
3 Pyrophoric & Toxic Gases – Arsine,
Phosphine, Diborane etc.,
SS316L, Electropolished Tubing, Coaxial
4 Inert Gases - Nitrogen, Argon, Helium
etc.,
SS316L, Electropolished Tubing
5 Compressed Dry Air SS316L Bright Annealed
6 Exhaust for Gas Cabinet, VMB, Tool SS304, 2mm thk
7 Process Cooling Water SS304 Pipe / Tube
IV. List of approved OEM’s for Various Components, equipment for Bulk & Process Gases
Sr.No Description of Components /
Equipment
Makes
1 Diaphragm Valve with VCR end or
Tube ends
1. Swagelok USA,
2. TK Fujikin, Japan/Korea,
3. Parker USA,
4. SCT Kitz Japan
5. AP Tech
2 Ball Valve with OD ends or Double
compression ends
1. Swagelok USA,
2. TK Fujikin, Japan/Korea
3. Parker USA,
4. SCT Kitz Japan,
5. AP Tech
3 Seamless and Coaxial Tubing SS316L
Electro polished and Bright Annealed
1. Valex USA, (www.valex.com)
2. Sandvik Sweden,(www.sanvik.com)
3. Dockweiler Germany
(www.dockweiler.com)
4. Air Liquide
5. Linde
112
Gas Cabinets
Valve Manifold Box – VMB
Valve Manifold Panel - VMP
1. Ceres Technologies Inc.,
(www.cerestechnologies.com)
2. KAS Technologies (www.uhptech.com)
3. Matheson Gas (www.mathesongas.com)
4. Air Liquide
5. Linde
5 Gas Supply Panels
Gas Change Over Manifolds
1. Ceres Technologies Inc.
2. (www.cerestechnologies.com)
3. KAS Technologies (www.uhptech.com)
4. Matheson Gas (www.mathesongas.com)
5. Air Liquide
6. Linde
6 Gas Leak Detectors 1. Honeywell
2. Draeger
3. Bionics
7 Gas Abatement 1. Edwards Vacuum UK
2. DAS Environmental Expert GmbH
3. Jupiter Science USA
4. Kanken Technologies Singapore
5. CS Clean Gemany
8 PLC 1. Allenbradley
2. Siemens
3. ABB
9 SCADA 1. Movicon
2. Wonderware
3. Proficy
10 Cables 1. Polycab
2. LAPP
11 Pressure Switch 1. Wika
2. Waree
12 Venturi Valves / Check Valves 1. Aptech
2. Parker
3. SVT
4. TK Fujikin
5. SCT Kitz Japan
6. Carten
13 Exhaust Blowers 1. Alpha Projects Pvt Ltd
2. Pilani Envirotech
3. Flaktwood
4. Transtech
14 Scrubbers - FRP 1. Alpha Projects Pvt Ltd
2. Pilani Envirotech
3. JR Fibreglass
4. Transtech
113
15 Clamps 1. AKI
2. Stauff
16 Strut Channels 1. Divine
2. DKNV
3. RSSIPL
17 Tube Fittings (Double Compression &
Face Seal / VCR)
1. Parker
2. TKFujikin , Japan/Korea,
3. Swagelok
4. Hamlet
18 Process Regulators – Primary 1. Tescom
2. TKFujikin, Japan/Korea
3. APTECH
4. Veriflow
5. Halehamilton
19 Process Regulators – Secondary 1. Tescom
2. TKFujikin, Japan/Korea
3. APTECH
4. Veriflow
5. Halehamilton
114
Annexure F:
DATA OF OUTSIDE DESIGN CONDITION OF GUWAHATI
(ISHRAE HAND BOOK)
DESIGN CONDITION CONSIDERATION FOR HEAT LOAD CALCULATION
OFPROPOSED CLEANROOM AT IIT GUWAHATI.
SUMMER, MONSOON & WINTER
OUTSIDE DESIGN CONDITIONS OF GUWAHATI (As per ISHRAE HAND BOOK)
SEASON DB deg F WB deg F RH % DP deg F
SUMMER 90.0 78.0 59.0 74.0
MONSOON 88.0 82.0 78.0 80.0
WINTER 52.0 47.0 69.0 42.0
115
Annexure G: Electrical Load List
Table G.1: Tentative Electrical Loads of Individual Tools for designing wall panel cutouts
ISO-5
Sl.
No Tag
Instrument
Name Length and Width Height
UPS Number of Sockets and Rating
KVA Phase
1 I-1
EBL
4.5m x 4.5m (EQUIP)
2.8m
10
+
5
1 Ø
1 Phase+E+N
63 Amps MCB FOR 10KVA 1
32 Amps MCB FOR 5KVA
UPS 1
32 Amps 1Ph MCB FOR
Equipment 2
15/5 Amps on ups 5
15/5 Amps on raw 5
6 Amp on row (Grounding
resistance should be less
than 100 Ohm)
2
2 I-2
MW UA:-1.5m*1.7m 0.7m 5 1 Ø
1 Phase+E+N
32 Amps MCB FOR 5KVA
UPS 1
32Amps ups 2
15/5 Amps ups 4
15/5 Amps raw 3
3 I-3
DSMA
1.57m* 2.7m
5 1 Ø
1 Phase+E+N
32A MCB FOR 5KVA UPS- 1
32 Amps ups 1
32 Amps raw 2
15/5Amps raw 5
116
15/5 Amps ups 3
IS0-6
1 D-1
PECVD
UA:2.8m*2.7m
1.2m(h) 10
3Ø,
60
kW
3 Ph, 5wire+N+E
TPN 63 Amps MCCB 2
32 Amp ups 2
15/5 Amps ups 4
15/5 Amps ups 4
2 D-6
RF-MS
UA:3m(l)*2.2m(h) 1.8m(h) 10 3 Ø
3 Ph, 5wire+N+E
3 Phase 32 Amps 1
TPN 100 Amp MCCB 1
32 Amps 4
1ph 10 Amps 5
3 D-7
RIE
UA:1m*1m *1.2m(h) 10 3Ø
3 Ph, 5wire+N+E
TPN 63 Amps MCCB 2
32 Amp 2
15 Amps 4
10 Amps 3
4
D-
7A
EBM
1.4m(l)*1.4m(w)*
1.96m(h)
UA:2.9m(l)*3.2m(w)
*3m(h)
6 1 Ø
1Phase,3
wire(3core,6sqmm flexible)
6kw
32Amp 2pole circuit
breaker 1
32 Amp 2
15 Amp 3
5
D-2
The Eva
I-8 combined
6
3 Ø
3phase+E+N,(5core,4sqmm
flexible)
25A,3pole circuit breaker 1
25 Amp 2
15Amp 3
117
6 D-9
ESD UA; 1.5m*2m
2.2 m 3 1 Ø
1phase+E+N
1Ph 15/5 Amp (UPS) 4
1Ph 15/5 Amp (Raw) 4
7 D-8
CEC UA:1.8m*1.5m 0.5m 3 1 Ø
1phase+E+N
1Ph 15/5 Amp (UPS) 3
1Ph 15/5 Amp (Raw) 4
8
D-
10
LMM UA:2m*1.5m 0.5m 3 1 Ø
1phase+E+N
1Ph 15/5 Amp (UPS) 3
1Ph 15/5 Amp (Raw) 4
9 D-5
ODF UA 3.6 m x 2m 2.5 m 10
3 Ø,
70
kW
3 Ph, 5wire+N+E
1 TPN 150 Amps MCCB 1
32 Amps 6
15 Amps 4
10 D-3
WB UA (2m*1.5m) 0.5m 3 1 Ø
1phase+E+N
3 Ph 15/5 Amp (UPS) 3
3 Ph 15/5 Amp (Raw)
11 D-4
WB UA (2m*1.5m) 0.5m 3 1 Ø
1phase+E+N
3 Ph 15/5 Amp (UPS) 3
3 Ph 15/5 Amp (Raw)
118
Annexure H.
Form for Technical Bid Submittal
General Submittals
The vendor must provide the following details, along with any other documents considered relevant to
the proposal, with the cover letter of the bid:
[1] Audited financial statements of the balance sheet, profit/loss account for previous three financial
years (2012-13, 2013-14 and 2014-15) duly attested by Chartered Accountant.
[2] Latest Income Tax Clearance Certificate
[3] A client list along with the contact details for the successfully completed projects as well as any
project(s) being done presently.
