Lessons Learned from Harvard LISE and Other Peer InstitutionsSamir Srouji, PrincipalWilson Architects Inc.
Jacob Knowles, Director of Sustainable DesignBR+A Consulting Engineers
2014 UGIM SymposiumMemorial Hall, 1:45 - 2:15 pm16 June 2014
Right-Sizing Energy Efficient Cleanrooms
Comparing EUI
LISE Building • Harvard University
±900EUI
Life Science Laboratories • UMass Amherst
±150EUI
PROJECT SIZE
143,000 GSF
COMPLETION DATE
2008
SPACE ALLOCATIONCleanroom (CL 1000, CL 100) 9,000 SFImaging Suites (VC-E) 6,400 SFMaterial Synthesis 6,350 SFHigh Bay Labs (VC-E) 2,400 SFLow Vibration Labs (VC-E) 2,400 SFCafe, Conference, Office
LISE BuildingHarvard University
CleanroomTool Cost
Tool Hook-Up
Project Cost
Escalation & Alternates
ConstructionCost Estimate
MilestonesPreliminary Schedule
Diagram Draft Program
Nano Layouts Tool Manual Tool PlansDetailed Tool List
Chemical Usage
Emission Limits
Abatement Systems
Material Handling Report
Preliminary Code Check
Code Report
EvaluateSite Options
Site Selection
Site Concepts
Blocking & Stacking
Massing Options
Design Concepts
Dynamic Modeling
Isolation Systems
Vibration Report
Test ConceptsIsolation Systems
EMI / RF Report
Frame Concepts
Structure / Foundation
Concepts
Plant LayoutDistribute Concepts
OutlineScope
MEP Concepts
Day 1 vs. Full Build
Concept Level
Revisit Codes
Set FormatPROJECT COST
CONSTRUCTION COST
SCHEDULE
PROGRAM
VIBRATION
EMI / RFI
STRUCTURE
MEP
Check CompsInitial Cost
Model
Overall Workplan
Initial Workplan
Population Room List Room Sheets
TOOLS
CHEMICAL HANDLING
CODE / PERMITS
Tool List Utility Matrix
Codes Authorities
SITE
DESIGN
Survey & Borings
Geo Tech
Philosophy
Site Measurement
Site Measurement
Foundation Concept
Q-List LoadsBase Building
TY
PIC
AL
R&
D IS
SUES
NA
NO
ISSU
ES
Cleanroom Critical Path
CLEAN CLASS Set Criteria
Set Criteria
Set Criteria
Post Occupancy EvaluationLISE Building • Harvard University
2011
TECHNICAL ISSUES: Building Performance
• Humidity Control
• Energy Conservation - Lighting & HVAC Controls
• Construction Issues - Sprinkler Head Failure - Firelite Glass Delamination
ARCHITECTURAL DESIGN
• Size of Tower Floorplate
• Vertical Circulation
• Shortage of Meeting Space
2014
SUBMETERING
Purdue University
Georgia Institute of Technology
Duke University
Cornell University
Harvard University
Princeton University Carnegie Mellon University
Benchmarking
University of Michigan
University of Illinois Lawrence Berkeley National Lab
Energy Drivers in Cleanroom FacilitiesWhy is Scaleability Important?
ENERGY DRIVERS IN CLEANROOM FACILITIES
LIGHTING
TOOLS
MAKE UP AIR (MAHU)
RECIRC AIR (RAHU)
WHY IS SCALABILITY IMPORTANT?
LIGHTING
TOOLSMAKE UP AIR (MAHU)
RECIRC AIR (RAHU)
Operation with NO Turn DownWhy is Scaleability Important?
OPERATION WITH NO TURN DOWN
LIGHTING
TOOLS
MAKE UP AIR (MAHU)
RECIRC AIR (RAHU)
WHY IS SCALABILITY IMPORTANT?
LIGHTING
TOOLSMAKE UP AIR (MAHU)
RECIRC AIR (RAHU)
Operation WITH Turn DownWhy is Scaleability Important?
LIGHTING
TOOLS
MAKE UP AIR (MAHU)
MAHU TURN DOWN
RAHU TURN DOWN
RECIRC AIR (RAHU)
WHY IS SCALABILITY IMPORTANT?
