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----W H I T E P A P E R
COSMOS®
Solid Modeling and Analysis ofMEMS Structures
SolidWorks Corporation
C O N T E N T S
Introduction 1
3D visualization 1-2
Sub-micron featuredefinition 2
Patterns and creation ofpatterns of patterns 3
The power of configurationmanagement 3-4
Complex assemblydesign support 5
Associative photomaskdefinition 6-7
Finite element analysis(FEA) of MEMS structuresfor thermomechanical,electrostatic, and fluidflow behavior 79
Design Re-Use 10
Ease of use 11
Collaboration tools 11-12
Tightly integratedcomplementaryapplications 13-14
One standard CAD toolto design everything 16
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 1
Solid Modeling tools are helping MEMS designers streamline their design
process and leverage the availability of finite element analysis (FEA) software.
Associative mask definition gives the MEMS designer even more power, letting
the designer concentrate on refining micron-scale structures in 3D and letting
the mask follow the design.
Your choice of solid modeling tools is critical to achieving results in the MEMS
world. SolidWorks® is easily mastered, even by part-time designers. SolidWorks
allows the designer to design the MEMS structure, analyze it, generate the
photomasks, and design all the related product packaging and assembly
equipment. This guide identifies key issues and explains advantages of
SolidWorks 3D modeling software for MEMS designers.
3D Visualization
• 3D visualization provides MEMS designers a first check of design intent,
proper operation, collision avoidance, and package stack-up.
• MEMS designers have created impressive structures, frequently using layout
software that is inherently two-dimensional. These accomplishments are
impressive, but true 3D tools offer MEMS designers better design
visualization. This gives designers a clear and accurate review of parts and
assemblies early in the design cycle.
• SolidWorks provides true solid modeling capability, avoiding the need to
acquire extremely expensive high-end specialty design software marketed
strictly for MEMS design and analysis.
I N T R O D U C T I O N
Figure 1
This microtransformer was
designed in 3D with
SolidWorks and fabricated
with MEMGen Corporation’s
EFAB™ technology.
Figure 2
As microfabrication techniques
extend our grasp into the realm
of microns, as with this fiber
positioner, SolidWorks guides the
way with sub-micron solid
modeling and analysis.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 2
• 3D visualization facilitates communication within the organization and
beyond. Not only is the MEMS designer more able to explain design intent to
colleagues, but scholarly presentations, articles and requests for funding
benefit from showing 3D features.
• To shorten time-to-market for your MEMS designs, you need to identify
potential problems early in the design cycle, before committing to a mask or
processing wafers. SolidWorks Office Professional includes PhotoWorks™,
SolidWorks Animator, and 3D Instant Website software, that enable excellent
visualization capabilities by providing photorealistic rendering, full-motion
animation, and webbased presentation of the finished design.
• Clearance design rules can be particularly important for surface
micromachining to ensure proper etching and separation of parts during
lift-off processes. SolidWorks enables checks for interferences or specific
clearances between components using Dynamic Assembly Motion and
Collision Detection. Any interference will stop motion between parts that
contact and the point of interference will be highlighted by changing color.
Physical Simulation takes motion checking to the next level by presenting
meshing parts, such as meshing gears, and showing their operation in the
assembly.
Sub-Micron Feature Definition
• SolidWorks solid modeling software provides MEMS designers with
sub-micron feature generation capability. In fact, the user can choose to work
in microns, nanometers, or even angstroms as appropriate.
• Features in most MEMS devices are several microns or tens of microns.
SolidWorks allows designers to work on this scale and still define
sub-micron features in structures (such as die-mounted, packaged
assemblies) with dimensions of tens of millimeters.
• This sub-micron definition capability means that certain types of optical
gratings may be described fully as a solid model, with all the power that
SolidWorks can bring to such entity creations.
3D VISUALIZATION/SUB-MICRON FEATURE DEFINITION
Figure 3
This gear, designed in SolidWorks,
is 10 microns thick and 120
microns in diameter. The detail
shows a fiducial which is 0.4
microns wide and 10 microns long,
etched to a depth of 0.5 micron.
Patterns and Patterns of Patterns
• SolidWorks saves designers time and simplifies model construction by
allowing patterns of model features. Bosses and cuts are just two of the
features that may be patterned within a part. Patterns may be linear,
rectangular, or defined by a curve.
• Patterns may also be employed within an assembly. Several component parts
may be dragged into an assembly, or the designer can simply define a
pattern of components.
