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SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free...

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Heatpulse 8108 SECTION 1 WAFER AREA HANDLING LOCATOR 10 12 End Effector, 8 Inch, Push Rod Cooling Station End Effector, 5, 6, 8-Inch, Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, End of Cycle 8 Audible Alarm Error Condition Cassette Indicator Light 9 14 Front Bezel, U.S. and Japan 1 Front Bezel, European 2 13 4 5 6 7 Cassette Assembly, Swivel, Send, 5-6 Inch Cassette Assembly, Swivel, Send, 8 Inch Cassette Assembly, Stationary, Send, 5-6 Inch Cassette Assembly, Stationary, Send, 8 Inch Cassette Assembly, Stationary, Receive, 5-6 Inch Cassette Assembly, Stationary, Receive, 8 Inch Cassette Assembly, Swivel, Receive, 5-6 Inch Cassette Assembly, Swivel, Receive, 8 Inch 11 Main Home Page Home Table of Contents
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Page 1: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

Heatpulse 8108

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SECTION 1WAFER AREA HANDLING LOCATOR

10

12

End Effector, 8 Inch, Push Rod

Cooling Station

End Effector, 5, 6, 8-Inch, Slip-Free

End Effector, Thin

End Effector, Thin, with Plunger

3

Audible Alarm,End of Cycle

8

Audible AlarmError Condition

CassetteIndicator Light

9

14

Front Bezel, U.S. and Japan1

Front Bezel, European2

13

4

5

6

7

Cassette Assembly, Swivel, Send, 5-6 Inch

Cassette Assembly, Swivel, Send, 8 Inch

Cassette Assembly, Stationary, Send, 5-6 InchCassette Assembly, Stationary, Send, 8 Inch

Cassette Assembly, Stationary, Receive,

5-6 Inch

Cassette Assembly, Stationary, Receive,

8 Inch

Cassette Assembly, Swivel, Receive,

5-6 InchCassette Assembly,

Swivel, Receive,8 Inch

11

Main Home Page Home Table of Contents

Page 2: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

7100-1886-04

Heatpulse 8108

50

7

4

11

8

47

9

2

3

9

19

10

20

33

35

34

2 PL

PART OFITEM 41

2 PL

4 PL

52

43 4 PL

44 4 PL

45 4 PL

42

4 PL

2 PL

2 PL

2 PL

2 PL514 PL

5

23

2

7

29

31

25

46

7

11

28

2641

1

48

49

6

WARNING

HAND HAZARD

WATCH YOUR

FINGERS

WARNING

HAND HAZARD

WATCH YOUR

FINGERS

Page 3: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1886-04 Rev: V Description: Front Bezel Assembly, U.S. & Japan

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7300-1127-04 Bezel, Front 7300-1127-04 AG Associates2 5103-0020 Switch, 2-Pole, 125VAC, 10A, Black, Mom. AML 31FBA4AC Microswitch3 5103-0040 Lens, No-Legend, Type 51F, Green, P/B Sw AML51-F50G Microswitch4 5103-0050 Lens, No-Legend, Type 51F, Red, P/B Switch AML51-F50R Microswitch5 5103-0140 Switch, Operator Pushbutton, Red Mushroom ZB2-BC4 Steven Engineering, Inc.6 5103-0150 Switch, Contacts, PB NC/Mounting,. Base ZB2-BZ1022 Steven Engineering, Inc.7 5103-0070 Switch Guard, Rectangular, Clear, Type 76F AML76F10T01P Microswitch8 3703-0010 LED Indicator, 5/16” Diameter Hole, Red SLD8552 Alco9 2451-0030 Lamp, Wedge-Base, 28V, .04A 85 GTE Sylvania10 2000-0014-01 Disk Drive, 3 1/2, 1.44 MB 019307762 Teac11 5103-0030 Switch, 1-Pole, 125VAC, 3A, Black, Mom. AML 21FBA2AA Microswitch19 7310-5185-01 Bracket, Disk Drive 7310-5185-01 AG Associates20 2821-1140 Nut, SST, KEP, 8-32 UNC, Zinc – – – – – – – – – – – –23 7500-0085-02 Guard, EMO Switch 7500-0085-02 AG Associates25 5108-0004-01 Switch, Keylock, 4PDT A421-12-2-A-1-N C & K Components, Inc.26 2451-0004-01 Lamp, Wedge Base, 14. 0V AML91-A73 Microswitch28 5103-0039-01 Lens, Arrow Legend, Type 51F, Green AML51-F60G Microswitch29 5103-0038-01 Lens, Oven Interlock, Type 51F, Red AML51-F60R Microswitch31 2451-0043-01 Lamp, 6.3V, T 1-3/4, Wedge Base 86 General Electric33 7300-0439-02 Name Plate, Cooler 7300-0439-02 AG Associates34 7500-0790-01 Label, “HEATPULSE 8108” 7500-0790-01 AG Associates35 2826-1120 Nut, SST, KEP, 6-32 UNC – – – – – – – – – – – –41 5108-0017-01 Switch, Pressure, Pneumatic Valve BES-5352 Bay Pneumatic42 7500-0768-01 Guard, EMO Switch 7500-0768-01 AG Associates43 2810-7009-01 Washer, Shoulder, #4, Nylon 9M68-0904 Stock Drive Products44 2810-7010-01 Washer, Flat,#4, Fiber 9P74-0806 Stock Drive Products45 2806-0108-06 Screw, Phillips Panhead4-40 x .38 – – – – – – – – – – – –46 7100-4180-01 Harness, Window Keyswitch Robot Override 7100-4180-01 AG Associates47 7100-4179-01 Harness, Front Power Indicator Assembly 7100-4179-01 AG Associates

Page 4: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1886-04 Rev: U Description: Front Bezel Assembly, U.S. & Japan

Item # AG Part No. Component Description Manufacturer P/N Manufacturer48 7100-3554-01 Harness, Front Bezel, 8108 UL 7100-3554-01 AG Associates49 7100-3169-01 Harness, Auxilliary EMO, Front Bezel 7100-3169-01 AG Associates50 2806-0117-08 Screw, SST, XREC Panhead, 10-32 x .50 – – – – – – – – – – – –51 2816-2062 Washer, SST, Splitlock, #10, .33 OD – – – – – – – – – – – –52 2816-1061 Washer, SST, Flat, #10, .31 OD – – – – – – – – – – – –

Notes: The schematic for this Front Bezel is AG P/N 8330-5399-01.

Page 5: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

7100-5765-01

Heatpulse 8108

51

7

4

11

9

8

47

2

3

9

19

10

20

33

35

34

2 PL

PART OFITEM 41

2 PL

4 PL

53

43 4 PL

44 4 PL

45 4 PL

42

4 PL

2 PL

2 PL

2 PL

2 PL524 PL

5

23

2

7

29

31

25

7

11

28

26

46

50

41

1

48

6

Page 6: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-5765-01 Rev: B Description: Front Bezel Assembly, European