OPERATION WITH TURN DOWN
LIGHTING
TOOLS
MAKE UP AIR (MAHU)
RECIRC AIR (RAHU)
TURN DOWN:
RAHU
MAHU
Metrics
MAHU
MAKE UP AHU• Air Changes per Hour (ACH)• Supply Air Temp (°F)
RECIRC AHU• Air Changes per Hour (ACH)• Efficiency (CFM/KW)
TOOL LOAD• Watts per Square Foot (W/SF)
Facilities Surveyed
Cornell
2002
U. of Michigan
1988/2008
Duke
2007
Georgia Tech
2009
Princeton
2015
Purdue
2005
U. of Illinois
1989
Harvard
2007
FACILITES SURVEYED
25,000
20,000
15,000
10,000
5,000
0
5,000
10,000
15,000
Cor
nell*
20
02?
Duk
e 2
007
Geo
rgia
Tec
h* (n
o Bi
o)
2009
Prin
ceto
n 2
015
Purd
ue
2005
U. o
f Illi
nois
198
9
U. o
f Mic
higa
n 1
988/
2008
Har
vard
20
07
10,000
1,000
1,000 at 100
100
1
10
1,000 at 100
1,000
10,000
10
100
1
SF
Designed for 108 W/sf, Operating at 8 W/sf
• Harvard would have liked more tools on emergency power; would have been more feasible at 8 W/sf
Tool Load (W/sf)TOOL LOAD (W/SF)
Designed for 108 W/sf, Operating at 8 W/sf
0
1
2
3
4
5
6
7
8
9
10
MIN AVERAGE W/SF
MAX
CR - UPS
CR - 8
CR - 7
CR - 6
CR - 5
CR - 4
CR - 3
CR - 2
CR - 1
CR - 480V Furnace
CR - 480V Furnace
Tool Load (W/sf)TOOL LOAD (W/SF) INSERT DIAGRAM, BASED ON
SAMIR’S SKETCH, HIGHLIGHTING THE SUBECT OF EACH CHART
0 10 20 30 40 50 60 70 80 90 100 110 120
LBNL 3 (A CLASS 10)
LBNL 16 (D)
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 18 (E.1 2)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
LBNL 17 (E.1 1)
CORNELL*
PRINCETON
U. OF MICHIGAN
HARVARD
TOOL LOAD (W/SF)
OPERATION
DESIGN
DESIGN
OPERATION
TOOL LOAD (W/SF) INSERT DIAGRAM, BASED ON SAMIR’S SKETCH, HIGHLIGHTING
THE SUBECT OF EACH CHART
0 10 20 30 40 50 60 70 80 90 100 110 120
LBNL 3 (A CLASS 10)
LBNL 16 (D)
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 18 (E.1 2)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
LBNL 17 (E.1 1)
CORNELL*
PRINCETON
U. OF MICHIGAN
HARVARD
TOOL LOAD (W/SF)
OPERATION
DESIGN
RESULTS PENDING CLARIFICATION
Design Capacity
RECIRCULATION AIR (ACH)
Turned Down from 275 ACH (Design) to 155/125 ACH (Operation Day/Night) • Particle Counters (Quick Ramp-Up, Slow Decay) • Building Timeclock • Annual CR Class Validation
-
1,000
2,000
3,000
4,000
5,000
6,000
7,000
8,000
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14
RECIRCULATION AHU-18 SUPPLY AIR FLOW
(DAYS)
Recirculation Air (ACH)
Turned Down from 240 ACH (Design) to 155/125 ACH (Operation Day/Night)
• Particle Counters (Quick Ramp-Up, Slow Decay)• Building Timeclock• Annual CR Class Validation
Recirculation Air (ACH)INSERT DIAGRAM, BASED ON
SAMIR’S SKETCH, HIGHLIGHTING THE SUBECT OF EACH CHART
RECIRCULATION AIR (ACH)
75 100 125 150 175 200 225 250
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
CARNEGIE MELLON
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
HARVARD
(ACH / H)
OPERATION
DESIGN
75 100 125 150 175 200 225 250
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
CARNEGIE MELLON
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
HARVARD
RECIRCULATION AIR (ACH)
OPERATION
DESIGN
NIGHT OPERATION
*CLASS 1,000 OPERATING AT CLASS 100
DESIGN
OPERATION
NIGHT OPERATION
INSERT DIAGRAM, BASED ON SAMIR’S SKETCH, HIGHLIGHTING
THE SUBECT OF EACH CHART
RECIRCULATION AIR (ACH)
75 100 125 150 175 200 225 250
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
CARNEGIE MELLON
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
HARVARD
(ACH / H)
OPERATION
DESIGN
75 100 125 150 175 200 225 250
