Silicon Efficiency
Tod HiginbothamGeorge Yang
2 2
Outline
Silicon Market Opportunity • Silicon Flow Map• Reclaim Market• Opportunity Analysis
RegenSi Solution • RegenSi Technology vs. Traditional Reclaim• Proven Value• Applications• The RegenSi Advantage
Case Study
Business Outlook
3 3
Silicon Flow MapSilicon Market ($ Bil)
$11.03
$1.25
Prime Test
Prime Wafers > Volume Production > 99.9% Product YieldPrime Wafers > Volume Production > 99.9% Product YieldPrime Wafers > Volume Production > 99.9% Product YieldPrime Wafers > Volume Production > 99.9% Product YieldCustomer
Test/Monitor Wafers > Process Control > Reclaim Test/Monitor Wafers > Process Control > Reclaim Test/Monitor Wafers > Process Control > Reclaim Test/Monitor Wafers > Process Control > Reclaim
Test Silicon Purchased
$1.25 B
Process Monitoring,Process Monitoring,
Qualification, and Qualification, and
OptimizationOptimization
Process Monitoring,Process Monitoring,
Qualification, and Qualification, and
OptimizationOptimization
= Total Test Silicon
Annual Market
$2.00 - $2.25 BWASTE WASTE Wafers Disposed Due to Thinness/DamageWafers Disposed Due to Thinness/Damage
WASTE WASTE Wafers Disposed Due to Thinness/DamageWafers Disposed Due to Thinness/Damage
Reclaim Loop
+ Services Purchased
$0.75-$1.00 B
2-8X Wafer Cycle2-8X Wafer Cycle
4 4
Silicon Reclaim Market
727
939
874
Market Drivers
• The risk factors for 300mm processing have caused an increase in monitor wafer usage
• The shortage of silicon has kept test wafer prices high
• The price differential between a new test wafer and a reclaimed test wafer establishes the opportunity cost
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Traditional Wafer Reclaim
Issues associated with current wafer reclaim processes:
• Limited wafer reclaim lifetime: < 8 times • Relatively low yield: typically <75%• High per pass wafer cost: >$60 300mm wafer pass• Many new films (i.e. BDII) are hard to remove
2.
Wafer Preparation
&
Film Striping
3.
Lapping
or
Grinding
4.
Polishing
5.
Cleaning
6.
Inspection
&
Sorting
1.
Incoming Inspection
&
Wafer Sorting
Wafer Reclaim
Process Flow
6 6
RegenSi Technology
The RegenSi process quickly removes films without removing silicon, and leaves the Si surface very smooth and passivated, enabling customers to increase the wafer use cycles while reducing cost.
Si wafer
Dielectric
Si wafer
Si wafer
Dielectric
Barrier MetalMetal
Si wafer
RegenSi 31
RegenSi 34
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RegenSi Proven Value
• Chemically removing films without grinding / polishing
• Minimal Si damage with no pitting
• Increased lifetime of Si test wafers
• Higher wafer yield
• Reduction in Si test wafer spending
RMS=1.01nm
DHF 15:1 RegenSi 31
RMS=0.353nm
New Wafer Costs
Reclaim Costs
20-30% reduction with RegenSi implementation
40-50% reduction with RegenSi + Insourcing
Overall Si spend
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RegenSi Applications
Product Applications
Wafer Reclaim•TEOS•OSG: Coral TM , Black Diamond TM ,
Aurora TM
•FSG•SiN, TiN, TaN•Metals: Cu, Al, Ta, Ti
Backside and Bevel Edge Clean
Product Wafer Rework
High Selectivity Etch Rate to Minimize Si Roughening High Selectivity Etch Rate to Minimize Si Roughening
Metal Etch Rate of RegenSi 34
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Silicon Efficiency SolutionCase Study – Taiwan Foundry, 200mm BDII
Before Adopting RegenSi 31
• Reclaim yield: ~60%
• For returned wafers, < 50% Grade A
• Silicon lost is 15~20 um each reclaim *Wafer life time : 8~10 times of reclaim
• Purchase of new test wafers too high
• Lead time: 2 weeks from Japan to Taiwan with in costly air freight.
After Adopting RegenSi 31
• Yield of return: >90%
• For return wafers, >70% Grade A
• Silicon loss is 3um each reclaim *Wafer life time: 40~50 times of reclaim
• Purchases reduced >30%
• Lead time: <1 week. *Enabled by simple localization with RegenSi Technology
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Summary Results
1. Customer has begun migration to other fabs and processes
2. ATMI has established a Reclaim upcharge to capture value of silicon savings
3. After the success of BD wafers, collaboration expanded to include W and Cu 8” wafers
4. New results for SiN, SiON, BD films for 12” test wafer evaluated successfully.
Silicon Efficiency SolutionCase Study (cont.)
Cost Model
Before vs. After Adopting ATMI RegenSi
2937
71
41
0
20
40
60
80
100
Current With RCR
% o
f Tes
t Waf
er C
osts
With RegenSi
Cost for Reclaim/yr
Cost for New Wafer Replacements/ yr
Customer is currently spending over
$50M for wafer reclaim each year.
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Business Outlook
0.00
500.00
1,000.00
1,500.00
2,000.00
2,500.00
3,000.00
Mil $
2007 2008 2009 2010 2011
RegenSi TAM
Test Silicon Reclaim Services
0
100
200
300
400
500
600
700
800Mil $
2007 2008 2009 2010 2011
RegenSi SAM
*25% Si Process Efficiency Gain vs TAM Market Share Potential
$740 Mil SAM Opportunity in 2011
Chemistry, $111.00
Reclaim, $258.00
Turnkey Fab, $369.00
* 20% market penetration in 2011 would
equate to
$150 million in Revenue.
Q&A
ATMI, the ATMI logo, AccuDose, AutoClean, Better Process. Delivered., Cerulean, EPM, ErgoNOW, GasGauge, IDEAL Clean, LOK cap, NOWPak, NOWTrak, PDMPak, ProAct, the ProAct logo, ProE-Vap, RegenSi, SAGE, The Source of Process Efficiency, TiTaN Kleen, UniChem and VAC are trademarks or registered trademarks of Advanced Technology Materials, Inc. in the United States, other countries or both.
SDS is a trademark or registered trademark of Advanced Technology Materials, Inc. and Matheson Gas Products, Inc. in the United States, other countries or both.
Other company, product, or service names may be trademarks or service marks of others.