Page 1
STUDY & EVALUATION SCHEME
B. TECH. MECHANICAL ENGINEERING
3rd year 6th Semester
Sl.
No.
Subject
Code
Name of the Subject
Periods
Evaluation Scheme
Subject
Total Sessional End
Sem.
Exam. L T P CT TA Total
Theory Subjects
1. IME - 601 Operations Research 03 01 - 30 20 50 100 150
2. IME - 602 Internal Combustion Engines 03 01 - 30 20 50 100 150
3. IME - 603 Machine Design-II 03 01 - 30 20 50 100 150
4. IME - 604 Fluid Machinery 03 01 - 30 20 50 100 150
5. IME - 605 Refrigeration & Air Conditioning 03 01 - 30 20 50 100 150
6. IEME-03- Elective-3 02 01 - 15 10 25 75 100
Practical/ Training/ Project
7. IME - 653 Machine Design Lab - - 03 10 10 20 30 50
8. IME - 654 Fluid Machinery Lab - - 03 10 10 20 30 50
9. IME - 655 Refrigeration & Air Conditioning Lab - - 03 10 10 20 30 50
10. IME - 657 Seminar - - 03 50 50 - 50
11. GP-601 General Proficiency - - - - - 50 - 50
TOTAL 1100
L – Lecture T – Tutorial P – Practical CT – Class Test TA – Teacher Assessment
Sessional Total = Class Test + Teacher Assessment
Subject Total = Sessional Total + End Semester Examination
Page 2
LIST OF ELECTIVE SUBJECTS
B.TECH. MECHANICAL ENGINEERING
Elective –3 (Sixth Semester)
IEME-031 Fundamentals of Bio Medical Engineering
IEME-032 Tribology
IEME-033 Six Sigma Methods, Approach and Applications
IEME-034 Finite Element Method
IEC-021 Micro Electro Mechanical Systems (MEMS)
Page 3
OPERATIONS RESEARCH
IME-601
w.e.f. Session 2014-15
L T P
3 1 0
UNIT –I
Linear Programming:
Introduction and scope, problem formulation, Simplex methods, Primal and dual problem, Sensitivity analysis.
8
UNIT-II
Transportation and assignment problems. 4
Dynamic programming:
Multistage decision problems and solutions, Principle of optimality. 4
UNIT-III
Decision Theory :
Decision under various conditions. 4
Game Theory:
Minim and maxim in strategies. Application of linear programming. 4
UNIT-IV
Stochastic Inventory Models :
Single and multi period medels with continuous and discrete demands level and reorder policy. 8
UNIT-V
Simulations:
Simulation v/s mathematical modeling, Monte Carlo Simulation, Simulation languages, Examples and Cases. 4
Queueing Models:
Introduction tomodel types, M.M. land M/M/S system, Cost considerations. 4
Books:
1. Operations Research : S.D. Sharma
2. Production Planning of Operation Management: Buffa., Wiley
3. Optimization Techniques: S.S. Rao, New Age
4. Operations Research : Taha, PHI
5. Operations Research: Kanti Swarup, S. Chand.
Page 4
I.C. ENGINES
IME-602
w.e.f. Session 2014-15
L T P
3 1 0
UNIT –I
Introduction to I.C. Engines:
Engine classification, Air standard cycles, Otto, Diesel, Striling, Ericsson cycles, Actual cycle analysis, Two and four
stroke engines, SI and CI engines, Valve timing diagram, Rotary engines, stratified charge engine. 5
Fuels:
Fuels for SI and CI engines, important qualities of SI engine fuels, Rating of SI engine fuels, Important qualities of CI
engine fuels, Dopes, Additives, Gaseous fuels, LPG, CNG, Biogas, Producer gas, Alternative fuels for IC engines. 3
UNIT-II
SI Engines:
Carburetion, Mixture requirements, Carburetor types, Theory of carburetor, MPFI. 3
Combustion in SI engine, Flame speed, Ignition delay, Abnormal combustion and it’s control, combustion chamber
design for SI engines. 2
Ignition system requirements, Magneto and battery ignition systems, ignition timing and spark plug.
2
UNIT-III
CI Engine :
Fuel injection in CI engines, Requirements, Types of injection systems, Fuel pumps, fuel injectors, Injection timings.
