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Towards novel Mott FET: Concept, Present Status, and Future

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1 Isao H. Inoue Towards novel Mott FET: Concept, Present Status, and Future National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
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  • 1Isao H. Inoue

    Towards novel Mott FET: Concept, Present Status, and Future

    National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Tem

    p

    Ordered State

    Classical Critical Point

    Super

    CeCu2Si2Te

    mp

    Antiferro

    Pressure

    Quantum Critical Point

    Physical Parameters

    Quantum critical phenomena

    Pressure

    Super

    UGe2

    Tem

    p

    Ferro

    2

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Phys. Parameters are alwayseither Pressure or Mag. Field

    UGe2

    Saxena et al., Nature 406, 587 (2000) [ Coleman, Nature 406, 580 (2000) ]

    Ferro

    Super

    Pressure

    Tem

    p

    Yuan et al., Science 302, 2104 (2003)

    CeCu2Si2

    AFSuper

    Pressure

    Tem

    p

    3

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Continuous and reversible control of electronic states on the verge

    of the quantum critical point

    Randomness-free method: quantum critical phenomena is

    so vulnerable to disorders

    4

    For QCP study, we need

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 5

    Electrostatic Carrier Doping

  • 6Quantum critical phenomena

    Electrostatic carrier doping

    Mott transistor Exotic phonomena

  • 7Quantum critical phenomena

    Electrostatic carrier doping

    Mott transistor Exotic phonomena

  • 8

  • 9Before explaining what is Mott FET, lets revisit the basics of electrostatic carrier doping

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 10

    Field effect to an insulator

    Channel material (insulator)

    Gate electrode (metal)

    Gate insulator+

    -

    +

    -

    +

    -

    +

    -

    +

    -

  • Gate insulator

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 11

    ++ + ++ + + ++

    - -- -

    --

    -- -

    --

    -- -

    - ---

    - -- -- --

    -h+

    h+h+

    h+ h+

    h+h+

    h+h+h+

    h+

    h+

    h+

    h+h+

    h+ h+

    depletion layer

    - --

    - - -

    -- -

    --

    -- -

    - ---

    - -- -- --

    -h+

    h+

    h+h+

    h+ h+

    h+

    h+ h+

    h+

    h+

    h+

    h+h+

    h+h+

    h+

    h+h+

    h+

    h+h+

    h+

    h+

    h+h+

    - acceptorh+ hole

    Gate electrode (metal)

    Channel material (doped p-type Si)

    Conventional MOSFET

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 12

    +++

    +++

    +++

    --

    --

    - -

    ---

    --

    --

    -

    -- -

    -

    ---

    --

    --

    -h+

    h+h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    h+h+

    depletion layer (~m)

    VG =V ins +

    V ins

    chemical potential

    E C

    E int

    E V

    How "Channel" is created

    +++

    +++

    +++

    --

    --

    - -

    ---

    -

    --

    -

    -- -

    -

    ---

    --

    --h

    +h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    + - -

    ++

    --

    --

    ++

    ++ -+

    -+

    depletion layer (~m)

    chemical potential

    V ins

    inversion layer (~nm) = channel

    VG =V ins +

    E C

    E int

    E V

  • However, present Metal - Oxide - Semicondoctor FET is faced with a fatal

    problem

    13

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    H. Takamizawa et al., Appl. Phys. Express 4, 036601 (2011)

    Laser-assisted atom probe tomography (LAPT) picture

    14

    Dopants in Si MOSFET

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    20nm device has only ~10 carriers.

