SemiconductorFabrication FacilitiesSemiconductorFabrication Facilities
Specifications
1.01 SYSTEM ARRANGEMENTA. Carbon Dioxide fire suppression system shall be of the engineered
fixed-nozzle type with all pertinent components provided by AnsulIncorporated.
B. Agent storage cylinders shall be centrally located free-standing cylinderswith wall-mounted retaining brackets. Where multiple cylinders are required for the same hazard, a common manifold shall be employed.
C. One cylinder shall be designated as the pilot cylinder and employ theelectric actuator, mechanical manual actuator, or both. When three (3)or more cylinders are used, two (2) cylinders must be designated aspilot cylinders. All remaining cylinders shall be pneumatically operat-ed from the CO2 agent.
D. Manifolded cylinders shall employ a flexible discharge hose to facilitateinstallation and system maintenance. Each cylinder on a manifold shallalso include an agent check valve installed between the tank and the manifold.
1.02 FLOW CALCULATIONSA. Computerized verification of flow calculations shall be submitted for
each CO2 fire suppression system and include the following data as aminimum:1. Quantity of agent per nozzle2. Nozzle orifice diameters3. Pressure at nozzle4. Nozzle body nominal pipe size5. Number and size of cylinders6. Total agent quantity7. Pipe size and schedule per pipe section8. Number, size and type of fitting per pipe section9. Actual and equivalent lengths per pipe section10. Discharge time
2.01 PIPE MATERIALA. System piping shall be of noncombustible materials having physical
and chemical characteristics such that its integrity under stress can be predicted with reliability.
B. As a minimum, piping materials shall be black steel pipe conforming toASTM A-53A ERW or ASTM A-106A seamless.
C. Under no conditions shall ordinary cast iron pipe, steel pipe conform-ing to ASTM A-120 or ASTM A-53/A-120 be used.
D. Piping joints shall be suitable for the design conditions and shall beselected with consideration of joint tightness and mechanical strength.
E. Distribution lines up to 3/4” diameter shall be Schedule 40 black ironor galvanized seamless steel pipe. Distribution lines greater than 3/4”shall be Schedule 80 black iron or galvanized seamless steel pipe.
F. For pipe sizes up to 2” diameter, Class 300 malleable or ductile ironfittings shall be used. For pipe larger than 2” diameter, IPS and forged
steel fittings shall be used.G. All pipe joints (fittings) and piping located in the corrosive environments
must either be high quality, seamless, stainless steel, hydraulic tubing meeting ASTM A269/A213 or be protected using extruded TEFLON®tubing (TFE) or heat shrink tubing (TFE).
H. All piping shall comply with NFPA 12 and FMRC requirements.I. Piping shall be installed in accordance with good commercial practice
to the appropriate codes, securely supported with UL Listed hangersand arranged with close attention to the design layout since deviationsmay alter the design flow performance as calculated.
J. Piping shall be bracketed within 12" (.3 m) of all discharge nozzles.K. All piping shall be reamed, blown clear and swabbed with appropriate
solvent to remove mill varnish and cutting oils before assembly.L. Multi-outlet fittings, other than tees, shall not be permitted.M. Assembly of all joints shall conform to the appropriate standards. On
threaded pipe joints, TEFLON® tape shall be applied to the malethreads only.
2.02 EXTINGUISHING AGENTA. The extinguishing agent shall be Carbon Dioxide.
2.03 STORAGE CYLINDERSA. Cylinder assemblies shall be of steel construction with a standard red
epoxy paint finish. Each cylinder shall be equipped with a pressure seat-type valve. The cylinder shall utilize Ansul CV-98 forged brass valve assemblies providing a leak-tight seal at the valve-to-cylinder connection.Each valve shall include a safety pressure relief device which provides relief at 3000-3360 psi per CGA test methods.
B. Filling of the cylinder assembly shall be by Ansul Incorporated or anauthorized Carbon Dioxide systems distributor. Initial filling andrecharge shall be performed in accordance with the manufacturer'sestablished procedures and shall not require replacement componentsfor normal service.
2.04 CYLINDER BRACKETA. Each cylinder assembly shall be furnished with a welded steel bracket.
The bracket shall hold the cylinders in a saddle with a front securing device. The brackets shall be modular in design to allow added bracket-ing or stacking of cylinders depending on installation requirements.
B. Cylinder brackets shall be UL listed and/or FM approved for use withthe carbon dioxide system.
2.05 VALVE ACTUATORSA. Electric valve actuators shall be of brass construction and stackable
design with swivel connections to allow removal for maintenance or testing.
