S AF E T Y I N N AN O S C A L E S C I E N C E & E N G I N E E R I N G L AB O R AT O RY B U I L D I N G S
2 0 1 2 N S F
N A N O S C A L E S C I E N C E A N D E N G I N E E R I N G G R A N T E E S C O N F E R E N C E
A R L I N G T O N , V A 3 D E C E M B E R 2 0 1 2
Mark Jamison, P.E.
Vice President | HDR Architecture, Inc.
S A F E T Y I N N A N O S C A L E
S C I E N C E A N D E N G I N E E R I N G
L A B O R ATO RY B U I L D I N G S
» Safety means to protect:
• Human Health = Workers
• External Environment = Good Neighbor
• Laboratory Facilities = Investment
» Science & Engineering Laboratory
Buildings
• Complex Buildings & Systems
• Building Systems – HVAC,
Plumbing, Electrical, etc.
• Chemical & Gas Usage
• Equipment – From bench top to
large, heavy expensive items
• Work Environment – Labs,
Cleanrooms, Biosafety Labs, etc
S A F E T Y I N
N A N O S C A L E S C I E N C E
A N D E N G I N E E R I N G
L A B O R ATO RY
B U I L D I N G S
S A F E T Y I N N A N O S C A L E
S C I E N C E A N D
E N G I N E E R I N G
L A B O R ATO RY B U I L D I N G S
» Nanoscale (1 – 100 nm)
• Materials - size issues, toxicology not well
understood
• Processes - Many Similar to Other Science
Labs – size issues
• Environment – Many Laboratory Environmental
Criteria Tighter
» Temperature & Humidity
» Vibration & acoustics
» Electromagnetics
» Particulates
• Increased Laboratory Complexity
N A N O S C I E N C E & E N G I N E E R I N G
Applied Sciences Basic Sciences
Semiconductors
Biotech
/BioPharm
Biological
Chemical
Physical
Advanced
Technologies
P U R D U E U N I V E R S I T Y
B I R C K N AN O T E C H N O L O G Y C E N T E R
Typical Space Types
» Semiconductor Cleanroom
P U R D U E U N I V E R S I T Y
B I R C K N AN O T E C H N O L O G Y C E N T E R
Typical Space Types
» Semiconductor Cleanroom
» Bio Cleanroom
P U R D U E U N I V E R S I T Y
B I R C K N AN O T E C H N O L O G Y C E N T E R
Typical Space Types
» Semiconductor Cleanroom
» Bio Cleanroom
» Fabrication Labs
» “Quiet” Labs
» Metrology / Imaging Labs
» Optics Labs
» Biology Labs
P U R D U E U N I V E R S I T Y
B I R C K N AN O T E C H N O L O G Y C E N T E R
Typical Space Types
» Semiconductor Cleanroom
» Bio Cleanroom
» Fabrication Labs
» “Quiet” Labs
» Metrology / Imaging Labs
» Optics Labs
» Biology Labs
» Variety of Support Spaces
• Gas Bunkers
• Chemical Stores
• Waste Treatment
• Mechanical & Electrical
» Fire
» Chemical
» Biological
» Radiological
» Energy/Electricity
» Laser
» Cryogenic
» Hazardous Gas
» Pressure
» Leaks (pipes, tanks, equip.)
» Nanomaterial
B U I L D I N G S A F E T Y H A Z A R D S
Fire Safety
» Very well understood and highly
regulated.
» Fire & Smoke Detection
» Alarm & Notification
» Sprinkler Systems
» Other Extinguishing Systems
» Building Construction
» Building Separations
B U I L D I N G S A F E T Y H A Z A R D S
Chemical Safety
» Very well understood and
regulated.
» Chemical Fume hoods
» Other exhaust devices,
» Negative pressure control,
» Safety cabinets.
» Safety shower / Eye wash
» MSDS
B U I L D I N G S A F E T Y H A Z A R D S
BioSafety
» Very well understood and
regulated.
» Biocontainment facilities
» Biocontainment workstations
» Safe handling practices.
B U I L D I N G S A F E T Y H A Z A R D S
Energy Hazards
» Well understood and regulated
» Isolate, insulate, and ground
» Emergency power shut-off
» LOTO
» Maintain clearances
» Arc Flash
B U I L D I N G S A F E T Y H A Z A R D S
Laser/Optics Hazards
» Well understood and somewhat
regulated.
