© 2011
Copyrights © Yole Développement SARL. All rights reserved.
Status of the MEMS
Industry 2011
1995
Sidebraze DIP
1996-2002
Plastic PDIP
1999 - today
SMT SOIC
& Die Down
2006
Stacked Die
QFN
~125 sq mm ~100 sq mm ~25 sq mm
6 & 6 mm
1995
Sidebraze DIP
1996-2002
Plastic PDIP
1999 - today
SMT SOIC
& Die Down
2006
Stacked Die
QFN
~125 sq mm ~100 sq mm ~25 sq mm
6 & 6 mm
SAMPLE
© 2011 • 2
Copyrights © Yole Développement SA. All rights reserved.
Table of Contents • Introduction
• Executive Summary
• MEMS Markets Update
– List of 150 applications
– 2010-2016 MEMS Market Overview
• In $M
• In units
• In wafer start
• By application
– 2010 MEMS Wafer Production Geographic Breakdown
– 2010 MEMS Player Market share by Device
– What is New Compared to 2010
• MEMS Strategic Analysis
– TOP30 MEMS Player Strategy Positioning
– TOP20 MEMS Foundry Strategy Positioning
– New MEMS startups
• MEMS business evolution
– MEMS Industrial Supply Chain Evolution:
• Today
• Tomorrow
– Examples:
• Inertial sensors/combo for automotive & consumer
• Microphones
• Microbolometers
• Financial update
– M&A
– VC Investments
• MEMS Technology Evolution
– 2010-2016 MEMS Equipment Forecast
– Front End Evolution
– Packaging, Assembly & Test Evolution
– New Challenges in Software/System Integration
– Cost Analysis of MEMS Devices: Where the Main Cost
Issues are
• Emerging MEMS update
– What is mature? What is still emerging?
• What will happen in MEMS business in 2012, 2015, 2020?
• Conclusions
© 2011 • 3
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Companies listed in the report
3S Systems, AAC Acoustics, Advancedmicrofab, AKM, AD, Asia Pacific Microsystems (APM),
Audiopixels, Avago, Boehringer Ingelheim, BSE, Canon, Colibrys, Dalsa, Deep Di
Semiconductor, Denso, Domintech, DRS, ELMOS (SMI), FLIR, FormFactor, Freescale
Semiconductor, FujiFilm Dimatix, GE Measurement & Controls, Gettop, Global Foundries,
GMEMS, Goertek, Goodrich, HP, Honeywell, Hosiden, IMT, Infineon, Innoluce, Invensense, Jazz
Semiconductor, Jyve, Kaiam, Kionix, Knowles, Lensvector, Lexmark, Melexis, Memscap,
memsmart, memstech, MEMStim ,Mezmeriz, Micralyne, MicroGen, Mikrosense, Mitsubishi
Heavy Industries, Movea, Murata, NovioMEMS, Nuvoton Technology, Olympus, Omron, Opus
Microsystems , Panasonic, Polight, Preciseley Microtechnology Corp., Pyreos, QMT, Qualtre,
Robert Bosch, Seiko Epson, Semefab, Senodia, Sensata, Sensonor, Silex Microsystems, Silicon
Sensing Systems, Sitronix, SMIC, Sony, STMicroelectronics, SDI, Telecardia, Texas
Instruments, Touch Microsystems (TMT), Tronics Microsystems, TSMC, Ulis, UMC, Veeco,
Verreon, VTI Technologies, Xaar, XFAB, Yamaha, Yishay Sensor.
© 2011 • 4
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Introduction
• This 2011 edition of “Status of the MEMS Industry” presents MEMS device markets and key
industry changes and trends
• Yole is actively following the market evolution of more than 150 MEMS applications and is
tracking 250 MEMS companies. This report combines all these applications into 12 major
MEMS devices: IJ heads, pressure sensors, microphones, accelerometers, gyroscopes,
MOEMS, microbolometers, microdisplays, microfluidics, RF MEMS, micro tips, and
emerging MEMS devices
• Based on the thousands of direct interviews Yole Développement analysts are conducting
annually in the MEMS field with MEMS manufacturers, system manufacturers integrating
MEMS and MEMS designers, MEMS equipment and materials manufacturers, and MEMS
technology developers, this 7th version of the “Status of the MEMS Industry” provides up to
date analyses and data on MEMS markets.
© 2011 • 5
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Typology of MEMS Companies Level of integration of MEMS makers: no foundry in TOP 30!