B. Actuation devices shall be UL listed and/or FM approved for use withthe system.
2.06 DISCHARGE HOSE/CHECK VALVEA. When manifolding, all cylinder assemblies shall include a flexible
discharge hose and check valve for connection to the manifold inlet.B. All hose/check valves shall be UL listed and/or FM approved for use
with the Ansul CV-98 valve.2.07 DISCHARGE NOZZLES
A. Discharge nozzles shall be sized to provide flow rates in accordance with system design calculations.
B. The orifice size shall be determined by a computerized flow calculation program.
C. Nozzles shall be manufactured by Ansul Incorporated and be FMRC approved for wet bench applications.
D. Halar® coated nozzles shall be used throughout the corrosive environ-ment within the wet benches.
2.08 SYSTEM CHECKOUT AND TESTINGA. The completed installation shall be inspected by factory authorized and
trained personnel. The inspection shall include a full operational test of all components per the equipment manufacturer's recommendations (including agent discharge).
B. Inspection shall be performed in the presence of the owner's representa-tive, architect's or engineer's representative, insuring authority and/or the local authority having jurisdiction.
C. All mechanical and electrical components shall be tested according tothe manufacturer's recommended procedure to verify system integrity.
D. Inspection shall include a complete checkout of the detection/control system and certification of cylinder weight. A written report shall be filed with the owner.
E. As-built drawings shall be provided by the contractor (2 copies) indicat-ing the installation details. All routing of piping, electrical conduit andaccessories shall be noted.
F. Equipment installation and maintenance manuals shall be provided in addition to the as-built drawings.
G. Prior to final acceptance, the contractor shall provide operationaltraining to the owner's key personnel. Training shall consist of:1. Control system operation2. Trouble procedures3. Emergency procedures4. Safety requirements5. Demonstration of the system (excluding CO2 release)
H. The quantity of agent shall reflect the actual design quantity of CO2
agent.I. A functional test shall be completed prior to the concentration test
consisting of detection, release, alarm, accessories related to the system, control unit and a review of the cylinders, piping, fittings, hangers and cylinder pressure.
Form No. F-9838-1 © 2003 Ansul Incorporated Litho in U.S.A.
◆ Ansul High PressureCarbon Dioxide Systems
◆ AUTOPULSE® Detection & ControlSystems
◆ CLEANGUARD™ Hand PortableFire Extinguishers
◆ SPILL-X® Spill ControlProducts
UUUU TTTT IIII
II RR
Ansul Incorporated One Stanton Street Marinette, WI 54143-2542
ISO 9001 Registered
For more information...Contact your local Ansul SystemsDistributor... Or Call:
1-800-TO-ANSUL (USA/CAN)
1-715-735-7411 (International)
For worldwide sales offices &manufacturing locations, visit:www.ansul.com
ANSUL, AUTOPULSE, CLEANGUARD and SPILL-Xare trademarks of Ansul Incorporated or its affiliates.
Carbon Dioxide System Cylinders
Recently, there have been several devastatingfires within the semiconductor manufacturingindustry. Particularly troublesome hazard areaswithin these facilities are the wet bench andprocessing tools where a boat of silicone wafersis passed through acids or solvents. The combi-nation of flammable vapors, costly robotics, andvery high value semiconductor wafers makesproven fire protection solutions essential. Protection is further complicated in that the systemmust control a fire before substantial environ-mental damage is done to the clean room atmos-phere. In many cases, downtime for clean-upcan be more costly than fire damage.
Semiconductor FabricationFacilities Need Proven FireProtection
◆ Ansul High Pressure Carbon Dioxide Systems were selected for a unique Factory Mutual Research Corporation test program involving wet benches and processing tools. Successful discharge testing confirmed component per-formance and application design resulting in FMRC approval of Ansul CO2 systems. SpecialHalar® coated nozzles are used throughout theacidic environment in the wet benches. Plus, stainless steel tubing can be used in place of pipe for combination total flood/local applica-tion systems which protect not only the wet bench surface but also the tool subsurface, mini-environmental enclosures, headcases, and other compartments.
◆ Early warning detection, alarm, shutdown, and CO2 system release functions are per-formed by AUTOPULSE® Detection andControl Equipment.
◆ Ansul recommends CLEANGUARD™ Hand Portable Fire Extinguishers for use in semicon-ductor manufacturing facilities. These units contain DuPont FE-36, a gaseous clean extin-guishing agent designed for use in areascontaining sensitive electronic equipment and irreplaceable assets.
