+ All Categories
Home > Documents > Residual STRESSES AND Mechanical Properties OF THIN FILM ...

Residual STRESSES AND Mechanical Properties OF THIN FILM ...

Date post: 18-Dec-2021
Category:
Upload: others
View: 4 times
Download: 0 times
Share this document with a friend
60
RESIDUAL STRESSES AND MECHANICAL PROPERTIES OF THIN FILM PHOTOVOLTAIC MATERIALS BY DIMITRIOS ANTARTIS THESIS Submitted in partial fulfillment of the requirements for the degree of Master of Science in Aerospace Engineering in the Graduate College of the University of Illinois at Urbana-Champaign, 2012 Urbana-Champaign, Illinois Adviser: Associate Professor Ioannis Chasiotis, Director of Research
Transcript
Page 1: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

RESIDUAL STRESSES AND MECHANICAL PROPERTIES OF THIN FILM

PHOTOVOLTAIC MATERIALS

BY

DIMITRIOS ANTARTIS

THESIS

Submitted in partial fulfillment of the requirements

for the degree of Master of Science in Aerospace Engineering

in the Graduate College of the

University of Illinois at Urbana-Champaign, 2012

Urbana-Champaign, Illinois

Adviser:

Associate Professor Ioannis Chasiotis, Director of Research

Page 2: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

ii

ABSTRACT

The mean and gradient residual stresses and the failure behavior of individual

layers in inorganic thin film photovoltaics were investigated. The thin film photovoltaics

consisted of an amorphous silicon (Si) p-n junction diode, a zinc oxide (ZnO)

Transparent Conductive Oxide (TCO) layer (each 1µm thick), a Kapton® polyimide

layer acting as the bottom cathode and a thick aluminum substrate. Analysis of straight

blister delaminations in the p-n junction layer and telephone cord type delaminations in

the p-n junction-TCO bilayer provided the mean residual stress values in the Si

monolayer and the Si/ZnO bilayer, which were -466±118 MPa and -661±93 MPa,

respectively. High aspect ratio freestanding strips of the Si/ZnO bilayer and the Si

monolayer were used to determine the residual stress gradient using curvature

measurements. The stress gradient in the Si monolayer layer was 274±20 MPa/µm while

the stress gradient in the Si/ZnO bilayer resulted in a maximum tensile stress value of

360±27 MPa at the top of the ZnO layer and a maximum compressive stress of 319±24

MPa at the bottom surface of the Si layer. The monolayer and bilayer strips were also

subjected to uniaxial tension with a microscale tension apparatus to determine the failure

strength and the elastic modulus of each layer. The elastic modulus of the amorphous Si

monolayer was 94±6 GPa, which is in agreement with bulk values. The bilayer strips, had

an elastic modulus of 107±7 GPa which provided a value of 120±13 GPa for the Young’s

modulus of the ZnO layer, and tensile strength that was significantly lower than the Si

monolayer. These results indicated poor adhesion and load transfer between the

amorphous Si and the ZnO film and a mechanically weak ZnO film. Finally, proof of

concept experiments were conducted with photovoltaic cells attached to carbon fiber

composites, which showed extensive fragmentation of the thin film photovoltaics

occurring at small strains without though significant loss of functional performance of the

cells until ~3% strain in the composite laminate.

Page 3: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

iii

ACKNOWLEDGEMENTS

Every scientific advancement is an outcome of researchers coming together to

exchange ideas and provide feedback and support to each other. People are the

cornerstone in scientific innovation and my M.S. thesis is not an exception. Therefore, I

would like to thank all individuals who contributed with their specific expertise and

talents. I would like to express my gratitude to my research adviser and mentor Professor

Ioannis Chasiotis, who guided me through the challenging and demanding years of my

studies in the University of Illinois at Urbana-Champaign. I would also like to

acknowledge the Air Force Office for Scientific Research and the University of

Washington in Seattle through Grants FA9550-06-1-0326 and FA9550-12-1-0209 for the

evaluation of the work completed.

Significant contributions have also been made by my past and present colleagues

at the Nanomechanics and Materials Research Lab. I would like to thank T. Ozkan,

whose meaningful discussions and advises offered solutions to situations that initially

appeared as dead-ends. I would also like to thank K. Hart, N. Karanjgaokar, P. Kolluru,

S. Yagnamurthy and A. Verma for the time and effort they contributed in teaching me

methods and instrumentation essential for the completion of my work. I also would like

to thank J. Clawson, D. Das, N. Fasanella and K. Sahin for promoting a cooperative

working environment in our research group.

Finally, I would like to express my gratitude to my family and friends for their

unconditional love and support and who contributed in shaping me the individual I am

today.

Page 4: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

iv

TABLE OF CONTENTS

CHAPTER 1 ................................................................................................... 1

1. INTRODUCTION ..................................................................................................... 1

1.1. Objectives and Methods of this Research ........................................................... 7

CHAPTER 2 ................................................................................................... 9

2. RESIDUAL STRESSES IN INORGANIC THIN FILM PHOTOVOLTAICS .. 9

2.1. Straight and Telephone Cord Delaminations in Thin Film Photovoltaics ........ 11

2.2. Mean Residual Stresses in Thin Film Photovoltaics......................................... 13

2.3. Residual Stress Gradients in Thin Film Photovoltaics ..................................... 19

2.4. Discussion ......................................................................................................... 24

2.5. Conclusions ....................................................................................................... 25

CHAPTER 3 .................................................................................................26

3. MECHANICAL BEHAVIOR OF THIN FILM PHOTOVOLTAICS .............. 26

3.1. Microscale Mechanical Testing of Photovoltaic Films .................................... 27

3.2. Experiments with Si Monolayers ...................................................................... 29

3.3. Experiments with Si/ZnO Bilayers ................................................................... 34

3.4. Failure of Photovoltaic Films on Composite Laminates................................... 38

3.5. Discussion ......................................................................................................... 44

CHAPTER 4 .................................................................................................46

4. CONCLUSIONS ..................................................................................................... 46

5. APPENDIX .............................................................................................................. 48

REFERENCES ................................................................................................................ 51

Page 5: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

1

CHAPTER 1

1. INTRODUCTION

Photovoltaic devices are a promising source for renewable energy by converting

solar energy into electricity. It is noteworthy that the Earth receives 1.2×105 TW/yr from

the Sun [1]. The functional element of a photovoltaic cell is the p-n junction diode. The

energy provided by the photons of solar radiation excites an electron in the p layer of the

diode. If the energy provided is higher than the energy gap of the semiconductor (or band

gap) a free electron jumps into the n layer, leaving behind a hole. When photovoltaics

receive enough energy in terms of electromagnetic radiation to excite electrons, a circuit

is completed between a grid of metallic contacts on the cell surface and a collector at the

backplane. The most common semiconductor material used for p-n junction diodes is

silicon (Si) in single crystal, polycrystalline, or amorphous form.

A means to quantify the performance of a photovoltaiccell is its efficiency. The

efficiency is defined as the ratio of the energy produced by the photovoltaic to the

incoming solar energy when the cell is exposed to solar spectral radiation with air mass

(AM)1 equal to 1.5 at power density of 1,000 W/m2 and ambient temperature of 25°C,

according to the ASTM G173-03 and IEC 60904-3 International Standards [2].

Efficiencies reach 25% and 20.4% for single crystal and polycrystalline Si, respectively

[3]. Since only the surface of a photovoltaic material participates in the process of photon

collection and electron emission, thin film photovoltaics represent an emerging

technology as they require only a fraction of the active material used in conventional

1 Air mass coefficient of 1.5 corresponds to a solar zenith angle of θ=48.2º, where the air mass is given by

1/cosθ.

Page 6: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

2

photovoltaics while maintaining relatively high efficiency [4]. Thin film photovoltaic

cells do come with certain drawbacks, however, among them the difficulty to quantify

their mechanical properties and the toxicity of commonly used compounds such as Cd

[5,6].

Several approaches have been implemented in the past to increase the efficiency

of photovoltaics. One such method aimed at developing photovoltaics with relatively

rougher surface, thus decreasing the surface reflectivity and increasing the area of

exposure [7]. Similar control of the surface morphology to increase the total of exposure

area of a photovoltaic has been achieved by using nanowires as the functional layers of a

photovoltaic cell [8]. In a different approach, multiple p-n junction layers with different

band gaps to absorb different wavelengths of light were stacked to form multi-junction

photovoltaics. The stacking of p-n junctions with different band gap creates a structure

with the same area of exposure but with larger absorption capability [9]. Figures 1.1(a, b)

show two examples of photovoltaics designed for increased exposed surface compared to

conventional cells [7,8].

(a)

(b)

Figure 1.1(a) Plasma etched Si surface [7] and (b) nanowire photovoltaic. Reprinted with

permission from [8], Copyright 2005, Nature Materials.

5 µm 600 nm

Page 7: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

3

In addition to Si, other common inorganic semiconductor materials used in

photovoltaics include gallium arsenide (GaAs), cadmium telluride (CdTe) and copper

indium selenide (CuInSe2), while examples of organic materials are poly(phenylene-

vinylene)s (PPVs), with main representatives being the poly[2-methoxy-5-(-

ethylhexyloxy)-1,4-phenylenevinylene] (MEH-PPV) and the poly(2-methoxy-5-(3,7-

dimethyloctyloxy)-1,4-phenylenevinylene) (MDMO-PPV) with a conjugated PPV core,

as well as poly(3-hexylthiophene) (P3HT) and poly(3,4-ethylenedioxythiophene)

poly(styrenesulfonate) (PEDOT:PSS) [10].