    15

    H. Takamizawa et al., Appl. Phys. Express 4, 036601 (2011)

    Laser-assisted atom probe tomography (LAPT) picture

    20nm

    20nm

    5nm

    M. R. Castell et al., Nature Materials 2, 129 (2003)3D atom probe (3DAP) picture

    Dopants in Si MOSFET in 2020

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 16

    Present MOSFET++

    +++

    ++

    ++

    --

    --

    - -

    ---

    -

    --

    -

    -- -

    -

    ---

    --

    --h

    +h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    + - -

    ++

    --

    --

    ++

    ++ -+

    -+

    V ins

    inversion layer (~nm) = channel

    depletion layer (~m)

    chemical potential

    VG =V ins +

    E C

    E int

    E V

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 17

    Present MOSFET vs. Future one

    ++

    ++

    +

    -

    --

    --

    -

    + -

    ++ -

    + -

    +++

    +++

    +++

    --

    --

    - -

    ---

    -

    --

    -

    -- -

    -

    ---

    --

    --h

    +h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    + - -

    ++

    --

    --

    ++

    ++ -+

    -+

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 18

    Channel is hardly created for small dopant density

    ++

    ++

    +

    - h+

    --

    --

    -

    too large accumulation layer no effective channel

    VG =V ins+

    V ins

    chemical potential

    E C

    E int

    E V

    ++

    ++

    +

    -

    --

    --

    -

    + -

    ++ -

    + -

    V ins

    chemical potentialVG =V ins+

    E C

    E int

    E V

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 19

    Present MOSFET vs. Future one

    ++

    ++

    +

    -

    --

    --

    -

    + -

    ++ -

    + -

    no effective channel

    VG =V ins+

    V ins

    chemical potential

    E C

    E int

    E V

    +++

    +++

    +++

    --

    --

    - -

    ---

    -

    --

    -

    -- -

    -

    ---

    --

    --h

    +h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    + - -

    ++

    --

    --

    ++

    ++ -+

    -+

    V ins

    inversion layer (~nm) = channel

    depletion layer (~m)

    chemical potential

    VG =V ins +

    E C

    E int

    E V

  • Miniaturisation Limit!!

    Alternative of MOSFET is an urgent necessity.

    But what can replace S?

    20

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 21

    Mott FET may be the only choice

    First transistor (Bell Lab 1947)

    Ge junction transistor (Bell Lab 1950)

    Mott transistor (2020 ?)

  • 22

    Then, what is the Mott insulator?

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 23

    Band of electrons kinetic energy

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 24

    Valence Band

    Conduction Band

    Energy vs momentum plot

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 25

    when you are sleepy

    Energy vs momentum plotEnergy vs momentum plot

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 26

    Density of States (DOS)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 27

    Valence Band

    Conduction Band

    EF

    DOS of the normal band insulator

    D(E)

    EE

    k

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 28

    Conduction Band

    EF

    D(E)

    E

    k

    DOS of the normal metal

    EEF

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 29

    EF

    D(E)

    E

    k

    DOS of the normal metal

    EEF

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 30

    D(E)

    E

    k

    DOS of the normal metal

    EEFEF

    * *

    m*

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 31

    D(E)

    E

    k

    DOS of the normal metal

    EEFEF

    * *

    m* still metallic !!

    heavy mass. "no" move.

  • 32

    Disappear !?

    wheres Britney gone?

  • 33

    But before answering, we need to know

    what enhances the effective mass?

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Electrons with a spin degree of freedom

    Orbital of an atomic site: size = kinetic energy = band width

    band width = W

    AIST Aris AIST Tls

    34

    couch

    Naive model of the Mott transition

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 35

    Pauli principle

    Electron Correlations

    = 0Electron

    Correlations = U

    35

    Hubbard Model

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 36

    transfer is not available

    transfer is available

    W (>U)

    Competition between U and W

    W (

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    U < W U > W

    37

    Competition between U and W

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    U On-site Coulomb Repulsions Energy W One-electron BandwidthKinetic Energy

    Charge fluctuation is completely suppressed (as if it were a fully-filled band insulator)

    Competition between U and W

    38

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Charge fluctuation is completely suppressed (as if it were a fully-filled band insulator)

    Competition between U and W

    39

    U On-site Coulomb Repulsions Energy W One-electron BandwidthKinetic Energy

  • 40

    What is an answer for "Disappear !?"

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Evolution of the density of states

    G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).

    41

    U/W = 0

    U/W = 0.5

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).

    42

    Evolution of the density of states

    a renormalized band heavy-mass electrons (holes) forms a band.

    incoherent states discrete energy levels of

    localised electrons (holes).

    U/W = 0

    U/W = 0.5

    U/W = 1.2

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).

