Chapter 4:
Work function engineering
4.1. Background
4.2. Lanthanum hexaboride nano-particles
decoration
4.3. CNTs modified with cesium iodide nano-
particles
4.4. Summary and Conclusions
4.5. References
101
Chapter 4: Work function engineering
4.1. Background
Carbon nanotubes (CNTs) are considered to be one of the best electron field
emitters compared to the other materials and Spindt type micro-emitters, owing to
their physical geometry, high aspect ratio, extraordinary electrical properties [1, 2],
good mechanical strength and high thermal conductivity. A lot of research work has
been carried out on the development of CNTs as a strong electron field emitter source
[3, 4] with high current density. However, very few commercial products based on
CNTs are available yet due to low observed current throughput. CNTs are excellent
field emitters and there still exists scope for further improving their electron emission
using various experimental approaches. This could be made feasible after
understanding the dependency of emission current on the field emission (FE)
parameters and trading these variables using different techniques [5, 6].
Introductory theories of electron emission techniques were reviewed and
analyzed earlier in chapters 2 with more emphasis on quantum mechanical FE
tunneling. Quantum mechanical FE tunneling predicted by Fowler-Nordheim [6, 7]
suggested that, emission current density of the CNT emitter arrays (CEAs) are
critically dependent and influenced by the work function [8] and applied electric field.
Applied electric field is linearly dependent on the field enhancement factor as
� = ���. Having described the different experimental techniques employed for
development of the CNT based cathode in section 3.2, furthermore discussion on the
different characterization techniques used for quality and morphology assessment of
the developed CEAs in section 3.3 and its FE measurement in section 3.4 of chapter 3.
Form this chapter onwards; different experiments were carried out on the developed
CEAs to enhance the emission current density. These CEAs can be used as an
electron source in place of the existing thermionic cathodes.
Owing to the geometry i.e. high aspect ratio (height/diameter), CNTs
inherently keep the merit of very high field enhancement factor. Further increase in
field enhancement factor will require optimization of growth parameters to obtain
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102
CNTs with more height and lesser diameter. Other than this, field enhancement factor
can also be altered or traded with variation in the structural parameters such as
patterned growth of CNTs, variation in CNTs dot pattern on cathode plate, cathode to
anode spacing in diode assembly, etc. This structural trading part of the CEAs as
cathode plate in diode structure is discussed in chapter 6. Second approach involves
work function trading of CNTs and for this post growth treatments can be tried. Post
growth treatment includes surface modification with different low work function
material and thermal engineering to remove residual adsorbed gas particulate and
other impurities. CNTs are reported to have work function close to graphite [8] and
this associated high work function (~ 4.5eV) limits their FE capabilities. Present
chapter is devoted to the work function engineering of the developed CEAs. Work
function engineering is expected to enhance the emission efficiency of the CEAs and
these emitters can be used as electron emitter source for high current density
application.
Work function engineering is alteration of effective work function of the
material using various techniques such as surface modification, temperature treatment
etc. Effect of temperature treatment on the FE of the developed CEAs is discussed in
the chapter 5. However the work function engineering using surface modification
approach will be employed and discussed here in the present chapter. Surface
modification is a simple and effective method that can be employed to alter the
surface density of states which attributed to the change in surface phenomena and
surface effect. This chapter is intended to report the experimental research work
carried out on surface modification of CNT cathode to reduce their effective work
function and the detailed analysis to confirm the change in work function of CNTs
using mathematical reverse engineering. The effective work function of pristine CEAs
was modified by decorating them with a low work function material using both
conventional radio frequency (RF) sputtering and thermal evaporation. FE
measurements of pristine CNTs and low work function material decorated CNTs were
carried out in diode structure at a constant inter-electrode separation of 500µm.
Initially, work function and their different modification approaches reported in
literature is discussed and later on experimental process with results and discussion
will be described.
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High emission current of CNT field emitters were reported to be achieved by
various researchers using different techniques such as a growth of vertically aligned
CEAs that was used for local field enhancement, a patterned array of CNTs was
grown for screening effect reduction, CNTs were doped with different elements and
surface of the CNTs was coated with a lower work function material and nano-
particles (NPs) etc. Furthermore, to improve the FE of CNT based electron emitters
by surface modification, various physical and chemical modification techniques have
also been explored.
Different materials have been explored for surface modification of CNTs
using various techniques like doping with transition elements, coating of CNT emitter
surface with a lower work function material and NPs etc. Liu et al [9] have shown
improved FE of double walled CNTs (DWCNT) by ruthenium (Ru) metal nano-
particle decoration using chemical method. In their work, the DWCNT surface was
modified with Ru nano-particle by a chemical method. Wadhawan et al [10] had
presented effect of cesium (Cs) metal to enhance FE of single walled CNT bundle.
Jihua et al [11] improved emission current of CNT field emitter by hafnium coating
and its annealing. In the current work, CNTs have been modified with lower work
function materials lanthanum hexaboride (LaB6) and cesium iodide (CsI). Section 4.2
elaborates effect of LaB6 NPs decoration on the patterned CEAs whereas section 4.3
discusses cesium iodide coating.
