WS CDC200 Custom Data Collection User s Guide 7.1rev2

Custom Data Collection User’s Guide

1

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Custom Data Collection Users Guide (CDC-200)

Print History New editions are complete reprints of the document. The dates in the Print History change only when a new edition is printed.

Many product updates do not require document changes and, conversely, documentation revisions may be done without accompanying software changes. Therefore, do not expect a one-to-one correspondence between software version updates and documentation revisions.

WorkStream Version #5.1

First Edition April 1994

WorkStream Version # 5.3

Second Edition August 1997

WorkStream Version # 7.1 Revison 2

Third Edition - Upgraded for Applied Materials

June 2002

Contents

Section 1 Overview Features 1-1

Document Organization 1-2

Intended Audience 1-2

Reference Documents 1-3

Section 2 FMS-Based Data Collection Designing the Form 2-3

Creating the Form 2-3

Defining Parameters 2-6

Creating the Form Setup 2-8

Custom Form Setup ID Maintenance Menu (1FMM) 2-10

Step 1 – Defining the Setup ID 2-11

Step 2 – Assigning Variables 2-13

Step 3 – Defining Variables 2-15

Step 4 – Defining Default Values 2-24

Step 5 – Locking the Setup ID 2-26

View Custom Form Setup ID (1VCF) 2-28

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View Variable Assignments (1VVA) 2-29

View Variable Definitions (1VVD) 2-30

View Field Defaults (1VFD) 2-32

View Custom Form Setup IDs Using Form (1VIF) 2-33

View All Custom Form Setup IDs (1VFS) 2-34

Copy Custom Form Setup (1CFS) 2-35

Attaching the Form Setup to a Collection Point 2-36

Custom Form Setup ID Attachment Menu (1FAM) 2-37

Update Custom Form Setup ID Attachment (1UCA) 2-39

Copy Custom Form Setup ID Attachment (1CCA) 2-41

View Custom Form Setup ID Attachment (1VCA) 2-44

View Attachments for Custom Form Setup ID (1VAS) 2-45

Using FMS-Based Data Collection 2-46

Section 3 GTS-Based Data Collection Setting Up the Table 3-3

Setting Up the Table 3-3

Update Table Description (UTDG) 3-3

Add Table Entries (ATEG) 3-5

Defining Parameters 3-6

Update Engineering Parameter Definition (ULPD) 3-6

Update EDC Parameter Set ID Version (UPSV) 3-8

Using GTS-Based Data Collection 3-9

Section 4 FMS/GTS-Based Data Collection Using FMS/GTS-Based Data Collection 4-6

Contents

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Section 5 Reports List All Custom Form Setup IDs (1LFS) 5-2

List All Custom Form Setup ID Attachments (1LCA) 5-3

EDC Parameter List Report (E501) 5-5

Section 6 File-Based Data Collection Setup and Use 6-2

Setting Parameter Set Version 6-2

Defining the COM$TESTNAME table 6-3

Setup Scenarios 6-5

Dynamic Insertion of Unit IDs 6-8

Maintenance 6-9

Limitations 6-9

Common Errors 6-10

WorkStream Data File (WDF) Description 6-10

General Rules 6-11

Appendix A Example of FMS Setup Update Engineering Parameter Definition (ULPD) A-2

Update EDC Parameter Set ID Version (UPSV) A-6

Update Custom Form Setup ID (1UCF) A-7

Update Variable Assignments (1UVA) A-8

Update Variable Definitions (1UVD) A-9

Update Field Defaults (1UFD) A-10

Lock/Unlock Custom Form Setup ID (1LCF) A-11

Update Custom Form Setup ID Attachment (1UCA) A-12


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Appendix B User-Defined Calculations

Appendix C Example of GTS Setup Update Table Description (UTDG) C-2

Add Table Entries (ATEG) C-3

Update Engineering Parameter Definition (ULPD) C-4

Update EDC Parameter Set ID Version (UPSV) C-5

Run-Time Custom Screen C-6

Appendix D Example of FMS/GTS Setup Creating the GTS Table Setup D-1

Creating the EDC Setup D-2

Creating the FMS Setup D-4

Executing the Custom Screens D-6

List of Figures 2-1 FMS-Based Data Collection Setup 2-2

2-2 CDC Menu Tree 2-9

4-1 FMS/GTS-Based Repair Data Application 4-2

List of Tables 2-1 Recommended Field Lengths 2-5

2-2 System Variables 2-14

6-1 Alternate Method of Data collection Codes for WDF Based Collection 6-2

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Overview

Custom Data Collection, an extension to Engineering Data Collection Module, is an alternative means of collecting engineering data. It allows you to create custom EDC screens displayed at process times, and is compatible with WorkStream 5.2 or higher.

