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Ultra High Purity Valves - Carten Controls · Ultra High Purity Valves CMD-2048CV Series ULTRA-HIGH...

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Ultra High Purity Valves CMD-2048CV Series ULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM AND NON-RETURN VALVES FOR CRITICAL GAS APPLICATIONS > > > > Product Features Vacuum to 150PSIG working pressure Manual and Pneumatic operation with integrated non-return valve 100% Helium leak tested for high leak integrity and containment 100% DI-Water cleaned for ultra-cleanliness Compact design Prevents undesired reverse flow direction through the non-return valve Broad range of cracking pressures for the non-return valve Carten Controls Ltd is a member of the Fujikin Group.
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Page 1: Ultra High Purity Valves - Carten Controls · Ultra High Purity Valves CMD-2048CV Series ULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM ... Carten UHP valves are assembled

Ultra High Purity Valves

CMD-2048CV SeriesULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM

AND NON-RETURN VALVES FOR CRITICAL GAS APPLICATIONS>

>

>

>

Product Features• Vacuum to 150PSIG working pressure

• Manual and Pneumatic operation with

integrated non-return valve

• 100% Helium leak tested for high leak

integrity and containment

• 100% DI-Water cleaned for ultra-cleanliness

• Compact design

• Prevents undesired reverse flow direction

through the non-return valve

• Broad range of cracking pressures

for the non-return valve

Carten Controls Ltd is a member of the Fujikin Group.

Page 2: Ultra High Purity Valves - Carten Controls · Ultra High Purity Valves CMD-2048CV Series ULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM ... Carten UHP valves are assembled

Ultra High Purity ValvesUlUltrtra a HiHHighgh PPurritity y VaValvlveses

Carten CMDA-2048CV Series

Pneumatic Operated with Non-ReturnThe Carten CMDA-2048CV series integrated pneumatically

operated diaphragm and check valve are designed for high

performance gas and solvent distribution applications to control

back flow in critical systems. The pneumatic diaphragm valve is

available in normally closed and normally opened versions. All

Carten UHP valves are assembled and tested in a class 10

cleanroom which support the final cleanliness and purity for

Carten CMDA-2048CV range of products.

Applications for the CMD-2048CV series integrated diaphragm

and check valve include:

• Gas Cabinets

• Gas Chambers

• Gas Panels

• Gas Sticks

• Valve Manifold Boxes and Valve Manifold Panels

• Gas Isolation Boxes

• Processing tools

• Bubbler Systems and Canister Isolation Valves

• Prevention of undesired reverse flow

• Reactor gas line protection

Carten CMD-2048CV Series

Manual Multi-Turn Operated with

Non-ReturnThe Carten CMD-2048CV series integrated manual multi-turn

operated diaphragm and check valve are designed for high

performance gas and solvent distribution applications to control

back flow in critical systems. Carten provides a broad line of fixed

cracking pressure check valves on the diaphragm valve inlet to

control back flow in system, ranging from 2PSI (0.14Bar) up to

105PSI (7.24Bar) cracking pressures.

All Carten UHP valves are assembled and tested in a class 10

cleanroom which support the final cleanliness and purity for

Carten CMD-2048CV range of products. The CMD-2048CV series

delivers superior performance and lower overall operating costs

for low pressure applications in the semiconductor, photovoltaic,

flat panel display, LED, fibre-optic and other high technology

industries.

Carten CMDQ-2048CV Series

Quarter-Turn Operated with Non-ReturnThe Carten CMDQ-2048CV series integrated manual quarter-turn

operated diaphragm and check valve are designed for high

performance gas and solvent distribution applications to control

back flow in critical systems.

LOTO handle and devices are optional on the quarter-turn for

fixing the valve position in place. All Carten UHP valves are

assembled and tested in a class 10 cleanroom which support the

final cleanliness and purity for Carten CMDQ-2048CV range of

products.

Product Features

UHP High Performance Integrated Diaphragm and Non-Return Valves

Page 3: Ultra High Purity Valves - Carten Controls · Ultra High Purity Valves CMD-2048CV Series ULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM ... Carten UHP valves are assembled

Ultra High Purity ValvesUlUltrtrra a a HiHiH ghgh P Pururitity y VaValvlveses

Product Selection and Ordering InformationProduct Example 1

CMD250 2048 CV ¼” FSM FM ¼” FSM M 10PSICMD250 2048 CV 2048 CV ¼” FSM FM ¼” FSM FM ¼” FSM M ¼” FSM M 10PSI

54321

Product Example 2

CMDA250 2048 CV ¼” FSM FM ¼” FSM M 10PSI NCCMDA250 2048 CV 2048 CV ¼” FSM FM ¼” FSM FM ¼” FSM M ¼” FSM M 10PSI 10PSI NC

54321

Product Example 3

CMD-2048CV Series Key Performance DataSize

(inch)

¼”

Maximum

Working

Pressure

150 PSIG

(10.34Bar)

Pneumatic

Air Supply

Pressure

58~87 PSIG

(4~6Bar)