◆ SPILL-X® Spill Control Products are recom-mended wherever acids or solvents are stored.Where many methods simply absorb the spill, SPILL-X agents actually neutralize and solidifyacids and lower the flashpoint of solvents.
The Ansul solution
Flame DetectorStrobe/Horn
DischargeNozzle
ElectricActuator
CO2 Cylinder
Manual PullStation
AUTOPULSE®
ControlUnit
�4
�1
�3�2
NOTE: This drawing is conceptual in nature. The fire suppression systemdepicted was prepared from information provided through vendor’s sales literatureand constitutes nominal hardware requirements. The final system design mustconsider other potential ignition and fuel source areas not evident in the vendor’sliterature. This means a pre-installation in-depth analysis of all likely areas ofprobable fire incident must be performed.
Firedetection /
suppressionsystem operation
� Detectors sense fire in the protectedarea and electronically signal the
AUTOPULSE Control Unit.� The AUTOPULSE Control Unit then
triggers a series of actions... soundsalarms - shuts down power - and, afterany time delay period, energizes theelectric actuator on the CO2 cylindervalve(s).
� The cylinder valve(s) opens allowingCO2 to escape from the storagecylinder(s) into the distribution pipingnetwork.
� CO2 agent discharges through thenozzles into the protected units tosuppress the fire.
Installation and serviceAnsul carbon dioxide fire suppression sys-tems are installed, maintained, and servicedby a worldwide network of Ansul autho-rized fire equipment distributors who arefactory trained and fully equipped to keepyour systems fire-ready.
1
2
3
4
Systems you can depend onAnsul High Pressure CO2 Systems are ULlisted, FM approved, and meet the require-ments of NFPA 12: Standard on CarbonDioxide Extinguishing Systems. CarbonDioxide is a clean fire extinguishing agentwhich quickly controls a fire to minimizedamage to the wet bench and other pro-cessing tools. CO2 is electrically noncon-ductive and will not decompose to formacidic vapors.
CLEANGUARD™Fire Extinguisher
AUTOPULSE®
Detection and ControlEquipment
ManualActuator
SPILL-GUN®
Spill Control Applicator
Carbon Dioxide System Cylinders
Recently, there have been several devastatingfires within the semiconductor manufacturingindustry. Particularly troublesome hazard areaswithin these facilities are the wet bench andprocessing tools where a boat of silicone wafersis passed through acids or solvents. The combi-nation of flammable vapors, costly robotics, andvery high value semiconductor wafers makesproven fire protection solutions essential. Protection is further complicated in that the systemmust control a fire before substantial environ-mental damage is done to the clean room atmos-phere. In many cases, downtime for clean-upcan be more costly than fire damage.
Semiconductor FabricationFacilities Need Proven FireProtection
◆ Ansul High Pressure Carbon Dioxide Systems were selected for a unique Factory Mutual Research Corporation test program involving wet benches and processing tools. Successful discharge testing confirmed component per-formance and application design resulting in FMRC approval of Ansul CO2 systems. SpecialHalar® coated nozzles are used throughout theacidic environment in the wet benches. Plus, stainless steel tubing can be used in place of pipe for combination total flood/local applica-tion systems which protect not only the wet bench surface but also the tool subsurface, mini-environmental enclosures, headcases, and other compartments.
◆ Early warning detection, alarm, shutdown, and CO2 system release functions are per-formed by AUTOPULSE® Detection andControl Equipment.
◆ Ansul recommends CLEANGUARD™ Hand Portable Fire Extinguishers for use in semicon-ductor manufacturing facilities. These units contain DuPont FE-36, a gaseous clean extin-guishing agent designed for use in areascontaining sensitive electronic equipment and irreplaceable assets.
◆ SPILL-X® Spill Control Products are recom-mended wherever acids or solvents are stored.Where many methods simply absorb the spill, SPILL-X agents actually neutralize and solidifyacids and lower the flashpoint of solvents.
The Ansul solution
Flame DetectorStrobe/Horn
DischargeNozzle
ElectricActuator
CO2 Cylinder
Manual PullStation
AUTOPULSE®
ControlUnit
�4
�1
�3�2
NOTE: This drawing is conceptual in nature. The fire suppression systemdepicted was prepared from information provided through vendor’s sales literatureand constitutes nominal hardware requirements. The final system design mustconsider other potential ignition and fuel source areas not evident in the vendor’sliterature. This means a pre-installation in-depth analysis of all likely areas ofprobable fire incident must be performed.