» Control the source and direction.
» Isolate the hazard – curtains, doors
» De-energize the source.
» Safety interlocks
B U I L D I N G S A F E T Y H A Z A R D S
Oxygen Depletion (Cryogens)
» Well understood and somewhat
regulated.
» Provide oxygen monitoring
» Quench tubes
» Purge exhaust
B U I L D I N G S A F E T Y H A Z A R D S
Hazardous Gases
(toxic, flammable, etc)
» Well understood and well regulated
» Substitute lower hazard
» Limit quantity
» Containment – vented cabinets
» Detect and shut down.
B U I L D I N G S A F E T Y H A Z A R D S
Nanomaterials
» Not yet well understood or easily
managed, and not regulated.
» Best practices and recommendations
only
» Based on best practices from other
hazards listed above.
» Data on toxicity and toxicology is
only slowly being developed, and is
not able to keep up with
development of novel engineered
materials.
B U I L D I N G S A F E T Y H A Z A R D S
H AV E Y O U L I V E D T H R O U G H T H I S ?
» Who has personally been involved in the:
» Design of a New Laboratory or Facility?
» Permitting of a New Laboratory or Facility?
» Construction of a New Laboratory or Facility?
• Construction of the Building
• Tool / Equipment Install
• Commissioning
• Certification of a Cleanroom
S A F E T Y I N T E G R A L TO P R O C E S S
» Safety in Planning
» Safety in Design
» Safety in Construction
» Safety in Commissioning
» Safety in Operation
» Safety in Maintenance
» Safety in Renovation
It is complex and involves everyone’s participation
So How do we Deal with Safety on a Project?
I T ’ S A T E A M E F F O R T
» Researchers
» Facilities Department
» Safety & Health
» Industrial Hygienist
» Fire Marshal
» Code Authorities
» Architects
» Engineers
» Contractors
» Suppliers
» Commissioning Agents
» Maintenance & Operations
» Process Engineering Staff
» Security
» Telecommunications
» Nurse
» Building Codes / Fire Codes
» National Fire Protection Association (NFPA) Standards
» Accessibility Codes
» American National Standards Institute (ANSI)
» International Organization for Standardization (ISO)
» Others
• Local Zoning
• EPA – Emissions, Waste Streams
• Energy
C O M P U L S O RY = C O D E S A N D S TA N D A R D S
C O D E S A N D G U I D E L I N E S
» The Building Codes
• International Building Code
• International Fire Code
• International Mechanical Code
• Electric Code – NFPA 70
A M EMBER OF THE IN TERN ATION A L COD E FA M ILY ®
IFC ®
IN TERN ATION AL F IR E COD E ®
A M EMBER OF THE IN TERN ATION AL COD E FA M ILY ®
IBC ®
IN TERN ATION AL B U IL D ING CODE ®
Receive FREEupdates, excerpts of code references, technical
articles, and more when you register your code book. Go to
www.iccsafe.org/CodesPlus today!
Building Code (IBC)
» USE AND OCCUPANCY CLASSIFICATION
• BUSINESS GROUP ‘B’ Occupancy
» Laboratories: testing and research
• HIGH-HAZARD GROUP ‘H’ Occupancy
» Chem rooms – H2, H3, H4 Many requirements
including Explosion Control
» Labs – Fabrication Cleanrooms – ‘H5’
» FIREWALLS – ‘SEPARATIONS’
» Control Areas – Chemical Quantity Limits
» Dampers
» TRAVEL DISTANCES
B U I L D I N G C O D E S
H A Z A R D O U S P R O D U C T I O N M AT E R I A L S
Building Code (IBC)
» HPM LIMITS
» Control Areas (‘B’ Occupancies)
• Hazardous Materials – Maximum
Allowable Quantities
» Solids, Liquids & Gas
» Storage
» Use – Closed Systems
» Use – Open Systems
H A Z A R D O U S P R O D U C T I O N M AT E R I A L S
Building Code (IBC)
» HPM LIMITS –
» H5 NanoFabs
• Hazardous Materials –
Maximum Allowable Quantities
» Solids, Liquids, Gas
• Gas Detection / Alarms
• Fire / Smoke Detection(Vesda)
» Not all Cleanrooms Must be
H Occupancy
d. The aggregate quantity of flammable, pyrophoric, toxic and
highly toxic gases shall not exceed 9,000 cubic feet at NTP.