4.2. Lanthanum hexaboride nano-particles decoration
LaB6 is a traditional low work function material and have well established
industrial applications like filaments of thermionic cathodes for work function
lowering in different applications. Moreover, LaB6 were also successfully coated on
conventional tungsten filaments and silicon field emitters for work function lowering
and to improve their electron emissivity. Similar to conventional tungsten filaments,
low work function of LaB6 could be used to tailor with high aspect-ratio of CNTs. It is
expected to contribute towards the enhanced FE. To the best of my knowledge, only
Wei et al [12] have modified single multi walled CNT-emitter tip with LaB6, rather
than CEAs that can be used for high current density device development. They
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reported reduction in the turn-on electric field and improvement in the current density.
Maximum current observed by them was 70µA at a field of 1.2V/µm. However, as
per our knowledge, no one has studied the behavior of LaB6 as NPs and decorated
them to improve the FE. Only one report is available on the LaB6 tip modification
approach therefore it needs a further study for realization of such a field emitter. In
this report, Wei et al observed improvement in the FE properties specially reduction
in the turn-on electric field and enhancement in the current density of the individual
multi walled CNTs (MWCNT) by LaB6 tip modification.
4.2.1.Experimental process
CEAs were synthesized on n-type <100> silicon substrate that had patterned
arrays of iron catalyst using thermal chemical vapor deposition same as the one
discussed in chapter 3. The arrays dot pattern was 10µm × 10µm square openings
with 10µm masking between two adjacent square openings and was repeated within
200µm × 200µm square with each such square was spaced 300µm apart. The pattern
was confined within a 10mm diameter circle such that the above substrate contained
30336 open square dots and had total device area of 0.785cm2.
Scanning electron microscope (SEM, NanoEye SNE1500M and ZEISS EVO
MA15), TEM (FEI TecnaiG2), energy dispersive x-ray spectroscopy (EDS Oxford
INCA), x-ray photoemission spectroscopy (XPS) and Raman characterization
(Ranishaw inVia, air cooled argon ion laser, 514.5nm) were used for physical
morphology, elemental composition and quality assessment of synthesized CNTs. FE
measurement of the pristine CNTs was carried out in diode-structure same as the one
outlined in chapter 3.
Initially, same as iron catalyst optimization, DekTec profilometer was used for
sputter rate optimization on the smooth polished silicon substrate. Calculated sputter
rate of LaB6 was 3.5nm per minute at the same RF power of 300W without substrate
heating. A LaB6 target of 99.5% purity (FHM International) was used for decorating
the CNTs at optimized RF power of 300W in argon plasma for 35 seconds. After FE
measurement, CNTs grown silicon substrate sample was removed from copper disc
and silver epoxy was cleaned from the back surface of the substrate. Sample was then
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loaded in RF sputtering system (Nordiko, NM1500) for LaB6 deposition. The
presence of LaB6 on the CNTs, their physical morphology with elemental signature
and defect analysis were carried out using SEM, TEM, EDS and Raman
characterizations.
FE of the LaB6 decorated CEAs were studied under same conditions as earlier.
4.2.2.Results and Discussion
Physical morphology of CNT emitters before LaB6 decoration was analyzed
from the SEM micrographs shown in Figure 4.1(a) and Figure 4.1(b). The CEAs had
slightly non uniform growth with some flower like structure at the apex and also with
few CNTs spreading outside the patterned dot. These micrographs confirm the
patterned growth of CNTs in the 10µm × 10µm dot with 10µm inter dot spacing
within the square area of 200µm × 200µm. The SEM micrograph of same sample
after FE measurement and after LaB6 decoration is shown in Figure 4.1(c). The
quality of SEM images before and after LaB6 deposition appears to be same. Any
morphological change or damage such as peel off, substrate melting etc is not
observed. However, this micrograph also does not provide clear insight of the LaB6
decoration and modification pattern over the CNTs top surface as to whether sputtered
LaB6 was deposited or not. A low deposition time of about 35 seconds was kept to
decorate the CNTs with monolayer of LaB6 rather than thick film. To achieve the
enhanced emission performance of the modified CNT emitter, LaB6 NPs or
monolayer deposition was preferred over thick or continuous film. Continuous thick
film coating on the CEAs may completely cover their top morphology and makes
them equivalent to a flat surface. This effectively diminishes many advantages offered
by CEAs as strong field emitter. Calculated thickness of sputtered LaB6, from
optimized sputtered rate, was 2nm, and it is very thin to detect in SEM with such a
low magnification. Moreover, LaB6 target show intense purple color as a bulk
material but it appears transparent on glass when approximately 200nm thick film was
deposited.
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Figure 4.1 SEM micrographs of (a) pristine CEAs confined within a 200µm × 200µm
square, (b) magnified image of pristine CEAs and (c) LaB6 decorated CEAs confirm
the selective and patterned growth of CNTs within the 10µm × 10µm square with
10µm inter dot spacing.
Morphological differences between bare and LaB6 decorated CEAs were
analyzed by TEM and results are shown in Figure 4.2. From TEM micrograph of bare
CNTs shown in Figure 4.2(a), it is observed that CNTs have a range of diameter
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107
distribution and are like a hollow bore having approximately 5-25nm inner diameter
and 35-50nm outer diameters. The walls of CNTs were smooth and this signifies that
CNTs surface was not modified with LaB6. Figure 4.2(b) and 4.2(c) show the bright
field and dark field TEM micrographs of LaB6 decorated CNTs. This confirms the
coating of LaB6 as NPs, rather than continuous film, over the entire CNT strands. In
bright field TEM micrograph, NPs look like a black spot spreading on the walls of
CNTs where as in dark field imaging these NPs appear as white dot uniformly
distributed over the CNTs strands. One more remarkable point observed in the
micrograph was the absence of black or white spot away from the walls of CNTs.