Temperature

Range

-10ºC ~ +80ºC

Leak Rate

(atm cc/sec)

1 x 10-9

CV

0.30 > CMD

0.25 > 2048

(at full flow)

Grade

EP, BA

CMDQ250 2048 CV ¼” FSM M(S) 2PSI LOTOCMDQ250 2048 CV 2048 CV ¼” FSM M(S) ¼” FSM M(S) 2PSI 2PSI LOTO

75321

6

Product Specifications

CMD-2048CV & CMDA-2048CV

SeriesPressure Rating

• Maximum rated working pressure:

150 PSIG (10.34 Bar)

• Pneumatic air supply pressure:

58~87 PSIG (4~6 Bar)

[CMDA-2048 series]

Materials of Construction (Wetted Area)

• Body:

316L stainless steel (Electropolished)

• Seat:

PCTFE (Vespel® optional for high-temperature

applications)

• Diaphragm:

Nickel-Cobalt Alloy for high durability and

corrosion properties

• Handle:

Aluminium (CMDQ and CMD series)

• Pneumatic Actuator:

Aluminium (CMDA series)

• Spring (2048 series only):

316L stainless steel

• Poppet (2048 series only):

316L stainless steel

• Seat (2048 series only):

316L stainless steel

• ‘O’ Ring (2048 series only):

Viton® (Kalrez® optional)

Key Performance Parameters

• Flow coefficient:

CV = 0.30 (CMD250 series)

• Flow coefficient:

CV = 0.25 at full flow (2048 series)

• Maximum inboard leak rate:

Vacuum tested to 1 x 10-9 atm cc/sec He

• Internal surface finish:

10Ra EP (0.25μm EP)

• Operating temperature:

PCTFE seat: +14ºF to +176ºF (-10ºC to +80ºC)

Vespel® seat: +14ºF to +350ºF (-26ºC to +177ºC)

• Particle inspection:

0 particles of 0.1μm and larger at 60~80 PSIG

of N2 gas flowing (EP grade)

• 2048 cracking pressure:

2PSI standard (± ½). Reseat at 1PSI.

Options: 5PSI (± 1). Reseat at 3PSI.

10PSI (± 2). Reseat at 7PSI.

50PSI (± 3). Reseat at 47PSI.

105PSI (± 10). Reseat at 90PSI.

Viton® and Kalrez® are registered trademarks of DuPont Company.

Spring

LOTO Quarter-Turn Handle

and Device (optional)

2048 Poppet

2048 Seat

Viton Seat Seal

2048 Body

CMDA250 Pneumatic

Diaphragm Valve

CMDQ250 Quarter-Turn Diaphragm Valve

(1) Series (2) Non-Return Valve (3) Inlet Connection

CMD = Manual Multi-Turn Diaphragm Valve 2048CV = Carten 2048 series check valve ¼” FSM FM

CMDQ = Manual Quarter-Turn Diaphragm Valve = ¼” Face Seal Female

CMDA = Pneumatic Operation Diaphragm Valve ¼” FSM M(S)

= ¼” Face Seal Male Swivel

(4) Outlet Connection (5) Spring Cracking Pressure Range (6) Actuator Type

If different to the inlet then specify… 2PSI = 2048 cracking pressure (standard) NC = Normally Closed

-035 = ¼” OD x 0.035” W/T Tube Stub 5PSI = 2048 cracking pressure NO = Normally Opened

¼” FSM M = ¼” Face Seal Male 10PSI = 2048 cracking pressure

¼” FSM FM = ¼” Face Seal Female 50PSI = 2048 cracking pressure

¼” C/LOK = ¼” Twin Ferrule Compression 100PSI = 2048 cracking pressure

(7) Locking Capability

LOTO = Lock Out Tag Out

NB: Only available for the CMDQ

(1/4-Turn model)

Page 4: Ultra High Purity Valves - Carten Controls · Ultra High Purity Valves CMD-2048CV Series ULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM ... Carten UHP valves are assembled

IRELANDCarten Controls Ltd.,

Unit 609, Industrial Park

Waterford

Ireland

Tel. +353-51-355 436

Fax +353-51-378 054

E-mail: [email protected]

Website: www.cartencontrols.com

Brochure designed and produced by Emagine Media Ltd.

www.emagine.ie

USACarten Controls,

A Division of Fujikin of America,

604 West Johnson Avenue,

Cheshire, CT. 06410, USA.

Tel. +1-203-699 2100

Fax +1-203-699 2109

E-mail: [email protected]

Website: www.cartenUS.com

Other Products By Carten • Ultra-High Purity Bellows Valves

• Ultra-High Purity Diaphragm Valves

• Ultra-High Purity Regulators

• High Purity Check Valves

• High Purity Ball Valves

• Vacuum Generators

• Gas Sticks

• Gas Panels

Carten Controls Ltd is

a member of the Fujikin Group.

Visit Fujikin at:

www.fujikin.co.jp

www.fujikin.com

www.fujikin.de

Ultra High Purity Valves


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