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Surface Mechanics and Full-field Measurements for Micromechanical Sensors

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Procedia IUTAM 4 (2012) 7 – 14 2210-9838 © 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of H.D. Espinosa and F. Hild. doi:10.1016/j.piutam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vailable online at www.sciencedirect.com © 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of H.D. Espinosa and F. Hild.
Transcript
Page 1: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

Procedia IUTAM 4 ( 2012 ) 7 – 14

2210-9838 © 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of H.D. Espinosa and F. Hild.doi: 10.1016/j.piutam.2012.05.005

Available online at www.sciencedirect.com

© 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of H.D. Espinosa and F. Hild.

Page 2: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

8 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14

Page 3: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

9 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14

Page 4: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

10 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14

Page 5: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

11 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14

Page 6: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

12 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14

Page 7: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

13 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14

Page 8: Surface Mechanics and Full-field Measurements for Micromechanical Sensors

14 Roberto Fedele and Roberta Santoro / Procedia IUTAM 4 ( 2012 ) 7 – 14


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