This clearly signifies and confirms that NPs were not found scattered and was firmly
adsorbed on the surface of CNTs. In other words, good adherence of LaB6 NPs with
CNTs was observed.
Subsequently, magnified TEM images were taken to investigate the
topological and NPs size distribution of bare and LaB6 decorated CNTs. The
micrograph of bare CNTs is shown in the inset of Figure 4.2(a) whereas Figure 4.2(d)
and inset of Figure 4.2(b) represent the LaB6 NPs decorated CNTs. These
micrographs confirmed that synthesized CNTs were multi-walled and had variable
wall thickness. Morphology of individual wall was clearly visible at the squeezing
point of Figure 4.2(d) and this was highlighted as encircled area. Same as low
magnification TEM micrograph, smooth walls of bare CNTs were compared with
dark black and light black spots visible on the walls of LaB6 decorated CNTs. It again
affirms the deposition of LaB6 as nano sized particles and these NPs have a range of
particle size distribution from 2-12nm. Marked differences in the contrast of sputtered
LaB6 NPs were observed. This contrast difference exhibited presence of heavy
element with some light element. Lanthanum (La) is a heavy metal and its
transparency is comparatively poor than light element boron (B). Therefore, dark
black spot specify the presence of lanthanum metal whereas light black spot signifies
the presence of boron.
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Figure 4.2 TEM micrographs of (a) bare CNTs, (b) LaB6 NPs decorated CNTs, (c)
dark field TEM image of LaB6 NPs decorated CNTs and (d) magnified TEM image of
LaB6 coated CNTs. Inset shows the magnified TEM images of bare CNTs and LaB6
NPs decorated CNTs.
Here, LaB6 NPs formation procedure was interpreted or envisioned to be
governed by non uniform and rough top surface morphology of CNTs. Morphology of
sputtered material is highly influenced by substrate smoothness, temperature and
evaporation power. Our sputtering procedure is a non reactive physical vapor
deposition of compound target (LaB6) in presence of argon plasma. Sputtered LaB6
molecules or atoms, created in argon ion bombardment during sputtering process,
does not found smooth surface, as in plane silicon substrate used for sputter rate
optimization, to make the continuum and sit like a NPs rather than film. Thus, non
uniform and rough surface of CEAs was supportive in NPs formation. Decoration of
NPs has developed nano protrusions at the walls and top surfaces of CEAs. These
protrusions effectively creating nano emission sites which are expected to improve the
emission uniformity and current density of CNTs apart from work function lowering.
(b) (a)
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109
Therefore, rough surface of CEAs are beneficial in NP decoration as well as FE
enhancement.
Figure 4.3 EDS spectra of the (a) bare CEAs and (b) LaB6 NPs decorated CEAs.
Carbon (C), oxygen (O) and silicon (Si) signatures were observed for bare CNTs
whereas additional lanthanum peak was noticed in the EDS spectrums of the LaB6
decorated CNT emitter and light element boron was not detected.
Compositional differences between bare and LaB6 NPs decorated CNT
emitters were studied using EDS and its spectrums are depicted in Figure 4.3. Only
carbon, oxygen and silicon peaks were observed for bare CNTs, presented in Figure
4.3(a), whereas an additional peak of lanthanum was seen for LaB6 decorated CEAs,
shown in Figure 4.3(b). The EDS spectrum of the bare CNTs was captured vertically
on the top surface of a single dot. However due to the low thickness of LaB6 NPs, it is
necessary to take the EDS spectrum of LaB6 decorated CEAs at the grazing angle to
detect the large number of surface atom or change in top surface morphology.
Difference in the relative peak intensity of silicon, carbon and oxygen peaks was
attributed to the change in detection angle of bare CNTs and LaB6 decorated CNTs.
Due to low florescent yield, overlapping peak with carbon and fewer amounts of
boron than carbon, boron peak was not observed.
XPS analysis was carried out to affirm the presence of LaB6 NPs on the CEAs
and to study the reaction and contamination of LaB6 NPs with CNTs. Initially bulk
LaB6 target was characterized and its peak position is given in Figure 4.4(a).
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Although XPS peak position of the bulk LaB6 were well reported and cited, however,
to further confirm the quality of the sputtered target and the peak position of the
deposited material and later to correlate it with the deposited LaB6 NPs on the walls
of CNTs, bulk LaB6 XPS analysis were performed. This spectrum confirms the
material quality and gives information about the sharp peaks of lanthanum near 106.5,
197, 837 and 853 eV. The existence of boron in the target material is also confirmed
from the sharp but relatively weak peak of boron at 188. Boron exhibit low atomic
number and its sensitivity is weak compare to the heavy element lanthanum. In
addition to the LaB6 composition, target also contains oxygen and carbon as
contamination and its signature is observed at 531.5 and 285.5eV. Sputtering and
cleaning of LaB6 target with the argon ions in different runs for 5 mins reduces the
peak intensity of these two elements however, they are not removed completely. The
presence of carbon and oxygen in the LaB6 target after argon sputtering predicted that
these light elements exist and trapped in the voids of the boron cage and lanthanum
atom and they are not removed completely after rigorous argon sputtering.
The XPS spectrum of the LaB6 NPs decorated CEAs is shown in Figure
4.4(b). The LaB6 NPs decorated CEAs exhibit sharp peaks of lanthanum near 106,
837.5, 853.5eV and a weak, broad, shifted peak of boron is observed at 197eV.
