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1Isao H. Inoue
Towards novel Mott FET: Concept, Present Status, and Future
National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Tem
p
Ordered State
Classical Critical Point
Super
CeCu2Si2Te
mp
Antiferro
Pressure
Quantum Critical Point
Physical Parameters
Quantum critical phenomena
Pressure
Super
UGe2
Tem
p
Ferro
2
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Phys. Parameters are alwayseither Pressure or Mag. Field
UGe2
Saxena et al., Nature 406, 587 (2000) [ Coleman, Nature 406, 580 (2000) ]
Ferro
Super
Pressure
Tem
p
Yuan et al., Science 302, 2104 (2003)
CeCu2Si2
AFSuper
Pressure
Tem
p
3
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Continuous and reversible control of electronic states on the verge
of the quantum critical point
Randomness-free method: quantum critical phenomena is
so vulnerable to disorders
4
For QCP study, we need
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Electrostatic Carrier Doping
6Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena
7Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena
8
9Before explaining what is Mott FET, lets revisit the basics of electrostatic carrier doping
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Field effect to an insulator
Channel material (insulator)
Gate electrode (metal)
Gate insulator+
-
+
-
+
-
+
-
+
-
Gate insulator
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 11
++ + ++ + + ++
- -- -
--
-- -
--
-- -
- ---
- -- -- --
-h+
h+h+
h+ h+
h+h+
h+h+h+
h+
h+
h+
h+h+
h+ h+
depletion layer
- --
- - -
-- -
--
-- -
- ---
- -- -- --
-h+
h+
h+h+
h+ h+
h+
h+ h+
h+
h+
h+
h+h+
h+h+
h+
h+h+
h+
h+h+
h+
h+
h+h+
- acceptorh+ hole
Gate electrode (metal)
Channel material (doped p-type Si)
Conventional MOSFET
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+++
+++
+++
--
--
- -
---
--
--
-
-- -
-
---
--
--
-h+
h+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
h+h+
depletion layer (~m)
VG =V ins +
V ins
chemical potential
E C
E int
E V
How "Channel" is created
+++
+++
+++
--
--
- -
---
-
--
-
-- -
-
---
--
--h
+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
+ - -
++
--
--
++
++ -+
-+
depletion layer (~m)
chemical potential
V ins
inversion layer (~nm) = channel
VG =V ins +
E C
E int
E V
However, present Metal - Oxide - Semicondoctor FET is faced with a fatal
problem
13
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H. Takamizawa et al., Appl. Phys. Express 4, 036601 (2011)
Laser-assisted atom probe tomography (LAPT) picture
14
Dopants in Si MOSFET
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20nm device has only ~10 carriers.
15
H. Takamizawa et al., Appl. Phys. Express 4, 036601 (2011)
Laser-assisted atom probe tomography (LAPT) picture
20nm
20nm
5nm
M. R. Castell et al., Nature Materials 2, 129 (2003)3D atom probe (3DAP) picture
Dopants in Si MOSFET in 2020
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Present MOSFET++
+++
++
++
--
--
- -
---
-
--
-
-- -
-
---
--
--h
+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
+ - -
++
--
--
++
++ -+
-+
V ins
inversion layer (~nm) = channel
depletion layer (~m)
chemical potential
VG =V ins +
E C
E int
E V
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 17
Present MOSFET vs. Future one
++
++
+
-
--
--
-
+ -
++ -
+ -
+++
+++
+++
--
--
- -
---
-
--
-
-- -
-
---
--
--h
+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
+ - -
++
--
--
++
++ -+
-+
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 18
Channel is hardly created for small dopant density
++
++
+
- h+
--
--
-
too large accumulation layer no effective channel
VG =V ins+
V ins
chemical potential
E C
E int
E V
++
++
+
-
--
--
-
+ -
++ -
+ -
V ins
chemical potentialVG =V ins+
E C
E int
E V
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 19
Present MOSFET vs. Future one
++
++
+
-
--
--
-
+ -
++ -
+ -
no effective channel
VG =V ins+
V ins
chemical potential
E C
E int
E V
+++
+++
+++
--
--
- -
---
-
--
-
-- -
-
---
--
--h
+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
+ - -
++
--
--
++
++ -+
-+
V ins
inversion layer (~nm) = channel
depletion layer (~m)
chemical potential
VG =V ins +
E C
E int
E V
Miniaturisation Limit!!
