Nil

P Note)

Functional optionStandard

Axial piping

Note) The combination of axial piping and both ends adjusters or retraction end adjuster is not available.

Adjuster optionNil

AS

AT

A

CS

CT

C

ASCT

CSAT

Without adjuster

Extension end adjuster

Retraction end adjuster

Both ends adjuster

Extension end metal stopper

Retraction end metal stopper

Both ends metal stopper

Extension end adjuster + Retraction end metal stopper

Extension end metal stopper + Retraction end adjuster

Series MXQHow to Order

ø6, ø8, ø12, ø16, ø20, ø25Air Slide Table

Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)

∗ Lead wire length symbols: 0.5 m ........ Nil (Example) M9N 1 m ........... M (Example) M9NM 3 m ........... L (Example) M9NL 5 m ........... Z (Example) M9NZ

PLC: Programmable Logic Controller

Specialfunction

—

—

Electricalentry

Grommet

Grommet

Indicatorlight

Yes

Yes

Type

Reed auto switch

Solid state auto switch

Wiring(Output)

2-wire

3-wire (NPN)

2-wire

12 V

In-line

A93M9NM9B

—

—

—

—

—

100 V

12 V

12 V

24 V

24 V

Load voltage

ACDC

Lead wire length (m) ∗

0.5(Nil)

1(M)

3(L)

—

5(Z)

Applicable loadAuto switch model

Electrical entry direction

Relay, PLC

Relay, PLC

10, 20, 30, 40, 50

10, 20, 30, 40, 50, 75

10, 20, 30, 40, 50, 75, 100

10, 20, 30, 40, 50, 75, 100, 125

10, 20, 30, 40, 50, 75, 100, 125, 150

10, 20, 30, 40, 50, 75, 100, 125, 150

Nil

S

n

Bore size/Stroke (mm)6

8

12

16

20

25

Number of auto switches2 pcs.

1 pc.

"n" pcs.

Auto switchNil Without auto switch (Built-in magnet)

∗ For the applicable auto switch model, refer to the table below.

Nil

L

Symmetric typeStandard

Symmetric

13-22-

MXQ 1222 50 M9N

MXQ 1213 50 M9N

Copper, fluorine and silicone-free +Low particle generation

22 Vacuum suction type

Clean series13 Vacuum suction type (Special treatment on guide)

Refer to page 889 for the applicable auto switch list.

Symbol

Nil

TN

TF

Port thread typeType

M thread

Rc

NPT

G

Bore size

ø6 to ø16

ø20, ø25

ø20, ø25

ø20, ø25

RoHS

799

Proper Auto Switch Mounting Position (Detection at Stroke End)

Adjuster Option: Stroke Adjustment Range

Rubber stopper

Metal stopper

Extension end (AS)

Retraction end (AT)

Both ends (A)

Extension end (CS)

Retraction end (CT)

Both ends (C)

Suction Flow Rate ofVacuum Suction Type(Reference values)

Bore size

6, 8, 12

16

20

25

Suction flow rate L/min (ANR)

1

2

3

5

Stroke adjustment range0 to 5 mm

Stroke adjustment range0 to 5 mm

13-/22-MXQ6(L)13-/22-MXQ8(L)13-/22-MXQ12(L)13-/22-MXQ16(L)13-/22-MXQ20(L)13-/22-MXQ25(L)

6

7.5

11.5

16.5

19

22

Reed auto switch: D-A93

10

5.5

8

24.5

30.5

43.5

52.5

20

5.5

8

14.5

20.5

33.5

42.5

30

5.5

12

14.5

20.5

23.5

32.5

125

—

—

—

51.5

74.5

88.5

75

—

32

40.5

33.5

39.5

46.5

100

—

—

40.5

51.5

71.5

60.5

4.5

5

6

7

8

9

Stroke

BStroke

E

Model A40

13.5

16

21.5

20.5

33.5

32.5

50

13.5

31

21.5

26.5

31.5

46.5

150

—

—

—

—

77.5

88.5

10

20 30 125

—

—

—

75

—

100

—

—

40 50 150

—

—

—

—

13-/22-MXQ6(L)

13-/22-MXQ8(L)

13-/22-MXQ12(L)

13-/22-MXQ16(L)

13-/22-MXQ20(L)

13-/22-MXQ25(L)