[4] Experience certificate/ work order /completion report in support of satisfaction of eligibility
criterion C.1.3, along with client references (contact person and address, email/contact number)
[5] List of the following personnel in support of satisfaction of eligibility criterion, including the
Designation, Name of the Person and Total Years of Experience at the current firm:
Head, Execution
Head, Design -Technical
Project manager -Technical
Manager, Quality
Project Engineers - Execution
Safety Engineer
Site Supervisor & Technicians
Validation Engineers
Documentation Engineer
Service Engineer
[6] Details of sub-contractors/service providers, if any, as mentioned in Section I, clause (VII)
119
Technical Submittals
The vendor must provide the following documents/drawings/information along with the technical bid:
[1] Site Master Plan/Concept design drawing showing the layout of cleanroom area, HVAC
blocks, Gas yard and utility services blocks.
[2] Detailed cleanroom facility Layout drawing.
[3] Cleanroom layout with services and utility distribution network marked
[4] Complete cleanroom design details (Heat load calculations etc.).
[5] Cleanroom material specifications, viz. filters, flooring, panels, ceiling grids etc.
[6] P&I drawings for all services and utilities.
[7] An item-wise compliance statement indicating clearly any deviations against specifications,
make etc.
[8] Copy of Un-Priced commercial bid.
[9] PERT chart.
Other Technical Submittals:
The bidders shall furnish two (2) copies of the proposal containing following
documents/drawings/information along with the Technical bid and any other information as required in
the Tender document or any other Document/information considered relevant to this project by the
Contractor/vendor, but not limited to, the following information:
[1] Conceptual Cleanroom design details with Heat load calculations etc.
[2] Conceptual design layout drawing showing the floor layout plan of Cleanroom areas, HVAC
Systems, Utilities, facilities& Gas yard services.
[3] Detailed Cleanroom Layout drawing indicating the details of Cleanroom internal Fabrics like
Wall panels, Doors, Emergency Doors, view panels & other related Cleanroom Components.
[4] Schematic drawings showing installation arrangement(s), construction details,
interconnections, material of construction for all systems/items covered under the RFP.
[5] Detailed Reflected Ceiling Plan showing FFUs, Light Fixtures, and Ceiling Blanks etc.
[6] Cleanroom layout with utility distribution network& other facilities clearly indicated on the
drawing.
120
[7] Air Handling System, Dehumidifiers, humidifiers, precooling coils, & Air Management
concept design drawing etc. Air Management, Air balancing systems, Differential Pressures for
each room, Tool Hook-up etc.
[8] Cleanroom material specifications of critical Components like FFUs, perforated access
flooring, Wall panels, doors, Ceiling grid, ceiling panels, tear drop light fixtures, accessories
etc.
[9] P&I drawings for all Utilities & facilities etc.
[10] Power Requirements of the Proposal.
[11] Estimated Bill of Material of all major items &Un-Priced commercial bid.
[12] Details and catalogue cuts of products and materials used in basis of design Technical write
up on installation / erection / commissioning procedures, quality check procedures etc.
[13] Project schedule incorporating PERT & CPM Chart clearly indicating the sequence of
different activities in conjunction with time of the Activity.
[14] An item wise compliance statement indicating clearly any deviations against specifications &
makes etc. mentioned in the RFP.
[15] Any other technical detail needed for evaluation of the bid.
121
Vendor Equipment Makes Check List for HVAC & Cleanroom
The Makes Considered shall be as per the list of Preferred Makes mentioned in Annexure E.
EQUIPMENT DETAILS MAKES CONSIDERED by Tenderer
Air cooled Chiller units
Chiller Compressors
Chiller Motors
Chilled water pumps
Chilled Water Pipes Class C
Globe Valve/Gate Valve/Butterfly Valve /Check
valve/
3 Way Control/Mixing Valve
Balancing Valves/ flow Measuring devices
Water flow Switch
Air handling Units
AHU Fan blower
Motors for AHU
Starter
Fire Dampers
Ducting – GI Sheets
Duct Insulation
Damper Actuators
Grilles/Diffusers/VCD/Ducting fittings
FFM with ULPA filters U-15 & HEPA Filters H-14,
HEPA filters H – 11, with 95 % efficiency
Air shower
Air Curtain
Pass Box
122
Garment cubicle
Shoe Racks
Aluminium Honey Comb Wall/Ceiling system,
Heavy duty Aluminium T ceiling grid, vision
panels, Doors, Emergency Doors, Door Closures
etc (internal Fabrics for Cleanroom)
Wall & Ceiling Cladding/False ceiling Panel in
Unclassified Areas 25mm /50mm thick
Yellow films for glazed surfaces in
Photolithography lab
Clean room Raised Flooring & Pedestals
Homogeneous Vinyl Flooring for Unclassified
Areas
Tear Drop Light Fixtures
Cleanroom Flat Diffuser Lights
Flat Light Fixtures in Unclassified Areas
RH and temperature indicator
Magnehelic gauge
Pressure gauges
Flexible duct
Pre filter and Fine filter
Thermostats/Humidistat
DEHUMIDIFIERS
Pan type humidifier
Electrical Strip Heaters
Temperature/RH/Pressure Sensors
BMS & access control
123
Switch Trunking
Thermostat & Humidistat
Electrical LT Panels
Air Circuit Breaker & Bus Couplers
MCCB
MCB’s
Power/Control Contacts, Over load Relays,
Timers, etc.
Fuses
Energy Meters
Power Cables/Control Cables/Wires etc.
Electrical Conduits
Switches & Sockets
Cleanroom Intercom
Air Compressors
Air Compressor piping SS 304 Non EP
House Vacuum
Exhaust System
Exhaust Ducting UPVC with FRP lining
Process Vacuum
Process Vacuum Piping – SS 304
Dry Scrubber
Wet Scrubber
124
Tenderer Check list for makes in Utilities & Facilities
Description if System Makes Considered by Tenderer
DI Water Systems
Compressed Dry Air
Air Compressor piping SS
304 Non EP
Wet Extraction System.
Dry Extraction System.
General Process Extraction
System.
House Vacuum
BMS, Access control
Effluent Drain
DG set
UPS
Process Chiller
PLC & SCADA
CONTROLLERS
Fire detection & Suppression
125
Vendor's Check list of Material & Makes for Gases
[1] Material of Construction Matrix
Description of Material Material of Construction offered by Vendor
Corrosive Gases – Cl2, HBr etc.,
Flammable Gases - Hydrogen,
Methane, Propane, Butane, Ethylene
etc.,
Pyrophoric & Toxic Gases – Arsine,
Phosphine, Diborane etc.,
Inert Gases - Nitrogen, Argon,
Helium etc.,
Compressed Dry Air
Exhaust for Gas Cabinet, VMB, Tool
Process Cooling Water
[2] List of approved OEM’s for Various Components, equipments required for Bulk & Process
Gases considered by Vendor
Description of Components /
Equipment
Vendor's Make List
Diaphragm Valve with VCR end
or Tube ends
Ball Valve with OD ends or
Double compression ends
Seamless and Coaxial Tubing
SS316L Electro polished and
Bright Annealed
126
Gas Cabinets
Valve Manifold Box – VMB
Valve Manifold Panel - VMP
Gas Supply Panels
Gas Change Over Manifolds
Gas Leak Detectors
Gas Abatement
PLC
SCADA
Cables
Pressure Switch
Venturi Valves / Check Valves
Exhaust Blowers
Scrubbers - FRP
Clamps
Strut Channels
Tube Fittings (Double
Compression & Face Seal / VCR)
Process Regulators – Primary
Process Regulators – Secondary
127
Annexure I.
Form for Price Bid Submission
This is a provisional model BoQ format to be used as a guideline. Providing the detailed description of
items to be supplied, installed, etc. will be the vendor’s responsibility. The vendors should prepare their
own detailed Bill of Quantities based on their assessment of the work as per the requirements detailed in
the RFP. The final form for Price Bid Submission will be uploaded on the following website after the
pre-bid meeting : http://www.iitg.ernet.in/nano/CENTDi/advt-RFP.html
128
CLEANROOM FABRICS,FINISHES
Sl.