Alternative of MOSFET is an urgent necessity.
But what can replace S?
20
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 21
Mott FET may be the only choice
First transistor (Bell Lab 1947)
Ge junction transistor (Bell Lab 1950)
Mott transistor (2020 ?)
22
Then, what is the Mott insulator?
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Band of electrons kinetic energy
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Valence Band
Conduction Band
Energy vs momentum plot
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when you are sleepy
Energy vs momentum plotEnergy vs momentum plot
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Density of States (DOS)
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Valence Band
Conduction Band
EF
DOS of the normal band insulator
D(E)
EE
k
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Conduction Band
EF
D(E)
E
k
DOS of the normal metal
EEF
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EF
D(E)
E
k
DOS of the normal metal
EEF
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D(E)
E
k
DOS of the normal metal
EEFEF
* *
m*
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D(E)
E
k
DOS of the normal metal
EEFEF
* *
m* still metallic !!
heavy mass. "no" move.
32
Disappear !?
wheres Britney gone?
33
But before answering, we need to know
what enhances the effective mass?
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Electrons with a spin degree of freedom
Orbital of an atomic site: size = kinetic energy = band width
band width = W
AIST Aris AIST Tls
34
couch
Naive model of the Mott transition
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Pauli principle
Electron Correlations
= 0Electron
Correlations = U
35
Hubbard Model
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transfer is not available
transfer is available
W (>U)
Competition between U and W
W (
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
U < W U > W
37
Competition between U and W
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
U On-site Coulomb Repulsions Energy W One-electron BandwidthKinetic Energy
Charge fluctuation is completely suppressed (as if it were a fully-filled band insulator)
Competition between U and W
38
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Charge fluctuation is completely suppressed (as if it were a fully-filled band insulator)
Competition between U and W
39
U On-site Coulomb Repulsions Energy W One-electron BandwidthKinetic Energy
40
What is an answer for "Disappear !?"
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Evolution of the density of states
G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).
41
U/W = 0
U/W = 0.5
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).
42
Evolution of the density of states
a renormalized band heavy-mass electrons (holes) forms a band.
incoherent states discrete energy levels of
localised electrons (holes).
U/W = 0
U/W = 0.5
U/W = 1.2
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).
43
Evolution of the density of states
U/W = 0
U/W = 0.5
U/W = 1.2
U/W = 2
Finally the gap opens!! between the Hubbard bands though they are not the bands
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Correlated Metal
Mott Insulator
G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).
44
Evolution of the density of states
[email protected] http://staff.aist.go.jp/i.inoue/China-Japan-Korea RRAM and FO WS@Beijing 16 Jan. 2014
ex
p(
) (a
rb. u
nits
)-3.0 -2.0 -1.0 0.0 1.0
(eV)
Quasi-particle spectra of Ca1-xSr xVO3
obtained by UPS
band calc. x=0.9 x=0.8 x=0.4 x=0.3
Isao H. Inoue et al., Phys. Rev. Lett. (1995)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 45
G. Kotliar and D. Vollhardt Phys. Today 57, 53 (2004).
First experimental evidence
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 46
MOSFET in 2020On State Off State
Mott FETVG
M. R. Castell et al., Nature Materials 2, 129 (2003)
3D atom probe (3DAP) picture
20nm device has more than 100,000 carriers. Carrier density is independent of device sizes.
No miniatur. prob. in Mott FET
20nm device has only ~20 carriers. Almost the end of the miniaturisation
47
Mott FET ?!
Mott insulator is an insulator How can you dope it carriers
by electric field?
[email protected] http://staff.aist.go.jp/i.inoue/China-Japan-Korea RRAM and FO WS@Beijing 16 Jan. 2014
J. Chakhalian, A. J. Millis and J. Rondinelli, Nature Materials 11, 92 (2012)
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Apply E to a Mott insulator
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++
++
+
--
--
- + -
Apply E to a Mott insulator
VG =V ins+
V ins
E int
VG =V ins+
V ins
E int
+ -
+ -
+ -
+ -
+ -
+ -
+ -
+ -
E UHB
E LHB
E UHB
E LHB
chemical potential
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++
++
+
--
--
- + -+ -+ -
+ -+ -
+ -+ -
+ -+ -
+ -
Apply E to a Mott insulator
VG =V ins
V insE UHBE int
VG =V ins+
V ins
E int
sudden appearance of metallic state
E LHB
E UHB
E LHB
screening length (~nm)
chemical potential
Mott insulators ionic crystals (because of the strong electron correlations)
Defects form easily under large electric field.