Organic semiconductors can be advantageous from an economical and

manufacturing viewpoint. However, photovoltaic cells based on organic materials have

significantly lower efficiency than inorganic photovoltaics. Their low efficiency can be

attributed to the wider band gap and their increased sensitivity to environmental

degradation [11,12]. Various studies focusing on the degradation of organic photovoltaic

cells while stored in ambient conditions have proven that the cause of degradation lies in

the polymer-metal interface of the organic bulk heterojunction diode and the metallic

cathode [13]. Chen et al. have showed that, after annealing, the performance of a multi-

layered organic photovoltaic device increased by approximately 2.7% when compared to

the “as spun” device [14]. In a different study, Ferreira et al. deposited an additional sol-

gel thin film with ZnO nanoparticles, between the polymeric junction and the metallic

cathode, hence reducing the formation of voids at the interface and avoiding performance

degradation [15].

In photovoltaics, a Transparent Conductive Oxide (TCO) film serves as a top

contact layer that protects the p-n junction diode layer from infrared (IR) radiation and

moisture. The TCO film is commonly comprised of either zinc oxide (ZnO), indium tin

oxide (ITO) or tin dioxide (SnO2). The role of the TCO film is to provide a top metallic

transparent contact which enables the transport of charge carriers. Therefore, in order to

maximize the efficiency of a photovoltaic cell the TCO film must be highly transparent

and conductive. TCOs can be doped with impurity atoms (F, B, Al, Ga, In, etc.) to reduce

electrical resistivity and maintain transparency [16]. The materials used as the bottom

Page 8: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

4

electrode in photovoltaics are commonly metals, such as Al, Mo, or steel, although

conductive polymer electrodes have also been developed. In thin film photovoltaics, the

substrate is thicker than the TCO and the p-n junction diode to offer structural support to

the overlaying active thin films.

Thin film photovoltaics have been employed in several fields including the

Aerospace industry. For instance, CIGS thin film photovoltaics have been selected as

energy harvesters for Unmanned Aircraft Systems (UAS) because of their light weight

and efficiency [17]. Similarly, 60% of the energy used by satellites is generated by

photovoltaics [18,19]. Although in space, solar panels do experience mechanical

degradation and failure. In addition to increased levels of solar radiation, photovoltaics in

space face the risk of impact with micrometeoroids or space debris [20,21], while the

photovoltaic panels mounted on satellites experience mechanical loading during launch

[22].

(a)

(b)

Figure 1.2 (a) Cracking of brittle thin film layers in a photovoltaic cell after imposing

local bending, and (b) tensile loading.

F F

Page 9: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

5

Complex structures such as photovoltaics may be subject to several degradation

sources and each layer could be potential a site of degradation. Reduction in efficiency is

often a gradual process. Degradation due to environmental conditions can occur because

of deterioration of the protective anti-reflection coating, loss of adhesion between

metallic contacts, or metal migration through the p-n junction diode [23]. Additionally,

IR radiation provides energy lower than the energy gap of the semiconductor, resulting in

pure temperature increase, which, in turn, could cause film delamination or short circuit

between the top and bottom contacts. The spectrum of light wavelengths whose energy

can be absorbed by a photovoltaic is limited, which is the reason to use coatings that

provide IR protection.

Degradation may also occur due to cracks generated during manufacturing, which

result in localized overheating at “hot spots” [24]. The latter lead to degradation of a

single solar cell module by limiting the current in the entire photovoltaic while the

additional current produced by the undamaged modules forward bias them. A forward

bias causes energy dissipation by increasing the damaged module’s temperature. An

additional factor that could drive degradation in photovoltaics is the crystalline structure

of the p-n junction diode. It has been observed that amorphous Si photovoltaics are more

sensitive to the Staebler-Wronski effect2 than crystalline Si compounds, suggesting a

relationship between the disordered structure and the level of photodegradation [25].

Furthermore, degradation of photovoltaics could originate in deposition and the cooling

processes of the TCOs and the p-n junction diodes when residual stresses are generated

[26].

Mechanical degradation also poses a serious problem for thin film photovoltaics.

Several studies have been reported in the recent years on the mechanical properties and

integration of photovoltaics onto durable substrates, with the objective to create

multifunctional load bearing structures [27-29]. The purpose of such integration is to 2 The Staebler-Wronski effect is a reversible decrease of photoconductivity and dark conductivity of

hydrogenated amorphous silicon thin films. This degradation can be reversed by annealing at temperatures

above 150 ºC.

Page 10: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

6

create a multifunctional structure with energy harvesting capabilities while maintaining

the structural durability of its components. Jeon et al. [28] designed thin film Si solar

modules attached to glass fabric reinforced superstrate, while Maung et al. [29] integrated

Si thin film photovoltaics with carbon fiber reinforced epoxy composites. Figure 1.3

shows an example of integration of photovoltaics onto glass and carbon fiber composites.

Other approaches minimized material defects by modifying aspects of the manufacturing

process. For example, Nanosolar manufactures photovoltaics using nanoparticle ink

applied to a metal alloy substrate. This approach eliminates the need for high vacuum or

temperature methods [30], and the defects caused by vapor deposition techniques which

also generate residual stress induced failure due to mismatches of the coefficient of

thermal expansion of the different thin film materials.

(a) (b)

Figure 1.3 (a) Thin film photovoltaic covered by a glass fabric reinforced superstrate

[28], and (b) thin film photovoltaic integrated onto a carbon fiber reinforced epoxy

composite. Reprinted with permission from [29]. Copyright 2010, Solar Energy.

It should be noted that photovoltaics are multilayer devices, whose failure can

originate in an individual layer and/or an interface. However, prior research focused on

system and composite level mechanical durability of thin film solar cells not providing

Page 11: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

7

insights about local damage initiation and evolution at the thin film level. Such treatment

is often necessary due to the lack of appropriate experimental tools to obtain quantitative

measurements on films with thicknesses of the order of 1-2 μm, as is the case with thin

film photovoltaics. The experimental tools and methods applied in this dissertation

research have been developed in the past to study thin films structures such as MEMS

[31-33] and provided the necessary laboratory infrastructure to pursue this research.

1.1. Objectives and Methods of this Research

The objective of this Master’s thesis was to understand the failure behavior and

quantify the mechanical properties of thin film inorganic photovoltaics. The outcomes

provided a first assessment of the limits of integration of photovoltaics in multifunctional

composite structures. The research carried out in this dissertation investigated the

mechanics of the individual components of inorganic junction diode photovoltaics and

their combination. Particular attention was paid to the TCO and p-n junction diode thin

films whose mechanical properties and failure mechanisms were investigated.

The aforementioned objectives were pursued via the following experimental methods:

The mean residual stresses generated during deposition of thin film photovoltaics

were quantified. The compressive residual stresses in photovoltaic films resulted in

straight and telephone cord delaminations whose profiles were used to compute the

mean residual stresses.

The curvature that freestanding photovoltaic films exhibit due to residual stress

gradients was used to determine the latter to obtain the complete state of stress in the

films while attached to their substrate.

Quantification of residual stresses requires the value of elastic modulus, which was

extracted via microscale scale tension experiments with individual layers. Special

care was required to prepare the specimens without inducing damage.

Page 12: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

8

Knowledge of the mechanical properties and residual stresses in the photovoltaic

films would allow us to calculate the range of mechanical stresses that could be applied

when integrated in composite laminates. A commercial photovoltaic film was integrated

onto a carbon pre-impregnated (“pre-preg”) composite laminate and its degradation was

monitored while the composite laminate was subjected to uniaxial tension.

The material used in this thesis was the commercial photovoltaic module PT15-

300 which was manufactured by PowerFilm Solar (Ames, IA). The dimensions of the as-

received photovoltaic module were 270×325 mm2, it weighed 94.5 gr, its power was 3.08

W and the operating current and voltage were 200 μA and 15.4 V, respectively. The

product belongs to the WeatherPro series and it is supplied with protective external

packaging.

Page 13: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

9

CHAPTER 2

2. RESIDUAL STRESSES IN INORGANIC THIN FILM

PHOTOVOLTAICS

Thin film materials have been the focus of various industries in the form of

protective coatings, adhesion promoters and active/functional elements [34-37].

Mechanical reliability is key in most thin film applications and quantification of the

mechanical properties of thin films has been proven to be a cumbersome task due to their

small thickness and their fragile nature. Very often thin films cannot be removed from

their substrate, which further complicates the study of their mechanical performance.

Several methods have been developed in the past to measure the residual stresses

and their gradients in thin films that are freestanding or are attached to a substrate. The

most commonly used method is based on Stoney’s formula [38,39]. The elastic mismatch

between the thin film and the substrate results in change of the substrate curvature, which

is measured by either scanning laser, X-ray diffraction, or by a Multi-beam Optical

Scanning System (MOSS) [40,41]. The assumptions of Stoney’s formula include a thin

superlayer compared to the substrate, small displacement gradients, an ideal film-

substrate interface and no interfacial slip [42]. In this work the mean residual stress was

calculated by taking advantage of the formation of blisters after film delamination was

induced. Additionally, narrow freestanding strips of thin film photovoltaics were isolated

and employed to measure their curvature in order to calculate the residual stress gradient

in the bilayer and single layer films.

Several methods and instruments at the Center of Materials Microanalysis of

UIUC and at the Nanomechanics and Materials Research Laboratory of Professor I.