    43

    Evolution of the density of states

    U/W = 0

    U/W = 0.5

    U/W = 1.2

    U/W = 2

    Finally the gap opens!! between the Hubbard bands though they are not the bands

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Correlated Metal

    Mott Insulator

    G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).

    44

    Evolution of the density of states

  • [email protected] http://staff.aist.go.jp/i.inoue/China-Japan-Korea RRAM and FO WS@Beijing 16 Jan. 2014

    ex

    p(

    ) (a

    rb. u

    nits

    )-3.0 -2.0 -1.0 0.0 1.0

    (eV)

    Quasi-particle spectra of Ca1-xSr xVO3

    obtained by UPS

    band calc. x=0.9 x=0.8 x=0.4 x=0.3

    Isao H. Inoue et al., Phys. Rev. Lett. (1995)

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 45

    G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).

    First experimental evidence

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 46

    MOSFET in 2020On State Off State

    Mott FETVG

    M. R. Castell et al., Nature Materials 2, 129 (2003)

    3D atom probe (3DAP) picture

    20nm device has more than 100,000 carriers. Carrier density is independent of device sizes.

    No miniatur. prob. in Mott FET

    20nm device has only ~20 carriers. Almost the end of the miniaturisation

  • 47

    Mott FET ?!

    Mott insulator is an insulator How can you dope it carriers

    by electric field?

  • [email protected] http://staff.aist.go.jp/i.inoue/China-Japan-Korea RRAM and FO WS@Beijing 16 Jan. 2014

    J. Chakhalian, A. J. Millis and J. Rondinelli, Nature Materials 11, 92 (2012)

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 48

    Apply E to a Mott insulator

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 49

    ++

    ++

    +

    --

    --

    - + -

    Apply E to a Mott insulator

    VG =V ins+

    V ins

    E int

    VG =V ins+

    V ins

    E int

    + -

    + -

    + -

    + -

    + -

    + -

    + -

    + -

    E UHB

    E LHB

    E UHB

    E LHB

    chemical potential

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 50

    ++

    ++

    +

    --

    --

    - + -+ -+ -

    + -+ -

    + -+ -

    + -+ -

    + -

    Apply E to a Mott insulator

    VG =V ins

    V insE UHBE int

    VG =V ins+

    V ins

    E int

    sudden appearance of metallic state

    E LHB

    E UHB

    E LHB

    screening length (~nm)

    chemical potential

  • Mott insulators ionic crystals (because of the strong electron correlations)

    Defects form easily under large electric field.

    51

    Largest obstacle to realise the Mott FET

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 52

    TiO2-x Co1-xO, Fe1-xO, Ni1-xO valence electron

    1st electron ionisation

    2nd electron ionisation

    neutral composite

    neutral composite

    valence electron

    Defects in transition-metal oxides

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 53

    M. Janousch et al., Adv. Mat. 19, 2232 (2007)

    0.2 mol% Cr-doped SrTiO3

    By applying 0.1MV/cm for about 30 min

    Pt

    Pt

    Vo are created, distributed in the channel, and form a metallic path.

    VO creation by electric-field

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 54

    Electrochemical reaction?

    Science 339, 1402 (2013)VO2VO2

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 55

    Hydrogen doping?

    Nano Letters 12, 2988 (2012)

    Modulation of the Electrical Properties of VO2 Nanobeams Using anIonic Liquid as a Gating MediumHeng Ji, Jiang Wei, and Douglas Natelson*

    Department of Physics and Astronomy, MS 61, Rice University, 6100 Main Street, Houston, Texas 77005, United States

    ABSTRACT: Vanadium dioxide (VO2) is a strongly corre-lated transition metal oxide with a dramatic metalinsulatortransition at 67 C. Researchers have long been interested inmanipulating this transition via the eld eect. Here we reportattempts to modulate this transition in single-crystal VO2nanowires via electrochemical gating using ionic liquids.Stray water contamination in the ionic liquid leads to large,slow, hysteretic conductance responses to changes in the gatepotential, allowing tuning of the activation energy of theconductance in the insulating state. We suggest that thesechanges are the result of electrochemical doping via hydrogen. In the absence of this chemical eect, gate response is minimal,suggesting that signicant eld-eect modulation of the metalinsulator transition is not possible, at least along thecrystallographic directions relevant in these nanowires.KEYWORDS: Vanadium dioxide, single crystal nanowire, ionic liquid, electrochemical doping, hydrogen doping

