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Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of...

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Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield 90% process, 96% device Demonstrated alignment Repeatable ~0.3micron High interconnect density 10,000 to 170,000 per sqmm Positive thermal cycle testing >100,000 device cycles –65 to 150C 15 minute soak Good correlation with models and simulations Demonstration of tools Demonstrated faster, lower power, higher density
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Page 1: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Device Summary

• Fully functional devices demonstrating a wide variety of applications

• Good yield– 90% process, 96% device

• Demonstrated alignment– Repeatable ~0.3micron

• High interconnect density– 10,000 to 170,000 per sqmm

• Positive thermal cycle testing – >100,000 device cycles –65 to 150C 15 minute soak

• Good correlation with models and simulations• Demonstration of tools• Demonstrated faster, lower power, higher density

Page 2: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Considerations

Page 3: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Wafer to Wafer - Best Fit

• Memory– DRAM

– PCRAM, FERAM, MRAM

• FPGA• Sensors

• Processors– Short wires

– Heat, heat, heat

Page 4: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

3D Interconnect CharacteristicsSuperViaTM Gen II Face to Face

Size 4.0 X 4.0 1.2 X 1.2 1.7 X 1.7 (0.75 X 0.75

Minimum Pitch 6.08 <4 2.4 (1.46

Feedthrough Capacitance

7fF 2-3fF <<

Series Resistance

<0.25 <0.35 <

Page 5: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Parameters

• 10um Z dimension increments– 5-15um thickness

• Low R• Moderate C• Repair & Redundancy

– It’s still per sqmm!

• Pitch– 0.5um limit

• How many layers?– 2 to 5, current horizon

Page 6: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

HEAT!!!

• Modeling– What modeling, more data, more testing required

• What we know….– 32W/sqmm, Structurally sound

• <5W easy rules– ~15W/100sqmm cliff

– >150W possible

– >500W liquid cooling

Page 7: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Even with innovations like DDR II* and QDR,* inadequate memory speed – the so-called “Memory Wall” – is still the primary obstacle to system performance;[i] it undermines most of the speed improvements of today’s processors.[ii] In spite of gains in bus speed, high memory latency causes processors to wait for data; 2003 statistics show that individual processors in high-performance systems and servers spend 65-95% of their time[iii] idly waiting for either memory or I/O. *

[i] N.R. Mahapatra and B. Venkatrao, “The Processor-Memory Bottleneck: Problems and Solutions” Association for Applied Computing Crossroads 5 no. 3 (1999) [e-journal].

[ii] Anthony Cataldo, “MPU designers target memory to battle bottlenecks” EETimes, 19 October 2001

[iii] Sally McKee, “Perspectives on The Memory Wall Problem” accessed online Sept. 2003 at http://www.lanl.gov/orgs/ccn/salishan2003/pdf/mckee.pdf.

Jack Dongarra, “Getting the Performance out of High Performance Computing” accessed online Sept. 2003 at http://www.nersc.gov/conferences/SciDAC2003/Presentations/Dongarra.pdf

Graph: J. Dongarra, U. of Tennessee

Page 8: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Commodity Memory …

FLAT!

Page 9: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

A Poster Child for the Productivity Crisis

Sparse Matrix OperationsParticle Physics, Weapons Dev.

5.9% efficiency

Finite Element AnalysisWeather & Ocean Forecasting

7.1% efficiency

Large Matrix Manipulation Engineering Design of Complex Structures

8.4% efficiency

Memory Intensive CalculationsCryptanalysis

< 3.0% efficiency

I/O BW to Processing RatioRadar, Sonar, Imaging Sensors

12% efficiency

ASCI Q

PC’s are 15 to 25% Efficient

Page 10: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Linear!

Comparable

When Processor Limited

Page 11: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Log! 3

0.006

500 X

When Memory Limited

Page 12: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Where Does the Bandwidth Go?•When Costs are Grouped by Bandwidth, Memory Bandwidth is 80% of the Cost of a Cray X1 Class Machine

Page 13: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

OK, access to main memory is glacial

Solution: On Chip Cache

Page 14: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Cache THE Driver of Processor Die Area

$4227$1980 $TBD

130 nm 90 nm

Page 15: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Deciding What to Bring “On Chip”

Page 16: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

The Good

The Bad

The Ugly

Page 17: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

On Chip / Off Chip Power

Operation Energy32-bit ALU operation 5 pJ

32-bit register read 10 pJ

Read 32 bits from 8K RAM 50 pJ

Move 32 bits across 10mm chip 100 pJ

Move 32 bits off chip 1300 to 1900 pJ

Calculations using a 130nm process operating at a core voltage of 1.2V (Source: Bill Dally, Stanford)

Prefetch/Cache Overhead and Off Chip Memory Access are key Power Issues

Page 18: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

On Chip / Off Chip Latency

  Madison 6M POWER4+ POWER5

Frequency (GHz)1.5 1.7 1.9

L2 Latency

5 cycles3.3 ns

12 cycles7.1 ns

13 cycles6.8 ns

L3 Latency

14 cycles9.3 ns

123 cycles72.3 ns

87 cycles45.8 ns

Memory Latency

~224 cycles~149 ns

351 cycles206 ns

220 cycles116 ns

Page 19: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

3D Heterogeneous Integration

Rendering of 3D IC

Maps to memory die array

Maps to logic only die

AFTER: 3D IC

Single Die~ 430 mm2 2D IC “All or Nothing”

Wafer Cost ~ $6,000

Low yield ~ 15%, ~ 10 parts per wafer 128MB not 9MB

memory costs ~ $44/MB memory costs ~ $1.50/MB $0.44/MB

14x increase in memory density4X Logic Cost Reduction29x 100x memory cost reduction (choice!)

Intel Photo used as proxyBEFORE Only Memory Directly Compatible with Logic(virtually no choice!)

Page 20: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

Octopus L3 Cache DRAM

• 1Gb-4Gb• Down to 5ns, latency• 1GHz Max clock rate• Minimum Timing - tRCD=1, tCYC=4, tPRE=0, tCL=2• Programmable 8 port by 256 bit architecture• Programmable burst length 4 to 256• Programmable port width 32 to 256 bits• Exposed or hidden refresh options• DDR 2000MT Max • >200GB/s sustained, closed page mode, BL=4, bandwidth• 512GB/s peak bandwidth• >25TB/s peak on-board transfer rate• 1.0V to 1.7V I/O• 1.4V to 1.6V Core• Internally ECC protected, Dynamic self-repair• 115C die full function operating temperature• 65 sqmm die footprint

Page 21: Tezzaron Semiconductor Device Summary Fully functional devices demonstrating a wide variety of applications Good yield –90% process, 96% device Demonstrated.

Tezzaron Semiconductor

The Demo!


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