F I R E C O D E S
Fire Codes ( NFPA)
» 13 - Automatic Sprinkler Systems and Standpipe Systems
» 10 - Portable Fire Extinguishers
» 30 - Flammable and Combustible Liquids Code
» 45 - Standard on Fire Protection for Laboratories Using Chemicals
» 55 - Compressed Gases and Cryogenic Fluids Code
» 72 - National Fire Alarm and Signaling Code
» 318 - Standard for the Protection of Semiconductor Fabrication Facilities
Mechanical & Electrical Codes
» Ventilation Systems
» Exhaust Systems
» Piped Liquids
» Drainage and Waste Systems
• Treatment Systems
» Power Supply
» Grounding
B U I L D I N G C O D E S
ANSI, OSHA
» ANSI/AIHA Z9.5 Laboratory Ventilation (American Industrial
Hygiene Association American National Standards Institute,
Inc.)
» OSHA Laboratory Standard - 29 CFR 1910.1450
• Occupational Health and Safety Standard for Laboratories using
Hazardous and Toxic Substances
» Insurance Requirements
O T H E R R E Q U I R E M E N T S
Semiconductor Incidents
Fire
Fluid Leaks
ServiceInterruptionMisc.
Explosion
» Over 2000 “Safety Incidents” in Semiconductor Fabs worldwide since
1977.
» Lives Lost
» Cost in the Billions
» Local environment degraded
» Many Codes have been in direct response to these incidents
» These Incidents Affect:
• Human Health = Workers
• External Environment = Good Neighbor
• Laboratory Facilities = Investment
W H Y B E C O N C E R N E D W I T H T H E C O D E S ?
W H O C A N H E L P Y O U ?
» Materials Suppliers
» Your Safety & Health Department
» Your Staff
» Architects
» Engineers
» Contractors
» Equipment Suppliers
V E N T I L AT I O N S Y S T E M S
» Pressurization
• Positive in cleanroom (to keep contamination
out) wrt corridor
• Negative in other types of labs handling
nanomaterials wrt corridor
• Negative in Biology labs wrt corridor
» Do Not Recirculate air if hazards exist
» Use directional airflow where possible
» Manage exposures with exhaust systems
» Exhaust Systems Used to
Maintain Negative Pressure
in Labs
» Capture & Containment
• Glove Box
• Powder-handling Enclosure
• Chemical Fume Hood
• Localized Snorkels
• Canopy Hoods
• General Room Exhaust
E X H A U S T A N D
C A P T U R E S Y S T E M S
A I R F I LT R AT I O N
» HEPA Filters on Exhaust
• Protect Discharge to Atmosphere
• Must Use Bag-In-Bag-Out Procedure
• Filters Must be Accessible for Maintenance
» Prefer No Recirculated Air, But Filter If There
is No Alternative
M AT E R I A L S S TO R A G E
» Provide Rooms for Chemical
and Gas Storage
» Secure Access Control
» Sealed Containers for Nanomaterials
» Labeling of All Materials is Critical
» Waste Storage and Disposal
» Verify That the Safety Systems
Designed Into the Building Work
» Critical Systems
• HVAC
• Exhaust
• Controls
• Chemical Fume Hoods
• Cleanroom
» Schedule Re-certifications –
Particularly Critical After
Renovations
C O M M I S S I O N I N G
B U I L D I N G S A F E T Y - A D M I N I S T R AT I V E
» Lab Users’ Safety Procedures and Policies
» Personnel Responsibilities
» Behavior
» PPE
» Chem Hazards – Liquids and Gases –
» Spills, Exposures
» Electrical Hazards
» EHS Communication – Labels, MSDS, Training
» Alarms, (Manual and Auto Detections)
» Shut-downs – EPO’s
» Evacuation Procedures
B U I L D I N G S AF E T Y - AD M I N I S T R AT I V E
Operational
• Material Handling/Transport
» Corrosives, Toxics, Flammables, Explosives
» Nanomaterials
» Spills and Clean-up–Wet, Dry Materials
» Disposal
» Alarms and Evacuation Protocols
» Training
F O C U S O N N A N O M AT E R I A L S
Do We Deal with them Differently?