    VO2 is a classic strongly correlated material that exhibits adramatic metal to insulator transition1 (MIT) whencooled through 67 C, accompanied by a simultaneousstructural transition from a high-temperature rutile to a low-temperature monoclinic structure. Temperature, pressure, andchemical doping can signicantly aect the phase transition2,3

    by shifting the transition temperature or even stabilizing otherphases (M2 and triclinic phases).There has long been interest in electrostatic modulation of

    the MIT in VO2, but this has remained a challenge. First, therelatively high carrier density observed by Hall measurementssuggests that VO2 has a very short screening length

    4,5 thatlimits the electrostatic gating eciency, conning the eect ofthe gate to an extremely thin channel layer. Second, withconventional oxide gate dielectrics such as SiO2, Al2O3, andHfO2

    5 leakage current often appears with applied high gatevoltage, and this current can cause self-heating and aect theMIT. Inhomogeneity of the sample due to strain and grainboundaries can also complicate matters. Gating during thephase coexistence portion of the transition in polycrystallinethin lms has shown some eect on the percolation of themetallic phase.6 Recent measurements with conventional gatedielectrics show indications of switching in the Raman responseas a function of gate,7 and small gate modulations of theconductance with long time constants5 and slow hysteresis.8

    Recently, electrolytic gating with a very high inducedconcentration of carriers9 (8 1014cm2) has been realizedsuccessfully on various materials by using an ionic liquid as theelectrolyte. A gate-driven insulator-to-metal transition has beenachieved on wide band gap (3.3 eV) semiconductor ZnOtransistor.10 In the insulators SrTiO3

    11 and KTaO3,12 super-

    conductivity was observed in ionic liquid-gated single-crystaldevices. Very recent ionic liquid gating experiments on

    sputtered VO2 lms13 have shown a reduction in channel

    resistance at positive gate potentials in the monoclinic phasewith a slow time dependence to the response.In this paper, we report our examination of ionic liquid

    gating of single crystal VO2 nanowires and nd that even withwhat should be extremely large accumulation of ionic charge onthe VO2 surface, when dry ionic liquid is employed, there is noobservable electrostatically induced phase transition. Withwater-containing ionic liquid or other hydrogen-containingliquids used as electrolytes, we observe large, slow, hystereticgate response. Following positive gate bias applied attemperatures above the transition, the low-temperatureconductance is strongly increased, and this increase is persistentfollowing the removal of any gate voltage. We ascribe thesechanges to electrochemical doping of the bulk of the VO2crystals, most likely with hydrogen, that can signicantly changeVO2s electrical properties.Rather than polycrystalline lms, in this work we used

    individual single-crystal VO2 nanobeams grown by vapor phasetransport.14 These crystals possess a highly homogeneoussurface (1 nm roughness) and minimal lattice defectscompared to conventionally deposited VO2 lms. From ourprevious research, the electric transport properties based ontwo-terminal VO2 nanostructures have been well character-ized.15 A typical single-crystal nanowire has a width and athickness of a few hundred nanometers, and a length of tens ofmicrometers. The contacts for the three-terminal devices werepatterned by electron-beam lithography and Ti/Au (typically 5

    Received: February 22, 2012Revised: April 6, 2012Published: May 11, 2012

    Letter

    pubs.acs.org/NanoLett

    2012 American Chemical Society 2988 dx.doi.org/10.1021/nl300741h | Nano Lett. 2012, 12, 29882992

    Modulation of the Electrical Properties of VO2 Nanobeams Using anIonic Liquid as a Gating MediumHeng Ji, Jiang Wei, and Douglas Natelson*

    Department of Physics and Astronomy, MS 61, Rice University, 6100 Main Street, Houston, Texas 77005, United States