• Patterns of patterns may also be defined. Using the gear patterns at left as
an example, the pattern of six gears may be defined as an element, then
patterning the pattern creates a photomask to produce a large number of
such gears.
• Circular patterns of linear patterns are supported, as are linear patterns of
circular patterns. In fact, the pattern definition and pattern-of-a-pattern
definition are independent. Each may be constructed from: linear, circular, or
curve geometries.
Configuration Management
• Configuration Management is the ability to control design variations from
within a single file or document. This applies to parts and assemblies, with
the effects propagating to drawings, including photomask drawings.
• Configuration Management enables the generation of multiple versions of
parts, assemblies, and drawings in a single document with a minimal
amount of time and effort. Configurations make use of design tables, derived
design data, component properties, relationships, viewing states, and other
attributes, storing part and assembly information in one area for greater
efficiency. SolidWorks offers multilevel configurations, called nested
configurations, to optimize the power, organization, and efficiencies of
configurations.
• SolidWorks Configuration Management gives you maximum flexibility in
creating multiple design variations covering a wide range of needs. New
configurations are easily developed from previously created designs to
further speed development and meet market needs for data reuse.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 3
PATTERNS AND CREATION OF PATTERNS OF PATTERNS
Figure 4
Each gear above contains a pattern of
holes and extruded cuts. A radial
pattern of such gears may be defined as
at left, then a rectangular pattern of
such patterns may be defined, as shown
at right. Defining patterns in this fashion
eases photomask creation.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 4
THE POWER OF CONFIGURATION MANAGEMENT
• A simple application of this capability would be to create various versions of
MEMS structures that automatically scale both surface feature size and etch
depth as dimensions increase. The various versions of this MEMS design can be
created within a single SolidWorks model file for simplicity and easy design
control. “What if” scenarios for different design requirements such as film
thickness and modulus can be quickly explored by turning on and off various
configurations of a part or assembly. Etched well dimensions and sizing of
cutouts can be tied to design data for each chip size. As the chip requirements
change, the necessary wafer level dimensions automatically update to reflect
the new design.
• Components involving multistage processing, such as surface micromachining
or LIGA, can easily be documented by using multiple configurations of a single
part. Configuration Management techniques can generate a discrete version of
a part or assembly as necessary to reflect a separate version or in-process
state. These versions help you compare designs, track expected performance,
and develop process plans.
• Because change and flexibility are keys to effective design, the importance of
configurations to the designer cannot be overstated and SolidWorks is the only
product among powerful, easy-to-use 3D CAD products that offers
configurations for both parts and assemblies.
Figure 6
Two design variations for an
etched silicon well structure.
A design table offers agile feature
re-definition during preliminary
design studies. Design
tables together with the
Configuration Manager tree
provide defined configurations
that can be called up as
needed.
Figure 5
Design tables are Microsoft®
Excel spreadsheets embedded
within the drawing.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 5
COMPLEX ASSEMBLY DESIGN SUPPORT
Complex Assembly Design Support
• The ability to handle assemblies with thousands of parts without compromising
performance is a requirement of 3D CAD solutions for designing wafers full of
MEMS devices such as accelerometers, orifices, mirrors for Micro-Opto-
Electro-Mechanical Systems (MOEMS), or arrays of Micro-Structure Technology
(MST) devices, such as miniature gears.
• The ability to manage large assemblies easily allows product designers to take
on a broader range of projects and gain greater flexibility in solving design
problems.
• The challenges associated with large-assembly MEMS device design are often
unpredictable and complex. SolidWorks 3D modeling software, with its Large
Assembly Mode, offers unparalleled performance for applications involving a
large number of parts, allowing product designers to design and assemble tens
of thousands of components and evaluate complete assemblies.
• SolidWorks provides built-in tools for evaluating assembly designs, including
motion simulation and visualization (Physical Simulation), interference
checking, collision detection, clearance information, and creation of envelopes
for defining the full range of motion for an assembly. Clearance design rules
can be set for micromachining operations. These tools help MEMS designers
identify necessary changes in assembly development, which can be easily made
using simple drag-and-drop assembly structure reorder operations.
• Many organizations accelerate development through concurrent design
approaches where several designers or teams work at the same time on
separate components or subassemblies of a large assembly. SolidWorks 3D
modeling software supports concurrent design, providing powerful capabilities
that enable Configuration Management, top-down design techniques, and
design collaboration.
