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14
JULY 10 - 12, SEMICON West 2012 SAN FRANCISCO, CALIFORNIA, USA MOSCONE CENTER, SOUTH HALL, BOOTH 1931 COMPANIES FROM SAXONY
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Page 1: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Saxony Economic Development CorporationBertolt-Brecht-Allee 2201309 Dresden - GermanyPhone +49 351 2138-0Fax +49 351 2138-399E-Mail [email protected] www.wfs.saxony.de

Saxon State Ministry for Economic Affairs, Labour and TransportWilhelm-Buck-Straße 201097 Dresden - GermanyPhone +49 351 5640 Fax +49 351 5648068E-Mail [email protected] www.smwa.sachsen.de

www.invest-in-saxony.com/semiconwest

Saxony Joint StandSouth Hall, Booth 1931

SAxony

FoLSoM STrEET

THIr

D S

TrEE

T

Fou

rTH

STr

EET

ExTrEMEELEC-

TronICS

JuLy 10 - 12, SEMICon West 2012

SAn FrAnCISCo, CALIFornIA, uSA

MoSConE CEnTEr, SouTH HALL, BooTH 1931

companieS from Saxony

Manfred-von-Ardenne-ring 2001099 Dresden - GermanyPhone +49 351 892 58 88Fax +49 351 892 58 89E-Mail [email protected] www.silicon-saxony.com

Contact Mrs. Gitta Haupold

Silicon Saxony e. V.

Supported by

Zeunerstr. 3801069 Dresden - GermanyPhone +49 351 4640 707Fax +49 351 4640 703E-Mail [email protected] www.eas.iis.fraunhofer.de

Contact Mr. Daniel Pastewka

Merritt Precision Technology, Inc.Justus-von-Liebig-ring 8 1080 Classic road82152 Krailling - Germany Apex, nC 27539 - uSAPhone +49 89 899 360-1303 +1 (919) 362 7170Fax +49 89 899 360-16 +1 (919) 434 6244E-Mail [email protected] [email protected] www.innolas.com www.mpt.inc.com

Contact Mr. Mike Siebert Dennis Merritt

innolaS Semiconductor gmbh

Headquarters For uSA and Canada please contact:

NETWORK THINKING – GROWING TOGETHER

Silicon Saxony is Europe's most successful trade association for the semiconductor, software and photovoltaic industries. We are connecting 300 commercial enterpris-es, research institutes, universities and public institutions. The competencies of our members represent the entire value creation chain of the microelectronics industry. In addition, the members increasingly enter growing sectors like the photovoltaic and software industry.

As a continuously growing and vital high-tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partner-ships among them enable knowledge transfer, synergies, business relationships and promote innovative power. Silicon Saxony is open for welcoming members from any other high-tech fields.

ViStec electron beam lithography group

Vistec Electron Beam GmbH Vistec Lithography, Inc.

Goeschwitzer Straße 25 125 Monroe Street07745 Jena - Germany Watervliet, ny 12189 - uSAPhone +49 3641 651900Fax +49 3641 651922E-Mail [email protected] www.vistec-semi.com

Contact Mrs. Ines Stolberg

The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems. The Group provides systems to both key semiconductor manufacturers as well as universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

The Group consists of two business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides Gaussian Beam systems. In addition to their production facilities in Germany and the uS, the Group also maintains service and support centres in the uSA, Europe and AP.

At this year's SEMICon West the Group presents Vistec SB3050 Series / SB4050 Series and SB250.

Industriering 4a85238 Petershausen - GermanyPhone +49 8137 9350Fax +49 8137 935 235E-Mail [email protected] www.camLine.com Contact Mr. Heinz Linsmaier

ringstr. 1201468 Moritzburg - GermanyPhone +49 351 79557212Fax +49 351 79557219E-Mail [email protected] www.fraunhofer.de/assid Contact Mr. M. Juergen Wolf

camline gmbh

For more than 20 years camLine is known as a solution partner for manufacturing of high-tech industries. The software company develops and markets its own product suite LineWorks and the DoE application Cornerstone. In particular with the leading SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics, PV, and medical industries. SPACE is expanding its global market position with several SPACE add-ons and a series of new chart plug-ins. With recipe Management and SQM (Supplier Quality Management) including eCoA (electronic Certificates of Analyses) LineWorks offers new capabilities that address process security inside manufacturing and comprehensive quality data management and traceability of entire modern supply chains.

Manufacturing execution and equipment automation complete the full range of camLine services that concentrate on strategies to improve quality, process security, manufacturing efficiency, enterprise-wide production logistics, monitoring & reporting, and shop floor integration.

Founded by the State of Saxony, one of the federal states of Germany, the Saxony Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds bridges for Saxon companies on their way to the world’s markets and for investors on their way to Saxony. Successfully. www.wfs.saxony.de

Zur Wetterwarte 50 / Haus 337b 1551 W. Lacewood Place01109 Dresden - Germany Phoenix, AZ 85045, uSPhone +49 351 890 39 06 +1 480-363-5071Fax +49 351 890 39 07 E-Mail [email protected] Internet www.httgmbh.de Contact Mr. Christian noglik

htt high tech trade gmbh

Location Dresden For uSA please contact:

HTT Munich/Dresden is a privately owned company founded in 1988, putting its main focus on the Semiconductor industry. Additionally to that, htt works in the Photovoltaic & nanoTechnology, Medical Technology, Pharma Industry, Aerospace and other new areas of high tech industry. HTT offers sales, service, maintenance, application, CE-EMC confirmity and its own manufactured Cantilever Probecards.

Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany. Due to its rGB-lighting it is possible to decode even damaged codes from the wafer surface. The systems have a self-lern-modus, the integration into production equipment and for oEMs is easy.

Htt also offers reader-systems for reticles, Glas, medical surgery application.

Wafer Marking, Wafer Sorting, Wafer Inspection

InnoLas Semiconductor is a leading developer and manufacturer of high quality wa-fer laser marking and sorting equipment for the semiconductor and LED industries.

our branches are located worldwide in all important countries of wafer production including the united States.

InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as all materials and applications using our own laser systems. Typical processes are, for example, soft or deep marking of semiconductor, compound or LED substrates, sorting by wafer ID or wafer thickness and macro inspection.

•Materials: Si, SiC, GaAs, LiTao3, ceramics, sapphire and others •Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates •Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates

fraunhofer inStitute for integrated circuitS iiSDesign Automation Division EAS

fraunhofer iZm-aSSidAll Silicon System Integration Dresden

The Fraunhofer Institute for Integrated Circuits IIS performs contract research and development in the fields of microelectronic systems and software.

The researchers of its Design Automation Division EAS in Dresden develop methods and tools for the reliable computer-aided design of complex electronic and mechatronic systems. Aim of all research activities is the faster implementation and optimization of integrated circuits, electronic devices and complex sensor systems to reduce the time-to-market. Furthermore, the scientists work on innovative technologies and systems in domains like image sensing and condition monitoring. An important task of all activities is to bridge the gap between novel manufacturing technologies and system level design.

our range of services: • System solutions: Sensor and measurement systems, communication systems,

components for assistance systems, etc.•Design tools and methods: SystemC AMS development environment, statistical

power simulation and analysis, modeling und code generation, etc.•Development services: Complex mixed-

signal circuits, software, boards and devices including embedded software

•Studies, tutorials and training courses

Fraunhofer Institute for reliability and Microintegration (IZM) covers together with its center "All Silicon System Integration Dresden – ASSID" all the competencies needed for advanced WL packaging and 3D IC and heterogeneous system integration. IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level system integration which enables industry compatible processing focused on process development, material and equipment evaluation as well as qualified prototyping and low volume manufacturing.

Technologies & Services include: •High-densityCu-TSV(via-middle/via-last)formationforadvancedsystemperformance•TSVinterposerwithmulti-layerredistributionlayer•High-densityandultra-finepitchinterconnectsformation•Die-to-waferassemblyandwafer-to-wafer

bonding for 3D stack formation•Thinandultra-thin3DICassembly•Customer-specificprototyping

Page 2: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Saxony Economic Development CorporationBertolt-Brecht-Allee 2201309 Dresden - GermanyPhone +49 351 2138-0Fax +49 351 2138-399E-Mail [email protected] www.wfs.saxony.de

Saxon State Ministry for Economic Affairs, Labour and TransportWilhelm-Buck-Straße 201097 Dresden - GermanyPhone +49 351 5640 Fax +49 351 5648068E-Mail [email protected] www.smwa.sachsen.de

www.invest-in-saxony.com/semiconwest

Saxony Joint StandSouth Hall, Booth 1931

SAxony

FoLSoM STrEET

THIr

D S

TrEE

T

Fou

rTH

STr

EET

ExTrEMEELEC-

TronICS

JuLy 10 - 12, SEMICon West 2012

SAn FrAnCISCo, CALIFornIA, uSA

MoSConE CEnTEr, SouTH HALL, BooTH 1931

companieS from Saxony

Manfred-von-Ardenne-ring 2001099 Dresden - GermanyPhone +49 351 892 58 88Fax +49 351 892 58 89E-Mail [email protected] www.silicon-saxony.com

Contact Mrs. Gitta Haupold

Silicon Saxony e. V.

Supported by

Zeunerstr. 3801069 Dresden - GermanyPhone +49 351 4640 707Fax +49 351 4640 703E-Mail [email protected] www.eas.iis.fraunhofer.de

Contact Mr. Daniel Pastewka

Merritt Precision Technology, Inc.Justus-von-Liebig-ring 8 1080 Classic road82152 Krailling - Germany Apex, nC 27539 - uSAPhone +49 89 899 360-1303 +1 (919) 362 7170Fax +49 89 899 360-16 +1 (919) 434 6244E-Mail [email protected] [email protected] www.innolas.com www.mpt.inc.com

Contact Mr. Mike Siebert Dennis Merritt

innolaS Semiconductor gmbh

Headquarters For uSA and Canada please contact:

NETWORK THINKING – GROWING TOGETHER

Silicon Saxony is Europe's most successful trade association for the semiconductor, software and photovoltaic industries. We are connecting 300 commercial enterpris-es, research institutes, universities and public institutions. The competencies of our members represent the entire value creation chain of the microelectronics industry. In addition, the members increasingly enter growing sectors like the photovoltaic and software industry.

As a continuously growing and vital high-tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partner-ships among them enable knowledge transfer, synergies, business relationships and promote innovative power. Silicon Saxony is open for welcoming members from any other high-tech fields.

ViStec electron beam lithography group

Vistec Electron Beam GmbH Vistec Lithography, Inc.

Goeschwitzer Straße 25 125 Monroe Street07745 Jena - Germany Watervliet, ny 12189 - uSAPhone +49 3641 651900Fax +49 3641 651922E-Mail [email protected] www.vistec-semi.com

Contact Mrs. Ines Stolberg

The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems. The Group provides systems to both key semiconductor manufacturers as well as universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

The Group consists of two business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides Gaussian Beam systems. In addition to their production facilities in Germany and the uS, the Group also maintains service and support centres in the uSA, Europe and AP.

At this year's SEMICon West the Group presents Vistec SB3050 Series / SB4050 Series and SB250.

Industriering 4a85238 Petershausen - GermanyPhone +49 8137 9350Fax +49 8137 935 235E-Mail [email protected] www.camLine.com Contact Mr. Heinz Linsmaier

ringstr. 1201468 Moritzburg - GermanyPhone +49 351 79557212Fax +49 351 79557219E-Mail [email protected] www.fraunhofer.de/assid Contact Mr. M. Juergen Wolf

camline gmbh

For more than 20 years camLine is known as a solution partner for manufacturing of high-tech industries. The software company develops and markets its own product suite LineWorks and the DoE application Cornerstone. In particular with the leading SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics, PV, and medical industries. SPACE is expanding its global market position with several SPACE add-ons and a series of new chart plug-ins. With recipe Management and SQM (Supplier Quality Management) including eCoA (electronic Certificates of Analyses) LineWorks offers new capabilities that address process security inside manufacturing and comprehensive quality data management and traceability of entire modern supply chains.

Manufacturing execution and equipment automation complete the full range of camLine services that concentrate on strategies to improve quality, process security, manufacturing efficiency, enterprise-wide production logistics, monitoring & reporting, and shop floor integration.

Founded by the State of Saxony, one of the federal states of Germany, the Saxony Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds bridges for Saxon companies on their way to the world’s markets and for investors on their way to Saxony. Successfully. www.wfs.saxony.de

Zur Wetterwarte 50 / Haus 337b 1551 W. Lacewood Place01109 Dresden - Germany Phoenix, AZ 85045, uSPhone +49 351 890 39 06 +1 480-363-5071Fax +49 351 890 39 07 E-Mail [email protected] Internet www.httgmbh.de Contact Mr. Christian noglik

htt high tech trade gmbh

Location Dresden For uSA please contact:

HTT Munich/Dresden is a privately owned company founded in 1988, putting its main focus on the Semiconductor industry. Additionally to that, htt works in the Photovoltaic & nanoTechnology, Medical Technology, Pharma Industry, Aerospace and other new areas of high tech industry. HTT offers sales, service, maintenance, application, CE-EMC confirmity and its own manufactured Cantilever Probecards.

Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany. Due to its rGB-lighting it is possible to decode even damaged codes from the wafer surface. The systems have a self-lern-modus, the integration into production equipment and for oEMs is easy.

Htt also offers reader-systems for reticles, Glas, medical surgery application.

Wafer Marking, Wafer Sorting, Wafer Inspection

InnoLas Semiconductor is a leading developer and manufacturer of high quality wa-fer laser marking and sorting equipment for the semiconductor and LED industries.

our branches are located worldwide in all important countries of wafer production including the united States.

InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as all materials and applications using our own laser systems. Typical processes are, for example, soft or deep marking of semiconductor, compound or LED substrates, sorting by wafer ID or wafer thickness and macro inspection.

•Materials: Si, SiC, GaAs, LiTao3, ceramics, sapphire and others •Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates •Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates

fraunhofer inStitute for integrated circuitS iiSDesign Automation Division EAS

fraunhofer iZm-aSSidAll Silicon System Integration Dresden

The Fraunhofer Institute for Integrated Circuits IIS performs contract research and development in the fields of microelectronic systems and software.

The researchers of its Design Automation Division EAS in Dresden develop methods and tools for the reliable computer-aided design of complex electronic and mechatronic systems. Aim of all research activities is the faster implementation and optimization of integrated circuits, electronic devices and complex sensor systems to reduce the time-to-market. Furthermore, the scientists work on innovative technologies and systems in domains like image sensing and condition monitoring. An important task of all activities is to bridge the gap between novel manufacturing technologies and system level design.

our range of services: • System solutions: Sensor and measurement systems, communication systems,

components for assistance systems, etc.•Design tools and methods: SystemC AMS development environment, statistical

power simulation and analysis, modeling und code generation, etc.•Development services: Complex mixed-

signal circuits, software, boards and devices including embedded software

•Studies, tutorials and training courses

Fraunhofer Institute for reliability and Microintegration (IZM) covers together with its center "All Silicon System Integration Dresden – ASSID" all the competencies needed for advanced WL packaging and 3D IC and heterogeneous system integration. IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level system integration which enables industry compatible processing focused on process development, material and equipment evaluation as well as qualified prototyping and low volume manufacturing.

Technologies & Services include: •High-densityCu-TSV(via-middle/via-last)formationforadvancedsystemperformance•TSVinterposerwithmulti-layerredistributionlayer•High-densityandultra-finepitchinterconnectsformation•Die-to-waferassemblyandwafer-to-wafer

bonding for 3D stack formation•Thinandultra-thin3DICassembly•Customer-specificprototyping

Page 3: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Saxony Economic Development CorporationBertolt-Brecht-Allee 2201309 Dresden - GermanyPhone +49 351 2138-0Fax +49 351 2138-399E-Mail [email protected] www.wfs.saxony.de

Saxon State Ministry for Economic Affairs, Labour and TransportWilhelm-Buck-Straße 201097 Dresden - GermanyPhone +49 351 5640 Fax +49 351 5648068E-Mail [email protected] www.smwa.sachsen.de

www.invest-in-saxony.com/semiconwest

Saxony Joint StandSouth Hall, Booth 1931

SAxony

FoLSoM STrEET

THIr

D S

TrEE

T

Fou

rTH

STr

EET

ExTrEMEELEC-

TronICS

JuLy 10 - 12, SEMICon West 2012

SAn FrAnCISCo, CALIFornIA, uSA

MoSConE CEnTEr, SouTH HALL, BooTH 1931

companieS from Saxony

Manfred-von-Ardenne-ring 2001099 Dresden - GermanyPhone +49 351 892 58 88Fax +49 351 892 58 89E-Mail [email protected] www.silicon-saxony.com

Contact Mrs. Gitta Haupold

Silicon Saxony e. V.

Supported by

Zeunerstr. 3801069 Dresden - GermanyPhone +49 351 4640 707Fax +49 351 4640 703E-Mail [email protected] www.eas.iis.fraunhofer.de

Contact Mr. Daniel Pastewka

Merritt Precision Technology, Inc.Justus-von-Liebig-ring 8 1080 Classic road82152 Krailling - Germany Apex, nC 27539 - uSAPhone +49 89 899 360-1303 +1 (919) 362 7170Fax +49 89 899 360-16 +1 (919) 434 6244E-Mail [email protected] [email protected] www.innolas.com www.mpt.inc.com

Contact Mr. Mike Siebert Dennis Merritt

innolaS Semiconductor gmbh

Headquarters For uSA and Canada please contact:

NETWORK THINKING – GROWING TOGETHER

Silicon Saxony is Europe's most successful trade association for the semiconductor, software and photovoltaic industries. We are connecting 300 commercial enterpris-es, research institutes, universities and public institutions. The competencies of our members represent the entire value creation chain of the microelectronics industry. In addition, the members increasingly enter growing sectors like the photovoltaic and software industry.

As a continuously growing and vital high-tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partner-ships among them enable knowledge transfer, synergies, business relationships and promote innovative power. Silicon Saxony is open for welcoming members from any other high-tech fields.

ViStec electron beam lithography group

Vistec Electron Beam GmbH Vistec Lithography, Inc.

Goeschwitzer Straße 25 125 Monroe Street07745 Jena - Germany Watervliet, ny 12189 - uSAPhone +49 3641 651900Fax +49 3641 651922E-Mail [email protected] www.vistec-semi.com

Contact Mrs. Ines Stolberg

The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems. The Group provides systems to both key semiconductor manufacturers as well as universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

The Group consists of two business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides Gaussian Beam systems. In addition to their production facilities in Germany and the uS, the Group also maintains service and support centres in the uSA, Europe and AP.

At this year's SEMICon West the Group presents Vistec SB3050 Series / SB4050 Series and SB250.

Industriering 4a85238 Petershausen - GermanyPhone +49 8137 9350Fax +49 8137 935 235E-Mail [email protected] www.camLine.com Contact Mr. Heinz Linsmaier

ringstr. 1201468 Moritzburg - GermanyPhone +49 351 79557212Fax +49 351 79557219E-Mail [email protected] www.fraunhofer.de/assid Contact Mr. M. Juergen Wolf

camline gmbh

For more than 20 years camLine is known as a solution partner for manufacturing of high-tech industries. The software company develops and markets its own product suite LineWorks and the DoE application Cornerstone. In particular with the leading SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics, PV, and medical industries. SPACE is expanding its global market position with several SPACE add-ons and a series of new chart plug-ins. With recipe Management and SQM (Supplier Quality Management) including eCoA (electronic Certificates of Analyses) LineWorks offers new capabilities that address process security inside manufacturing and comprehensive quality data management and traceability of entire modern supply chains.

Manufacturing execution and equipment automation complete the full range of camLine services that concentrate on strategies to improve quality, process security, manufacturing efficiency, enterprise-wide production logistics, monitoring & reporting, and shop floor integration.

Founded by the State of Saxony, one of the federal states of Germany, the Saxony Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds bridges for Saxon companies on their way to the world’s markets and for investors on their way to Saxony. Successfully. www.wfs.saxony.de

Zur Wetterwarte 50 / Haus 337b 1551 W. Lacewood Place01109 Dresden - Germany Phoenix, AZ 85045, uSPhone +49 351 890 39 06 +1 480-363-5071Fax +49 351 890 39 07 E-Mail [email protected] Internet www.httgmbh.de Contact Mr. Christian noglik

htt high tech trade gmbh

Location Dresden For uSA please contact:

HTT Munich/Dresden is a privately owned company founded in 1988, putting its main focus on the Semiconductor industry. Additionally to that, htt works in the Photovoltaic & nanoTechnology, Medical Technology, Pharma Industry, Aerospace and other new areas of high tech industry. HTT offers sales, service, maintenance, application, CE-EMC confirmity and its own manufactured Cantilever Probecards.

Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany. Due to its rGB-lighting it is possible to decode even damaged codes from the wafer surface. The systems have a self-lern-modus, the integration into production equipment and for oEMs is easy.

Htt also offers reader-systems for reticles, Glas, medical surgery application.

Wafer Marking, Wafer Sorting, Wafer Inspection

InnoLas Semiconductor is a leading developer and manufacturer of high quality wa-fer laser marking and sorting equipment for the semiconductor and LED industries.

our branches are located worldwide in all important countries of wafer production including the united States.

InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as all materials and applications using our own laser systems. Typical processes are, for example, soft or deep marking of semiconductor, compound or LED substrates, sorting by wafer ID or wafer thickness and macro inspection.

•Materials: Si, SiC, GaAs, LiTao3, ceramics, sapphire and others •Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates •Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates

fraunhofer inStitute for integrated circuitS iiSDesign Automation Division EAS

fraunhofer iZm-aSSidAll Silicon System Integration Dresden

The Fraunhofer Institute for Integrated Circuits IIS performs contract research and development in the fields of microelectronic systems and software.

The researchers of its Design Automation Division EAS in Dresden develop methods and tools for the reliable computer-aided design of complex electronic and mechatronic systems. Aim of all research activities is the faster implementation and optimization of integrated circuits, electronic devices and complex sensor systems to reduce the time-to-market. Furthermore, the scientists work on innovative technologies and systems in domains like image sensing and condition monitoring. An important task of all activities is to bridge the gap between novel manufacturing technologies and system level design.

our range of services: • System solutions: Sensor and measurement systems, communication systems,

components for assistance systems, etc.•Design tools and methods: SystemC AMS development environment, statistical

power simulation and analysis, modeling und code generation, etc.•Development services: Complex mixed-

signal circuits, software, boards and devices including embedded software

•Studies, tutorials and training courses

Fraunhofer Institute for reliability and Microintegration (IZM) covers together with its center "All Silicon System Integration Dresden – ASSID" all the competencies needed for advanced WL packaging and 3D IC and heterogeneous system integration. IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level system integration which enables industry compatible processing focused on process development, material and equipment evaluation as well as qualified prototyping and low volume manufacturing.

Technologies & Services include: •High-densityCu-TSV(via-middle/via-last)formationforadvancedsystemperformance•TSVinterposerwithmulti-layerredistributionlayer•High-densityandultra-finepitchinterconnectsformation•Die-to-waferassemblyandwafer-to-wafer

bonding for 3D stack formation•Thinandultra-thin3DICassembly•Customer-specificprototyping

Page 4: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Königsbrücker Str. 18001099 Dresden - GermanyPhone +49 351 2607-3001Fax +49 351 2607-3005E-Mail [email protected] www.cnt.fraunhofer.de Contact Mr. Konrad Seidel

fÄtH GmbHA member of Fäth Group

fraunHofer cntFraunhofer Center nanoelectronic Technologies

Schwabacher Straße 1001665 Klipphausen - GermanyPhone +49 35204 393050Fax +49 35204 393054E-Mail [email protected] www.faeth.com Contact Mrs. Anne nitzsche

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

HSeb DreSDen GmbH

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com

DaS enVironmental expert GmbH

DAS Environmental Expert GmbH develops and produces advanced technology for: WASTE GAS and WASTE WATEr TrEATMEnT / rECyCLInG.

The company has grown steadily as a specialist for Point-of-use applications, providing a wide range of abatement treatment solutions and equipment. DAS is committed to fulfill specific customer needs and requirements in industrial, municipal and private fields as well as legal, environmental and health provisions. We sell and maintain systems for physical, chemical and biological processes for waste gas and waste water treatment worldwide. our network ensures support and local service coverage 24/7.

Based on our high quality standards, we are proud to provide our customers with the highest quality, reli- ability, efficiency and best total Cost-of-ownership.

That’s what makes us – the Environmental Expert!

microSyStemS GmbH

Gewerbering 309337 Hohenstein-Ernstthal - GermanyPhone +49 3723 49 88-0Fax +49 3723 49 88-25E-Mail [email protected] www.microsystems.de

Contact Mr. Marcel Demmler

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Stefan rud

rotH & rau – ortner GmbH

Headquarters roth & rau - ortner uSA, Inc.

For over 10 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services. The focus of its work is on providing high class service & support solutions for production equipment. roth & rau - ortner’s customized services cover the complete life cycle of production equipment including installation, set-up, maintenance, upgrades etc. to enhance equipment performance and fab productivity.

Further business fields focus on the development and production of tailor-made automation solutions for the improvement of company-internal material flow.