4
Combustion in CI engines, Ignition delay, Knock and it’s control, Combustion chamber design of CI engines. 2
Scavenging in 2-Strock engines, pollution and it’s control. 2
UNIT-IV
Engine Cooling :
Different cooling systems, Radiators and cooling fans. 2
Lubrication:
Engine friction and lubrication, Principal types of lubrication, Lubricating oils, Crankcase ventilation. 2
Supercharging:
Effect of altitude on power output, Types of supercharging. 2
Testing and Performance:
Performance parameters, Basic measurements, Testing of SI and CI engines. 4
UNIT-V
Compressors :
Classification, Reciprocating compressors, Single and multistage, Intercooling, volumetric efficiency. 3
Rotary compressors, Classification, Centrifugal compressors, Elementary theory, Vestor diagram efficiencies,
Elementary analysis of axial compressors, Surging and stalling, Roots blower, Waned compressor, Performance
analysis. 4
Books:
1. Fundamentals of Internal Combustion Engines: Gill,Smith, Ziurs, Oxford and IBH Publishing.
2. COIC Engines: Rogowsky, International Book Co.
3. A Course in International Combustion Engines: Mathur and Sharma, Dhanpat Rai and Sons.
4. Reciprocating and Rotary Compressors: Chlumsky, SNTI Publications, Czechoslovakia.
5. I.C. Engine Analysis and Practice : E.F. Obert.
6. I.C Engines: Ganeshan, Tata McGraw Hill Publishers.
7. I.C Engines : R.Yadav, Central Publishing House, Allahabad.
Page 5
MACHINE DESIGN -II
IME-603
w.e.f. Session 2014-15
L T P
3 1 0
UNIT –I
Spur Gears :
Conjugate action, Involute Gears, gear cutting methods, Tooth loads, Strength of spur gears in bending and in wear.
Dynamic loading., Gear materials, design of gears and involute splines. Gear profile corrections, AGMA and Indian
standards. 6
UNIT-II
Helical Gears :
Tooth relationship, tooth proportions. Design of helical gears, crossed helical gears, AGMA and Indian standards.
6
Worm and Bevel Gears:
Analysis of loads and stresses, power rating, Efficiency, Gear standards and proportions. 6
UNIT-III
Bearing and Lubrication: Types of ball bearings, Roller bearing, Needle roller bearing, Life of bearing, Reliability
considerations, Selection of ball, roller tapered roller and thrust bearings, Lubrication and sealing. Mounting of
bearings. 6
UNIT-IV
Sliding Bearings :
Hydrodynamic theory of lubrication, Types of bearings, Design of bearings using design charts, Boundary
lubrication, hydrostatic bearings, hydrodynamic thrust bearings. Lubrication and lubricants. 8
UNIT-V
Engine Parts :
Design of engine parts such as connecting rod, crankshaft and cylinder and piston. 8
Books:
1. Mechanical Engineering Design: Joseph E. Shigley McGraw Hill Publications.
2. Design of Machine Members: Alex Valance and VI doughtie, McGraw Hill
3. Machine Design: D.N. Reshetov, Mir Publishers: Moscow.
4. Machine Design: M.F. Spott. Prentice Hall India
5. Fundamental of Machine Design: (vol: 1, 1-5) Popov, Mir Pub. Moscow
6. Machine Elements: Dobrovsky, Mir, Pub. Moscow Data Books
7. Fundamentals of Machine Design: Richard M. Phelan, TMh
8. Machine Design: Maleev and Hartman, CBS
9. Machine Design: Sharma and Agrawal, Kataria
10. Design of Machine Elements: Bhandari, TMH
11. Machine Design: Black and Adams, McGraw Hill.
Page 6
FLUID MACHINERY
IME-604
w.e.f. Session 2014-15
L T P
3 1 0
UNIT –I
Introduction :
Classification of Fluid Machines, Application of momentum and momentum equation to flow through hydraulic
machinery, Euler’s fundamental equation.
Impact of Jet:
Introduction to hydrodynamic thrust of a jet on a fixed and moving surface (flat and curve), effect of inclination of jet
with the surface.