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7300-4465-01` Bezel, Front 7300-4465-01` AG Associates2 5103-0020 Switch, 2-Pole, 125VAC, 10A, Black, Mom. AML 31FBA4AC Microswitch3 5103-0040 Lens, No-Legend, Type 51F, Green, P/B Sw AML51-F50G Microswitch4 5103-0033-01 Lens, No-Legend, Type 51F, White, P/B Switch AML51-F50W Microswitch5 5103-0142-01 Switch, Operator Pushbutton, Red Mushroom ZB2-B554 Steven Engineering, Inc.6 5103-0150 Switch, Contacts, PB NC/Mounting,. Base ZB2-BZ1022 Steven Engineering, Inc.7 5103-0070 Switch Guard, Rectangular, Clear, Type 76F AML76F10T01P Microswitch8 3703-0060 LED Indicator, 5/16” Diameter Hole, Green 608-3231-110 Dialight9 2451-0030 Lamp, Wedge-Base, 28V, .04A 85 GTE Sylvania10 2000-0014-01 Disk Drive, 3 1/2, 1.44 MB 019307762 Teac11 5103-0030 Switch, 1-Pole, 125VAC, 3A, Black, Mom. AML 21FBA2AA Microswitch19 7310-5185-01 Bracket, Disk Drive 7310-5185-01 AG Associates20 2821-1140 Nut, SST, KEP, 8-32 UNC, Zinc – – – – – – – – – – – –23 7500-0085-02 Guard, EMO Switch 7500-0085-02 AG Associates25 5108-0004-01 Switch, Keylock, 4PDT A421-12-2-A-1-N C & K Components, Inc.26 2451-0004-01 Lamp, Wedge Base, 14. 0V AML91-A73 Microswitch28 5103-0039-01 Lens, Arrow Legend, Type 51F, Green AML51-F60G Microswitch29 5103-0038-01 Lens, Oven Interlock, Type 51F, Red AML51-F60R Microswitch31 2451-0043-01 Lamp, 6.3V, T 1-3/4, Wedge Base 86 General Electric33 7300-0439-02 Name Plate, Cooler 7300-0439-02 AG Associates34 7500-0790-01 Label, “HEATPULSE 8108” 7500-0790-01 AG Associates35 2826-1120 Nut, SST, KEP, 6-32 UNC – – – – – – – – – – – –41 5108-0017-01 Switch, Pressure, Pneumatic Valve BES-5352 Bay Pneumatic42 7500-0768-01 Guard, EMO Switch 7500-0768-01 AG Associates43 2810-7009-01 Washer, Shoulder, #4, Nylon 9M68-0904 Stock Drive Products44 2810-7010-01 Washer, Flat, #4, Fiber 9P74-0806 Stock drive Products45 2806-0108-06 Screw, Phillips Panhead, 4-40 x .38 – – – – – – – – – – – –46 7100-4180-01 Harness, Window Keyswitch Robot Override 7100-4180-01 AG Associates47 7100-4179-01 Harness, Front Power Indicator Assembly 7100-4179-01 AG Associates

Page 7: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-5765-01 Rev: A Description: Front Bezel Assembly, European

Item # AG Part No. Component Description Manufacturer P/N Manufacturer48 7100-3554-01 Harness, Front Bezel, 8108 UL 7100-3554-01 AG Associates50 2816-4150 Washer, SST, External Tooth, .75 OD – – – – – – – – – – – –51 2806-0117-08 Screw, SST, XREC Panhead, 10-32 x .50 – – – – – – – – – – – –52 2816-2062 Washer, SST, Splitlock, #10, .33 OD – – – – – – – – – – – –53 2816-1061 Washer, SST, Flat, #10, .31 OD – – – – – – – – – – – –

Notes: The schematic for this Front Bezel is AG P/N 8330-5399-01.

Page 8: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

9

16

5

6 PL

2 PL

2 PL

2 PL 182 PL

3 PL

12 3 PL

7

3

8

20

11

6

25

21

23

22

17

24

2 PL

2 PL

2 PL

2

10

13

1

10

7100-0577-05

Page 9: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-0577-05 Rev: W Description: Cooling Station Assembly

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0314-01 Base, Vertical Support 7200-0314-01 AG Associates2 7200-0310-01 Support, Cooling Station 7200-0310-01 AG Associates3 7200-0649-02 Base, Cooling Station 7200-0649-02 AG Associates5 7200-0313-01 Top, Cooling Station 7200-0313-01 AG Associates6 7300-0226-02 Diffuser, Inlet 7200-0226-02 AG Associates7 7300-0225-03 Diffuser, Cooling Station 7300-0225-03 AG Associates8 7100-3532-02 Assembly, Photoelectric Sensor/Reflector 7100-3252-01 AG Associates9 7400-0061-01 Wafer Pin, Cooling Station 7400-0061-01 AG Associates10 2510-0001-58 Dowel Pin, .1250D x .375L, SST D14-8 WM Berg11 7310-2985-01 Holder, Sensor 7310-2985-01 AG Associates12 2841-0003-01 Screw, Socket Head, No-Mar, 4-40 x .38 CS-25 PIC Design13 2504-0210 O-Ring, .301ID x .070W, 70 Duro 2-011-S604-70 Parker Hannifin16 2806-0408-06 Screw, SST, Socket Head, 4-40 x .38 – – – – – – – – – – – –17 2806-0417-08 Screw, SST, Socket Head, 10-32 x .50 – – – – – – – – – – – –18 2806-0417-09 Screw, SST, Socket Head, 10-32 x .56 – – – – – – – – – – – –20 2806-0108-04 Screw, SST, XREC Panhead, 4-40 x .25 – – – – – – – – – – – –21 2507-0160 Spacer, 3/16OD x .115ID x .25L, Brass 9017 HH Smith22 2806-0314-05 Screw, SST, Flat Head 100, 8-32 x .31 – – – – – – – – – – – –23 6011-0200 Cable Mount, Saddle Type TC-5142 T & B24 6100-0020 Cable Tie, 5 1/2” Long PLT1.5I-M Panduit25 2806-0508-06 Screw, SST, Socket Buttonhead, 4-40 x .38 – – – – – – – – – – – –

Note: This cooling station assembly has a more sensitive sensor for detecting a wider variation of colors on the waferbackside than the previous cooling station assembly. Please verify cooling station part number before orderingreplacement parts.

Page 10: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

21

26

3

11

18

8 9

12

23

6

23

23

4 PL

17

7100-2745-02

27

147 16

2015

2110

13

3 PL

4 PL2 PL

4 PL

4 PL

23

Page 11: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2745-02 Rev: G Description: End Effector Assy, 8 Inch, Push Rod

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0333-01 End Effector 7200-0333-01 AG Associates2 7500-0731-01 Chuck, Vespel 7500-0731-01 AG Associates3 7300-0212-01 Plate, Vacuum Channel 7300-0212-01 AG Associates6 2522-0270 Hose Barb, 10-32T x 1/16H, Brass 11752-2 Clippard7 7200-0336-01 Clamp, Guide Tube 7200-0336-01 AG Associates8 7650-0224-01 Tube, Plunger Guide, 8 Inch 7650-0224-01 AG Associates9 7500-0196-01 Plunger, Wafer Kicker, 8 Inch 7500-0196-01 AG Associates10 7200-0876-01 Plate, End Effector, 8 Inch 7200-0876-01 AG Associates11 7300-0799-01 Plate, Vacuum Slot, 8 Inch 7300-0799-01 AG Associates12 7200-0337-03 Plate, Vacuum Fitting 7200-0337-03 AG Associates13 7310-1658-03 Plate, Step Block 7310-1658-02 AG Associates14 2806-0512-12 Screw, SST, Socket Buttonhead, 6-32 x .75 – – – – – – – – – – – –15 2806-0404-03 Screw, SST, Socket Head, 2-56 x .19 – – – – – – – – – – – –16 2806-0204-02 Screw, SST, XREC 82, 2-56 x .12 – – – – – – – – – – – –17 7100-3197-01 Emitter Detector Assembly 7100-3197-01 AG Associates18 2500-0005-01 Compression Spring 2505 Century Spring20 7500-0089-02 Stop, Plunger 7500-0089-02 AG Associates21 7310-2097-01 Cover, Locator Cap 7310-2097-01 AG Associates23 1600-0001-01 Gasket/Sealant, 2.8 Fl. Oz. RTV159RED General Electric26 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –27 2806-1008-04 Set Screw, SST, CUP PT, 4-40 x .25 – – – – – – – – – – – –

Page 12: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

8

910

3

2

14

13

1

6

2 5

2

4

2

7

11 4 PL

3 PL

7100-2744-01

Page 13: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2744-01 Rev: J Description: End Effector Assy., 5, 6 & 8 In, Slip-Free