These services available from roth & rau - ortner include:

•Design,conceptionandimplementationofautomationprojectsincludingprocess andfault analyses, feasibility studies, software development, and system integration •Developmentandmanufacturingofintelligent systems for storage, and buffering and transport of lots within manufacturing plants •Developmentandimplementationof customized rFID solutions as well as their integration into new or existing production environments

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Gottfried Gerlach

aiS automation DreSDen GmbH

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklunG Dipl.-Inf. Manfred Austen GmbH

Fraunhofer Center nanoelectronic Technologies (CnT) Dresden focuses on the development of advanced process steps for manufacturing in nanoelectronic appli-cations. We also works on functional materials and characterization of devices, the development of new analytic and metrology methods and on 300 mm wafer. Varioussynergyeffectscanbeusedduetotheclosecooperationwiththebusinesspartner GLoBALFounDrIES and the existing know-how. Thus the innovations can be integrated quickly into manufacturing. our services include:

•AtomProbeTomography •Epitaxy•Nano-RamanSpectroscopy •ElectricalCharacterization•TransmissionElectronMicroscopy •Ultra-low-k/CopperInterconnects•SecondaryIonMassSpectrometry •Self-poweredsensorsystems•ChemicalMechanicalPlanarization•DryandPlasmaEtchingprocesses•NanopatterningusingE-BeamLithography•AtomicLayerDeposition

we builD briDGeS

The Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

wHat can we Do for you?Wirtschaftsförderung Sachsen GmbH Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA'S product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •AutomationreadywithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •Quality&Assetmanagement •IntegrationtobusinesssystemssuchasERP. SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for Semi-conductor, Photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagleMES–ManufacturingExecutionSystem) •Processrefinement(FabEagleframeworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •EquipmentControl(ClusterToolController,ProcessModulController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceAandcustominterfaces) •Refurbishment

We have extensive experience in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 50 factories working intheSemi&PVindustryworldwideusesoftware solutions by AIS for added transparency and efficiency in their production lines.

roth & rau MicroSystems GmbH has with effect of the 16.05.2012 changed its name to MicroSystems GmbH. The worldwide operating company provides advanced technology solutions for the coating, structuring and processing of surface areas through the application of plasma and ion beam processes. The company's process systems feature a modular composition that ensures an easy adaptation of different methods of surface modification, such as reactive Ion Etching (rIE), Plasma Enhanced ChemicalVaporDeposition(PECVD),IonBeamEtching(IBE)andIonBeamSputterDeposition (IBSD).

The systems are predominantly applied in the semiconductor industry, in the production of high precision optics and sensors as well as for research and development. In-house developed plasma and ion beam sources in various configurations build the basis of all process systems. MicroSystems has a vast amount of experience in the production of sources and constantly works on the technological development of these.

The range of services reaches from consultancy, design and assembly to software development and installation as well as process and an after sale service.

Visit us at Semicon West 2012 South Hall, Booth 1924

As Full-Service-Provider for Gas- and Chemical-delivery-systems FaethGroup plans, builds, installs and qualifies worldwide systems for semiconductor-, photovoltaic- and pharmaceutical industry and develops innovative Slurry-recycling-Plants. Fäth GmbH as the founding company of FaethGroup is your partner for all the project – planning, implementation and servicing / maintenance. our qualified team stages of will guide you in all phases with flexibility and transparency. Fäth GmbH is your trusted partner for turnkey projects of standard to high purity systems in our main industries. The IQ Inspection & Qualification GmbH qualifies as an independent expert gas and chemical delivery systems for the microelectronic, semiconductor and photovoltaic industry. Since January 2011 HighQ-Factory GmbH, with headquarters in Klipphausen near Dresden and Munich, offers revolutionary plants for the Slurry-recycling-process.

Visit us at Semicon West 2012 South Hall, Booth 1737

Economic Development officePF 12 00 2001001 Dresden - GermanyPhone +49 351 488 87 00Fax +49 351 488 87 03E-Mail [email protected] www.dresden.de/business

Contact Mr. Michael Kaiser

city of DreSDen

Dresden – your favorite place

The Dresden region is one of the largest and most important European location for microelectronics and information technology - with more than 48.000 employees in about 1.500 companies, represented by the network "Silicon Saxony". The business areas of the local companies cover the entire value chain, however, development and production of electronic components and integrated circuits is the most significant sector of the Dresden microelectronic cluster. Large semiconductor fabs and almost all leading equipment manufacturers have settled here, delivering their products worldwide. To the technological strengths of Saxony belongs a high compe-tence in the field of organic/printed electronics and chip manufacture. The highly motivated and qualified experts as well as the dense network of business, science and government authorities are decisive factors for future investors.

Welcome to Dresden!

Page 5: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Saxony Economic Development CorporationBertolt-Brecht-Allee 2201309 Dresden - GermanyPhone +49 351 2138-0Fax +49 351 2138-399E-Mail [email protected] www.wfs.saxony.de

Saxon State Ministry for Economic Affairs, Labour and TransportWilhelm-Buck-Straße 201097 Dresden - GermanyPhone +49 351 5640 Fax +49 351 5648068E-Mail [email protected] www.smwa.sachsen.de

www.invest-in-saxony.com/semiconwest

Saxony Joint StandSouth Hall, Booth 1931

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MoSConE CEnTEr, SouTH HALL, BooTH 1931

companieS from Saxony

Manfred-von-Ardenne-ring 2001099 Dresden - GermanyPhone +49 351 892 58 88Fax +49 351 892 58 89E-Mail [email protected] www.silicon-saxony.com

Contact Mrs. Gitta Haupold

Silicon Saxony e. V.

Supported by

Zeunerstr. 3801069 Dresden - GermanyPhone +49 351 4640 707Fax +49 351 4640 703E-Mail [email protected] www.eas.iis.fraunhofer.de

Contact Mr. Daniel Pastewka

Merritt Precision Technology, Inc.Justus-von-Liebig-ring 8 1080 Classic road82152 Krailling - Germany Apex, nC 27539 - uSAPhone +49 89 899 360-1303 +1 (919) 362 7170Fax +49 89 899 360-16 +1 (919) 434 6244E-Mail [email protected] [email protected] www.innolas.com www.mpt.inc.com

Contact Mr. Mike Siebert Dennis Merritt

innolaS Semiconductor gmbh

Headquarters For uSA and Canada please contact:

NETWORK THINKING – GROWING TOGETHER

Silicon Saxony is Europe's most successful trade association for the semiconductor, software and photovoltaic industries. We are connecting 300 commercial enterpris-es, research institutes, universities and public institutions. The competencies of our members represent the entire value creation chain of the microelectronics industry. In addition, the members increasingly enter growing sectors like the photovoltaic and software industry.

As a continuously growing and vital high-tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partner-ships among them enable knowledge transfer, synergies, business relationships and promote innovative power. Silicon Saxony is open for welcoming members from any other high-tech fields.

ViStec electron beam lithography group

Vistec Electron Beam GmbH Vistec Lithography, Inc.

Goeschwitzer Straße 25 125 Monroe Street07745 Jena - Germany Watervliet, ny 12189 - uSAPhone +49 3641 651900Fax +49 3641 651922E-Mail [email protected] www.vistec-semi.com

Contact Mrs. Ines Stolberg

The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems. The Group provides systems to both key semiconductor manufacturers as well as universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

The Group consists of two business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides Gaussian Beam systems. In addition to their production facilities in Germany and the uS, the Group also maintains service and support centres in the uSA, Europe and AP.

At this year's SEMICon West the Group presents Vistec SB3050 Series / SB4050 Series and SB250.

Industriering 4a85238 Petershausen - GermanyPhone +49 8137 9350Fax +49 8137 935 235E-Mail [email protected] www.camLine.com Contact Mr. Heinz Linsmaier

ringstr. 1201468 Moritzburg - GermanyPhone +49 351 79557212Fax +49 351 79557219E-Mail [email protected] www.fraunhofer.de/assid Contact Mr. M. Juergen Wolf

camline gmbh

For more than 20 years camLine is known as a solution partner for manufacturing of high-tech industries. The software company develops and markets its own product suite LineWorks and the DoE application Cornerstone. In particular with the leading SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics, PV, and medical industries. SPACE is expanding its global market position with several SPACE add-ons and a series of new chart plug-ins. With recipe Management and SQM (Supplier Quality Management) including eCoA (electronic Certificates of Analyses) LineWorks offers new capabilities that address process security inside manufacturing and comprehensive quality data management and traceability of entire modern supply chains.

Manufacturing execution and equipment automation complete the full range of camLine services that concentrate on strategies to improve quality, process security, manufacturing efficiency, enterprise-wide production logistics, monitoring & reporting, and shop floor integration.

Founded by the State of Saxony, one of the federal states of Germany, the Saxony Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds bridges for Saxon companies on their way to the world’s markets and for investors on their way to Saxony. Successfully. www.wfs.saxony.de

Zur Wetterwarte 50 / Haus 337b 1551 W. Lacewood Place01109 Dresden - Germany Phoenix, AZ 85045, uSPhone +49 351 890 39 06 +1 480-363-5071Fax +49 351 890 39 07 E-Mail [email protected] Internet www.httgmbh.de Contact Mr. Christian noglik

htt high tech trade gmbh

Location Dresden For uSA please contact:

HTT Munich/Dresden is a privately owned company founded in 1988, putting its main focus on the Semiconductor industry. Additionally to that, htt works in the Photovoltaic & nanoTechnology, Medical Technology, Pharma Industry, Aerospace and other new areas of high tech industry. HTT offers sales, service, maintenance, application, CE-EMC confirmity and its own manufactured Cantilever Probecards.

Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany. Due to its rGB-lighting it is possible to decode even damaged codes from the wafer surface. The systems have a self-lern-modus, the integration into production equipment and for oEMs is easy.

Htt also offers reader-systems for reticles, Glas, medical surgery application.

Wafer Marking, Wafer Sorting, Wafer Inspection

InnoLas Semiconductor is a leading developer and manufacturer of high quality wa-fer laser marking and sorting equipment for the semiconductor and LED industries.

our branches are located worldwide in all important countries of wafer production including the united States.

InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as all materials and applications using our own laser systems. Typical processes are, for example, soft or deep marking of semiconductor, compound or LED substrates, sorting by wafer ID or wafer thickness and macro inspection.

•Materials: Si, SiC, GaAs, LiTao3, ceramics, sapphire and others •Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates •Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates

fraunhofer inStitute for integrated circuitS iiSDesign Automation Division EAS

fraunhofer iZm-aSSidAll Silicon System Integration Dresden

The Fraunhofer Institute for Integrated Circuits IIS performs contract research and development in the fields of microelectronic systems and software.

The researchers of its Design Automation Division EAS in Dresden develop methods and tools for the reliable computer-aided design of complex electronic and mechatronic systems. Aim of all research activities is the faster implementation and optimization of integrated circuits, electronic devices and complex sensor systems to reduce the time-to-market. Furthermore, the scientists work on innovative technologies and systems in domains like image sensing and condition monitoring. An important task of all activities is to bridge the gap between novel manufacturing technologies and system level design.

our range of services: • System solutions: Sensor and measurement systems, communication systems,

components for assistance systems, etc.•Design tools and methods: SystemC AMS development environment, statistical

power simulation and analysis, modeling und code generation, etc.•Development services: Complex mixed-

signal circuits, software, boards and devices including embedded software

•Studies, tutorials and training courses

Fraunhofer Institute for reliability and Microintegration (IZM) covers together with its center "All Silicon System Integration Dresden – ASSID" all the competencies needed for advanced WL packaging and 3D IC and heterogeneous system integration. IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level system integration which enables industry compatible processing focused on process development, material and equipment evaluation as well as qualified prototyping and low volume manufacturing.

Technologies & Services include: •High-densityCu-TSV(via-middle/via-last)formationforadvancedsystemperformance•TSVinterposerwithmulti-layerredistributionlayer•High-densityandultra-finepitchinterconnectsformation•Die-to-waferassemblyandwafer-to-wafer

bonding for 3D stack formation•Thinandultra-thin3DICassembly•Customer-specificprototyping

Page 6: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Enno-Heidebroek-Str. 1201237 Dresden - GermanyPhone +49 351 318500Fax +49 351 3185010E-Mail [email protected] www.dresden-elektronik.de Contact Mr. Georg Bauerfeind

Join us (again)!Semicon europa / plastic electronics 2012october 9 – 11, meSSe dresden

microelectronicS/ict in Saxony

"Silicon Saxony" is Europe’s largest microelectronics cluster and one of the world’s most innovative ICT clusters when it comes to technical competence. A unique concentration of commercial enterprises providing extensive knowledge and expertise in the sectors microelectronics and nanoelectronics, photovoltaics, organic & printed electronics, energy-efficient systems, telecommunications technology, and integrated sensor technology is found in the region between Dresden and Chemnitz.

Saxony’s firms are active along all steps of the ICT value creation chain. Approxi-mately 1,500 companies with more than 43,000 employees develop, manufacture, and promote integrated circuits, or serve as materials and equipment suppliers to the chip industry, produce and distribute electronic products and systems based on integrated circuits, or develop and promote software.

Every second chip produced in Europe bears the label "Made in Saxony". GLoBAL-FounDrIES and Infineon Technologies are expanding their Dresden fabs into the most modern semiconductor production sites to be found anywhere on the globe.

yet Saxony’s enterprises and research institutions are the global leaders primarily in the innovative fields of organic & printed electronics, energy-efficient systems, and mobile communication of the next generation. Dresden’s novaled AG corporation is the global leader in manufacturing highly efficient and durable oLEDs. And the Vodafone Chair Mobile Communications Systems at the Dresden university of Technology conducts research on the mobile communication standards for the next generation and beyond.

www.invest-in-saxony.com

Founded in 1985, profi-con is a professional service provider for cleanroom cleaning in the micro- and optoelectronics, pharmaceutics and automotive industries. profi-con cleans well-defined cleanrooms from airlock inwards to cleanrooms of the highest level. We are your professional partner in all cleanroom levels – this implies the levels according to ISo 14644 and to GMP. profi-con offers a full-service system regarding all matters of cleaning. our staff is well-trained and we keep them up-to-date by regular trainings.

