Date post: | 03-Apr-2018 |
Category: |
Documents |
Upload: | nanoterach |
View: | 222 times |
Download: | 0 times |
of 39
7/28/2019 Selfsys, Nano-Tera 2013, Bern
1/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
2/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Rational: Assembly challenge of N/MEMS!
Today!
Many different kinds of micro/nano devices, MEMS, S&A,CMOS, OLED, etc!
The challenge of tomorrow!
Finding a way to assemble thebricks into functional micro/nano-systems!
2
7/28/2019 Selfsys, Nano-Tera 2013, Bern
3/39
7/28/2019 Selfsys, Nano-Tera 2013, Bern
4/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
OlgacErgenemann
(ETHZ)
ChristianPeters(ETHZ)
FelixSchill(EPFL)
GillesCherix(ICARE)
NicolasSpencer(ETHZ)
LaurentSciboz(ICARE)
BradleyNelson(ETHZ)
AlcherioMartinoli
(EPFL)
JuergenBrugger(EPFL)
MaurizioGullo(EPFL)
VenkyNagaiyanallur
(ETHZ)
GrgoryMermoud(EPFL)
LoicJacot-Descombes(EPFL)
MassimoMastrangeli(EPFL)
JonasGoldowsky
(CSEM)
ChristopherHierold(ETHZ)
HelmutKnapp(CSEM)
CathreinHckstdt
(ETHZ)
7/28/2019 Selfsys, Nano-Tera 2013, Bern
5/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Assembling techniques & case studies!
5SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
6/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Outline!
SELFSYS objectives!
Methodology and team!
MEMS fabrication!
Inkjet printing, magnetic microcapsules, surfacefunctionalization!
Fluid-mediated parallel assembly, yield!
Control system, modeling & automation!
Liquid encapsulation & release! Target applications!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
7/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Microcapsules made by SU-8 photolithography!
Bi-color cylinders!
Half-capsules!
!
!
!
!
!
!
7
Hydrophilic
HydrophobicHydrophobic Hydrophilic
Si wafer, surface activation!
Blue SU-8! Transparent SU-8!
Exposure and bake!
SU-8 development!
Surface functionalization!
Release!
Hollow part!
PhDthesis2013Jacot-Descombes
7/28/2019 Selfsys, Nano-Tera 2013, Bern
8/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
SU-8 hemispheres by inkjet printing!
8
900hemispheres
Angle:902
Yieldabove98%
SEM images
Shape prediction and experimental results!
Inkjet printing process!
Jacot-Descombesetal.JMM2012
7/28/2019 Selfsys, Nano-Tera 2013, Bern
9/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Hollow hemispheres!
9
300m
SEM image
SEM image
50m
1mm
Optical image
100m
Silicon confinement platforms
and central pillars! Inkjet printed half-capsules!
Jacot-Descombes,IEEENEMS2013
7/28/2019 Selfsys, Nano-Tera 2013, Bern
10/39
7/28/2019 Selfsys, Nano-Tera 2013, Bern
11/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Fabrication of magnetic half capsules!
Super-paramagnetic nanoparticlesembedded in uncured polymer matrix!
Inkjet printing of the magnetic composite!
Alignment of nanoparticles by applyingmagnetic fields!
Thermal curing for fabrication of features
beyond exposable resist thickness!
11
Ink-Jet Printing of MPC Particle Alignment
Support
H
Thermal Curing
160C
Support Support
100m 100m 100m
H
Ergenemannetal(inprep)
7/28/2019 Selfsys, Nano-Tera 2013, Bern
12/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Fabrication of magnetic half capsules!
12
D=200m
30 mT appliedParallel to the alignment
30 degrees to thealignmentFIB cuts
No magnetic field appliedNo change with direction
Good dispersion
2m
Ergenemannetal(inprep)
7/28/2019 Selfsys, Nano-Tera 2013, Bern
13/39
7/28/2019 Selfsys, Nano-Tera 2013, Bern
14/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Polyacrylicacid(PAA)coupledto
ssDNAthroughEDCchemistry.
PAAMW:1080000g/mol
PAA-g-ssSNA
100m
Fluorescencemicroscopicimageofa
paernoflabeledDNAonSU8
UsingDNAhybridizaonasa
meanstoself-assembly
SU-8 surface functionalized with DNA!
Nagaiyanalluretal(inprep)
7/28/2019 Selfsys, Nano-Tera 2013, Bern
15/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Outline!
SELFSYS objectives!
Methodology and team!
MEMS fabrication! Inkjet printing, magnetic microcapsules, surface
functionalization!
Fluid-mediated parallel assembly, yield!
Control system, modeling & automation!
Liquid encapsulation & release! Target applications!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
16/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Self-assembled pairs of SU-8 micro-cylinders!
16
Diameter
100micrometers
7/28/2019 Selfsys, Nano-Tera 2013, Bern
17/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Fluid-mediated self-assembly!
17
Opticalimages Release in IPA
J-Descombes,Marnetal(inprep)
Study with hundreds of bicolor cylinders (100 m):!
Micro-capsules with liquid encapsulation:!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
18/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Microcapsules with improved sealing!
18
Immiscible liquid energy minimization (ILEM) polymer deposition
J-Descombesetal.MNE2012
7/28/2019 Selfsys, Nano-Tera 2013, Bern
19/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Studying the assembly dynamics ...!
Funconalised
SU8testMEMS
19
...bymul$pleopcaltraps
Gulloetal,IEEEMEMS2013
7/28/2019 Selfsys, Nano-Tera 2013, Bern
20/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Hydrophobic Attraction!