    ABSTRACT: Vanadium dioxide (VO2) is a strongly corre-lated transition metal oxide with a dramatic metalinsulatortransition at 67 C. Researchers have long been interested inmanipulating this transition via the eld eect. Here we reportattempts to modulate this transition in single-crystal VO2nanowires via electrochemical gating using ionic liquids.Stray water contamination in the ionic liquid leads to large,slow, hysteretic conductance responses to changes in the gatepotential, allowing tuning of the activation energy of theconductance in the insulating state. We suggest that thesechanges are the result of electrochemical doping via hydrogen. In the absence of this chemical eect, gate response is minimal,suggesting that signicant eld-eect modulation of the metalinsulator transition is not possible, at least along thecrystallographic directions relevant in these nanowires.KEYWORDS: Vanadium dioxide, single crystal nanowire, ionic liquid, electrochemical doping, hydrogen doping

    VO2 is a classic strongly correlated material that exhibits adramatic metal to insulator transition1 (MIT) whencooled through 67 C, accompanied by a simultaneousstructural transition from a high-temperature rutile to a low-temperature monoclinic structure. Temperature, pressure, andchemical doping can signicantly aect the phase transition2,3

    by shifting the transition temperature or even stabilizing otherphases (M2 and triclinic phases).There has long been interest in electrostatic modulation of

    the MIT in VO2, but this has remained a challenge. First, therelatively high carrier density observed by Hall measurementssuggests that VO2 has a very short screening length

    4,5 thatlimits the electrostatic gating eciency, conning the eect ofthe gate to an extremely thin channel layer. Second, withconventional oxide gate dielectrics such as SiO2, Al2O3, andHfO2

    5 leakage current often appears with applied high gatevoltage, and this current can cause self-heating and aect theMIT. Inhomogeneity of the sample due to strain and grainboundaries can also complicate matters. Gating during thephase coexistence portion of the transition in polycrystallinethin lms has shown some eect on the percolation of themetallic phase.6 Recent measurements with conventional gatedielectrics show indications of switching in the Raman responseas a function of gate,7 and small gate modulations of theconductance with long time constants5 and slow hysteresis.8

    Recently, electrolytic gating with a very high inducedconcentration of carriers9 (8 1014cm2) has been realizedsuccessfully on various materials by using an ionic liquid as theelectrolyte. A gate-driven insulator-to-metal transition has beenachieved on wide band gap (3.3 eV) semiconductor ZnOtransistor.10 In the insulators SrTiO3

    11 and KTaO3,12 super-

    conductivity was observed in ionic liquid-gated single-crystaldevices. Very recent ionic liquid gating experiments on

    sputtered VO2 lms13 have shown a reduction in channel

    resistance at positive gate potentials in the monoclinic phasewith a slow time dependence to the response.In this paper, we report our examination of ionic liquid

    gating of single crystal VO2 nanowires and nd that even withwhat should be extremely large accumulation of ionic charge onthe VO2 surface, when dry ionic liquid is employed, there is noobservable electrostatically induced phase transition. Withwater-containing ionic liquid or other hydrogen-containingliquids used as electrolytes, we observe large, slow, hystereticgate response. Following positive gate bias applied attemperatures above the transition, the low-temperatureconductance is strongly increased, and this increase is persistentfollowing the removal of any gate voltage. We ascribe thesechanges to electrochemical doping of the bulk of the VO2crystals, most likely with hydrogen, that can signicantly changeVO2s electrical properties.Rather than polycrystalline lms, in this work we used

    individual single-crystal VO2 nanobeams grown by vapor phasetransport.14 These crystals possess a highly homogeneoussurface (1 nm roughness) and minimal lattice defectscompared to conventionally deposited VO2 lms. From ourprevious research, the electric transport properties based ontwo-terminal VO2 nanostructures have been well character-ized.15 A typical single-crystal nanowire has a width and athickness of a few hundred nanometers, and a length of tens ofmicrometers. The contacts for the three-terminal devices werepatterned by electron-beam lithography and Ti/Au (typically 5

    Received: February 22, 2012Revised: April 6, 2012Published: May 11, 2012

    Letter

    pubs.acs.org/NanoLett

    2012 American Chemical Society 2988 dx.doi.org/10.1021/nl300741h | Nano Lett. 2012, 12, 29882992

  • 56

    Mott insulators ionic crystals (because of the strong electron correlations)

    Defects form easily under electric field.