10

11.5

15.5

20.5

23

27

Solid state auto switch: D-M9B, D-M9N

10

9.5

12

28.5

34.5

47.5

56.5

20

9.5

12

18.5

24.5

37.5

46.5

30

9.5

16

18.5

24.5

27.5

36.5

125

—

—

—

55.5

78.5

92.5

75

—

36

44.5

37.5

43.5

50.5

100

—

—

44.5

55.5

75.5

64.5

1.5

1.5

2.5

3

3

3

Stroke

BStroke

E

Model A40

17.5

20

25.5

24.5

37.5

36.5

50

17.5

35

25.5

30.5

35.5

50.5

150

—

—

—

—

81.5

92.5

10 20 30 125

—

—

—

75

—

100

—

—

40 50 150

—

—

—

—

–0.5

1

3.5

20

26

39

48

1

3.5

10

16

29

38

1

7.5

10

16

19

28

9

11.5

17

16

29

28

9

26.5

17

22

27

42

27.5

36

29

35

42

36

47

67

56

47

70

84

75

75

–0.5 –0.5 7.5 7.5

2 2 6 10 25

18.5 8.5 8.5 15.5 15.5

24.5 14.5 14.5 14.5 20.5

37.5 27.5 17.5 27.5 25.5

46.5 36.5 26.5 26.5 40.5

26

34.5 34.5

27.5 45.5 45.5

33.5 65.5 68.5 73.5

40.5 54.5 82.5 73.5

EA B

Specifications

Bore size (mm)

Fluid

Action

Operating pressure

Proof pressure

Ambient and fluid temperature

Piston speed

Cushion

Lubrication

Stroke length tolerance

Grease

Without adjuster

Rubber stopper

Metal stopper

Cleanliness class (ISO class)

6 8 12 16 20 25

Air

Double acting

0.15 to 0.7 MPa

1.05 MPa

–10 to 60°C (No freezing)

50 to 300 mm/s(Adjuster option/Metal stopper: 50 to 200 mm/s)

Rubber bumper (Standard, Adjuster option/Rubber stopper)None (Adjuster option/Metal stopper)

Non-lube

mm

13-: Fluorine grease22-: Lithium soap based grease

13-/22-: Class 5

13-/22-: Class 6

+10

Auto switch operating range

Auto switch operating range

MXQ13-22-Air Slide Table

800

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

4 x M2.5 x 0.45 thread depth 3.5

Bottom view of MXQ6-3013-22-

N x M3 x 0.5 thread depth 4 Note 1) Note 2)

Operating port 2 x M5 x 0.8

2 x M2.5 x 0.45 thread depth 3

3 x M3 x 0.5 thread depth 5

NN x M4 x 0.7 thread depth 8

A-A

4 x M2.5 x 0.45 thread depth 2.5

B-B

Extension end adjuster

Retraction end adjuster

Vacuum suction port M5 x 0.8

5.5 3

1215

ø7

10.5

ø3.

2

5.5

20 16 13

4

HA GA

H

G(NN – 1) x H

M

Z

20

4

F

13.5

3.5

5.5

3

IJ

5.5

4

9

20

10

ø7

10.5 5.5

ø3.

2

2 6

0.5

1.5

14 27 31

3 6.5

12.5K

3.5

1

12

6 (E

xten

sion

end

adj

uste

r)

Max. 10 (Retraction end adjuster)6

19.5 (Extension end adjuster)

7

4

27

0.3

21

19.2

ZZ

ø6.

3

ø3 depth 2.5+0.030

3

d

epth

2.5

+0.

030

A B

A B 3H9(

) d

epth

2.5

+0.

025

0

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

2N – 1 x F

ø3H9 ( ) depth 2.5+0.0250

Note) Refer to the bottom view of MXQ6-30.

Basic

13-22-

Dimensions: MXQ613-22-

Model F2225212627

N44666

G 613—1121

H2326—2828

NN22333

I 999

169

J1727374865

K21.531.541.551.561.5

Z41.551.561.579.589.5

M4252628090

ZZ647484102112

13-/22-MXQ6-1013-/22-MXQ6-2013-/22-MXQ6-3013-/22-MXQ6-4013-/22-MXQ6-50

(mm)

GA1313293949

HA1626202828

Note) Note)

MXQ13-22-Air Slide Table

801

Operating port 2 x M5 x 0.8

6.3

26

12

5.5

12

12.5

∗ Other dimensions are the same as basic type.

Dimensions: MXQ613-22-

Axial piping (ø6): MXQ6-P13-22-

MXQ13-22-Air Slide Table

802

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Bottom view of MXQ6L-3013-22-

N x M3 x 0.5 thread depth 4 Note 1) Note 2)

Operating port 2 x M5 x 0.8

NN x M4 x 0.7 thread depth 8

A-A

4 x M2.5 x 0.45 thread depth 2.5

B-B

Retraction end adjuster

Extension end adjuster

2 x M2.5 x 0.45 thread depth 3

Vacuum suction port M5 x 0.8

3 x M3 x 0.5 thread depth 5

4 x M2.5 x 0.45 thread depth 3.5

ø7

10.5 5.5

20 16 13

4

HA GA

H

G(NN – 1) x H

M

Z

204

F

13.5

3.5

5.5

3

IJ

5.5

ø7

10.5 5.5

ø3.