No. Description Unit Qty
Offered Item Make
Supply Erection Total
supply & Erection
unit rate Amount Unit rate
Amount Total
supply & Erection
Cleanroom Fabrics
1 MODULAR WALL PANELS for Cleanroom
classified areas
For Photolithography Lab: Supply & Installation
of NON-PROGRESSIVE studless wall system
modular wall panels (without silicon sealant joints)
Total thickness of the panel 44/50mm thick,
Aluminium Honeycomb panel with Aluminium
skin sheet of minimum 0.8mm thickness on both
sides The wall panels are roll coated and
compatible to Class 100 cleanroom
Conductivity106-109ohms-cms Static Dissipative
panels & will be Zero out gassing, with all
accessories as per specification Complete
For Diffusion Lab: Supply & Installation of
NON-PROGRESSIVE studless wall system
modular wall panels (without silicon sealant joints)
Total thickness of the panel 44/50mm thick, GI
PUF with thickness --- mm The wall panels are roll
coated and compatible to Class 1000 cleanroom
Conductivity-- ohm-cm Static Dissipative panels &
will be Zero out gassing, with all accessories as per
specification Complete
2 HEAVY DUTY WALKABLE CEILING GRID
for Cleanroom areas
Supply & Installation of HEAVY DUTY
WALKABLE T-Grid Ceiling Systems for all areas
Ceiling System (56 mm T-width) Walkable
Ceiling System (gasket type ceiling) 1200mm x
1200mm hanging configuration, 56mm wide
aluminum extrusion, aluminum extruded cross
connector with hammer head bolts & nuts, M8 bolt
and matching square hanger and other standard
accessories complete as per Specificaion, silicone
sealant, sealing cutout and trim, any other
accessories.
3 CLEANROOM CEILING BLANK PANEL
classified areas
129
Supply & Installation of 50mm thick HEAVY
DUTY WALKABLE Al. Honeycomb Ceiling
Blank Panel of NOMINAL dimension 1200 mm x
600mm x 45 mm/50 mm thick, using 45/50mm
thick aluminum honeycomb core laminated with
‘designer white’ finished with 0.5mm/0.6 mm thick
STEEL skin on both sides, static dissipative
finished & complete as per specification
4
FFU MODULES approximate sizes 1200 mm ×
600 mm × 310 mm, with H-14 FILTERS of size
1200mm x 600mm x 152mm for photolitho lab,
Diffusion Lab,Air Lock & Changing Room
Supply & Installation of FFU modules
approximate sizes Size: 1200 mm × 600 mm ×
310 mm, with H-14 HEPA (1200mm x 600mm x
152mm) for photolitho lab, Diffusion Lab,Air Lock
& Changing Room having effeciency of 99.995%
down to 0.3 micron equivalent to EN22 made out
of Galvanized AL-Zn Alloy,having nominal flow
rate of 650 cfm to 700 cfm, pre-filters complete as
per Specification
5 Surface Finish of Negative Pressurized Plenum
Supply & Installation: The inner surface of the true
ceiling & wall surface above false ceiling (negative
pressurized plenum) shall be provided with
cladding of 25 mm /50 mm thick cleanroom
compatible cladding material having PUF as infill
material, as per Specification
6 CLEANROOM DOORS classified areas
Supply of Cleaneroom compitable Aluminium
Manual/hydraulic Swing Doors c/w standard
ironmongery: SUS Lever Handle on both sides of
door with mortise lockset, SUS Butt Hinge, Door
closer and locking astragal for (astragal for double
leaves door with one piece of door closer only).
The door is ‘designer white’ finished 45mm thick
and 101.5mm wide aluminium frame (6063 alloy,
T-5 temper door frame) with aluminium
honeycomb core panel. Including Door Frame and
half view door leaf using 6mm thick clear
Complete as per Specification
130
Double door :size : 1200mm x 2100mm
Single leaf door :Size 900 x 2100mm
Emergency door Double leaf door :Size 2500 (w)
x 3000 (h) mm including panic bar
Emergency door Double leaf door :Size 2200 (w)
x 3000 (h) mm including panic bar
7 CUTOUT in Wall/Ceiling panel
Suitable factory made cutouts wherever required
shall be provided in the wall/ceiling panels as per
Specification
8 CLEANROOM WINDOWS/ VIEW PANELS
Supply of Cleanroom windows/ vision Panels of
flush double glazed fixed to the partitiion panels
for the required sizes and quantity (Tempered
Glass thickness minimum 6 mm) Window using
6mm thick TEMPERED GLASS glaze Extruded
aluminum midline (V-shape) frame in powder
baked ‘designer white’ finished and gasket,
including 6mm thick tempered glass glaze, as per
Specification
Size : 1000mm x 1000mm ( other than Yellow
room)
9 UV Filtered Yellow film (to be imported ) Size:
1100 mm x 1000 mm
Supply & Installation of UV Filtered Yellow film
(to be imported ) Size: 1100 mm x 1000 mm to be
covered on the glazed surfaces with suitable
adhesive materials as per Specification
10 COVING
Supply & Installation Aluminium / PVC coving R
50, as per Specification
Supply & Installation of Aluminium / PVC 3D
Corner covings, as per Specification
11 LIGHT WITH LIGHT FIXTURES For
Photolithography Lab :
131
Supply & Installation of Light fixtures of Tear
Drop type YELLOW light fixtures suitable for
housing in the HEAVY DUTY Aluminium False
Ceiling GRID. Yellow Tear Drop lights shall be
provided for Main Assembly with intensity level
around 250 LUX ( to be imported). Overall length
1200 mm T5 type , complete as per Specification
12 LIGHT WITH LIGHT FIXTURES FOR
Diffusion Lab, Air Lock, Changing Room
Supply & Installation of WHITE LED Light
fixtures suitable for housing in the HEAVY DUTY
Aluminium False Ceiling GRID, with LUX level
around 500 - 600 ,Surface mount type of size
600mm X 1200mm complete as per Specification
13 FLOORING for photolithography and diffusion
labs only
Supply & Installation Aluminium die cast
perforated tile panels of size 600 mm x 600 mm
of minimum 44 mm /50 mm thickness with
minimum 15 – 22 % free opening; Minimum 2 mm
thick Antistatic Vinyl finish along with Solid steel
Pedestals of height 600 mm with provision for
height adjustment up to ± 20 mm.Complete as per
Specification
Supply & Installation of Aluminium die cast Solid
tile panels of size 600 mm x 600 mm of minimum
44 mm /50 mm thickness; Minimum 2 mm thick
Antistatic Vinyl finish along with Solid steel
Pedestals of height 600 mm with provision for
height adjustment up to ± 20 mm.Complete as per
Specification
14 SOLID STEEL PEDESTALS
Height: 600 mm with provision for height
adjustment up to ± 20 mm, as per Specification
RCC platform beneath heavy-weight instruments
(eg:-Oxidation Diffusion Furnace)
15 ANTISTATIC VINYL FLOORING for Air
Lock & Changing Areas
132
Supply & Insallation of Antistatic vinyl floor sheet
2mm thick 600mmX600mm Tiles and surface
resistivity of 10^4 - 10^7 ohm/sec with welded
joints for monolithic construction. Before fixing
the tiles / sheet the filler material has to be applied
for self levelling compound on cement flooring by
the vendor complete as per Specicfication
16 PAINTING below the raised access floor
surfaces
Supply & Installation of Cleanroom-grade paint of
good quality with one layer of putty and two layers
of self-levelling 2 mm thick low VOC epoxy paint
shall be provided on the existing civil flooring and
side walls beneath the raised access floor Complete
as per Specification
17 STRUCTURAL WORK for hooking the false
ceiling grid, HEPA etc
Supply & installation of structural work for
hooking false ceiling, HEPA modules, light
fixtures etc using Suspension structural steel made
of suitable channels & I sections using heavy duty
Unistruts etc
18 DYNAMIC TRANSFER HATCH / PASS BOX
Supply & Installation of Dynamic pass box made
out of GI powder coated
unit fitted with lighting, electronic inter locks, SS
bottom surface with pencil coving. With suitable
Aluminium supports for resting on the Floor.
Internal dimension : 600mm W x 600mm D x
600mm H as per Specification
CLEANROOM ACCESSORIES
19 AIR SHOWER
133
Supply & Installation of Air shower working space
(inside Dimension) should not be less than 800mm
(W) x900 mm (D) x 2000 mm(H), made out of
CRCA Powder Coated material with adjustable
type SS 304 Nozzles, have high static Air
Handling System The air shower shall be provided
with per filter of HDPE, Washable type with
efficiency 90% down to 10 micron and HEPA filter
with efficiency of 99.97% down to 0.3 microns
etc,Complete as specified.