51
Largest obstacle to realise the Mott FET
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TiO2-x Co1-xO, Fe1-xO, Ni1-xO valence electron
1st electron ionisation
2nd electron ionisation
neutral composite
neutral composite
valence electron
Defects in transition-metal oxides
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 53
M. Janousch et al., Adv. Mat. 19, 2232 (2007)
0.2 mol% Cr-doped SrTiO3
By applying 0.1MV/cm for about 30 min
Pt
Pt
Vo are created, distributed in the channel, and form a metallic path.
VO creation by electric-field
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Electrochemical reaction?
Science 339, 1402 (2013)VO2VO2
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 55
Hydrogen doping?
Nano Letters 12, 2988 (2012)
Modulation of the Electrical Properties of VO2 Nanobeams Using anIonic Liquid as a Gating MediumHeng Ji, Jiang Wei, and Douglas Natelson*
Department of Physics and Astronomy, MS 61, Rice University, 6100 Main Street, Houston, Texas 77005, United States
ABSTRACT: Vanadium dioxide (VO2) is a strongly corre-lated transition metal oxide with a dramatic metalinsulatortransition at 67 C. Researchers have long been interested inmanipulating this transition via the eld eect. Here we reportattempts to modulate this transition in single-crystal VO2nanowires via electrochemical gating using ionic liquids.Stray water contamination in the ionic liquid leads to large,slow, hysteretic conductance responses to changes in the gatepotential, allowing tuning of the activation energy of theconductance in the insulating state. We suggest that thesechanges are the result of electrochemical doping via hydrogen. In the absence of this chemical eect, gate response is minimal,suggesting that signicant eld-eect modulation of the metalinsulator transition is not possible, at least along thecrystallographic directions relevant in these nanowires.KEYWORDS: Vanadium dioxide, single crystal nanowire, ionic liquid, electrochemical doping, hydrogen doping
VO2 is a classic strongly correlated material that exhibits adramatic metal to insulator transition1 (MIT) whencooled through 67 C, accompanied by a simultaneousstructural transition from a high-temperature rutile to a low-temperature monoclinic structure. Temperature, pressure, andchemical doping can signicantly aect the phase transition2,3
by shifting the transition temperature or even stabilizing otherphases (M2 and triclinic phases).There has long been interest in electrostatic modulation of
the MIT in VO2, but this has remained a challenge. First, therelatively high carrier density observed by Hall measurementssuggests that VO2 has a very short screening length
4,5 thatlimits the electrostatic gating eciency, conning the eect ofthe gate to an extremely thin channel layer. Second, withconventional oxide gate dielectrics such as SiO2, Al2O3, andHfO2
5 leakage current often appears with applied high gatevoltage, and this current can cause self-heating and aect theMIT. Inhomogeneity of the sample due to strain and grainboundaries can also complicate matters. Gating during thephase coexistence portion of the transition in polycrystallinethin lms has shown some eect on the percolation of themetallic phase.6 Recent measurements with conventional gatedielectrics show indications of switching in the Raman responseas a function of gate,7 and small gate modulations of theconductance with long time constants5 and slow hysteresis.8
Recently, electrolytic gating with a very high inducedconcentration of carriers9 (8 1014cm2) has been realizedsuccessfully on various materials by using an ionic liquid as theelectrolyte. A gate-driven insulator-to-metal transition has beenachieved on wide band gap (3.3 eV) semiconductor ZnOtransistor.10 In the insulators SrTiO3
11 and KTaO3,12 super-
conductivity was observed in ionic liquid-gated single-crystaldevices. Very recent ionic liquid gating experiments on
sputtered VO2 lms13 have shown a reduction in channel
resistance at positive gate potentials in the monoclinic phasewith a slow time dependence to the response.In this paper, we report our examination of ionic liquid