2

2 6

0.5

1.5

14 27 31

3

12.5K

3.5

1

12

6 (E

xten

sion

end

adj

uste

r)

Max. 10(Retraction end adjuster)

6

7

4

27

4

9

20

10

19.5 (Extension end adjuster)

5.5 3

1215

0.3

21

19.2

ZZ

ø6.

3

6.5

A

A

B

B

ø3.

2

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

2N – 1 x F

ø3 depth 2.5+0.030

ø3H9 ( ) depth 2.5+0.0250

3H9

(

)

dept

h 2.

5+

0.02

50

Basic

Model F2225212627

N44666

G 613—1121

H2326—2828

NN22333

I 999

169

J1727374865

K21.531.541.551.561.5

Z41.551.561.579.589.5

M4252628090

ZZ 64 74 84102112

13-/22-MXQ6L-1013-/22-MXQ6L-2013-/22-MXQ6L-3013-/22-MXQ6L-4013-/22-MXQ6L-50

(mm)

GA1313293949

HA1626202828

Note) Note)

Note) Refer to the bottom view of MXQ6-30.13-22-

Dimensions: MXQ6L / Symmetric Type13-22-

3

d

epth

2.5

+0.

030

MXQ13-22-Air Slide Table

803

Operating port 2 x M5 x 0.8

6.3

26

12

5.5

12

12.5

∗ Other dimensions are the same as basic type.

Dimensions: MXQ6L / Symmetric Type13-22-

Axial piping (ø6): MXQ6L-P13-22-

MXQ13-22-Air Slide Table

804

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

2 x M3 x 0.5thread depth 4 Operating port 2 x M5 x 0.8

N x M3 x 0.5 thread depth 4.5 Note 1) Note 2)

3 x M4 x 0.7 thread depth 6

NA x M3 x 0.5 thread depth 3.5

Extension end adjuster

Retraction end adjuster

Vacuum suction port M5 x 0.8

NN x M4 x 0.7 thread depth 8

A-A B-B

Z

M

23

4

14

H

G

HA GA

(NN – 1) x H

0.7

46.

53.5

IJ

6.5

4

24

5

10

12

27 23 6

2 7

16 321

36

3.8 7

14.6K

3.8 7

14.6KA

4

1

8 Max. 11 (Retraction end adjuster)

22.5 (Extension end adjuster)

6.5

(Ext

ensi

on e

nd a

djus

ter)

0.3

22.2

24

ZZ

16

F

30

5.5

8

ø3.

2

ø7

12.512.5

ø3.

2

ø6.

5

ø7

5.7 5.7

Bottom view of MXQ8-3013-22-

A B

A B

4 x M3 x 0.5 thread depth 4

1517

3.56.5ø3 depth 3+0.03

0

2N – 1 x F

3

d

epth

3+

0.03

0

3H9

(

)

dept

h 3

+0.

025

0

ø3H9 ( ) depth 3+0.0250

Model F252526324650

N446666

G 714— 8 831

H2528—312930

NN223344

I111012141312

J 1728405278

105

K23.533.543.553.563.588.5

Z 45.5 55.5 69.5 83.5108.5134.5

M 46 56 70 84109135

ZZ 71 81 95109134160

13-/22-MXQ8-1013-/22-MXQ8-2013-/22-MXQ8-3013-/22-MXQ8-4013-/22-MXQ8-5013-/22-MXQ8-75

(mm)

GA131429393761

HA192827315860

NA444488

KA————

82.5112.5

Note) Refer to the bottom view of MXQ8-30.

Note) Note)

13-22-

Basic

Dimensions: MXQ813-22-

MXQ13-22-Air Slide Table

805

Operating port 2 x M5 x 0.8

316.

3

12

14.5

15

6.5

∗ Other dimensions are the same as basic type.

Dimensions: MXQ813-22-

Axial piping (ø8): MXQ8-P13-22-

MXQ13-22-Air Slide Table

806

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

2 x M3 x 0.5 thread depth 4Operating port 2 x M5 x 0.8

N x M3 x 0.5 thread depth 4.5 Note 1) Note 2)

NA x M3 x 0.5 thread depth 3.5

Extension end adjuster

Retraction end adjuster

Vacuum suction port M5 x 0.8

3 x M4 x 0.7 thread depth 6

NN x M4 x 0.7 thread depth 8

A-A B-B

Z

M

23

0.3

4

14

H

G

HA GA

(NN – 1) x H

0.7

F

46.