20pNaracveforcefor10mdisksurface
20Gulloetal,IEEEMEMS2013
7/28/2019 Selfsys, Nano-Tera 2013, Bern
21/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Outline!
SELFSYS objectives!
Methodology and team!
MEMS fabrication! Inkjet printing, magnetic microcapsules, surface
functionalization!
Fluid-mediated parallel assembly, yield!
Control system, modeling & automation!
Liquid encapsulation & release! Target applications!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
22/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Assembly -plant!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
23/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Feeding of microcapsules!
Transfer of MEMS to
functional fluid (blue)! Control concentration
of MEMS in liquid!
Carrier liquid &!MEMS inlet!
Carrier liquid!outlet!
Functional fluid &!MEMS outlet!
Functional fluid inlet!
g
Goldowskyetal,(submiedtoJMM)
7/28/2019 Selfsys, Nano-Tera 2013, Bern
24/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Assembly and sorting!
Focusing electrode!
Sorting !electrode!
Goldowskyetal.(inprep)
O li
7/28/2019 Selfsys, Nano-Tera 2013, Bern
25/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Outline!
SELFSYS objectives! Methodology and team!
MEMS fabrication! Inkjet printing, magnetic microcapsules, surface
functionalization!
Fluid-mediated parallel assembly, yield!
Control system, modeling & automation!
Liquid encapsulation & release! Target applications!
A t t d d li f lf bli t
7/28/2019 Selfsys, Nano-Tera 2013, Bern
26/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Automated modeling of self-assembling systems!
Fundamental assumptionAll behavioral changes can be
interpreted as the result of an
interaction
x3x1
x2
Con;nuousstate
(e.g.,poseinspace)
Discretestate
(statemachine)
Input: spatial trajectories
TheM3framework
Mermoud,Mastrangelietal,(inprep)
Model and control of the SELFSYS microchamber
7/28/2019 Selfsys, Nano-Tera 2013, Bern
27/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
10 mm
27
Model and control of the SELFSYS microchamber!
FEMEigenfrequencies
1st:42.4KHz
Controlspace
Goldowskyetal,(submiedtoJMM)
Model and control of the SELFSYS microchamber
7/28/2019 Selfsys, Nano-Tera 2013, Bern
28/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems! 28
Model and control of the SELFSYS microchamber!
Air
sockets
water
CFDsimula;ons
Laminarflow(Re~100)
2-phaseflow(water/air) Acouscactuaon(45KHz)
Parcletracking
5 mm
Goldowskyetal,(submiedtoJMM)
7/28/2019 Selfsys, Nano-Tera 2013, Bern
29/39
7/28/2019 Selfsys, Nano-Tera 2013, Bern
30/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
HOW CAN WE WATCH THE
MICRO PARTS MOVING ANDCONTROL THE SYSTEM WITH A
FEEDBACK LOOP?!
The Lily platform: centimetric fluidic self-assembly
7/28/2019 Selfsys, Nano-Tera 2013, Bern
31/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
The Lily platform: centimetric fluidic self-assembly!
Blocks
Floang,passive,self-aligning Magneclatching
Parasicfluidicpropulsion
Arena
4remotely-controlledinlets 2mainagitaonmodes
forbang/bangcontrol
Real-;metracking Overheadcamera
DataaquisionbySwisTrack
M3computaonalframewor
Mermoudetal.ICRA2012
SELFSYS platform: micrometric fluidic self-assembly
7/28/2019 Selfsys, Nano-Tera 2013, Bern
32/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems! 32
SELFSYS platform: micrometric fluidic self-assembly!
2 cm
Monitoring the micrometric fluidic self-assembly
7/28/2019 Selfsys, Nano-Tera 2013, Bern
33/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems! 33
Monitoring the micrometric fluidic self-assembly!
High speed video of self-
assembling microcapsules
200 m 200 m
Tracking of self-assembling
microcapsules
Mastrangelietal,(inprep)
Magnetically Guided Self-Assembly
7/28/2019 Selfsys, Nano-Tera 2013, Bern
34/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Magnetically Guided Self-Assembly!
Half capsules with magneticnanoparticles!
Programming easy axis by
aligning nanoparticles!
Parts align with an applied
magnetic field!
They attract each other due tomagnetic forces !
Selective binding for self assembly!H
Ergenemann,Petersetal.MEMS2013
Parallel manipulation of magnetic capsules
7/28/2019 Selfsys, Nano-Tera 2013, Bern
35/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Parallel manipulation of magnetic capsules!
35
Forming chains of magnetic parts when in-plane magnetic fieldsare applied (left)
Separating parts by applying out-of-plane magnetic fields (right)
Ergenemannetal.(inprep)
Envisioned applications
2 industrial partners interested
7/28/2019 Selfsys, Nano-Tera 2013, Bern
36/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Envisioned applications!
36SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems!
Drug delivery!
Triggered, local, timedrelease!
PAT (process analyticaltechnologies)!
Use capsules as distributedsensors!
Remote readout!
Bioreactor process monitor!
Food quality control!!
!
2industrialpartnersinterested
Liquid released upon external (self)trigger
7/28/2019 Selfsys, Nano-Tera 2013, Bern
37/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Release in IPAOther options:
- Heat- Valve
- Otherchemical
reaction
- Bio-degradation
Liquid released upon external (self)trigger!
PhDthesisL.Jacot-Descombes
Summary
7/28/2019 Selfsys, Nano-Tera 2013, Bern
38/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Summary!
7/28/2019 Selfsys, Nano-Tera 2013, Bern
39/39
SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!
Liquidfilledmicro-capsules.
Readytomeasure.
Readytorelease.