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Dr. Mariam Md Ghazaly BEKC4883 1 Industrial Talk; Manufacturing Systems in E&E Sector Prepared by Mohd Azizi bin Chik SilTerra Malaysia April 28 th 2013 2 GROUND RULE Discussion on related topic only Formality tolerate Can stop any time for emergency case, but raise hand first Try to have fun Three Ways Communication 3 Expected candidates in this class Everyone that new to Wafer Fab operation … new employee, partnership, internships, researchers, or visitors of SilTerra. Others that equivalent are also invited … 4 5 Content Guidelines (2 of 2) Introduction to Manufacturing operation (02:00pm – 04.00pm), Group discussion (2:30 pm to 3:30 pm), Results reviews Simulation modeling for Manufacturing Operation Capacity, Bottleneck, & Product Mixed Dispatching Rules Policies and review basic company case study Working Group Presentation (1hrs, Group presentation 5 min each) Exercise for Dispatching Rules Presentation and proposal (Discussion) 6 Electrical & Electronic (E&E) Outlook 1 Brief on Semiconductor Fabrication 2 Advance Manufacturing Application Outlook 3 4 Introduction to Manufacturing Operation & Production Scheduling Session I Session II
Transcript
Page 1: Silterra

Dr. Mariam Md Ghazaly BEKC4883

1

Industrial Talk; Manufacturing Systems in E&E Sector

Prepared by Mohd Azizi bin Chik

SilTerra Malaysia

April 28th 2013

2

GROUND RULE

• Discussion on related topic only

• Formality tolerate

• Can stop any time for emergency case, but raise hand first

• Try to have fun

• Three Ways Communication

3

Expected candidates in this class

• Everyone that new to Wafer Fab operation … new employee, partnership, internships, researchers, or visitors of SilTerra. Others that equivalent are also invited …

4

5

Content Guidelines (2 of 2)

• Introduction to Manufacturing operation (02:00pm – 04.00pm),

Group discussion (2:30 pm to 3:30 pm), Results reviews

• Simulation modeling for Manufacturing Operation• Capacity, Bottleneck, & Product Mixed

• Dispatching Rules Policies and review basic company case study

– Working Group Presentation (1hrs, Group presentation 5 min each)

• Exercise for Dispatching Rules

• Presentation and proposal (Discussion)

6

Electrical & Electronic (E&E) Outlook1

Brief on Semiconductor Fabrication2

Advance Manufacturing Application Outlook3

4Introduction to Manufacturing Operation & Production Scheduling

Session I

Session II

Page 2: Silterra

Dr. Mariam Md Ghazaly BEKC4883

2

7

Source, Malaysia Economic Transformation Annual Report 2012

8

Source, Malaysia Economic Transformation Annual Report 2012

9

Source, Malaysia Economic Transformation Annual Report 201210

Source, Malaysia Economic Transformation Annual Report 2012

11

ELECTRONIC PROCESS SUPPLY CHAIN

Raw Wafer Fabrication

Packaging & Assembly

PCBA Final Product Assembly

Wafer Fabrication The most complicated processcompared to others in electronic chain

12

Global Semiconductor Forecast

• Semiconductor outlook for the next 3 years is still healthy 7.9 CAGR 2012- 2015 (IC foundry Almanac 2012).• Stable Demand for 8” matured technology and conversion of 6 to 8 by IDM (Gartner Oct 2011).

Page 3: Silterra

Dr. Mariam Md Ghazaly BEKC4883

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13

Fab Cluster Expanding in China

14

Wafer Fabrication & Bumping Facility at Hsinchu, Taiwan

(6 fab facilities)

(1 fab facility)

(7 fab facilities)

(1 fab facility) (1 fab facility) (1 fab facility)

(1 fab facility)

(1 fab facility)

(1 fab facility)

15

Wafer Fabrication & Bumping Facility at Woodlands, Singapore

Woodlands

(6 fab facilities) (1 fab facility)

(1 fab facility)

(1 fab facility)

(1 fab facility)

(1 fab facility)