5

3.5

IJ 6.5

4

16

27 23 62 7

16 321

36

3.8 7

14.6K

3.8 7

14.6KA

4

1

8

Max. 11 (Retraction end adjuster)

6.5

(Ext

ensi

on e

nd a

djus

ter)

8

5.5

30

22.2

24

ZZ

24

5

10

12

22.5 (Extension end adjuster)

ø3.

2 ø7

12.512.5

ø3.

2

ø6.

5 ø7

5.7 5.7

Bottom view of MXQ8L-3013-22-

A

A

B

B

4 x M3 x 0.5 thread depth 4

1517

3.56.5

2N – 1 x F

ø3 depth 3+0.030

3H9

(

)

dept

h 3

+0.

025

0

ø3H9 ( ) depth 3+0.0250

3

d

epth

3+

0.03

0

Model F252526324650

N446666

G 714— 8 831

H2528—312930

NN223344

I111012141312

J 1728405278

105

K23.533.543.553.563.588.5

Z 45.5 55.5 69.5 83.5108.5134.5

M 46 56 70 84109135

ZZ 71 81 95109134160

13-/22-MXQ8L-1013-/22-MXQ8L-2013-/22-MXQ8L-3013-/22-MXQ8L-4013-/22-MXQ8L-5013-/22-MXQ8L-75

(mm)

GA131429393761

HA192827315860

NA444488

KA————

82.5112.5

Note) Refer to the bottom view of MXQ8L-30.

Note) Note)

13-22-

Basic

Dimensions: MXQ8L / Symmetric Type13-22-

MXQ13-22-Air Slide Table

807

Operating port 2 x M5 x 0.831

6.3

12

14.5

15

6.5

∗ Other dimensions are the same as basic type.

Dimensions: MXQ8L / Symmetric Type13-22-

Axial piping (ø8): MXQ8L-P13-22-

MXQ13-22-Air Slide Table

808

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

3 x M5 x 0.8 thread depth 8

Operating port 2 x M5 x 0.8

N x M4 x 0.7 thread depth 5 Note 1) Note 2)

NA x M4 x 0.7thread depth 4

Extension end adjusterRetraction end adjuster

Vacuum suction port M5 x 0.8

B-BA-A

NN x M5 x 0.8 thread depth 10

4 x M4 x 0.7 thread depth 6

0.3

30M

Z

5

HA GA

13

5

29

8.5

J I

F

G(NN – 1) x HH

939 29

5

19.5

14.5

1

2.5

20 39 465 8.5

18.5K5 8.5

18.5KA

4.8

19

1

29.5 (Extension end adjuster)

10 (E

xten

sion

end

adj

uste

r)

10 Max. 13 (Retraction end adjuster)5.5

10

35

29.2

ZZ

27

16 8

ø4.

2

ø9

16 8

ø4.

2

ø9

ø8.

5

8 4.5

2022

Bottom view of MXQ12-4013-22-

A

A

B

B

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

2N – 1 x F

4H9

(

)

dept

h 4

+0.

030

0

4H9

(

)

dept

h 4

+0.

030

0

ø4H9 ( ) depth 4+0.0300

ø4H9 ( ) depth 4+0.0300

Basic

Model F28283834343636

N 4 4 4 6 6 810

G181820— 92312

H323240—393636

NN2223345

I12121415131717

J 3434425870

110135

K 26.5 36.5 46.5 56.5 66.5 91.5116.5

Z 66 66 76 93103147172

M 67 67 77 94104148173

ZZ 95 95105122132176201

13-/22-MXQ12- 1013-/22-MXQ12- 2013-/22-MXQ12- 3013-/22-MXQ12- 4013-/22-MXQ12- 5013-/22-MXQ12- 7513-/22-MXQ12-100

(mm)

GA18182038485984

HA32324039397272

NA4444488

KA—————

117.5142.5

Note) Refer to the bottom view of MXQ12-40.

Note) Note)

13-22-

Dimensions: MXQ1213-22-

MXQ13-22-Air Slide Table

809

Operating port 2 x M5 x 0.8

416.

316

.5

13

20

8.5

∗ Other dimensions are the same as basic type.

Dimensions: MXQ1213-22-

Axial piping (ø12): MXQ12-P13-22-

MXQ13-22-Air Slide Table

810

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Operating port 2 x M5 x 0.8

N x M4 x 0.7 thread depth 5 Note 1) Note 2)

NA x M4 x 0.7 thread depth 4

Extension end adjusterRetraction end adjuster

3 x M5 x 0.8 thread depth 8

Vacuum suction port M5 x 0.8

B-BA-A

NN x M5 x 0.8 thread depth 10

4 x M4 x 0.7 thread depth 6

0.3

30

M

Z

5

HA GA

8.5

J I

F

G(NN – 1) x HH

939 29

5

19.5

1 2.5

20 39 46

5 8.5

18.5K5 8.5

18.5KA

4.8

19

110

(Ext

ensi

on e

nd a

djus

ter)

10

Max. 13 (Retraction end adjuster)

29.2

27

ZZ

3513

5

29

14.5

29.5 (Extension end adjuster)

5.5

10

16 8

ø4.

