Micron Laser SOP Page 1 of 8 Revision 1-060110 Micron Laser SOP 1. Scope 1.1 This document provides operating procedures for the Micron Laser. 2. Table of Contents 1. Scope........................................................................................................................................................... 1 2. Table of Contents........................................................................................................................................ 1 3. Reference Documents................................................................................................................................. 2 3.1 Referenced within this Document......................................................................................................... 2 3.2 External Documents.............................................................................................................................. 2 4. Equipment and/or Materials....................................................................................................................... 2 5. Safety........................................................................................................................................................... 2 6. Setup Procedures........................................................................................................................................ 2 6.1 Convert the Image Files......................................................................................................................... 2 6.2 Laser Start Up........................................................................................................................................ 3
Transcript
Micron Laser SOP Page 1 of 6Revision 1-060110
Micron Laser SOP
1. Scope
1.1 This document provides operating procedures for the Micron Laser.
2. Table of Contents1. Scope...........................................................................................................................................................12. Table of Contents........................................................................................................................................13. Reference Documents.................................................................................................................................2
3.1 Referenced within this Document.........................................................................................................23.2 External Documents..............................................................................................................................2
3.2.1 Hi Mark Laser Marking System Suggested Settings
4. Equipment and/or Materials
4.1 Micron Laser
4.2 Wafer/Sample
4.3 3.5” Floppy Disk
5. Safety
5.1 Follow all Nanofab safety procedures.
6. Setup Procedures
6.1 Convert the Image Files
6.1.1 Store the images to be engraved in a .jpg or .bmp format on a 3.5” floppy disk.
6.1.2 Use the computer attached to the microscope in the yellow room to convert the images to .plt files.
6.1.2.1 Open IMSI TurboCAD v.7.
6.1.2.2 Go to Corel OCR VTrace.
6.1.2.3 Open file to convert (from the A: drive).
6.1.2.4 Convert the image to black and white.
6.1.2.5 Go to OCR-Trace tab on the header.
6.1.2.6 Perform Trace.
Figure , Instrument Cabinet
Power Button
Main Power Key
Pump Start Button
Power Supply Button
Lamp Start Button
Shutter Switch
Low Power Light
Low Water Light
Power Meter
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6.1.2.7 The trace can be done in one of several formats by using one of these conversion settings: outline, centerline, crosshatch etc…
6.1.2.8 Save as Vector>HPGL Plotter File
6.1.2.9 There can be no spaces in the file name and it must be <12 characters long.
6.1.2.10 To get finer line definition in the laser system, the pen-width parameter in the plotter file format can be decreased.
6.2 Laser Start Up
6.2.1 Turn the Main Power key to ON. See Error: Reference source not found.
6.2.2 Press the Pump Start button to start the water pump. See Error: Reference source not found.
6.2.3 If the low water light turns on, re-fill the reservoir with DI water. See Error: Reference source not found.
NOTE: The reservoir is located through the port in the left side of the instrument cabinet.
6.2.4 Use the rubber hose in the cabinet to feed the water in.
6.2.5 Turn the Power button on. See Error: Reference source not found.
NOTE: The Low Power light on the front display will turn on when the capacitor is charging up.-
6.2.6 Once the Low Power light goes off, turn on the Power Supply. See Error: Reference source not found.
6.2.7 Press the Lamp Start button. See Error: Reference source not found.
6.2.8 If the Power meter does not register, press the Start button again. See Error: Reference source not found.
6.2.9 Let the laser warm up for 15-20 minutes.
Figure , Computer
A: Drive
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7. Laser Procedures
7.1 Load Image Files
7.1.1 The Laser controller runs on DOS.
7.1.2 Move to the root directory by typing CD:\
7.1.3 Type CD EZMARK
7.1.4 Open the front panel of the laser system.
7.1.5 Load the floppy disk. See Error: Reference source not found.
7.1.6 Type A:
7.1.7 Type copy C:
7.1.8 Type C:
7.1.9 Type truview
7.1.10 This will open the windows-based program. Unlike typical windows-based systems, the sub-menu replaces the main header when you click on a menu item. Click on the QUIT button to move up one level in the menu.
7.1.11 Press EDIT
7.1.12 Select ADD.
7.1.13 Choose the file to add.
7.1.14 There is a table on the right side of the screen. The coordinates Xmin and Ymin in this table indicate the bottom left corner of the image.
7.1.15 The size of the image can be altered by clicking and dragging the corners of the image box.
Figure , Sample Enclosure
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7.1.16 The image can be centered by clicking CENTER.
7.2 Load Sample
7.2.1 Mount the substrate in the sample enclosure with the center aligned visually to the center of the sample holder. See Error: Reference source not found.
7.2.2 When the image is scribed on the substrate it is rotated 180 degrees from what we see on the screen. The "up" direction of the screen is the direction of the handle on the holder. Also note that the surface of the sample holder can be exchanged for other surface patterns that can help center the sample.
7.2.3 Secure the holder with the magnetic enclosure. Push the holder to the top right hand corner of the enclosure to ensure a snug and repeatable fit every time.
7.2.4 Close the front door to the enclosure and lower the Velcro flap.
7.3 Set Laser Parameters
7.3.1 Exit the EDIT menu on the computer.
7.3.2 To set the parameters go to CONFIGURATION.
7.3.3 Push SCRIBES.
7.3.4 Set the Laser Power, Scan Speed, and Pulse Frequency based on the material being used. See Hi Mark Laser Marking System Suggested Settings.
7.3.5 Click on MARK. Leave default settings.
7.4 Scribing Procedure
7.4.1 Start MARK
7.4.2 Open the shutter by flipping the shutter switch.
7.4.3 Hit ENTER on the computer to scribe the substrate.
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7.4.4 In order to repeat, hit ENTER again. This rescribes the pattern over the previously scribed pattern. Repeat as many times as necessary.
7.5 Shutdown
7.5.1 Go to CONFIGURATION.
7.5.2 Push SCRIBES.
7.5.3 Set the Laser Power to the minimum power (8 Watts).
7.5.4 Turn off monitor.
7.5.5 Leave MAIN POWER and Pump on.
7.5.6 Leave the computer ON.
7.5.7 Make sure that the shutter is closed.
7.5.8 Clean up the area.
7.5.9 Leave the system running if someone is going to use it in the next couple of days.
7.5.10 If the system won’t be used for a few days:
7.5.10.1 EXIT the program.
7.5.10.2 Turn off Power Supply
7.5.10.3 Turn off Power
7.6 Translate Autocad to PLT Format
7.6.1 Draw file in autocad with units set to inches.