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0941-01 Arm, Long 7200-0941-01 AG Associates2 1600-0001-01 Gasket/Sealant, 2.8Fl. Oz. RTV159RED General Electric3 7500-0731-01 Chuck, Vespel 7500-0731-01 AG Associates4 7200-0944-01 Cover, Short 7200-0944-01 AG Associates5 7200-0942-01 Spacer, Arm 7200-0942-01 AG Associates6 7200-0943-01 T-Cover, Long 7200-0943-01 AG Associates7 7310-1779-02 Adapter, Arm 7310-1779-01 AG Associates8 2504-0111-01 O-Ring, .237 ID x .103W, N674-70 2-108/N674-70 Parker9 2504-0020 Gasket, Fibre, #10 2-433-5604-70 Parker Seals10 2522-0270 Hose Barb, 10-32T x 1/16H, Brass 11752-2 Clippard11 2806-0512-09 Screw, SST, Socket Buttonhead, 6-32 x .56 – – – – – – – – – – – –13 7310-6087-01 Cover, Standard End Effector 7310-6087-01 AG Associates14 2806-0508-10 Screw, Button Head, 4-40 x .625 – – – – – – – – – – – –

Page 14: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

7100-4060-01

3

10

4

13

1

2

8 3 PL

3 PL

9

11

14

Page 15: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-4060-01 Rev: G Description: End Effector Assembly, Thin

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7310-3479-02 Arm, Thin, No Optics 7310-3479-02 AG Associates2 7310-3480-04 Adapter, Thin Arm 7310-3480-04 AG Associates3 7310-2533-01 Chuck, Vespel 7310-2533-01 AG Associates4 2806-0508-10 Screw, Button Head, 4-40 x .625 – – – – – – – – – – – –8 2806-0512-10 Screw, Buttonhead, 6-32 x .62 – – – – – – – – – – – –9 2504-2108-01 O-Ring Viton, .237 ID x .103W, 2-108 2-108 Parker Seals10 1600-0001-01 Gasket, Sealant RTV159RED General Electric11 2522-0270 Hose Barb, 10-32T x 1/16H, Brass 11752-2 Clippard13 7310-6087-01 Cover, Standard End Effector 7310-6087-01 AG Associates14 2504-0020 Gasket, Fibre, #10 2-433-5604-70 Parker Seals

Page 16: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

7100-4061-01

3

10

4

14

1

211

5

8 3 PL

2 PL

3 PL

74 PL

4 PL

9

12

7

15

Page 17: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-4061-01 Rev: G Description: End Effector Assembly, with Plunger, Thin

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7310-3479-02 Arm, Thin, No Optics 7310-3479-02 AG Associates2 7310-3480-04 Adapter, Thin Arm 7310-3480-04 AG Associates3 7310-2533-01 Chuck, Vespel 7310-2533-01 AG Associates4 2806-0508-04 Screw, Button Head, 4-40 x .25 – – – – – – – – – – – –5 2806-0404-04 Screw, Socket Head, 2-56 x .25 – – – – – – – – – – – –7 2806-1008-04 Set Screw, Cap, 4-40 x .25 – – – – – – – – – – – –8 2806-0512-10 Screw, Button Head, 6-32 x .62 – – – – – – – – – – – –9 2504-2108-01 O-Ring Viton, .237 ID x .103W, 2-108 2-108 Parker Seals10 1600-0001-01 Gasket, Sealant RTV159RED General Electric11 7100-3792-01 Plunger Assembly, Optical End Effector 7100-3792-01 AG Associates12 2522-0270 Hose Barb, 10-32T x 1/16H, Brass 11752-2 Clippard14 7310-6087-01 Cover, Standard End Effector 7310-6087-01 AG Associates15 2504-0020 Gasket, Fibre, #10 2-433-5604-70 Parker Seals

Page 18: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

3

12

4

1

2

6

7

11

5

10 10 PL

2 PL

2 PL

7100-3755-01

Page 19: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-3755-01 Rev: B Description: Audible Alarm Assembly, EOC

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2101-0502 Housing, Nylon, Plug, 2-Position 1-480699-0 Amp, Inc.2 2101-0620 Contact, Socket, Gold-Plated, 20-14 AWG 350550-7 Amp, Inc.3 2200-0002-01 Alarm, Medium Loudness, 2900 Hz SC628 Mallory4 4756-0003-01 Resistor, Pot, 10K, Panel Mount GA2G056S103UA Allen Bradley5 4712-0682 Resistor, CC, 1/4W, 5% 6.8K – – – – – – – – – – – –6 6011-0310 Terminal Block, 15A, 16 AWG, 4-Position 4-140 TRW/Cinch7 6011-0312 Marker Strip, No-on-Bottom, 4-Position MS-4-140 TRW/Cinch10 2115-0110 Terminal, Fork, 22-18 AWG x #6, Insulated PNF 18-6F Panduit11 2821-2120 Nut, Steel, Hex, 6-32 UNC – – – – – – – – – – – –12 7300-0492-01 Bracket, Alarm 7300-0492-01 AG Associates

Page 20: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

7100-0884-04

3

12

4

14

1

2

6

7

11

5

13

15

10 5 PL

2 PL

3 PL

2 PL

2 PL

2 PL

2 PL

Page 21: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-0884-04 Rev: L Description: Audible Alarm Assembly, Error Condition

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2101-0302 Housing, Nylon, Plug, 2-Position 1-480698-0 Amp, Inc.2 2101-0640 Contact, Socket, Gold-Plated, 20-14 AWG 350550-7 Amp, Inc.3 2200-0002-01 Alarm, Medium Loudness, 2900 Hz SC628 Mallory4 4756-0003-01 Resistor, Pot, 10K, Panel Mount GA2G056S103UA Allen Bradley5 4712-0682 Resistor, CC, 1/4W, 5% 6.8K – – – – – – – – – – – –6 6011-0310 Terminal Block, 15A, 16 AWG, 4-Position 4-140 TRW/Cinch7 6011-0312 Marker Strip, No-on-Bottom, 4-Position MS-4-140 TRW/Cinch10 2115-0110 Terminal, Fork, 22-18 AWG x #6, Insulated PNF 18-6F Panduit11 2821-2120 Nut, Steel, Hex, 6-32 UNC – – – – – – – – – – – –12 7300-0492-01 Bracket, Alarm 7300-0492-01 AG Associates13 3105-0010 Heat Shrink, 1/16 Diameter HIX 1/16 ICO Rally Corp.14 3105-0030 Heat Shrink, 1/8 Diameter HIX 1/8 ICO Rally Corp.15 2115-0014 Terminal Fork, 16-14AWG, Insulated PNF-14-6F Panduit

Page 22: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

25

18

2626

2329

22

26

36

32

32

37

3 PL

26

383 PL

2 PL

32

14 31

31

81539

1386 8

33

8

39

15

19

27

17

24

35

3521

20

29

34

1141

16

12

28

817

7

6

17

45

8

2

5 319

30

39

REF

1

3

7100-1187-050641-0512-01

Page 23: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1187-05 Rev: H Description: Assembly, Cassette, Send, Stationary, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0736-01 Shaft, Idler Link 7200-0736-01 AG Associates2 7200-0394-01 Link, Idler 7200-0394-01 AG Associates3 7200-0393-01 Pin, Idler Link 7200-0393-01 AG Associates4 7200-0391-01 Link, Connector 7200-0391-01 AG Associates5 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates6 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates7 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates8 2502-0006-01 Ball Bearing, Double-Sealed, Flanged S418FCZZ7 MPB9 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring11 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates12 7300-0667-01 Shaft, Cassette Holder Actuator, 5-6-Inch 7300-0667-01 AG Associates13 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates14 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates15 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates16 2403-0060 Knob, Black, .500 Round x 1/8-Inch Shaft ON1B Control Knob17 2505-0160-01 Ring, Retaining Z3-1 PIC18 7200-0733-01 Support, Cassette Plate 7200-0733-01 AG Associates19 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates20 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates21 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates22 7200-1108-01 Base, Plate 7200-1108-01 AG Associates23 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates24 7200-0520-04 Plate, Wafer Carrier, 5-6 Inch 7200-0520-02 AG Associates25 5103-0001-01 Switch, Sub-Mini E63-00H Cherry26 2510-0001-58 Dowel Pin, .125 Diameter x .375 Long, SST D14-8 WM Berg27 2500-0004-01 Compression Spring S-332 Century Spring28 2806-0104-08 Screw, SST, XREC Panhead, 2-56 x .50 – – – – – – – – – – – –29 2806-1008-03 Set Screw, SST, Cup Pt, 4-40 x .19 – – – – – – – – – – – –