2

ø9

16 8

ø4.

2

ø9

ø8.

5

8 4.5

2022

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

Bottom view of MXQ12L-4013-22-

A

A

B

B

2N – 1 x F

4H9

(

)

dept

h 4

+0.0

300

ø4H9 ( ) depth 4+0.0300

4H9

(

)

dept

h 4

+0.

030

0

ø4H9 ( ) depth 4+0.0300

Basic

Model F28283834343636

N 4 4 4 6 6 810

G181820— 92312

H323240—393636

NN2223345

I12121415131717

J 3434425870

110135

K 26.5 36.5 46.5 56.5 66.5 91.5116.5

Z 66 66 76 93103147172

M 67 67 77 94104148173

ZZ 95 95105122132176201

13-/22-MXQ12L- 1013-/22-MXQ12L- 2013-/22-MXQ12L- 3013-/22-MXQ12L- 4013-/22-MXQ12L- 5013-/22-MXQ12L- 7513-/22-MXQ12L-100

(mm)

GA18182038485984

HA32324039397272

NA4444488

KA—————

117.5142.5

Note) Refer to the bottom view of MXQ12L-40.13-22-

Note) Note)

Dimensions: MXQ12L / Symmetric Type13-22-

MXQ13-22-Air Slide Table

811

Operating port 2 x M5 x 0.8

416.

3

20

16.5

13

8.5

∗ Other dimensions are the same as basic type.

Dimensions: MXQ12L / Symmetric Type13-22-

Axial piping (ø12): MXQ12L-P13-22-

MXQ13-22-Air Slide Table

812

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

A B

A B

3 x M6 x 1 thread depth 10

Operating port 2 x M5 x 0.8

N x M5 x 0.8 thread depth 6 Note 1) Note 2)

NA x M5 x 0.8 thread depth 6.5

Extension end adjuster

Retraction end adjuster

Vacuum suction port M5 x 0.8

NN x M6 x 1 thread depth 12

4 x M5 x 0.8 thread depth 7

14

6.5

14.5

29

J I

11

F

6

M37

Z

6

HA

G(NN – 1) x HH

GA

133545

24

24.5

124

3.5

49 585.5 10

21

5.5 10

21

K

KA

5.5

1

12 Max. 12 (Retraction end adjuster)

36.5 (Extension end adjuster)

12.5

(E

xten

sion

end

adj

uste

r)

5.5

11

41

0.3

35.7

30

ZZ

ø5.

1

ø9.

5

ø10

.5

21 9

ø5.

1

ø10

.5

21 9

11

24.5

28

5.5

Bottom view of MXQ16-5013-22-

A-A B-B

2N – 1 x F

5H9

(

)

dept

h 5

+0.

030

0

ø5H9 ( ) depth 5+0.0300

ø5H9 ( ) depth 5+0.0300

5H9

(

)

dept

h 5

+0.

030

0

Basic

Model F3838485840464444

N 4 4 4 4 6 6 810

G18181919—213617

H39394858—524444

NN22223345

I1212121220151823

J 40

40 50 60 68105145165

K 28 38 48 58 68 93118143

Z 77 77 87 97113145188213

M 78 78 88 98114146189214

ZZ109109119129145177220245

13-/22-MXQ16- 1013-/22-MXQ16- 2013-/22-MXQ16- 3013-/22-MXQ16- 4013-/22-MXQ16- 5013-/22-MXQ16- 7513-/22-MXQ16-10013-/22-MXQ16-125

(mm)

GA 18 18 19 19 48 73 80105

HA3939485845528888

NA44448888

KA————

91123166191

Note) Note)

Note) Refer to the bottom view of MXQ16-50.13-22-

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

Dimensions: MXQ1613-22-

MXQ13-22-Air Slide Table

813

Operating port 2 x M5 x 0.8

526.

3

14

21

26

11

∗ Other dimensions are the same as basic type.