In collaboration with our partner, cleanroom-academy, we also offer trainings to teach your staff about the right behavior in cleanrooms as well as we offer an individual consulting and coaching regarding your specific needs.

profi-con gmbhcontamination control

dreSden elektronik ingenieurtechnik gmbh

rosa-Luxemburg-Straße 12-1404103 Leipzig - GermanyPhone +49 341 98989 0Fax +49 341 98989 200E-Mail [email protected] www.profi-con.com Contact Mr. Frank Duvernell

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

hSeb dreSden gmbh

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com Contact Mr. Dr. Horst reichardt

daS enVironmental expert gmbh

CLEAn AIr, CLEAn WATEr, CLEAn TECHnoLoGy

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with two decades of technology and market know-how. our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say "Environmental Expert".

3d infotainment technologieS ug Scientific 3D-Visualization

Bayreuther Straße 3201187 Dresden - GermanyPhone +49 351 4708426Fax +49 351 4708427E-Mail [email protected] www.3dit.de

Contact Mr. Henry Wojcik / Mr. Ingolf Seifert

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Phil Davis

roth & rau – ortner gmbh

Headquarters roth & rau - ortner uSA, Inc.

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Jochen Kinauer

aiS automation dreSden gmbh

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklung Dipl.-Inf. Manfred Austen GmbH

we build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

what can we do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA's product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •EquipmentintegrationwithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •MESMigration&Consulting •EndtoEndsystemintegration–fromtoolcontroltoERP

SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for semicon-ductor, photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagle®MES–ManufacturingExecutionSystem) •Processrefinement(FabEagle®frameworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •Equipmentcontrol(ClusterToolController,ProcessModuleController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceA,andcustominterfaces) •Refurbishment

We have extensive experiences in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 65 factories working in the Semi & PV industry worldwide use software solutions by AIS for added transparency and efficiency in their production lines.

For over 15 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services for the semiconductor and the PV industry. The focus of our work is on the development and implementation of tailor-made automation solutions and customer specific service concepts for the improvement of company-internal material flow.

Business fields at a glance:

Automation: We specialize in customized solutions for a safer and more efficient cassette and wafer handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.

Installation & Service: We have many years of experience and in-depth knowledge in the field of installation, commissioning and maintenance of production equipment and material handling systems.

Products: Highly productive and innovative rFID products as well as the realization of complex rFID projects have been part of our portfolio since 2004.

Innovative Technologies Deserve Innovative Presentations

Better telling – better selling. If you are a high-tech company selling state-of-the-art products, your presentations should look just like that. Modern 3D computer graphics offer new ways of explaining and presenting technical equipment and processes, since 3D provides fast orientation at any scale.

3D animation and 3D video We offer graphical solutions for technically challenging products in need of explana-tion. Enthuse your commercial partners and clients with 3d animations. We build 3d models of your product, animate it and therewith show how it works. We at 3Dit are a team of computer scientists and technical engineers.

3D interaction We build virtual 3d modells of your products and embed them into your web presence or product configurator. Visitors may rotate and scale the models, see an exploded view and set it in motion. Different kinds of those interaction solutions can be adopted for offline environments, too - e.g. for sales conversations.

Zur Wetterwarte 50/30101109 Dresden - GermanyPhone +49 351 88810-0Fax +49 351 8881015E-Mail [email protected] www.sempa.de

Contact Mr. Kurt Pietsch

Sempa SyStemS gmbh

With currently 80 employees dresden elektronik develops and manufactures custom-ized solutions for low power radio data transmission, control technology for traffic light systems, display technology for public places as well as measurement and testing technology.

The product range for low power wireless sensor networks based on the standard IEEE 802.15.4 covers optimally adjusted hardware components like radio modules and sticks, comfortable software control tools for sensor networks with ZigBee or 6LoWPAn and customized ready-to-use solutions.

From development and volume production through product verification of industrial electronic boards and systems, dresden elektronik offers the entire electronic value chain all from one source. For more than 20 years customers have been benefiting from this concept.

SEMPA SySTEMS GmbH develops, manufactures and distributes globally highest purity media supply systems and turn-key solutions for bulk gases, speciality gases and special chemicals to the semiconductor, photovoltaic, printed electronics and glass fiber industries.

Our offering includes: Stainless steel piping systems, bulk gas and specialty gas distribution systems, specialty chemical distribution and evaporization systems, metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier films, contol software and automation of all system solutions, joint development projects with customers, entire fab solutions, safety concept, installation and operation, strong Asian presence via Sempa Asia.

Specific solutions for: TMAl and ozon systems for AIox backside passivation, chemical supply systems for IGZo depositino, DEZ distribution system for Zno TCo’s, chemical distribution solutions for compound Semiconductor integration onSilicon…andmanymore.

your process improvement is our mission!

Page 7: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Enno-Heidebroek-Str. 1201237 Dresden - GermanyPhone +49 351 318500Fax +49 351 3185010E-Mail [email protected] www.dresden-elektronik.de Contact Mr. Georg Bauerfeind

Join us (again)!Semicon europa / plastic electronics 2012october 9 – 11, meSSe dresden

microelectronicS/ict in Saxony

"Silicon Saxony" is Europe’s largest microelectronics cluster and one of the world’s most innovative ICT clusters when it comes to technical competence. A unique concentration of commercial enterprises providing extensive knowledge and expertise in the sectors microelectronics and nanoelectronics, photovoltaics, organic & printed electronics, energy-efficient systems, telecommunications technology, and integrated sensor technology is found in the region between Dresden and Chemnitz.

Saxony’s firms are active along all steps of the ICT value creation chain. Approxi-mately 1,500 companies with more than 43,000 employees develop, manufacture, and promote integrated circuits, or serve as materials and equipment suppliers to the chip industry, produce and distribute electronic products and systems based on integrated circuits, or develop and promote software.

Every second chip produced in Europe bears the label "Made in Saxony". GLoBAL-FounDrIES and Infineon Technologies are expanding their Dresden fabs into the most modern semiconductor production sites to be found anywhere on the globe.

yet Saxony’s enterprises and research institutions are the global leaders primarily in the innovative fields of organic & printed electronics, energy-efficient systems, and mobile communication of the next generation. Dresden’s novaled AG corporation is the global leader in manufacturing highly efficient and durable oLEDs. And the Vodafone Chair Mobile Communications Systems at the Dresden university of Technology conducts research on the mobile communication standards for the next generation and beyond.

www.invest-in-saxony.com

Founded in 1985, profi-con is a professional service provider for cleanroom cleaning in the micro- and optoelectronics, pharmaceutics and automotive industries. profi-con cleans well-defined cleanrooms from airlock inwards to cleanrooms of the highest level. We are your professional partner in all cleanroom levels – this implies the levels according to ISo 14644 and to GMP. profi-con offers a full-service system regarding all matters of cleaning. our staff is well-trained and we keep them up-to-date by regular trainings.

In collaboration with our partner, cleanroom-academy, we also offer trainings to teach your staff about the right behavior in cleanrooms as well as we offer an individual consulting and coaching regarding your specific needs.

profi-con gmbhcontamination control

dreSden elektronik ingenieurtechnik gmbh

rosa-Luxemburg-Straße 12-1404103 Leipzig - GermanyPhone +49 341 98989 0Fax +49 341 98989 200E-Mail [email protected] www.profi-con.com Contact Mr. Frank Duvernell

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

hSeb dreSden gmbh

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com Contact Mr. Dr. Horst reichardt

daS enVironmental expert gmbh

CLEAn AIr, CLEAn WATEr, CLEAn TECHnoLoGy

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with two decades of technology and market know-how. our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say "Environmental Expert".

3d infotainment technologieS ug Scientific 3D-Visualization

Bayreuther Straße 3201187 Dresden - GermanyPhone +49 351 4708426Fax +49 351 4708427E-Mail [email protected] www.3dit.de

Contact Mr. Henry Wojcik / Mr. Ingolf Seifert

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Phil Davis

roth & rau – ortner gmbh

Headquarters roth & rau - ortner uSA, Inc.

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Jochen Kinauer

aiS automation dreSden gmbh

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklung Dipl.-Inf. Manfred Austen GmbH

we build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

what can we do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA's product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •EquipmentintegrationwithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •MESMigration&Consulting •EndtoEndsystemintegration–fromtoolcontroltoERP

SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for semicon-ductor, photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagle®MES–ManufacturingExecutionSystem) •Processrefinement(FabEagle®frameworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •Equipmentcontrol(ClusterToolController,ProcessModuleController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceA,andcustominterfaces) •Refurbishment

We have extensive experiences in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 65 factories working in the Semi & PV industry worldwide use software solutions by AIS for added transparency and efficiency in their production lines.

For over 15 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services for the semiconductor and the PV industry. The focus of our work is on the development and implementation of tailor-made automation solutions and customer specific service concepts for the improvement of company-internal material flow.

Business fields at a glance:

Automation: We specialize in customized solutions for a safer and more efficient cassette and wafer handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.

Installation & Service: We have many years of experience and in-depth knowledge in the field of installation, commissioning and maintenance of production equipment and material handling systems.

Products: Highly productive and innovative rFID products as well as the realization of complex rFID projects have been part of our portfolio since 2004.

Innovative Technologies Deserve Innovative Presentations

Better telling – better selling. If you are a high-tech company selling state-of-the-art products, your presentations should look just like that. Modern 3D computer graphics offer new ways of explaining and presenting technical equipment and processes, since 3D provides fast orientation at any scale.

3D animation and 3D video We offer graphical solutions for technically challenging products in need of explana-tion. Enthuse your commercial partners and clients with 3d animations. We build 3d models of your product, animate it and therewith show how it works. We at 3Dit are a team of computer scientists and technical engineers.

3D interaction We build virtual 3d modells of your products and embed them into your web presence or product configurator. Visitors may rotate and scale the models, see an exploded view and set it in motion. Different kinds of those interaction solutions can be adopted for offline environments, too - e.g. for sales conversations.

Zur Wetterwarte 50/30101109 Dresden - GermanyPhone +49 351 88810-0Fax +49 351 8881015E-Mail [email protected] www.sempa.de

Contact Mr. Kurt Pietsch

Sempa SyStemS gmbh

With currently 80 employees dresden elektronik develops and manufactures custom-ized solutions for low power radio data transmission, control technology for traffic light systems, display technology for public places as well as measurement and testing technology.

The product range for low power wireless sensor networks based on the standard IEEE 802.15.4 covers optimally adjusted hardware components like radio modules and sticks, comfortable software control tools for sensor networks with ZigBee or 6LoWPAn and customized ready-to-use solutions.

From development and volume production through product verification of industrial electronic boards and systems, dresden elektronik offers the entire electronic value chain all from one source. For more than 20 years customers have been benefiting from this concept.

SEMPA SySTEMS GmbH develops, manufactures and distributes globally highest purity media supply systems and turn-key solutions for bulk gases, speciality gases and special chemicals to the semiconductor, photovoltaic, printed electronics and glass fiber industries.

Our offering includes: Stainless steel piping systems, bulk gas and specialty gas distribution systems, specialty chemical distribution and evaporization systems, metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier films, contol software and automation of all system solutions, joint development projects with customers, entire fab solutions, safety concept, installation and operation, strong Asian presence via Sempa Asia.

Specific solutions for: TMAl and ozon systems for AIox backside passivation, chemical supply systems for IGZo depositino, DEZ distribution system for Zno TCo’s, chemical distribution solutions for compound Semiconductor integration onSilicon…andmanymore.

your process improvement is our mission!

Page 8: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Enno-Heidebroek-Str. 1201237 Dresden - GermanyPhone +49 351 318500Fax +49 351 3185010E-Mail [email protected] www.dresden-elektronik.de Contact Mr. Georg Bauerfeind

Join us (again)!Semicon europa / plastic electronics 2012october 9 – 11, meSSe dresden

microelectronicS/ict in Saxony

"Silicon Saxony" is Europe’s largest microelectronics cluster and one of the world’s most innovative ICT clusters when it comes to technical competence. A unique concentration of commercial enterprises providing extensive knowledge and expertise in the sectors microelectronics and nanoelectronics, photovoltaics, organic & printed electronics, energy-efficient systems, telecommunications technology, and integrated sensor technology is found in the region between Dresden and Chemnitz.

Saxony’s firms are active along all steps of the ICT value creation chain. Approxi-mately 1,500 companies with more than 43,000 employees develop, manufacture, and promote integrated circuits, or serve as materials and equipment suppliers to the chip industry, produce and distribute electronic products and systems based on integrated circuits, or develop and promote software.

