© 2005 ASM
Scalability of Plasma-enhanced CVD and ALD towards 450mm
Nobuyoshi KobayashiDirector, R&D
ASM
June 22nd, 2011
Front-End Operations
© 2005 ASM 2
Contents
• Introduction for ASM Tool Line-up
• Plasma-enhanced CVD and ALD Roadmap
• Scalability towards 450mm
• Conclusions
Front-End Operations
© 2005 ASM 3
Scaling will increasingly be enabled by Materials and 3D Technologies
1995 2000 2005 2010 20151990 2025
Scaling enabled by Litho
Scaling enabled by Materials
Scaling enabled by 3D
2020
Low-k
Strained Si
High-k
FinFET
3D Memory
IEDM 2002
IEDM 2003
IEDM 2007
3D SIC
Front-End Operations
© 2005 ASM 4
ASM ProductsThin Film Deposition Solutions
Pulsar®
ALD
Cross-Flow
High-kAlO Apps.
Eagle®
Dragon®
PECVD/UV Cure/(PE)ALD
Showerhead
Low-kSpacer
PMD, IMD
EmerALD®
(PE)ALD
Showerhead
Metal Gate
MFLR
(PE)ALD
Cross-Flow
DPT
A412™ A400™
CVD/ALD/ Diffusion
Vertical Batch
Ox./AnnealPoly Si
Oxide/NitrideTiN Apps.
Epsilon®
Epitaxy
Cross-Flow
Epi Wfrs HBT’sStrain
XP Common Single Wafer Platform (2007 ~ 2011 ����)
New Products
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© 2005 ASM 5
ALD Technology Platform and Organization
Product Development, Product Engineering, Product Marketing and NPI Support
Process Development
Process Integration 32 - 22 nm
(A412) Demo Lab 300 mm
Bilateral and IIAP Projects
Pre-cursor Exploration and Feasibility
Materials R&D
Thin Film Characterization
ASM Belgium
ASM Europe
ASM Microchemistry (Finland)
AL
D
ASM America ASM Japan ASM Korea
Front-End Operations
© 2005 ASM 6
Contents
• Introduction for ASM tool line-up
• Plasma-enhanced CVD and ALD Roadmap
• Scalability towards 450mm
• Conclusions
Front-End Operations
© 2005 ASM 72012-10-01Confidential and Proprietary Information 7
Aurora® Low-k & UVC RoadmapPECVD
2.00
2.25
2.50
2.75
3.00
3.25
3.50
0 5 10 15 20 25 30 35
Porosity (%)
Die
lec
tric
co
ns
tan
t
Aurora®Lowk
Aurora®ULK
Aurora®ELK
+ UV
65nm ~ 45nm
k = 2.7
UV assisted
Non-porogen
32/22 nm node k<2.6 UV assisted
Porogen
15nm node k<2.3
10nm node k<2.0
Aurora®ELK
+ Advance UV
90nm node
k = 2.95~3.1
Front-End Operations
© 2005 ASM 8
Radical, Ion
ASM Patented Plasma-enhanced ALD
Precursor Pulse & Reactant Flow
Purge & Reactant Flow
RF ON & Reactant Flow
Plasma
Reactant Flow
Conformal Films
Low Temperature
Stress Tuning
Thx Control
PEALD SiO2 on SOC
By Courtesy of CASMAT* (Material Supplier Consortia in Japan)
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© 2005 ASM 9
Enabling Solution for BEOL low-k (k<2.2)Restoration and Pore sealing by PEALD/CVD
Porous SiOCH (k<2.2)
Pore sealing by PEALD
Front-End Operations
© 2005 ASM 10
Contents
• Introduction for ASM tool line-up
• Plasma-enhanced CVD and ALD roadmap
• Scalability towards 450mm
• Conclusions
Front-End Operations
© 2005 ASM 11
450mm Tool ConceptPECVD and PEALD
• High-productivity SW tool with a scalability towards 450mm
• Small footprint/throughput, and small width/throughput.
• Common platform and highly standardized RC
covers PECVD, PEALD and UVC applications
• HVM oriented HW configuration enables easy
and flexible process control
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© 2005 ASM 12
Wafer Transfer
Exhaust
Gas In
RF
• Most of the RC parts are COMMON for all the processes,
PECVD, PEALD and UVC.
• Symmetrical plasma distribution for excellent uniformity
• Upper chamber-unit change for the applications
PECVD - Basic Design
PEALD + Switching Valves.
+ Minimize SHD
inside-space
UVC + UV lamp unit
Commonality of Reactor Chamber (RC)
Front-End Operations
© 2005 ASM 13
Easy adjustment of film properties:
• All film property effective parameters can be adjusted independently.
• Enabling easy and precise film tuning.
Independent tuning nobs Effects
• RF Power (2RF) GR, Stress, Thx unif
• Susceptor Temperature WER, Stress, RI
• Precursor flow GR, WER, Stress,
Composition
• Process Time Thx
Process flexibility with independent tuning nobs
Low High
RF Power
Film
Str
ess
Front-End Operations
© 2005 ASM 14
Conclusions
• ASM has provided leading-edge 300mm deposition tools for HVM, such as ALD high-k and epitaxy for FEOL, TEOS oxide and Low-k carbon doped oxide for BEOL, and very low-temperature Plasma-enhanced ALD SiO2 for advanced litho applications.
• Common platform with Plasma-enhanced CVD and ALD provides various enabling solutions for advanced litho, FEOL and BEOL.
• We succeeded in the development of the new 300mm platform for PECVD and ALD which had the highest productivity with
small footprint.
• “Intelligent scaling” can be used to scale the current platform and its productivity to 450mm.
Intelligent scale-up – low technical risk approach while keeping ASM’s unique innovative power that is proven in 300mm.
ASM continues providing systems and process
solutions to meet the needs of the customer