Size (MEMS business)
Position in the value chain
Large
Medium
Small
Foundry service System manufacturer Device maker - IDMs
$300M
$100M
… … …
© 2011 • 6
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Typology of MEMS Companies Business models for MEMS makers
Size (MEMS business)
Business model
Large
Medium
Small
Foundry
service
Fablight Internal Fab
$300M
$100M
… … …
Internal Fab with
foundry service
Fabless
© 2011 • 7
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MEMS Market Forecasts In $M
Yole Developpement © June 2011
2010 2011 2012 2013 2014 2015 2016
Others (microstructures, micro tips, flow meter …) $207,1 $248,7 $312,3 $397,7 $540,5 $706,8 $857,2
Oscillators $17,1 $32,6 $60,3 $106,3 $177,8 $282,3 $416,2
RF MEMS $262,1 $263,7 $297,5 $354,7 $494,8 $649,1 $814,6
Microdispensers (microfluidics) $174,3 $214,7 $261,3 $365,5 $424,2 $502,9 $578,1
Microfluidics for IVD $757,5 $952,4 $1 196,8 $1 494,9 $1 875,5 $2 363,5 $2 875,0
Microfluidics for Research $269,0 $363,1 $490,2 $637,3 $828,5 $1 077,1 $1 330,0
Other optical MEMS $177,0 $197,3 $220,1 $245,1 $273,3 $304,5 $304,6
Projection systems $891,2 $951,0 $1 013,7 $1 080,7 $1 232,6 $1 406,6 $1 646,3
Micro displays $4,5 $12,6 $65,0 $122,0 $215,5 $307,5 $460,0
Microbolometers $253,5 $289,4 $312,8 $338,9 $400,4 $478,6 $569,7
Digital Compass $277,1 $433,3 $488,6 $540,2 $591,4 $623,8 $647,0
Gyroscopes $993,8 $1 187,5 $1 351,1 $1 517,5 $1 715,2 $1 836,8 $1 996,2
Accelerometers $1 274,7 $1 371,1 $1 487,1 $1 608,2 $1 757,7 $1 883,3 $2 032,7
Microphones $201,6 $265,4 $326,5 $368,5 $421,9 $480,6 $573,1
Pressure Sensors $1 360,6 $1 566,0 $1 744,6 $1 960,6 $2 222,8 $2 415,9 $2 557,8
InkJet Heads $1 566,7 $1 668,0 $1 740,5 $1 812,4 $1 877,5 $1 932,9 $1 987,9
$0
$5 000
$10 000
$15 000
$20 000
$25 000
US$
M
2010-2016 MEMS Market Forecast - US$MJune 2011
Yole Developpement © September 2011
September 2011
© 2011 • 8
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MEMS Supply Chain Changes
• Structural changes of the MEMS industrial supply chain are occurring as further
fragmentation of activities is starting. This is happening in the microphone
business as some players are processing wafers while others are focusing on
packaging and selling the sensor
• Also, new intermediate business models appear between MEMS foundries and
IDMs:
– Some IDMs specialize in producing MEMS wafers with their own design (e.g. Infineon)
– At the same time some MEMS foundries are developing product platforms with their own design (e.g.
Tronics, Xfab, MEMSCap)
• Another complication of the industry comes from multi-chip integration in a
module
– It’s starting with inertial modules, from 6DOF to 10DOF
– This implies many new challenges in integration, software and supply chain
© 2011 • 9
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MEMS Industrial Supply Chain Situation today
3 types of functions for MEMS devices
Replacement function New function Combination of functions
Microphones, Oscillators, RF filter… Accelerometer, gyroscope, micro-mirror,
RF MEMS antenna tuner, microfluidic…
IMU, Accelero/Magneto combo, Image
sensor/ Microbolometer module…
Low
MEMS companies involved from
MEMS to commercialization (E.g.
SiTime)
Medium
Traditional players with ASIC and
packaging expertise start to buy raw
dies (E.g. AAC Acoustics)
Maturity of the MEMS devices?
High
Large groups integrate MEMS
manufacturing (E.g. BAW filters)
“Standard” industry model
• MEMS players need to have control
over each element of the supply
chain:
- MEMS die
- ASIC die
- Software (new)
- Assembly & packaging
- Test & calibration
• Low evolution of the MEMS
industry expected * Significant industry
evolution expected
*
*
Business model revolution
• Partnerships between players
according to:
- Area of expertise of each
player
- Ability to provide fusion
software
- Expertise in packaging
- Access to the supply chain
*
NEW
© 2011 • 10
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MEMS Industrial Supply Chain Evolution Structural changes are occurring
• Further fragmentation of the activities is starting
– This is happening in the microphone business: some
players are processing wafers while others are focusing
on packaging and selling the sensor
• Intermediate business models appear between
MEMS foundries and IDMs
– Some IDMs specialize in producing MEMS wafers with
their own design (e.g. Infineon)
– At the same time some MEMS foundries are developing
product platforms with their own design (e.g. Tronics,
Xfab, MEMSCap)
• Another complication of the industry comes from
multi-chip integration in a module
– It’s starting with inertial modules, from 6DOF to 10DOF
– This implies many integration, software and supply
chain challenges
Foundry
Design
Manufacturing
IDM Foundry with
product
platform
Assembly test and
commercialization
IDM
specialized in
MEMS wafers
NEW
NEW
© 2011 • 11
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Impact of the New Business Models
in the Supply Chain
• As the industry maturates and as combo sensors are developed, new business models appear:
– Some players specialize in MEMS die / wafer manufacturing
– Leading players specialize in supplying sensor solutions
2000-2010 2010-2020
MEMS player A MEMS player B
MEMS sensor A MEMS sensor B
MEMS player A
Combo sensor
MEMS player B
MEMS die B MEMS die A
ASIC, packaging,
assembly, calibration,
test
ST
(Accelerometer /
Magnetometer combo)
Honeywell
(Magnetometer wafers)
Example:
© 2011 • 12
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2010-2020 MEMS Industry Evolution Overview
2010 2012 2014 2016 2018 2020
MEMS market = $8.7B 4.3B units
MEMS market = $19.5B 15.8B units
Sensor fusion takes off Accelero/Gyro/Magneto first
Sensor fusion widespread Microbolo / Visible & NIR CMOS image sensors…
Integration with RF, with MCU
Active Noise cancellation…
Consolidation of the industry Successful companies fall into 3 categories:
- Big diversified players
- Specialized companies
- System integrators (in-between)
ST makes compass internally?
Difficult position for IDMs focused on MEMS manufacturing? Infineon?...
MEMS microphone suppliers (AAC, BSE could have developed their own MEMS technology)
Medical applications boom Implantable devices
Microfluidics for diagnostics
MEMS part of ubiquitous sensor networks Large scale integration with other sensors, with processing
power, with wireless link, with smart energy sources
Era of intelligence: decisions based on context
Enabling technologies mature Process standardization, Wafer level packaging,
ASIC as a cap, Large scale testing…
© 2011 • 13
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