Firedetection /
suppressionsystem operation
� Detectors sense fire in the protectedarea and electronically signal the
AUTOPULSE Control Unit.� The AUTOPULSE Control Unit then
triggers a series of actions... soundsalarms - shuts down power - and, afterany time delay period, energizes theelectric actuator on the CO2 cylindervalve(s).
� The cylinder valve(s) opens allowingCO2 to escape from the storagecylinder(s) into the distribution pipingnetwork.
� CO2 agent discharges through thenozzles into the protected units tosuppress the fire.
Installation and serviceAnsul carbon dioxide fire suppression sys-tems are installed, maintained, and servicedby a worldwide network of Ansul autho-rized fire equipment distributors who arefactory trained and fully equipped to keepyour systems fire-ready.
1
2
3
4
Systems you can depend onAnsul High Pressure CO2 Systems are ULlisted, FM approved, and meet the require-ments of NFPA 12: Standard on CarbonDioxide Extinguishing Systems. CarbonDioxide is a clean fire extinguishing agentwhich quickly controls a fire to minimizedamage to the wet bench and other pro-cessing tools. CO2 is electrically noncon-ductive and will not decompose to formacidic vapors.
CLEANGUARD™Fire Extinguisher
AUTOPULSE®
Detection and ControlEquipment
ManualActuator
SPILL-GUN®
Spill Control Applicator
SemiconductorFabrication FacilitiesSemiconductorFabrication Facilities
Specifications
1.01 SYSTEM ARRANGEMENTA. Carbon Dioxide fire suppression system shall be of the engineered
fixed-nozzle type with all pertinent components provided by AnsulIncorporated.
B. Agent storage cylinders shall be centrally located free-standing cylinderswith wall-mounted retaining brackets. Where multiple cylinders are required for the same hazard, a common manifold shall be employed.
C. One cylinder shall be designated as the pilot cylinder and employ theelectric actuator, mechanical manual actuator, or both. When three (3)or more cylinders are used, two (2) cylinders must be designated aspilot cylinders. All remaining cylinders shall be pneumatically operat-ed from the CO2 agent.
D. Manifolded cylinders shall employ a flexible discharge hose to facilitateinstallation and system maintenance. Each cylinder on a manifold shallalso include an agent check valve installed between the tank and the manifold.
1.02 FLOW CALCULATIONSA. Computerized verification of flow calculations shall be submitted for
each CO2 fire suppression system and include the following data as aminimum:1. Quantity of agent per nozzle2. Nozzle orifice diameters3. Pressure at nozzle4. Nozzle body nominal pipe size5. Number and size of cylinders6. Total agent quantity7. Pipe size and schedule per pipe section8. Number, size and type of fitting per pipe section9. Actual and equivalent lengths per pipe section10. Discharge time
2.01 PIPE MATERIALA. System piping shall be of noncombustible materials having physical
and chemical characteristics such that its integrity under stress can be predicted with reliability.
B. As a minimum, piping materials shall be black steel pipe conforming toASTM A-53A ERW or ASTM A-106A seamless.
C. Under no conditions shall ordinary cast iron pipe, steel pipe conform-ing to ASTM A-120 or ASTM A-53/A-120 be used.
D. Piping joints shall be suitable for the design conditions and shall beselected with consideration of joint tightness and mechanical strength.
E. Distribution lines up to 3/4” diameter shall be Schedule 40 black ironor galvanized seamless steel pipe. Distribution lines greater than 3/4”shall be Schedule 80 black iron or galvanized seamless steel pipe.
F. For pipe sizes up to 2” diameter, Class 300 malleable or ductile ironfittings shall be used. For pipe larger than 2” diameter, IPS and forged
steel fittings shall be used.G. All pipe joints (fittings) and piping located in the corrosive environments
must either be high quality, seamless, stainless steel, hydraulic tubing meeting ASTM A269/A213 or be protected using extruded TEFLON®tubing (TFE) or heat shrink tubing (TFE).
H. All piping shall comply with NFPA 12 and FMRC requirements.I. Piping shall be installed in accordance with good commercial practice
to the appropriate codes, securely supported with UL Listed hangersand arranged with close attention to the design layout since deviationsmay alter the design flow performance as calculated.