CDC incorporates both Forms Management System (FMS) and General Tables System (GTS) data collection.

Because CDC uses the alternative data collection feature provided by EDC, all of EDC’s applicable features apply to CDC. EDC, in turn, uses other WorkStream modules to provide an integrated system for data collection, storage, and analysis

Features The CDC Module:

Allows you to create customized engineering data collection screens for ease of data entry.

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Provides a single screen to collect multiple engineering parameters.

Allows you to define default values to reduce operator keystrokes.

Eliminates manual calculation of raw data.

Allows you to perform site-specific calculations with the user exit provided in the calculation routine.

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Allows equipment failure data collection from predefined choices.

Allows fields to be defined to display values whose calculated values are based on other fields.

Allows you to store both raw data and calculated data in the engineering history.

Document Organization Section 2 – Describes the setup and use of FMS-based data collection.

Section 3 – Describes the setup and use of GTS-based data collection.

Section 4 – Describes the setup and use of FMS/GTS-based data collection.

Section 5 – Describes the reports available for the CDC setup data.

Section 6 – Describes the setup and use of file-based data collection.

Section 7 – Provides an example of FMS-based data collection setup.

Appendix A – Provides an example of user-defined calculations for FMS-based data collection.

Appendix B – Contains user-defined calculations.

Appendix C – Provides an example of GTS-based data collection setup.

Appendix D – Provides an example of FMS/GTS-based data collection setup.

Intended Audience This document is written for those who need to know how to set up and use data collection with the CDC Module.

It is assumed you are already familiar with EDC, for information on basic engineering data collection, and Work-in-Process (WIP), if collecting lot engineering data, or Resource Tracking (RTC), if collecting resource tracking engineering data.

Reference Documents The following documents provide additional information on topics discussed in this guide:

Engineering Data Collection User’s Guide

Overview

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WIP Tracking User’s Guide

Resource Tracking User’s Guide

Script User’s Guide

Digital Equipment Corporation’s VAX FMS Introduction Manual

Digital Equipment Corporation’s VAX FMS Reference Manual.


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FMS-Based Data Collection

CDC can collect both FMS- and GTS-based data. This section describes the setup and use of FMS-based data collection.

To set up FMS-based data collection:

1. Design the custom form on paper.

2. Create the custom form (using the VAX FMS utility).

3. Define EDC parameters and parameter sets.

4. Create the custom form setup.

5. Attach the custom form setup to an EDC collection point.

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Figure 2-1 illustrates the FMS-based data collection setup process.

Figure 2-1. FMS-Based Data Collection Setup

FMS

PROGRAM PUTFILE or

COMETS$SYSTEM:CON009

ULPD

Create the Custom Form Setup

Start

Design the Custom Form on Paper

Define EDC Parameters and Parameter Sets

Create the Custom Form

1UVD

Attach the Custom Form Setup to an EDC Collection Point

Create Form

Insert Form into FORMDATA File

Create Parameter Set Version

Create Parameter

Define the Custom Form Setup ID

Assign a Variable to Each Field on the Custom Form

Define Each Variable Assigned on the Form

Define Default Values for Each Field (Optional)

Lock the Custom Form Setup ID

Update Custom Form Setup ID Attachment

UPSV

1UCF

1UVA

1UFD

1LCF

1UCA

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Designing the Form

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Operator interface – Design the form for the operator’s ease of use.

EDC/FMS limitations – Because FMS-based data collection uses the WorkStream screen-handling routine, some FMS features are unavailable. These include scrolled fields, field validation characters, boxes, and double-size characters.

Maintenance implications – Design the form on paper before setting it up online.