Page 24: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1187-05 Rev: H Description: Assembly, Cassette, Send, Stationary, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 2806-0104-02 Screw, SST, XREC Panhead, 2-56 x .12 – – – – – – – – – – – –31 2806-0104-04 Screw, SST, XREC Panhead, 2-56 x .25 – – – – – – – – – – – –32 2806-0417-010 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –33 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –34 2806-0414-16 Screw, SST, Socket head, 8-32 x 1.00 – – – – – – – – – – – –35 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –36 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates37 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –38 2806-1021-12 Set Screw, SST, Cup Pt, 1/4-28 x .75 – – – – – – – – – – – –39 2806-1008-02 Screw, SST, Cup Pt, 4-40 x .12 – – – – – – – – – – – –41 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –

Page 25: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

25

18

2626

2329

22

26

36

32

32

37

3 PL

26

383 PL

2 PL

32

14 31

31

81539

1386 8

33

8

39

15

19

27

17

24

35

3521

20

29

34

1141

16

12

28

817

7

6

17

45

8

2

5 319

30

39

REF

1

3

7100-1187-050641-0513-01

Page 26: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1187-05 Rev: H Description: Assembly, Cassette, Send, Stationary, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0736-01 Shaft, Idler Link 7200-0736-01 AG Associates2 7200-0394-01 Link, Idler 7200-0394-01 AG Associates3 7200-0393-01 Pin, Idler Link 7200-0393-01 AG Associates4 7200-0391-01 Link, Connector 7200-0391-01 AG Associates5 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates6 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates7 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates8 2502-0006-01 Ball Bearing, Double-Sealed, Flanged S418FCZZ7 MPB9 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring11 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates12 7200-0734-02 Shaft, Cassette Holder Actuator, 8-Inch 7200-0734-02 AG Associates13 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates14 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates15 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates16 2403-0060 Knob, Black, .500 Round x 1/8-Inch Shaft ON1B Control Knob17 2505-0160-01 Ring, Retaining Z3-1 PIC18 7200-0733-01 Support, Cassette Plate 7200-0733-01 AG Associates19 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates20 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates21 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates22 7200-1108-01 Base, Plate 7200-1108-01 AG Associates23 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates24 7200-0654-01 Plate, Wafer Carrier, 8 Inch 7200-0654-01 AG Associates25 5103-0001-01 Switch, Sub-Mini E63-00H Cherry26 2510-0001-58 Dowel Pin, .125 Diameter x .375 Long, SST D14-8 WM Berg27 2500-0004-01 Compression Spring S-332 Century Spring28 2806-0104-08 Screw, SST, XREC Panhead, 2-56 x .50 – – – – – – – – – – – –29 2806-1008-03 Set Screw, SST, Cup Pt, 4-40 x .19 – – – – – – – – – – – –

Page 27: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1187-05 Rev: H Description: Assembly, Cassette, Send, Stationary, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 2806-0104-02 Screw, SST, XREC Panhead, 2-56 x .12 – – – – – – – – – – – –31 2806-0104-04 Screw, SST, XREC Panhead, 2-56 x .25 – – – – – – – – – – – –32 2806-0417-010 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –33 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –34 2806-0414-16 Screw, SST, Socket head, 8-32 x 1.00 – – – – – – – – – – – –35 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –36 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates37 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –38 2806-1021-12 Set Screw, SST, Cup Pt, 1/4-28 x .75 – – – – – – – – – – – –39 2806-1008-02 Screw, SST, Cup Pt, 4-40 x .12 – – – – – – – – – – – –41 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –

Page 28: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

17 8

76

174

11

39

41

815

39

13 8 68

33

15

9

3114

17

27

31

29

8

3

1

39

25

5

2

31

22

26

37

3 PL

18

26

16

12

23

19

26

35

35 21

20

29

34

36

32

32

28

5

8

38

3 PL

30

2 PL

32

24

7100-1188-040640-0512-01

Page 29: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1188-04 Rev: H Description: Assembly, Cassette, Receive, Stationary, 5-6 Inch P/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0736-01 Shaft, Idler Link 7200-0736-01 AG Associates2 7200-0394-01 Link, Idler 7200-0394-01 AG Associates3 7200-0393-01 Pin, Idler Link 7200-0393-01 AG Associates4 7200-0391-01 Link, Connector 7200-0391-01 AG Associates5 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates6 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates7 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates8 2502-0006-01 Ball Bearing, Double-Sealed, Flanged S418FCZZ7 MPB9 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring11 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates12 7300-0667-01 Shaft, Cassette Holder Actuator, 5-6-Inch 7300-0667-01 AG Associates13 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates14 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates15 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates16 2403-0060 Knob, Black, .500 Round x 1/8-Inch Shaft ON1B Control Knob17 2505-0160-01 Ring, Retaining Z3-1 PIC18 7200-0733-01 Support, Cassette Plate 7200-0733-01 AG Associates19 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates20 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates21 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates22 7200-1108-01 Base, Plate 7200-1108-01 AG Associates23 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates24 7200-0520-04 Plate, Wafer Carrier, 5-6 Inch 7200-0520-02 AG Associates25 5103-0001-01 Switch, Sub-Mini E63-00H Cherry26 2510-0001-58 Dowel Pin, .125 Diameter x .375 Long, SST D14-8 WM Berg27 2500-0004-01 Compression Spring S-332 Century Spring28 2806-0104-08 Screw, SST, XREC Panhead, 2-56 x .50 – – – – – – – – – – – –29 2806-1008-03 Set Screw, SST, Cup Pt, 4-40 x .19 – – – – – – – – – – – –

Page 30: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1188-04 Rev: H Description: Assembly, Cassette, Receive, Stationary, 5-6 Inch P/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 2806-0104-02 Screw, SST, XREC Panhead, 2-56 x .12 – – – – – – – – – – – –31 2806-0104-04 Screw, SST, XREC Panhead, 2-56 x .25 – – – – – – – – – – – –32 2806-0417-10 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –33 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –34 2806-0414-16 Screw, SST, Socket Head, 8-32 x 1.00 – – – – – – – – – – – –35 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –36 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates37 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –38 2806-1021-12 Set Screw, SST, Cup Pt, 1/4-28 x .75 – – – – – – – – – – – –39 2806-1008-02 Screw, SST, Cup Pt, 4-40 x .12 – – – – – – – – – – – –41 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –

Page 31: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

17 8

76

174

11

39

41

815

39

13 8 68

33

15

9

3114

17

27

31

29

8

3

1

39

25

5

2

31

22

26

37

3 PL

18

26

16

12

23

19

26

35

35 21

20

29

34

36

32

32

28

5

8

38

3 PL

30

2 PL

32

24

7100-1188-040640-0513-01

Page 32: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1188-04 Rev: H Description: Assembly, Cassette, Receive, Stationary, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 7200-0736-01 Shaft, Idler Link 7200-0736-01 AG Associates2 7200-0394-01 Link, Idler 7200-0394-01 AG Associates3 7200-0393-01 Pin, Idler Link 7200-0393-01 AG Associates4 7200-0391-01 Link, Connector 7200-0391-01 AG Associates5 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates6 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates7 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates8 2502-0006-01 Ball Bearing, Double-Sealed, Flanged S418FCZZ7 MPB9 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring11 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates12 7200-0734-02 Shaft, Cassette Holder Actuator, 8-Inch 7200-0734-02 AG Associates13 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates14 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates15 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates16 2403-0060 Knob, Black, .500 Round x 1/8-Inch Shaft ON1B Control Knob17 2505-0160-01 Ring, Retaining Z3-1 PIC18 7200-0733-01 Support, Cassette Plate 7200-0733-01 AG Associates19 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates20 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates21 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates22 7200-1108-01 Base, Plate 7200-1108-01 AG Associates23 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates24 7200-0654-01 Plate, Wafer Carrier, 8 Inch 7200-0654-01 AG Associates25 5103-0001-01 Switch, Sub-Mini E63-00H Cherry26 2510-0001-58 Dowel Pin, .125 Diameter x .375 Long, SST D14-8 WM Berg27 2500-0004-01 Compression Spring S-332 Century Spring28 2806-0104-08 Screw, SST, XREC Panhead, 2-56 x .50 – – – – – – – – – – – –29 2806-1008-03 Set Screw, SST, Cup Pt, 4-40 x .19 – – – – – – – – – – – –