16

Malaysia’s Electronic Clusters

Melaka

Johor

Selangor / KL

Perak

Negeri Sembilan

Kedah

Semiconductor Front End

Silterra Hamad

a

Infineo

n

Semiconductor Back End

AIC Intel Hitachi

System / Module / Device

Sharp Fuji Akrion

Applied Materials ASML

KLA Tencor Asyst

Celestica Metex Wong

Equipment

Sharp Onkyo Aviza

Axcelis Intevac Varian

Lam

Research

QT Services

Semiconductor Front End

S.E.H. MEMC

Semiconductor Back End

Freescal

e

TI Toshiba

Spansion ChipPac

k

NEC

System / Module / Device

Sensata Flextron

ic

Nichia

ChungHu

a

Equipment

WD Epson Samsung

Panasoni

c

Sony Flextronic

s

Hitachi Sharp Onkyo

Canon

Semiconductor Back End

ST Micro ST Memory

System / Module / Device

Seagate Mitsui Mitsutoyo

Nemic-Lamda PCA

Tech

Ronnie Hokuden FCI

Komag Pioneer

Equipment

Brother Celestica Sharp

Flextroni

cs

Kenwoo

d

Sanyo

Mitsubis

hi

Panasoni

c

Podoyo

Mitsumi Seiko

Semiconductor Back End

Carsem Unisem IDS

System / Module / Device

Murata

Semiconductor Back End

On Semi NXP

System / Module / Device

Alps TDK NHK

Equipment

Samsun

g

Xyratex

Semiconductor Back End

Intel AMD Linear

Spansion Marvell Globetro

nic

Osram Lumileds Altera

IDT Avago ASE

Fairchild Hitachi Sumitom

o

System / Module / Device

Seagate Plexus Knowles

Smart

Mo

Kingston Jabil

Sanmina Kontron Flextroni

c

Solectro

n

Komag Molex

Equipment

Dell Solectro

n

VDO

Agilent Sanyo LKT

Inventec Ben-Q Penta

Clarion Bosch Vitrox

Penang

Semiconductor Back End

Infineon Qimonda

Dominant NS

System / Module / Device

TEAC Qualiteck

Muhlbeuer Flextronic

Equipment

Panasonic Creative

Semiconductor Front End

X-Fab

System / Module / Device

Taiyo

Yuden

Toko

Sanmina Komag

Sarawak

Silterra

17

2010 Foundry Ranking by Gartner. Clear lines are drawn. Its Top 4 and the rest…

18

Silterra Malaysia Sdn Bhd

• Top Fab 2002• Frost & Sullivan 2009 Award High Voltage Tech Implementation• Product Excellent Award 2009• Capacity 30K Wafers per Month• Consistent Utilization of more than 100%• SilTerra continues at full utilization last year. In 2010, SilTerra supplied 25.6% of DDI’s global market (source RSSM 2011).

Page 4: Silterra

Dr. Mariam Md Ghazaly BEKC4883

4

19

Breakdown by Degrees of Engineering in FAB

20

Q&A OR DISCUSSION

• At least 3

21

Short Video

• SilTerra

22

Electrical & Electronic (E&E) Outlook1

Brief on Semiconductor Fabrication2

Advance Manufacturing Application Outlook3

4 Introduction to Manufacturing Operation & Production Scheduling

Session I

Session II

23

What’s in a Chip

24

Relative Size Comparison (Size does matter!)

Page 5: Silterra

Dr. Mariam Md Ghazaly BEKC4883

5

25

PROCESS COMPLEXITY

Wafer fabrication process, is a process to make mask layers. These represent basicstructure like transistors, capacitor, insulator and etc. Process steps are between 300to 900 steps, almost 100% re-entrance to same equipment. More than 35% Re-entrance at 10 to 18 times. Cycle time varies from 30 to 90 days. Cycle timemeasurement is DPML = days per mask layer

26

Introduction: Adding Layers …

27

Short Video

• Silicon Magic

28

Q&A OR DISCUSSION

• At least 3

29

Electrical & Electronic (E&E) Outlook1

Brief on Semiconductor Fabrication2

Advance Manufacturing Application Outlook3

Session I

Session II4 Introduction to Manufacturing Operation &

Production Scheduling

30

Toshiba CorporationSource Iwai RSSM 2011

1970’s

Page 6: Silterra

Dr. Mariam Md Ghazaly BEKC4883

6

31

300 mm Super clean room in Tsukuba,Selete

Toshiba OitaWorks

300 mm Fab TSMC

Now

Source: Iwai RSSM 2011 32

In a futureNo person is necessary!

Source: Iwai RSSM 2011

33

FAB LAYOUT

34

Further Advanced Manufacturing Systems Architecture

w1

35

Fab7 Command and Control Center (C3) … début in 2007

36

APF New Architecture

Page 7: Silterra

Slide 34

w1 - Try to keep titles consistent, if "F7" indicates "Fab 7" then we suggest keeping to "Fab 7" as previous slides indicate it as such.wuuf, 8/18/2004

Page 8: Silterra

Dr. Mariam Md Ghazaly BEKC4883

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37

Example: Server configuration for dispatching/data collection related

Storage

38

“Imagination is more important than knowledge. Knowledge is limited. Imagination encircles the world”

Albert Einstein

Scientist

Knowledge and Imagination

39

Electrical & Electronic (E&E) Outlook1

Brief on Semiconductor Fabrication2

Advance Manufacturing Application Outlook3

Session I

Session II 4 Introduction to Manufacturing Operation & Production Scheduling

40

One MillionUnits

Product Time-to-Market Is Vital

B&W TVCable TVColor TVVCRPCCellularPCSDVD

The impact of being late to market is becoming very significant. Faster cycle time needed, also resulted in lowered down equipment capacity