Page 14: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

10

Chasiotis in Talbot Lab were used to characterize the properties of the commercial

photovoltaics, such as the FEI Dual Beam 235 Focused Ion Beam (FIB), a Hitachi S-

4800 High Resolution Scanning Electron Microscope (SEM), a JEOL JSM-6060LV low

vacuum SEM, a M5 ThermoMicroscopes Atomic Force Microscope (AFM) an Olympus

OLS3000 confocal scanning laser microscope ,and a PANalytical / Philips X’pertMRD

system which conducts X-ray Diffraction (XRD).

Figure 2.1 Cross-section of thin superlayers in a commercial photovoltaic cell.

The aforementioned instrumentation provided information about the nature and

the thickness of individual layers in a commercial photovoltaic, which are (in the order

shown in Figure 2.1):

a ZnO TCO thin film with thickness of 1 µm

an amorphous Si p-n junction diode with thickness of 1 µm

a conductive polyimide (Kapton©) layer which acts as the bottom electrode, with

approximate thickness of 100 nm, and

ZnO

Si

Kapton©

Al

Page 15: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

11

an aluminum substrate with thickness 50 µm.

This Chapter presents the methods applied to obtain the residual stresses and their

gradients for the particular photovoltaics studied herein.

2.1. Straight and Telephone Cord Delaminations in Thin Film

Photovoltaics

Delamination of thin films from a substrate is often initiated by residual stresses

in combination with environmental factors. In the case of photovoltaics and in the

absence of the TCO, delamination of the amorphous Si layer is initiated in the form of a

circular blister which expands to a straight blister which can be modeled as an Euler

column [43]. Delamination is driven by compressive residual stresses across the direction

of propagation of the straight blister. In the presence of the ZnO TCO superlayer,

delamination begins as a circular blister, progresses into a straight blister and shortly after

advances in a “worm-like”, or zigzag, pattern which is often characterized as a

“telephone cord delamination” [43]. Telephone cord delaminations of thin films have

been studied extensively and occur due to biaxial compressive residual stresses. Residual

stresses are generated during the deposition of thin films due to a mismatch in the

coefficient of thermal expansion of the two materials [39]. Volinsky has shown that

telephone cord blisters begin as straight blisters, and at critical a length they convert into

a sinusoidal pattern [44]. Moon et al. suggested that telephone cord delaminations occur

when the residual stress exceeds the buckling stress by a factor of four [45], an important

rule of thumb that will be shown to hold in the present study.

The blister formation in straight and telephone cord delaminations is a stress relief

mechanism, which reduces the compressive stresses in the transverse to the blister

propagation direction. Once the residual stresses in the transverse direction of telephone

cord delaminations are relieved, the residual stresses in the longitudinal direction are in

Page 16: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

12

effect, causing the propagation direction to change by approximately ±45º. Similarly,

when the longitudinal compressive stresses are relieved, the transverse stress redirects

blister propagation direction by -/+90º, forcing the overall delamination to follow a

characteristic meandering path. Figure 2.2 demonstrates examples of straight blisters and

telephone cord delaminations, including the propagation of a telephone cord

delamination.

(a) (b)

(c) (d)

Figure 2.2 (a) Straight blister, (b) telephone cord delamination, (c,d) propagation of a

telephone cord delamination.

200µm

300 µm 300 µm

400 µm

Page 17: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

13

2.2. Mean Residual Stresses in Thin Film Photovoltaics

The thin film layers in a photovoltaic experience stresses due to the Si/Al

substrate interface and the Si/ZnO interface. Their effects can identify them as a mean

and a gradient stress in the Si/ZnO bilayer, as shown schematically in Figure 2.3(a). The

mean residual stress can be calculated from the buckling profiles of the straight and

telephone cord blisters while the photovoltaic films are still on the substrate.

(a)

(b)

(c)

Figure 2.3 (a) Residual stress profiles in ZnO and Si thin films, (b) curvature of a

freestanding bilayer, and (c) blister profile of a delaminated bilayer.

ZnO

Si

Page 18: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

14

For a straight blister, the delaminated segment can be approximated as a clamped-

clamped buckled beam and the values of the buckling, ζB, and the residual stress, ζr, are

calculated using expressions derived by Hutchinson and Suo [46]:

( )(

)

(2.1)

(

) (2.2)

where E is the arithmetic mean of the elastic moduli of the two thin layers, ν is the

harmonic mean of Poisson’s ratios, h is the thickness, δ is the blister height and b is the

blister half-width. The values of the elastic modulus used in the buckling and residual

stress calculations were derived from the microscale tension experiments described in

Chapter 3. Figure 2.4 shows the geometrical parameters of the straight and telephone

cord delamination blister profiles used in Equations (2.1) and (2.2).

Figure 2.4 Geometry of blister in a straight or a telephone cord delamination.

In this study, telephone cord delaminations occurred when both the Si and ZnO

layers were present. When a delamination developed into a telephone cord the sinusoidal

pattern could be broken into consecutive segments positioned at 90º with respect to each

2b

h

δ

Page 19: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

15

other, which could be modeled as the segments of a pinned circular buckle [45]; Figure

2.5 shows one of these segments as (a) part of a telephone cord delamination and (b) of a

pinned circular buckle.

(a)

(b)

Figure 2.5 Unit segments (a) of a telephone cord blister, (b) of a modeled pinned circular

buckle. Reprinted with permission from [45]. Copyright 2002, Physics of Solids.

160 µm

Page 20: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

16

An example of the buckling profile of telephone cord delaminations is shown in

Figure 2.3(c). The peak of the buckling profiles was not always located at the center of

the buckle along the entire length of the telephone cord delamination. The width and the

height of blisters though remained constant regardless of the location of the apex,

provided that the blister profiles were imaged far from the propagation front. The

calculated value of the mean residual stress was the combination of the residual stress due

to the deposition of the Si layer onto the Al substrate and of the ZnO onto the Si layer.

Moon et al. [45] showed that the buckling stress for telephone cord blisters, ζr,teleph can be

calculated by increasing the residual stress of the straight blister by 8%:

(

(

)) (2.3)

In order to induce delamination, the photovoltaics were placed in 5% wt. acetic

acid solution which etched the conductive Kapton© thin film. As a result, the Si/ZnO

bilayer delaminated from the substrate to form telephone cord blisters. It should be noted

that if a small bending moment was imposed on the photovoltaic film, the ZnO layer

delaminated from the surface of the Si layer, as soon as the cell was immersed in the

acetic acid solution. This provided proof of the poor adhesion between the ZnO and the

Si films [47]. Once the ZnO layer was released, the stress condition for the formation of a

telephone cord delamination was not satisfied any longer, and a straight delamination

formed instead.

The surface of the Si thin film was imaged with a M5 ThermoMicroscopes AFM.

A 25×25 µm2 topography image of the surface is shown in Figure 2.6. For the Si layer,

the maximum peak-to-valley height was 0.54 µm, and the Root Mean Square (RMS)

roughness was 90 nm.

Page 21: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

17

Figure 2.6 AFM image of the topography of the Si layer.

Figure 2.7 Blister profile of a telephone cord delamination as measured by a confocal

laser microscope.

Page 22: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

18

The blister width and height of the straight and telephone cord delaminations were

measured with an Olympus OLS3000 confocal scanning laser microscope. Figure 2.7

shows a three-dimensional image of a telephone cord blister, while Tables 2.1 and 2.2

include all experimental values of buckling and residual stresses for the straight and

telephone cord blisters, respectively. The average of the buckling and residual stresses for

16 different straight blister profiles was found to be -159±52 MPa and -466±118 MPa,

while for 13 different telephone cord blister profiles -114±27 MPa and -661±93 MPa.

Note that both the buckling and residual stresses calculated are compressive.

A comparison of the results by the two delamination modes shows a higher

buckling stress for straight blisters and a much higher residual stress required to form

telephone cord vs. straight blisters. The buckling stress for the two different blisters

differs by 28%, while the residual stress differs by 42%. A comparison of the values of

the buckling and the residual stress suggests that Moon’s [45] argument that telephone

cord delaminations occur when the residual stress is at least four times larger than the

buckling stress is verified by our experimental findings.

Table 2.1 Buckling and residual stress values for straight delaminations in Si.

Specimen #

Buckling

stress

(MPa)

Residual

stress

(MPa)

Specimen #

Buckling

stress

(MPa)

Residual

stress

(MPa)

1 -82.8 -621.3 9 -123.2 -462.0

2 -76.6 -287.6 10 -107.0 -401.1

3 -179.2 -268.7 11 -179.2 -522.7

4 -159.8 -599.2 12 -143.4 -418.4

5 -202.2 -309.5 13 -169.1 -493.2

6 -215.5 -329.8 14 -179.2 -522.7

7 -306.4 -468.8 15 -159.8 -466.2

8 -179.2 -671.8 16 -117.4 -440.3

Average -159±52 -466±118

Page 23: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

19

The average value of the buckling stress for the straight blisters corresponds to

34% of the residual stress, while the average value of the buckling stress for the

telephone cord blisters corresponds to 17% of the residual stress.

Table 2.2 Buckling and residual stress results for telephone cord delaminations in

Si/ZnO.

