Weir DM/DMA Getting Started Tips and procedures for setting up and starting a process automated Weir...

Weir DM/DMAWeir DM/DMAWeir DM/DMAWeir DM/DMA

Getting Started

Tips and procedures for setting up and starting a process automated Weir DM analysis

TEA Systems Corp.65 Schlossburg St.Alburtis, PA 18011

610 682 [email protected]

July 28, 2004

July 2004 Weir DMA - Getting Started Page -2-TEA Systems Corp. Confidential

Project Summary

• Program: Weir DM/DMA • Overview:

A Weir DM or DMA analysis has four key elements that must be setup. The first is the Weir DM macro that contains all of the remaining element information with the exception of the data import filter. These elements are:

• Weir DM macro– Defines the analysis program sequence and files– Contains all of the following information …– Stored in the applications “Templates” sub-folder as Excel files ending in “.XLT”

• Weir PSFM Calibration template– Defines the calibration values for converting PSFM Reticle overlay data to focus data.– Stored in the applications “Templates” sub-folder in file “WEIRpsfm.tpl”

• Data directory path• Data import filter type to use

– NOTE: This filter is NOT currently stored in the Weir DM macro– Must be set from the Weir DM “Tools/Options” menu.

• Sections Weir DM Macro Setup

• Weir PSFM Focus Matrix• Weir PSFM Fixed Focus• Weir PW metrology

Moving a Weir DM Macro Running an Automated DMA

• Calling• Command switches• Analysis Status Log• Output format


Running Weir DMA

• Remote calling of Weir DM macros


Run-log format• Default folder = %Weir DM home%

Default = Weir DM home folder To change use “Tools/Options” menu and the DMA tab

• File Name RemoteCall.Log Format = ASCII

• Contents Contains analysis summary plus any errors Sample:

• ____• Weir DMA: ver: 3.8.55 ‘ start of new analysis• System ID: 1C2CE5A7• Analysis Start: Wednesday, July 28, 2004 2:36:50 PM ‘ next line is the input command line• Cmd: -t "C:\Program Files\Weir Wavefront Engineering\Templates\DS1_FF_DMtemplate.XLT" -d 040525153141.txt -o D:\TEMP -x D:\TEMP• runDM Start: 2:36:50 PM• cmdLineParse Start: 2:36:50 PM ‘ command line interpreted correctly• DM Start: 2:36:50 PM• runDMoutput Start: 2:36:59 PM ‘ actual analysis start• Output: D:\Temp\040525153141_WeirDMA.csv ‘ output to ASCII file• Output 56 statistics.• OutputXLS: D:\Temp\040525153141_WeirDMA.xls ‘ optional output to excel workbook• Output 56 statistics.• run DM successful ‘ signifies completion without errors• Analysis End: Wednesday, July 28, 2004 2:37:00 PM• ____

•A run-log is maintained so that every analysis can be traced.

•Log is accessed from the Weir DM menu or by text editor

TEA Systems Corp. Confidential

Weir DM Macro Setup


Weir DM Macro Types• Weir PSFM focus reticle analyses

Focus/Expo Matrix• Functionality

– Best image analysis of lens aerial image

• Requirements– Benchmark PSFM reticle– Initial dataset of a PSFM Focus matrix

Fixed-Focus Analysis• Functionality

– Analysis of wafer flatness, photoresist flatness, process focus and exposure tool autofocus/ auto-leveling stability.

• Requirements– Benchmark PSFM reticle– Initial dataset of PSFM fixed-focus, full-wafer

» Same layout and exposure as monitor wafers will be» Same exposure as PSFM calibration tempalte

– Existing Weir PSFM Calibration Template» Generated by Weir PSFm from a PSFM focus matrix wafer» Stored in the Weir PSFM Calibratin template librarty (“WeirPSFM.tpl”)

• Weir PW analyses Raw Metrology Tool Monitor

• Raw metrology and tool Monitor are same• Statistics and modeling on any metrology data set• Requirements

