S. Cova et al., 2004 POLIMI - Politecnico di Milano, DEI Optoelectronics & Microsystems Lab Bias:...

S. Cova et al., 2004

POLIMI - Politecnico di Milano, DEI

Optoelectronics & Microsystems Lab

• Bias: well ABOVE breakdown

• Geiger-mode: it’s a TRIGGER device!!

• Gain: meaningless ... or “infinite” !!

• Bias: slightly BELOW breakdown

• Linear-mode: it’s an AMPLIFIER

• Gain: limited < 1000

Avalanche PhotoDiode Single-Photon Avalanche Diode

APD SPAD




for SPAD operation anywayfor SPAD operation anyway

mandatory

to avoid local Breakdown, i.e.

• edge breakdown guard-ring feature

• microplasmas uniform area, no precipitates etc.

but for good SPAD performance.....but for good SPAD performance.....

further requirements!!




Thin Si SPAD Thick Si SPAD

Planar structure

typical active region:

20 m diameter

1 m thick

Reach-Through structure

typical active region:

200 m diameter

30 m thick(PerkinElmer modules SPCM-AQR)




Passive quenching is simple... Passive quenching is simple...

Current Pulses

Diode Voltage

… … but suffers frombut suffers from

• long, not well defined deadtime

• low max counting rate < 100kc/s

• photon timing spread

• et al




ActiveActive quenching….quenching….

...provides:...provides:• short, well-defined deadtime

• high counting rate > 1 Mc/s

• good photon timing

• standard logic output

Output Pulses

P.Antognetti, S.Cova, A.LongoniIEEE Ispra Nucl.El.Symp. (1975)Euratom Publ. EUR 537e




Earlier modules

in the 80’s

Compact modules

in the 90’s

Integrated AQC

today

AQC evolution




Recent AchievementRecent Achievement

• Microelectronic Single-Photon Detector

for studies on Single-Molecule Dynamics

collaboration with X. Sunney Xie, Harvard University, Dept. of

Chemistry and Chemical Biology

Reference:H. Yang, G. Luo, P. Karnchanaphanurach, T.M. Louie, I. Rech, S.Cova, L. Xun, and X. Sunney Xie, “Single-Molecule Protein Dynamics on Multiple Time Scales Probed by Electron Transfer”, SCIENCE, Oct.10, 2003, Vol.302, 262-266




However: the best commercially available Photon Counting Modules

DO NOT have adequate performance in terms of picosecond-resolution, high detection efficiency and low-noise

Xie’s idea: to probe Single-Molecule Protein Dynamics by a correlation analysis offluctuations in real time of fluorescent photon delay with respect to laser excitation




SPTM Single Photon Timing Modulefor Single-Molecule Experiments

FWHM=60ps

• High Time-resolution: 60ps • Low Dark Counts: down to 5 c/s• Quantum Detection Efficiency: 45% @ 500nm

• Single power supply +15V• Controlled Temperature (Peltier cell)• Software controlled settings• RS-232 data transmission





• Ultrasensitive Capillary Electrophoresys (CE)

Microchip for DNA fragment separationcollaboration with

M. Chiari, CNR Inst. of Chemistry and Molecular Recognition, Milano

Reference:

I. Rech, A. Restelli, S. Cova, M. Ghioni, M. Chiari, ad M. Cretich,

“Microelectronic Photosensors for Genetic Diagnostic Microsystems”

Journal of Sensors and Actuators – B , in press 2004




DNA Fragment separation

Electropherogram




SeparationInjection

Sample

Buffer

Waste

Chip Electrophoresis




121416181101121141161181

0

10000

20000

30000

40000

50000

60000

70000

80000

Static measure5ng/ul

0,5ng/ul

0,05ng/ul

100pM oligonucleotide labelled with CY 5

300

400

500

600

700

800

900

1000

1100

1200

1300

0 50 100 150 200Time [Sec.]

Cou

nts

[c/s

]

S/N=35

• CE Separation in glass microchip• run buffer: TAPS-TRIS 100mM pH 8.5.• Sample : 23 mer oligonucleotide labelled with CY 5

• Detection limitDetection limit (@ S/N=3) : (@ S/N=3) : 1pM1pM

corresponds to < 30 molecules in the injection volume of 50pL





• Photon-Counting Quadrant Detectors and

Electronics for Adaptive Optics Systems of

Advanced Telescopescollaboration with

D.Bonaccini, ESO European Southern Observatory, Garching, D

and R. Biasi, Microgate, Bolzano, I

Reference:development of the STRAP (System for Tip-tilt Removal with Avalanche Photodiodes) for the VLT Observatory, Cerro Paranal, Chile




• 4 SPAD PerkinElmer SLIK®

• 4 hybrid AQC

• 4 E2PROM

Collaboration: Politecnico di Milano - ESO - Microgate (I) - CNR

STRAP Adaptive-Optics System of the VLT Observatory (Chile) of the European Southern Observatory ESO




Quad- SPAD detection head

• 4 SPAD PerkinElmer SLIK®

• 4 hybrid AQC

• 4 E2PROM

Collaboration: Politecnico di Milano - ESO - Microgate (I) - CNR

STRAP Adaptive-Optics System of the VLT Observatory (Chile) of the European Southern Observatory ESO





• Non-invasive testing of ULSI Circuits by

Ultrasensitive Picosecond Time-Resolved

Measurements of MOSFET Luminescence collaboration with

IBM T.J. Watson Research Center, Yorktown Heights, NY

Reference:Stellari F., Zappa F., Cova S., Porta C., Tsang J.C., "High-Speed CMOS Circuit Testing by 50ps Time-Resolved Luminescence Measurements"IEEE Trans. Electron Devices, 48, 2830-2835 (2001)




MOSFET hot-carriers luminescence

hot-carriers

photon emission

impact ionization

n+p+

p

drainsourcebulk gate h




Measurement technique

mirror

objectives

conventionalviewer

50x

5x

SPAD detector

device under test

start

stop

TACMCA

AQC

TCPC




-0.1 0.0 0.1 0.2 0.3 0.40

20

40

60

80

100

120

FWHM = 50ps

Cou

nts

(a.u

.)

Time [ns]

Single-inverter transition

FWHM=250ps

[ J.C. Tsang et al., APL, feb. 1997 ]

SPAD PMT




Many inverters transitions

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