Understanding Lateral Tunneling Understanding Lateral Tunneling Accelerometer and The Micromachining Accelerometer and The Micromachining Process Process Alma Alma Garc Garc í í a a Architectural Engineering Architectural Engineering Allan Hancock College Allan Hancock College Mentor: Laura Oropeza Mentor: Laura Oropeza Advisor: Kimberly Turner Advisor: Kimberly Turner Sponsor: Institute for Collaborative Biotechnologies Sponsor: Institute for Collaborative Biotechnologies
Transcript
Understanding Lateral Tunneling Understanding Lateral Tunneling Accelerometer and The Micromachining Accelerometer and The Micromachining
ProcessProcess
Alma Alma GarcGarcííaaArchitectural EngineeringArchitectural EngineeringAllan Hancock CollegeAllan Hancock College
Mentor: Laura OropezaMentor: Laura OropezaAdvisor: Kimberly TurnerAdvisor: Kimberly Turner
Sponsor: Institute for Collaborative BiotechnologiesSponsor: Institute for Collaborative Biotechnologies
Outline PresentationOutline Presentation
Project and GoalsProject and GoalsIntroductionIntroductionTypes of AccelerometersTypes of AccelerometersMicro Fabrication ProcessMicro Fabrication ProcessActual PicturesActual PicturesExperimental TestingExperimental TestingResultsResultsSummarySummaryFuture plansFuture plans
Project GoalsProject Goals
Getting familiar with MEMS principlesGetting familiar with MEMS principles
Characterization of different configurations of lateral tunnelinCharacterization of different configurations of lateral tunneling g accelerometers by interferometer techniqueaccelerometers by interferometer technique
Understanding the physics of the quantum mechanics phenomena Understanding the physics of the quantum mechanics phenomena of of ““tunneling currenttunneling current”” and the importance of using it in ultra high and the importance of using it in ultra high sensitive devicessensitive devices
Overview of MEMS fabrication process: SOI PROCESSOverview of MEMS fabrication process: SOI PROCESS
IntroductionIntroduction
What is MEMS?What is MEMS? What is an accelerometer?What is an accelerometer?
A sensor that detects A sensor that detects changes on velocity changes on velocity
Applications Applications
•• SeismologySeismology
•• Air bag deploymentAir bag deployment
•• AerospaceAerospace
Micro Electro Mechanical Systems
Courtesy of Sandia National Laboratories
I wish I had an air-bag
deployment in my car!
One possible application
Two Types Of Lateral Tunneling Accelerometer
* Parallel plates
F V
• Design 1 Mass~7.08e-10[Kg]
300µm
120µm
V
80µm
F
X~10A°
VTunneling100mV
Gold
e e e
Top view
• Actuator 1 • Sensor
Tunneling Tip
* Tunneling Tip
• Design 2
It
comb-drive actuator
springs
proof-mass
• Actuator 2
• Sensor
X~10A°
VTunneling100mV
Gold
e e e Poof-mass
Top view
V
* Interdigitated Comb-FingersV
Ultra high sensitive![Å]
[nA]
SOI Fabrication Process
1
2
3
4
5
Photo ResistSiliconSilicon Oxide (SiO2)Gold
6
7
SOI wafer
Photo Resist
Lithography
Deep Etching
Remove Photo Resist
Release Structure
Metal Deposition
Mirror
Monitor
Vector Analyzer
Oscilloscope
Atmospheric Package Holder
MEMS
Function Generator
Vibrometer
Equipment for testing
Joystick
Laser
Frequency Response Analysis
DeviceVin=Asin(wt)
Sweeping
Wo
Amax
DeviceVin=Asin(w0t)
Dispt
X’
X
Vel
t
02468
101214161820
0 500 1000 1500 2000
Frequency [Hz]
Am
plitu
de [
mm
/s]
Fix-Fix Lateral Tunneling Accelerometer
ResultsLarge Lateral Tunneling Accelerometer
Wo= natural frequency
Amax
soi - 17 FFTA5 Fr equency Response
00. 5
11. 5
22. 5
33. 5
44. 5
5
0 500 1000 1500 2000Fr equency [ Hz]
Velo
city
[mm
/s]
V=5
V=4
Di spl acement at f =3822 and Vsqr t =5
- 0. 20
0. 20. 40. 60. 8
11. 21. 4
0 500 1000 1500 2000 2500
Ti me [ s]
Disp
l[u
m]
Amax
Summary
Getting familiar with MEMSGetting familiar with MEMSUnderstand Micromachining Understand Micromachining process process Understand the dynamical Understand the dynamical parameter of lateral tunneling parameter of lateral tunneling accelerometeraccelerometerWork with HighWork with High--Tech Tech equipmentequipmentVisit clean room Visit clean room Visit the FIB room Visit the FIB room
Learn about the life of grad studentsLearn about the life of grad students
THE MOST EXCITING activity: participating in the microTHE MOST EXCITING activity: participating in the micro--fabrication fabrication of lateral tunneling accelerometer and their characterization!of lateral tunneling accelerometer and their characterization!
Acknowledgements
Mentor: Laura OropezaMentor: Laura OropezaAdvisor: Kimberly TurnerAdvisor: Kimberly TurnerPeople at Turner LabPeople at Turner Lab
INSET: Trevor INSET: Trevor HirstHirst, Dr. Arnold, Liu, Dr. Arnold, Liu--Yen Yen kramerkramer, Mike Northern, Mike Northern