Figure 7
Assembly level configurations
can pull together etch depth
and film thickness.
Figure 8
A large MEMS array could contain tens
of thousands of elements. The solid
model pictured here contains a 10 x 10
array of tiny diving board structures.
Analysis of models such as this, and
significantly larger, can be readily
achieved on common desktop
computers or workstations.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 6
ASSOC IAT IVE PHOTOMASK DEF IN IT ION
Associative Photomask Definition
• For MEMS device design, fully associative assemblies are critical for
effectively using bottom-up and top-down assembly design techniques.
Associativity guarantees that all elements of a model are electronically
associated or connected, including assembly models, components, and
drawings. This means that when a change is made to any SolidWorks file,
that change is automatically made in all associated files.
• After surveying numerous MEMS designers actively working in the field, we
have received feedback that mask definition should be associative to model
changes. SolidWorks developers have put in place powerful tools that will
streamline mask generation in GDS II file formats from associative DXF files,
which link directly to model definition changes.
• Bottom-up associative design encompasses the creation of new components
and integration of these with existing components into assemblies. This is
important when components must be designed based on strict limitations
imposed on component properties, then checked for integration in the
context of the overall assembly. Each of these parts can be edited within the
assembly as needed.
Figure 9
This positive photomask was generated associatively from
a solid model. Below is the corresponding negative photomask.
Figure 10
Because the drawing dimensions
are associative, they
automatically propagate
throughout the model, drawings,
and configuration tables.
• Top-down associative design involves working with an existing assembly to
develop new components for use with that assembly. Because new
components reference existing parts in the assembly, any changes made to
any of the parts are reflected throughout the design. In the MEMS arena, this
means that a component can be created or modified within the context of the
overall device model, allowing real-time modification for fit and function.
Modifications automatically propagate throughout the assembly and
drawings, maintaining design intent.
• Examples of top-down design include developing a package for a MEMS
device that realizes a certain stack height and footprint, generating a
maximum envelope (length, width, and height) for a chip within a required
finished package size. Configuration Management enables the new parts to
be linked through the assembly and to the photomask definition drawing file.
Integrated Finite Element Analysis (FEA): Thermal, Mechanical,
Electrostatic, and Fluid Flow
• Designers can now run initial stress analysis checks on MEMS designs
up-front using COSMOSXpress™ FEA software that is included with every
license of SolidWorks. Furthermore, COSMOS products in the
COSMOSWorks™ analysis software product line enable thermal, stress,
deflection, buckling, non-linear, and electromagnetic analysis. Partners such
as MSC.Software (MSC.visualNastran FEA for SolidWorks) also provide
Certified Gold Product Solution analysis products for use with SolidWorks.
COSMOSFloWorks™ from COSMOS provides CFD (computational flow
dynamics) analysis for flow and heat transfer applications.
• Reliability is a key factor that differentiates various MEMS device
technologies and designs. Companies that are able to build in reliability from
the initial design stage will have an advantage in gaining market acceptance.
COSMOSWorks facilitates early-on reliable design by allowing MEMS
designers to perform a range of FEA on initial designs. From thermal
analysis to static analysis, COSMOS ensures device behavior will be within
design limits, avoiding thermal or stress-induced failure.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 7
F IN ITE ELEMENT ANALYS IS (FEA ) OF MEMS STRUCTURES
Figure 11
COSMOSWorks brings highend performance
to desktop computer users. This mesh,
which features over 130,000 nodes, was
automatically generated by the standard
COSMOS mesher, utilizing controls that
increased resolution where needed.
• Thermal analysis is critically important for MEMS package design.
It also plays a pivotal role in predicting device operation for certain
technologies, such as thermo-optic planar waveguides and resistor
arrays. Using the SolidWorks solid model as a starting point, COSMOS
can perform steady-state or transient thermal analysis on parts or
assemblies. After meshing the design, the designer sets any relevant
constraints (for example, the underside of a substrate may be
considered clamped to a certain temperature because it is intimately
bonded to a thermoelectric cooler), then the designer sets power or
heat flux conditions associated with a geometrical feature of the
model. Because component material properties include thermal
conductivity, coefficient of thermal expansion, and heat capacity, the
designer gets a realistic prediction of temperature distributions under
prescribed conditions.
• By coupling the power of FEA studies with Configuration Management,
the designer can quickly converge on the best-form design solution
over many degrees of freedom. For example, a range of epoxy bond
layer thicknesses may be studied in coordination with evaluating a
broad range of epoxy thermal conductivities.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 8
F IN ITE ELEMENT ANALYS IS (FEA ) OF MEMS STRUCTURES
Figure 12
Thermal analysis of a
MEMS subassembly.