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
CARNEGIE MELLON
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
HARVARD
RECIRCULATION AIR (ACH)
OPERATION
DESIGN
NIGHT OPERATION
*CLASS 1,000 OPERATING AT CLASS 100
INSERT DIAGRAM, BASED ON SAMIR’S SKETCH, HIGHLIGHTING
THE SUBECT OF EACH CHART
RECIRCULATION AIR (ACH)
75 100 125 150 175 200 225 250
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
CARNEGIE MELLON
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
HARVARD
(ACH / H)
OPERATION
DESIGN
75 100 125 150 175 200 225 250
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
CARNEGIE MELLON
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
HARVARD
RECIRCULATION AIR (ACH)
OPERATION
DESIGN
NIGHT OPERATION
*CLASS 1,000 OPERATING AT CLASS 100
Recirculation AHU Efficiency (CFM/KW)RECIRCULATION AHU EFFICIENCY (CFM/KW) INSERT DIAGRAM, BASED ON
SAMIR’S SKETCH, HIGHLIGHTING THE SUBECT OF EACH CHART
0 2000 4000 6000 8000 10000 12000
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 15 (C)
LBNL 18 (E.1 2)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
LBNL 17 (E.1 1)
CARNEGIE MELLON
CORNELL*
DUKE
PRINCETON
HARVARD
CFM / KW
DESIGN
OPERATION
0 2000 4000 6000 8000 10000 12000
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 15 (C)
LBNL 18 (E.1 2)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
LBNL 17 (E.1 1)
CARNEGIE MELLON
CORNELL*
DUKE
PRINCETON
HARVARD
RECIRCULATION AHU EFFICIENCY (CALCULATED CFM/KW)
DESIGN
OPERATION
NIGHT OPERATION
DESIGN
OPERATION
NIGHT OPERATION
RECIRCULATION AHU EFFICIENCY (CFM/KW) INSERT DIAGRAM, BASED ON SAMIR’S SKETCH, HIGHLIGHTING
THE SUBECT OF EACH CHART
0 2000 4000 6000 8000 10000 12000
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 15 (C)
LBNL 18 (E.1 2)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
LBNL 17 (E.1 1)
CARNEGIE MELLON
CORNELL*
DUKE
PRINCETON
HARVARD
CFM / KW
DESIGN
OPERATION
0 2000 4000 6000 8000 10000 12000
LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4)
LBNL 10 (A CLASS 100)
LBNL 15 (C)
LBNL 18 (E.1 2)
LBNL 11 (B.1 AIT)
LBNL 14 (B.2 ZONE 5)
LBNL 17 (E.1 1)
CARNEGIE MELLON
CORNELL*
DUKE
PRINCETON
HARVARD
RECIRCULATION AHU EFFICIENCY (CALCULATED CFM/KW)
DESIGN
OPERATION
NIGHT OPERATION
MAKE UP AIR (ACH)
Turned Down from 42 ACH (Design) to 17 ACH (Operation) • Used Balancing Dampers and VFDs on Exhaust Fans to turn down exhaust • Pressure-Differential Sensors added to allow supply air to track exhaust
Design Capacity
0
10000
20000
30000
0 1 2 3 4 5 6 7
MAKE UP AHU-01 SUPPLY AIR FLOW
(DAYS)
Make Up Air (ACH)
Turned Down from 42 ACH (Design) to 17 ACH (Operation)
• Used Balancing Dampers and VFDs on Exhaust Fans to turn down exhaust• Pressure-Differential Sensors added to allow supply air to track exhaust
Make Up Air (ACH)MAKE UP AIR (ACH) INSERT DIAGRAM, BASED ON
SAMIR’S SKETCH, HIGHLIGHTING THE SUBECT OF EACH CHART
0 10 20 30 40 50 60
LBNL 18 (E.1 2)
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
PRINCETON
U. OF ILLINOIS
U. OF MICHIGAN
HARVARD
MAKE UP AIR (ACH)
OPERATION
DESIGN
OPERATION & DESIGN OVERLAP
MAKE UP AIR (ACH) INSERT DIAGRAM, BASED ON SAMIR’S SKETCH, HIGHLIGHTING
THE SUBECT OF EACH CHART
0 10 20 30 40 50 60
LBNL 18 (E.1 2)
CORNELL*
DUKE
GEORGIA TECH* (NO BIO)
PRINCETON
U. OF ILLINOIS
U. OF MICHIGAN
HARVARD
MAKE UP AIR (ACH)
OPERATION
DESIGN
OPERATION & DESIGN OVERLAP
DESIGN
OPERATION
RESULTS PENDING CLARIFICATION
SUPPLY AIR TEMPERATURE (°F)
35
40
45
50