Creating the Form Use the Digital Equipment Corporation (DEC) FMS utility to create the custom form on the Form Editor Menu screen. For details on using FMS, refer to DEC’s VAX FMS Introduction and VAX FMS Reference Manual.

Phase Choice: []_______

Form Layout Assign Data Order Test Exit

Assign form attributes Create or modify a form Assign field attributes Enter Named Data items Modify field access order Test the form with the Form Driver End this editor session

Form Name: CPTXXX Input File: New form being created

Form Editor Menu

After the custom form is created, use either of the following options to insert the form into the FORMDATA file:

PROGRAM PUTFILE in the WorkStream Maintenance Dispatcher, see the Maintenance Function Dictionary for details.

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COMETS$SYSTEM:CON009 form name (without the extension .FRM).

When creating a form, adhere to the following rules:

The form name cannot exceed six characters.

The first character must be non-numeric.

The maximum number of fields allowed on a custom form is 99.

Allow enough length for the data value fields. EDC stores a maximum field length of 12 characters.

To avoid name conflicts with other WorkStream forms, use the naming convention

CPTxxx

where xxx is a number between 001 and 999.

Do not use the name CPT000 because it is a Main menu form.

Create a template form CPT001.FRM with common fields (such as Company Name, Facility, Date, Message, and so on) to avoid having to create these fields with each new form.

You can set the configuration option CMT000-FORMDATA-FILE-FLAG to 1 for concurrent access of the FORMDATA file (WorkStream 5.2 and higher).

Inserting any form into this file while other users are accessing it from WorkStream may lock it.


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Even though WorkStream will not enforce minimum lengths for fields, you should use the field lengths shown in Table 2-1.

Table 2-1. Recommended Field Lengths

Field Length

System date and time (*DAT) 21 Company name/username (*COM) 20 Facility name (*FAC) 6 EDC header line #1 (*HL1) 78 EDC header line #2 (*HL2) 78 EDC header line #3 (*HL3) 78 EDC header line #4, part 1 (*H4A) 10 EDC header line #4, part 2 (*H4B) 12 EDC header line #4, part 3 (*H4C) 9 EDC header line #4, part 4 (*H4D) 12 Message line #1 (*ML1) 78 Message line #2 (*ML2) 78 Numeric fields 12 Lot number (*LOT) 11 Route name (*RTE) 10 Operation (*OPR) 4 Product (*PRD) 25 Parameter set ID (*PID) 12 Parameter set version (*PVR) 6 Lot quantity (*LQY) 10 Entity (*ENT) 12 Event (*VEN) 12 Script ID (*SID) 12 Script version (*SVR) 6 Script step (*STP) 4


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Defining Parameters Use the Update Engineering Parameter Definition (ULPD) and Update EDC Parameter Set ID Version (UPSV) functions in the EDC Module to define the parameters and parameter sets for FMS-based data collection. For details on EDC setup, refer to the Engineering Data Collection User’s Guide.

LEC002Sf UPDATE ENGINEERING PARAMETER DEFINITION (ULPD) SYS 3/24/94 20:03:06

CUSTOM SERVICES F06

PARAMETER NAME.....EXAMPLE PAM PARAMETER ID (opt)..___________ LEC ONLY (L) / RTC ONLY (N) (opt)..__

DESCRIPTION...___________________________________ REQUESTOR (opt).........___________ PARAMETER PROMPT...

COLLECTION METHOD ("K"=keyboard/"F"=file)............K DERIVED PARAMETER (Y/N)....N

READINGS/ENTITY OR LOT..1 FILE FORMAT (LEC-1,2,3; RTC-4; 0).._ LIMIT CHECKING APPLIED AGAINST (SELECT ONE):

or USE AUTOMATIC FILENAME (Y/N)......._ SINGLE VALUE..._ RANGE.........._

SAMPLES/ENTITY OR LOT...__ or __ % PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST. DEV. ......_

READINGS/SAMPLE.........__ COPY FILE INTO DATABASE (Y/N)......_ MINIMUM........_ USER..........._

or MAXIMUM........_

PROMPT CODES (TABLE)....____________ FORMAT (A,D,E,F,0-9)....E STORE CALCULATED VALUE (Y/N)..._

READINGS/PROMPT.........__ VALIDATION TABLE (opt)..____________ APPLY CALCULATION TO (SELECT ONE):

SCALING FACTOR (opt)....___ READINGS FOR EACH SAMPLE...