20 AIR LOCK
21 POWER SOCKETS
as per specifications
22 GARMENT STORAGE LOCKER
Supply & installation of Garment Storage Locker
withVertical Down flow type, modular
construction made out of 18 SWG GI duly Powder
coated. Approximate Dimention : Overall Size-
1000 mm (w) x 500 mm (d) x 1950 mm (h),
Working Size: 875 mm (w) x 400 mm (d) x 1300
mm (h) with door and view window including
Blower,Motor & stages of Filters as specified
Complete
23 GLOVE APPLICATOR AND REMOVER
Manual
24 GOWNING MIRROR
2000 mm height x 1500 mm width
25 CROSS OVER BENCH - STAINLESS STEEL
Supply and Installation of Cross Over Bench, made
out of SS 304 with 04 Grade Finish. Should have
600 mm (H), 300 mm (W) and 2000 mm (L).
26 SHOE RACKS
134
Supply & installation of Shoe racks made out of SS
304 with 04 Grade Finish.• Overall size: 450 mm
(W), 600 mm (L), 600 mm (H),
27 SHOE COVER APPLICATOR AND
REMOVER
Manual
28 EPOXY PAINTING
one layer of putty and two layers of self-levelling 2
mm thick epoxy paints shall be provided on the
existing civil flooring and side walls beneath the
raised access floor, as per Specification
29 MAGNEHALIC GAUGE ROOM FITTED
Supply & Installation of Magnahalic Guage with
SS box , pressure range 0 to 10mm .
30 TEMP & RH INDICATOR
Supply & Installation of cleanroom compatible
Digital Temperature and RH indicator range 0 to
50 deg. C and 0 to 90% RH, with 4" Digital
Display
31 EMERGENCY SHOWERS: Photolithography
and Diffusion labs
Supply & Installation of Emergency drench shower
with eyewash AS PER SPECIFICATION
OPTIONAL ITEMS
32
DISPENSERS for Shoe covers, gloves and Safety
Glass Holders
135
UNCLASSIFIED AREA FABRICS & FINISHES
Sl. No.
Description
Unit Qty Offered Item
Make
Supply Erection Total supply
& Erection
unit rate Amount Unit
rate Amount
Total supply
& Erection
CLEANROOM CORRIDORS,LOCKER LAUNDRY,TOXIC GAS,UPS & Electrical room, Maintenance office & BMS
1 WALL SURFACES for unclassified Areas
Epoxy painting: one layer of putty and two
layers of self-levelling, 2 mm thick epoxy
paint as per Specification
2 DOORS
Supply of Cleaneroom compitable Aluminium
Manual Swing Doors c/w
standard ironmongery: SUS Lever Handle on
both sides of door with mortise lockset, SUS
Butt Hinge, Door closer and locking astragal
for (astragal for double leaves door with one
piece of door closer only). The door is
‘designer white’ finished 45mm thick and
101.5mm wide aluminum frame, as per
Specification
3 FALSE CEILING GRID SYSTEM for
Unclassified Areas
Supply & Installation of Walkable, rigid,
inverted T-grid made out of heavy-duty
anodized aluminium extruded alloy, suitable
for accommodating individual Module of
Supply & return Air Diffusers, light fixture,
blank panels etc., with virgin neoprene or
PVC gasket.with all Accessories Complete as
per Specification
4 FALSE CEILING BLANK PANELS for
unclassified areas
Supply & Installation Double skin, 50 mm
thick panel PUF core (minimum density
38kg/m3), powder coated steel; minimum
thickness: 0.8 mm; coating: hot dip
galvanized zinc (minimum amount 180 g/m2),
Walkable type Ceiling Panels of approximae
size 600 x 1200 mm. Complete as per
Specification
136
5 LIGHT
Supply & Installation of Light fixtures
suitable for housing in the HEAVY DUTY
Aluminium False Ceiling GRID, with LUX
level around 500 - 600 ,Surface mount type of
size 600mm X 1200mm complete as per
Specification
6 COVING
Supply & Installation Aluminium / PVC
coving R 50,as per Specification
Supplt & Installation of Aluminium / PVC
3D Corner covings,as per Specification
7 LIGHT FIXTURES FOR Corridors only
Supply & Installation of Light fixtures
suitable for housing in the HEAVY DUTY
Aluminium False Ceiling GRID, with LUX
level around 500 - 600 ,Surface mount type of
size 600mm X 1200mm complete as per
Specification
8 FLOORING for unclassified areas
Flexible, homogenous, color-matched vinyl
flooring/skirting to be laid on the cement-
concrete flooring after layering approved
primer and self-levelling compound.
Dimensions: min. 2 mm thick sheets with
min. width of 1.5 m.
9 POWER SOCKETS
AS per the equipment in that area.
10
Motorized SHOE CLEANER
Optional accessories
11
CLADDING of the Wall Surface of the
Locker Room & Service Corridors Areas:
137
Supply & Installation : Cladding with
cleanroom compatible wall panels of
Double skin, 50 mm thick panel, with PUF
core (minimum density 38 kg/m3). With
powder coated steel; minimum thickness:
0.8 mm; coating: hot dip galvanized zinc
(minimum amount 180 g/m2) & Panel in
suitable for continuous lamination.
138
HVAC SYSTEM FOR CLEANROOM
Sl. No. Description Unit Qty Offered
makes
Supply (Rs.) Erection (Rs.) Total
Supply &
Erection Unit
Rate Amount
Unit
Rate Amount
1 AIR HANDLING UNITS
Supply, installation, testing and commissioning of Modular type floor mounted
Double Skin Air Handling Units with Thermal break Profile, complete in all
respect (as per specifications) having different capacities with sufficient Static
pressure( around 130 mm) & shall Comprise of Mixing chamber section with
supply and return air dampers, Cooling coil, section, mist eliminator, Blower
section with plug fan & TEFC sguirrel cage motor with provision for VFD, Filter
sections, fresh air system, have provision to Connect Fresh air system, Air
Bleed. Mixing chambers & Dehumidifiers etc Complete as per specification
i) AHU for PHOTO LITHO LAB
ii) AHU for DIFFUSION LAB,AIR LOCK & CHANGING ROOM
iii) AHU for Service Corridors, Locker Room, Laundry, Sorting & Control
room
2 DUCTABLE SPLIT A/C SYSTEM for UPS & Electrical Room
3 DUCTABLE SPLIT A/C SYSTEM for BMS & Maintanance Office at Utility
Building
4 VENTILATION SYSTEM ( once through system) for Toxic Gas System storage
Room
5 PRE COOLING COIL for FRESH AIR System of PHOTO
LITHOGRAPHY LAB
139
Supply & Installation of FRESH AIR Pre Cooling COIL System for
PHOTO LITHOGRAPHY LAB of suitable cfm Capacity with MODULAR
BOXING made out of Double Skin
Modular Boxing shall comprise of Fresh Air cutout with damper, filter section,
Coil Section with Chilled water coil of Capacity of suitable capacity withPVC
Moisture Eliminator and SS drain pan. with suitable VCD,Rough Filters & with
Bird Cowl & mesh etc. as per specification
6 PRE COOLING COIL for FRESH AIR System of Diffusion LAB, Air Lock
& Changing Room
Supply & Installation of FRESH AIR Pre Cooling COIL System for
PHOTO LITHOGRAPHY LAB of suitable cfm Capacity with MODULAR
BOXING made out of Double Skin
Modular Boxing shall comprise of Fresh Air cutout with damper, filter section,
Coil Section with Chilled water coil of Capacity of suitable capacity with PVC
Moisture Eliminator and SS drain pan. with suitable VCD, Rough Filters & with
Bird Cowl & mesh etc. as per specification
1
7 DEHUMIDIFIER FOR PHOTOLITHOLITHOGRAPHY LAB
Dessicant Type dehumdifier, non cyclic, rotary type, shall be able to dry the air
by process of continuous physical adsorption to control humidity. The dessicants
used shall be non toxic, non flammable having maxium moisture removal
capacity of suitable throughput ( cfm) as per specification
No 1
8 DEHUMIDIFIER FOR DIFFUSION LAB
Dessicant Type dehumdifier, non cyclic, rotary type, shall be able to dry the air
by process of continuous physical adsorption to control humidity. The dessicants
used shall be non toxic, non flammable having maximum moisture removal
capacity of suitable throughput ( cfm) as per specification
9 Electric Strip/ Duct Heaters for AHU
Electric Tubular SS Heaters of suitable capacity for each AHU, duly insulated in
ducts Complete with mounting arrangement as per specification
10 DUCTING
140
Factory fabricated/ machine-fabricated at site GI Ducting with zinc deposition of
180gms/sqm as per SMACNA with all required accessories & fittings as per
specification
20 G
22 G
24 G
11 DUCT INSULATION
Supply & Return Air Duct Thermal Insulation with Aluminum foil faced
self adhesive, Closed cell, Nitrile Rubber Insulation with proper sealing of
joints
Supply Air Duct 19 mm thick
Return Air Duct 13 mm thick
12 DUCT SUPPORTS AND HANGERS
Rectangular duct shall be supported from roof/perlins/truss/ceiling using hanger
rods. Ducts shall rest on supporting MS slotted angle or channel. The supporting
angle or channel shall be supported by MS rods with threads.as per specification
13 DUCT TRANSFORMATION
shall be made for easy and noiseless flow of air.
