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Scanning Electron Microscope (SEM) for Beginners

Date post: 18-Feb-2017
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Page 1: Scanning Electron Microscope (SEM) for Beginners

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Page 2: Scanning Electron Microscope (SEM) for Beginners

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Page 3: Scanning Electron Microscope (SEM) for Beginners

JEOL JSM-7600F Operation

CAUTIONS:Always use gloves while preparing/(un)loading the sample!Always make sure there is enough clearance between the top surface of the sample and the lens!

LOADING THE SAMPLE AND OBTAINING THE IMAGE1.Switch monitors onSEM (1a), Infrared chamber scope (1b), Analytical tools (1c).2.Contaminator (Optional)The built-in anti-contamination trap (5), located on the left side of the specimen chamber, can be filled with liquid Nitrogen to reducevisible contamination on the specimen by collecting any grease, dirt, or impurities that can impede image observation, especiallyat high magnifications. The cold finger has a capacity of 330 ml and is usable for nearly 4 hours once liquid Nitrogen is injected.Pour in slowly at first and allow the trap to chill down for several minutes, then add liquid Nitrogen until overflow occurs.It is important to maintain the trap fully cooled throughout your session because trapped gases will release if warmed -increasing specimen contamination.3.Prepare the sampleWear gloves before opening a table desiccators and using any sample holder or tools. Mount your sample on an sample stub withsuitable sample holder, use self-adhesive carbon conductive tab if needed (15). Tighten the screws to secure the sample in holder,inspect the sample to ensure that its highest point is flush with the edge or the sample holder as not hit any SEM components (16).4.Vent the chamberIn the Vacuum Mode module click on the Vent button (2a), after about 15 sec Vacum Status will indicate “Vented” and the indicatorbox will become red. Pull the chamber fastener and open the chamber door.5.Place the sampleAttach Sled with sample holder to the Specimen Exchange Rod (read caution), close the chamber door with fastener.6.Pump the chamberIn the Vacuum Mode module click on the Pump button (2b), Vacuum Status will show “Pumping” and the indicator box will becomeyellow. After 1 min Vacum Status will indicate “Vacuum” and the indicator box will become green.7.Load the samplePush the rod Specimen Exchange Rod in completely, so that the specimen base is securely inserted into the mating receiver onthe stage (2c). Pull back slightly on rod to ensure disengagement.8.Select starting work conditionsSet the number of the Aperture diaphragm to 4 for imaging or 1 in the case of EDS microanalysis (4), set the Work Distance toapproximately 10 mm (III-z or 3d), set magnification at about 25-50× (Low Magnification mode, V-LM or 3c), select the AcceleratingVoltage 10-20 keV (0,1-3 keV for charging and beam sensitive samples, I) and the Probe Current (Spot Size, IV) 6-14. Conditionscan be loaded from previous successfully generated image, right mouse click on the image and choose Set Conditions (X).9.Turn high voltage onPress the HV button on the Work page (I), an image appears in the active Quad.10.Optimize the focus, contrast and brightnessPress Auto Contrast and Brightness (ABC) button (3c). Correct the focus, contrast and brightness by relevant knobs (3c).11.Correct the astigmatismBring the image just slightly out focus – the image appears to become sharper in one direction whereas in perpendicular directionimage distortion increases (blurring or stretching of the image), defocus in the other direction to observe a opposite astigmaticdistortion, focus to the midpoint between the two distortions, adjust image sharpness with the stigmator X and Y knobs until thebest image is achieved, repeat whole procedure as necessary (3c or 4).12.AlignmentOnce the image is well focused and initial astigmatism compensation has been performed, the alignment procedure should beperformed. In fact, any time a detector, operating condition, or voltage is changed, the alignment sequence should be completed.Aperture and astigmatism align should be carried out at successively higher magnifications. Click on Wobbler (3c) and adjust imagewobbling by relevant knobs on Aperture (4 or 3c), objects in the image should stretch uniformly in all directions.13.Capture the imageReduce the magnification to the desired value, choose the image quality of the scan and click on the Photo button, the image willbe paused at the end of the scan (alternatively you can use the Pause button) and the request for image saving will appear, whereyou can choose the format, directory and save an image (3c).

REMOVING THE SAMPLE AND ENDING THE SESSION14.Turn high voltage offSet the Accelerating Voltage to 5keV, Low Magnification and click off the HV button on the Work page (I). Remove anydetectors (VII), which you might have inserted at the beginning of your session and click Change Position (VI).15.Retract your sampleSee step #7.16.Vent the chamberSee step #4.17.Remove the sampleOpen the Chamber Door and withdraw the Sample Holder from the Specimen Exchange Rod, close the door. Loosen the screwand remove the sample.18.Pump the chamberSee step #6. Always leave the chamber under high vacuum.19.Switch monitors off


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