J. Piping shall be bracketed within 12" (.3 m) of all discharge nozzles.K. All piping shall be reamed, blown clear and swabbed with appropriate
solvent to remove mill varnish and cutting oils before assembly.L. Multi-outlet fittings, other than tees, shall not be permitted.M. Assembly of all joints shall conform to the appropriate standards. On
threaded pipe joints, TEFLON® tape shall be applied to the malethreads only.
2.02 EXTINGUISHING AGENTA. The extinguishing agent shall be Carbon Dioxide.
2.03 STORAGE CYLINDERSA. Cylinder assemblies shall be of steel construction with a standard red
epoxy paint finish. Each cylinder shall be equipped with a pressure seat-type valve. The cylinder shall utilize Ansul CV-98 forged brass valve assemblies providing a leak-tight seal at the valve-to-cylinder connection.Each valve shall include a safety pressure relief device which provides relief at 3000-3360 psi per CGA test methods.
B. Filling of the cylinder assembly shall be by Ansul Incorporated or anauthorized Carbon Dioxide systems distributor. Initial filling andrecharge shall be performed in accordance with the manufacturer'sestablished procedures and shall not require replacement componentsfor normal service.
2.04 CYLINDER BRACKETA. Each cylinder assembly shall be furnished with a welded steel bracket.
The bracket shall hold the cylinders in a saddle with a front securing device. The brackets shall be modular in design to allow added bracket-ing or stacking of cylinders depending on installation requirements.
B. Cylinder brackets shall be UL listed and/or FM approved for use withthe carbon dioxide system.
2.05 VALVE ACTUATORSA. Electric valve actuators shall be of brass construction and stackable
design with swivel connections to allow removal for maintenance or testing.
B. Actuation devices shall be UL listed and/or FM approved for use withthe system.
2.06 DISCHARGE HOSE/CHECK VALVEA. When manifolding, all cylinder assemblies shall include a flexible
discharge hose and check valve for connection to the manifold inlet.B. All hose/check valves shall be UL listed and/or FM approved for use
with the Ansul CV-98 valve.2.07 DISCHARGE NOZZLES
A. Discharge nozzles shall be sized to provide flow rates in accordance with system design calculations.
B. The orifice size shall be determined by a computerized flow calculation program.
C. Nozzles shall be manufactured by Ansul Incorporated and be FMRC approved for wet bench applications.
D. Halar® coated nozzles shall be used throughout the corrosive environ-ment within the wet benches.
2.08 SYSTEM CHECKOUT AND TESTINGA. The completed installation shall be inspected by factory authorized and
trained personnel. The inspection shall include a full operational test of all components per the equipment manufacturer's recommendations (including agent discharge).
B. Inspection shall be performed in the presence of the owner's representa-tive, architect's or engineer's representative, insuring authority and/or the local authority having jurisdiction.
C. All mechanical and electrical components shall be tested according tothe manufacturer's recommended procedure to verify system integrity.
D. Inspection shall include a complete checkout of the detection/control system and certification of cylinder weight. A written report shall be filed with the owner.
E. As-built drawings shall be provided by the contractor (2 copies) indicat-ing the installation details. All routing of piping, electrical conduit andaccessories shall be noted.
F. Equipment installation and maintenance manuals shall be provided in addition to the as-built drawings.
G. Prior to final acceptance, the contractor shall provide operationaltraining to the owner's key personnel. Training shall consist of:1. Control system operation2. Trouble procedures3. Emergency procedures4. Safety requirements5. Demonstration of the system (excluding CO2 release)
H. The quantity of agent shall reflect the actual design quantity of CO2
agent.I. A functional test shall be completed prior to the concentration test
consisting of detection, release, alarm, accessories related to the system, control unit and a review of the cylinders, piping, fittings, hangers and cylinder pressure.
Form No. F-9838-1 © 2003 Ansul Incorporated Litho in U.S.A.
◆ Ansul High PressureCarbon Dioxide Systems
◆ AUTOPULSE® Detection & ControlSystems
◆ CLEANGUARD™ Hand PortableFire Extinguishers
◆ SPILL-X® Spill ControlProducts
UUUU TTTT IIII
II RR
Ansul Incorporated One Stanton Street Marinette, WI 54143-2542
ISO 9001 Registered
For more information...Contact your local Ansul SystemsDistributor... Or Call:
1-800-TO-ANSUL (USA/CAN)
1-715-735-7411 (International)
For worldwide sales offices &manufacturing locations, visit:www.ansul.com
ANSUL, AUTOPULSE, CLEANGUARD and SPILL-Xare trademarks of Ansul Incorporated or its affiliates.