Silicon signature observed near 100 and 151eV is attributed to the silicon substrate of
CEAs. Other defect peaks such as nitrogen and argon is observed near 398eV and at
242eV respectively. These element signatures are observed due to presence of
ammonia during growth and argon plasma during sputtering. A prominent peak of
oxygen is observed near 531eV. Apart from EDS, high intensity peak of oxygen in
XPS spectra also confirm that oxygen content in LaB6 NPs decorated CEAs is
relatively higher.
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Figure 4.4 XPS spectra of the (a) bulk LaB6 and (b) LaB6 NPs decorated CEAs.
To further characterize the LaB6 NPs crystallography, x-ray diffraction (XRD)
experiment was performed between Bragg angle of 0o to 60o and its spectrum is
presented in Figure 4.5. Figure 4.5(a) and 4.5(b) show XRD spectrum of bulk LaB6
and LaB6 NPs decorated CEAs. Bulk LaB6 exhibited different peaks of LaB6 at
different Bragg angles. However, signature of only one peak is observed in LaB6 NPs
coated CEAs. Inset of Figure 4.5(b) shows this peak position. This was attributed to
the low thickness of sputtered LaB6 NPs and the other possible reason may be the
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amorphous nature of LaB6 NPs. Silicon peak was also not observed due to forbidden
reflections of <100>, <200> and <300> planes and the Bragg angle of <400> plane
lies at 69o.
Figure 4.5 XRD spectra of the (a) bulk LaB6 and (b) LaB6 NPs decorated CEAs.
Furthermore, non destructive optical characterization on the bare and LaB6
NPs decorated CEAs to affirm the presence of CNTs and change in their chemistry
after NPs decoration. Raman spectra of the bare and LaB6 NPs decorated CNTs
presented in Figure 4.6, show defect peak, graphitic peak and second over tone of
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defect peak at 1356cm-1, 1578cm-1 and 2700cm-1 respectively which is known as D-
band, G-band and G'-band. The prominent G-band indicates well graphitized CNTs
while D-band is indicative of defects. Silicon peak was also observed at Raman shift
of 521cm-1. The marked difference in the Raman spectra of bare and LaB6 NPs
decorated CNT emitters was enhancement in Raman intensity and improvement in
relative D-band to G-band intensity (ID/IG) ratio. LaB6 NPs decoration on the CEAs
significantly added more defects. This attributed to the improvement in ID/IG ratio of
the bare CNTs to the LaB6 NPs decorated CNTs from 0.62 to 0.86. In general, it is
considered that with increase in defects FE capability of CNT emitters diminishes.
But the added defect sites on the CNT emitters effectively creates nano protrusion and
this may improve FE and emission uniformity, as reported by Liu et al [9] in case of
Ru NPs coating. From the improved Raman intensity of LaB6 NPs decorated CEAs, it
can be proposed that CNTs emitter arrays exhibited surface enhanced Raman
scattering due to adsorbed LaB6 NPs on their walls.
Figure 4.6 Raman spectra of the bare and LaB6 NPs decorated CEAs exhibited D-
band at 1356cm-1, G-band at1578cm-1 and the G'-band at 2700cm-1
Figure 4.7 (a) and (b) shows the comparison of current density-electric field
(J-E) and Fowler-Nordheim (F-N) plots of CEAs with and without LaB6 NPs. Straight
line nature of F-N curves confirms the electron emission is by quantum mechanical
FE tunneling while J-E curves show typical vacuum diode characteristics. Emission
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current density of CEAs improves more than six-fold from 2.05 to 13.19mA/cm2 due
to LaB6 NPs decoration at a constant applied electric field of 4.6V/µm. Remarkable
reduction in the turn-on electric field is also observed from 3.0 to 2.1V/µm for bare
CNTs to LaB6 NPs decorated CNTs. Here, turn-on electric field is the applied electric
field at a constant emission current of 100µA. This increase in the current density and
reduction in turn-on electric field was attributed to be caused by the lowering of
effective work function and creation of new emission sites due to LaB6 NPs
decoration or improvement in field enhancement factor. Furthermore, significant
changes in F-N slope after LaB6 NPs decoration on CEAs was observed and the
results were compared to the bare CEAs. Intercept of the F-N plots on y-axis appears
to converse at single point with small but significant difference in intercept point.
Slope of the F-N plot is linearly related to the work function and field enhancement
factor thorough the equation (2.12). This also signifies that variation in slope may be
attributed due to the change in either one or both of FE parameters.
Figure 4.7 Comparison of (a) J-E plots and (b) F-N curves of bare and LaB6 NPs
coated CEAs. Current density enhanced more than six-times at a constant applied
electric field of 4.6V/µm.
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4.2.3.Analysis of FE data
To ascertain the possible reason attributed to the improved FE of CNT
emitters, change in work function and field enhancement factor of bare CNT emitters
and LaB6 NPs decorated CNT emitters were estimated. Different methods have been
adopted by various research groups to calculate the work function of CNTs using
various techniques and had suggested a range of work function values. They observed
wide discrepancy in the work function values of CNTs due to the ambiguity in the
estimation of effective emitting area and the local field enhancement factor.
Moreover, other parameters like CNTs electronic band states, closed and open cap
CNTs, adsorbents lying at the surface of CNTs [13, 14] etc. highly influence their
work function. Therefore, precise work function of pristine CNTs is not well
identified [8]. To eliminate this from present work, only work function ratio of bare
CNT emitters to the LaB6 NPs decorated CNT emitters were evaluated using intercept
and slope of F-N plots.