14 DUCT INSTALLATION / STRUCTURAL WORK
141
Supply & Installation of structural work for Supporting the Ducting from AHUs
to Parent Building, made out of structural steel with suitable channels & I
sections & complete
15 CHILLERS FOR HVAC
Air Cooled Screw Chillers with R-134a Refrigerant / suitable Refrigerant ( but
not R22) for supplying chilled water at 5 deg C selected for following parameters
as per specification complete & suitable Capacity ( one working & one 100 %
Stand by) as per specification
--------- TR Working
--------- TR Stand by
16 PUMPS FOR HVAC
Supply, Installation , Testing & Commissioning of End Suction Pumps for
CHILLED WATER CIRCULATION . The Pumps will be complete with
TEFC Motor , base plates, couplings , coupling Guard with Base frame etc The
Pumps shall be with Mechanical seal with suitable Capacity ( GPM) having
sufficient Head. (one working 7 one 100 % stand by) as per specification
--------- GPM & Head in M Capacity Working
--------- GPM & Head in M Capacity Working
17 PIPINGS
Supply , Installation, testing & Commissioning of MS Pipes of following sizes
(upto150mm 'C'class ,above 150mm NB 6mm wall thickness)- these includes
piping for high side as well as manifolds for Air Handlers as per
specification
150mm NB
142
125 mm NB
100mm NB
80mm NB
65mm NB
50mm NB
18 SUPPLY & INSTALLATION OF NITRILE RUBBER PIPE sections of
thickness 25 mm Thickness for the following pipes sizes as per specification
150mm NB
125 mm NB
100mm NB
80mm NB
65mm NB
50mm NB
19 SUPPLY & INSTALLATION OF 24 G ALUMINIUM CLADDING ON
PIPE INSULATION as per specification
150mm NB
125 mm NB
100mm NB
80mm NB
65mm NB
50mm NB
143
20 BUTTERFLY VALVES as per specification
Supply , Installation, testing & Commissioning of Butterfly Valve as per
Following Sizes. Butterfly Valves above 200 NB will be Gear Operated.
150mm NB
125mm NB
100mm NB
80mm NB
65mm NB
50mm NB
21 Y' TYPE STRAINER
Supply,Installation, testing & Commissioning of 'Y' Type Strainer with SS Mesh
as per Following Sizes,
150mm NB
125mm NB
80mm NB
65mm NB
50mm NB
22 NON RETURN VALVE
Supply,Installation, testing & Commissioning of NRV as per Following Sizes,
125mm NB
144
23 BALANCING VALVE
Supply , Installation, testing & Commissioning of Balancing Valve as per
Following Sizes.
125mm NB
100mm NB
80mm NB
65mm NB
50mm NB
24 3-WAY MODULATING VALVE as per specification
Supply, Installation and Testing of 3-Way Proportionating control valve suitable
for following pipe sizes:
80mm NB
65mm NB
50mm NB
40mm NB
25mm NB
25 DRAIN PIPING
Providing & Fixing of AHU condensate Drain Piping in G.I (B class) with 19
mm thick nitrile insulation.
80 mm NB
26 DIAL TYPE PRESSURE GAUGE
145
Supply, Installation of Dial Type Pressure Gauge with ball valve. Pressure gage
should be directly connected in water line along with ball valve as isolator valve.
27 DIAL TYPE TEMPERATURE GAUGE
Supply, Installation of Dial Type temperature Gauge with thermowell.
28 WATER FLOW SWITCHES
Supply & Installation of Water Flow Switches
29 FLEXIBLE CONNECTION ( Bellows)
Supply & Installation of Bellows for Connecting Chillers & Pumps
30 AUTO AIR VENT WITH BALL VALVE
Supply, Installation of Auto Air vent with ball valves for auto purging of air from
system.
31 EXPANSION TANKS
Supply, installation , Testing and Commissioning of Closed Pressurised
Expansion tanks of ---- Ltrs capacity complete with air seperator, pressurisation
unit with standby pump arrangement & all accessories..
32 FIRE DAMPERS as per specification
Supply & Installation of Fire Dampers
33 VOLUME CONTROL DAMPERS for Supply & RA Ducts as per
specification
146
Supply & Installation of VOLUME CONTROL DAMPERS in DUCTS
34 VOLUME CONTROL DAMPERS for RA Risers as per specification
Supply & Installation of VOLUME CONTROL DAMPERS for RA Risers
35 RETURN AIR RISERS 22 G, Galvanized Steel Sheet(GSS) as per
specification
Supply & Installation of Return Air raisers made out of 22G GSS with proper
support structure etc
36 INSULATION FOR FABRICATED RETURN AIR RISER as per
specification
Supply & Installation of Thermal Insulation 9 mm thick with Aluminum foil
faced Close cell Nitrile Rubber Insulation with proper sealing of joints to RA
Risers.
36 RETURN AIR GRILL FOR RA RISERS with Volume Control dampers, Al
anodized as per specification
Supply & Installation of Return air Grills Linear type along with suitable Volume
Control dampers, made out of Aluminium anodized material
37 FLEXIBLE DUCT, 200 mm dia as per specification
Supply & Installation of Flexible duct, 200mm dia
38 HUMIDITY STAT
Supply & Installation of Humidity Stat
39 THERMOSTAT
147
Supply & Installation of Thermostat
40 MAGNEHALIC GAUGE AHU FITTED
Supply & Installation of Magnehelic Gauge with CRCA box , pressure range 0 to
50mm
41 DIGITAL TEMPERATURE AND RH INDICATOR
The digital temperature and RH indicator shall be as per specification
Central Utilities
Sl.
No. Description Unit Qty
Offered
makes
Supply (Rs.) Erection (Rs.) Total
Supply
&
Erection Unit
Rate
Amount
Unit
Rate Amount
1 DIESEL GENERATOR
415V, 3Ph, with 0.8 or better PF, 50Hz mounted on a common base
frame
fuel tank, battery and leads and accessories and have the capability
with autostarting and auto-synchronising
148
2 UPS SYSTEM
415,3phase 4 wire, 50Hz , <65 db with 0-40deg C operating temp.
Double Conversion On-Line UPS
415,3phase 4 wire, 50Hz , <65 db with 0-40deg C operating
temp.Delta Conversion On-Line UPS
3 POWER DISTRIBUTION BOARD for Raw power, Emergency
and critical loads
Supplying of 415V,3phase 50Hz panels with suitable circuit
breaker, relays and indicators as per the Electrical Load. The cost
should also include supply & fixing of steel supporting channels,
grips bolts and all other accessories.
4 FACTORY BUILT DISTRIBUTION BOARDS
Supplying of distribution boards wall mounted
Vertical Type (IP 43 with metal door)
HORIZONTAL TYPE TPN DB (IP 43 with metal door)
5 CABLE TRENCH AND TRAY
perforated tray for lighting and control cable below 200mm
Ladder tray for power cables
6 ELECTRICAL PANELS
Supply & Installation of Electrical panel board & Lighting DB etc.
for HVAC,AHUS, Dehumidifiers, Electrical strip heaters, lighting &
CLEANROOM ACCESSORIES etc. as per specification
7 ELECTRICAL WIRING & CONTROL SWITCHES &
SOCKETS.
149
Supply & Installation of Electrical Wiring, control switches &
sockets for Lighting, HVAC,AHUS, Dehumidifiers, Electrical strip
heaters, & CLEANROOM ACCESSORIES etc, Hazard area
electrical equipment should follow IS 5571. .as per specification
8 PROCESS POWER DISTRIBUTION
Raw Power with DG backup for the cleanroom Bus bar
arrangement for Raw power with sockets of 230V and 415V shall be
provided for each emergency load with suitable MMCB
UPS Power for the cleanroom- Bus bar Trunking arrangement for
Raw power with sockets of 230V and 415V each 4 nos. to be
provided for each critical load with suitable MCCB
9 POWER & CONTROL CABLES
Supply, laying, testing & commissioning of 1.1KV Grade insulated
copper/ aluminium conductor steel armoured power cables (XLPE) .
