Date post: | 25-Jun-2015 |
Category: |
Technology |
Upload: | impedans-ltd |
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“Ion angular distribution can now be measured at the substrate position”
VERTEX | SYSTEM
VERTEX | SYSTEM
The Vertex Single Sensor is placed at any location inside a plasma reactor and measures
the ion angular distribution hitting a surface using a single
sensor.
The Vertex Multi Sensor also measures the uniformity of ion
angle distribution hitting a surface inside a plasma reactor
from multiple locations.
VERTEX | SYSTEM
Plasma ParametersIon Angle Distribution
Ion Energy Distribution • Ion FluxNegative Ions • Temperature
Bias Voltage (Vdc)
Measurement FunctionalityTime Averaged • Time Resolved • Time Trend
SolutionsThe Vertex measures the angular distribution
of ions hitting a surface inside a plasma chamber. These plasma diagnostics help with
common issues such as:
Feature damageBeam divergenceElastic scattering
The system also measures the ion energy distribution and ion flux at each angular
distribution
VERTEX | SYSTEM
Installation Setup
Vertex ElectronicsGenerator Match Plasma Reactor
Computer
Vertex Sensor
VERTEX | SYSTEM
How It Works
The first grid prevents the plasma entering the analyser
The second grid is biased with a negative potential to repel any electrons
A third grid is biased with a positive potential sweep. This creates a potential barrier for the
positive ions
An aperture is located directly below the third grid which allows through ions of a specific angle
A second aperture is biased with a potential to modify its ion acceptance angle
A collector plate collects the current of ions which cross the potential barrier set by the third grid
VERTEX | SYSTEM
Applications
The Vertex finds uses where ion angular distribution is of interest.
The Vertex System can be used in the following applications:Dusty Plasma
Plasma EtchingHiPIMS Plasma
Ion Beam PlasmaPECVD
Space PlasmaPlasma Sputtering
VERTEX | SYSTEM
Applications
For further information on the Vertex System visitimpedans.com/vertex-sensor
To request a quote visitwww.impedans.com/contact
Chase HouseCity Junction Business Park
Northern CrossMalahide Road
Dublin 17Ireland
Ph: +353 1 842 8826Fax: +353 1 891 6519
Web: www.impedans.comEmail: [email protected]