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Ke Wu
Canada Research Chair in Radio-Frequency and Millimetre-Wave Engineering
Poly-Grames Research Center
Center for Radio-Frequency Electronics Research (CRER) of Quebec
Department of Electrical Engineering
Ecole Polytechnique (University of Montreal), Canada
Substrate Integrated Circuits (SICs) and Systems for
RF and Millimeter-wave Applications
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Introduction
Drawbacks of standard planar transmission line technologies Need for compact, low-loss, low-cost integrated waveguides and circuits
Integration issues
Substrate Integrated Circuits (SICs) and Systems
Performance of substrate embedded waveguides
Recent achievements in the field of substrate integrated circuits (SICs)
System-on-Substrate (SoS) Concepts
Future challenges and possibilities
Conclusions
OUTLINE
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Drawbacks of current technologies
EM field singularities cause high current densities in the conductor edges high conductor losses
Semi-opened and/or unbounded planar circuits are subject to packaging problem andradiation losses
high cross-talk and transmission losses
Microstrip Coplanar Waveguide (CPW)
Introduction
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Performance gap at mmW frequencies
Electrically large mmW components rely on low loss technology Gap between lossy planar waveguides and bulky metal waveguides needs to be
closed.
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Design Examples of Microstrip to Rectangular Waveguide Transition
a) Probe Type b) Ridge Type
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(a) (b) (c)
(d) (e) (f)
Synthesized Waveguides and Substrate Integrated Circuits (SICs)non-planar structure in planar form
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Substrate Integrated Circuits (SICs)
Complete integration of planar circuits (surface type) and non-planarcircuits (volume type) on the same dielectric substrate and fabricationprocess
Synthesized waveguides made of metallic fences and/or dielectric
contrasts compatible with planar substrate (electrically, mechanically, andthermally)
Potential hybrid and monolithic features such as planar multilayer,miniaturization, self-packaging, tunability, electro-optical control and
conversation
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Substrate Integrated Waveguide
Early version of SIW filter
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Substrate Integrated Non-Radiative Dielectric Waveguide
SINRD LSM11 mode(only half the structure is shown)
Early SINRD filter
(7th order, without cover)
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Substrate Integrated Image Guide
Fundamental Ey11 mode
(only half the structure is shown)
Silicon SIIG prototype
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Interfacing / Transitions
wS
lS
w
b
ar
p
x
z
y
Courant electriqueChamp magnetique
Waveguide SIIG
CPW SIW
Microstrip SIW
CPW SIIG
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In-Line Four-Pole Dual-Mode Filter
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Substrate Integrated Waveguide Antennas
g/2 3g/4
lf of
ae slotted antenna
leaky-wave antenna
Ond
esdefuite
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Integrated SIW antenna/feeder module
Antipodal Linearly Tapered Slot Antenna
(ALTSA)
1 x 16 SIW-ALTSA field profile
1x 8 SIW-ALTSA photo
Measuredradiation pattern
of 1x 8 SIW-ALTSA at
10 GHz with18.76dBi gain
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Substrate Integrated Waveguide
Directional Couplers
Weff
LaLs
Ws
L1
L2
L1
L2
(a) (b)
1 4
2 3 2 3
1 4
Weff
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Substrate Integrated Waveguide Oscillator
L
b
W
90
JP1 JP2
P_INJ
P_OSC
P_AP_B
ATF36077AMPLIFIER
SIW CAVITY
W c
Gc
Wp
LpLx
PHASE STUBS
LOOP LENGTH
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Integrated FMCW Radar System on Substrate (SoS)
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Synthesized or Substrate Integrated NRD-Guide
Standard NRD Guide Generalized NRD Guide Substrate Integrated NRD Guide
R RR1
RR1
Air Holes
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94 GHz 3rd Order Alumina SINRD Guide Filter
S1 S2
L1L2
Wt
S1
L2L1
L1 = 0.180mm, L2 = 0.449mmS1 = 1.082mm, S2 = 1.118mm, Wt = 0.737mm
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Simulated and Measured Results
87 89 91 93 95 97 99 101 103-50
-45
-40
-35
-30
-25
-20
-15
-10
-5
0
5
GHz
dB
S11
(sim) S21
(sim) S11
(mea) S21
(mea)
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System-on-Substrate (SoS) Concepts
Advanced Technological Features
Nano-structuredzero loss and agile/tunable substrates
Traveling-wave electro-optical devices
Mixed integration of different waveguides on substrate
High-density multilayer integration
Monolithic integration ofpassive and active circuits on substrate includingantennas
(Sub)millimeter-wave VLSI (very-large scale integration)
Terahertz electronics and photonics
Bridging the gap between electronic and optical systems
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Complementary Modal Field Profiles
a) b)
E field E field
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Other Examples of Multi-port SICs
SIW cruciform directional coupler or cross-over
1
3 2
4
5
68
7
W-band multi-port receiver circuit
Substrate integrated waveguide circulator
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24/77 GHz dual band antenna system
140-280 GHz think-film SIW band-pass filter(Prof. Ian Robertson, University of Leeds, UK)
(b)
Traveling-wave photodetector and modulator
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Substrate Integrated Folded Waveguide (SIFW)(from Dr. Paul R. Young, University of Kent, UK)
a
a/2
a/3a/4 4 layer
3 layer
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SIW and Half-Mode SIW (HMSIW) Structures
Evolution of HMSIW from SIW
HMSIW
SIW
Dominant modes in
HMSIW and SIW
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SIIG W-band Antennas
94-GHz SIIG planarDielectric rod antenna
94-GHz SIIG array antenna
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Substrate Integrate Circuits (SICs)
Combining planar and synthesized non-planar guiding structures
Example of a substrate integrated circuit
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Conclusions
Substrate integrated circuits (SICs) for low-cost/high-density RF/millimeter-
wave/terahertz and photonic wireless ICs and system applications
Hybrid design platforms such as planar-substrate integrated waveguide (SIW) &
planar-substrate integrated dielectric guides
Potential monolithic SICs with semiconductor and/or smart substrate towards
System-on-Substrate (SoS) approach for future millimeter-wave and photonic
wireless applications
Bridging the technological gap between electronics and photonics for GHz and THz
innovations and discoveries
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Acknowledgements
Many year contributions by the speakers students and research fellows as well as
technical support of technologists at the Poly-Grames Research Center have made thispresentation possible
The speaker is grateful to Canadian NSERC (Natural Sciences and Engineering
Research Council) and Quebecois funding agency (FQRNT) for their financial supportthrough multiple grants
Worldwide collaborators including Prof. Wei Hong and his team at Southeast University
(China), Prof. Maurizio Bozzi and his colleagues at University of Pavia (Italy) and others
have made contributions to this presentation