The rates quoted shall be for laying in trays, cable trenches (indoor
and outdoor), pipes, etc. For buried cables, the excavation work has
to be included for outdoor cable laying maximum voltage drop is
5% with high short circuit capability
10 EARTHING AND LIGHTENING PROTECTION
Earthing as per IS-3043 for lightening as per IS-2309
11 HUMIDITY STAT
Supply & Installation of Humidity Stat
12 THERMOSTAT
150
Supply & Installation of Thermostat
13 BULK GAS & LIQUID Nitrogen Facility
Supply & Installation of Liquid nitrogen Dewas having holding
Capacitiy of 500 litres +/- 10% of Liquid Nitrogen of purity
99.995%- to provide approximately 240 SLPM Gaseous Nitrogen.It
is built with tough and durable Stainless Steel & encompassed with
high performance insulation for maintaining the liquid N2
temperature for longer durations in idle conditions including Liquid
Vaporiser, Safety Relief Valve, Rupture Disc, Differential Pressure
Gauge, Liquid Filling Valve, Economiser Pressure Regulator,
Pressure Building Regulator, Pressure Building Valve and Manual
vent Valve. Includes Additional Castor wheel trolley for easy
movement of Liquid Dewar and Vacuum Insulated Hose for Liquid
filling.The entire system is installed with all necessary
interconnecting piping for Dewars with Evaporator and outlet of the
system shall be provided with Isolation Ball Valve. (note:TWO nos
of Dewars are included)
13.1 Tube Fittings/Connectors SS 316 - 1/4"NPT XOD for pipe
assembly
Supply & Installation of Tube Fittings/Connectors SS 316 -
1/4"NPT XOD
13.2 Face Seal Glands, Nuts, Gaskets - 1/4" for pipes assembly
Supply & Installation of Face Seal Glands, Nuts, Gaskets - 1/4"
13.3 Distribution piping for liquid Nitrogen
Supply & instalation of a suitable (preferably double wall SS306
vacuum sealed) insulated distribution pipeline for Liquid nitrogen
from the storage vessel to the cleanroom. IncludesVacuum insulated
tanks and purifiers for storing and extracting Liquid
Nitrogen.Provision for installation of Phase separator is included.
Includes control panels which can be integrated with the access
control systems
13.4
Automatically Regenerable Nitrogen GAS Purifier – capacity 20
Nm3/hr.
Supply & Installation of Automatically Regenerable Nitrogen GAS
Purifier of capacity to purify Minimum 20 Nm3/hr of Nitrogen gas
151
capable of removing impurities of O2, CO, CO2, H2, H2O, NMHC
to < 1 ppb* Particle. Pressure Drop across the Purifier will not
exceed ~10 psig &Filtration at the outlet of the Purifier will be 0.003
micron.It comprise of Twin adsorption towers to alternate between
purification and regeneration modes for continuous purification.be
Safety Relief valve interlocks for trip / shutdown in eventuality of
temperature rise beyond set point. Purifier skid is compatible to use
230 V, 50 Hz AC Power. The approximate size of Purifier is around
1400 mm (Height) × 450 mm (Depth) × 850 mm (Width).
13.5 Accessories & Feature for Purifier
Supply & Installation of Accessories like Gas Moisture Sensor,Auto
or Manual Bypass to bypass the purifier vessels, Particle Filter with
removal efficiency rating of 0.003 Micron,Inlet/Outlet Pressure
sensor,Inlet Mass Flow Meter ,Inlet and outlet Isolation Valves ,
Electric Gas Preheaters, Hydrogen Blending Station which provides
hydrogen regeneration gas mixture for the purifier,
including Electrical Fault protection ,external emergency
shutdown,Microprocessor PLC with Colour touch Screen, End
Connections of Purifier to match with Feed Inlet FVCR, Purified
Outlet FVCR, Purified Outlet FVCR, Relief Vent FVCR, H2 Inlet
Tube, Pneumatic Air Inlet FNPT etc Complete as per specification
13.6 Nitrogen semi auto Change Over Panel Banks
Supply & Installation of a back-up N2 Supply Semi auto
Changeover Panel to accommodate 2 + 2 cylinders for the purpose
of on online operation manually in the event of Liquid Nitrogen
unavailability or Maintenance shutdown for Liquid N2 system, it
Consists of Ultra High Purity Nitrogen of (99.9999% purity), 2
banks of UHP N2 (2 cylinders in each bank & of 99.9999 % purity)
cylinder manifolds with auto changeover Panels (2 banks).
Total two sets. one set for Process back up & One set for
Exclusively for Purging of Gas cabinet systems.
13.7 For UHP nitrogen line Stainless Steel Seamless tube 316L 1/2"
Supply & installation of of Stainless Steel Seamless 316L
Electropolished tubes - 1/2" dia
13.8
For UHP nitrogen line Stainless Steel Seamless 316L
Electropolished tubes 1/4" dia
Supply & Installation of Stainless Steel Seamless 316L
Electropolished tubes - 1/4" tubes
13.9
For General ( Commercial) nitrogen line Stainless Steel
Seamless 316L Non Electropolished 1" dia for Main header
152
tube
Supply & Installation of Stainless Steel Seamless 316L Non
Electropolished 1" dia for Main header tube for general nitrogen.
13.10
For General ( Commercial) nitrogen line Stainless Steel
Seamless 316L Non Electropolished 1/2" dia
Supply & Installation of Stainless Steel Seamless 316L Non
Electropolished 1/2 " dia tube for general nitrogen.
13.11
For General ( Commercial) nitrogen line Stainless Steel
Seamless 316L Non Electropolished 1/4" dia
Supply & Installation of Stainless Steel Seamless 316L Non
Electropolished 1/4 " dia tube for general nitrogen.
13.12 CDA: COMPRESSED /CLEAN DRY AIR SYSTEM
Supply & Installation of Air-cooled oil injected rotary screw
compressors having capacity 20 CFM free air delivery at a working
pressure of minimum 10 bar at point of use and is driven by motor
having online/offline control. Compressor is for continuous duty,
pre piped, wired and base plate mounted with star-delta starter,
control panel and microprocessor based control system. It includes
air receiver (Accumulator) of suitable capacity at a working
pressureof 12 bar and is equipped with safety valves, water drain
and pressure indicator, complete as per Specification.
There should be two no of systems for lag & lead operations.
Supply & Installation of Accessories like Condensate moisture
separator, automatic condensate solenoid drain valve, sound
attenuating enclosure, quick-latch panels etc complete as per
specification Complete
Supply & Installation of Air Dryer ,Desiccant type: The
compressor is fitted with Desiccant type air dryer for consistent
delivery of dry process air & having a minimum dew point of – 31
°C PDP with all required Accessories Complete
Supply & Installation of Filteration system:Final Filtration level
shall comprise of different stages of filteration including Activated
Carbon Filter as per specification & complete
153
Supply & Installation of CDA piping:The compressed dry air shall
be supplied to the process area through SS304 piping with
accessories like pressure regulators and indicators Isolation valves,
etc., Complete
SS 316 bright dia 1"
SS 316 bright dia 1/2 "
Any other items
13.13 Programme Logic Control System for Gas Management
Supply & Installation of Central Safety PLC (Siemens S7) for
communicating to all field devices, Gas Cabinets, VMB's, Process
Tools, Facility Emergency Shutdown, Building Management
System(BMS) with detailed Cause Effect Logic for all types of
unsafe situations in the facility involving utility equipments supplied
above and from Client supplied Utility equipments with necessary
programming, SMS alert for critical alarms, with web enabled
feature for remote monitoring, support, troubleshoot
13.14 Other requirements for Bulk gases
Supply & Installation of Unistrut Supports- 41X41X2mm for
supporting piping
Supply & Installation of Tube Clamps - SS304 with PP Inserts for
cleanroom use
Supply & Installation of Support Structure for panels & Safety
Equipment
Supply & Installation of Electrical panel for Gas System
Supply & Installation of UPS for Gas System
154
14 PROCESS GASES
14.1 Gas Supply Panels
Supply & Installation of Panels containing pressure Regulators ,
High and low pressure Diaphragm Valve, Pressure Gauges , NRV
along with Vent and N2 Purge / Safety relief valve /Gasket filter
Cylinder Connectors etc, Complete as per specification
14.2 Single Gas Cylinder Gas cabinets
Supply & Installation of Single Cylinder Gas Cabinets having High
Pressure Electropolished pressure Regulator, High and low pressure
Diaphragm Valve,Pressure Gauges along with Venturi wih N2 /N2
Purge / Excess flow switch/High and low pressure PT /Cylinder
Connectors /Gasket filter / HMI with Control panels wih Safety
component like Heat detector/GLD/UVIR Sensors, Sprinkler etc,
Complete as per specification
14.3 Dual Gas Cylinder Gas Cabinets
Supply & Installation of Double Cylinder Gas Cabinets having
High Pressure Electropolished pressure Regulator , High and low
pressure Diaphragm Valve , along with Venturi wih N2 /N2 Purge /
Excess flow switch/High and low pressure PT,Pressure gauges,
Cylinder Connectors /Gasket filter / HMI with Control panels wih
Safety component like Heat detector/GLD/UVIR Sensors Sprinkler
etc Complete as per Specification
14.4 Valve Manifold Boxes
Supply & Installation of Double Cylinder Gas Cabinets having
Low Pressure Electropolished pressure Regulator, low pressure
Diaphragm Valve , along with Venturi wih N2 /N2 Purge / low
pressure PT / pressure Gauges /Gasket filter / HMI with Control
panels wih Safety component like Heat detector/GLD/UVIR Sensors
Sprinkler etc Complete as per Specification.The enclosure is made
of Cold Rolled Steel (min 14 SWG) and designed for fire resistance
for 90 minutes
and enclosure will come with Exhaust Port to meet exhaust flow
rate of 150 CFM.
