+ All Categories
Home > Documents > W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...

W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...

Date post: 16-Oct-2021
Category:
Upload: others
View: 3 times
Download: 0 times
Share this document with a friend
8
Transcript
ctnguyen
Text Box
W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally driven polysilicon resonant microstructures,” Sensors and Actuators, 20, 25-32, 1989.

Recommended