gating of single crystal VO2 nanowires and nd that even withwhat should be extremely large accumulation of ionic charge onthe VO2 surface, when dry ionic liquid is employed, there is noobservable electrostatically induced phase transition. Withwater-containing ionic liquid or other hydrogen-containingliquids used as electrolytes, we observe large, slow, hystereticgate response. Following positive gate bias applied attemperatures above the transition, the low-temperatureconductance is strongly increased, and this increase is persistentfollowing the removal of any gate voltage. We ascribe thesechanges to electrochemical doping of the bulk of the VO2crystals, most likely with hydrogen, that can signicantly changeVO2s electrical properties.Rather than polycrystalline lms, in this work we used
individual single-crystal VO2 nanobeams grown by vapor phasetransport.14 These crystals possess a highly homogeneoussurface (1 nm roughness) and minimal lattice defectscompared to conventionally deposited VO2 lms. From ourprevious research, the electric transport properties based ontwo-terminal VO2 nanostructures have been well character-ized.15 A typical single-crystal nanowire has a width and athickness of a few hundred nanometers, and a length of tens ofmicrometers. The contacts for the three-terminal devices werepatterned by electron-beam lithography and Ti/Au (typically 5
Received: February 22, 2012Revised: April 6, 2012Published: May 11, 2012
Letter
pubs.acs.org/NanoLett
2012 American Chemical Society 2988 dx.doi.org/10.1021/nl300741h | Nano Lett. 2012, 12, 29882992
Modulation of the Electrical Properties of VO2 Nanobeams Using anIonic Liquid as a Gating MediumHeng Ji, Jiang Wei, and Douglas Natelson*
Department of Physics and Astronomy, MS 61, Rice University, 6100 Main Street, Houston, Texas 77005, United States
ABSTRACT: Vanadium dioxide (VO2) is a strongly corre-lated transition metal oxide with a dramatic metalinsulatortransition at 67 C. Researchers have long been interested inmanipulating this transition via the eld eect. Here we reportattempts to modulate this transition in single-crystal VO2nanowires via electrochemical gating using ionic liquids.Stray water contamination in the ionic liquid leads to large,slow, hysteretic conductance responses to changes in the gatepotential, allowing tuning of the activation energy of theconductance in the insulating state. We suggest that thesechanges are the result of electrochemical doping via hydrogen. In the absence of this chemical eect, gate response is minimal,suggesting that signicant eld-eect modulation of the metalinsulator transition is not possible, at least along thecrystallographic directions relevant in these nanowires.KEYWORDS: Vanadium dioxide, single crystal nanowire, ionic liquid, electrochemical doping, hydrogen doping
VO2 is a classic strongly correlated material that exhibits adramatic metal to insulator transition1 (MIT) whencooled through 67 C, accompanied by a simultaneousstructural transition from a high-temperature rutile to a low-temperature monoclinic structure. Temperature, pressure, andchemical doping can signicantly aect the phase transition2,3
by shifting the transition temperature or even stabilizing otherphases (M2 and triclinic phases).There has long been interest in electrostatic modulation of
the MIT in VO2, but this has remained a challenge. First, therelatively high carrier density observed by Hall measurementssuggests that VO2 has a very short screening length
4,5 thatlimits the electrostatic gating eciency, conning the eect ofthe gate to an extremely thin channel layer. Second, withconventional oxide gate dielectrics such as SiO2, Al2O3, andHfO2
5 leakage current often appears with applied high gatevoltage, and this current can cause self-heating and aect theMIT. Inhomogeneity of the sample due to strain and grainboundaries can also complicate matters. Gating during thephase coexistence portion of the transition in polycrystallinethin lms has shown some eect on the percolation of themetallic phase.6 Recent measurements with conventional gatedielectrics show indications of switching in the Raman responseas a function of gate,7 and small gate modulations of theconductance with long time constants5 and slow hysteresis.8
Recently, electrolytic gating with a very high inducedconcentration of carriers9 (8 1014cm2) has been realizedsuccessfully on various materials by using an ionic liquid as theelectrolyte. A gate-driven insulator-to-metal transition has beenachieved on wide band gap (3.3 eV) semiconductor ZnOtransistor.10 In the insulators SrTiO3
11 and KTaO3,12 super-
conductivity was observed in ionic liquid-gated single-crystaldevices. Very recent ionic liquid gating experiments on
sputtered VO2 lms13 have shown a reduction in channel