The calculated field enhancement factor using equation (2.13), F-N slope and
reported work function of 4.5eV was 3308 and 4630 for bare CNT emitters and LaB6
NPs decorated CNT emitters. The increased field enhancement factor attributed to the
discrepancy and doubts as to whether improved FE was due to the change in work
function or field enhancement factor. As quoted earlier by [8] and in equation (2.13),
the estimated work functions of CNTs are strongly dependent on field enhancement
factor and was highly influenced by change in surface morphology or modification
[14-16]. Since, CNTs surface were modified with the LaB6 NPs and was the only
change that had introduced earlier. Therefore, improved current density and reduced
turn-on electric field was only attributed to the change in work function rather than
field enhancement factor. Furthermore, FE comparison was also done on same sample
before and after LaB6 decoration, hence two important parameters, field enhancement
factor and effective emitting area, were approximated constant.
Substitution of field enhancement factor � in y-axis intercept of equation
(2.13), reported in section 2.8 of chapter 2, and their rearrangement give the work
function value of electron field emitter as given in equation (4.1).
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(4.1)
Therefore, change in work function due to LaB6 NPs decoration was evaluated
by taking work function ratio of the bare CNT emitter to the LaB6 coated CNT emitter
as given in equation (4.2),
(4.2)
F-N slopes and y-axis intercepts, obtained from Figure 4.7, were substituted in
the above equation (4.2) which gives work function ratio of 1.68 and show
remarkable percentage reduction of 40.48% in the work function of LaB6 NPs
decorated CNTs. To determine the work function of LaB6 NPs decorated CEAs,
reverse engineering were done by dividing the reported work function of 4.5eV with
the calculated work function ratio. The estimated work function was 2.68eV which is
approximately close to the well reported work function value of bulk LaB6. This
signifies that LaB6 nano protrusions are major or sole contributor to the improved
emission rather than CNTs. This also confirms that LaB6 NPs retain their low work
function property and are only adsorbed on the CNTs surface which reduces effective
work function of CEAs. Therefore, reduced effective work function and increased
nano emission sites are major causes of remarkable improvement in FE of LaB6 NPs
decorated CEAs.
To compare the observations with other reports on surface modification
techniques, this approach intended to be more simplistic for industrial applications
because it does not require any chemical treatment, annealing steps and does not react
or contaminate CNTs. Although, Wei et al [12] finding on CNTs and Wang et al
report on silicon-tip are in agreement with our observation. But, they had modified
individual multi walled CNTs and an arrays of silicon tip with continuous and thick
film of LaB6 rather than CEAs with LaB6 NPs. Emission current observed from LaB6
NPs coated CEAs was 10.36mA at a field of 4.6V/µm which is far away from Wei et
Chapter 4: Work function engineering
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al [12] observation. Other FE parameters like screening effect, field enhancement and
adhesion were also addressed during sample preparation by pattern transfer, aligned
and direct growth of CNTs on silicon-substrate. Therefore, LaB6 NPs decoration on
the CNT emitters can be employed as a simple and convenient method to improve the
current density of existing CNT-emitters. Remarkable improvement in the current
density of the LaB6 NPs coated CEAs indicate its great promise to serve as an
electron gun of microwave tubes [3].
4.2.4.Conclusion
As-grown patterned CNT emitter arrays were successfully decorated with
LaB6 NPs using RF sputtering to improve the emission current. More than Six-fold
improvement in the current density 'J' and significant reduction in the turn-on electric
field was observed in LaB6 NPs decorated CNT emitters. Mathematical reverse
engineering confirms that actual reason of enhanced emission current was lowering of
effective work function of CNTs due to LaB6 NPs decoration. The LaB6 nano
protrusions formed on the CNTs surface effectively creating new emission sites and
are the sole reason of improved FE. Furthermore, LaB6 NPs keeps the merit of low
work function as bulk material and their calculated work function was approximately
2.68eV. TEM and Raman study confirm that LaB6 NPs deposition added more defects
on the walls of CNTs and this contributed to the improved emission current.
4.3. CNTs modified with cesium iodide nano-particles
Same as LaB6, various other materials such as metal carbide, cesium metal,
cesium iodide (CsI) etc were also explored for effective work function lowering
material of CNTs. Few paper reports Cs metal doping in CNT-emitter to enhance the
electron emission. Though, cesium metals have a low work function (2.1eV), but it
has room temperature melting point of 280C approximately. Therefore, cesium doped
CNT-emitter exhibit may possess variable electron emissivity depending upon the
operating temperature/conditions. Each material and their coating techniques have
their merits and limitations.
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Shiffler et al [17] reported that CsI films enhances the FE properties of carbon
fibers and such coatings results in reduced out gassing as well as improved emission
uniformity. Another interesting observation made by them was remarkable reduction
in the turn-on voltage. They also concluded that emission current is highly sensitive to
the coating process. Vlahos et al [18] investigated lowering of work function using
theoretical approach by carrying out ab initio calculations of CsI molecules adsorbed
onto graphite surfaces. Wadhawan et al [10] demonstrated that cesium metal improves
the FE characteristics of the single walled CNT bundle.
To the best of our knowledge till date, no one has reported decoration of CNTs
by CsI to improve their emission performance. Enlightened by the results observed by
Shiffler et al [17, 19], patterned arrays of aligned CEAs were modified to improve
their emission capabilities by coating them with CsI NPs. In this, characterization of
CNT emitters before and after CsI-coating is presented along with investigation of
change in FE properties.