Dimensions: MXQ1613-22-

Axial piping (ø16): MXQ16-P13-22-

MXQ13-22-Air Slide Table

814

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

A B

A B

Operating port 2 x M5 x 0.8

N x M5 x 0.8 thread depth 6 Note 1) Note 2)

NA x M5 x 0.8 thread depth 6.5

Extension end adjuster

Retraction end adjuster

3 x M6 x 1 thread depth 10

Vacuum suction port M5 x 0.8

NN x M6 x 1 thread depth 12

4 x M5 x 0.8 thread depth 7

J I

11

F

6

M

37

Z

6

HA

G(NN – 1) x HH

GA

133545

24

24.5

124

3.5

49 58

5.5 10

21

5.5 10

21

K

KA

5.5

1

12

Max. 12 (Retraction end adjuster)

12.5

(Ext

ensi

on e

nd a

djus

ter)

41

14

6.5

14.5

29

36.5 (Extension end adjuster)

0.3

35.7

ZZ

30

5.5

11

ø5.

1

ø9.

5

ø10

.5

21 9

ø5.

1

ø10

.5

21 9

11

24.5

28

5.5

Bottom view of MXQ16L-5013-22-

A-A B-B

2N – 1 x F

5H9

(

)

dept

h 5

+0.0

300

ø5H9 ( ) depth 5+0.0300

5H9

(

)

dept

h 5

+0.

030

0ø5H9 ( ) depth 5+0.0300

Basic

Model F3838485840464444

N 4 4 4 4 6 6 810

G18181919—213617

H39394858—524444

NN22223345

I1212121220151823

J 40

40 50 60 68105145165

K 28 38 48 58 68 93118143

Z 77 77 87 97113145188213

M 78 78 88 98114146189214

ZZ109109119129145177220245

13-/22-MXQ16L- 1013-/22-MXQ16L- 2013-/22-MXQ16L- 3013-/22-MXQ16L- 4013-/22-MXQ16L- 5013-/22-MXQ16L- 7513-/22-MXQ16L-10013-/22-MXQ16L-125

(mm)

GA 18 18 19 19 48 73 80105

HA3939485845528888

NA44448888

KA————

91123166191

Note) Refer to the bottom view of MXQ16L-50.13-22-

Note) Note)

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

Dimensions: MXQ16L / Symmetric Type13-22-

MXQ13-22-Air Slide Table

815

Operating port 2 x M5 x 0.8

526.

3

14

21

11

26∗ Other dimensions are the same as basic type.

Dimensions: MXQ16L / Symmetric Type13-22-

Axial piping (ø16): MXQ16L-P13-22-

MXQ13-22-Air Slide Table

816

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

N x M5 x 0.8 thread depth 8 Note 1) Note 2)

3 x M6 x 1 thread depth 13

NA x M6 x 1 thread depth 6

Extension end adjuster

Retraction end adjuster

Vacuum suction port Rc1/8 (NPT1/8, G1/8)

B-BA-A

NN x M6 x 1 thread depth 12

4 x M5 x 0.8 thread depth 8

14

6

46

6

J I

F

M

ZZZ

GAHA

HG

1248 36

(NN – 1) x H

18

7

35

17.5

1.5

30

360 70

6.5 12

25K6.5 12

25KA6.

5

1.5

29

13 Max. 14 (Retraction end adjuster)

45.5 (Extension end adjuster)

14.5

(E

xten

sion

end

adj

uste

r)

7.5

1430

51

43.5

0.5

37

26 10.5

ø5.

1

ø11

26 10.5

ø5.

1

ø9.

5

ø11

15 6

3133

Bottom view of MXQ20-5013-22-

A

A

B

B

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

2N – 1 x F

ø5H9 ( ) depth 5+0.0300

5H9

(

)

dept

h 5

+0.0

300

ø5H9 ( ) depth 5+0.0300

5H9

(

)

dept

h 5

+0.0

300

Basic

Model F454048584255505562

N444466888

G22222222—17183756

H46464656—56565962

NN222233444

I161616161823251821

J 46

46 46 56 72100155190215

K 31 41 51 61 71 96121146171

Z 92.5 92.5 92.5102.5120.5153.5210.5238.5266.5

M 94 94 94104122155212240268

ZZ132132132142160193250278306

13-/22-MXQ20- 1013-/22-MXQ20- 2013-/22-MXQ20- 3013-/22-MXQ20- 4013-/22-MXQ20- 5013-/22-MXQ20- 7513-/22-MXQ20-10013-/22-MXQ20-12513-/22-MXQ20-150

(mm)

GA 18 18 18 22 48 73 74 96118

HA 50 50 50 56 48 56112118124

NA444448888

KA—————

126183211239

Note) Refer to the bottom view of MXQ20-50.

Note) Note)

13-22-

Dimensions: MXQ2013-22-

MXQ13-22-Air Slide Table

817

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

11.5

65

20

2614

32

∗ Other dimensions are the same as basic type.