resistance at positive gate potentials in the monoclinic phasewith a slow time dependence to the response.In this paper, we report our examination of ionic liquid
gating of single crystal VO2 nanowires and nd that even withwhat should be extremely large accumulation of ionic charge onthe VO2 surface, when dry ionic liquid is employed, there is noobservable electrostatically induced phase transition. Withwater-containing ionic liquid or other hydrogen-containingliquids used as electrolytes, we observe large, slow, hystereticgate response. Following positive gate bias applied attemperatures above the transition, the low-temperatureconductance is strongly increased, and this increase is persistentfollowing the removal of any gate voltage. We ascribe thesechanges to electrochemical doping of the bulk of the VO2crystals, most likely with hydrogen, that can signicantly changeVO2s electrical properties.Rather than polycrystalline lms, in this work we used
individual single-crystal VO2 nanobeams grown by vapor phasetransport.14 These crystals possess a highly homogeneoussurface (1 nm roughness) and minimal lattice defectscompared to conventionally deposited VO2 lms. From ourprevious research, the electric transport properties based ontwo-terminal VO2 nanostructures have been well character-ized.15 A typical single-crystal nanowire has a width and athickness of a few hundred nanometers, and a length of tens ofmicrometers. The contacts for the three-terminal devices werepatterned by electron-beam lithography and Ti/Au (typically 5
Received: February 22, 2012Revised: April 6, 2012Published: May 11, 2012
Letter
pubs.acs.org/NanoLett
2012 American Chemical Society 2988 dx.doi.org/10.1021/nl300741h | Nano Lett. 2012, 12, 29882992
56
Mott insulators ionic crystals (because of the strong electron correlations)
Defects form easily under electric field.
Can we apply electric field to Mott insulators without causing
electrochemical reactions?
57
Isao H. Inoue Neeraj Kumar Ai Kitou
Use Parylene to suppress
the defects formation
National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
58
Isao H. Inoue Ai Kitou
Use Parylene to suppress
the defects formation
National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
Neeraj Kumar (AIST)
Pablo Stoliar (CIC nanoGUNE)
59
Parylene !?
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
"Biocompatible glass is coated with protective substances for anti-migration and insulating properties and this is where the Parylene C coating comes.
It also protects the microchip from natural substances in the body, that may penetrate through micro-cracks caused by mechanical damages."
From "moving a pet to Australia" website
by ParyleneProtect surface
Parylene coated rotors and stators are used to control the Canadian arm for NASA Space Shuttle.
Parylene coated circuit boards provides excellent resistance to moisture, chemicals, and mold. Circuit boards for medical equipment can be steam and gamma sterilised. Parylene can also prevent dendrite and tin whisker growth.
From "Paratronix Inc." website
Parylene coating of paper documents, autographs, and photos retards the aging process and protects from moisture, mold, and chemicals.
60
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Creation of oxygen vacancies is suppressed. Channel is kept clean.
P.-J. Chen et al., Lab on a Chip 6, 803 (2006)
conformal coating
by ParyleneProtect oxide surface
oxides
61
62
High-k/Parylene bilayer to accumulate more carriers
must be very thin
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
"Biocompatible glass is coated with protective substances for anti-migration and insulating properties and this is where the Parylene C coating comes.
It also protects the microchip from natural substances in the body, that may penetrate through micro-cracks caused by mechanical damages."
From "moving a pet to Australia" website
In General, Parylene film is very thick
Parylene coated rotors and stators are used to control the Canadian arm for NASA Space Shuttle.
Parylene coated circuit boards provides excellent resistance to moisture, chemicals, and mold. Circuit boards for medical equipment can be steam and gamma sterilised. Parylene can also prevent dendrite and tin whisker growth.
From "Paratronix Inc." website
Parylene coating of paper documents, autographs, and photos retards the aging process and protects from moisture, mold, and chemicals.
Parylene film in most of the literatures are more than ~1m thick.