4.3.1.Experimental process
CEAs were developed on the silicon substrate using same process steps
discussed in section 3.3 of chapter 3. FE of developed CEAs were carried out under
high vacuum condition at a pressure of than 1 × 10-7 Torr using same measurement
setup elaborated in section 3.4 of earlier chapter. After FE measurement, CEAs was
removed from copper disc and the back surface was cleaned to remove the silver
epoxy. Sample was then mounted in thermal evaporation system.
Cesium iodide exists in the granular form. Thermal evaporation was used for
decorating the walls and top surface morphology of synthesized CEAs to improve the
emission current of existing CNT cathodes. A high purity (5N) CsI (2.1mg) was
loaded in molybdenum (Mo) boat and evaporated at a current of 82A over CNT
emitter surface. Few milligram of cesium iodide were used for decoration of CEAs.
Microbalance (Sartorious) was used for weighing the amount of cesium iodide.
Glossy paper was used as sample holder bowl to weight the cesium iodide.
Prior to material loading Mo-boat was fired at a current of 95A with the base
vacuum better than 4 × 10-6 Torr. During CsI-coating, sample was heated at 3000C to
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improve the adherence of CsI with CNT emitter. SEM, EDS, X-ray diffraction (XRD,
Bruker D8 Discover, Bruker AXS Inc.) and Raman characterization were carried out
to study difference in morphology, elemental composition, stoichiometric and
crystalline nature of the CEAs and CsI decorated CEAs. Immediately after CsI-
coating, FE measurements were again carried out on the CNT emitter under the same
conditions.
4.3.2.Results and Discussion
SEM micrographs of CNT emitter, shown in Figure 4.8(a) and 4.8(b), confirm
aligned and selective growth of CNTs as square bundles. CNTs were mostly confined
within the 10µm × 10µm square dots having 20µm inter dot spacing. Few CNTs are
protruding outside the square dots and those lying inside the square bundles are
entangled with each other.
Figure 4.8(a) SEM images of patterned square arrays of CNT emitters synthesized
using CVD and (b) a single dot of aligned CNTs at higher magnification.
SEM micrograph of the same sample after FE measurement and CsI-coating,
presented in Figure 4.9(a) and 4.9(b) respectively, confirm that quality of CsI-coated
CNT emitters were maintained even after the processing. CsI-coated CEAs were not
damaged during FE measurements and are strongly adhered to silicon substrate. It
does not get peeled off due to strong applied electric field during FE measurements.
Substrate melting was also not observed in the micrograph, which is reported to be
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caused due to localized Joule’s heating during FE measurement. Any other
morphological change or damage was not observed between bare CNT emitter and
CsI-coated CNT emitter. These images are captured at an inclined angle to estimate
the CNT height, uniformity and quality of coated CsI. However, these micrographs do
not give clear insight into the surface morphology of CsI-coated CNT emitters as to
whether the coating consists of thin film or NPs.
Figure 4.9(a) SEM micrograph of CsI-coated CNT emitter shows nano sized and
uniformly distributed CsI particles and (b) A single dot of CsI-coated CNT emitter.
To clarify these doubts, another SEM instrument with high magnification,
resolution and image quality (ZEISS EVO MA15) was used and its images are shown
in Figure 4.10. As reported earlier, top surface morphology of the pristine CNT
emitter again confirms that CNTs are grown like a forest inside the square bundles
and are entangled with each other. Qualitative and morphological differences were
observed on the top surface of CNT emitter before and after CsI-coating. The top
surface of CNT emitter bundles was not smooth prior to the coating and CsI NPs
deposition introduced further roughness. The roughness of CNT emitter tip surface is
beneficial to FE due to reduced shielding effect. Continuous thin film coating on the
CNT emitter completely covers their tip and makes them equivalent to a flat surface.
This effectively may reduce many advantages offered by them as strong field
emitters. Therefore, coating by NPs is preferred over continuous thin film. The
particle size of CsI NPs is approximately 40-50nm. CsI NPs were found to be
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uniformly deposited over the entire CNT bundles including the substrate and were
clearly visible even over the stray CNT strands protruding out of the bundles. CsI NPs
deposited over the CNT square bundles have smaller size distribution and are
comparable to the CNT diameter whereas those lying on the substrate have bigger
particle size, Figure 4.10 (c).
Figure 4.10 SEM micrograph of single dot of the CNT emitters top surface (a) before
and (b)-(c) after CsI coating. CsI nano sized particles were uniformly distributed over
entire CNT bundle and substrate.
Furthermore, qualitative differences between pristine CNTs and CsI decorated
CNTs were ascertained by TEM analysis. TEM micrograph of the pristine CNT
emitters, presented in Figure 4.11(a) and 4.11(b), confirm their multiwalled structure.
CNTs have a range of diameter distribution with hollow bore like structure as
observed in our previous study. CNTs have variable wall thickness and have
approximately 5-25nm inner diameter and 35-50nm outer diameters. Decoration with
CsI NPs was not observed as walls of CNTs appear to be smooth. This signifies that
CNTs surface was not modified or decorated with CsI NPs. TEM micrographs of CsI
NPs decorated CNTs are depicted in Figure 4.11(c) and 4.11(d) respectively. The dark
black spots spreading on the walls of CNTs clearly signify the presence of CsI NPs.
