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Scanning electron microscopy

Katedra experimentlnej fyziky

FMFI UKB r a t i s l a v a

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History

1897 - Discovery of the electron ( J. J. Thompson)

1924 - Particle and wave theory (L. deBroglie)

1926 - Electromagnetic lens (H. Busch)

1927 - Demonstration of electron diffraction (C. J.

Davisson and L. H. Germer) 1929 - Theoretical description of SEM (H. Stintzing)

1932 - Construction of first electron microscope(transmission) (M. Knoll and E. Ruska)

1935 - Demonstration of scanning electron

microscope theory (M. Knoll) 1938 - First SEM constructed (M. von Ardenne)

1939 - First commercial transmission electronmicroscope (B. von Borries and E. Ruska)

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History

1942 - Production of electrostatic lens SEM (V. K.Zworykin, J. Hillier and R. L. Synder)

1956 - Production of electromagnetic lens SEM (K. C.A. Smith)

1956 - X-ray microanalyzer with a scanning probe (V.E. Cosslett and P. Duncomb)

1960 - Improved secondary electron detector (T. E.Everhart and R. F. M. Thornley)

1960's - First commercial SEM (CambridgeInstrument Co., Ltd.)

1971- Construction of a STEM with a field emissionsource (A. V. Crewe and J. Wall)

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Physics

Electron interaction with sample

Electron energy spectrum

Electron

core electron interaction

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Electron interaction with sample

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Electron energy spectrum

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Electron core electron interaction

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Technics

Vacuum chamber

Electron optics

Image formation Electronics

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Tubus VEGA

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Electron gun

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Cathode

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Electromagnetic lens

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Detectors

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Image formation

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Image modes

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Image modes

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Image modes

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SEM VEGA TS5136MM

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Image Gallery

Poppy seed

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Image Gallery

Leaf of nettle with beetle

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Image Gallery

Fly head

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Image Gallery

Ant head

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Image Gallery

Ant feeler