A P A S S I O N F O R P E R F E C T I O N
Turbopumps from Theory to Practice
Florian Henß
Pfeiffer Vacuum GmbH
35614 Asslar / Germany
A P A S S I O N F O R P E R F E C T I O N
■ 2© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Vacuum - History
� In 1890 Arthur Pfeiffer founds the company in Wetzlar
� First product: Remote control system for gas street lamps
A P A S S I O N F O R P E R F E C T I O N
■ 3© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Vacuum - First Vacuum Pump
� Electrical light replaces more and more the gas street lamps
� Demand of vacuum
� In 1908 First vacuum pump was developed
A P A S S I O N F O R P E R F E C T I O N
■ 4© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
History of High Vacuum
� It was possible to create high- and ultrahigh vacuum with diffusion pumps only
� High energy consumption
� Problem of oil contamination of the vacuum
A P A S S I O N F O R P E R F E C T I O N
■ 5© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Vacuum – Invention of the Turbopump
� In 1958 Pfeiffer Vacuum invents the worlds first Turbopump
� Invention was done by fortune
TVF 400
Pumping speed 140 l/s for N2
Weight: approx. 60 Kg
A P A S S I O N F O R P E R F E C T I O N
■ 6© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Vacuum – Turbopumps today
HiPace 300
Pumping speed 260 l/s for N2
Weight: 6.2 Kg
A P A S S I O N F O R P E R F E C T I O N
■ 7© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Turbopump Design
Classical Design Modern Design
Single flow designDouble flow design
A P A S S I O N F O R P E R F E C T I O N
■ 8© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Vacuum Turbopump Design
Permanent magnetic bearing
Holweck stage
Turbo blades
High vacuum flange
Ceramic ball bearing
Motor stator (BLDC)
Fore vacuum flange
Purge gas connection
Oil Lubricator
A P A S S I O N F O R P E R F E C T I O N
■ 9© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Pfeiffer Vacuum Maglev Turbopump Design
High vacuum flange
Turbo blades
Holweck stage
Drive- and levitation unit
Maglev electronic
Purge Gas
Cooling WaterFore Vacuum Flange
A P A S S I O N F O R P E R F E C T I O N
■ 10© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Bearing Types and Rotor Design
HiPace™ HiPace™M
Hybrid Bearing
Disk Rotor Hybrid Rotor
Maglev Bearing
High Vacuum
Roughing Vacuum
A P A S S I O N F O R P E R F E C T I O N
■ 11© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Bearing Types and Rotor Design
A P A S S I O N F O R P E R F E C T I O N
■ 12© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
15,4mm 15,4mm 15,4mm
Theory of the Pumping Effect
stator
rotor
1
2P1→2 P2→1
P1→2 > P2→1
u
u = 300 - 400 m/s
u
A P A S S I O N F O R P E R F E C T I O N
■ 13© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
15,4mm 15,4mm 15,4mm
Theory of Turbo Pumping Effect
Stator
Rotor
u c
1
2P1→2 P2→1
P1→2 > P2→1
u
u = 300 - 400 m/s
A P A S S I O N F O R P E R F E C T I O N
■ 14© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
10-5 10-4 10-3 10-2 10-1 100 101 102 103
Different Flow Areas
1
10
100
Viscous flow
Molecular
flow
Pressure [mbar]
Dia
me
ter
[cm
]
A P A S S I O N F O R P E R F E C T I O N
■ 15© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Different Flow Areas
0
50
100
150
200
250
300
1E-06 1E-05 1E-04 1E-03 1E-02 1E-01 1E+00 1E+01
High vacuum pressure [mbar, 10² Pa]
Pu
mp
ing
sp
ee
d [
l/s
]
HiPace 300; N2
Molecular flow
Kn > 10
Knudsen flow
Kn = 0,1…10
Viscous flow
Kn < 0,1
A P A S S I O N F O R P E R F E C T I O N
■ 16© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Important Technical Data
� Pumping speed S [l/s]
� Compression ratio (Q=0) : K0 = pVV / pHV
� Max. backing pressure: pFV max.[mbar]
� Max. gasload: Qmax. [mbar l / s]
(according to ISO 5302: Vacuum Technology TMP-Measurement and Performance)
A P A S S I O N F O R P E R F E C T I O N
■ 17© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Gas Type dependant Pumping Speed
0
50
100
150
200
250
300
1E-06 1E-05 1E-04 1E-03 1E-02 1E-01 1E+00 1E+01
High vacuum pressure [mbar, 10² Pa]
Pu
mp
ing
sp
ee
d [
l/s
]
HiPace 300; N2
HiPace 300; He
HiPace 300; Ar
HiPace 300; H2
A P A S S I O N F O R P E R F E C T I O N