63
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High-k (HfO2, Ta2O5, etc.)/Parylene bilayer
Hybrid gate insulator
high-k materials (~15 < < ~25) + Parylene-C (=3.2)
Isao Inoue and Hisashi Shima, Japan Patent Number: 5522688, Date of Patent: 18th April, 2014
64
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SrTiO3
AlHfO2
Au
Ti
parylene
BF-TEM image
65
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SrTiO3
Al
HfO2Ti
parylene
BF-TEM image
66
5nm
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
SrTiO3Al
HfO2
Au Ti
parylene
STEM-EDS mapping
67
68
Intel 4004 IC the original microprocessor or computer on a chip.
We are preparing FET devices using a conventional
photolithography
Source Drain
Gate
V+V
VH
VH+
4m12m
AIST 2014 designed for 4-probe and Hall effect measurements to study "physics of Mott FET.
Doped semiconductor case
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 69
+++
+++
+++
--
--
- -
---
--
--
-
-- -
-
---
--
--
-h+
h+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
h+h+
depletion layer (~m)
VG =V ins +
V ins
chemical potential
E C
E int
E V
+++
+++
+++
--
--
- -
---
-
--
-
-- -
-
---
--
--h
+h+
h+h+
h+h+
h+h+
h+
h+
h+
h+
h+h+
+ - -
++
--
--
++
++ -+
-+
depletion layer (~m)
chemical potential
V ins
inversion layer (~nm) = channel
VG =V ins +
E C
E int
E V
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 70
Large single crystals are commercially available
1cmStep-and-terrace surface is easily obtained
perovskite structure Insulator with ~3.3eV band gap
SrTiO3 as a benchmark
Not a Mott insulator, though.
5[nm
]0
0
400
800800
400
SrTiO3
From a catalog of SHIKOSHA Co.Ltd.
SrTiO3 is widely used as a substrate
of oxide thin-film growth
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 71
++
++
+
--
--
- + -
VG =V ins+
V ins
VG =V ins+
V ins
+ -
+ -
+ -
+ -
+ -
+ -
+ -
+ -
E C
E V
E C
E V
chemical potentialF
sub-threshold region ( < ) strongly inverted region ( > )
F
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72
sub-threshold region ( < F )
strongly inverted region ( > F )
=175mV/decades
Cch/Cins = 1.8
F = 0.6eV
Vth= 1.6V
Very small sub-threshold swing
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Very small sub-threshold swing
73
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
~1014cm-2 and ~10 cm2/Vs
74
10
0.1
0.001
10k
1M
1G
h/e2
@300K
breakdown
@300K
L = 12m W = 4m
HfO2(20nm)/Parylene-C(6nm)/SrTiO3
75
High-k/Parylene/SrTiO3
cleaner interface
continuous and large doping control
76
High-k/Parylene/Mott Insultor
cleaner interface
continuous and large doping control
Coming Soon!
77
Half-Time Summary1. Why we need the Mott transistor? - miniaturisation limit!
2. How to avoid defects formation at the interface - Parylene!
78
Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena on the horizon!
79
Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena on the horizon!
Several mor
e
slides to sho
w
if time allows
80
National Institute of Advanced Industrial Science & Technology (AIST) (Japan)
Christos Panagopoulos
Nanyang Technological University (Singapore)
Azar B. Eyvazov*
Isao H. Inoue
CNRS & Universit Paris Sud (France)
Pablo Stoliar** Marcelo J. Rozenberg***
*also AIST (now a PhD student in Cornell University, US)
**also Universidad Nacional de San Martin, Argentina, and Universit de Nantes, France
***also Universidad de Buenos Aires, Argentina
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Unusual I-V curves
Hardly seen in Al2O3/SrTiO3 Al2O3/SrTiO3 has some amount of carriers from the first
K. Ueno et al., App. Phys. Lett. 83, 1755 (2003)
10-6
81
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
When increasing VSD
10-6V/VSD
I SD
V/VSD
I SD
0.3mm/0.8mm = 0.375
increasing VSD for large fixed VG
0.3mm/0.8mm = 0.375
normal
abnormal !
increasing VSD for small fixed VG
82
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
10-6
When increasing VG
V/VSD
I SD
V/VSD
I SD
0.3mm/0.8mm = 0.375
0.3mm/0.8mm = 0.375
increasing VG for any fixed VSD
normal
abnormal !
not observed
83
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Proc. Phys. Soc. 82, 954 (1963)
Nonlinear by E. Scholl, Cambridge Univ. Press (2001)
Negative Differential Resistance
84
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V/VSD
I SD
0.3mm/0.8mm = 0.375
increasing VG for any fixed VSD
current path!