155
14.5 Valve Manifold Panels
Supply & Installation of VMP containing suitable number of inlet
and outlets sticks, Diaphragm valves /Low pressure Regulator
/pressure Gauges / complete as per Specification
14.6 Semiautomatic Change Over Panel for Nitrogen
Supply and installation of Semiautomatic changeover panel
containing High pressure Changeover Regulator,High pressure
valves /vent /High& low pressure gauges along with SRV complete
( one for back up for process & another exclusively for Gas
Cabinets)
14.7 Gas sticks for Process Nitrogen
Suply & installation of Gas Sticks Gas stick containing SS plate
with Regulator / pressure Gauge and Diaphragm valve etc Complete
as per Specification
14.8 Gas sticks for General Nitrogen
Supply & Installation of Gas sticks containing SS plate with
Regulator / pressure Gauge and Ball valve etc complete as per
Specification
14.9 Point of Use Gas sticks for Process Gases
supply & Installation of Sticks Containing pressure Gaugse/DV/and
Check Valve for Coaxial tubes for Toxic / Flammable gases
14.10 Abatement (Scrubber System )
Supply & Installation of Abatment Scrubber system for Toxic
/Flammable and Pyrophoric Gases consisting of Dry Scrubbing
Purge canisters (Specifically for Gas cabinets and panel Vent Line
) Complete as per Specification
14.11 Gas leak Detectors (Safety System )
Gas leak detectors (GLD ) is based on Electro-Chemical detectors
principle. For toxic gases Cartriges will be provided for Gas
Cabinet and Tools - Coaxial pressure Swtiches, For gases like SiH4
Outer sensor should be provided in the gas cabinets, local valve
156
manifold boxes in the Cleanroom raised access floor void and at the
point of use two gas cabinets should be equipped with secondary
UVIR flame detectors, which will interface with the associated
electro-chemical detector. The toxic/hazardous gas detection system
should have a single-phase supply with UPS backup. Nitrogen
concentration and oxygen depletion monitors should be provided in
the facility, for monitoring through BMS Control Room.
14.12 Coaxial Pressure Switches
Supply & Installation of Coaxial Switches
14.13 SiH4 Outer Sensor
Supply & installation of SiH4 outer Sensor
14.14
Stainless Steel Seamless 316L Electropolished tubes - 1/4"X1/2"
Coaxial for process Gases
Supply & Installation of Stainless Steel Seamless 316L
Electropolished tubes - 1/4"X1/2" Coaxial
14.15
Stainless Steel Seamless 316L Electropolished tubes - 1/4" tubes
for Process Gases
Supply & Installation of Stainless Steel Seamless 316L
Electropolished tubes - 1/4" tubes
14.16 Accessories & hardware for Gas Management System
Supply & installation of Accessories,& hard ware for Supporting
for all Gases and Piping like Unistrut, Tube clamps,Support
Structure for Panels and safety equipments,Pipe clamps for HDPE
and PVDF etc, Complete as per Specification
14.17
Dedicated PLC System for process Gas management, integrated
with SCADA
Supply & Installation of PLC System for Safety in which the
detection principle is based on electrochemical reaction principle
having visual Alarm, Power and Fault lights as well as back lit LCD
with all gas readings and events.It should covers all the Gas
distribution system like Gas cabinet /Panels/VMB etc. Pressure
switches should have communication wih Master PLC.
157
SCADA comprises Gas Leak Detectors for Toxic, Corrosive, and
Flammable gases,Gas leak detectors, PLC Controller,
Communication Protocols ,PLC Housing, Life Safety Controller &
Safety Logic etc
14.18 Any Other items
15 Deionised/ Ultra High Purity (DI / UHP) WATER
15.1
Supply & Installation of DI Water: Ultra-Pure Water generation &
Distribution system having quantity of DI Water required at the
Point of use - Water flow rate is around 30 liters/hr,Resistivity at
25 ºC at point of use is 18.2 Mega Ohm-cm , pressure at the point of
use is around 3 bar,with a tank capacity of around 200 litres
Complete as per specification
15.2
Supply & Installation of Accessories: like Raw water storage
tank to produce the DI Water, Feeding Pump, High pressure Pump,
RO Modules ,Feeding Pump,Mixed Bed unit,Plastic Tank
polypropylene,Ultra filtration Unit , 5 Micron Cartridge Filter,
Activated Carbon Filter, Instruments for the RO Ultraviolet Unit &
PLC based Electronics device including Instruments etc.consist Pr.
Gauges, Rotameter, Conductivity meter digital Type PLC base
controller shall include automatic flushing on the set timing,
Recirculation, Level controller, Conductivity Controller etc,
Complete as per specification
158
15.3
Supply & Installation of Distribution Piping: distributed by high
purity PVDF piping of required sizes for the ring mail and
similarly for the point of use with required accessories like
connectors, bends, Tees, Shut off valves of required sizes Complete
as per specification:
i) high purity PVDF piping dia 1"
ii) high purity PVDF piping dia 1/2"
15.4 Any other items
18 HOUSE VACUUM
18.1
Supply & Installation of House Vacuum (Cleaning) System of
Capacity: 1100 CUM/hour air flow rate, Max vacuum 4400 mm of
H2O, for Continues duty Vac rate 2900 mm of H2O, Industrial
Heavy Duty type.Vacuum unit,Filter chamber, Dust collection
Container, Control board etc Complete
18.2
Supply & Installation of Accessories like Iron Reducer, Super flex
PU Antistatic Hose , Rubber connections,Flexible hose,Hand curved
tube,PVC adaptor, Extension tube, Floor dust tool, Floor wet tool,
Flat lance,Round brush etc
18.3
Supply & Instalation of Vacuum Distribution pipelines with
Cleaning Ports connect to the Central Vacuum System. Piping shall
be white PVC with SS 304 connecting adopter fixed on the
cleanroom wall panels with spring loaded self-closing covers,
Flexible hose of 8 M length & 4 nos.
159
Piping white PVC dia 1"
Piping white PVC dia 1/2"
Piping white PVC dia 2"
18.4 Any other items
19 PROCESS TOOLS COOLING CHILLER
19.1
Supply & Installation of Air Cooled Process Chiller with Scroll
Compressor with Complete Electricals & Controls consisting of
Condenser Air Cooled type with Copper Tube & Aluminium Fins
(Air Cooled 3 Rows with Copper Tube) along with suitable capacity
Stainless Steel Tank with suitable Pumps & fans Complete as per
specifcation.Chilled Water Flow rate is 15 USGPM Pressure at the
point of use required is 3 bar Inlet temperature to process cooling
required is 19 deg C Outlet temperature to process cooling is 26 deg
C. 2 nos ( one working + one Stand by)
19.2
Supply & Installation of Accessories like Thermostatic Expansion
Valve, Filter drier, pressure Switches, and Shut off valve, gauges,
temperature Controllers, Actuators, relays, Contactors, Indicators.