Source: Semico Research

0 2 4 6 8 10 12 14 16 18 20Years After Introduction

Sal

es V

olum

e

Games

41

Smaller Size, Lower Cost

Bet

ter P

erfo

rman

ce, M

ore

Fun

ctio

ns

PRODUCT COMPLEXITY PART OF LIFE

42

Re-Entrance Process to same equipment

CMP

TFD/TFM Diffusion Etch

Photolithography

Implant

15 steps

24 steps

9 steps

29 steps13

steps

8 steps

Inter bay

Intra bay

Con Mask

Poly Mask

Isl Mask

Met1 Mask

Met2 Mask

Met5 Mask

Metx Mask

Viax Mask

DUV02DUV01 DUV03

Page 9: Silterra

Dr. Mariam Md Ghazaly BEKC4883

8

43

High Ranges Product Mix vs. Variable Process Cycle Time

44

V = IR

Variability = Income Reduction

Dr James Ignizio, IntelISSM 2003

Introduction: OHM’s Law

45

• There are many sources of variability– Process variability

– Flow variability

– Equipment failure

– Batch Sizes

– Equipment Setup Changeover Times

– AMHS delivery times

– In consistent WIP levels

– Huge Data collection

– Loading Plan or Demand Plan

– Inefficient dispatch policies

– Inconsistent dispatching

Introduction: Sources of Variability

46

DISPATCHING RULE GOAL

• Overall main goal

– Lot delivery time (OTD)

• Dispatching based on priority, due date (Critical Ratio, CR = ((due date – current date)/remaining cycle time)

with quality consideration given*

– Reduce Cost (high move, more capacity, improve Efficiency)

• Optimum possible batching, not breaking allowable queue time

47

Others Common Dispatching Rule available

• Others Business Rule available, are– FCFS ( First Come First Come First Serve)

– SPT ( Shortest processing Time)

– EDD (Earliest Due Date)

– CR* (Critical Ratio) * Currently used for dispatching

48

First Come First Serve (FCFS)

• Selection of the product to be process is based on the arrival time. Product reach first, will be selected to be process first.

• In factory, Its it preferred to use in the situation of low loading or utilization. (traditional method to serve common interest in service industry)

Page 10: Silterra

Dr. Mariam Md Ghazaly BEKC4883

9

49

Shortest Processing Time

• Selection of the product to be process is based on the shortest processing time. Usually when there is significant amount of WIP due to unexpected down-time from module.

• This is temporary dispatching policies during high WIP situation and when certain criteria met.

50

Earliest Due Date

• Selection of the product to be process is based on the earliest due date. Usually during moderate loading with less product-mixed

51

Critical Ratio

• Selection of the product to be process is based on the smallest ratio of due date vs remaining processing time. Mainly used during moderate WIP level for production required re-entrance processing, and high product-mixed.

52

GROUP ASSIGNMENT

53

Dispatching Rule Computation

• Calculation is being done for 5 seconds

Collect the required information from various systems

Data structure formatting

Formula computation

Organizing the output configuration

Calculation for “CR,”, lot assignments,… What & Where Display difference color & at what equipment

54

BREAK 10 MINUTES

Page 11: Silterra

Dr. Mariam Md Ghazaly BEKC4883

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55

DISPATCHING (PHOTO)

56

DISPATCHING (DIFFUSION)

57

Example of APF Programming

Close similar to C ++ programming …

58

CASE STUDY –ALIKE

59

Roles of APF/RTD at SilTerra

APF Reports and RTD are one of the key tools to improve manufacturing efficiency andthe breakdowns are as follows with examples in the next few slides.

60

Current Dispatching Policies

• Total Dispatch Rule = 72, Almost all are design to optimize move in each tool type capability.

Page 12: Silterra

Dr. Mariam Md Ghazaly BEKC4883

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61

Benchmarking Dispatching Policies

62

OPTIONS: HYBRID DISPATCH POLICIES

63

Hybrid Type Sample: Critical Ratio with Starvation Avoidance

Critical Ratio :

• To meet customer delivery date

Starvation Avoidance :

• To ensure bottleneck tools always have WIP to run

64

Calculations Details• Critical Ratio :

(Due Date – Current Time) / Remaining Plan Cycle Time

• Starvation Avoidance : Time Required at the bottleneck / Lot Plan cycle time

to bottleneck

Ø Time Required at Bottleneck :

((å (Time_to_BN x WIP)) - (Time_to_BN x WIP)) + ((Bottleneck Bottleneck TCT x Bottleneck WIP)TCT x Bottleneck WIP))) - Buffer

It Means………..(Total Work Time for WIP to BN) + (Work Time at BN

) – WIP Buffer Time

65

Starvation Avoidance

66

Critical Ratio Vs Starvation Avoidance

Page 13: Silterra

Dr. Mariam Md Ghazaly BEKC4883

12

67

Final Ranking

68

Q&A

69

Summary

• New Learning regards– Overall picture about semiconductor fabrication, its

complexity and our application in today environment

– Advanced Manufacturing, current practice.

– Semiconductor Manufacturing operation

– Production Scheduling & Dispatching

70

Thank You

[email protected]


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