Hydraulic Turbines:
Classification of turbines, Impulse turbines, Constructional details, Velocity triangles, Power and efficiency
calculations, governing of pelton wheel. 8
UNIT-II
Reaction Turbines :
Fransis and Kaplan turbines, Constructional details, Velocity triangles, Power and efficiency calculations, Degree of
reaction, Draft tube, Cavitation in turbines, Principles of similarity, Unit and specific speeds, Performance
characteristics, Selection of water turbines. 8
UNIT-III
Centrifugal Pumps;
Classifications of centrifugal pumps, Vector diagram, Work done by impellor, Efficiencies of centrifugal pumps,
Specific speed, Model testing, Cavitation and separation, Performance characteristics. 8
UNIT-IV
Positive Displacement Pumps :
Reciprocating pump theory, Slip and coefficient of discharges, Indicator diagram, Effect and acceleration, Work saved
by fitting air vessels, Comparison of centrifugal and reciprocating pumps, positive rotary pumps, Gear and Vane
pumps, Performance characteristics. 8
UNIT-V
Other Machines :
Hydraulic accumulator, Intensifier, Hydraulic press, Lift and Cranes, theory of hydraulic coupling and torque
converters, performance characteristics. 8
Water Lifting Devices:
Hydraulic ram, Jet pumps, Airlift pumps.
Books:
1. Hydraulic Machines: Jagdish Lal, Metropolitan Book Co.
2. Hydraulic Machines: Theory and Design, V.P. Vasandhani, Khanna.
3. Applied Hydraulics : Addison.
4. hydraulic Machines: R.K. Rajput, S. Chand and Co. Ltd.
5. Hydraulic Machines: D.S. Kumar.
Page 7
REFRIGERATION AND AIR CONDITIONING
IME-605
w.e.f. Session 2014-15
L T P
3 1 0
UNIT –I
Refrigeration :
Introduction to refrigeration system, Methods of refrigeration, Carnot refrigeration cycle, Unit of refrigeration,
Refrigeration effect and C.O.P.
Air Refrigeration Cycle :
Open and closed air refrigeration cycles, Reversed carnot cycle, Bell Coleman or Reversed Joule air refrigeration
cycle, Aircraft refrigeration system, Classification of aircraft refrigeration system. Simple air refrigeration system.
Boot strap refrigeration, Regenerative, Reduced ambient, Dry air rated temperature (DART) 8
UNIT-II
Vapour Compression System :
Single stage system, analysis of vapour compression cycle, use of T-S and P-H charts, Effect of change in suction and
discharge pressures on C.O.P., Effect of sub cooling of condensate and superheating of refrigerant vapour on C.O.P.
of the cycle, Actual vapour compression refrigeration cycle, Multistage vapour compression system requirement,
Removal of flash gas, Intercooling, Different configuration of Multistage system, Cascade system. 8
UNIT-III
Vapour Absorption System:
Working Principle of vapour absorption refrigeration system, Comparison between absorption and compression
system, Elementary idea of refrigerant absorbent mixtures, Temperature-concentration diagram and Enthalpy-
concentration diagram, Adiabatic mixing of two streams, Ammonia- Water vapour absorption system, Lithium-
Bromide water vapour absorption system, Comparison. 5
Refrigerants:
Classification, Nomenclature, Desirable properties of refrigerants, Common refrigerants, Secondary refrigerants and
CFC free refrigerants. 3
UNIT-IV
Air Conditioning :
Introduction to air conditioning, Psychometric properties and their definitions, Psychometric chart, Different
Psychometric processes, Thermal analysis of human body Effective temperature and comfort chart, Cooling and
heating load calculations, Selection of inside and outside design conditions, Heat transfer through walls & roofs,
Infiltration and ventilation, Internal heat again, Sensible heat factor (SHF), By-pass factor, Grand Sensible heat factor
(GSHF), Apparatus dew point (ADP). 9
UNIT-V
Refrigeration Equipment and Application:
Elementary knowledge of refrigeration and air conditioning equipments e.g. compressors, condensers, evaporators and
expansion devices, Air washers, Cooling towers and humidifying efficiency, Food preservation, cold storage,
Refrigerates Freezers, Ice plant, Water coolers, Elementary knowledge of transmission and distribution of air through
ducts and fans, basic difference between comfort and industrial air conditioning. 7
Books:
1. Refrigeration and Air conditioning : Manohar Prasad, New Age
2. Refrigeration and Air conditioning: C.P. Arora, TMH
3. Refrigeration and Air conditioning: Arora and Domkundwar, Dhanpat Rai
4. Refrigeration and Air conditioning: Stoecker and Jones
5. Refrigeration and Air conditioning: Roy J. Dossta
6. Refrigeration and Air conditioning: P.L. Baloney
7. Thermal Environment Engg. : Kuhen, Ramsey and Thelked
Page 8
MACHINE DESIGN –II LAB
IME-653
w.e.f. Session 2014-15
L T P
0 0 3
(At least 2 experiments/turn (lecture-classes0 from each of the following four sections. Say, 3 turns for A, 3 turns for
B and 4 turns for C, total 10 turns)
(A) Computer and Language:
Lectures should be given by teachers on introduction to computer and language such as C Input Output statements,
control statements, if, for, while, switch statements etc., Function and is uses, Structures. To make student able to
write computer program in C.