– Initial data set with same exposure and layout as future daily monitors


Focus/Expo Macro flow

Select Macro

Select Data

Import data &

save

Calibrate Offset vs

Focus

Display current-

data graphic

Update Trend charts

Weir DMA output to ASCII (*.csv) and Excel

(*.xls) files

Weir DMA outputs status and any errors to RemoteCall.log

Optional: Model

best focus field


Fixed-Focus Macro flow

Select Macro

Select Data

Import data &

save

Weir PSFM Calibration Template: Convert offset to

focus

Display current-

data graphic

Update Trend charts


(*.xls) files


Optional: Model

wafer and field focus


Raw Metrology & Tool Monitor flow

Select Macro

Select Data

Import data &

save

Display current-

data graphic

Update Trend charts


(*.xls) files


Optional: Model

wafer and field focus


Moving a Weir DM macro

• When moving a Weir DM macro to another computer: Copy the macro (*.XLT) into the new computer’s template directory Copy the “WeirPSFM.tpl” template library to the new computer’s template directory

• ONLY if the macro is for Weir PSFM Fixed Focus

• ONLY if the template does not already exist on the new computer

Make sure the directories in the macro correspond to those in the new computer:• Data directory

• Macro storage directory

• Reticle storage directory

Insure the “Tools/Options” interface in the new computer specifies the proper data import filter.

TEA Systems Corp. Confidential

Example Analysis


Macro and PSFM Template“DS1_FF_DMtemplate” MACRO

“UM DS5” PSFM Calibration

• Top

• Fixed focus data used to create MACRO of the analysis. Note that there are 63 sites per field.

• Bottom-right

• DS5 PSFM calibration template used to convert offset to focus data.


Initial setup

• Several files exist in the data directory.

• Run Weir DM at least one time manually before trying Weir DMA

• Be sure to watch the status bar in the lower left side of the screen for any problems. This manual interface will NOT output the .csv and .XLS output files


Immediate data results

• This data reflects the current dataset’s behavior

• We’ve chosen to plot a wafer map of the RAW FOCUS data along with it’s statistics

• Note: the Immediate data selections are those that will be output to the DMA output files

• Note: Sample data sets contain only 7 sites per field compared to the 63 sites of the macro and it’s PSFM calibration template.


First Analysis summary

• At this point we’ve run 3 data sets through the analysis.

• The remainder will be run using Weir DMA


Check Weir DMA Options

• Options interface is located on the Weir DM “Tools/Options” menu.

• Here we’ve changed the location of the DMA analysis log file “RemoteCall.log” to the “D:\Temp” folder.

• The Max/Min options will be used to limit the size of this log file.


Running Weir DMA – RemoteCall.log

• This is the RemoteCall.log format

• Switches used for the analysis are shown above

• Screen shows the status output of two successful data runs

-t "C:\Program Files\Weir Wavefront Engineering\Templates\DS1_FF_DMtemplate.XLT"

-d 040615210805.txt -o D:\TEMP -x D:\TEMP


RemoteCall.log

• This file will also show any errors encountered and should be monitored regularly.

Weir DMA: ver: 3.8.56 System ID: 1C2CE5A7 Analysis Start: Friday, July 30, 2004 4:00:34 PM Cmd: -t "C:\Program Files\Weir Wavefront Engineering\Templates\DS1_FF_DMtemplate.XLT" -d 040615210805.txt -o D:\TEMP -x D:\TEMP runDM Start: 4:00:34 PM cmdLineParse Start: 4:00:34 PM DM Start: 4:00:34 PM runDMoutput Start: 4:00:43 PM Output: D:\Temp\040615210805_WeirDMA.csv Output 55 statistics. OutputXLS: D:\Temp\040615210805_WeirDMA.xls Output 55 statistics. run DM successfulAnalysis End: Friday, July 30, 2004 4:00:45 PM


Files in output directory

• Consist of two sets of ASCII and XLS output data files along with the call log.