Page 33: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-1188-04 Rev: H Description: Assembly, Cassette, Receive, Stationary, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 2806-0104-02 Screw, SST, XREC Panhead, 2-56 x .12 – – – – – – – – – – – –31 2806-0104-04 Screw, SST, XREC Panhead, 2-56 x .25 – – – – – – – – – – – –32 2806-0417-10 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –33 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –34 2806-0414-16 Screw, SST, Socket Head, 8-32 x 1.00 – – – – – – – – – – – –35 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –36 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates37 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –38 2806-1021-12 Set Screw, SST, Cup Pt, 1/4-28 x .75 – – – – – – – – – – – –39 2806-1008-02 Screw, SST, Cup Pt, 4-40 x .12 – – – – – – – – – – – –41 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –

Page 34: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

45

29

34

45

44

31

5230

21

25

22

1543

39

15

24

3312

3652

3616

46

195

1916

4615

35

47

42

49

42 2 PL

2 PL

50

32

36

3 PL

42

48

42

3

2

28

2 PL

2 PL 2 PL2 PL

36

27

2 PL

51

1513

1539

24

20

23

26

15

1426

37

26

10

46717

9

1115

8

12

15

39

41

41

41

40

38

2 PL

2 PL

4

1

6

7100-2007-040641-0512-01

Page 35: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

63

2 PL

2 PL

2 PL

70

REF – from previous page

3

65

67

66

2 PL

69

65

64

85

84

58

59

83

57

81

82

2 PL

68

Attaches to baseplate

60

56

5561

2 PL

2 PL

2 PL

5 PL2 PL

6 PL2 PL

4 PL

4 PL61

71

Sensor and cableare part of item 64

Sensor and cable are part of item 64

7100-2007-040641-0512-01

Page 36: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2007-04 Rev: L Description: Cassette Assembly, Swivel, Send, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2502-0155-01 Bearing, Sealed .375 Bore FS3PP The Torrington Co.2 2507-1949-01 Spacer, Shaft, 3/8 I.D. x .5 O.D., .063 Thick A7x8-C12063 Stock Drive Products 3 7310-3433-01 Plate, Stopper Mount, Send 7310-3433-01 AG Associates4 7310-3435-01 Plate, Support, Swivel, Send 7310-4618-01 AG Associates5 7310-3437-01 Shaft, Bearing Preload 7310-3437-01 AG Associates6 2507-1949-02 Spacer, Shaft, .38 I.D. x .5 O.D., .250 Thick A7x8-C12250 Stock Drive Products7 7200-0738-01 Shaft, Swivel Gear 7200-0738-01 AG Associates8 7200-0394-01 Link, Idler 7200-0394-01 AG Associates9 7310-1650-01 Shaft, Idler Link, 8108 7310-1650-01 AG Associates10 7200-0737-01 Link Actuator 7200-0737-01 AG Associates11 7200-0391-01 Link, Connector 7200-0391-01 AG Associates12 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates13 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates14 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates15 2502-0006-01 Ball Bearing, Double Sealed, Flanged S418FCZZ7 MPB16 2502-0004-01 Miter Gear Set N1-7-S PIC Design17 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring19 2502-0003-01 Precision Shaft Spacer B4-8 PIC Design20 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates21 7200-0734-02 Shaft, Cassette Holder Actuator 7200-0734-02 AG Associates22 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates23 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates24 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates25 2403-0060 Knob, Black, .500 Long x 1/8” Round ON1B Control Knob26 2505-0160-01 Ring, Retaining Z3-1 PIC Design27 7200-1113-02 Plate, Cassette Support 7200-1113-02 AG Associates28 7310-3432-01 Support, Cassette Plate 7310-3432-01 AG Associates29 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates

Page 37: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2007-04 Rev: L Description: Cassette Assembly, Swivel, Send, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates31 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates32 7200-1108-01 Base, Plate 7200-1108-01 AG Associates33 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates34 7200-0520-04 Plate, Wafer Carrier, 5-6 Inch 7200-0520-04 AG Associates35 5103-0001-01 Switch, Sub-Mini E63-00H Cherry Electric Products36 2510-0001-58 Dowel Pin, .1250 Diameter x .375 Long, SST D14-8 WM Berg37 2500-0004-01 Compression Spring S-332 Century Spring38 2806-0104-08 Screw, SST, XREC, Panhead, 2-56 x .50 – – – – – – – – – – – –39 2806-1008-02 Set Screw, SST, Cup Point, 4-40 x .12 – – – – – – – – – – – –40 2806-0104-02 Screw, SST, XREC, Panhead, 2-56 x .12 – – – – – – – – – – – –41 2806-0104-04 Screw, SST, XREC, Panhead, 2-56 x .25 – – – – – – – – – – – –42 2806-0417-10 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –43 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –44 2806-0414-16 Screw, SST, Socket Head, 8-32 x 1.00 – – – – – – – – – – – –45 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –46 2806-0404-02 Set Screw, SST, Socket Head 2-56 x .125 – – – – – – – – – – – –47 2826-4230 Nut, SST, Lock, 5/16-24 – – – – – – – – – – – –48 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates49 2806-0417-14 Set Screw, SST, Socket Head, 10-32 x .88 – – – – – – – – – – – –50 2806-1021-12 Screw, SST, Cup Point, 1/4-28 x .75 – – – – – – – – – – – –51 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –52 2806-1008-03 Set Screw, SST, Cup Point, 4-40 x .19 – – – – – – – – – – – –50 2806-1021-12 Set Screw, SST, CUP Pt, 1/4-28 x .75 – – – – – – – – – – – –51 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –52 2806-1008-03 Set Screw, SST, Cup Point, 4-40 x .19 – – – – – – – – – – – –55 7200-1104-02 Tab, Adjustable Stopper 7200-1104-02 AG Associates56 7200-1105-01 Tab, Stopper 7200-1105-01 AG Associates

Page 38: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2007-04 Rev: L Description: Cassette Assembly, Swivel, Send, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer57 7200-1107-01 Pin, Pivot 7200-1107-01 AG Associates58 2505-0004-05 Ring, Retaining, E-Type, 3/16 Shaft Q1-18 WM Berg59 2507-0315-01 Shaft Spacer, 3/16 ID x .10 Inch Thick SS1-20 WM Berg60 2806-1014-06 Set Screw, SST, Cup Point, 8-32 x .38 – – – – – – – – – – – –61 2806-0412-10 Screw, SST, Socket Head, 6-32 x .62 – – – – – – – – – – – –63 7200-1114-03 Plate, Cylinder Mounting 7200-1114-03 AG Associates64 7100-3753-01 Actuator Assembly, Send Cassette 7100-3753-01 AG Associates65 2519-0006-01 Tubing, Nylon, Black, 1/4 OD x .170 ID NB-4-040 Parker Hannifin Corp.66 4502-0304-01 Speed Controller NAS2200-N01 SMC Pneumatics, Inc.67 2522-0071-01 Connector, Male, 1/4T x 1/8PThread 68P-4-2 Parker Hannifin Corp.68 2522-0816-01 Tee, Union, 1/4 Tube 164P-4 Parker Hannifin Corp.69 2806-0420-08 Screw, SST, Socket Head, 1/4-20 x .50 – – – – – – – – – – – –70 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –71 7310-0835-01 O-Ring, Adjustable Stopper 7310-0835-01 AG Associates81 2101-0506 Housing, Nylon, Cap, 6-Position 1-480705-0 Amp, Inc.82 2101-0610 Contact, Pin, Gold-Plated, 18-24 AWG 350690-7 Amp, Inc.83 6011-0001-01 Marker Tie, Small PLM1M Panduit84 3105-0050 Heat Shrink, 1/4 Long HIX 1/4 ICO Rally85 6011-0010 Cable Tie, 3 7/8 Long PLT1M-M Panduit