(B) Writing Computer Program for Conventional Design :
After Section B, student can write computer program for the design done in theory subjects.
(C) Design Problem as a Mini project :
Student will be given a real life design and they have to complete design of it manually using hand-book etc, they can
also take help of computer and programming, if needed.
Page 9
FLUID MACHINERY LAB
IME-654
w.e.f. Session 2014-15
(Say minimum 8 out of the following or such experiments)
L T P
0 0 3
1. Impact of jet experiment
2. Turbine exp. on Pelton wheel.
3. Turbine exp. On Francis turbine.
4. Turbine exp. On Kaplan turbine.
5. Exp. on Reciprocating pump.
6. Exp. on Cenrifugal pump
7. Exp. on Hydraulic Jack/Press.
8. Exp. on Hydraulic Brake.
9. Exp. on Hydraulic Ram
10. Study through first visit of any pumping station/plant.
11. Study through second visit of any pumping station/plant.
12. Any other suitable experiment / text rig such as comparison and performance of different types of pumps and
turbines.
Page 10
REFRIGRATION AND AIR CONDITIONING LAB
IME-655
w.e.f. Session 2014-15
(Say minimum 8 out of the following experiments)
L T P
0 0 3
1. Experiment on the refrigeration test-rig and calculation of various performance parameters.
2. To study different types of expansion devices used in a refrigeration system.
3. To study different types of evaporators used in refrigeration systems.
4. To study basic components of an air-conditioning system.
5. Experiment on air-conditioning test-rig and calculation of various performance parameters.
6. To study air washers.
7. Study of a window air conditioner
8. Study and determination of volumetric efficiency of a compressor.
9. Visit of a central air conditioning plant.
10. Visit of a cold storage plant.
Page 11
FUNDAMENTALS OF BIOMEDICAL ENGINEERING
IEME-031
w.e.f. Session 2014-15
L T P
2 1 0
UNIT- I
Biomechanics Statics and dynamics of the musculoskeletal system, forces and moments. Acting in the skeletal system and the
various techniques used to describe them. Forces and moments with in the body such as forces acting at hip and knee
joint and in the extremities. Analysis of pathological situations of human joints. 9
UNIT- II
Biomaterials Stress strain behaviour of bone. The mechanical properties including elasticity, hardness, viscoelasticity, surface and
fatigue properties of skin; soft tissues; bone; metals; polymers and ceramics. Biocompatible materials and its
applications. The effects of degradation and corrosion. 8
UNIT- III
Bio Fluid Flow Fluids-laminar and turbulent flow, boundary layer, non-newtonian and pulsatile models, blood rheology, circulatory
system, blood-flow in arteries, veins and heart, synovial fluid, joint friction. 6
UNIT- IV
Bioinstrumentation Fundamentals of producing a medical image, image collection techniques, image reconstruction algorithms, detailed
examination of the four main areas of medical imaging : Nuclear Medicine and positron Emission Tomography,
Ultrasound, Diagnostic Radiology, Magnetic Resonance and its clinical applications. Physiological signals, noise, and
available sensors and transducers and their characteristics. 9
UNIT- V
Computing for Biomedical Engineers Health care information and communications, Including telemedicine, medical informatics, networks and privacy.
Data Collection, Medical coding and classification. Standards for medical data interchange. Aspects of database
design, client/server topologies. 8
Reference: 1. Basic orthopedic biomechanics, Editors-VC Mow & Wc Hayes, Lippincott Raven Publishers.
2. Biomaterials Science- An Introduction to Materials in Medicine. Buddy D.Rattner, Allan S.Hoffman, Frederick
J.Schoen, Jack E.Lemmons, Editors, Academic Press.