Proper insulations for piping etc. Complete.
19.3
Supply & Installation of Piping: Suitable Piping duly insulated
along With valves, fittings, Fittings & Regulators, flexible pipe
connections as required & complete for the chiller system
19.4
Piping from the Chiller to the Process Equipments / Tools shall be
of SS 304 bright annealed with suitable filteration
piping SS 304 bright annealed dia 1"
piping SS 304 bright annealed dia 1/2 "
160
piping SS 304 bright annealed dia 2"
19.5 Any othrer item
20 PROCESS EXTRACTION SYSTEM
20.1 Wet Extraction System
Supply & Installation of Wet extraction of counter current packed
type system of capacity of 1800 CFM & is packed bed type with
Static a Pressure of 250 mm wg., made out of 8mm thick casing of
poly propylene or (3mm PP + 5mm FRP), with impeller and base
frame MS with FRP lined with suitable motor, the shaft is made of
SS316directly coupled to electric motor. It includes recirculation
tank of 11 mm thick (3 mm PP + 8 mm FRP) with suitable packing
material of PP Intallox saddle, PP spray nozzles, automatic dozing
pumps to control PH along with sensor, flow meter, pressure gauge,
differential pressure gauges etc. It shall compromise of recirculation
pumpmade outof PP with suitable motor. It includes accessories
like - suction inlet dropper, inlet flexible connection and silencer etc.
(one set for acidic & one set for Alakali)
Shall have dual Blowers per set (1working +1 stand by) as stand
by incorporating suitable by pass ducts & dampers for
redudency in case of one Blower fails to operate
Supply & Installation of DUCTING for wet Extraction:
Includes Ducting for wet extraction system, the diameter of the
duct considered varies depending upon process extraction capacity,
using standard Polyprepelene pipes which will connect the acid
generating sources to the wet scrubber. Accessories include dampers
made of material PP/FRP/SS304, duct supports made of SS304 and
PVC hoses with clamps Complete as per the Specification.
161
polyprepelene duct dia 4" 2mm thick
polyprepelene duct dia 6" 2mm thick
polyprepelene duct dia 8" 2mm thick
polyprepelene duct dia 12" 2mm thick
SS 304 dampers dia 4",6",8",12"
Any other items
20.2 Dry Extraction System
Supply & Installation of Dry extraction system of capacity of 1500,
with Static a Pressure of 350 mm wg., made out made out of SS304,
It Comprise of Centrifugal blower of SISW type with minimum air
discharge capacity of 1500 cfm. having Static Pressure of 350 mm
w.g. The casing and the impeller are made out of SS 304 material
and having suitable drive motor including other accessories like
suction inlet dampers inlet flexible connection, silencer etc. Shall
have dual Blowers per set (1working +1 stand by) as stand by
incorporating suitable by pass ducts & dampers for redudency
in case of one Blower fails to operate
Supply & installation of Accessories & Bag Filter to filter the
dry powder without moisture, of capacity 1500 CFM. The filter
body is made out of SS 304 with spun bonded polyester with PTFE
coating on filter fabric, and pleated cartridge. The dust discharge
will be through rotary airlock valve and to a dust collection drum of
SS make which is movable on wheels. Accessories like Rotary Air
Lock,Valve for discharge made out of SS304 Complete
Supply & Installation of Ducting: Ducting shall be from suction
162
points of the process equipment will be connected through ducting
to the main Header & duct will be SS 304 with accessories like
dampers, duct suspender, and PVC hoses with clamps & complete
SS 304 duct dia 4" 2mm thick
SS 304 duct dia 6" 2mm thick
SS 304 duct dia 8" 2mm thick
SS 304 duct dia 12" 2mm thick
SS 304 dampers dia 4",6",8",12"
Any other items
20.3 General Extraction System (OPTIONAL)
Supply & Installation of General extraction system of capacity
of 750 cfm, with Static a Pressure of 150 mm wg., It Comprise of
Centrifugal blower, material, The blower casing shall be made up of
MS with FRP Lining and impeller with MS with FRP lining with
suitable drive motor, belt driven with accessories like suction inlet
damper and inlet flexible connection & complete
Shall have dual Blowers per set (1working +1 stand by) as stand by
incorporating suitable by pass ducts & dampers for redudency in
case of one Blower fails to operate
Supply & Installation of Ducting: Ducting shall be from suction
points of the process equipment will be connected through ducting
to the main Header & duct is polypropelene with accessories like
dampers, duct suspender, and PVC hoses with clamps & complete
polyprepelene duct dia 4" 2mm thick
163
polyprepelene duct dia 6" 2mm thick
polyprepelene duct dia 8" 2mm thick
polyprepelene duct dia 12" 2mm thick
SS 304 ampers dia 4",6",8",12"
Any other items
21 EFFLUENT TREATMENT PLANT / DRAIN SYSTEM
Complete Effluent Treatment System as per the specifications, along
with the components for Effluent Draining as follow:
Supply & Installation of EFFLUENT DRAIN SYSTEM:
Comprise of collection chambers with corrosion resistant pipe lines,
fittings and proper supports.
The effluent drain lines to be for Acidic, Alkaline and organic
effluents.
Based on the type of effluent constituents, MOC of drains line and
related accessories such as non-return valves etc. MOC:
HDPE/Polypropylene & Complete.
Supply & installation of Drain Piping: piping for this effluent
will be with HDPE material of construction piping of nominal bore
50 Nb with required connectors, equal tee, elbow, pipes, pipe caps,
connection hose with accessories and hardware.
HDPE Pipe PN5 - 2"
HDPE Pipe PN5 - 1"
164
Pipe clamps for HDPE and PVDF
supply & Installation of Pipe clamps for HDPE and PVDF
Any Other Items
Life, Safety and Security System
Sl.
No. Description Unit Qty
Offered
makes
Supply (Rs.) Erection (Rs.) Total
Supply &
Erection Unit
Rate Amount
Unit
Rate Amount
1 FIRE DETECTION SYSTEM
An automatic fire detection system using electronic sensors to detect
smoke, heat, or flames from a fire to provide an early warning should be
combined with other elements of an emergency response and evacuation
plan as per specification
165
2 FIRE ALARMS, Fire Suppression and gas-based Extinguishing
ALERT-1 External audible and visual signals and ALER-2 systems that
incorporate electronic CO2 extinguishers, a low-voltage signal activates
fire suppression as per specification
3 ACCESS CONTROL SYSTEM
A networkable access control system will be provided and installed at
entry and exit
4 EPBX TELEPHONE SYSTEM
5 LOCAL AREA NETWORK WITH TELEPHONE
Complete networking system included hardware and softwares
6 PUBLIC ADDRESS SYSTEM
A public address system should be provided within the facility with a
speaker in each Cleanroom area, with the public address
announcements being made from the control room.
7 PERSONAL ASSISTANCE ALARM
provided within the facility to summon assistance
8 INTERCOM SYSTEM
166
25 lines intercom exchange will be provided and connected to the
instruments along with public address system
9 BUILDING MANAGEMENT SYSTEM
The BMS should monitor and partially operate all major units of the
cleanroom and the utilities as per specification
10 PLC HOUSING
Housing for PLC has front facial LED for power check, three tier hooter
for signal indication as healthy, warning and critical. As per specification.
11 SCADA SYSTEM
Supply & Installatioon of SCADA for monitoring all the Facility Utilities
in one Central Location with data logging, History with inbuilt mimics of
all Utility equipments supplied above and customer supplied utility
equipments, Facility Layout mimics, Trends, Alarm Logs, Emergency
Shutdown etc.,
Supply & Installatioon Cables & trays for Scada system consisting of
Cables 3CX2.5sq.mm Cu,4CX10sq.mm CU Armoured ,2 Pair X
1.5sqmm Shielded Instrument cable,Aluminium Cable Trays - 100mm &
Aluminium Cable Trays - 50mm etc Complete
12 CCTV SURVEILLANCES AND SEQURITY SYSTEM WITH DVR
167
13 Any Other Remaining Items
Testing, Validation &Commissioning
1 Pressure Testing
2 Helium Leak Testing exceeding 1 X 10-9 mbar He Lit/Sec
3 Trace Moisture Analysis less than 1 ppm
4 Trace Oxygen Analysis less than 1 ppm
168
5 Particle Count less than 0.3 micron being less than 10
6 Any Other Items