Page 39: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

45

29

34

45

44

31

5230

21

25

22

1543

39

15

24

3312

3652

3616

46

195

1916

4615

35

47

42

49

42 2 PL

2 PL

50

32

36

3 PL

42

48

42

3

2

28

2 PL

2 PL 2 PL2 PL

36

27

2 PL

51

1513

1539

24

20

23

26

15

1426

37

26

10

46717

9

1115

8

12

15

39

41

41

41

40

38

2 PL

2 PL

4

1

6

7100-2007-040641-0513-01

Page 40: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

63

2 PL

2 PL

2 PL

70

REF – from previous page

3

65

67

66

2 PL

69

65

64

85

84

58

59

83

57

81

82

2 PL

68

Attaches to baseplate

60

56

5561

2 PL

2 PL

2 PL

5 PL2 PL

6 PL2 PL

4 PL

4 PL61

71

Sensor and cableare part of item 64

Sensor and cable are part of item 64

7100-2007-040641-0513-01

Page 41: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2007-04 Rev: L Description: Cassette Assembly, Swivel, Send, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2502-0155-01 Bearing, Sealed .375 Bore FS3PP The Torrington Co.2 2507-1949-01 Spacer, Shaft, 3/8 I.D. x .5 O.D., .063 Thick A7x8-C12063 Stock Drive Products 3 7310-3433-01 Plate, Stopper Mount, Send 7310-3433-01 AG Associates4 7310-3435-01 Plate, Support, Swivel, Send 7310-4618-01 AG Associates5 7310-3437-01 Shaft, Bearing Preload 7310-3437-01 AG Associates6 2507-1949-02 Spacer, Shaft, .38 I.D. x .5 O.D., .250 Thick A7x8-C12250 Stock Drive Products7 7200-0738-01 Shaft, Swivel Gear 7200-0738-01 AG Associates8 7200-0394-01 Link, Idler 7200-0394-01 AG Associates9 7310-1650-01 Shaft, Idler Link, 8108 7310-1650-01 AG Associates10 7200-0737-01 Link Actuator 7200-0737-01 AG Associates11 7200-0391-01 Link, Connector 7200-0391-01 AG Associates12 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates13 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates14 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates15 2502-0006-01 Ball Bearing, Double Sealed, Flanged S418FCZZ7 MPB16 2502-0004-01 Miter Gear Set N1-7-S PIC Design17 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring19 2502-0003-01 Precision Shaft Spacer B4-8 PIC Design20 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates21 7200-0734-02 Shaft, Cassette Holder Actuator 7200-0734-02 AG Associates22 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates23 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates24 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates25 2403-0060 Knob, Black, .500 Long x 1/8” Round ON1B Control Knob26 2505-0160-01 Ring, Retaining Z3-1 PIC Design27 7200-1113-02 Plate, Cassette Support, 7200-1113-02 AG Associates28 7310-3432-01 Support, Cassette Plate 7310-3432-01 AG Associates29 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates

Page 42: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2007-04 Rev: L Description: Cassette Assembly, Swivel, Send, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates31 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates32 7200-1108-01 Base, Plate 7200-1108-01 AG Associates33 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates34 7200-0654-04 Plate, Wafer Carrier, 8 Inch 7200-0654-04 AG Associates35 5103-0001-01 Switch, Sub-Mini E63-00H Cherry Electric Products36 2510-0001-58 Dowel Pin, .1250 Diameter x .375 Long, SST D14-8 WM Berg37 2500-0004-01 Compression Spring S-332 Century Spring38 2806-0104-08 Screw, SST, XREC, Panhead, 2-56 x .50 – – – – – – – – – – – –39 2806-1008-02 Set Screw, SST, Cup Point, 4-40 x .12 – – – – – – – – – – – –40 2806-0104-02 Screw, SST, XREC, Panhead, 2-56 x .12 – – – – – – – – – – – –41 2806-0104-04 Screw, SST, XREC, Panhead, 2-56 x .25 – – – – – – – – – – – –42 2806-0417-10 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –43 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –44 2806-0414-16 Screw, SST, Socket Head, 8-32 x 1.00 – – – – – – – – – – – –45 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –46 2806-0404-02 Set Screw, SST, Socket Head 2-56 x .125 – – – – – – – – – – – –47 2826-4230 Nut, SST, Lock, 5/16-24 – – – – – – – – – – – –48 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates49 2806-0417-14 Set Screw, SST, Socket Head, 10-32 x .88 – – – – – – – – – – – –50 2806-1021-12 Screw, SST, Cup Point, 1/4-28 x .75 – – – – – – – – – – – –51 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –52 2806-1008-03 Set Screw, SST, Cup Point, 4-40 x .19 – – – – – – – – – – – –50 2806-1021-12 Set Screw, SST, Cup Point, 1/4-28 x .75 – – – – – – – – – – – –51 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –52 2806-1008-03 Set Screw, SST, Cup Point, 4-40 x .19 – – – – – – – – – – – –55 7200-1104-02 Tab, Adjustable Stopper 7200-1104-02 AG Associates56 7200-1105-01 Tab, Stopper 7200-1105-01 AG Associates

Page 43: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2007-04 Rev: L Description: Cassette Assembly, Swivel, Send, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer57 7200-1107-01 Pin, Pivot 7200-1107-01 AG Associates58 2505-0004-05 Ring, Retaining, E-Type, 3/16 Shaft Q1-18 WM Berg59 2507-0315-01 Shaft Spacer, 3/16 ID x .10 Inch Thick SS1-20 WM Berg60 2806-1014-06 Set Screw, SST, Cup Point, 8-32 x .38 – – – – – – – – – – – –61 2806-0412-10 Screw, SST, Socket Head, 6-32 x .62 – – – – – – – – – – – –63 7200-1114-03 Plate, Cylinder Mounting 7200-1114-03 AG Associates64 7100-3753-01 Actuator Assembly, Send Cassette 7100-3753-01 AG Associates65 2519-0006-01 Tubing, Nylon, Black, 1/4 OD x .170 ID NB-4-040 Parker Hannifin Corp.66 4502-0304-01 Speed Controller NAS2200-N01 SMC Pneumatics, Inc.67 2522-0071-01 Connector, Male, 1/4T x 1/8PThread 68P-4-2 Parker Hannifin Corp.68 2522-0816-01 Tee, Union, 1/4 Tube 164P-4 Parker Hannifin Corp.69 2806-0420-08 Screw, SST, Socket Head, 1/4-20 x .50 – – – – – – – – – – – –70 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –71 7310-0835-01 O-Ring, Adjustable Stopper 7310-0835-01 AG Associates81 2101-0506 Housing, Nylon, Cap, 6-Position 1-480705-0 Amp, Inc.82 2101-0610 Contact, Pin, Gold-Plated, 18-24 AWG 350690-7 Amp, Inc.83 6011-0001-01 Marker Tie, Small PLM1M Panduit84 3105-0050 Heat Shrink, 1/4 Long HIX 1/4 ICO Rally85 6011-0010 Cable Tie, 3 7/8 Long PLT1M-M Panduit

Note: To order the complete cylinder assembly (Item 64) including the cable, the part number is 7100-3753-02.