Specimen #

Buckling

stress

(MPa)

Residual

stress

(MPa)

Specimen #

Buckling

stress

(MPa)

Residual

stress

(MPa)

1 -122.4 -811.7 8 -101.8 -632.8

2 -83.6 -626.8 9 -125.3 -669.4

3 -121.4 -615.5 10 -122.8 -669.4

4 -141.9 -621.7 11 -122.8 -656.2

5 -87.7 -545.4 12 -152.3 -814.1

6 -92.2 -573.1 13 -147.2 -786.6

7 -71.3 -584.2 Average -114±27 -661±93

2.3. Residual Stress Gradients in Thin Film Photovoltaics

The residual stress gradients in the Si layer and the Si/ZnO bilayer precipitated

from the deposition of the ZnO onto the Si thin film and the deposition of the Si film on

the Al substrate. The residual stress gradient was measured from long freestanding strips

of the Si layer and the Si/ZnO bilayer which were removed from the Al substrate. Several

cutting methods were examined, including wire electric discharge machining (EDM) and

laser cutting, which all resulted in crack formation [48,49]. Finally, monolayer Si strips

were created by imposing a bending moment on the photovoltaic films so that the top

ZnO layer was subjected to tension and cracks were initiated. Subsequently, the

photovoltaic was placed in the same acetic acid solution used to create buckling

Page 24: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

20

delaminations. As soon as the thin polyimide layer was sufficiently etched and the ZnO

was detached from the surface of Si, strips of the latter layer were formed. Increased

delamination of the ZnO layer was observed in areas where the photovoltaic cross-section

was exposed to the acetic acid solution compared to the interior. Additionally, immersion

of the photovoltaic into solutions of increased acidity increased rate of delamination of

the ZnO superlayer. Figure 2.8 shows the cross-section of a Si monolayer rectangular

strip. It should be noted that the immersion of a photovoltaic into an acetic acid solution

produced bilayer specimens of Si/ZnO too. Cracks were initiated by bending and the

delamination process, produced strips with surfaces that were partially covered by ZnO,

and thus, not suitable for definitive experiments.

Bilayer Si/ZnO strips were isolated by immersing the photovoltaic into water. The

time required for delamination to occur was much longer compared to the time needed

for delamination using acetic acid, as the first delaminations appeared after 4 hours of

immersion. On the contrary, during immersion in acetic acid, delamination took place

within the first few minutes. Circular blisters were formed on the surface of the thin films

when the photovoltaic was immersed in water, which formed cracks in cross patterns.

The cracks propagated, generating rectangular bilayer strips, which eventually were

released from the substrate. Figure 2.9 shows the cross-section of a Si/ZnO bilayer

specimen.

Figure 2.8 Cross-section of the Si

monolayer.

Figure 2.9 Cross-section of a Si/ZnO

bilayer.

Page 25: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

21

The released monolayer Si and bilayer Si/ZnO thin film strips exhibited strong

curvature due to residual stress gradients generated during deposition, as shown in

Figures 2.11 and 2.12. The curvature, κ, of Si monolayers was measured and the Euler-

Bernoulli beam theory was used to compute the linear through-the-thickness residual

stress gradient. Figure 2.10 shows the curvature measurement of two Si layer specimens

and Table 2.3 contains the measured curvature and the calculated residual stress gradients

for several specimens showing significant consistency. The average value of the stress

gradient calculated from several specimens was 274±20 MPa/µm. Figure 2.10 shows a

schematic of the distributions of the mean and the gradient stress in the Si monolayer.

Figure 2.10 Mean and gradient stress in the Si monolayer. The stress values are rounded.

Figure 2.11 Curvature measurement of

thin film Si strips.

Figure 2.12 Curvature measurement of

thin film Si/ZnO strips.

140 MPa

-140 MPa -470 MPa

ZnO

Si

250 µm 500 µm

0.5 µm

Page 26: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

22

Table 2.3 Curvature and residual stress gradient values of the Si layer.

Specimen

#

Radius of

curvature

(µm)

Stress

Gradient

(MPa/µm)

Specimen

#

Radius of

curvature (µm)

Stress

Gradient

(MPa/µm)

1 736.00 272.42 14 689.06 290.98 2 768.00 261.07 15 672.28 298.24 3 702.94 285.23 16 732.33 273.78 4 820.45 244.38 17 706.63 283.74 5 755.78 265.29 18 849.87 235.92 6 831.15 241.23 19 764.07 262.41 7 740.35 270.82 20 694.42 288.73 8 724.18 276.86 21 680.02 294.84 9 784.59 255.55 22 669.61 299.43 10 726.73 275.89 23 766.16 261.70 11 615.02 326.00 24 723.75 277.03 12 721.07 278.06 25 752.73 266.36 13 780.47 256.90 26 688.42 291.24

14 777.43 257.90 Average 736±53 274±20

In order to calculate the stress gradient of the Si/ZnO bilayer, the elastic modulus

mismatch between Si and ZnO needs to be taken into account and the location of the

neutral axis of the composite beam to be determined. Given that the two thin films have

the same thickness, and by using the elastic modulus results as calculated in Chapter 3,

the neutral axis is located at 0.0607 µm from the interface and into the ZnO layer. The

stress gradient was linear but also included a discontinuity on the interface of the two

materials. Once the neutral axis is determined, and by having the curvature of the Si/ZnO

bilayer, the stress gradient field is calculated. Figure 2.11(b) shows a curvature

measurement of a Si/ZnO bilayer. The values of the radius of curvature and the residual

Page 27: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

23

stress gradients in the Si and the ZnO layers are given in Appendix A.2. Figure 2.13

shows the distributions of the mean stress and the stress gradient in the Si/ZnO bilayer.

Figure 2.13 Mean stress and stress gradient in the Si/ZnO bilayer. The values of stress

are rounded and are not drawn to scale.

The residual stress gradient in the Si layer increased by 133% when the ZnO

superlayer was deposited. As a result, the additional ZnO layer reduced the residual

curvature almost to half of that for the Si monolayer specimens. The difference in

curvature and the stress gradient indicates that the ZnO superlayer contributes an

additional compressive stress which was responsible for the formation of the telephone

cord blisters.

The maximum tensile stress at the top ZnO surface was 360±27 MPa, while the

maximum compressive stress at the bottom Si was -319±24 MPa. The stresses at the

interface were also calculated: the stress in the ZnO layer was -23 MPa and the stress in

the Si layer was -18 MPa.

-660 MPa 360 MPa

-320 MPa

-20 MPa

-25 MPa

1 µm

0.94 µm

Page 28: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

24

2.4. Discussion

The results of the mean and gradient residual stresses provided the complete

stress profile in the thin films. The fact that straight and telephone cord blisters formed in

the thin films upon delamination indicates that the stress distributions in the monolayer

and the bilayer generate compressive forces, and thus, buckling, as opposed to tensile

stresses at the film surface which would result in crack formation [50]. The mean

compressive residual stress in the ZnO and Si thin films is advantageous in terms of

mechanical durability when the films are exposed to tensile loads.

Figure 2.14 Straight blister with longitudinal crack.

In the process of driving straight blister delaminations in the Si layer, two types of

straight delaminations were observed: The first were uncracked straight blisters which

were used to compute the mean residual stress, while the second straight blister included

a longitudinal crack, as shown in Figure 2.14. It was also noticed that the width of

straight blisters with longitudinal cracks was larger compared to intact blisters, which

Crack

60 µm

Page 29: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

25

were strictly used for the calculations presented in this Chapter. In some cases, cracks

formed in straight as well as telephone cord blisters, when the photovoltaic was removed

from the acetic acid solution. The presence of these stress relief mechanisms is a

demonstration of the complex state of stress and asserts the need for further studies.

Future work includes the study of criteria for the propagation of these cracks in

connection with the interfacial toughness of the superlayers.

2.5. Conclusions

The deposition of ZnO onto Si contributed an additional mean compressive stress

which increased the existing stress in Si by ~42%. The deposition of ZnO also resulted in

tensile stress at the top surface of ZnO. It must be noted that the mean residual stress and

the (linear) residual stress gradient have the opposite effect on the top surface of the ZnO

layer, but the magnitude of the compressive mean residual stress exceeds that of the

tensile stress value of the gradient at the top surface of ZnO, thus producing a

compressive overall stress field. Due to the linear nature and the compressive/tensile

stresses generated by the stress gradient the net resulting force is near zero. There is still a

moment which could drive telephone cord delaminations by inducing film bending but

this is not accounted in the existing equations for the formation of blisters.

Page 30: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

26

CHAPTER 3

3. MECHANICAL BEHAVIOR OF THIN FILM

PHOTOVOLTAICS

The thin film photovoltaics employed in this study had not been investigated

before for their basic elastic and failure properties as described by the Young’s modulus

and failure strength. Because of their attachment onto a firm substrate the

nanoindentation method has been used quite extensively [51-55]. This method presents

us, however, with several constraints: (a) For a thin film is deposited onto a rigid

substrate the “rule of thumb” requires that the indentation depth should not exceed 10%

of the thickness of the superlayer, (b) the Poisson’s ratio of the films being studied must

be known, (c) the method cannot provide reliable measurements for multilayers of

comparable thickness, and (d) spallation and radial cracking complicate the otherwise

elastic analysis applied to nanoindentation raw data [56]. Similar issues arise when

performing line scratch measurements [57]. Furthermore, the photovoltaic films at hand

had peak-to-valley surface roughness exceeding 10% of the film thickness, which

prohibited the use of instrumented nanoindentation in this work.

Instead, uniaxial tension experiments were employed to measure the elastic

modulus and mechanical strength of the thin film photovoltaics. The particular method

has been developed over the last ten years at the Nanomechanics and Materials Research

Laboratory at UIUC by Prof. Chasiotis and his students and the necessary

instrumentation was largely available for this work [32]. The method offers simplicity in

experimental implementation and well-understood theoretical underpinnings. More

importantly, it provides direct values for the tensile strength of the thin film photovoltaics

and the applied load profile is consistent with that encountered in the field.