,FocusMin::,0,,[EndHeader],,,,,,[Results],,,,,,[Z (Mean)],,,Wafers:,1,,Sites/Die:,2,,#Dice:,5,,IFD:,0.199,,BF(Fitted):,0.000,,X Tilt(urad):,0.000,,Y Tilt(urad):,0.000,,Astigmatism:,0.135,,Curv(nm/cm2):,0.000,,IFDresid(um):,0.000,,StDEVresid(um):,0.000,,Count:,10,,Mean:,0.017,,Median:,0.036,,SEM:,0.018,,Maximum:,0.136,,Minimum:,-0.063,,Range:,0.199,,MinMax:,0.136,,StDev:,0.058,,Mean+3Sigma:,0.190,,[EndResults],,,[END],,

,FocusMin::,0,,[EndHeader],,,,,,[Results],,,,,,[Z (Mean)],,,Wafers:,1,,Sites/Die:,2,,#Dice:,5,,IFD:,0.199,,BF(Fitted):,0.000,,X Tilt(urad):,0.000,,Y Tilt(urad):,0.000,,Astigmatism:,0.135,,Curv(nm/cm2):,0.000,,IFDresid(um):,0.000,,StDEVresid(um):,0.000,,Count:,10,,Mean:,0.017,,Median:,0.036,,SEM:,0.018,,Maximum:,0.136,,Minimum:,-0.063,,Range:,0.199,,MinMax:,0.136,,StDev:,0.058,,Mean+3Sigma:,0.190,,[EndResults],,,[END],,

Output Data File

• Partial display of output file

• Specifications are in the manual.

• Each section of the data is summarized by a header line in “[]” brackets

,[Data],,,Program:,Weir DMA,,,,,DataFile:,040525153141.txt,,DataFolder:,D:\Data\UMC\WeirDM Testing,,Template:,DS1_FF_DMtemplate.XLT,,TemplateFolder:,C:\Program Files\Weir Wavefront Engineering\Templates,,AnalysisDate:,7/28/2004,,AnalysisTime:,12:00:00 AM,,Tool:,,,Wafers:,1,,,,,[Header],,,DateTemplateSaved:,7/27/2004,,Analysis:,Fixed Focus,,FocusTemplate:,UMC DS5-Step2,,ConversionMethod:,All Sites,,ModelData:,True,,Statistics:,1,,Graphic:,1,,GraphicData:,0,,WaferFieldGraphic:,Wafer,,GraphicPlot:,Vector,,GraphicDataFormat:,All Points,,Comments:,,,Summary:,Analysis:Fixed Focus:All Sites (UMC DS5-Step2)

,[Data],,,Program:,Weir DMA,,,,,DataFile:,040525153141.txt,,DataFolder:,D:\Data\UMC\WeirDM Testing,,Template:,DS1_FF_DMtemplate.XLT,,TemplateFolder:,C:\Program Files\Weir Wavefront Engineering\Templates,,AnalysisDate:,7/28/2004,,AnalysisTime:,12:00:00 AM,,Tool:,,,Wafers:,1,,,,,[Header],,,DateTemplateSaved:,7/27/2004,,Analysis:,Fixed Focus,,FocusTemplate:,UMC DS5-Step2,,ConversionMethod:,All Sites,,ModelData:,True,,Statistics:,1,,Graphic:,1,,GraphicData:,0,,WaferFieldGraphic:,Wafer,,GraphicPlot:,Vector,,GraphicDataFormat:,All Points,,Comments:,,,Summary:,Analysis:Fixed Focus:All Sites (UMC DS5-Step2)


Trend summary• The modeled summary of the

8 data files can be found if we go back into Weir DM


Data contents

• Plots the # of sites per field.

• Only last two data sets correspond to the 63 sites per field of the calibration template


Weir DMA Features

• Complete adaptation to Chinese and Windows 2000 testing

• Features Add ability to limit the size of the RemoteCall.log file (done, Aug. 2004) Add ability to select a window size and location in the trend plot for plots with many data

entries. Add DMA screen for status reporting of DMA calls

• Interactive beyond RemoteCall.log file.

• Done Aug. 2004 along with ability to control the length of display time for this screen.

Add Data Import Format to Template Add in ability to select focus models

• Major task, will require some time.

Additional features added• Ability to select full-field, full wafer and slit/scan models for focus or any metrology variable.

Optional Email notifications of OOC and problem data sets. Weir PW full process window features added

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