This again confirms the decoration of CsI as NPs, rather than continuous film, over
the entire CNT strands. Another remarkable point observed in the micrograph was
absence of black spot away from the walls of CNTs and few of the CNTs have
bamboo like shape as observed in Figure 4.11(d).
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Figure 4.11 (a)-(b) TEM micrograph of bare CNT emitters, (c) CsI NPs modified
multi-walled CNTs and (d) bamboo shaped CNTs decorated with CsI NPs.
Compared to the previous report, CsI NPs decoration on patterned CEAs is
completely different from the previous LaB6 NPs modification. Thermally evaporated
CsI vapor condenses on the sample and nucleates in spherical shape like water droplet
and sits like a NPs rather than thin film. The nucleation may be attributed due to the
major difference in electron affinity, electropositive nature of cesium and
electronegative behavior of iodine atom, and in other word due to polar nature of the
molecule. The other possible reason of CsI vapor nucleation as spherical droplet can
be temperature treatment of CNTs substrate at 300°C during CsI coating. CsI NPs size
distribution is relatively bigger and is comparable to the CNTs diameter. Few NPs
size was even bigger than the CNTs diameter. As quoted in previous reports, thin film
and NPs decoration is highly influenced by the non uniform and rough top surface
morphology of CNTs and is highly sensitive to deposition process. Thermal
evaporation is a non reactive physical vapor deposition used for thin film deposition
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and morphology of the deposited film is critically influenced by substrate smoothness,
temperature and evaporation power. Thermally heated CsI in liquid or solution phase
evaporates and condenses on the rough top surface of the CNTs and did not find
smooth surface on the top surface of CNTs to make the continuum. Thus, non uniform
and rough surface of CEAs was supportive in NPs formation. Decorated CsI-NPs
created nano protrusions at the walls and top surfaces of CEAs. These protrusions
effectively developed nano emission sites which are expected to improve the emission
uniformity and current density of CNTs apart from work function lowering.
Therefore, rough surface of CEAs are beneficial in NPs decoration as well as FE
enhancement.
Qualitative composition (elemental) difference of CNT emitter and CsI coated
CNT emitters were measured using EDS and the spectrum is shown in Figure 4.12.
Pristine CNT emitter exhibits signatures of iron, carbon, silicon and oxygen only,
while CsI coated CNT emitter shows carbon, silicon and additional peaks of cesium
and iodine. Iron signatures in the uncoated CNT emitter signifies that iron particles lie
at the top surface of CNT emitters rather than at the silicon-CNT interface and from
this result we can predict that CNTs obey tip growth approach.
Figure 4.12 EDS spectrum of (a) bare CNT emitters and (b) CsI-coated CNT
emitters. Silicon, carbon, iron and oxygen peaks appear in the EDS results of pristine
CNT emitter whereas silicon, carbon, cesium and iodine peaks appear in the EDS
spectrum of CsI coated CNT emitters.
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To further ascertain the stoichiometry and crystalline nature of the deposited
NPs, XRD analysis was performed and results are shown in Figure 4.13. CsI-coated
CNT emitter has exhibited high intensity peaks of CsI only at 27.50 and 48.760 having
Miller indices <110> and <211> orientations. Silicon <100>, <200> and <300>
planes have forbidden reflections according to selection rules and Bragg angle for
<400> plane is at 690. Although Chen et al [10] quote that diffraction pattern of the
graphitized CNTs correspond to the high intensity peak of <002> plane at 26.020 and
several weak peaks were also observed by them. But our XRD analysis on bare CNT
emitter does not show any peak as observed by them. Therefore we got a clear
background and only signatures of CsI were observed.
Figure 4.13 XRD spectrum of CsI coated CNT emitter. Two major peaks appear at
27.5° and 48.76° correspond to the high intensity peaks of CsI compound having
<110> and <211> orientation.
The Raman spectra of CNT emitters and CsI coated CNT emitter, given in
Figure 4.14, show the three characteristics peaks of the CNTs; the D-band at 1348cm-
1, the G-band at 1588cm-1 and the G'-band at 2700cm-1. The D-band is indicative of
defects in the CNTs. Since CNTs are grown by CVD, they have certain carbonaceous
impurities and broken sp2 bonds in the sidewalls. The prominent G-band indicates
well graphitized CNTs while G'-band is a second over tone of D-band. The marked
difference in the Raman spectra of CNT emitters was reduction in Raman intensity
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after CsI-coating and this was attributed to the covering of CNTs with CsI NPs.
Qualitative difference between bare and CsI coated CNT emitters was estimated by
the relative D-band to G-band intensity (ID/IG) ratio. CsI NPs decoration on CNT
emitters significantly added more defects on CNTs and thus improved ID/IG ratio of
pristine CNT emitters to CsI-coated CNT emitters from 0.85 to 0.93.
Figure 4.14 Raman spectra of the pristine CNT emitter and CsI-coated CNT emitter
shows the three characteristics peaks of D-band at 1348cm-1, G-band at1588cm-1 and
the G'-band at 2700cm-1.
Figure 4.15 Comparison of (a) J-E plots and (b) F-N curves of pristine CNT emitters
and CsI coated CNT emitters.
