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TTSC Standardization Study Group on Erik Jan Marinissen IMEC vzw Leuven, Belgium [email protected] Introduction IEEE sponsors Computer Society sponsors TTTC sponsors TTSC sponsors SSG on 3D-Test SSG membership is open to professionals • IEEE-SA Provides facilities Web hosting E-mail reflector facility Will own and publish resulting standards Saman Adham Neetu Agrawal Lorena Anghel Patrick Y Au Paolo Bernardi Sandeep Bhatia Craig Bullock Krishnendu Chakrabarty Sreejit Chakravarty Vincent Chalendard Ji-Jan Chen Vivek Chickermane CJ Clark Eric Cormack Adam Cron Al Crouch Shinichi Domae Ted Eaton Heiko Ehrenberg Bill Eklow Klaus Förster Study Group Members Participating Companies, Institutes, Universities Die and Stack Test Status 1. DfT test access architecture PAR ready to be filed 2. Wafer probe interface Under discussion Access for Board-Level Users 3. Board-level interconnect test Under discussion 4. Access to embedded instruments Under discussion Test Data Formats 5. Wafer map and device tracking Handled, SEMI E142 6. Standard Test Data Format (STDF) On SEMI STDF agenda Identified Standardization Needs Die and Stack Test 1. 3D DfT Test Access Architecture – Die-level wrapper Based on IEEE 1500 or IEEE 1149.1 Support on pre-bond and post-bond testing 2. Wafer Probe Interface – Wafer probing on TSVs / micro-bumps is challenging Small pitch; small probe area Probe damage might impair downstream bonding – Wafer probe industry would be helped by standardization Standard pad pitches Standard pad footprints Standard pad materials and designs Benefits also for design, assembly, second sourcing, ... Access for Board-Level Users Test Data Formats 5+6. Test Data Formats Wafer Maps SEMI G81/G85 Pass/fail information per die obsolete Inkless Assembly and Single-Device Tracking SEMI E142 Die to wafer location and wafer processing • Already Die to assembly, packaging, and test processes handles All dies in multi-chip package 3D Standard Test Data Format (STDF) SEMI STDF-v4 File format for (diagnostic) IC test data collection • Requires Currently at STDF-v4 (2007), developing JTDF extension Charter Inventorize need for and timeliness of standards in 3D test and DfT If appropriate, formulate Project Authorization Requests (PARs) for starting up an IEEE Standard Development Working Group (SDWG) Organization & Participation 60+2 participants from companies/institutes around the globe Chair: Erik Jan Marinissen (IMEC) Activities to Date Active per January 2010 Public web site: http://grouper.ieee.org/groups/3Dtest/ Private web site and e-mail reflector for internal communication Weekly WebEx conference calls (provided by Cisco Systems) 3. Board-Level Interconnect Test Via on-chip DfT, a.k.a. “JTAG”: IEEE Std 1149.1 Test Access Port (TAP) External I/Os distributed over Multiple Dies – For example due to Stacks with TSVs + wire-bonds Pass-through-only TSVs – JTAG distributed over multiple dies – Board-level test needs to know this in a standardized view 4. Access to Embedded Instruments For today’s 2D Chips and Boards JTAG TAP reused for alternative purposes BIST, diagnosis, silicon debug, FPGA programming, SW debug, etc. Access to ‘embedded instruments’: monitors, sensors, etc. (IEEE P1687, a.k.a. “Internal-JTAG”) Extension to 3D-SICs Purpose: enable this type of usage also for 3D-SICs Stack might contain multiple TAP Controllers Organization Chart + URLs http://www.ieee.org http://www.computer.org http://tab.computer.org/tttc http://grouper.ieee.org/groups/ttsg Test Technology Standards Committee http://grouper.ieee.org/groups/3Dtest/ http://standards.ieee.org IEEE Standards Association Test Technology Technical Council Standardization Study Group on 3D Test Jan Olaf Gaudestad Sandeep Goel Michelangelo Grosso • Ruifeng Guo Said Hamdioui Klaus Helmreich Michael Higgins Gert Jervan Hongshin Jun Rohit Kapur Ajay Khoche Santosh J Kulkarni Michael Laisne Philippe Lebourg Stephane Lecomte Hans Manhaeve Erik Jan Marinissen Teresa McLaurin Brandon Noia Jay Orbon Ken Parker John Potter Bill Price Herb Reiter Mike Ricchetti Andrew Richardson Daniel Rishavy Jochen Rivoir Volker Schöber Craig Stephan Eric Strid Thomas Thaerigen Brian Turmell Jouke Verbree • Ioannis Voyiatzis Michael Wahl • Min-Jer Wang Lee Whetsel Yervant Zorian + Frans de Jong + Frank Pöhl pad pad TestElevators TSV TSV TSV TSV TSV TSV TSV TSV TSV TSV TSV TSV Board pin pin Die 1 Die 2 Die 3 Core 3 Core 2.1 Core 1.1 Core 1.2 Core 1.3 Core 2.2 BIST TDC core wrapper core wrapper core wrapper core wrapper core wrapper core wrapper pin pin pin pin TDI TDO TAM TAM TAM die wrapper die wrapper die wrapper TDC TDC TDC pad pad TestElevators TestElevators TSV TSV TSV TSV TSV TSV TSV TSV scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain scan chain TAM TAM TAM TSV TSV TSV TSV TestElevators IEEE 1149.1 Boundary Scan Source: Agilent Technologies Source: Philips Electronics Source: IMEC Source: Kinesys
Transcript
Page 1: TTSC Standardization Study Group · • Small pitch; small probe area • Probe damage might impair downstream bonding – Wafer probe industry would be helped by standardization