Page 44: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

2 PL2 PL

45

29

34

45

44

31

5230

21

25

22

1543

39

15

24

3312

3652

19

3

1

16

4615

354

42

42

2 PL

2 PL

2 PL

27

51

1513

1539

24

20

23

26

1515

26

37

26

10

467 17

9

1115

8

12

15

39

41

41

41

40

38

2

28

36

48

422 PL

49

32

503 PL

2 PL3 PL

36

36

5

1646

1

6

47

42

7100-2008-047100-0512-01

Page 45: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

63

2 PL

2 PL

2 PL2 PL

70

REF – from

previous page

3

65

67

66

6 PL

81

82

2 PL

69

64

Attaches to baseplate

60

56

55

61

2 PL

2 PL

2 PL

71

5 PL

4 PL

4 PL61

65

2 PL

68

58

83

59

57

84

85

Sensors and cablesare part of Item 64

7100-2008-040641-0512-01

Page 46: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2008-04 Rev: K Description: Cassette Assembly, Swivel, Receive, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2502-0155-01 Bearing, Sealed, .375 Bore FS3PP The Torrington Co.2 2507-1949-01 Spacer, Shaft, 3/8 x .5 x .0633 7310-3434-01 Spacer, Swivel Mechanism Link 7310-3434-01 AG Associates4 7310-3436-01 Plate, Support, Swivel, Receive 7310-3436-01 AG Associates5 7310-3437-01 Shaft, Bearing Preload 7310-3437-01 AG Associates6 2507-1949-02 Spacer, Shaft, .38 I.D. x .5 O.D., .250 Thick A7x8-C12250 Stock Drive Products7 7200-0738-01 Shaft, Swivel Gear 7200-0738-01 AG Asscoiates8 7200-0394-01 Link, Idler 7200-0394-01 AG Associates9 7310-1650-01 Shaft, Idler Link, 8108 7310-1650-01 AG Associates10 7200-0737-01 Link Actuator 7200-0737-01 AG Associates11 7200-0391-01 Link, Connector 7200-0391-01 AG Associates12 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates13 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates14 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates15 2502-0006-01 Ball Bearing, Double Sealed, Flanged S418FCZZ7 MPB16 2502-0004-01 Miter Gear Set N1-7-S PIC Design17 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring19 2502-0003-01 Precision Shaft Spacer B4-8 PIC Design20 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates21 7200-0734-02 Shaft, Cassette Holder Actuator 7200-0734-02 AG Associates22 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates23 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates24 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates25 2403-0060 Knob, Black, .500 Long x 1/8” Round ON1B Control Knob26 2505-0160-01 Ring, Retaining Z3-1 PIC Design27 7200-1113-02 Support, Cassette Plate Upper 7200-1113-02 AG Associates28 7310-3432-01 Support, Cassette Plate, Lower 7310-3432-01 AG Associates29 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates

Page 47: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2008-04 Rev: K Description: Cassette Assembly, Swivel, Receive, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates31 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates32 7200-1108-01 Base, Plate 7200-1108-01 AG Associates33 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates34 7200-0520-04 Plate, Wafer Carrier, 5-6 Inch 7200-0520-04 AG Associates35 5103-0001-01 Switch, Sub-Mini E63-00H Cherry Electric Products36 2510-0001-58 Dowel Pin, .1250 Diameter x .375 Long, SST D14-8 WM Berg37 2500-0004-01 Compression Spring S-332 Century Spring38 2806-0104-08 Screw, SST, XREC, Panhead, 2-56 x .50 – – – – – – – – – – – –39 2806-1008-02 Set Screw, SST, Cup Point, 4-40 x .12 – – – – – – – – – – – –40 2806-0104-02 Screw, SST, XREC, Panhead, 2-56 x .12 – – – – – – – – – – – –41 2806-0104-04 Screw, SST, XREC, Panhead, 2-56 x .25 – – – – – – – – – – – –42 2806-0417-10 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –43 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –44 2806-0414-16 Screw, SST, Socket Head, 8-32 x 1.00 – – – – – – – – – – – –45 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –46 2806-0404-02 Set Screw, SST, Cup Point, 2-56 x .12 – – – – – – – – – – – –47 2826-4230 Nut, SST, Lock, 5/16-24 – – – – – – – – – – – –48 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates49 2806-0417-14 Screw, SST, Socket Head, 10-32 x .88 – – – – – – – – – – – –50 2806-1021-12 Set Screw, SST, Cup Point, 1/4-28 x .75 – – – – – – – – – – – –51 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –52 2806-1008-03 Set Screw, SST, Cup Point, 4-40 x .19 – – – – – – – – – – – –55 7200-1104-02 Tab, Adjustable Stopper 7200-1104-02 AG Associates56 7200-1105-01 Tab, Stopper 7200-1105-01 AG Associates57 7200-1107-01 Pin, Pivot 7200-1107-01 AG Associates58 2505-0004-05 Ring, Retaining, E-Type, 3/16 Shaft Q1-18 WM Berg59 2507-0315-01 Shaft Spacer, 3/16 ID x .10 Inch Thick SS1-20 WM Berg

Page 48: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2008-04 Rev: K Description: Cassette Assembly, Swivel, Receive, 5-6 InchP/N: 0641-0512-01 Rev: A Description: Cassette Plate Kit, 5-6 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer60 2806-1014-06 Set Screw, SST, Cup Point, 8-32 x .38 – – – – – – – – – – – –61 2806-0412-10 Screw, SST, Socket Head, 6-32 x .62 – – – – – – – – – – – –63 7200-1114-03 Plate, Cylinder Mounting 7200-1114-03 AG Associates64 7100-3753-02 Actuator Assembly, Receive Cassette 7100-3753-02 AG Associates65 2519-0006-01 Tubing, Nylon, Black, 1/4 OD x .170 ID NB-4-040 Parker Hannifin Corp.66 4502-0304-01 Speed Controller NAS2200-N01 SMC Pneumatics, Inc.67 2522-0071-01 Connector, Male, 1/4T x 1/8PThread 68P-4-2 Parker Hannifin Corp.68 2522-0816-01 Tee, Union, 1/4 Tube 164P-4 Parker Hannifin Corp.69 2806-0420-08 Screw, SST, Socket Head, 1/4-20 x .50 – – – – – – – – – – – –70 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –71 7310-0835-01 O-Ring, Adjustable Stopper 7310-0835-01 AG Associates81 2101-0506 Housing, Nylon, Cap, 6-Position 1-480705-0 Amp, Inc.82 2101-0610 Contact, Pin, Gold-Plated, 18-24 AWG 350690-7 Amp, Inc.83 6011-0001-01 Marker Tie, Small PLM1M Panduit84 3105-0050 Heat Shrink, 1/4 Long HIX 1/4 ICO Rally85 6011-0010 Cable Tie, 3 7/8 Long PLT1M-M Panduit

Note: To order the complete cylinder assembly (Item 64) including the cable, the part number is 7100-3753-02.

