Ultra High Purity Valves
CMD-2048CV SeriesULTRA-HIGH PURITY HIGH PERFORMANCE INTEGRATED DIAPHRAGM
AND NON-RETURN VALVES FOR CRITICAL GAS APPLICATIONS>
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Product Features• Vacuum to 150PSIG working pressure
• Manual and Pneumatic operation with
integrated non-return valve
• 100% Helium leak tested for high leak
integrity and containment
• 100% DI-Water cleaned for ultra-cleanliness
• Compact design
• Prevents undesired reverse flow direction
through the non-return valve
• Broad range of cracking pressures
for the non-return valve
Carten Controls Ltd is a member of the Fujikin Group.
Ultra High Purity ValvesUlUltrtra a HiHHighgh PPurritity y VaValvlveses
Carten CMDA-2048CV Series
Pneumatic Operated with Non-ReturnThe Carten CMDA-2048CV series integrated pneumatically
operated diaphragm and check valve are designed for high
performance gas and solvent distribution applications to control
back flow in critical systems. The pneumatic diaphragm valve is
available in normally closed and normally opened versions. All
Carten UHP valves are assembled and tested in a class 10
cleanroom which support the final cleanliness and purity for
Carten CMDA-2048CV range of products.
Applications for the CMD-2048CV series integrated diaphragm
and check valve include:
• Gas Cabinets
• Gas Chambers
• Gas Panels
• Gas Sticks
• Valve Manifold Boxes and Valve Manifold Panels
• Gas Isolation Boxes
• Processing tools
• Bubbler Systems and Canister Isolation Valves
• Prevention of undesired reverse flow
• Reactor gas line protection
Carten CMD-2048CV Series
Manual Multi-Turn Operated with
Non-ReturnThe Carten CMD-2048CV series integrated manual multi-turn
operated diaphragm and check valve are designed for high
performance gas and solvent distribution applications to control
back flow in critical systems. Carten provides a broad line of fixed
cracking pressure check valves on the diaphragm valve inlet to
control back flow in system, ranging from 2PSI (0.14Bar) up to
105PSI (7.24Bar) cracking pressures.
All Carten UHP valves are assembled and tested in a class 10
cleanroom which support the final cleanliness and purity for
Carten CMD-2048CV range of products. The CMD-2048CV series
delivers superior performance and lower overall operating costs
for low pressure applications in the semiconductor, photovoltaic,
flat panel display, LED, fibre-optic and other high technology
industries.
Carten CMDQ-2048CV Series
Quarter-Turn Operated with Non-ReturnThe Carten CMDQ-2048CV series integrated manual quarter-turn
operated diaphragm and check valve are designed for high
performance gas and solvent distribution applications to control
back flow in critical systems.
LOTO handle and devices are optional on the quarter-turn for
fixing the valve position in place. All Carten UHP valves are
assembled and tested in a class 10 cleanroom which support the
final cleanliness and purity for Carten CMDQ-2048CV range of
products.
Product Features
UHP High Performance Integrated Diaphragm and Non-Return Valves
Ultra High Purity ValvesUlUltrtrra a a HiHiH ghgh P Pururitity y VaValvlveses
Product Selection and Ordering InformationProduct Example 1
CMD250 2048 CV ¼” FSM FM ¼” FSM M 10PSICMD250 2048 CV 2048 CV ¼” FSM FM ¼” FSM FM ¼” FSM M ¼” FSM M 10PSI
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Product Example 2
CMDA250 2048 CV ¼” FSM FM ¼” FSM M 10PSI NCCMDA250 2048 CV 2048 CV ¼” FSM FM ¼” FSM FM ¼” FSM M ¼” FSM M 10PSI 10PSI NC
54321
Product Example 3
CMD-2048CV Series Key Performance DataSize
(inch)
¼”
Maximum
Working
Pressure
150 PSIG