    Can we apply electric field to Mott insulators without causing

    electrochemical reactions?

  • 57

    Isao H. Inoue Neeraj Kumar Ai Kitou

    Use Parylene to suppress

    the defects formation

    National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)

  • 58

    Isao H. Inoue Ai Kitou

    Use Parylene to suppress

    the defects formation

    National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)

    Neeraj Kumar (AIST)

    Pablo Stoliar (CIC nanoGUNE)

  • 59

    Parylene !?

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    "Biocompatible glass is coated with protective substances for anti-migration and insulating properties and this is where the Parylene C coating comes.

    It also protects the microchip from natural substances in the body, that may penetrate through micro-cracks caused by mechanical damages."

    From "moving a pet to Australia" website

    by ParyleneProtect surface

    Parylene coated rotors and stators are used to control the Canadian arm for NASA Space Shuttle.

    Parylene coated circuit boards provides excellent resistance to moisture, chemicals, and mold. Circuit boards for medical equipment can be steam and gamma sterilised. Parylene can also prevent dendrite and tin whisker growth.

    From "Paratronix Inc." website

    Parylene coating of paper documents, autographs, and photos retards the aging process and protects from moisture, mold, and chemicals.

    60

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Creation of oxygen vacancies is suppressed. Channel is kept clean.

    P.-J. Chen et al., Lab on a Chip 6, 803 (2006)

    conformal coating

    by ParyleneProtect oxide surface

    oxides

    61

  • 62

    High-k/Parylene bilayer to accumulate more carriers

    must be very thin

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    "Biocompatible glass is coated with protective substances for anti-migration and insulating properties and this is where the Parylene C coating comes.

    It also protects the microchip from natural substances in the body, that may penetrate through micro-cracks caused by mechanical damages."

    From "moving a pet to Australia" website

    In General, Parylene film is very thick

    Parylene coated rotors and stators are used to control the Canadian arm for NASA Space Shuttle.

    Parylene coated circuit boards provides excellent resistance to moisture, chemicals, and mold. Circuit boards for medical equipment can be steam and gamma sterilised. Parylene can also prevent dendrite and tin whisker growth.

    From "Paratronix Inc." website

    Parylene coating of paper documents, autographs, and photos retards the aging process and protects from moisture, mold, and chemicals.

    Parylene film in most of the literatures are more than ~1m thick.

    63

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    High-k (HfO2, Ta2O5, etc.)/Parylene bilayer

    Hybrid gate insulator

    high-k materials (~15 < < ~25) + Parylene-C (=3.2)

    Isao Inoue and Hisashi Shima, Japan Patent Number: 5522688, Date of Patent: 18th April, 2014

    64

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    SrTiO3

    AlHfO2

    Au

    Ti

    parylene

    BF-TEM image

    65

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    SrTiO3

    Al

    HfO2Ti

    parylene

    BF-TEM image

    66

    5nm

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    SrTiO3Al

    HfO2

    Au Ti

    parylene

    STEM-EDS mapping

    67

  • 68

    Intel 4004 IC the original microprocessor or computer on a chip.

    We are preparing FET devices using a conventional

    photolithography

    Source Drain

    Gate

    V+V

    VH

    VH+

    4m12m

    AIST 2014 designed for 4-probe and Hall effect measurements to study "physics of Mott FET.

  • Doped semiconductor case

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 69

    +++

    +++

    +++

    --

    --

    - -

    ---

    --

    --

    -

    -- -

    -

    ---

    --

    --

    -h+

    h+h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    h+h+

    depletion layer (~m)

    VG =V ins +

    V ins

    chemical potential

    E C

    E int

    E V

    +++

    +++

    +++

    --

    --

    - -

    ---

    -

    --

    -

    -- -

    -

    ---

    --

    --h

    +h+

    h+h+

    h+h+

    h+h+

    h+

    h+

    h+

    h+

    h+h+

    + - -

    ++

    --

    --

    ++

    ++ -+

    -+

    depletion layer (~m)

    chemical potential

    V ins

    inversion layer (~nm) = channel

    VG =V ins +

    E C

    E int

    E V

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 70

    Large single crystals are commercially available

    1cmStep-and-terrace surface is easily obtained

    perovskite structure Insulator with ~3.3eV band gap

    SrTiO3 as a benchmark

    Not a Mott insulator, though.