VALIDATE SAMPLE UNIT ID'S AS : UNIT OF MEASURE (opt)...____________ READINGS FOR ALL SAMPLES...

NO VALIDATION....X DEF VALUE / MASK (opt)..____________

AS UNIT IN LOT..._ USER ALPHA DATA SHORT..._

AS COMP IN LOT..._ USER ALPHA DATA LONG....____________

RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER..

SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION... ___

LEC009 YOU ARE CREATING A NEW PARAMETER. IF THIS IS CORRECT, PLEASE INPUT

DATA AND PRESS RETURN. OTHERWISE EXIT.

FMS-based data collection supports only the following parameter characteristics:

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LEC and NTC data collection

Alphanumeric and numeric formats

Keyboard collection

Data for multiple samples and readings

Validation tables

The Collection Method field must be set to K.


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EDC011S UPDATE EDC PARAMETER SET ID VERSION (UPSV) SYS 3/14/94 01:32:08 CUSTOM SERVICES F06 PARAMETER SET ID....EXAMPLE VERSION...1 EFFECTIVE PERIOD: START DATE-TIME...02/22/93 07:02 END DATE-TIME... / / : AUTHOR (opt)... PRECEDENCE ORDER OF ADDITIONAL PARAMETERS (Rank 1 through 12): LOT...1 PRODUCT...2 ROUTE...3 OPER...4 ROUTE-OPER...5 PRODUCT-OPER...6 ENTITY-EVENT...7 ENTITY...8 EVENT...9 ENTITY SCHEME/TYPE..-1 ENTITY STATUS..-1 PROD-ENTITY...-1 ENTITY TYPE/SCHEME (0-5)... ENTITY STATUS (0-9)... ONLY COLLECT HIGHEST PRECEDENCE LEVEL (Y/N)...Y USE ALTERNATE COLLECTION METHOD (opt).........F COMMENT: RETURN = PROCESS SFK2 = HELP SFK5 = VIEW ID... VERSION... SFK1 = EXIT SFK9 = TERMINATE SFK3 = NEXT FUNCTION...____ EDC017 ERROR - THE EDC PARAMETER SET VERSION IS FROZEN AND THUS CANNOT BE MODIFIED. PLEASE EXIT OR TERMINATE THIS VERSION.

FMS-based data collection supports only the following parameter set version characteristics:

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The field, Only Collect Highest Precedence Level, must be set to Y.

The field, Use Alternate Collection Method must be set to F. If left blank, the standard EDC collection screen is displayed.

Creating the Form Setup After defining the parameter set, creating the custom form and inserting it into the FORMDATA file, do the following:

1. Define the custom form setup ID (1UCF).

2. Assign a variable to each field on the custom form (1UVA).

3. Define each variable assigned on the form (1UVD).

4. Optionally, define default values for each field (1UFD).


5. Lock the custom form setup ID (1LCF).

These functions, and corresponding view screens, are accessible from the Custom Form Setup ID Maintenance Menu (1FMM), as shown in Figure 2-2.

1FMM also allows you to access 1CFS to copy setup information from one custom form to another, and 1LFS to list all setup IDs. (For the description of 1LFS, see Section 5, Reports.)

Figure 2-2. CDC Menu Tree

(CDCM)

1FMM 1FAM

1UCF 1VCF 1UVA 1VVA 1UVD 1VVD

1UFD 1VFD 1LCF 1CFS 1VIF 1VFS

1LFS

Custom Data Collection Menu

1UCA 1VCA 1VAS 1CCA 1LCA

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Custom Form Setup ID Maintenance Menu (1FMM) Use the Custom Form Setup ID Maintenance Menu (1FMM) to create and maintain the custom form setup.