Page 31: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

27

3.1. Microscale Mechanical Testing of Photovoltaic Films

Si and Si/ZnO strips for tensile testing were produced by immersing the

photovoltaics into an aqueous acetic acid solution. The strips were mounted on a

microscale tension apparatus and a longitudinal force was applied. Figure 3.1 shows a

strip prepared for testing.

Figure 3.1 Si strip isolated and mounted on the grips of a micro-tensile testing device.

The mechanical testing apparatus was composed by a piezoelectric actuator with

2 in travel and 30 nm displacement resolution, which provided motion to a linear

translational stage. The applied force was measured by a tension/compression precision

loadcell, with 50 gr force capacity, which was mounted on an X-Y translation stage. The

apparatus provided flexibility for aligning both ends of the strip specimens and for

conducting tests with high precision and with small translation steps. The entire apparatus

is compact enough to allow for experiments under an Olympus optical microscope, so

that images could be captured during testing. The images were processed by aDigital

Image Correlation (DIC) software (Vic-2D, Correlated Solutions) to obtain an accurate

measurement of full field strains. The tensile specimens were 15-75 µm wide with width-

320 µm

Page 32: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

28

(a)

(b)

(c)

Figure 3.2 Si/ZnO bilayer with pre-existing crack in the ZnO layer. The crack, which is not

initially visible in (a), becomes apparent when applying a higher load in (b) and clearly

influences the shape of the ultimate failure surface in (c).

Pre-existing crack

50µm

50µm

50µm

Page 33: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

29

to-length ratio larger than 10. The constraint on width-to-length ratio ensured the absence

of end effects in strain measurement. The surface of the strips was examined for pre-

cracks. Figure 3.2 shows a specimen containing a pre-existing crack in the ZnO layer, at

three different values of tensile load. At small applied loads the crack is not visible, but at

the intermediate force the presence of the pre-existing crack is obvious.

The thin film strips were mounted on glass by applying adhesive. Of a variety of

adhesives, only a two-part epoxy provided sufficient curing time to handle and align the

specimens. The adhesive assured no specimen slipping during the experiments. It should

be noted that the specimen curvature in the out-of-plane direction caused a glaring effect

during imaging. The curvature effect was dealt by selecting narrow test strips, thus

reducing the effect of the curvature, which in the longitudinal direction was minimized by

pre-stretching the specimens by ≤20 MPa. To fully understand the failure mode of the bi-

layer strips, tests were conducted by focusing on the ZnO or the Si surface.

3.2. Experiments with Si Monolayers

The strength of Si monolayer strips was obtained by multiplying the output

voltage with the calibration constant of the loadcell and by dividing with the average

cross-sectional area of the specimen. For all the calculations, the thickness of 1 µm was

used while the width was measured with the Olympus OLS3000 confocal scanning laser

microscope. Figure 3.3 shows a mounted ZnO film during loading and after failure.

Strain was calculated by DIC following the approach by Cho and Chasiotis [58].

The strainin each row in the correlation area was calculated by plotting the

displacement in the longitudinal direction (denoted as Z-direction) vs. position, and

fitting a line. If εzz and uz are the strain and the displacement in the longitudinal direction:

⇒ (2.4)

Page 34: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

30

The slope of the best fit line corresponds to the line strain and the constant isto the

rigid body translational motion (RBM). Figure 3.4 shows three frames where the

calculated longitudinal displacement is superposed. The longitudinal strainin all

individual rows was then averaged to provide the average strain in the strip subjected to

uniform tension, and thus, an engineering stress vs. strain graph. The experimental results

were in agreement with the theoretical expectations, producing the characteristic of

ceramic materials linear elastic plots. Figure 3.5 includes one of the produced stress vs.

strain plots. The elastic modulus extracted from the slope of the stress vs. strain plots and

the ultimate tensile strength of the Si monolayers are presented in Table 3.1. Appendix

A.1 contains the MATLAB code used to calculate the average strain at each load level.

(a)

(b)

Figure 3.3 Si strip with (a) no applied load and (b) after failure. At failure the specimen

broke away.

The elastic modulus of amorphous Si was in good agreement with the results by

Gaire et al. who reported a value of 94.14±10.21 GPa [59]. In all cases then entire Si

monolayer specimens broke off at failure at the mounting sites. An initial crack

potentially formed at one of the specimens ends and the subsequent specimen oscillations

caused failure at the opposite edge too.

250 µm 250 µm

Page 35: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

31

(a)

(b)

(c)

Figure 3.4 Displacement field superposed onto the thin film specimen showing the

speckle pattern.

50µm

50µm

50µm

Page 36: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

32

Figure 3.5 Stress vs. strain curve for a Si monolayer.

Table 3.1 Elastic modulus and tensile strength of Si layer.

Specimen Width (µm) Elastic Modulus

(GPa)

Strength

(MPa)

1 26.9 87.5 386.5

2 42.9 97.9 568.4

3 34.2 91.9 495.2

4 40.0 94.1 442.5

5 45.7 97.0 398.8

6 42.7 99.3 395.1

7 29.1 103.6 450.1

8 45.8 87.4 349.2

9 28.8 85.2 332.8

Average - 94±6 423±75.5

y = 97861x - 0.4589

R² = 0.9999

0

100

200

300

400

500

600

0.000 0.002 0.004 0.006

Str

ess

(MP

a)

Strain

Page 37: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

33

(a)

(b)

(c)

Figure 3.6 Bilayer specimen of Si/ZnO at (a) uniaxial tensile loading, (b) formation of

cracks (indicated by the arrows) and (c) failure.

200 µm

200 µm

200 µm

Page 38: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

34

3.3. Experiments with Si/ZnO Bilayers

Strips of 2-µm thick Si/ZnO bilayers were also tested in tension. The stress and

strain of the bilayer were calculated similarly to Si monolayers. Initially, strips produced

by immersing the photovoltaic into acetic acid solution were tested. However, it was

found that the measured elastic modulus of the bilayers was significantly lower than the

theoretical average value for the two materials. To resolve this issue bilayer strips were

loaded in small steps of ~30 nm while optical images were recorded at 15 fps. The

images indicated that the ZnO layer fractured first with subsequent fracture of the

underlying Si layer. Figure 3.6 shows three frames of a Si/ZnO bilayer while being tested

in tension, where the top ZnO layer cracked near the grips first, Figure 3.6(b). In some

cases the ZnO layer delaminated and was completely removed from the surface of Si

indicating a very weak interface. Figure 3.7 demonstrates an experiment in which the

ZnO layer delaminated and was ejected from the surface of the Si layer before failure of

the bilayer occurred.

Additional tensile specimens were produced by immersing the photovoltaic into

water were also tested. The delamination process described in the previous Chapter

produced shorter and narrower specimens compared to those generated by immersion of

the photovoltaic in acetic acid solution. However, the bilayer specimens suffered from

quite larger curvatures compared to the Si monolayer strips, which required extreme

attention during specimen mounting onto the testing apparatus. The measured elastic

moduli were in accordance with our expectations [60]. Table 3.2 presents the bilayer

elastic modulus and the tensile strength measured from seven bilayer specimens. The

average elastic modulus was 107±7 GPa and the tensile strength 109±23 MPa.

Page 39: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

35

(a)

(b)

(c)

Figure 3.7 Si/ZnO bilayer specimen subjected to (a) uniaxial tensile loading, (b) break

off of the top ZnO layer, and (c) failure of the bilayer.

60 µm

60 µm

60 µm

Page 40: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

36

Table 3.2 Elastic modulus and tensile strength of the Si/ZnO bilayer. The maximum

values of stress in ZnO and Si have accounted for the stress gradient imposed during

specimen placement onto the mechanical testing apparatus.

Specimen Width

(µm)

Elastic

Modulus

of Bilayer

(GPa)

Bilayer

Strength

(MPa)

Maximum

Tensile

Stress in

ZnO

(MPa)

Maximum

Compressive

Stress in Si

(MPa)

Elastic

Modulus

of ZnO

(GPa)

1 34.4 102.5 94.4 444.7 -215.5 111.0

2 35.0 120.1 82.1 443.3 -237.4 146.2

3 18.0 109.8 117.3 495.2 -217.0 125.6

4 22.2 103.3 122.5 504.9 -215.7 112.6

5 34.4 109.4 129.4 501.9 -200.1 124.8

6 30.3 102.3 80.0 391.2 -195.3 110.6

7 33.5 102.5 136.6 525.4 -207.3 111.0

Average 107±7 109±23 472±47 -213±14 120±13

Figure 3.8 shows the failure cross-section of a Si/ZnO bilayer, and Figure 3.9

shows a stress vs. strain plot of a bilayer specimen. The elastic modulus of the ZnO film

was determined from the Si/ZnO composite modulus and the prior measurement of the

elastic modulus of the Si monolayer. The average Young’s modulus of the ZnO layer was

120±13 MPa. Finally, Figure 3.10 shows the stress distribution in the bilayer right before

failure due to the applied tensile load. The maximum stress on the top surface of ZnO and

the Si layers were calculated by taking into account the stress gradient in the strip. The

ZnO thin film was subjected to a maximum stress of 472±47 MPa before failure. The Si

layer failed immediately after the ZnO layer. The bottom surface of Si was under a

compressive stress of -213±14 MPa. The low strength of the Si/ZnO bilayer indicates a

mechanically weak ZnO layer and poor adhesion between ZnO and Si, which often

allowed for the entire ZnO layer to break away from the Si layer during tensile testing.