    5[nm

    ]0

    0

    400

    800800

    400

    SrTiO3

    From a catalog of SHIKOSHA Co.Ltd.

    SrTiO3 is widely used as a substrate

    of oxide thin-film growth

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 71

    ++

    ++

    +

    --

    --

    - + -

    VG =V ins+

    V ins

    VG =V ins+

    V ins

    + -

    + -

    + -

    + -

    + -

    + -

    + -

    + -

    E C

    E V

    E C

    E V

    chemical potentialF

    sub-threshold region ( < ) strongly inverted region ( > )

    F

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    72

    sub-threshold region ( < F )

    strongly inverted region ( > F )

    =175mV/decades

    Cch/Cins = 1.8

    F = 0.6eV

    Vth= 1.6V

    Very small sub-threshold swing

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Very small sub-threshold swing

    73

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    ~1014cm-2 and ~10 cm2/Vs

    74

    10

    0.1

    0.001

    10k

    1M

    1G

    h/e2

    @300K

    breakdown

    @300K

    L = 12m W = 4m

    HfO2(20nm)/Parylene-C(6nm)/SrTiO3

  • 75

    High-k/Parylene/SrTiO3

    cleaner interface

    continuous and large doping control

  • 76

    High-k/Parylene/Mott Insultor

    cleaner interface

    continuous and large doping control

    Coming Soon!

  • 77

    Half-Time Summary1. Why we need the Mott transistor? - miniaturisation limit!

    2. How to avoid defects formation at the interface - Parylene!

  • 78

    Quantum critical phenomena

    Electrostatic carrier doping

    Mott transistor Exotic phonomena on the horizon!

  • 79

    Quantum critical phenomena

    Electrostatic carrier doping

    Mott transistor Exotic phonomena on the horizon!

    Several mor

    e

    slides to sho

    w

    if time allows

  • 80

    National Institute of Advanced Industrial Science & Technology (AIST) (Japan)

    Christos Panagopoulos

    Nanyang Technological University (Singapore)

    Azar B. Eyvazov*

    Isao H. Inoue

    CNRS & Universit Paris Sud (France)

    Pablo Stoliar** Marcelo J. Rozenberg***

    *also AIST (now a PhD student in Cornell University, US)

    **also Universidad Nacional de San Martin, Argentina, and Universit de Nantes, France

    ***also Universidad de Buenos Aires, Argentina

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Unusual I-V curves

    Hardly seen in Al2O3/SrTiO3 Al2O3/SrTiO3 has some amount of carriers from the first

    K. Ueno et al., App. Phys. Lett. 83, 1755 (2003)

    10-6

    81

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    When increasing VSD

    10-6V/VSD

    I SD

    V/VSD

    I SD

    0.3mm/0.8mm = 0.375

    increasing VSD for large fixed VG

    0.3mm/0.8mm = 0.375

    normal

    abnormal !

    increasing VSD for small fixed VG

    82

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    10-6

    When increasing VG

    V/VSD

    I SD

    V/VSD

    I SD

    0.3mm/0.8mm = 0.375

    0.3mm/0.8mm = 0.375

    increasing VG for any fixed VSD

    normal

    abnormal !

    not observed

    83

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Proc. Phys. Soc. 82, 954 (1963)

    Nonlinear by E. Scholl, Cambridge Univ. Press (2001)

    Negative Differential Resistance

    84

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    V/VSD

    I SD

    0.3mm/0.8mm = 0.375

    increasing VG for any fixed VSD

    current path!

    V/VSD

    I SD

    0.3mm/0.8mm = 0.375

    increasing VSD for small fixed VG

    field domain!