CDC100S CUSTOM FORM SETUP ID MAINTENANCE MENU (1FMM) SYS 3/24/94 18:43:12 CUSTOM SERVICES F06 FUNCTION...............1UCF CUSTOM FORM SETUP ID...EXAMPLE_____ FORM NAME.............._______ UPDATE CUSTOM FORM SETUP ID.............(1UCF) VIEW CUSTOM FORM SETUP ID...............(1VCF) UPDATE VARIABLE ASSIGNMENTS.............(1UVA) VIEW VARIABLE ASSIGNMENTS...............(1VVA) UPDATE VARIABLE DEFINITIONS.............(1UVD) VIEW VARIABLE DEFINITIONS...............(1VVD) UPDATE FIELD DEFAULTS...................(1UFD) VIEW FIELD DEFAULTS.....................(1VFD) LOCK/UNLOCK CUSTOM FORM SETUP ID........(1LCF) COPY CUSTOM FORM SETUP ID...............(1CFS) VIEW CUSTOM FORM SETUP IDS USING FORM...(1VIF) VIEW ALL CUSTOM FORM SETUP IDS..........(1VFS) LIST ALL CUSTOM FORM SETUP IDS..........(1LFS) RETURN = PROCESS SFK1 = EXIT SFK2 = HELP

Fields FUNCTION – Enter any valid WorkStream function.

CUSTOM FORM SETUP ID – Identifies the custom form setup.

FORM NAME – Identifies the form.


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Operation To access a function on the 1FMM screen:

1. Enter the function code in the Function field.

2. Press Return. The screen associated with the function code you entered is displayed.

3. To access Help, press SFK2.

4. Press SFK1 to exit.

Step 1 – Defining the Setup ID Use the Update Custom Form Setup ID (1UCF) function to define the name by which FMS-based data collection setup will be known. This function allows you to create, modify, or delete the definition of a custom form setup ID.

CDC110S UPDATE CUSTOM FORM SETUP ID (1UCF) SYS 3/02/94 18:15:55 CUSTOM SERVICES F06 CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION (opt)......EXAMPLE OF FMS DATA COLL. FORM NAME..............CDC990 HELP CODE (opt)........1XYZ RETURN = PROCESS SFK9 = DELETE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____ CDC301 YOU ARE CREATING A NEW SETUP ID. IF THIS IS CORRECT, ENTER DATA AND PRESS RETURN. OTHERWISE EXIT.


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1UCF Fields CUSTOM FORM SETUP ID – Identifies the custom form setup. You can minimize maintenance by having a similar name for both the setup ID and parameter set ID.

DESCRIPTION – Provides the option of entering a description for the setup ID in a maximum of 25 characters. This description is not displayed at the time of data collection.

FORM NAME – Indicates the name of the form assigned to the custom form setup. This form must be in the FORMDATA file.

HELP CODE – Indicates a file in the COMETS$HELP directory that is displayed if you request Help from the CDC screen during data collection. This field is optional.

To use this feature:

1. Use the screen editor to create a Help text file with the extension .HLP. For example, on the 1UCF screen, the Help text file is 1XYZ.HLP.

Alternatively, you can copy a function.HLP file from the COMETS$HELP directory, and then use the screen editor to modify its text.

2. Insert this file into the WorkStream Help text library by using the PROGRAM PUTFILE function in the Maintenance Dispatcher.

Operation To define the custom form setup ID:

1. Access 1UCF from 1FMM or any other WorkStream screen.

2. Enter the necessary information.

If the custom form setup ID is locked, use the Lock/Unlock Custom Form Setup ID (1LCF) function to unlock it.

The form must be in the FORMDATA file before it can be assigned to a custom form setup ID.

3. Press Return.

4. To delete the custom form setup ID, press SFK9. At the confirmation message, press SFK9 again to confirm the deletion, or any other key to prevent it.


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A delete transaction removes the data from the database. A terminate transaction discontinues the data without removing it.


6. Press SFK1 to exit or SFK3 to access the next function.

Step 2 – Assigning Variables Use the Update Variable Assignments (1UVA) function to assign a variable to each field on the custom form defined by the custom form setup ID. Entries must start in the first column of each respective field. The form attached to the custom form setup ID is displayed.