3. Biomaterials: An Introduction(second edition) Joon B.Park & Roderic S.Lakes, Plenum Press, 1992.
4. Biofluid Mechanics,
Page 12
TRIBOLOGY
IEME-032
w.e.f. Session 2014-15
L T P
2 1 0
UNIT-I
Introduction to Tribology Definition, Scope, Applications, Friction, Definition, Scope, Laws of friction. Friction theories. Surface contaminants,
Effect of sliding speed on friction. 6
UNIT-II
Wear Definition, Scope, wear of metals, Types, Classification. Mechanism of wear, Quantitative laws. Hypothesis of Holm.
Hypothesis of Burwell and Strang. Hypothesis of Archard, Rawe, Rabinowicz. Quantitative law for Abrasive wear,
Bayerku surface fatigue theory. Delamination theory & Fatigue theory of wear, wear resistant materials. Introduction
to wear of Polymers and Ceramics. Wear reduction by Surface Improvements, Pitting, Erosion & Stress Corrosion.
10
UNIT-III
Surface Interactions Elastic & Plastic deformation of surfaces. Contact of Solids, Contact of Ideally Smooth Surfaces. Distribution of
Pressure over elastic contact of two curvilinear bodies. Formulae for calculation of contact area. Physico-Mechanical
properties of surface layers, Characteristics of Surface Geometry. Classes of surface roughness. Contact of rough
surfaces. Interaction of surface peaks. Real and contour area of contact. 10
UNIT-IV
Lubrication Definition & Scope. Generalized Reynold’s equation. Flow and shear stress, energy equation. Mechanism of pressure
development in bearings. Concept of Boundry Layer. 6
UNIT-V
Bearing design considerations & characteristics Bearing design procedure & steps. Plain slider bearing. Step (Rayleigh step) bearing. Infinitely long journal bearing.
Infinitely short journal bearing. Future scope and applications. 8
REFERENCE BOOKS:
1. Introduction to Tribology of bearings by - B. C. Majumdar., S Chand & Co.
2. Hand Book of Tribology -- WHILEY
3. Fundamentals of Fluid film lubrication by – Bernard Hamrock, Mc Graw Hill International Edition.
4. Tribology in Industries by Sushil. K. Srivastava, S Chand & Publications.
5. Basic Lubrication theory by Alastair Cameron.
Page 13
SIX SIGMA METHODS, APPROACH & APPLICATION
IEME-033
w.e.f. Session 2014-15
L T P
2 1 0
UNIT –I
Quality perception: Introduction to Quality Concept, Quality in manufacturing, Quality in service sector, statistical
foundation and methods of quality improvement.
Descriptive statistics: data type mean, median, mode, range, deviation, skewness and kurtosis.
Difference between conventional and six sigma concepts of Quality. 8
UNIT-II
Basic of six sigma: concepts of six sigma, defects DPMO, DPU, Z score, attacks on X’s, understanding six sigma
organization, leadership council, project sponsors and champions, master black belt, black belt and green belts,
customer focus, six sigma for manufacturing, six sigma for service, six sigma success stories 8
UNIT-III
Methodology of six sigma: DMAIC, DFSS, Six sigma tool: project charter, process mapping, measurement system
analysis, hypothesis testing, quality function deployment, failure mode and effect analysis, design of experiments
8
UNIT-IV
Steps in implementation of six sigma, selection of six sigma projects, sustenance of six sigma communication plan,
company culture, reinforcement and control. 8
Books:
1. Six Sigma, SPC and TQM in manufacturing and service: Geoff Tennant Gower
2. Six Sigma for managers: Greg Brue, TMH
3. What is Six Sigma: Peter S Pande, TMH
4. The Six Sigma way: Peter S Pande, TMH
Page 14
FINITE ELEMENT METHOD
IEME-034
w.e.f. Session 2014-15
L T P
2 1 0
UNIT-I
Introduction Introduction to finite difference method and finite elements method, Advantages and limitations, Mathematical
formulation of FEM, Different approaches in Finite Element Method - Direct Stiffness approach, simple examples,
Variational approach, Elements of variational calculus - Euler Lagrange equation, Rayliegh Ritz method, Weighted
Residual methods, Point Collocation method, Galarkin method - Steps involved in FEM. 8