Every second chip produced in Europe bears the label "Made in Saxony". GLoBAL-FounDrIES and Infineon Technologies are expanding their Dresden fabs into the most modern semiconductor production sites to be found anywhere on the globe.

yet Saxony’s enterprises and research institutions are the global leaders primarily in the innovative fields of organic & printed electronics, energy-efficient systems, and mobile communication of the next generation. Dresden’s novaled AG corporation is the global leader in manufacturing highly efficient and durable oLEDs. And the Vodafone Chair Mobile Communications Systems at the Dresden university of Technology conducts research on the mobile communication standards for the next generation and beyond.

www.invest-in-saxony.com

Founded in 1985, profi-con is a professional service provider for cleanroom cleaning in the micro- and optoelectronics, pharmaceutics and automotive industries. profi-con cleans well-defined cleanrooms from airlock inwards to cleanrooms of the highest level. We are your professional partner in all cleanroom levels – this implies the levels according to ISo 14644 and to GMP. profi-con offers a full-service system regarding all matters of cleaning. our staff is well-trained and we keep them up-to-date by regular trainings.

In collaboration with our partner, cleanroom-academy, we also offer trainings to teach your staff about the right behavior in cleanrooms as well as we offer an individual consulting and coaching regarding your specific needs.

profi-con gmbhcontamination control

dreSden elektronik ingenieurtechnik gmbh

rosa-Luxemburg-Straße 12-1404103 Leipzig - GermanyPhone +49 341 98989 0Fax +49 341 98989 200E-Mail [email protected] www.profi-con.com Contact Mr. Frank Duvernell

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

hSeb dreSden gmbh

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com Contact Mr. Dr. Horst reichardt

daS enVironmental expert gmbh

CLEAn AIr, CLEAn WATEr, CLEAn TECHnoLoGy

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with two decades of technology and market know-how. our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say "Environmental Expert".

3d infotainment technologieS ug Scientific 3D-Visualization

Bayreuther Straße 3201187 Dresden - GermanyPhone +49 351 4708426Fax +49 351 4708427E-Mail [email protected] www.3dit.de

Contact Mr. Henry Wojcik / Mr. Ingolf Seifert

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Phil Davis

roth & rau – ortner gmbh

Headquarters roth & rau - ortner uSA, Inc.

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Jochen Kinauer

aiS automation dreSden gmbh

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklung Dipl.-Inf. Manfred Austen GmbH

we build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

what can we do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA's product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •EquipmentintegrationwithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •MESMigration&Consulting •EndtoEndsystemintegration–fromtoolcontroltoERP

SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for semicon-ductor, photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagle®MES–ManufacturingExecutionSystem) •Processrefinement(FabEagle®frameworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •Equipmentcontrol(ClusterToolController,ProcessModuleController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceA,andcustominterfaces) •Refurbishment

We have extensive experiences in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 65 factories working in the Semi & PV industry worldwide use software solutions by AIS for added transparency and efficiency in their production lines.

For over 15 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services for the semiconductor and the PV industry. The focus of our work is on the development and implementation of tailor-made automation solutions and customer specific service concepts for the improvement of company-internal material flow.

Business fields at a glance:

Automation: We specialize in customized solutions for a safer and more efficient cassette and wafer handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.

Installation & Service: We have many years of experience and in-depth knowledge in the field of installation, commissioning and maintenance of production equipment and material handling systems.

Products: Highly productive and innovative rFID products as well as the realization of complex rFID projects have been part of our portfolio since 2004.

Innovative Technologies Deserve Innovative Presentations

Better telling – better selling. If you are a high-tech company selling state-of-the-art products, your presentations should look just like that. Modern 3D computer graphics offer new ways of explaining and presenting technical equipment and processes, since 3D provides fast orientation at any scale.

3D animation and 3D video We offer graphical solutions for technically challenging products in need of explana-tion. Enthuse your commercial partners and clients with 3d animations. We build 3d models of your product, animate it and therewith show how it works. We at 3Dit are a team of computer scientists and technical engineers.

3D interaction We build virtual 3d modells of your products and embed them into your web presence or product configurator. Visitors may rotate and scale the models, see an exploded view and set it in motion. Different kinds of those interaction solutions can be adopted for offline environments, too - e.g. for sales conversations.

Zur Wetterwarte 50/30101109 Dresden - GermanyPhone +49 351 88810-0Fax +49 351 8881015E-Mail [email protected] www.sempa.de

Contact Mr. Kurt Pietsch

Sempa SyStemS gmbh

With currently 80 employees dresden elektronik develops and manufactures custom-ized solutions for low power radio data transmission, control technology for traffic light systems, display technology for public places as well as measurement and testing technology.

The product range for low power wireless sensor networks based on the standard IEEE 802.15.4 covers optimally adjusted hardware components like radio modules and sticks, comfortable software control tools for sensor networks with ZigBee or 6LoWPAn and customized ready-to-use solutions.

From development and volume production through product verification of industrial electronic boards and systems, dresden elektronik offers the entire electronic value chain all from one source. For more than 20 years customers have been benefiting from this concept.

SEMPA SySTEMS GmbH develops, manufactures and distributes globally highest purity media supply systems and turn-key solutions for bulk gases, speciality gases and special chemicals to the semiconductor, photovoltaic, printed electronics and glass fiber industries.

Our offering includes: Stainless steel piping systems, bulk gas and specialty gas distribution systems, specialty chemical distribution and evaporization systems, metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier films, contol software and automation of all system solutions, joint development projects with customers, entire fab solutions, safety concept, installation and operation, strong Asian presence via Sempa Asia.

Specific solutions for: TMAl and ozon systems for AIox backside passivation, chemical supply systems for IGZo depositino, DEZ distribution system for Zno TCo’s, chemical distribution solutions for compound Semiconductor integration onSilicon…andmanymore.

your process improvement is our mission!

Page 9: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Enno-Heidebroek-Str. 1201237 Dresden - GermanyPhone +49 351 318500Fax +49 351 3185010E-Mail [email protected] www.dresden-elektronik.de Contact Mr. Georg Bauerfeind

Join us (again)!Semicon europa / plastic electronics 2012october 9 – 11, meSSe dresden

microelectronicS/ict in Saxony

"Silicon Saxony" is Europe’s largest microelectronics cluster and one of the world’s most innovative ICT clusters when it comes to technical competence. A unique concentration of commercial enterprises providing extensive knowledge and expertise in the sectors microelectronics and nanoelectronics, photovoltaics, organic & printed electronics, energy-efficient systems, telecommunications technology, and integrated sensor technology is found in the region between Dresden and Chemnitz.

Saxony’s firms are active along all steps of the ICT value creation chain. Approxi-mately 1,500 companies with more than 43,000 employees develop, manufacture, and promote integrated circuits, or serve as materials and equipment suppliers to the chip industry, produce and distribute electronic products and systems based on integrated circuits, or develop and promote software.

Every second chip produced in Europe bears the label "Made in Saxony". GLoBAL-FounDrIES and Infineon Technologies are expanding their Dresden fabs into the most modern semiconductor production sites to be found anywhere on the globe.

yet Saxony’s enterprises and research institutions are the global leaders primarily in the innovative fields of organic & printed electronics, energy-efficient systems, and mobile communication of the next generation. Dresden’s novaled AG corporation is the global leader in manufacturing highly efficient and durable oLEDs. And the Vodafone Chair Mobile Communications Systems at the Dresden university of Technology conducts research on the mobile communication standards for the next generation and beyond.

www.invest-in-saxony.com

Founded in 1985, profi-con is a professional service provider for cleanroom cleaning in the micro- and optoelectronics, pharmaceutics and automotive industries. profi-con cleans well-defined cleanrooms from airlock inwards to cleanrooms of the highest level. We are your professional partner in all cleanroom levels – this implies the levels according to ISo 14644 and to GMP. profi-con offers a full-service system regarding all matters of cleaning. our staff is well-trained and we keep them up-to-date by regular trainings.

In collaboration with our partner, cleanroom-academy, we also offer trainings to teach your staff about the right behavior in cleanrooms as well as we offer an individual consulting and coaching regarding your specific needs.

profi-con gmbhcontamination control

dreSden elektronik ingenieurtechnik gmbh

rosa-Luxemburg-Straße 12-1404103 Leipzig - GermanyPhone +49 341 98989 0Fax +49 341 98989 200E-Mail [email protected] www.profi-con.com Contact Mr. Frank Duvernell

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

hSeb dreSden gmbh

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com Contact Mr. Dr. Horst reichardt

daS enVironmental expert gmbh

CLEAn AIr, CLEAn WATEr, CLEAn TECHnoLoGy

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with two decades of technology and market know-how. our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say "Environmental Expert".

3d infotainment technologieS ug Scientific 3D-Visualization

Bayreuther Straße 3201187 Dresden - GermanyPhone +49 351 4708426Fax +49 351 4708427E-Mail [email protected] www.3dit.de

Contact Mr. Henry Wojcik / Mr. Ingolf Seifert

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Phil Davis

roth & rau – ortner gmbh

Headquarters roth & rau - ortner uSA, Inc.

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Jochen Kinauer

aiS automation dreSden gmbh

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklung Dipl.-Inf. Manfred Austen GmbH

we build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

what can we do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA's product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •EquipmentintegrationwithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •MESMigration&Consulting •EndtoEndsystemintegration–fromtoolcontroltoERP

SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for semicon-ductor, photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagle®MES–ManufacturingExecutionSystem) •Processrefinement(FabEagle®frameworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •Equipmentcontrol(ClusterToolController,ProcessModuleController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceA,andcustominterfaces) •Refurbishment

We have extensive experiences in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 65 factories working in the Semi & PV industry worldwide use software solutions by AIS for added transparency and efficiency in their production lines.

For over 15 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services for the semiconductor and the PV industry. The focus of our work is on the development and implementation of tailor-made automation solutions and customer specific service concepts for the improvement of company-internal material flow.

Business fields at a glance:

Automation: We specialize in customized solutions for a safer and more efficient cassette and wafer handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.

Installation & Service: We have many years of experience and in-depth knowledge in the field of installation, commissioning and maintenance of production equipment and material handling systems.

Products: Highly productive and innovative rFID products as well as the realization of complex rFID projects have been part of our portfolio since 2004.

Innovative Technologies Deserve Innovative Presentations

Better telling – better selling. If you are a high-tech company selling state-of-the-art products, your presentations should look just like that. Modern 3D computer graphics offer new ways of explaining and presenting technical equipment and processes, since 3D provides fast orientation at any scale.

3D animation and 3D video We offer graphical solutions for technically challenging products in need of explana-tion. Enthuse your commercial partners and clients with 3d animations. We build 3d models of your product, animate it and therewith show how it works. We at 3Dit are a team of computer scientists and technical engineers.

3D interaction We build virtual 3d modells of your products and embed them into your web presence or product configurator. Visitors may rotate and scale the models, see an exploded view and set it in motion. Different kinds of those interaction solutions can be adopted for offline environments, too - e.g. for sales conversations.

Zur Wetterwarte 50/30101109 Dresden - GermanyPhone +49 351 88810-0Fax +49 351 8881015E-Mail [email protected] www.sempa.de

Contact Mr. Kurt Pietsch

Sempa SyStemS gmbh

With currently 80 employees dresden elektronik develops and manufactures custom-ized solutions for low power radio data transmission, control technology for traffic light systems, display technology for public places as well as measurement and testing technology.

The product range for low power wireless sensor networks based on the standard IEEE 802.15.4 covers optimally adjusted hardware components like radio modules and sticks, comfortable software control tools for sensor networks with ZigBee or 6LoWPAn and customized ready-to-use solutions.

From development and volume production through product verification of industrial electronic boards and systems, dresden elektronik offers the entire electronic value chain all from one source. For more than 20 years customers have been benefiting from this concept.

SEMPA SySTEMS GmbH develops, manufactures and distributes globally highest purity media supply systems and turn-key solutions for bulk gases, speciality gases and special chemicals to the semiconductor, photovoltaic, printed electronics and glass fiber industries.

Our offering includes: Stainless steel piping systems, bulk gas and specialty gas distribution systems, specialty chemical distribution and evaporization systems, metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier films, contol software and automation of all system solutions, joint development projects with customers, entire fab solutions, safety concept, installation and operation, strong Asian presence via Sempa Asia.

Specific solutions for: TMAl and ozon systems for AIox backside passivation, chemical supply systems for IGZo depositino, DEZ distribution system for Zno TCo’s, chemical distribution solutions for compound Semiconductor integration onSilicon…andmanymore.

your process improvement is our mission!

Page 10: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Enno-Heidebroek-Str. 1201237 Dresden - GermanyPhone +49 351 318500Fax +49 351 3185010E-Mail [email protected] www.dresden-elektronik.de Contact Mr. Georg Bauerfeind

Join us (again)!Semicon europa / plastic electronics 2012october 9 – 11, meSSe dresden

microelectronicS/ict in Saxony

"Silicon Saxony" is Europe’s largest microelectronics cluster and one of the world’s most innovative ICT clusters when it comes to technical competence. A unique concentration of commercial enterprises providing extensive knowledge and expertise in the sectors microelectronics and nanoelectronics, photovoltaics, organic & printed electronics, energy-efficient systems, telecommunications technology, and integrated sensor technology is found in the region between Dresden and Chemnitz.