Dimensions: MXQ2013-22-

Axial piping (ø20): MXQ20-P13-22-

MXQ13-22-Air Slide Table

818

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

N x M5 x 0.8 thread depth 8 Note 1) Note 2)

NN x M6 x 1 thread depth 12

NA x M6 x 1 thread depth 6

Extension end adjuster

Retraction end adjuster

Vacuum suction port Rc1/8 (NPT1/8, G1/8)

3 x M6 x 1 thread depth 13

B-BA-A

4 x M5 x 0.8 thread depth 8

26 10.5

ø5.

1

ø11

14

646

6

J I

F

M

Z

GAHA

HG

30

1248 36

(NN – 1) x H

26

1.5

30

360 70

6.5 12

25K6.5 12

25KA

6.5

1.5

29

13

Max. 14 (Retraction end adjuster)

14.5

(E

xten

sion

end

adj

uste

r)

14

7.5

5118

7

35

17.5

45.5 (Extension end adjuster)

43.5

0.5

37

ZZ

10.5

ø5.

1

ø9.

5

ø11

15 6

3133

Bottom view of MXQ20L-5013-22-

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

A

A B

B

2N – 1 x F

5H9

(

)

dept

h 5

+0.0

300

ø5H9 ( ) depth 5+0.0300

5H9

(

)

dept

h 5

+0.0

300

ø5H9 ( ) depth 5+0.0300

Basic

Model F454048584255505562

N444466888

G22222222—17183756

H46464656—56565962

NN222233444

I161616161823251821

J 46

46 46 56 72100155190215

K 31 41 51 61 71 96121146171

Z 92.5 92.5 92.5102.5120.5153.5210.5238.5266.5

M 94 94 94104122155212240268

ZZ132132132142160193250278306

13-/22-MXQ20L- 1013-/22-MXQ20L- 2013-/22-MXQ20L- 3013-/22-MXQ20L- 4013-/22-MXQ20L- 5013-/22-MXQ20L- 7513-/22-MXQ20L-10013-/22-MXQ20L-12513-/22-MXQ20L-150

(mm)

GA 18 18 18 22 48 73 74 96118

HA 50 50 50 56 48 56112118124

NA444448888

KA—————

126183211239

Note) Refer to the bottom view of MXQ20L-50.

Note) Note)

13-22-

Dimensions: MXQ20L / Symmetric Type13-22-

MXQ13-22-Air Slide Table

819

Operating port 2 x Rc1/8 (NPT1/8, G1/8)11

.565

20

26

14

32

∗ Other dimensions are the same as basic type.

Dimensions: MXQ20L / Symmetric Type13-22-

Axial piping (ø20): MXQ20L-P13-22-

MXQ13-22-Air Slide Table

820

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

N x M6 x 1 thread depth 11 Note 1) Note 2)

3 x M8 x 1.25 thread depth 15

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

Extension end adjuster

Retraction end adjuster

Vacuum suction port Rc1/8 (NPT1/8, G1/8)

4 x M6 x 1 thread depth 10

21.5

6.5

44

22

7

J I

F

225065

17

37

1.5 3

36 74 84

15 Max. 17 (Retraction end adjuster)

54.5 (Extension end adjuster)

16.5

(Ext

ensi

on e

nd a

djus

ter)

7.5

17

55.5

NA x M8 x 1.25 thread depth 8

Z

M55

8 15

31K 8 15

31KA

8

ZZ

0.5

52.5

40.5

ø12

32 11.5

ø6.

6

NN x M8 x 1.25 thread depth 16

ø11

ø12

32 11.5

ø6.

6

20 6.5

3840

Bottom view of MXQ25-7513-22-

B-BA-A

7

HA GA

G(NN – 1) x HH

35

1.5

A B

A B

6H9

(

)

dept

h 6

+0.

030

0

ø6H9 ( ) depth 6+0.0300

2N – 1 x F

6H9

(

)

dept

h 6

+0.

030

0

ø6H9 ( ) depth 6+0.0300

Basic

Model F554655657560486065

N444446888

G2323232332—443156

H5555556580—446666

NN222223444

I161616161631201818

J 56

56 56 66 90100150205230

K 35 45 55 65 75100125 150 175

Z105.5105.5105.5115.5139.5164.5203.5256.5281.5

M107107107117141166205258283

ZZ148.5148.5148.5158.5182.5207.5246.5299.5324.5

13-/22-MXQ25- 1013-/22-MXQ25- 2013-/22-MXQ25- 3013-/22-MXQ25- 4013-/22-MXQ25- 5013-/22-MXQ25- 7513-/22-MXQ25-10013-/22-MXQ25-12513-/22-MXQ25-150

(mm)

GA 23 23 23 23 32 72 88 97122

HA 55 55 55 65 80 65 88132132

NA444444888

KA——————

170223248

Note) Refer to the bottom view of MXQ25-75.