Figure 13
Deflection and stress profiles
are easily computed with
COSMOSWorks.
Figure 14
COSMOSEMS was used to analyze
performance of this cantilever beam
under various voltages. (The aqua-colored
volume represents air.)
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 9
F IN ITE ELEMENT ANALYS IS (FEA ) OF MEMS STRUCTURES
• COSMOS Static analysis capability is a tool that empowers the MEMS
designer to avoid catastrophic immediate or long-term failure modes.
The diving board analysis at left, for example, showed that although
desirable deflection distances could be achieved with a shallow (5
micron) etch and a thin (1 micron) diving board, the resultant stress in
the moving element would result in early failure. After several
permutations were analyzed, a balance between risk and performance
was achieved. In some cases, designers will learn that changing preset
variables is insufficient to resolve the tradeoff, then re-design of one or
more core elements will be necessary. COSMOS then guides the way in
conjunction with Configuration Management.
• For most MEMS devices, and particularly those whose performance
depends on electrostatic performance (such as piezoelectrics or
deformable mirrors), electrostatic analysis capability is necessary to fully
predict device performance. The simple cantilever beam model shown
here was solved to model beam deflection under different potentials
between the stationary and moving elements. The results can then be
compared to the effects of shock and vibration to optimize performance
under real world conditions.
• Fluid flow analysis is important across a range of MEMS applications.
Whether you’re trying to get heat out of a package, and therefore need to
determine which heat exchanger has the best properties; or you’re
designing a MEMS orifice or pump whose operability is directly tied to
fluid handling, COSMOSFloWorks™ offers high-powered computational
flow dynamics analysis in a straightforward interface.
Figure 16
COSMOSFloWorks was used
to model the air flow through this
circuit board environment, allowing
the designer to optimize package
characteristics such as chassis
cut-outs or heat exchanger
configuration.
Figure 15
COSMOSEMS computed the
potential distribution shown
at top. The predicted deflection
is shown in the lower plot.
Design Re-Use
• MEMS designers frequently have a large amount of legacy data (data
created from previous projects or fab runs).
• Legacy data may form a starting point for new designs or can contribute
key elements to the development process, including projects based on
collaborator-supplied CAD data. Unfortunately it is often available in
various 2D and 3D formats. The ability to use these varying formats
helps designers leverage legacy data, work sideby- side with designers
who use other CAD systems, speed development, respond to market
needs, and increase financial returns.
• SolidWorks 3D CAD software offers the widest number of data
translation formats of any CAD solution. A list of the supported formats
is provided on the SolidWorks datasheet. Designers migrating to
SolidWorks from 2D CAD will greatly benefit from new functionality
including view folding, which enables legacy DWG or DXF™ drawing
views to be used more efficiently to create new 3D models. A new import
wizard with an AutoCAD-oriented help system also streamlines the
migration process.
• After 3D legacy data is imported into SolidWorks, the FeatureWorks®
feature recognition product (a component of SolidWorks Office
Professional) further speeds design work by searching the incoming file
data for features, such as bosses, holes, ribs, sheetmetal features, and
fillets. These features are then converted into native SolidWorks features
and inserted in the SolidWorks FeatureManager® design tree for easy
modification, reordering, and other standard SolidWorks operations.
• Feature Palette is a powerful tool for designers who have already
accumulated a large arsenal of SolidWorks parts or assemblies. The
Feature Palette, shown at left, operates as an “always on top” window
holding frequently used SolidWorks file. The designer can save time by
simply dragging required components for a new assembly directly from
the Feature Palette and dropping them into the new design.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 10
DES IGN RE -USE
COSMOSFloWorks can also
determine whether the performance
of the oven will be more efficient if
the designer adds air flow
deflectors.
Figure 17
Feature Palette speeds up design
by keeping a handy set of
prior design elements at the
user’s disposal. The elements
can be fresh designs, or converted
from legacy data.
Figure 18
This model was imported from an IGES
file to SolidWorks. With FeatureWorks
feature recognition software, imported
geometry can easily be turned into an
editable, parameterized feature-based
solid model.
Ease of Use
• MEMS designers need and want powerful functionality from their 3D
CAD software, but it must be easy to learn and use since they are not
using it all the time. If the software is powerful yet easy to use then the
designer can be productive even with only occasional use.