TTSC Standardization Study Groupon

Erik Jan MarinissenIMEC vzwLeuven, [email protected]

Introduction

• IEEE sponsorsComputer Society sponsorsTTTC sponsorsTTSC sponsorsSSG on 3D-Test

• SSG membership isopen to professionals

• IEEE-SA– Provides facilities

• Web hosting• E-mail reflector facility

– Will own and publishresulting standards

• Saman Adham• Neetu Agrawal• Lorena Anghel• Patrick Y Au• Paolo Bernardi• Sandeep Bhatia• Craig Bullock• Krishnendu Chakrabarty• Sreejit Chakravarty• Vincent Chalendard• Ji-Jan Chen• Vivek Chickermane• CJ Clark• Eric Cormack• Adam Cron• Al Crouch• Shinichi Domae• Ted Eaton• Heiko Ehrenberg• Bill Eklow• Klaus Förster

Study Group Members Participating Companies, Institutes, Universities

• Die and Stack Test Status1. DfT test access architecture PAR ready to be filed2. Wafer probe interface Under discussion

• Access for Board-Level Users3. Board-level interconnect test Under discussion4. Access to embedded instruments Under discussion

• Test Data Formats5. Wafer map and device tracking Handled, SEMI E1426. Standard Test Data Format (STDF) On SEMI STDF agenda

Identified Standardization Needs Die and Stack Test1. 3D DfT Test Access Architecture

– Die-level wrapper• Based on IEEE 1500 or IEEE 1149.1• Support on pre-bond and post-bond testing

2. Wafer Probe Interface– Wafer probing on TSVs / micro-bumps is challenging

• Small pitch; small probe area• Probe damage might impair downstream bonding

– Wafer probe industry would be helped by standardization• Standard pad pitches• Standard pad footprints• Standard pad materials and designs

Benefits also for design, assembly, second sourcing, ...