Page 41: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

37

Figure 3.8 Failure cross-section of a bilayer tensile specimen.

Figure 3.9 Stress vs. strain plot of a Si/ZnO bilayer.

y = 10980x - 0.006 R² = 0.998

0

20

40

60

80

100

120

140

0.0000 0.0003 0.0006 0.0009 0.0012

Str

ess

(MP

a)

Strain

Si

ZnO

Page 42: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

38

Figure 3.10 Stress distribution in the Si/ZnO bilayer before failure under tensile load.

The stress values are rounded and are not drawn to scale.

3.4. Failure of Photovoltaic Films on Composite Laminates

The mechanical reliability of photovoltaics integrated onto composite laminates

was also investigated. The as-received solar module, which was fabricated by assembling

several photovoltaics in a series or in parallel, was cut at the boundaries of individual

photovoltaics and the specimens were integrated onto a carbon fiber laminate composite.

The photovoltaic was the smallest unit extracted from the solar module, avoiding thus,

cracks forming during the cutting process. The pre-preg was DA 409U/G35 150

unidirectional carbon fiber purchased from Adhesive Prepregs for Composite

Manufacturers (APCM). The standard area weight of the pre-preg was 150 gr/m2 and the

resin content was 48% wt. Two laminates were prepared, a [0º]8T and a [±45º4]2S. The

first laminate contained 8 plies with fibers oriented along the principal axis, while the

second contained 16 plies, in ±45º orientation with respect to the principal axis.

470 MPa

-210 MPa

85 MPa

90 MPa

1 µm

0.94 µm

Page 43: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

39

(a) (b)

Figure 3.11 (a) Uniaxial tension specimen and (b) loss of adherence between the

photovoltaic and the laminate.

The composite specimens with dimensions of 7 in in length and 1 in in width

were created in a steel mold, which allowed for curing three specimens simultaneously.

Special attention was paid to [±45º4]2S specimens so that the core plies had the same

orientation. In addition to the release and bleeder plies the mold was coated with PTFE

Teflon mold release lubricant (Miller and Stephenson) to prevent adhesion of the

laminate to the mold. Initially the photovoltaic was not included in the curing process,

and was placed on top of a cured laminate with adhesive. However, when the composite

was loaded in tension, the photovoltaic delaminated and winkled. Figure 3.11(a) shows a

photovoltaic specimen before integration to a composite laminate, and Figure 3.11(b)

shows a wrinkled photovoltaic attachedto a laminate, after tensile loading was applied.

In a second attempt, the photovoltaics were integrated onto the composite

laminate before curing. The bottom surface of the aluminum substrate was roughened

with sand paper to ensure a good adhesion with the laminate. The top surface of the

Page 44: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

40

photovoltaic was covered with a release ply and the protective Teflon layer was kept to

prevent resin flow on the top surface of the photovoltaic. The release ply also facilitated

the removal of the Teflon layer upon curing. The laminate was cured for 4 hr at 250ºF

and by applying pressure only through the weight of the metallic caps of the steel mold

and at heating and cooling rates of 10ºF per minute. The use of minimal pressure was to

avoid resin overflow onto the photovoltaic, which would result in sinking within the

resin. The temperature cure cycle is shown in Figure 3.12.

Figure 3.12 Cure cycle of the composite laminate.

The cured laminates were then placed under the Olympus OLS3000 confocal

scanning laser microscope to examine the surface of the photovoltaic. Imaging revealed

the formation of cracks in some cases, which originated from composite specimen

shrinkage during curing. Additionally, if the protective Teflon layer was removed before

curing, the resin flowed over the surface of the photovoltaic. Figure 3.13 shows an

example where the Teflon layer was removed, resulting in resin flow and the formation

of cracks during curing. Although laminates with pre-cracks or resin flown onto the top

surface of the photovoltaic were discarded, a comparison between a specimen without

0

50

100

150

200

250

300

0 60 120 180 240

Tem

per

atu

re (

ºF)

Time (minutes)

Page 45: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

41

pre-cracks and resin flow and a specimen with such issues pointed out to reduction in

output voltage of approximately 5%.

Figure 3.13 Crack formation on the surface of a photovoltaic and resin flow during

curing of the composite laminate.

Polymer tabs were placed with adhesive at the ends of the laminate specimens in

order to be mounted onto a universal mechanical testing apparatus. Then, the composite

laminates with attached photovoltaics were then subjected to uniaxial tension testing by

an MTS Alliance RT/30 force transducer at a rate of 500 mm/min. The photovoltaic was

illuminated by a lamp (Trademark Home Collection Sunlight) with power of 1,000 W

and the voltage was recorded by a multimeter.

Resin flow

Page 46: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

42

(a)

(b)

(c)

(d)

Figure 3.14 (a) Crack formation on the surface of a photovoltaic integrated onto a

[±45º4]2S laminate, (b) propagation of cracks, (c,d) film fragmentation.

The [±45º4]2S composites were tested until the photovoltaic output voltage

dropped to zero, signifying complete failure due to cracks or there was failure in the

contacts of the circuit. A closer look under the microscope revealed periodic cracks in the

transverse direction with respect to the loading axis, which are reminiscent of the process

of fragmentation of a brittle layer on a relatively extensible substrate. Additional cracks at

±45º with respect to the loading direction in the direction of the carbon fibers formed, as

shown in Figure 1.2(b), while Figure 3.14 shows the evolution of transverse cracks.

Testing of the [0º]8T specimens also resulted in the formation of transverse cracks, but the

Page 47: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

43

specimen tabs failed before failure of the photovoltaics. Figure 3.15 shows the voltage vs.

strain for such a specimen. Transverse crack formation caused minimal reduction in

output voltage, while upon formation of ±45º cracks, the output voltage was diminished.

Figure 3.16 shows a plot of stress vs. cross-head strain, where the blue points correspond

to the entire data set, while the red crosses correspond to data after cracks became visible.

The values of stress at which cracks were forming can be used to study the interaction of

cracks located at the same region.

Figure 3.15 Voltage vs. strain from a photovoltaic integrated on a [±45º4]2S composite

laminate.

The results from composite laminate experiments showed that there is minimal

effect on the performance of the attached photovoltaics. The value of the cross-head

strain at which significant functional degradation was observed was approximately 3.3%,

which is higher than the value reported by Maung et al. of 1% [29]. It is noteworthy that

the extensive formation of cracks during the process of fragmentation that began at stains

of ~1% and potentially lower did not degrade the performance of the photovoltaic.

0

400

800

1200

1600

0 0.01 0.02 0.03 0.04

Vo

lta

ge

(mV

)

Cross-head Strain

Page 48: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

44

Figure 3.16 Tensile stress vs. cross-head strain from a [±45º4]2S composite laminate

specimen with an attached photovoltaic cell.

3.5. Discussion

The mechanical strength of the Si/ZnO bilayers was significantly lower than the

Si monolayer. Such low values can be attributed to the additional tensile stresses applied

to the ZnO layer to remove the specimen curvature during mounting onto the test

apparatus. The maximum stress in the ZnO layer was calculated by adding the stress

resulting from the curvature removal and that measured in the tensile experiments. The

resulting values of the maximum stress in each layer are provided in Table 3.2. The

mechanical properties of Si thin film strips were in agreement with literature data [59].

Thin film strips of the Si/ZnO bilayer were also generated by immersing the photovoltaic

into an aqueous acetic acid solution. The elastic modulus of Si/ZnO strips produced by

immersing the photovoltaic into deionized water was in agreement with values measured

0

50

100

150

200

250

0 0.01 0.02 0.03 0.04

Str

ess

(MP

a)

Cross-head Strain

Page 49: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

45

by other groups. For example, Kobiakov [60] calculated the elastic modulus of thin ZnO

single crystals to be equal to 126 GPa.

The experiments with photovoltaics attached to composite laminates resulted to a

maximum cross-head strain of 3.3% before the efficiency of the photovoltaic abruptly

dropped to zero. This value was significantly higher compared to published research [29].

Additional is required to understand fragmentation of the photovoltaics attached to

composite laminates. Pre-existing cracks in the ZnO superlayer could propagate to the Si

layer resulting in delamination and functional failure [46,61,62].

Page 50: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

46

CHAPTER 4

4. CONCLUSIONS

In this dissertation research the mechanical properties and failure mechanisms of

thin film materials used in inorganic photovoltaics were investigated and quantified for

the first time. The residual stresses generated during deposition were calculated for the Si

monolayer and the Si/ZnO bilayer. The mean compressive residual stress of the bilayer

was quite high averaging -661±93 MPa, while the mean compressive stress of the Si

monolayer was equally significant with an average value of -466±118 MPa. Upon release

of the Si/ZnO bilayer from the substrate, the composite film exhibited a residual

curvature, which was employed to calculate the residual stress gradient in the Si

monolayer Si and the Si/ZnO bilayer. The residual stress gradient in the Si monolayer

was found to be 274±20 MPa/µm. The residual stress gradient in Si/ZnO bilayer resulted

in a maximum tensile stress at the top surface of ZnO that was equal to 360±27 MPa, and

a maximum compressive stress at the bottom surface of Si that was equal to -319±24

MPa.