• SolidWorks is gaining favor with MEMS designers worldwide as they
come to appreciate the fit between SolidWorks capabilities and their
requirements.
Collaboration Tools
• Design collaboration has become an increasingly important part of the
development process, enabling designers to share designs easily with
anyone, anywhere.
• Collaboration tools offer new ways for product designers to work more
effectively with other members of the development team. The ability to
share design resources over the Internet can benefits MEMS designers,
from independent consultants to engineers in large multinational
corporations.
• SolidWorks collaboration tools enable the MEMS designer to convey 2D
and 3D product design information to colleagues, customers, funding
agencies, and suppliers easily and efficiently.
eDrawings Professional is the first email-enabled communication tool
that dramatically eases the review of 2D and 3D design information
across your extended product development teams. With eDrawings
Professional you can generate accurate representations of 2D and 3D
models that anyone can view, mark up, and measure without having to
purchase their own markup tools. eDrawings files provide an effective
means of communicating 2D and 3D design information to customers,
vendors, collaborators, production personnel, and everyone else involved
in the product development process. www.solidworks.com/edrawings/
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 11
EASE OF USE/COLLABORAT ION TOOLS
Figure 19
DXF files and DWG files can be easily imported and
incorporated into sketches and drawings.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 12
COLLABORAT ION TOOLS
3D Instant Website provides the capability to publish product design data
to a live web site of interactive 3D design content. A few simple mouse
clicks from within SolidWorks allow a designer to publish a SolidWorks
model to a web site and communicate the design to the entire work team,
including other designers, manufacturing staff, marketing management,
purchasing agents, suppliers, and customers. Visitors to the site can easily
view, rotate, zoom, and evaluate the design as well as offer comments.
www.solidworks.com/3dinstantwebsite/
Figure 20
eDrawings allow the MEMS
designer to communicate designs,
such as this variable
capacitor, readily to colleagues,
customers, or vendors.
A micrograph of the
capacitor appears below.
Figure 21
3D Instant Website enables
design communication worldwide.
You can publish to a hosted web
site instantly.
Integrated Solution Partner Products
• Available best-in-class partner solutions are fully integrated into the core
SolidWorks 3D modeling software to offer a complete, singlewindow
approach to medical product design.
• SolidWorks software development focuses solely on 3D design tools to
ensure continuous innovation. CAD companies that build strong ties to
Solution Partners for best-in-class, extended solutions — such as finite
element analysis (FEA), computer-aided manufacturing (CAM), product data
management (PDM), and kinematics — make sure that development is done
by the companies best suited for the job. The results are more complete
product design and development solutions.
• SolidWorks provides an unmatched selection of Solution Partner products
plus the highest level of add-on product integration in the industry. Certified
Gold Products offer the look-and-feel of SolidWorks software, simplifying
learning and use and extending best-in-class functionality. All Certified Gold
Products offer singlewindow integration with SolidWorks, are fully
associative, and undergo a rigorous testing and certification process by
SolidWorks to ensure compatibility with every release of SolidWorks.
• Several SolidWorks partners have demonstrated efficient use of SolidWorks
in conjunction with COSMOSWorks for the design, analysis, and fabrication
of MEMS structures and MEMS-related materials.
• Elsyca NV markets software for modeling electrochemical reactions. Elsyca
has supplied the electronics industry with custom electrochemical
deposition analysis tools that model reaction cell behavior during deposition
processes on silicon wafers. One of their electrochemical cell design
evaluations, with deposition current spatial characteristics appears at left.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 13
T IGHTLY INTEGRATED COMPLEMENTARY APPL ICAT IONS
Figure 22
SEM photoof the RF filter, also
featured above in the 3D Instant
Website.
Figure 23
A scanning micro-mirror. A
broad range of fabrication
techniques benefit from solid
modeling with SolidWorks.
A scanning micro-mirror. A
broad range of fabrication
techniques benefit from solid
modeling with SolidWorks.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 14
T IGHTLY INTEGRATED COMPLEMENTARY APPL ICAT IONS
• Another SolidWorks partner, MEMGen Corporation, uses SolidWorks to
design MEMS devices, which they fabricate for customers in a captive fab
facility using their exclusive license to EFAB™ technology. The photos at
left illustrate the accurate predictive nature of the SolidWorks model for
this technology.