55
60
65
70
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14
DRY
BU
LB o F
(DAYS)
Supply Air Temp
SEPT 7-13, 2013 FEB 6-12, 2014
Designed for 46˚F Dewpoint, Operating at or below 43˚F Dewpoint
• Up to 6˚F Dewpoint Fluctuation• Supply Air Temp Reset, based on Dewpoint
OPERATION: DRY BULB
DESIGN
Supply Air Temperature (°F)
Design Capacity
RECIRCULATION AIR (ACH)
Turned Down from 275 ACH (Design) to 155/125 ACH (Operation Day/Night) • Particle Counters (Quick Ramp-Up, Slow Decay) • Building Timeclock • Annual CR Class Validation
-
1,000
2,000
3,000
4,000
5,000
6,000
7,000
8,000
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14
RECIRCULATION AHU-18 SUPPLY AIR FLOW
(DAYS)
Supply Air Temperature (°F)INSERT DIAGRAM, BASED ON
SAMIR’S SKETCH, HIGHLIGHTING THE SUBECT OF EACH CHART
SUPPLY AIR TEMPERATURE (°F)
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
CORNELL*
GEORGIA TECH* (NO BIO)
PRINCETON
PURDUE
U. OF ILLINOIS
U. OF MICHIGAN
HARVARD
SUPPLY AIR TEMPERATURE (°F)
DESIGN
OPERATION
OPERATION & DESIGN OVERLAP
DESIGN
OPERATION
INSERT DIAGRAM, BASED ON SAMIR’S SKETCH, HIGHLIGHTING
THE SUBECT OF EACH CHART
DEWPOINT (°F)
37 39 41 43 45 47 49 51 53 55
LBNL 3 (A CLASS 10) LBNL 12 (B.1 APS)
LBNL 13 (B.2 ZONE 4) LBNL 10 (A CLASS 100)
LBNL 11 (B.1 AIT) BERKELEY
CORNELL* DUKE
PRINCETON PURDUE
U. OF MICHIGAN HARVARD
DEWPOINT (°F)
OPERATION
DESIGN
OPERATION & DESIGN OVERLAP
OPERATION & DESIGN OVERLAP
Tool Load (W/sf)
1. Extra capacity provides flexibility, but rarely above 30 W/sf average2. Above 30 W/sf only in specific areas, based on anticipated tools (i.e. furnace)
Design for Scaleability
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
Tool Load (W/sf)
Recirculation Air
1. Don’t design too far above 200 ACH (may impact turn-down)2. Occupancy Sensors (unoccupied setback)3. Particle Counters (quick ramp-up, slow decay)4. CR Class Validation (how low can you go?)
Design for Scaleability
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
Recirculation AHU Efficiency (CFM/KW)
Recirculation AHU Efficiency (CFM/KW)
Make Up Air
1. Extra cfm capacity provides flexibility, but rarely above 30 ACH (5 cfm/sf)2. Supply cold (reheat locally) and reset higher3. Consider higher dewpoint
Design for Scaleability
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
Make Up Air (ACH)
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
Dewpoint (°F)
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
SUMMARY OF RECOMMENDATIONS
44 46 48 50 52 54 56 58 60 62 64 66 68 70 72 74
SUPPLY AIR TEMPERATURE (°F)
d: Best In Class Design O: Demand Reset+Dewpnt Control
37 39 41 43 45 47 49 51 53 55
DEWPOINT (°F)
O: Savings (Winter) d: Standard Practice d: First Cost Savings O: Savings (Summer)
0 10 20 30 40 50 60 70 80 90 100 110 120
TOOL LOAD (W/SF)
O: Potential Operation d: Tools with Diversity d: Flexible Design d: Only Specific Areas
0 10 20 30 40 50 60
MAKE UP AIR (ACH)
O: Potential Operation d: Tools+Benches+Diversity d: Flexible Design d: Only Specific Cases
0 2000 4000 6000 8000 10000 12000
RECIRCULATION AHU EFFICIENCY (CFM/KW)
d: High Perform Design d: Best In Class Design O: High Perform Operation O: Best In Class Operation
75 100 125 150 175 200 225 250 275 300
RECIRCULATION AIR (ACH)
O: Potential Unoccupied O: Best In Class Operation O: High Perform Operation d: First Cost Savings d: Flexible Design d: Risk Limiting Turn Down
Supply Air Temperature (°F)