■ 18© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Gas Type dependant Compression Ratio
A P A S S I O N F O R P E R F E C T I O N
■ 19© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Chamber Pressure Calculation
Gas
QP
QL
QDes
pFV
turbopump
backingpump
pHV
QP = Process gas flowQDes = Desorption gas flow QL = Gas flow caused by leaks
Gas Load Applications
⋅⋅⋅+++++
=
20
2FV
0
FV
effTMP,
LDesPHV
K
p
K
p
S
QQQp
2
2
G
G
H
H
A P A S S I O N F O R P E R F E C T I O N
■ 20© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Chamber Pressure Calculation
⋅⋅⋅++++
=
20
2FV
0
FV
effTMP,
LDesHV
K
p
K
p
S
QQp
2
2
G
G
H
HQL
QDes
pFV
turbopump
backingpump
pHV
QDes = Desorption gas flow QL = Gas flow caused by leaks
K0 = Compression ratiopFV = Fore vacuum pressure
UHV Applications
A P A S S I O N F O R P E R F E C T I O N
■ 21© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Backing Pump Selection for UHV
TMPRVP
H
HHV
mbarp
46
3
101101
1052
2⋅∗⋅
⋅
=
−
TMPioBPio
iAtm
iHVkk
pp
⋅
=
22
13105 HHVH mbarp −
⋅=
(w/o desorption effects)
(U)HV - partial pressure H2 in mbar
10 80 300 400_700 300C 12_1500 18_2300 2400M 3400M
Rotary Vane Pump
OnTool Booster
Multistage Roots Pump
Diaphragm Pump
1E-14
1E-13
1E-12
1E-11
1E-10
1E-09
1E-08
1E-07
1E-06
1E-05
HiPace
A P A S S I O N F O R P E R F E C T I O N
■ 22© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
The HiPaceTM Turbopumps
A P A S S I O N F O R P E R F E C T I O N
■ 23© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Turbo controller
High vacuum flange
Higher foreline pressure
Pumping Speed 10 to 700 l/s
Rotor with drag stage
Onsite bearing exchange possible. Cartridge!
Cooling water connection
Venting connection
Purge gas connection
A P A S S I O N F O R P E R F E C T I O N
■ 24© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Fore vacuum flange
Pumping Speed 1200 to 2300 l/s
Onsite bearing exchange possible. Cartridge!
Turbo rotor without holweck stage
Oil pump
High vacuum flange
AC- supply, integrated power supply
Turbo controller
A P A S S I O N F O R P E R F E C T I O N
■ 25© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Easy on Side Service
� Bearing installed in a cartridge
� Easy to exchange
� Exchange possible on side
� No adjustment of the bearing
� No rotor rebalancing required
� Service interval 4 years in
clean applications
A P A S S I O N F O R P E R F E C T I O N
■ 26© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Turbopump Controller (TC)
� Includes the drive electronic
� Controls the sensor system
� Informs the user of the status of
the pump
� Ensures a safe operation of the
turbo
� Provides different fieldbus
systems
A P A S S I O N F O R P E R F E C T I O N
■ 27© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
TCP 350 - Controller for radiation environment
� Turbo controller for
rack mounting
� For applications in radiation
environment
� No semiconductor elements
on the pump
A P A S S I O N F O R P E R F E C T I O N
■ 28© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Turbopumps with external Controller
TurbopumpElektronic TCP 350
Up to 1000m
A P A S S I O N F O R P E R F E C T I O N
■ 29© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
� Turbo rotors store an enormous amount of mech. energy!
� Comparable to the energy of a 1000 feet free falling turbopump!
� Rotor-crash-torque
� Sandwich-type rotors (like Pfeiffer HiPace family)
� Only 25% of the bell shaped type torque!
� Pump safety has to be verified
� Containment-Analysis and crash tests
� The chamber flange has to withstand the crash torque!
� Chamber design � user!
� Torque values to be found in the operating instructions
Safety of Turbopumps
A P A S S I O N F O R P E R F E C T I O N
■ 30© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Safety Tests at Pfeiffer Vacuum
A P A S S I O N F O R P E R F E C T I O N
■ 31© Pfeiffer Vacuum 2011 • Market Team R&D • Florian Henß • 2011-12-06
Application Limits
� Gas friction
� Magnetic fields
� Heat radiation
� Vibration
BP < 5mT
Rotor Temperature < 120°C
A P A S S I O N F O R P E R F E C T I O N
Turbopumps from Theory to Practice
Florian Henß
Pfeiffer Vacuum GmbH
35614 Asslar / Germany