Electronic-oriented tools: CircuitWorks from Zeal Solutions offers a
SolidWorks Certified Gold Product solution that enables the merging of 2D
IDF format PCB data and component 3D data to build complete 3D models
of PCB assemblies. These exact models result in optimized packaging
designs with minimum envelope sizes.
Kinematics tools: Kinematics analysis is helpful for developing products
requiring complex motion including many MEMS devices. COSMOS
(COSMOSMotion™) and Certified Gold Product Solution Partner Solid
Dynamics (MotionWorks) offer these type of analysis tools.
For a complete listing of SolidWorks Solution Partner products, please
refer to the “Partner” section of the SolidWorks web site at
www.solidworks.com.
Figure 24
Elsyca models electrochemical
wafer deposition and etching
processes.
Figure 25
MEMGen Corporation uses
EFAB™ technology to produce
MEMS devices defined with
SolidWorks.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 15
T IGHTLY INTEGRATED COMPLEMENTARY APPL ICAT IONS
• SolidWorks offers a unique degree of integration with add-on solutions,
supplying valuable functionality beyond that found in the core CAD product.
These solutions operate from within SolidWorks and can be added at any
time to meet new or existing needs.
• SolidWorks Office Professional combines the full functionality of
SolidWorks CAD software with the following design communication,
CAD productivity tools, and data management tools: SolidWorks Office
Professional Design Communication Tools Demonstrate more
effectively how products look and perform with SolidWorks design
communication tools:
SolidWorks Animator — animation software for creating compelling AVI
files from SolidWorks parts and assemblies. PhotoWorks — rendering
software for creating photorealistic images.
3D Instant Website — an easy-to-use tool for publishing live web sites with
3D interactive content.
eDrawings Professional — tools necessary to visualize, interpret,
measure, mark up, and expedite the review of 2D and 3D product designs
across your extended design team.
Figure 26
CircuitWorks allows realistic
PC board layout visualization,
as in this packaged MEMS device
mounted onto a board
populated with other ICs, SMT
capacitors, and resistors.
COSMOS®
S O L I D M O D E L I N G A N D A N A LY S I S O F M E M S S T R U C T U R E S no. 16
ONE STANDARD CAD TOOL TO DES IGN EVERYTH ING
One Tool for all Design Needs
• As organizations increasingly struggle to run leaner and increase
productivity, solutions that optimize their existing capital and human
resource investments become more imperative. This paradigm applies to
research organizations and for-profit corporations alike. Fortunately,
SolidWorks is an investment that has broad application for MEMS design.
• SolidWorks handles design at the sub-micron level, assembles thousands
of components in assemblies, provides native FEA that can be easily
enhanced with tightly integrated analysis products, and designs structures
measuring many tens of meters, including packaging automation
equipment.
Making the Decision
• When weighing information to decide between high-end, specialized
design software specifically targeting MEMS design vs. SolidWorks, which
is an effective single tool for myriad applications, a number of features
should be considered. Features that recommend SolidWorks include:
• Ease of use, so even part-time users can maintain productivity
• Ease of learning, allowing new users to quickly contribute to collaborative
design efforts
• Associativity, from assembly through component parts to mask definition
• Efficient Power, FEA of complex assemblies running easily on standard
desktop computers
• Agility, SolidWorks can be used both to design sub-micron MEMS features
and packaging line equipment measuring tens of meters
Figure 27
This automated packaging cell was
designed with SolidWorks. Design the
MEMS device with SolidWorks, then
output the mask, design the packaging,
and even the automation to put it all
together. Solid modeling across several
dimensional decades ensures everything
fits, everything works.
For additional information about COSMOS products, check out the COSMOS website http://www.cosmosm.com.
SolidWorks Corporation
300 Baker Avenue Concord, MA 01742 USA Phone: 1 800 693 9000 Outside the US: +1 978 371 5011 Fax: +1 978 371 7303 Email: [email protected]
SolidWorks Europe
Phone: +33 4 42 15 03 85 Fax: +33 4 42 75 31 94 Email: [email protected]
SolidWorks Asia/Pacific
Phone: +65 6866 3885 Fax: +65 6866 3838 Email: [email protected]
SolidWorks Latin America
Phone: +55 11 3818 0980 Fax: +55 11 3818 0977 Email: [email protected]
COSMOS
3000 Ocean Park Boulevard, Suite 2001 Santa Monica CA 90405Phone: 1 800 469 7287 Outside the US: +1 310 309 2800 Fax: +1 310 207 2774 Email: [email protected]
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