Risk Management Protocols (NIOSH, CDC)
National Institute for Occupational Safety and Health
Centers for disease Control and Prevention
N A N O M AT E R I A L S A F E T Y
1
Elimination
2
Substitution
3
Engineering
4
Administrative
5
PPE
Change design
to eliminate
hazard
Replace a high
hazard for a low
hazard
Isolation /
enclosure,
ventilation (local,
general)
Procedures,
policies,
shift design
Respirators,
clothing, gloves,
goggles,
ear plugs
Process, Equipment or Job Task
*Source: Based on Approaches to Safe Nanotechnology NIOSH
N A N O M AT E R I A L S
Risk Management Protocols for Dealing with Nanomaterials
Is there a Nanomaterial Hazard?
What are the Materials?
What is the Potential for Exposure?
What are the Processes?
How can the Exposure be Controlled?
How will Emergencies be dealt with?
E X P O S U R E R I S K S
» Dock to Dump
• Receiving Materials (at the Dock)
• Generating nanomaterials in
non-enclosed systems
• Working with nanomaterials in liquid suspension
• Handling powders of nanostructured material
• Machining, sanding, etc. of nanomaterial solids
• Cleaning up spills
• Maintenance of fabrication equipment
• Cleaning of dust collection systems
• Building renovation projects
• Handling waste (proper Disposal)
WA S T E
Consider the Many Waste Streams
» Nanomaterials disposal
» Cleaning materials – wipes, vacuum filters, etc.
» Worker protective clothes, gloves
» Building systems filters
And How to Deal With Them
» Collect materials separately from standard waste
» Provide space to collect waste
» Procedure for disposal
B U I L D I N G S A F E T Y - E N G I N E E R E D
Designed-in Safety
» Risk Management Protocols (NIOSH, CDC)
• Identify the Hazard
• Assess the Exposure Potential
• Control the Exposure
E N G I N E E R I N G S O L U T I O N S
Building Systems – Similar to Other Hazards
» Ventilation Systems
» Exhaust Systems
» Special Capture / Containment Systems
» Cleanable Surfaces
» Room Pressurization
» Captured Waste Streams
» Safe Materials Storage Rooms & Containers
» Decontamination Facilities – Showers, Lockers, etc.
» Tacky Mats at Doors
A D M I N I S T R AT I V E C O N T R O L S
Operational
» Administrative controls can limit workers’ exposures
through techniques such as:
• Using job-rotation schedules that reduce the time an
individual is exposed to a substance
• Standard operating safety procedures
• General or specialized housekeeping procedures
• Spill prevention and control
• Proper labeling and storage of nanomaterials
• Employee training on the appropriate use and handling
of nanomaterials
P E R S O N AL P R O T E C T I V E E Q U I P M E N T
Operational
» (PPE)
• Gloves
• Goggles, Shields, Safety Glasses
• Shoe Types/Covers
• Materials Exposure Containments
• Respirators
H AV E A P L AN
All Nanomaterials Handling Should have a Work Plan
» A Written Plan
» Define the Materials
» Define the Process
» Identify Potential Risks
» Plan Control Strategies
» Implement Control Strategies
» Develop Procedures
» Training for Staff
» Plan for Emergencies
Don’t forget Visitors!
W H AT S H O U L D
U S E R S D O ?
» Prepare Your Emergency Management Plans!
» Be Involved in the Design and Operation of Your
Facility!
» Be Involved With the First Responders
» Understand the ‘Code Requirements’
U N D E R S TA N D T H E S A F E T Y F E AT U R E S
» Gas Monitoring and Automatic Shutoff Valves
• Manual Turn-ons Required
» PPE - locations and use
» Cleanroom Equipment Safety Features – Fire
Protection, Exhaust, Emergency Manual
Shut-offs
» Mechanical Air Systems – Supply and
Exhaust Systems – Emergency Operations
• Re-startup of Shutdown Systems – Power loss
» Electrical Systems – Emergency, Standby,
Dedicated, Conditioned, UPS
» Building Control Systems
S U M M A RY-
B E P R O A C T I V E
» Be involved in Facility Design and Construction
» Stay Involved on How the Facility is Supposed
to Operate
» Develop the Emergency Management Program
• Use Consultants if need be!
» Be involved in not just Safety Protocol Training
–but Code and NFPA Requirements also
» Be involved with EHS Departments and First
Responders–Policies, Processes, Procedures