Page 49: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

2 PL2 PL

45

29

34

45

44

31

5230

21

25

22

1543

39

15

24

3312

3652

19

3

1

16

4615

354

42

42

2 PL

2 PL

2 PL

27

51

1513

1539

24

20

23

26

1515

26

37

26

10

467 17

9

1115

8

12

15

39

41

41

41

40

38

2

28

36

48

422 PL

49

32

503 PL

2 PL3 PL

36

36

5

1646

1

6

47

42

7100-2008-047100-0513-01

Page 50: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

63

2 PL

2 PL

2 PL2 PL

70

REF – from

previous page

3

65

67

66

6 PL

81

82

2 PL

69

64

Attaches to baseplate

60

56

55

61

2 PL

2 PL

2 PL

5 PL

71

4 PL

4 PL61

65

2 PL

68

58

83

59

57

84

85

Sensors and cablesare part of Item 64

7100-2008-040641-0513-01

Page 51: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2008-04 Rev: K Description: Cassette Assembly, Swivel, Receive, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2502-0155-01 Bearing, Sealed, .375 Bore FS3PP The Torrington Co.2 2507-1949-01 Spacer, Shaft, 3/8 x .5 x .0633 7310-3434-01 Spacer, Swivel Mechanism Link 7310-3434-01 AG Associates4 7310-3436-01 Plate, Support, Swivel, Receive 7310-3436-01 AG Associates5 7310-3437-01 Shaft, Bearing Preload 7310-3437-01 AG Associates6 2507-1949-02 Spacer, Shaft, .38 I.D. x .5 O.D., .250 Thick A7x8-C12250 Stock Drive Products7 7200-0738-01 Shaft, Swivel Gear 7200-0738-01 AG Asscoiates8 7200-0394-01 Link, Idler 7200-0394-01 AG Associates9 7310-1650-01 Shaft, Idler Link, 8108 7310-1650-01 AG Associates10 7200-0737-01 Link Actuator 7200-0737-01 AG Associates11 7200-0391-01 Link, Connector 7200-0391-01 AG Associates12 7300-0350-01 Bracket, Return Spring 7300-0350-01 AG Associates13 7200-0390-01 Link, Cassette Holder 7200-0390-01 AG Associates14 7200-0389-01 Pin, Cassette Holder Link 7200-0389-01 AG Associates15 2502-0006-01 Ball Bearing, Double Sealed, Flanged S418FCZZ7 MPB16 2502-0004-01 Miter Gear Set N1-7-S PIC Design17 2500-0003-01 Extension Spring E0120-014-0750 Associated Spring19 2502-0003-01 Precision Shaft Spacer B4-8 PIC Design20 7200-0400-02 Shaft, Cassette Holder 7200-0400-02 AG Associates21 7200-0734-02 Shaft, Cassette Holder Actuator 7200-0734-02 AG Associates22 7200-0402-01 Spacer, Cassette Shaft 7200-0402-01 AG Associates23 7200-0403-01 Crosslink, Cassette Holder 7200-0403-01 AG Associates24 7200-0732-02 Arm, Cassette Holder 7200-0732-02 AG Associates25 2403-0060 Knob, Black, .500 Long x 1/8” Round ON1B Control Knob26 2505-0160-01 Ring, Retaining Z3-1 PIC Design27 7200-1113-02 Support, Cassette Plate Upper 7200-1113-02 AG Associates28 7310-3432-01 Support, Cassette Plate, Lower 7310-3432-01 AG Associates29 7200-0731-01 Mount, Cassette Plate 7200-0731-01 AG Associates

Page 52: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2008-04 Rev: K Description: Cassette Assembly, Swivel, Receive, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer30 7200-0858-01 Button, Cassette Switch 7200-0858-01 AG Associates31 7200-0735-01 Shaft, Cassette Switch 7200-0735-01 AG Associates32 7200-1108-01 Base, Plate 7200-1108-01 AG Associates33 7200-0319-01 Actuator, Switch 7200-0319-01 AG Associates34 7200-0654-01 Plate, Wafer Carrier, 8 Inch 7200-0520-04 AG Associates35 5103-0001-01 Switch, Sub-Mini E63-00H Cherry Electric Products36 2510-0001-58 Dowel Pin, .1250 Diameter x .375 Long, SST D14-8 WM Berg37 2500-0004-01 Compression Spring S-332 Century Spring38 2806-0104-08 Screw, SST, XREC, Panhead, 2-56 x .50 – – – – – – – – – – – –39 2806-1008-02 Set Screw, SST, Cup Point, 4-40 x .12 – – – – – – – – – – – –40 2806-0104-02 Screw, SST, XREC, Panhead, 2-56 x .12 – – – – – – – – – – – –41 2806-0104-04 Screw, SST, XREC, Panhead, 2-56 x .25 – – – – – – – – – – – –42 2806-0417-10 Screw, SST, Socket Head, 10-32 x .62 – – – – – – – – – – – –43 2806-0414-10 Screw, SST, Socket Head, 8-32 x .625 – – – – – – – – – – – –44 2806-0414-16 Screw, SST, Socket Head, 8-32 x 1.00 – – – – – – – – – – – –45 2806-0414-06 Screw, SST, Socket Head, 8-32 x .38 – – – – – – – – – – – –46 2806-0404-02 Set Screw, SST, Cup Point, 2-56 x .12 – – – – – – – – – – – –47 2826-4230 Nut, SST, Lock, 5/16-24 – – – – – – – – – – – –48 7200-1109-01 Housing, Adjustment 7200-1109-01 AG Associates49 2806-0417-14 Screw, SST, Socket Head, 10-32 x .88 – – – – – – – – – – – –50 2806-1021-12 Set Screw, SST, Cup Point, 1/4-28 x .75 – – – – – – – – – – – –51 2806-0408-04 Screw, SST, Socket Head, 4-40 x .25 – – – – – – – – – – – –52 2806-1008-03 Set Screw, SST, Cup Point, 4-40 x .19 – – – – – – – – – – – –55 7200-1104-02 Tab, Adjustable Stopper 7200-1104-02 AG Associates56 7200-1105-01 Tab, Stopper 7200-1105-01 AG Associates57 7200-1107-01 Pin, Pivot 7200-1107-01 AG Associates58 2505-0004-05 Ring, Retaining, E-Type, 3/16 Shaft Q1-18 WM Berg59 2507-0315-01 Shaft Spacer, 3/16 ID x .10 Inch Thick SS1-20 WM Berg

Page 53: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

P/N: 7100-2008-04 Rev: K Description: Cassette Assembly, Swivel, Receive, 8 InchP/N: 0641-0513-01 Rev: A Description: Cassette Plate Kit, 8 Inch

Item # AG Part No. Component Description Manufacturer P/N Manufacturer60 2806-1014-06 Set Screw, SST, Cup Point, 8-32 x .38 – – – – – – – – – – – –61 2806-0412-10 Screw, SST, Socket Head, 6-32 x .62 – – – – – – – – – – – –63 7200-1114-03 Plate, Cylinder Mounting 7200-1114-03 AG Associates64 7100-3753-02 Actuator Assembly, Receive Cassette 7100-3753-02 AG Associates65 2519-0006-01 Tubing, Nylon, Black, 1/4 OD x .170 ID NB-4-040 Parker Hannifin Corp.66 4502-0304-01 Speed Controller NAS2200-N01 SMC Pneumatics, Inc.67 2522-0071-01 Connector, Male, 1/4T x 1/8PThread 68P-4-2 Parker Hannifin Corp.68 2522-0816-01 Tee, Union, 1/4 Tube 164P-4 Parker Hannifin Corp.69 2806-0420-08 Screw, SST, Socket Head, 1/4-20 x .50 – – – – – – – – – – – –70 2806-0417-12 Screw, SST, Socket Head, 10-32 x .75 – – – – – – – – – – – –71 7310-0835-01 O-Ring, Adjustable Stopper 7310-0835-01 AG Associates81 2101-0506 Housing, Nylon, Cap, 6-Position 1-480705-0 Amp, Inc.82 2101-0610 Contact, Pin, Gold-Plated, 18-24 AWG 350690-7 Amp, Inc.83 6011-0001-01 Marker Tie, Small PLM1M Panduit84 3105-0050 Heat Shrink, 1/4 Long HIX 1/4 ICO Rally85 6011-0010 Cable Tie, 3 7/8 Long PLT1M-M Panduit

Page 54: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

2

3

1

Cassette Indicator Light

Page 55: SECTION 1 WAFER AREA HANDLING LOCATORsipuer.com/uploadfile/down2/1330407753985566.pdf · Slip-Free End Effector, Thin End Effector, Thin, with Plunger 3 Audible Alarm, 8 ... Heatpulse

Description: Cassette Indicator Light

Item # AG Part No. Component Description Manufacturer P/N Manufacturer1 2451-0042 Light, Pilot, Mounting Base, 24 VAC Bulb ZB2-BV6-24VAC Telemechanique2 2451-0041-01 Light, Pilot, Lens, Clear ZB2-BV07 Telemechanique3 2451-0006-01 Lamp, Bayonet Type, 24 VAC, 2 Watt 3456 B Osram Sylvania


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