V/VSD
I SD
0.3mm/0.8mm = 0.375
increasing VSD for small fixed VG
field domain!
Negative Differential Resistance
85
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Numerical simulation: results
86
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Comparison of Exp & Calc
10-6
87
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
Experiment Calculation
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Simulation of path formation
88
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
Spatio-temporal current paths. All disappears when VG turns off. Not due to oxygen defects!!
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
Schematic picture of channel
89
A. B. Eyvazov et al., Sci. Rep. 3, 1721 (2013)
Spatio-temporal current paths. All disappears when VG turns off. Not due to oxygen defects!!
High-k/Parylene/SrTiO3 FET
cleaner interface
filamentation90
91
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
1011 1012
H. Nakamura et al., Appl. Phys. Lett. 89, 133504 (2006)
h/e2=25.8k
92
Filamentation at 7K
93
Filamentation Occurs even at 7K!!
Then, what happens at ultra-low T
superconductivity?
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 94
34
SC at LaAlO3/SrTiO3 interface
S. Thiel et al., Science 313, 1942 (2006)
N. Reyren et al., Science 317, 1196 (2007)
TC ~ 200mK HC2 ~ 0.1T JC ~ 100A/cmnonvolatile
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 95
34
SC at electrolyte/SrTiO3 interface
K. Ueno et al., Nature Materials 7, 855 (2008)
TC ~ 400mK HC2 ~ 0.1T JC ~ 300A/cm
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 96
33
SC of bulk SrTiO3-
M. Jourdan et al., Eur. Phys. J. B 33, 25 (2003)
TC ~ 140mK HC2 ~ 0.3T JC ~ 100A/cm2 ~ 100A/cm (for t10nm) Good agreement in the orders with
1) SC at LaAlO3/SrTiO3 interface, 2) SC at electrolyte/SrTiO3 interface,
and
3) our gate-annealed SC (next slide).
31
Sample A
VG threshold is lowered. Nonvolatile metallic state.
Bulk-like superconductivity due to oxygen vacancies?
TC ~ 350mK HC2 ~ 0.1T
prolonged (one-day) applicationof large VG
SC was seen only after
Al electrode
Volta
ge (m
V)
0
0.2
Temperature (K)1.8 2.21.4
H. Nakamura et al., J. Phys. Soc. Jpn. 78, 083713 (2009).
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SC in "gate-annealed" parylene/SrTiO3
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014 98
32
Oxygen vacancy creation on SrTiO3
M. Janousch et al., Adv. Mat. 19, 2232 (2007)
0.2 mol% Cr-doped SrTiO3
By applying 105V/cm for about 30 min
Pt
Pt
Oxygen vacancies are created, and distributed in the channel, and form a metallic path.
99
All the superconductivity of SrTiO3 interface shown here might be caused by oxygen defects
Is this the conclusion?
100
Is this the conclusion?
No. we observed another
All the superconductivity of SrTiO3 interface shown here might be caused by oxygen defects
20mK
7K
39
1011 1012
Domain formation of doped carrier and percolation transition
h/e2=25.8k
1011 1012 1013
108
106
104
102
1
Gate-annealed superconductivity below 350mK
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Spatio-temporal current paths. All disappears when VG turns off. Not due to oxygen defects!!
due to oxygen defects!!
Another Zero-R State
35
oxygen vacancies due to VG application hinder this fragile zero-R state.
Sample B
the first few applications of VGonly seen during
[email protected] http://staff.aist.go.jp/i.inoue/Seminar @ Universitat Autnoma de Barcelona, Spain 9 Dec 2014
VG (V)
continuous & reversible control of normal zero-R transition!
TC? ~ 120mK HC2? ~ 0.01T JC ? ~ 0.1A/cm
TC ~ 400mK HC2 ~ 0.1T JC ~ 300A/cm
SC at electrolyte/SrTiO3 interface gate-annealed SC SC at LaAlO3/SrTiO3 interface bulk superconductivity
is Fragile
102
Zero-R State
103
Quantum critical phenomena
Electrostatic carrier doping
Mott transistor Exotic phonomena on the horizon! Zero-R state
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zzz
high-k/Parylene to protect surface
Filamentation
Summary