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Entegris SDS® gas cylinders introduced a new
paradigm of safety and performance by storing
and delivering gas at sub-atmospheric pressures.
While SDS2 improved upon the original design,
the SDS3 o�ers significantly more gas capacity,
setting the standard for safety and performance.
Now, with Spectrum Materials, SDS3 cylinders
are widely available in China.
SDS®3 Safe Delivery Source®: An evolutionary leapin safe gas delivery
3
1994SDS1
Introduced
2005SDS3
Introduced1996SDS2
Introduced
TIMELINE
WHY SDS3 SYSTEMS?
MORE CAPACITY
WHY SPECTRUM MATERIALS?
WHY ENTEGRIS?
Arsine(AsH
3)
Phosphine(PH
3)
Enriched 11BoronTrifluoride (11BF
3)
While SDS2 has led the industry against similar competitive technology, SDS3 sets the new standard in safe gas storage.
Longer-lasting cylinders mean fewer changeouts, reduced safety risk, and less inventory.
Longer-lasting cylinders lead to greater consistency in finished chips from lot-to-lot.
Local Manufacturing in China
Fewer Changeouts Less Lot-to-Lot Variation
25+ Years of R&DExperienceChoicein Safety
Entegris-qualified Quality and Supply Chain
Entegris leads the industry in advanced gas safety standards and is certified as DOT SP and ISO article 11513.
AS
H
H H
AVAILABLE GASES
P
H
H H
11B
F
F F
2017SDS3 in Chinavia Spectrum
Materials
SDS2 SDS3
0 100 200 300 400 500 600 700 800 900
AsH³ (+49%)
11BF³ (+114%)
PH³(+94%)