Saxony’s firms are active along all steps of the ICT value creation chain. Approxi-mately 1,500 companies with more than 43,000 employees develop, manufacture, and promote integrated circuits, or serve as materials and equipment suppliers to the chip industry, produce and distribute electronic products and systems based on integrated circuits, or develop and promote software.

Every second chip produced in Europe bears the label "Made in Saxony". GLoBAL-FounDrIES and Infineon Technologies are expanding their Dresden fabs into the most modern semiconductor production sites to be found anywhere on the globe.

yet Saxony’s enterprises and research institutions are the global leaders primarily in the innovative fields of organic & printed electronics, energy-efficient systems, and mobile communication of the next generation. Dresden’s novaled AG corporation is the global leader in manufacturing highly efficient and durable oLEDs. And the Vodafone Chair Mobile Communications Systems at the Dresden university of Technology conducts research on the mobile communication standards for the next generation and beyond.

www.invest-in-saxony.com

Founded in 1985, profi-con is a professional service provider for cleanroom cleaning in the micro- and optoelectronics, pharmaceutics and automotive industries. profi-con cleans well-defined cleanrooms from airlock inwards to cleanrooms of the highest level. We are your professional partner in all cleanroom levels – this implies the levels according to ISo 14644 and to GMP. profi-con offers a full-service system regarding all matters of cleaning. our staff is well-trained and we keep them up-to-date by regular trainings.

In collaboration with our partner, cleanroom-academy, we also offer trainings to teach your staff about the right behavior in cleanrooms as well as we offer an individual consulting and coaching regarding your specific needs.

profi-con gmbhcontamination control

dreSden elektronik ingenieurtechnik gmbh

rosa-Luxemburg-Straße 12-1404103 Leipzig - GermanyPhone +49 341 98989 0Fax +49 341 98989 200E-Mail [email protected] www.profi-con.com Contact Mr. Frank Duvernell

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

hSeb dreSden gmbh

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com Contact Mr. Dr. Horst reichardt

daS enVironmental expert gmbh

CLEAn AIr, CLEAn WATEr, CLEAn TECHnoLoGy

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with two decades of technology and market know-how. our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say "Environmental Expert".

3d infotainment technologieS ug Scientific 3D-Visualization

Bayreuther Straße 3201187 Dresden - GermanyPhone +49 351 4708426Fax +49 351 4708427E-Mail [email protected] www.3dit.de

Contact Mr. Henry Wojcik / Mr. Ingolf Seifert

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Phil Davis

roth & rau – ortner gmbh

Headquarters roth & rau - ortner uSA, Inc.

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Jochen Kinauer

aiS automation dreSden gmbh

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementWicklung Dipl.-Inf. Manfred Austen GmbH

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA's product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •EquipmentintegrationwithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •MESMigration&Consulting •EndtoEndsystemintegration–fromtoolcontroltoERP

SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for semicon-ductor, photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagle®MES–ManufacturingExecutionSystem) •Processrefinement(FabEagle®frameworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •Equipmentcontrol(ClusterToolController,ProcessModuleController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceA,andcustominterfaces) •Refurbishment

We have extensive experiences in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 65 factories working in the Semi & PV industry worldwide use software solutions by AIS for added transparency and efficiency in their production lines.

For over 15 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services for the semiconductor and the PV industry. The focus of our work is on the development and implementation of tailor-made automation solutions and customer specific service concepts for the improvement of company-internal material flow.

Business fields at a glance:

Automation: We specialize in customized solutions for a safer and more efficient cassette and wafer handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.

Installation & Service: We have many years of experience and in-depth knowledge in the field of installation, commissioning and maintenance of production equipment and material handling systems.

Products: Highly productive and innovative rFID products as well as the realization of complex rFID projects have been part of our portfolio since 2004.

Innovative Technologies Deserve Innovative Presentations

Better telling – better selling. If you are a high-tech company selling state-of-the-art products, your presentations should look just like that. Modern 3D computer graphics offer new ways of explaining and presenting technical equipment and processes, since 3D provides fast orientation at any scale.

3D animation and 3D video We offer graphical solutions for technically challenging products in need of explana-tion. Enthuse your commercial partners and clients with 3d animations. We build 3d models of your product, animate it and therewith show how it works. We at 3Dit are a team of computer scientists and technical engineers.

3D interaction We build virtual 3d modells of your products and embed them into your web presence or product configurator. Visitors may rotate and scale the models, see an exploded view and set it in motion. Different kinds of those interaction solutions can be adopted for offline environments, too - e.g. for sales conversations.

Zur Wetterwarte 50/30101109 Dresden - GermanyPhone +49 351 88810-0Fax +49 351 8881015E-Mail [email protected] www.sempa.de

Contact Mr. Kurt Pietsch

Sempa SyStemS gmbh

With currently 80 employees dresden elektronik develops and manufactures custom-ized solutions for low power radio data transmission, control technology for traffic light systems, display technology for public places as well as measurement and testing technology.

The product range for low power wireless sensor networks based on the standard IEEE 802.15.4 covers optimally adjusted hardware components like radio modules and sticks, comfortable software control tools for sensor networks with ZigBee or 6LoWPAn and customized ready-to-use solutions.

From development and volume production through product verification of industrial electronic boards and systems, dresden elektronik offers the entire electronic value chain all from one source. For more than 20 years customers have been benefiting from this concept.

SEMPA SySTEMS GmbH develops, manufactures and distributes globally highest purity media supply systems and turn-key solutions for bulk gases, speciality gases and special chemicals to the semiconductor, photovoltaic, printed electronics and glass fiber industries.

Our offering includes: Stainless steel piping systems, bulk gas and specialty gas distribution systems, specialty chemical distribution and evaporization systems, metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier films, contol software and automation of all system solutions, joint development projects with customers, entire fab solutions, safety concept, installation and operation, strong Asian presence via Sempa Asia.

Specific solutions for: TMAl and ozon systems for AIox backside passivation, chemical supply systems for IGZo depositino, DEZ distribution system for Zno TCo’s, chemical distribution solutions for compound Semiconductor integration onSilicon…andmanymore.

your process improvement is our mission!

Zur Wetterwarte 50 / Haus 337b 1551 W. Lacewood Place01109 Dresden - Germany Phoenix, AZ 85045, uSPhone +49 351 890 39 06 +1 480-363-5071Fax +49 351 890 39 07 E-Mail [email protected] Internet www.httgmbh.de Contact Mr. Christian noglik

htt high tech trade gmbh

Location Dresden For uSA please contact:

HTT Munich/Dresden is a privately owned company founded in 1988, putting its main focus on the Semiconductor industry. Additionally to that, htt works in the Photovoltaic & nanoTechnology, Medical Technology, Pharma Industry, Aerospace and other new areas of high tech industry. HTT offers sales, service, maintenance, application, CE-EMC confirmity and its own manufactured Cantilever Probecards.

Flagship is the WID110 Wafer ID Reader, a new designed RGB-Wafer ID Reader for OCR, Barcode, DataMatrix Codes designed and built by IOSS in Germany. Due to its rGB-lighting it is possible to decode even damaged codes from the wafer surface. The systems have a self-lern-modus, the integration into production equipment and for oEMs is easy.

Htt also offers reader-systems for reticles, Glas, medical surgery application.

Page 11: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Königsbrücker Str. 18001099 Dresden - GermanyPhone +49 351 2607-3001Fax +49 351 2607-3005E-Mail [email protected] www.cnt.fraunhofer.de Contact Mr. Konrad Seidel

fÄtH GmbHA member of Fäth Group

fraunHofer cntFraunhofer Center nanoelectronic Technologies

Schwabacher Straße 1001665 Klipphausen - GermanyPhone +49 35204 393050Fax +49 35204 393054E-Mail [email protected] www.faeth.com Contact Mrs. Anne nitzsche

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

HSeb DreSDen GmbH

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com

DaS enVironmental expert GmbH

DAS Environmental Expert GmbH develops and produces advanced technology for: WASTE GAS and WASTE WATEr TrEATMEnT / rECyCLInG.

The company has grown steadily as a specialist for Point-of-use applications, providing a wide range of abatement treatment solutions and equipment. DAS is committed to fulfill specific customer needs and requirements in industrial, municipal and private fields as well as legal, environmental and health provisions. We sell and maintain systems for physical, chemical and biological processes for waste gas and waste water treatment worldwide. our network ensures support and local service coverage 24/7.

Based on our high quality standards, we are proud to provide our customers with the highest quality, reli- ability, efficiency and best total Cost-of-ownership.

That’s what makes us – the Environmental Expert!

microSyStemS GmbH

Gewerbering 309337 Hohenstein-Ernstthal - GermanyPhone +49 3723 49 88-0Fax +49 3723 49 88-25E-Mail [email protected] www.microsystems.de

Contact Mr. Marcel Demmler

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Stefan rud

rotH & rau – ortner GmbH

Headquarters roth & rau - ortner uSA, Inc.

For over 10 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services. The focus of its work is on providing high class service & support solutions for production equipment. roth & rau - ortner’s customized services cover the complete life cycle of production equipment including installation, set-up, maintenance, upgrades etc. to enhance equipment performance and fab productivity.

Further business fields focus on the development and production of tailor-made automation solutions for the improvement of company-internal material flow.

These services available from roth & rau - ortner include:

•Design,conceptionandimplementationofautomationprojectsincludingprocess andfault analyses, feasibility studies, software development, and system integration •Developmentandmanufacturingofintelligent systems for storage, and buffering and transport of lots within manufacturing plants •Developmentandimplementationof customized rFID solutions as well as their integration into new or existing production environments

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Gottfried Gerlach

aiS automation DreSDen GmbH

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklunG Dipl.-Inf. Manfred Austen GmbH

Fraunhofer Center nanoelectronic Technologies (CnT) Dresden focuses on the development of advanced process steps for manufacturing in nanoelectronic appli-cations. We also works on functional materials and characterization of devices, the development of new analytic and metrology methods and on 300 mm wafer. Varioussynergyeffectscanbeusedduetotheclosecooperationwiththebusinesspartner GLoBALFounDrIES and the existing know-how. Thus the innovations can be integrated quickly into manufacturing. our services include:

•AtomProbeTomography •Epitaxy•Nano-RamanSpectroscopy •ElectricalCharacterization•TransmissionElectronMicroscopy •Ultra-low-k/CopperInterconnects•SecondaryIonMassSpectrometry •Self-poweredsensorsystems•ChemicalMechanicalPlanarization•DryandPlasmaEtchingprocesses•NanopatterningusingE-BeamLithography•AtomicLayerDeposition

we builD briDGeS

The Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

wHat can we Do for you?Wirtschaftsförderung Sachsen GmbH Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA'S product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •AutomationreadywithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •Quality&Assetmanagement •IntegrationtobusinesssystemssuchasERP. SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for Semi-conductor, Photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagleMES–ManufacturingExecutionSystem) •Processrefinement(FabEagleframeworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •EquipmentControl(ClusterToolController,ProcessModulController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceAandcustominterfaces) •Refurbishment

We have extensive experience in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 50 factories working intheSemi&PVindustryworldwideusesoftware solutions by AIS for added transparency and efficiency in their production lines.

roth & rau MicroSystems GmbH has with effect of the 16.05.2012 changed its name to MicroSystems GmbH. The worldwide operating company provides advanced technology solutions for the coating, structuring and processing of surface areas through the application of plasma and ion beam processes. The company's process systems feature a modular composition that ensures an easy adaptation of different methods of surface modification, such as reactive Ion Etching (rIE), Plasma Enhanced ChemicalVaporDeposition(PECVD),IonBeamEtching(IBE)andIonBeamSputterDeposition (IBSD).

The systems are predominantly applied in the semiconductor industry, in the production of high precision optics and sensors as well as for research and development. In-house developed plasma and ion beam sources in various configurations build the basis of all process systems. MicroSystems has a vast amount of experience in the production of sources and constantly works on the technological development of these.

The range of services reaches from consultancy, design and assembly to software development and installation as well as process and an after sale service.

Visit us at Semicon West 2012 South Hall, Booth 1924

As Full-Service-Provider for Gas- and Chemical-delivery-systems FaethGroup plans, builds, installs and qualifies worldwide systems for semiconductor-, photovoltaic- and pharmaceutical industry and develops innovative Slurry-recycling-Plants. Fäth GmbH as the founding company of FaethGroup is your partner for all the project – planning, implementation and servicing / maintenance. our qualified team stages of will guide you in all phases with flexibility and transparency. Fäth GmbH is your trusted partner for turnkey projects of standard to high purity systems in our main industries. The IQ Inspection & Qualification GmbH qualifies as an independent expert gas and chemical delivery systems for the microelectronic, semiconductor and photovoltaic industry. Since January 2011 HighQ-Factory GmbH, with headquarters in Klipphausen near Dresden and Munich, offers revolutionary plants for the Slurry-recycling-process.