Access for Board-Level Users Test Data Formats

5+6. Test Data Formats• Wafer Maps SEMI G81/G85

– Pass/fail information per die • obsolete

• Inkless Assembly and Single-Device Tracking SEMI E142– Die to wafer location and wafer processing • Already– Die to assembly, packaging, and test processes handles– All dies in multi-chip package 3D

• Standard Test Data Format (STDF) SEMI STDF-v4– File format for (diagnostic) IC test data collection • Requires– Currently at STDF-v4 (2007), developing JTDF extension

• Charter• Inventorize need for and timeliness of standards in 3D test and DfT• If appropriate, formulate Project Authorization Requests (PARs) for starting up an IEEE Standard

Development Working Group (SDWG)

• Organization & Participation– 60+2 participants from companies/institutes around the globe– Chair: Erik Jan Marinissen (IMEC)

• Activities to Date– Active per January 2010– Public web site: http://grouper.ieee.org/groups/3Dtest/– Private web site and e-mail reflector for internal communication– Weekly WebEx conference calls (provided by Cisco Systems)

3. Board-Level Interconnect Test• Via on-chip DfT, a.k.a. “JTAG”: IEEE Std 1149.1 Test Access Port (TAP)• External I/Os distributed over Multiple Dies

– For example due to• Stacks with TSVs + wire-bonds• Pass-through-only TSVs

– JTAG distributed over multiple dies– Board-level test needs to know this

in a standardized view

4. Access to Embedded Instruments• For today’s 2D Chips and Boards

– JTAG TAP reused for alternative purposes• BIST, diagnosis, silicon debug, FPGA programming, SW debug, etc.• Access to ‘embedded instruments’: monitors, sensors, etc. (IEEE P1687, a.k.a. “Internal-JTAG”)

• Extension to 3D-SICs– Purpose: enable this type of usage also for 3D-SICs– Stack might contain multiple TAP Controllers

Organization Chart + URLs

http://www.ieee.org

http://www.computer.org

http://tab.computer.org/tttc

http://grouper.ieee.org/groups/ttsg

Test TechnologyStandards Committee

http://grouper.ieee.org/groups/3Dtest/

http://standards.ieee.org

IEEE StandardsAssociation

Test TechnologyTechnical Council

StandardizationStudy Group on 3D Test

• Jan Olaf Gaudestad• Sandeep Goel• Michelangelo Grosso• Ruifeng Guo• Said Hamdioui• Klaus Helmreich• Michael Higgins• Gert Jervan• Hongshin Jun• Rohit Kapur• Ajay Khoche• Santosh J Kulkarni• Michael Laisne• Philippe Lebourg• Stephane Lecomte• Hans Manhaeve• Erik Jan Marinissen• Teresa McLaurin• Brandon Noia• Jay Orbon• Ken Parker

• John Potter• Bill Price• Herb Reiter• Mike Ricchetti• Andrew Richardson• Daniel Rishavy• Jochen Rivoir• Volker Schöber• Craig Stephan• Eric Strid• Thomas Thaerigen• Brian Turmell• Jouke Verbree• Ioannis Voyiatzis• Michael Wahl• Min-Jer Wang• Lee Whetsel• Yervant Zorian

+ Frans de Jong+ Frank Pöhl

padpadTestElevators

TSV

TSV

TSV

TSV

TSV

TSV

TSV

TSV

TSV

TSV

TSV

TSV

Boardpin pin

Die 1

Die 2

Die 3

Core 3

Core 2.1

Core 1.1 Core 1.2 Core 1.3

Core 2.2

BIS

TTD

C

core wrapper

core wrapper core wrapper

core wrappercore wrappercore wrapper

pin pin pin pinTDI TDO

TAM

TAM

TAM

die wrapper

die wrapper

die wrapper

TDC

TDC

TDC

padpadTestElevatorsTestElevators

TSV

TSV

TSV

TSV

TSV

TSV

TSV

TSV

scan chainscan chainscan chainscan chain

scan chainscan chainscan chainscan chain

scan chainscan chainscan chainscan chain

scan chainscan chainscan chainscan chain

scan chainscan chainscan chainscan chain

TAM

TAM

TAM

TSV

TSV

TSV

TSV

TestElevators

IEEE 1149.1 Boundary Scan

Source: Agilent Technologies

Source: Philips Electronics

Source: IMEC

Source: Kinesys

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