(10.34Bar)
Pneumatic
Air Supply
Pressure
58~87 PSIG
(4~6Bar)
Temperature
Range
-10ºC ~ +80ºC
Leak Rate
(atm cc/sec)
1 x 10-9
CV
0.30 > CMD
0.25 > 2048
(at full flow)
Grade
EP, BA
CMDQ250 2048 CV ¼” FSM M(S) 2PSI LOTOCMDQ250 2048 CV 2048 CV ¼” FSM M(S) ¼” FSM M(S) 2PSI 2PSI LOTO
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6
Product Specifications
CMD-2048CV & CMDA-2048CV
SeriesPressure Rating
• Maximum rated working pressure:
150 PSIG (10.34 Bar)
• Pneumatic air supply pressure:
58~87 PSIG (4~6 Bar)
[CMDA-2048 series]
Materials of Construction (Wetted Area)
• Body:
316L stainless steel (Electropolished)
• Seat:
PCTFE (Vespel® optional for high-temperature
applications)
• Diaphragm:
Nickel-Cobalt Alloy for high durability and
corrosion properties
• Handle:
Aluminium (CMDQ and CMD series)
• Pneumatic Actuator:
Aluminium (CMDA series)
• Spring (2048 series only):
316L stainless steel
• Poppet (2048 series only):
316L stainless steel
• Seat (2048 series only):
316L stainless steel
• ‘O’ Ring (2048 series only):
Viton® (Kalrez® optional)
Key Performance Parameters
• Flow coefficient:
CV = 0.30 (CMD250 series)
• Flow coefficient:
CV = 0.25 at full flow (2048 series)
• Maximum inboard leak rate:
Vacuum tested to 1 x 10-9 atm cc/sec He
• Internal surface finish:
10Ra EP (0.25μm EP)
• Operating temperature:
PCTFE seat: +14ºF to +176ºF (-10ºC to +80ºC)
Vespel® seat: +14ºF to +350ºF (-26ºC to +177ºC)
• Particle inspection:
0 particles of 0.1μm and larger at 60~80 PSIG
of N2 gas flowing (EP grade)
• 2048 cracking pressure:
2PSI standard (± ½). Reseat at 1PSI.
Options: 5PSI (± 1). Reseat at 3PSI.
10PSI (± 2). Reseat at 7PSI.
50PSI (± 3). Reseat at 47PSI.
105PSI (± 10). Reseat at 90PSI.
Viton® and Kalrez® are registered trademarks of DuPont Company.
Spring
LOTO Quarter-Turn Handle
and Device (optional)
2048 Poppet
2048 Seat
Viton Seat Seal
2048 Body
CMDA250 Pneumatic
Diaphragm Valve
CMDQ250 Quarter-Turn Diaphragm Valve
(1) Series (2) Non-Return Valve (3) Inlet Connection
CMD = Manual Multi-Turn Diaphragm Valve 2048CV = Carten 2048 series check valve ¼” FSM FM
CMDQ = Manual Quarter-Turn Diaphragm Valve = ¼” Face Seal Female
CMDA = Pneumatic Operation Diaphragm Valve ¼” FSM M(S)
= ¼” Face Seal Male Swivel
(4) Outlet Connection (5) Spring Cracking Pressure Range (6) Actuator Type
If different to the inlet then specify… 2PSI = 2048 cracking pressure (standard) NC = Normally Closed
-035 = ¼” OD x 0.035” W/T Tube Stub 5PSI = 2048 cracking pressure NO = Normally Opened
¼” FSM M = ¼” Face Seal Male 10PSI = 2048 cracking pressure
¼” FSM FM = ¼” Face Seal Female 50PSI = 2048 cracking pressure
¼” C/LOK = ¼” Twin Ferrule Compression 100PSI = 2048 cracking pressure
(7) Locking Capability
LOTO = Lock Out Tag Out
NB: Only available for the CMDQ
(1/4-Turn model)
IRELANDCarten Controls Ltd.,
Unit 609, Industrial Park
Waterford
Ireland
Tel. +353-51-355 436
Fax +353-51-378 054
E-mail: [email protected]
Website: www.cartencontrols.com
Brochure designed and produced by Emagine Media Ltd.
www.emagine.ie
USACarten Controls,
A Division of Fujikin of America,
604 West Johnson Avenue,
Cheshire, CT. 06410, USA.
Tel. +1-203-699 2100
Fax +1-203-699 2109
E-mail: [email protected]
Website: www.cartenUS.com
Other Products By Carten • Ultra-High Purity Bellows Valves
• Ultra-High Purity Diaphragm Valves
• Ultra-High Purity Regulators
• High Purity Check Valves
• High Purity Ball Valves
• Vacuum Generators
• Gas Sticks
• Gas Panels
Carten Controls Ltd is
a member of the Fujikin Group.
Visit Fujikin at:
www.fujikin.co.jp
www.fujikin.com
www.fujikin.de
Ultra High Purity Valves