Microscale tension experiments were conducted with the aforementioned Si/ZnO

thin films to extract their mechanical strength and elastic modulus. The elastic modulus

of the amorphous Si layer was 93±6 GPa and its tensile strength was found to be

423±75.5 MPa after accounting for the stress gradient induced to the Si film in order to

be tested in a flat configuration. Similarly, the composite elastic modulus of the Si/ZnO

bilayer was 107±7 GPa which provided an elastic modulus of 120±13 GPa for the ZnO

component of the bilayer. Moreover, the mechanical strength of the Si/ZnO bilayer was

109±23 MPa after accounting for the stress gradient induced to the Si film in order to be

tested in a flat configuration. The mechanical properties of both set of experiments were

Page 51: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

47

found to be in accordance with results of other experimental groups. As a result the

maximum strain at failure in the Si monolayer and the Si/ZnO bilayer was 0.45 % and 0.1

%, respectively.

The role of structural load (strain) on the mechanical a functional reliability of the

aforementioned thin film photovoltaics was evaluated by initial experiments with

photovoltaics attached to carbon fiber laminate composites. Inspection of the surface of

the photovoltaics before and after integration with the composite laminates revealed no

major damage, while there was insignificant difference in the photovoltaic’s efficiency.

Uniaxial tension experiments of the [±45º4]2S composite laminate showed that the

photovoltaic efficiency remained unchanged until approximately 3.3% applied cross-head

strain.

Page 52: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

48

5. APPENDIX

A.1 Matlab code for calculating the strain field of mono- and bilayer micro-tensile

specimens by using the data produced by DIC analysis

%Dimitrios Antartis

%Fall 2010-Spring 2012

%Calculation of the strain field from frames as analyzed by DIC

clearall;

%Insert the number of rows, columns and the number of total frames (included in

the exported DIC data files)

J=##;

I=##;

No_frames=####;

formatlong;

Strain=zeros(No_frames,1);

%Loop for every frame captured

for n=1:1:No_frames;

m=1;

t=1;

Average_strain=0;

q=zeros(J,1);

x=zeros(I,1);

u=zeros(I,1);

%Import data

s=['Experiment_##_' num2str(n) '.dat'];

A(n)=importdata(s,',');

B=A(n);

b=B.data;

%Loop for every row and column in each file

for k=1:J

for z=1:I

x(z)=b(m,1);

u(z)=b(m,3);

m=m+1;

end

t=t+I;

[p,r]=polyfit(x,u,1);

q(k,1)=p(1);

end

%Calculate the average strain

for k=1:J

Average_strain=Average_strain+q(k,1);

end

Strain(n)=Average_strain/J;

end

%Print the values of strain

fprintf('%i\n\n',Strain)

Page 53: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

49

A.2 Data of radius of curvature, maximum tensile and compressive stress in the

Si/ZnO bilayer.

Table A.1 Curvature and maximum residual stress values in Si and ZnO of the Si/ZnO

bilayer.

Specimen #

Radius of

curvature

(µm)

Maximum

tensile stress

in ZnO(MPa)

Maximum

compressive stress

in Si (MPa)

1 376.82 340.26 -300.98

2 325.28 394.16 -348.66

3 319.94 400.75 -354.49

4 335.31 382.38 -338.24

5 329.04 389.66 -344.68

6 322.34 397.76 -351.85

7 365.96 350.35 -309.91

8 371.84 344.81 -305.01

9 391.35 327.62 -289.81

10 360.61 355.55 -314.51

11 386.94 331.36 -293.11

12 358.56 357.58 -316.31

13 389.72 328.99 -291.02

14 366.28 350.04 -309.64

15 335.87 381.74 -337.68

16 378.17 339.04 -299.91

17 387.78 330.64 -292.47

18 328.45 390.36 -345.30

19 336.51 381.01 -337.03

20 360.36 355.80 -314.73

Page 54: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

50

Table A.1 (cont.) Curvature and maximum residual stress values in Si and ZnO of the

Si/ZnO bilayer.

21 388.60 329.94 -291.86

22 381.10 336.44 -297.60

23 379.50 337.85 -298.86

24 377.26 339.86 -300.63

25 368.16 348.26 -308.06

26 354.98 361.19 -319.50

27 344.32 372.38 -329.39

28 388.25 330.24 -292.12

29 354.46 361.72 -319.97

30 339.25 377.93 -334.31

31 335.30 382.39 -338.25

32 344.23 372.47 -329.48

33 295.85 433.38 -383.35

34 360.69 355.47 -314.44

35 366.34 349.99 -309.59

36 411.93 311.25 -275.33

37 372.53 344.17 -304.45

38 375.93 341.06 -301.69

39 329.76 388.81 -343.93

40 318.12 403.04 -356.52 Average 360±27 -319±24

Page 55: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

51

REFERENCES

[1] N. López, L.A. Reichertz, K.M. Yu, K. Campman, W. Walukiewicz, “Engineering

the Electronic Band Structure for the Multiband Solar Cells”, Physical Review

Letter 106, pp. 028701-028704, (2011).

[2] M.A. Green, K. Emery, Y. Hishikawa, W. Warta, “Solar cell efficiency tables (version 37)”, Progress in Photovoltaics: Research and Applications 19(1), pp. 84-92, (2011).

[3] L.L. Kazmerski, Conversion efficiencies of the best research solar cells worldwide from 1976 through 2011 for various photovoltaic technologies; efficiencies determined by certified agencies/laboratories, National Renewable Energy Laboratory (NREL) (2011).

[4] V.M. Fthenakis, “Sustainability of photovoltaics: The case for thin-film solar cells”, Renewable and Sustainable Energy Reviews 13, pp. 2746-2750, (2009).

[5] V.M. Fthenakis, “Overview of potential hazards”, Practical Handbook of Photovoltaics: Fundamentals and Applications, Chapter VII-2, Elsevier Publications (2003).

[6] V.M. Fthenakis, M. Fuhrmann, J. Heiser, A. Lanzirotti, J. Fitts, W. Wang, “Emissions and Encapsulation of Cadmium in CdTe PV modules During Fires”, Progress in Photovoltaics Research and Applications 13, pp. 713-723, (2005).

[7] D.S. Ruby, P. Yang, S. Zaidi, S. Brueck, M. Roy, S. Narayanan, “”, AIP

Conference Proceedings 462, pp. 430-436, (1999).

[8] M. Law, L.E. Greene, J.C. Johnson, R. Saykally, P. Yang, “Nanowire dye-sensitized solar cells”, Nature Materials 4, pp. 455-459, (2005).

[9] R.R. King, D.C. Law, K.M. Edmondson, C.M. Fetzer, G.S. Kinsey, H. Yoon, R.A. Sherif, N.H. Karam, “40% efficient metamorphic GaInP/GaInAs/Ge multijunction solar cells”, Applied Physics Letters 90 (18), pp.183516-183516-3, (2009).

[10] F.C. Krebs, Polymer Photovoltaics: A Practical Approach, SPIE, Washington USA, pp. 12-32, (2008).

[11] G. Chidichimo, L.Filippelli, “Organic Solar Cells: Problems and Perspectives”, International Journal of Photoenergy 2010, pp. 123534-123545, (2010).

Page 56: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

52

[12] J. Morgado, R.H. Friend, F. Cacialli, “Environmental aging of poly(p-phenylenevinylene) based light-emitting diodes”, Synthetic Metals 114(2), pp. 189-196, (2000).

[13] M.T. Lloyd, D.C. Olson, P. Lu, E. Fang, D.L. Moore, S. White, M.O. Reese, D.S. Ginley, J.W.P. Hsu, “Impact of contact evolution on the shelf life of organic solar cells”, Journal of Materials Chemistry 19(41), pp. 7569-7780, (2009).

[14] D. Chen, A. Nakasara, D. Wei, D. Nordlund, T.P. Rusell, “PEHT/PCBM Bulk Heterojunction Organic Photovoltaics: Correlating Efficiency and Morphology”, Nano Letters 11, pp. 561-567, (2010).

[15] S.R. Ferreira, P. Lu, Y.J. Lee, R.J. Davis, J.W.P. Hsu, “Effect of Zinc Oxide Electron Transport Layers on Performance and Shelf Life of Organic Bulk Heterojunction Devices”, Journal of Physical Chemistry 115, pp. 13471-13475, (2011).

[16] H. Liang R.G. Gordon, “Atmospheric Pressure Chemical Vapor Deposition of Transparent Conducting Films of Fluorine Doped ZnO and their Application to Amorphous Silicon Solar Cells”, Journal of Material Science 42, pp. 6388-6399, (2007).

[17] J.V Coba, “Application of Copper Indium Gallium Diselenide Photovoltaic Cells to Extend the Endurance and Capabilitiesof the Raven RQ-11B Unmanned Aerial Vehicle”, Master’s Thesis, Naval Postgraduate School, pp. 28-33, (2010).

[18] A. Shah, P. Torres, N. Wyrsch, H. Keppner, “Photovoltaic Technology: The Case for Thin-Film Solar Cells”, Science 30, pp, 692-698, (1999).

[19] J. Boisvert, D. Law, R. King, D. Bhusari, X. Liu, S. Mesropian, D. Larrabee, R. Woo, K. Edmondson, D. Krutt, D. Peterson, K. Rouhani, B. Benedikt, N. Karam, “Development of space solar cells at spectrolab”, 35

th IEEE Photovoltaic

Specialists Conference pp. 000123-000127, (2010).

[20] M. Yamaguchi, “Radiation-resistant solar cells for space use”, Solar Energy

Materials and Solar Cells 68(1), pp. 31-53, (2001).