CDC990S FMS-BASED DATA COLLECTION EXAMPLE *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D WAFER ID A A A WAFER AVERAGE -------- ------------ ------------ ------------ ------------- B D D D E B D D D E B D D D E OVERALL AVERAGE...F LOCATION LOC. AVERAGE -------- ------------ G H G H LOW SHUTDOWN LIMIT....I G H HIGH SHUTDOWN LIMIT...J RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK5 = REVIEW *ML1 *ML2

Operation To assign a variable to each field on the custom form:

1. Access 1UVA from 1FMM or any other WorkStream screen.


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2. For each field, enter a letter from A to Z (uppercase) or a to z (lowercase), or one of the four-character system variables shown in Table 2-2.

If the custom form is locked, use the Lock/Unlock Custom Form Setup ID (1LCF) function to unlock it.

3. Press Return.



Table 2-2. System Variables

Variable Description

*DAT System date and time *FAC Facility name *COM Company name or username (depending on the configuration

option) *HL1 EDC header line #1 (WIP: parameter set ID and version, lot

number; RTC: parameter set ID and version) *HL2 EDC header line #2 (WIP: lot quantity, operation, product;

RTC: entity, event) *HL3 EDC header line #3 (WIP: script ID and version; RTC: script

ID and version; step number) *H4A EDC header line #4, part 1 (WIP: operator prompt) *H4B EDC header line #4, part 2 (WIP: operator value) *H4C EDC header line #4, part 3 (WIP: machine prompt) *H4D EDC header line #4, part 4 (WIP: machine value) *ML1 Message line #1 *ML2 Message line #2 *LOT Lot number *RTE Route name

Table 2-2 System Variables (cont’d)

Variable Description


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*OPR Operation *PRD Product *PID Parameter set ID *PVR Parameter set version *LQY Lot quantity *ENT Entity *VEN Event *SID Script ID *SVR Script version *STP Script step

Step 3 – Defining Variables Once all the variables are assigned on the form, use Update Variable Definitions (1UVD) – Screen One to define these variables to perform respective tasks. (You can define variables that, though are not displayed on the screen, hold calculated values.)

From this screen, you can access 1UVD – Screen Two to set up access to prior data.

EDC parameters associated with the variables will be stored in the database. An error message is returned if there is a mismatch between the variable and the parameter as defined in ULPD.


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1UVD – Screen One

CDC120S UPDATE VARIABLE DEFINITIONS (1UVD) SYS 3/24/94 19:07:33 CUSTOM SERVICES F06 PAGE 1

CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION...EXAMPLE OF FMS DATA COLL. FORM NAME...CDC990

VARIABLE ABSOLUTE LIMITS

VAR DESCRIPTION PARAMETER D/P/S TRANS ROWS COLS FORMULA OPT A/N LOW HIGH

--- --------------- ------------ --- ----- ---- ---- ----------------------------------- --- --- ------------ ------------

A PROMPT LOCATION ____________ D N 1 3 @DEF_______________________________ _ _ ____________ ____________

B WAGER NUMBER___ ____________ D N 3 1 ___________________________________ Y N 1___________ 25__________

C DATA PROMPT IDS DATA________ P N 3 3 %STR(#B) & (#A)____________________ _ _ ____________ ____________

D INPUT DATA_____ DATA________ D N 3 1 ___________________________________ N N 0___________ 100_________

E WAFTER AVERAGES WAFER AVG___ D N 3 1 %AVG(#D)___________________________ _ _ ____________ ____________

F LOT AVERAGE____ LOT AVG_____ D N 1 1 %AVG(#E)___________________________ _ _ ____________ ____________

G PROMPT LOCATION ____________ D N 1 3 @DEF_______________________________ _ _ ____________ ____________

H AVERAGE BY LOC LOC AVG_____ D Y 3 1 %AVG(#D)___________________________ _ _ ____________ ____________

I LOT SHUTDOWN___ DATA________ D N 1 1 @LSL_______________________________ _ _ ____________ ____________

J HIGH SHUTDOWN__ DATA________ D N 1 1 @HSL_______________________________ _ _ ____________ ____________

RETURN = PROCESS + CONTINUE SFK7 = PROCESS + FINISH SFK4 = NEXT PAGE SFK9 = DELETE

SFK1 = EXIT SFK0 = 2ND SCREEN SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...___

CDC327 YOU ARE MODIFYING EXISTING VARIABLE DEFINITIONS FOR A SETUP ID.