    Negative Differential Resistance

    85

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Numerical simulation: results

    86

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Comparison of Exp & Calc

    10-6

    87

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

    Experiment Calculation

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Simulation of path formation

    88

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

    Spatio-temporal current paths. All disappears when VG turns off. Not due to oxygen defects!!

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    Schematic picture of channel

    89

    A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)

    Spatio-temporal current paths. All disappears when VG turns off. Not due to oxygen defects!!

  • High-k/Parylene/SrTiO3 FET

    cleaner interface

    filamentation90

  • 91

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    1011 1012

    H. Nakamura et al., Appl. Phys. Lett. 89, 133504 (2006)

    h/e2=25.8k

    92

    Filamentation at 7K

  • 93

    Filamentation Occurs even at 7K!!

    Then, what happens at ultra-low T

    superconductivity?

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 94

    34

    SC at LaAlO3/SrTiO3 interface

    S. Thiel et al., Science 313, 1942 (2006)

    N. Reyren et al., Science 317, 1196 (2007)

    TC ~ 200mK HC2 ~ 0.1T JC ~ 100A/cmnonvolatile

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 95

    34

    SC at electrolyte/SrTiO3 interface

    K. Ueno et al., Nature Materials 7, 855 (2008)

    TC ~ 400mK HC2 ~ 0.1T JC ~ 300A/cm

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 96

    33

    SC of bulk SrTiO3-

    M. Jourdan et al., Eur. Phys. J. B 33, 25 (2003)

    TC ~ 140mK HC2 ~ 0.3T JC ~ 100A/cm2 ~ 100A/cm (for t10nm) Good agreement in the orders with

    1) SC at LaAlO3/SrTiO3 interface, 2) SC at electrolyte/SrTiO3 interface,

    and

    3) our gate-annealed SC (next slide).

  • 31

    Sample A

    VG threshold is lowered. Nonvolatile metallic state.

    Bulk-like superconductivity due to oxygen vacancies?

    TC ~ 350mK HC2 ~ 0.1T

    prolonged (one-day) applicationof large VG

    SC was seen only after

    Al electrode

    Volta

    ge (m

    V)

    0

    0.2

    Temperature (K)1.8 2.21.4

    H. Nakamura et al., J. Phys. Soc. Jpn. 78, 083713 (2009).

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 97

    SC in "gate-annealed" parylene/SrTiO3

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 98

    32

    Oxygen vacancy creation on SrTiO3

    M. Janousch et al., Adv. Mat. 19, 2232 (2007)

    0.2 mol% Cr-doped SrTiO3

    By applying 105V/cm for about 30 min

    Pt

    Pt

    Oxygen vacancies are created, and distributed in the channel, and form a metallic path.

  • 99

    All the superconductivity of SrTiO3 interface shown here might be caused by oxygen defects

    Is this the conclusion?

  • 100

    Is this the conclusion?

    No. we observed another

    All the superconductivity of SrTiO3 interface shown here might be caused by oxygen defects

  • 20mK

    7K

    39

    1011 1012

    Domain formation of doped carrier and percolation transition

    h/e2=25.8k

    1011 1012 1013

    108

    106

    104

    102

    1

    Gate-annealed superconductivity below 350mK

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 101

    Spatio-temporal current paths. All disappears when VG turns off. Not due to oxygen defects!!

    due to oxygen defects!!

    Another Zero-R State

  • 35

    oxygen vacancies due to VG application hinder this fragile zero-R state.

    Sample B

    the first few applications of VGonly seen during

    [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014

    VG (V)

    continuous & reversible control of normal zero-R transition!

    TC? ~ 120mK HC2? ~ 0.01T JC ? ~ 0.1A/cm

    TC ~ 400mK HC2 ~ 0.1T JC ~ 300A/cm

    SC at electrolyte/SrTiO3 interface gate-annealed SC SC at LaAlO3/SrTiO3 interface bulk superconductivity

    is Fragile

    102

    Zero-R State

  • 103

    Quantum critical phenomena

    Electrostatic carrier doping

    Mott transistor Exotic phonomena on the horizon! Zero-R state

  • [email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 104

    zzz

    high-k/Parylene to protect surface

    Filamentation

    Summary


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