Single-Material MEMS and NEMS Using Polycrystalline DiamondUsing Polycrystalline Diamond
DEAN M. ASLAMELECTRICAL AND COMPUTER ENGINEERING, MICHIGAN STATE UNIVERSITY
www.egr.msu.edu/~aslamWork done by:Hoyin ChanZongliang CaoSTATE UNIVERSITY
E. LANSING, MI 48824 USAZongliang CaoMike VarneySean Hatch
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TALK OVERVIEW
NATURE/MAN MADEMADE MEMS/NEMSSINGLE MATERIAL MEMS/NEMS
Michigan State U
EXAMPLES OF SMM
MEMS/NEMS
STATIC CHARGE ENERGY
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Michigan State U CAMPUS
STATIC CHARGE ENERGY SCAVENGING
E Coli:senses food
NATURE MADE NANOSYSTEM senses food,
O2, Temp, PhNANOSYSTEM
MCP: Methyl-accepting ChemotaxisRed: Counterclockwise flagellar rotation
MOLECULAR SENSING & ACTUATIONy p g
Proteins, called chemoreceptors
Signaling Proteins: A – CheA;
B – CheB; Y – CheY; W - CheW
Green: Clockwise flagellar rotationRed: Counterclockwise flagellar rotation
AttractantGray: Inactive
htt // iki di / iki/http://en.wikipedia.org/wiki/Escherichia_coli
METHYLATION
John S Parkinson J Bacteriolohy
AFFECTS GENE BEHAVIOR
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John S. Parkinson, J. Bacteriolohy, 85 (5), 21492–1494 (2003).
MAN MADE Cell Phone with ProjectionProjection Display
Drone
Remote Controlled Beatle
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PROF. MAHARBIZ, UC Berkeley
WHAT IS NEEDED?MICRO AND NANO SYSTEM INTEGRATION
The sites are connected to the amplifiers by a parylene cable leading to the electronics module equipped with processor and wireless interface.
ENVIRONMENTAL SENSORS
WIRELESS
BIOLOGICAL SENSORS
CK
AG
ING64 electrode sites on 200 µm centers in 1
mm3 volume of tissue, containing a MOSIS chip with 16 1000x amplifiers for buffering the recorded signals. Ken Wise
T. Zellers
Cortical Micro-system with microprocessor, amplifier and Wireless Chips FLUIDIC
BATTERY
WIRELESS INTERFACE
MICROCONTROLLER
WIM
S PA
C
WIMS CUBE1 cc
ELECTRICAL
POLY CRYSTALLINE DIAMOND
Although a number diamond micro and nanostructures have been reported in the last 20 years, this work reports for the first time
CHALLENGES?REDUCTION IN COST AND SIZENEW MATERIALS & CONCEPTS
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POLY-CRYSTALLINE DIAMOND SINGLE MATERIAL MEMS/NEMS
this work reports, for the first time, single material MEMS (SMM)
Protein Building Blocks: Amino Acids C sp2
∏-bond
Carboxyl Group
Amino Group
p
www.biochem.arizona.edu/classes/bioc462/462bh2008/462bh j t
R Variable Group
462bhonorsprojects/462bhonors2007/gsantarelli/Conclusion.htmlC
sp3
HC
Glucose O
FLEXIBLE BUILDING BLOCKS 2 3
http://www.nlm.nih.gov/medlineplus/ency/imagepages/19825.htm
Glucose O
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• FLEXIBLE BUILDING BLOCKS sp, sp2, sp3
• ARE NATURE-MADE SYSTEMS SINGLE-MATERIAL?
CARBON IS UNIQUE2s2s 2py
2Mix one s and three p sp3
2
2px2pz
porbitals s1p3
sp2 Bond
sp3DiamondMethane
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SEEDING USING DIAMOND LOADED
DIAMOND ON Si SEED (Diamond Powder) GROW DIAMOND TEST FILM MEMS/NEMS
Seeding/CatalystDIAMOND-LOADED
PHOTORESIST
PLASMA REACTORSi wafer
PRD ENERGY
H2CXHY H280μm
DPRHOT SUBSTRATE
HCH3
(400 - 1000 C, 0.1 - 150 torr)MPCVD
SiSiO2
FILM QUALITY•RAMAN
6000DIAMOND PEAK •RAMAN
•AFM•SEM
2000
3000
4000
5000
1200 1300 1400 1500 1600
Inte
nsity
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1200 1300 1400 1500 1600Wavenumber Shift(1/cm)
Brief Review of Carbon Sensors, MEMS/NEMS
Swiss center for electronics and microtechnology, Inc. UV Sensor, quant. Eff. Near 1
COCHLEAR PROBE WITH DIAMOND SENSORS
Nanocrystalline diamond (Argonne)
DIAMOND MEMS AT MSU
DIAMOND AFM TIP
Diamond Nano Resonators
Swiss center for electronics and microtechnology, Inc.Torsional
Resonator
DIAMOND PIEZORESISTIVE RFMEMS, MSU‐ ADJUSTABLE OUTPUT IMPEDANCE‐ HIGH SENSITIVITY
OXYGEN SENSORHighest Q of 86,603 at
0.805 MHz for L = 30 μm
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100 nm Resonator
SINGLE MATERIAL MEMS/NEMSWhat is Single Material MEMS (SMM)?
Basic Concept: Undoped Poly-C (1013 Ω·cm) Mechanical MaterialLightly-doped Poly-C (p, 1-10 Ω·cm) Sensor
p+ Poly-Cp Poly-C
Sensor Interconnect
What is Single Material MEMS (SMM)?
Lightly doped Poly C (p, 1 10 Ω cm) SensorHighly-doped Poly-C (p+, 10-3 Ω·cm) Interconnect Undoped
Poly-C
Mechanical/Substrate MaterialWhy Diamond SMM?
Unique Properties of Poly-C:
Electrochemical Potential Window = 3 V (-1 to +2) Eg= 5.5 eVDielectric Constant = 5.7 Chemical Inertness & Stability Young’s Modulus = 1012 PaBackground Current = 1 nA
Saturation Velocity = 2.7 x 107 cms-1
Breakdown Field = 10 MVcm-1
Resistant to Fouling µp= 1,600 cm2V-1s-1K = 20 WK-1cm-1
Example of Diamond SMM RFMEMS Resonator
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CHALLENGES IN FABRICATION OF SMMFABRICATION INSULATING DIAMONDFABRICATION INSULATING DIAMOND: USING O2 IN THE GROWTH ENVIRONMENT ρ = 1013 Ω·cm
DRY ETCHING OF DIAMOND
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EXAMPLES OF DIAMOND SMM STRUCTURES
NEURAL APPLICATIONS: BCI Electrical Chemical
NEURAL PROBE
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ELECTRICAL AND CHEMICAL DETECTIONElectricalChemical
Electrochemical potential window
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SMM CHEMICAL NEURAL PROBEEl
ectr
ode
Cou
nter
ctro
de
ctro
de
orki
ng E
lec
eren
ce E
le
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Wo
Ref
e
OTHER SMM STRUCTURES UNDER STUDY
HOW TO POWER SMM?
ZERO-ENERGY SMM?
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Zero-Energy SMM Systems
Khalil Najafi
y
Static Charge EnergyScavenging
How Much Energy gyis Available?
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ZERO-ENERGY MEMS/NEMSEnergy Scavenging From Human Body
Energy Available Energy Scavenged
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SMM Bio‐Probes for Sensing and Pathogen Detection
RESEARCH GOALS:GOALS:
MIGRAINE
HEADACHS
CANCER
EPILEPSI
DEPRESSION, ,
ANGER
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