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Figure 4.15 shows the J-E and F-N curves of our typical CNT emitters before
and after CsI-coating. F-N curve is a straight line which is characteristics of electron
emission by quantum mechanical FE tunneling, while J-E curve shows typical
vacuum diode characteristics. In Figure 4.15(b) for CsI-coated CNT emitter, the F-N
curve is in good agreement with the straight-line behavior predicted by the F-N
equation and it also has uniform slope. On the other hand, pristine CNT-emitters show
slightly non-linear behavior of F-N curve and its slope is varying. From J-E plots, it is
observed that turn-on electric field was at 3V/µm prior to CsI-coating. However
significant reduction in turn-on electric field to 2.13V/µm was observed after CsI-
coating. Here, turn-on electric field is knee field at a constant current density of
100µA/cm2. After CsI-coating on CNT-emitters the emission current density also
shows remarkable improvement by more than 50%, from 11.02 to 17.33mA/cm2 at a
constant electric field of 5V/µm. Similar to LaB6 NPs decoration, CsI NPs coated
CEAs also exhibit change in F-N slope compared to the pristine CEAs with
approximately conversing intercept on y-axis.
4.3.3.Analysis
To analyze the possible reason of improved FE performance from the CsI-
coated CNT emitter, we have computed work function ratio of the pristine CNT
emitter and CsI-coated CNT emitter. Previous reports suggest that the ambiguities
exists over the precise work function, field enhancement factor and effective area
calculation of CNTs. Various other parameters such as CNT electronic band states,
closed and open cap CNTs, adsorbed molecules at the surface of CNTs highly
influence their work function. As quoted earlier, CsI NPs adsorption (decoration) on
CNT emitters added more defects which contributed towards work function
modification and enhanced FE current density. To avoid this discrepancy in our
analysis, instead of finding change in absolute values of work function for CNTs, we
have evaluated the change in work function as work function ratio for the CNT
emitters prior to CsI coating and after CsI coating.
The value of � = ��� �� can be determined from F-N curve in Figure 4.15(b),
and it is equal to slope of F-N curve ln(I/V2) vs. 1/V . Here, 'B', 'd', 'ϕ' and 'β' are
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exponential factor, anode emitter separation, work function and field enhancement
factor respectively. It can be seen that there is marked difference in slope of F-N
curves for CNT-emitters before and after CsI deposition while their intercepts on the
y-axis is approximately constant. FE parameters like field enhancement factor, work
function and effective emitting area are intimately related to each other through
experimental F-N slope and intercept on y-axis. Since FE measurements were carried
out on the same sample having same geometry and under same measurement
conditions, therefore we can approximate field enhancement factor 'β' remains
unaltered even after CsI NPs deposition. But there can be marked change in effective
work function of CNT emitters due to surface modification by CsI NPs coating and
this change in work function has contributed to reduction in slope of F-N curve. This
change in effective work function as ratio of pristine CNT emitter to the CsI-coated
CNT emitter can be calculated from the ratio of their respective F-N slopes as given
in equation (4.3).
� ��
� ��� ��= � � ��
� ��� ���� ��
(4.3)
Substitution of slopes from the F-N plots in equation (4.3) gives the work
function ratio equal to 1.54 for the pristine CNT emitters to the CsI-coated CNT
emitters. This lowering in the effective work function of CsI coated CNT emitter is
therefore considered responsible for the remarkable enhancement in their current
density and significant reduction in the turn-on electric field. Reduction in the turn-on
electric field and increase in the FE current is either due to tunneling from CsI
adsorbate states or due to reduction in effective work function at the surface of the
CNTs, or a combination of both.
As compared with CNT emitter modified by traditional materials such as
titanium, zirconium, hafnium, LaB6 etc., this approach does not need conventional
annealing steps [12] complex chemical treatment [9] and does not react with the
CNTs [3] as in the case of zirconium carbide and titanium carbide due to the joules
heating. From our XRD results, chemical states of the coated material (CsI) were
maintained even after thermal evaporation, as also observed by Fairchild et al [4]. Our
work of decorating the CsI NPs over the CNT emitters is more simplistic for device
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fabrication. Therefore for practical and industrial application, CsI NPs decoration can
be employed as a simple, feasible and convenient method for improving the current
density of existing CNT-based cathodes.
4.3.4.Conclusion
CsI NPs coating on the CNT emitters has significantly improved the FE
properties, such as reduction in the turn-on electric field by a factor of 1.4 and
increase in the current density by more than 50%. Additionally, the ratio of work
functions after and before CsI NPs deposition is approximately 0.65 (1/1.54),
indicating reduction in the work function of the CsI-coated CNT emitter. Our present
work of CsI coating on the CNT emitter can be used as a simple and effective method
for improving the current density of existing CNT emitters, especially for electron
source applications which require very high current densities.
4.4. Summary & Conclusions
Work function engineering is a robust and effective approach to enhance the
electron emissivity of the CEAs. LaB6 and CsI were successfully decorated on the as-
grown patterned CEAs as NPs rather than continuous film using RF sputtering and
thermal evaporation respectively. LaB6 NPs decorated CEAs exhibited remarkable
improvement of more than six-fold whereas CsI NPs coated CEAs show robust
enhancement of approximately two times in emission current density. Significant
reduction in the turn-on electric field was also observed for both the LaB6 NPs and
CsI NPs modified CEAs. The decorated LaB6 NPs have smaller particle size
distribution that ranges from 2-12nm. However, CsI NPs size distribution is bigger
than LaB6 NPs and the CsI particle sizes are comparable to the diameter of CNTs and
even bigger than CNTs diameter. The particle size of CsI NPs is approximately 40-
50nm. One more remarkable point observed form the comparison of XRD spectrum
of bulk material and decorated NPs is that decorated NPs obey preferred orientation.
Chapter 4: Work function engineering
129
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