UNIT-II
Types of Elements Used Interpolation Polynomials - Linear elements Shape function - Analysis of simply supported beam - Element and
Global matrices - Two-dimensional elements, triangular and rectangular elements - Local and Natural Co-ordinate
systems. 8
UNIT-III
Finite Element Formulation of Field Problems 1-D and 2-D heat transfer, fluid flow (incompressible and non viscous fluid) in ducts, Simple electrical and magnetic
field problems. Simple Numerical examples 8
UNIT-IV
Finite Element Formulation of Solid Mechanics Problems 1-D problem of shaft; Truss element analysis of pinned truss, Plane stress/strain problems, Axi-symmetric problems,
thin plate problems; Vibration of shafts & beams. 8
UNIT-V
Numerical Methods in FEM Evaluation of shape functions - One dimensional & triangular elements, Quadrilateral elements, Isoperimetric
elements - Numerical Integration, Gauss Legendre quadrature - Solution of finite element equations – Gauss
Elimination Method, Cholesky decomposition. 8
Books: 1. The Finite Element Method O.C. Zienkiewicz and R.L. Taylor McGraw Hill
2. An Introduction to Finite Element Method J. N. Reddy McGraw Hill
3. Finite Element Procedure in EngineeringAnalysis K.J. Bathe McGraw Hill
4. Finite Element Analysis C.S. Krishnamoorthy Tata McGraw Hill
5. Concepts and Application of Finite ElementAnalysis R.D. Cook, D.S. Malcus and M.E.Plesha John Wiley
6. Introduction to Finite Elements in Engineering T.R Chandragupta and A.D. Belegundu Prentice Hall India
7. Finite Element and Approximation O.C. Zenkiewicy & Morgan -
8. Numerical Methods E Balagurusamy Tata McGraw Hill
Page 15
MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
IEC-021
w.e.f. Session 2014-15
L T P
2 1 0
UNIT-I
INTRODUCTION TO MICRO ELECTRO MECHANICAL SYSTEMS
Intrinsic Characteristics of MEMS, Energy Domains and Transducers, Sensors and Actuators, Introduction to
Microfabrication, Silicon based MEMS processes, New Materials, Review of Electrical and Mechanical concepts in
MEMS, Semiconductor devices, Stress and strain analysis Flexural beam bending, Torsional deflection. 8
UNIT-II
SENSORS AND ACTUATORS-I
Electrostatic sensors, Parallel plate capacitor and it’s applications, Interdigitated Finger capacitor, Comb drive devices,
Thermal Sensing and Actuation, Thermal expansion, Thermal couples, Thermal resistors and it’s applications,
Magnetic Actuators, Micro magnetic components, Case studies of MEMS in magnetic actuators. 8
UNIT-III
SENSORS AND ACTUATORS-II
Piezoresistive sensors, Piezoresistive sensor materials, Stress analysis of mechanical elements, Applications to Inertia,
Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators, Piezoelectric effects, Piezoelectric materials,
Applications to Inertia , Acoustic, Tactile and Flow sensors. 8
UNIT-IV
MICROMACHINING
Silicon Anisotropic Etching, Anisotrophic Wet Etching, Dry Etching of Silicon, Plasma Etching, Deep Reaction Ion
Etching (DRIE), Isotropic Wet Etching, Gas Phase Etchants, Case studies, Basic surface micromachining processes,
Structural and Sacrificial Materials, Acceleration of sacrificial Etch, Striction and Antistriction methods, Assembly of
3D MEMS, Foundry process. 8
UNIT-V
POLYMER AND OPTICAL MEMS
Polymers in MEMS : Polimide, SU-8, Liquid Crystal Polymer (LCP), PDMS, PMMA, Parylene, Fluorocarbon,
Application to Acceleration, Pressure, Flow and Tactile sensors
Optical MEMS : Lenses and Mirrors, Actuators for Active Optical MEMS. 8
Books:
1. Nadim Maluf, “ An introduction to Micro electro mechanical system design”, Artech House, 2000.
2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.
4. Julian w. Gardner, Vijay k. Varadan, Osama O. Awadelkarim, Micro sensors mems and smart devices, John
Wiley & son LTD,2002
5. James J.Allen, micro electro mechanical system design, CRC Press published in 2005.
6. Chang Liu, “Foundations of MEMS”, 2nd
Edition Pearson Publication, India.