Visit us at Semicon West 2012 South Hall, Booth 1737

Department of Economic AffairsPF 12 00 2001001 Dresden - GermanyPhone +49 351 488 22 01Fax +49 351 488 22 05E-Mail [email protected] www.dresden.de/business

Contact Mr. Michael Kaiser

city of DreSDen

Dresden – your favorite place

The Dresden region is one of the largest and most important European location for microelectronics and information technology - with more than 40.000 employees in about 1.200 companies, represented by the network "Silicon Saxony". The business areas of the local companies cover the entire value chain, however, development and production of electronic components and integrated circuits is the most significant sector of the Dresden microelectronic cluster. Large semiconductor fabs and almost all leading equipment manufacturers have settled here, delivering their products worldwide. To the technological strengths of Saxony belongs a high compe-tence in the field of organic/printed electronics and chip manufacture. The highly motivated and qualified experts as well as the dense network of business, science and government authorities are decisive factors for future investors.

Welcome to Dresden!

Page 12: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Saxony Economic Development CorporationBertolt-Brecht-Allee 2201309 Dresden - GermanyPhone +49 351 2138-0Fax +49 351 2138-399E-Mail [email protected] www.wfs.saxony.de

Saxon State Ministry for Economic Affairs, Labour and TransportWilhelm-Buck-Straße 201097 Dresden - GermanyPhone +49 351 5640 Fax +49 351 5648068E-Mail [email protected] www.smwa.sachsen.de

www.invest-in-saxony.com/semiconwest

Saxony Joint StandSouth Hall, Booth 1931

SAxony

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JuLy 10 - 12, SEMICon West 2012

SAn FrAnCISCo, CALIFornIA, uSA

MoSConE CEnTEr, SouTH HALL, BooTH 1931

companieS from Saxony

Manfred-von-Ardenne-ring 2001099 Dresden - GermanyPhone +49 351 892 58 88Fax +49 351 892 58 89E-Mail [email protected] www.silicon-saxony.com

Contact Mrs. Gitta Haupold

Silicon Saxony e. V.

Supported by

Zeunerstr. 3801069 Dresden - GermanyPhone +49 351 4640 707Fax +49 351 4640 703E-Mail [email protected] www.eas.iis.fraunhofer.de

Contact Mr. Daniel Pastewka

Merritt Precision Technology, Inc.Justus-von-Liebig-ring 8 1080 Classic road82152 Krailling - Germany Apex, nC 27539 - uSAPhone +49 89 899 360-1303 +1 (919) 362 7170Fax +49 89 899 360-16 +1 (919) 434 6244E-Mail [email protected] [email protected] www.innolas.com www.mpt.inc.com

Contact Mr. Mike Siebert Dennis Merritt

innolaS Semiconductor gmbh

Headquarters For uSA and Canada please contact:

NETWORK THINKING – GROWING TOGETHER

Silicon Saxony is Europe's most successful trade association for the semiconductor, software and photovoltaic industries. We are connecting 300 commercial enterpris-es, research institutes, universities and public institutions. The competencies of our members represent the entire value creation chain of the microelectronics industry. In addition, the members increasingly enter growing sectors like the photovoltaic and software industry.

As a continuously growing and vital high-tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partner-ships among them enable knowledge transfer, synergies, business relationships and promote innovative power. Silicon Saxony is open for welcoming members from any other high-tech fields.

ViStec electron beam lithography group

Vistec Electron Beam GmbH Vistec Lithography, Inc.

Goeschwitzer Straße 25 125 Monroe Street07745 Jena - Germany Watervliet, ny 12189 - uSAPhone +49 3641 651900Fax +49 3641 651922E-Mail [email protected] www.vistec-semi.com

Contact Mrs. Ines Stolberg

The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems. The Group provides systems to both key semiconductor manufacturers as well as universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

The Group consists of two business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides Gaussian Beam systems. In addition to their production facilities in Germany and the uS, the Group also maintains service and support centres in the uSA, Europe and AP.

At this year's SEMICon West the Group presents Vistec SB3050 Series / SB4050 Series and SB250.

Industriering 4a85238 Petershausen - GermanyPhone +49 8137 9350Fax +49 8137 935 235E-Mail [email protected] www.camLine.com Contact Mr. Heinz Linsmaier

ringstr. 1201468 Moritzburg - GermanyPhone +49 351 79557212Fax +49 351 79557219E-Mail [email protected] www.fraunhofer.de/assid Contact Mr. M. Juergen Wolf

camline gmbh

For more than 20 years camLine is known as a solution partner for manufacturing of high-tech industries. The software company develops and markets its own product suite LineWorks and the DoE application Cornerstone. In particular with the leading SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics, PV, and medical industries. SPACE is expanding its global market position with several SPACE add-ons and a series of new chart plug-ins. With recipe Management and SQM (Supplier Quality Management) including eCoA (electronic Certificates of Analyses) LineWorks offers new capabilities that address process security inside manufacturing and comprehensive quality data management and traceability of entire modern supply chains.

Manufacturing execution and equipment automation complete the full range of camLine services that concentrate on strategies to improve quality, process security, manufacturing efficiency, enterprise-wide production logistics, monitoring & reporting, and shop floor integration.

Founded by the State of Saxony, one of the federal states of Germany, the Saxony Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds bridges for Saxon companies on their way to the world’s markets and for investors on their way to Saxony. Successfully. www.wfs.saxony.de

Wafer Marking, Wafer Sorting, Wafer Inspection

InnoLas Semiconductor is a leading developer and manufacturer of high quality wa-fer laser marking and sorting equipment for the semiconductor and LED industries.

our branches are located worldwide in all important countries of wafer production including the united States.

InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as all materials and applications using our own laser systems. Typical processes are, for example, soft or deep marking of semiconductor, compound or LED substrates, sorting by wafer ID or wafer thickness and macro inspection.

•Materials: Si, SiC, GaAs, LiTao3, ceramics, sapphire and others •Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates •Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates

fraunhofer inStitute for integrated circuitS iiSDesign Automation Division EAS

fraunhofer iZm-aSSidAll Silicon System Integration Dresden

The Fraunhofer Institute for Integrated Circuits IIS performs contract research and development in the fields of microelectronic systems and software.

The researchers of its Design Automation Division EAS in Dresden develop methods and tools for the reliable computer-aided design of complex electronic and mechatronic systems. Aim of all research activities is the faster implementation and optimization of integrated circuits, electronic devices and complex sensor systems to reduce the time-to-market. Furthermore, the scientists work on innovative technologies and systems in domains like image sensing and condition monitoring. An important task of all activities is to bridge the gap between novel manufacturing technologies and system level design.

our range of services: • System solutions: Sensor and measurement systems, communication systems,

components for assistance systems, etc.•Design tools and methods: SystemC AMS development environment, statistical

power simulation and analysis, modeling und code generation, etc.•Development services: Complex mixed-

signal circuits, software, boards and devices including embedded software

•Studies, tutorials and training courses

Fraunhofer Institute for reliability and Microintegration (IZM) covers together with its center "All Silicon System Integration Dresden – ASSID" all the competencies needed for advanced WL packaging and 3D IC and heterogeneous system integration. IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level system integration which enables industry compatible processing focused on process development, material and equipment evaluation as well as qualified prototyping and low volume manufacturing.

Technologies & Services include: •High-densityCu-TSV(via-middle/via-last)formationforadvancedsystemperformance•TSVinterposerwithmulti-layerredistributionlayer•High-densityandultra-finepitchinterconnectsformation•Die-to-waferassemblyandwafer-to-wafer

bonding for 3D stack formation•Thinandultra-thin3DICassembly•Customer-specificprototyping

We build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

We offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

What can We do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

Page 13: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Saxony Economic Development CorporationBertolt-Brecht-Allee 2201309 Dresden - GermanyPhone +49 351 2138-0Fax +49 351 2138-399E-Mail [email protected] www.wfs.saxony.de

Saxon State Ministry for Economic Affairs, Labour and TransportWilhelm-Buck-Straße 201097 Dresden - GermanyPhone +49 351 5640 Fax +49 351 5648068E-Mail [email protected] www.smwa.sachsen.de

www.invest-in-saxony.com/semiconwest

Saxony Joint StandSouth Hall, Booth 1931

SAxony

FoLSoM STrEET

THIr

D S

TrEE

T

Fou

rTH

STr

EET

ExTrEMEELEC-

TronICS

JuLy 10 - 12, SEMICon West 2012

SAn FrAnCISCo, CALIFornIA, uSA

MoSConE CEnTEr, SouTH HALL, BooTH 1931

companieS from Saxony

Manfred-von-Ardenne-ring 2001099 Dresden - GermanyPhone +49 351 892 58 88Fax +49 351 892 58 89E-Mail [email protected] www.silicon-saxony.com

Contact Mrs. Gitta Haupold

Silicon Saxony e. V.

Supported by

Zeunerstr. 3801069 Dresden - GermanyPhone +49 351 4640 707Fax +49 351 4640 703E-Mail [email protected] www.eas.iis.fraunhofer.de

Contact Mr. Daniel Pastewka

Merritt Precision Technology, Inc.Justus-von-Liebig-ring 8 1080 Classic road82152 Krailling - Germany Apex, nC 27539 - uSAPhone +49 89 899 360-1303 +1 (919) 362 7170Fax +49 89 899 360-16 +1 (919) 434 6244E-Mail [email protected] [email protected] www.innolas.com www.mpt.inc.com

Contact Mr. Mike Siebert Dennis Merritt

innolaS Semiconductor gmbh

Headquarters For uSA and Canada please contact:

NETWORK THINKING – GROWING TOGETHER

Silicon Saxony is Europe's most successful trade association for the semiconductor, software and photovoltaic industries. We are connecting 300 commercial enterpris-es, research institutes, universities and public institutions. The competencies of our members represent the entire value creation chain of the microelectronics industry. In addition, the members increasingly enter growing sectors like the photovoltaic and software industry.

As a continuously growing and vital high-tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partner-ships among them enable knowledge transfer, synergies, business relationships and promote innovative power. Silicon Saxony is open for welcoming members from any other high-tech fields.

ViStec electron beam lithography group

Vistec Electron Beam GmbH Vistec Lithography, Inc.

Goeschwitzer Straße 25 125 Monroe Street07745 Jena - Germany Watervliet, ny 12189 - uSAPhone +49 3641 651900Fax +49 3641 651922E-Mail [email protected] www.vistec-semi.com

Contact Mrs. Ines Stolberg

The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems. The Group provides systems to both key semiconductor manufacturers as well as universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

The Group consists of two business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam systems and Vistec Lithography Inc., which provides Gaussian Beam systems. In addition to their production facilities in Germany and the uS, the Group also maintains service and support centres in the uSA, Europe and AP.

At this year's SEMICon West the Group presents Vistec SB3050 Series / SB4050 Series and SB250.

Industriering 4a85238 Petershausen - GermanyPhone +49 8137 9350Fax +49 8137 935 235E-Mail [email protected] www.camLine.com Contact Mr. Heinz Linsmaier

ringstr. 1201468 Moritzburg - GermanyPhone +49 351 79557212Fax +49 351 79557219E-Mail [email protected] www.fraunhofer.de/assid Contact Mr. M. Juergen Wolf

camline gmbh

For more than 20 years camLine is known as a solution partner for manufacturing of high-tech industries. The software company develops and markets its own product suite LineWorks and the DoE application Cornerstone. In particular with the leading SPC system LineWorks SPACE, camLine is well-known in semiconductor, electronics, PV, and medical industries. SPACE is expanding its global market position with several SPACE add-ons and a series of new chart plug-ins. With recipe Management and SQM (Supplier Quality Management) including eCoA (electronic Certificates of Analyses) LineWorks offers new capabilities that address process security inside manufacturing and comprehensive quality data management and traceability of entire modern supply chains.

Manufacturing execution and equipment automation complete the full range of camLine services that concentrate on strategies to improve quality, process security, manufacturing efficiency, enterprise-wide production logistics, monitoring & reporting, and shop floor integration.

Founded by the State of Saxony, one of the federal states of Germany, the Saxony Economic Development Corporation (Wirtschaftsförderung Sachsen GmbH) builds bridges for Saxon companies on their way to the world’s markets and for investors on their way to Saxony. Successfully. www.wfs.saxony.de

Wafer Marking, Wafer Sorting, Wafer Inspection

InnoLas Semiconductor is a leading developer and manufacturer of high quality wa-fer laser marking and sorting equipment for the semiconductor and LED industries.

our branches are located worldwide in all important countries of wafer production including the united States.

InnoLas Semiconductor provides solutions for wafer sizes 2” to 450 mm as well as all materials and applications using our own laser systems. Typical processes are, for example, soft or deep marking of semiconductor, compound or LED substrates, sorting by wafer ID or wafer thickness and macro inspection.

•Materials: Si, SiC, GaAs, LiTao3, ceramics, sapphire and others •Wafer Marking for 2” to 200 mm, 300 mm, 450 mm and customized substrates •Wafer Sorting for 2” to 200 mm, 300 mm, 450 mm and customized substrates

fraunhofer inStitute for integrated circuitS iiSDesign Automation Division EAS

fraunhofer iZm-aSSidAll Silicon System Integration Dresden

The Fraunhofer Institute for Integrated Circuits IIS performs contract research and development in the fields of microelectronic systems and software.