Note) Note)

13-22-

Dimensions: MXQ2513-22-

MXQ13-22-Air Slide Table

821

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

17

407911

.532

20

∗ Other dimensions are the same as basic type.

Dimensions: MXQ2513-22-

Axial piping (ø25): MXQ25-P13-22-

MXQ13-22-Air Slide Table

822

Air

Pre

par

atio

nE

qu

ipm

ent

Pre

ssur

e C

ontr

olE

quip

men

tF

low

Co

ntr

ol

Eq

uip

men

tPr

essu

re S

witc

hes/

Pres

sure

Sen

sors

Dir

ecti

on

alC

on

tro

l Val

ves

Air

Gri

pp

ers

Mo

du

lar

F. R

.Fi

ttin

gs &

Tub

ing

Air

Cyl

ind

ers

Rot

ary

Act

uato

rs

Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause an auto switch malfunction.

BA

BA

N x M6 x 1 thread depth 11 Note 1) Note 2)

3 x M8 x 1.25 thread depth 15

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

NA x M8 x 1.25 thread depth 8

Extension end adjuster

Retraction end adjuster

Vacuum suction port Rc1/8(NPT1/8, G1/8)

4 x M6 x 1 thread depth 10

21.5

6.5

44

22

7

Z

M

55

7

HA GA

G(NN – 1) x HH

J I

F

17

37

1.5 3

36 74 84

8 15

31K 8 15

31KA

835

1.5

15

Max. 17 (Retraction end adjuster)

54.5 (Extension end adjuster)

16.5

(Ext

ensi

on e

nd a

djus

ter)

7.5

17

55.5

ZZ

0.5

52.5

40.5

20 6.5

3840

B-BA-A

NN x M8 x 1.25 thread depth 16

ø12

32 11.5

ø6.

6

ø11 ø12

32 11.5

ø6.

6

Bottom view of MXQ25L-7513-22-

225065

2N – 1 x F

ø6H9 ( ) depth 6+0.0300

ø6H9 ( ) depth 6+0.0300

6H9

(

)

dept

h 6

+0.

030

0

6H9

(

)

dept

h 6

+0.

030

0

Basic

Model F554655657560486065

N444446888

G2323232332—443156

H5555556580—446666

NN222223444

I161616161631201818

J 56

56 56 66 90100150205230

K 35 45 55 65 75100125150175

Z105.5105.5105.5115.5139.5164.5203.5256.5281.5

M107107107117141166205258283

ZZ148.5148.5148.5158.5182.5207.5246.5299.5324.5

13-/22-MXQ25L- 1013-/22-MXQ25L- 2013-/22-MXQ25L- 3013-/22-MXQ25L- 4013-/22-MXQ25L- 5013-/22-MXQ25L- 7513-/22-MXQ25L-10013-/22-MXQ25L-12513-/22-MXQ25L-150

(mm)

GA 23 23 23 23 32 72 88 97122

HA 55 55 55 65 80 65 88132132

NA444444888

KA——————

170223248

Note) Refer to the bottom view of MXQ25L-75.13-22-

Note) Note)

Dimensions: MXQ25L / Symmetric Type13-22-

MXQ13-22-Air Slide Table

823

Operating port 2 x Rc1/8 (NPT1/8, G1/8)

7911

.532

20

17

40

Dust plug Dust cover

Made to Order

MXQ13-22-

Martensitic stainless steel is used for table and guide block. Use this treatment if more effective anti-corrosiveness is necessary.Table and guide block are given anti-corrosive treatment Note 2).

Note 1) Dimensions are the same as standard type.Note 2) Special anti-corrosive treatment makes the table and

guide block black.

Standard model no. 13-MXQ-X42 -X52Standard model no.

Fluororubber is used for the dust cover and the dust plug instead of silicone rubber for standard one.

Note 1) Dimensions are the same as standard type.

Handling

CautionIn case the extension end stroke adjuster is removed, plug the mounting hole.Particle generation may occur because the bottom hole of the mounting screw penetrates the body. Consult with SMC for more information.

Extension end stroke adjuster mounting screw

Extension end stroke adjuster

(Generates particles because it is through the body.)

Specific Product Precautions

Be sure to read this before handling.

Applicable bore size (mm) 12, 16, 20, 25

In case of types without extension end adjuster, the hole is plugged with a hexagon socket set screw at the time of shipment.

Hexagon socket set screw

1. Anti-corrosive guide unit -X42 2. Dust cover and dust plug made by fluororubber -X52

∗ Other dimensions are the same as those of basic type.

Dimensions: MXQ25L / Symmetric Type13-22-

Axial piping (ø25): MXQ25L-P13-22-

MXQ13-22-Air Slide Table

824

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