[21] V.M. Smirnov, A.S. Semenov, V.G. Sokolov, V.P. Konoshenko, I.I. Kovalyov, “Study of Micrometeoroid and orbital Debris Effects on the Solar Panels Retrieved for the Space Station “MIR””, Space Debris 2, pp. 1-7, (2001).

Page 57: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

53

[22] W.M. Beltman, P.J.M. Van der Hoogt, R.M. Spiering, H. Tijdeman, “Air loads on

solar panels during launch”, International Conference on Spacecraft Structures,

Materials & Mechanical Testing, pp. 27-29, (1996).

[23] G. Petrone, G. Spagnuolo, R. Teoderescu, M. Veerachary, M. Vitelli, “Reliability Issues in Photovoltaic Power Processing Systems”,IEEE Transitions on Industrial

Electronics 55, pp. 2569-2580, (2008).

[24] E. Molenbroek, D.W. Waddington, K.A. Emery, “Hot spot susceptibility and testing of PV modules”, Photovoltaic Specialists Conference 1, pp.547-552, (1991).

[25] R. Biswas, I. Kwon, C.M. Soukoulis, “Mechanism for the Staebler-Wronski effect in α-Si:H”, Physical Review B 44, pp. 3403-3406, (1991).

[26] M.D. Thouless, “Combined Cracking and Buckling of Films”, Journal of American

Ceramic Society 76, pp. 2936-2938, (1993).

[27] M. Utsunomiya, A. Yoshida, “Effect of mechanical strain on electrical characteristics of hydrogen amorphous silicon junctions”, Journal of Applied

Physics 66, pp. 308-311, (1989).

[28] J.W. Jeon, J.S. Im, S. Park, L. Fang, J. Jin, J.S. Kim, J.H. Ko, S.C. Yang, B.S. Bae, K.S. Lim, “Flexible amorphous silicon solar cells on glass-fabric reinforced composite films in the superstrate configuration”, 35

th Photovoltaic Specialists

Conference, pp. 001151-001154, (2010).

[29] K.J. Maung, H.T. Hahn, Y.S. Ju, “Multijunctional integration of thin-film silicon solar cells on carbon-fiber-reinforced epoxy composites”, Solar Energy 84(3), pp. 450-458, (2010).

[30] http://www.nanosolar.com/technology

[31] I. Chasiotis, W.G. Knauss, “A New Microtensile Tester for the Study of MEMS Materials with the aid of Atomic Force Microscopy”, Experimental Mechanics

42(1), pp. 51-57, (2002).

[32] K. Jonnalagadda, I. Chasiotis, S. Yagnamurthy J. Lambros, R. Polcawich, J. Pulskamp, M. Dubey, “Experimental Investigation of Strain Rate Dependence in Nanocrystalline Pt Films,” Experimental Mechanics 50(1), pp. 25-35, (2010).

Page 58: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

54

[33] K. Jonnalagadda, N. Karanjgaokar, I. Chasiotis, J. Chee, D. Peroulis, “Strain Rate Sensitivity of Nanocrystalline Au Films at Room Temperature”, Acta Materialia

58, pp. 4674-4684, (2010).

[34] D. Hariskos, S. Spiering, M. Powalla, “Buffer layers in Cu(In, Ga)Se2 solar cells and modules”, Thin Solid Films 480-481, pp. 99-109, (2005).

[35] C. Lungenschmied, G. Dennler, G. Czeremuszkin, M. Latrèche, H. Neugebauer, N.S. Sariciftci, “Flexible encapsulation for organic solar cells”, Proceedings of

SPIE 6197, pp. 6197121-8, (2006).

[36] B.T. Ahn, L. Larina, K.H. Kim, S.J. Ahn, “Development of new buffer layers for Cu(In,Ga)Se2 solar cells”, Pure and Applied Chemistry 80(10), pp. 2091-2102, (2008).

[37] G.L. Graff, R.E. Williford, P.E. Burrows, “Mechanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation”, Journal

of Applied Physics 96(4), pp. 1840-1849, (2004).

[38] G.G. Stoney, “The Tension of Metallic Films deposited by Electrolysis”, Proceeding of the Royal Society of London 82(553), pp. 172-175, (1909).

[39] L.B. Freund, S. Suresh, Thin Film Materials: Stress, Defect Formation and Surface Evolution, Cambridge University Press, (2004).

[40] Z.B. Zhao, J. Hershberger, S.M. Yalisove, J.C. Bilello, “Determination of residual stress in thin films: a comparative study of X-ray topography versus laser curvature method”, Thin Solid Films 415(1-2), pp. 21-31, (2002).

[41] J.A. Floro, E. Chason, Curvature-based techniques for real-time stress measurement during thin film growth, in: In Situ Real-Time Characterization of Thin Films, edited by Auciello O., Krauss, A.R., John Wiley & Sons, Inc., New York, (2001)

[42] Y. Zhang, Y. Zhao,“Applicability range of Stoney’s formula and modified formulas for a film/substrate bi-layer”, Journal of Applied Physics 99, pp. 053513 1-7, (2006).

[43] A.A. Volinsky, P. Waters, “Sub-critical telephone cord delamination propagation and adhesion measurements”, Materials Research Society Symposia Proceedings

854E, (2005).

Page 59: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

55

[44] A.A. Volinsky, “Experiments with in-situ thin film telephone cord buckling delamination propagation”, Materials Research Society Symposia Proceedings 749, W10.7, (2003).

[45] M.W. Moon, H.M. Jensen, J.W. Hutchinson, K.H. Oh, A.G. Evans, “The characterization of telephone cord buckling of compresses thin films on substrates”, Journal of the Mechanics and Physics of Solids 50(11), pp. 2355-2377, (2002).

[46] J.W. Hutchinson, Z. Suo, “Mixed-mode cracking in layered materials”, Advances in

Applied Mechanics 29, pp. 63-191, (1992).

[47] D.E. Packham, “Surface energy, surface topography and adhesion”, International

Journal of Adhesion & Adhesives 23, pp. 437-448, (2003).

[48] T. Sato, Y. Imai, T. Takahashi, T. Sakata, T. Sendai, Y. Nishimoto, S. Matsuno, T.

Maegawa, T. Iwata, “Wire electric discharge machining method, semiconductor

wafer manufacturing method, and solar battery cell manufacturing method”, US

2009/0212026 A1, issued November 16, 2005

[49] T. Buonassisi, S. Reitsma, R. Sweeney, M.D. Pickett, W. Huang, J. Lesniak, M.L.

Spencer, “Stress Evolution in Wafer Bulks and Edges During Industrial Solar Cell

Processing”, 22nd

EU-PVSEC (2007)

[50] A.A. Volinsky, N.R. Moody, D.C. Meyer, “Stress-induced periodic fracture

patterns in thin films”, 11th

International Congress on Fracture Proceedings, Turin,

Italy, (2005)

[51] F. Lewis, D. Mantovani, “Methods to Investigate the Adhesion of Soft Nano-Coating on Metal Substrates – Application to Polymer-Coated Stents”, Macromolecular Materials and Engineering 294(1), pp. 11-19, (2009).

[52] M.D. Kriese, D.A. Boismier, N.R. Moody, W.W. Gerberich, “Nanomechanical fracture-testing of thin films”, Engineering Fracture Mechanics 61(1), pp. 1-20, (1998).

[53] P. Delobelle. G.S. Wang, E. Fribourg-Blanc, D. Remiens, “Indentation modulus and hardness of Pb(Zr,Ti)O3 sol-gel films deposited on Pt and LaNiO3 electrodes An

Page 60: Residual STRESSES AND Mechanical Properties OF THIN FILM ...

56

estimation of the CijD compliances”, Journal of the European Ceramic Society 27,

pp. 223-230, (2007).

[54] M.P. O’Day, P. Nath, W.A. Curtin, “Thin film delamination: A discrete dislocation analysis”, Journal of the Mechanics and Physics of Solids 54, pp. 2214-2234, (2006).

[55] M.S. Kennedy, N.R. Moody, D.F. Bahr, “The aging of metallic thin films” Delamination, strain relaxation, and diffusion”, Journal of the Minerals, metals, and

Materials Society 59 (9), pp. 50-53, (2007).

[56] V. Le Houérou, C. Gauthier, R.Schirrer, “Energy based model to assess interfacial adhesion using a scratch test”, Journal of Material Science 43, pp. 5747-5754, (2008).

[57] S.J. Bull, E.G. Berasetegui, “An overview of the potential of quantitative coating adhesion measurement by scratch testing”, Tribology International 39, pp. 99-114, (2006).

[58] S.W. Cho, I. Chasiotis, “Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS”, Experimental Mechanics 47, pp. 37-49, (2007).

[59] C. Gaire, D.X. Ye, F. Tang, R.C. Picu, G.C. Wang, T.M. Lu, “Mechanical Testing of Isolated Amorphous Silicon Slanted Nanorods”, Journal of Nanoscience and

Nanotechnology 5, pp. 1893-1897, (2005).

[60] I.B. Kobiakov, “Elastic, piezoelectric and dielectric properties of ZnO and CdS single crystals in a wide range of temperatures”, Solid State Communications 35, pp. 305-310, (1980).

[61] M.D. Thouless, E. Olsson, A. Gupta, “Cracking of brittle films on elastic

substrates”, Acta Metallurgica et Materialia 40 (6), pp. 1287-1292, (1992).

[62] V.B. Shenoy, A.F. Schwartzman, L.B. Freund, “Crack patterns in brittle thin films”,

International Journal of Fracture 103, pp. 1-17, (2000).


Recommended