The researchers of its Design Automation Division EAS in Dresden develop methods and tools for the reliable computer-aided design of complex electronic and mechatronic systems. Aim of all research activities is the faster implementation and optimization of integrated circuits, electronic devices and complex sensor systems to reduce the time-to-market. Furthermore, the scientists work on innovative technologies and systems in domains like image sensing and condition monitoring. An important task of all activities is to bridge the gap between novel manufacturing technologies and system level design.

our range of services: • System solutions: Sensor and measurement systems, communication systems,

components for assistance systems, etc.•Design tools and methods: SystemC AMS development environment, statistical

power simulation and analysis, modeling und code generation, etc.•Development services: Complex mixed-

signal circuits, software, boards and devices including embedded software

•Studies, tutorials and training courses

Fraunhofer Institute for reliability and Microintegration (IZM) covers together with its center "All Silicon System Integration Dresden – ASSID" all the competencies needed for advanced WL packaging and 3D IC and heterogeneous system integration. IZM-ASSID operates a leading-edge 200/300mm process line for 3D wafer level system integration which enables industry compatible processing focused on process development, material and equipment evaluation as well as qualified prototyping and low volume manufacturing.

Technologies & Services include: •High-densityCu-TSV(via-middle/via-last)formationforadvancedsystemperformance•TSVinterposerwithmulti-layerredistributionlayer•High-densityandultra-finepitchinterconnectsformation•Die-to-waferassemblyandwafer-to-wafer

bonding for 3D stack formation•Thinandultra-thin3DICassembly•Customer-specificprototyping

We build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

We offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

What can We do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

Page 14: Silicon Saxony e. V. innolaS Semiconductor gmbh daniel.pastewka@eas.iis.fraunhofer.de Internet Contact Mr. Daniel Pastewka Merritt Precision Technology, Inc. Justus-von-Liebig-ring

Enno-Heidebroek-Str. 1201237 Dresden - GermanyPhone +49 351 318500Fax +49 351 3185010E-Mail [email protected] www.dresden-elektronik.de Contact Mr. Georg Bauerfeind

Join us (again)!Semicon europa / plastic electronics 2012october 9 – 11, meSSe dresden

microelectronicS/ict in Saxony

"Silicon Saxony" is Europe’s largest microelectronics cluster and one of the world’s most innovative ICT clusters when it comes to technical competence. A unique concentration of commercial enterprises providing extensive knowledge and expertise in the sectors microelectronics and nanoelectronics, photovoltaics, organic & printed electronics, energy-efficient systems, telecommunications technology, and integrated sensor technology is found in the region between Dresden and Chemnitz.

Saxony’s firms are active along all steps of the ICT value creation chain. Approxi-mately 1,500 companies with more than 43,000 employees develop, manufacture, and promote integrated circuits, or serve as materials and equipment suppliers to the chip industry, produce and distribute electronic products and systems based on integrated circuits, or develop and promote software.

Every second chip produced in Europe bears the label "Made in Saxony". GLoBAL-FounDrIES and Infineon Technologies are expanding their Dresden fabs into the most modern semiconductor production sites to be found anywhere on the globe.

yet Saxony’s enterprises and research institutions are the global leaders primarily in the innovative fields of organic & printed electronics, energy-efficient systems, and mobile communication of the next generation. Dresden’s novaled AG corporation is the global leader in manufacturing highly efficient and durable oLEDs. And the Vodafone Chair Mobile Communications Systems at the Dresden university of Technology conducts research on the mobile communication standards for the next generation and beyond.

www.invest-in-saxony.com

Founded in 1985, profi-con is a professional service provider for cleanroom cleaning in the micro- and optoelectronics, pharmaceutics and automotive industries. profi-con cleans well-defined cleanrooms from airlock inwards to cleanrooms of the highest level. We are your professional partner in all cleanroom levels – this implies the levels according to ISo 14644 and to GMP. profi-con offers a full-service system regarding all matters of cleaning. our staff is well-trained and we keep them up-to-date by regular trainings.

In collaboration with our partner, cleanroom-academy, we also offer trainings to teach your staff about the right behavior in cleanrooms as well as we offer an individual consulting and coaching regarding your specific needs.

profi-con gmbhcontamination control

dreSden elektronik ingenieurtechnik gmbh

rosa-Luxemburg-Straße 12-1404103 Leipzig - GermanyPhone +49 341 98989 0Fax +49 341 98989 200E-Mail [email protected] www.profi-con.com Contact Mr. Frank Duvernell

Manfred-von-Ardenne-ring 4 01099 Dresden - GermanyPhone +49 351 20758-500Fax +49 351 20758-890E-Mail [email protected] www.hseb-dresden.de

Contact Mr. Burkhard Stegemann

hSeb dreSden gmbh

HSEB is a supplier of systems, sub-systems and components for the semiconductor and MEMS industry. A major part are front and back side inspection and review sys-tems and stand-alone microscopes. our microscopes are based on high-end optics by Carl Zeiss. All major systems of HSEB now feature optional edge grip handling elements for a minimum wafer contact and contamination. HSEB has developed its own advanced macro and automated edge inspection modules. Different kinds of microscope heads and tubes are available for oEM customers as well. HSEB also provides customized solutions for a wide range of applications.

Brief Product Portfolio

•MicroscopesforallsemiconductorandMEMSapplicationswith high-end optics •Microscope-basedfrontandbacksideinspectionandreviewsystems with many options, such as macro and edge inspection, film thickness and CD measurement •Macroinspectionsystemswithhigh throughgput and resolution •Edgeinspectionsystemsandmodules •OEMcomponentsregardingmicro, macro and edge inspection

Goppelner Straße 4401219 Dresden - GermanyPhone +49 351 40494 000Fax +49 351 40494 100E-Mail [email protected] www.das-europe.com Contact Mr. Dr. Horst reichardt

daS enVironmental expert gmbh

CLEAn AIr, CLEAn WATEr, CLEAn TECHnoLoGy

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with two decades of technology and market know-how. our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say "Environmental Expert".

3d infotainment technologieS ug Scientific 3D-Visualization

Bayreuther Straße 3201187 Dresden - GermanyPhone +49 351 4708426Fax +49 351 4708427E-Mail [email protected] www.3dit.de

Contact Mr. Henry Wojcik / Mr. Ingolf Seifert

Manfred-von-Ardenne-ring 7 8410 South 700 East01099 Dresden - Germany Suite 100, Sandy, uT 84070Phone +49 351 888610 +1 801 748 0476Fax +49 351 8886120 +1 801 748 0158E-Mail [email protected] [email protected] www.roth-rau.com/ortner

Contact Mr. Phil Davis

roth & rau – ortner gmbh

Headquarters roth & rau - ortner uSA, Inc.

otto-Mohr-Straße 601237 Dresden - GermanyPhone +49 351 2166-0Fax +49 351 2166-3000E-Mail [email protected] www.ais-automation.com

Contact Mr. Jochen Kinauer

aiS automation dreSden gmbh

Manfred-von-Ardenne-ring 601099 Dresden - GermanyPhone +49 351 8824 615Fax +49 351 8824 772E-Mail [email protected] www.systemagmbh.de Contact Mr. ricco Walter

SyStema SyStementwicklung Dipl.-Inf. Manfred Austen GmbH

we build bridgeSThe Saxony Economic Development Corporation (SEDC) promotes Saxony as a business location and advises potential investors on relocation projects. Furthermore, the SEDC supports Saxon companies in their export efforts and initiates cooperation with partners outside Saxony.

we offer•thelatestdataonSaxony’seconomyandbusinessenvironment, •customizedbusinesssitelocationservices, •procurementofcontactswithregionaldecisionmakers, •informationonopportunitiesforfinancialsupportandsubsidyprograms, •accesstobranchnetworksinSaxony, •assistanceinopeningupnewmarkets,and •ininitiatingcooperativepartnerships.

what can we do for you?Saxony Economic Development Corporation Bertolt-Brecht-Allee 22 01309 Dresden - Germany Phone +49-351-2138 0 Fax +49-351-2138 399 E-Mail [email protected] Internet www.wfs.saxony.de

www.invest-in-saxony.com

SySTEMA is a recognized leader in manufacturing system integration for the semi-conductor and photovoltaic industry. SySTEMA's product and service portfolio has a proven track record to significantly reduce IT's TCo, manufacturing operating cost, and help avoid capital expenditure while maintaining the system flexibility required in today's ever changing business environment.

SySTEMA uniquely delivers a broad set of manufacturing solutions, including •Tracking,fulltraceabilityandcontrolcapabilityforallmanufacturingareas •EquipmentintegrationwithSYSTEMAEISuite(SECS,SemiPV02,XML,S7,OPC…) •MESMigration&Consulting •EndtoEndsystemintegration–fromtoolcontroltoERP

SySTEMA provides industry-leading solutions for MES & connectivity: •SAPME •Eyelit •AppliedMaterials •Cimetrix

For more than 20 years, AIS is a global system provider for innovative software solutions for factory automation, system integration and process control for semicon-ductor, photovoltaic and LED Industry. With regard to factory automation, this comprises the complete range of production IT: •Productionplanning(APS) •Productioncontrol(FabEagle®MES–ManufacturingExecutionSystem) •Processrefinement(FabEagle®frameworkfürAPC,SPC,FDC…) •Equipmentintegration

In the field of process control and host interfaces we provide: •Equipmentcontrol(ClusterToolController,ProcessModuleController…) •Hostinterfaces(SECS/GEM,PV02,InterfaceA,andcustominterfaces) •Refurbishment

We have extensive experiences in the field of state-of-the-art control systems for process equipment in thin-film & plasma technology and for special equipment. over 65 factories working in the Semi & PV industry worldwide use software solutions by AIS for added transparency and efficiency in their production lines.

For over 15 years, roth & rau - ortner GmbH has participated in complex production logistics with a broad portfolio of customized services for the semiconductor and the PV industry. The focus of our work is on the development and implementation of tailor-made automation solutions and customer specific service concepts for the improvement of company-internal material flow.

Business fields at a glance:

Automation: We specialize in customized solutions for a safer and more efficient cassette and wafer handling within different process areas. This includes systems for cassette transportation, storage & identification as well as direct tool loading and wafer handling.

Installation & Service: We have many years of experience and in-depth knowledge in the field of installation, commissioning and maintenance of production equipment and material handling systems.

Products: Highly productive and innovative rFID products as well as the realization of complex rFID projects have been part of our portfolio since 2004.

Innovative Technologies Deserve Innovative Presentations

Better telling – better selling. If you are a high-tech company selling state-of-the-art products, your presentations should look just like that. Modern 3D computer graphics offer new ways of explaining and presenting technical equipment and processes, since 3D provides fast orientation at any scale.

3D animation and 3D video We offer graphical solutions for technically challenging products in need of explana-tion. Enthuse your commercial partners and clients with 3d animations. We build 3d models of your product, animate it and therewith show how it works. We at 3Dit are a team of computer scientists and technical engineers.

3D interaction We build virtual 3d modells of your products and embed them into your web presence or product configurator. Visitors may rotate and scale the models, see an exploded view and set it in motion. Different kinds of those interaction solutions can be adopted for offline environments, too - e.g. for sales conversations.

Zur Wetterwarte 50/30101109 Dresden - GermanyPhone +49 351 88810-0Fax +49 351 8881015E-Mail [email protected] www.sempa.de

Contact Mr. Kurt Pietsch

Sempa SyStemS gmbh

With currently 80 employees dresden elektronik develops and manufactures custom-ized solutions for low power radio data transmission, control technology for traffic light systems, display technology for public places as well as measurement and testing technology.

The product range for low power wireless sensor networks based on the standard IEEE 802.15.4 covers optimally adjusted hardware components like radio modules and sticks, comfortable software control tools for sensor networks with ZigBee or 6LoWPAn and customized ready-to-use solutions.

From development and volume production through product verification of industrial electronic boards and systems, dresden elektronik offers the entire electronic value chain all from one source. For more than 20 years customers have been benefiting from this concept.

SEMPA SySTEMS GmbH develops, manufactures and distributes globally highest purity media supply systems and turn-key solutions for bulk gases, speciality gases and special chemicals to the semiconductor, photovoltaic, printed electronics and glass fiber industries.

Our offering includes: Stainless steel piping systems, bulk gas and specialty gas distribution systems, specialty chemical distribution and evaporization systems, metrology for exhaust gas analysis and water vapor permeation rates of ultra barrier films, contol software and automation of all system solutions, joint development projects with customers, entire fab solutions, safety concept, installation and operation, strong Asian presence via Sempa Asia.

Specific solutions for: TMAl and ozon systems for AIox backside passivation, chemical supply systems for IGZo depositino, DEZ distribution system for Zno TCo’s, chemical distribution solutions for compound Semiconductor integration onSilicon…andmanymore.

your process improvement is our mission!


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