IF THIS IS CORRECT, REVISE DATA AND PRESS RETURN. ELSE EXIT.

Fields CUSTOM FORM SETUP ID – Identifies the setup whose variable definitions you want defined, modified, or deleted. This field, carried forward from the 1FMM screen, is protected.

DESCRIPTION – Describes the custom form setup in a maximum of 25 characters. This is a protected field.

FORM NAME – Identifies the form assigned to the custom form setup. This is a protected field.

VAR – Identifies the variable assigned using 1UVA.

VARIABLE DESCRIPTION – Provides the option of entering a 15-character description for each variable. These descriptions are not displayed at run-time.


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PARAMETER – Identifies the parameter for which the data is stored. If this field is blank, the data is not stored in the history. The following display-only formulas require a parameter name: @LWL, @LSL, @HWL, @HSL, @PAR. This is a protected field.

D/P/S – Identifies the flag that determines whether the variable corresponds to parameter data or parameter prompt values or a status flag.

TRANS – Determines how rows and columns correspond to samples and readings for calculation and storage. Enter N to have rows on the custom form correspond to samples and columns correspond to readings. Enter Y to have rows correspond to readings and columns correspond to samples. The default for this optional field is N.

ROWS – Identifies the number of rows of data on the custom form. If a parameter is specified, the number of rows cannot exceed the number of samples (or readings, if transposed) defined for the parameter. This is a required field.

COLS – Identifies the number of columns of data on the custom form. If a parameter is specified, the number of columns cannot exceed the number of readings (or samples, if transposed) defined for the parameter. This is a required field.

FORMULA – Defines a formula for calculation.

To reference values from other variables, use the pound sign (#). The variables that you refer to should exist prior to the current variable. For example, variable H can use values of other variables A through G, but cannot use values of variables H through Z.

Examples Calculate the average value of variable A by using the following formula:

%AVG(#A)

Calculate the average values of variables A, B, and C by using the following formula:

%AVG(#A, #B, #C)

Use subscripts defined on the 1UVD screen to perform calculations on a matrix.

Example Perform calculations on variable A (which is a 3 x 3 matrix) by using these formulas:

%AVG(#A(2,3))


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This calculates the average value of the elements A(2:3), A(3:1), A(3:2), and A(3:3) on the matrix.

%AVG(#A(1:2),#A(2:3))

This calculates the average value of the selected elements A(1:2) and A(2:3) on the matrix.

Warning

Due to the complex nature of calculation involved when multiple variables are used in a single calculation, it is recommended that you verify the result before implementation. If for some reason multiple variable calculation does not give you the correct result, it is always safer to perform a single calculation using dummy variables.

The following operands may be used within formulas:

Operand Description

+ Addition - Subtraction * Multiplication / Division ^ Raise to the power (exponential) & Concatenation (12-character maximum length for result)


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The following calculation formulas are included in the CDC Module:

Formula Description

%ABS Absolute value %AVG Average value %MAX Maximum value %MIN Minimum value %SDV Standard deviation of values %SQR Square root %SUM Sum of values %STR Converts numeric value to alphanumeric %RND Random value %RNG Range of values %MAP Maps values to a different array

User-defined calculation formulas can be added to the user exit CDC900 and referenced here (see Appendix B).

The following formulas display information about the parameter as specified in the Parameter field:

Formula Information Displayed

@LWL Low warning limit @LSL Low shutdown limit @HWL High warning limit @HSL High shutdown limit @PAR Parameter name @GTS Collect data using GTS-based data collection @PRI Prior data review

Display or store default values by using the formula @DEF which enters a parameter name to store default values.


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OPT – Indicates whether the entry is optional for the variable. Enter Y for optional data entry and N for mandatory data entry. If the data is being stored for a parameter that requires mandatory data entry, it cannot be marked as optional. If a formula has been specified for a variable, you cannot enter information in this field.

A/N – Indicates whether the data is alphanumeric or numeric. Enter A for alphanumeric and N for numeric. If the data is being stored for a parameter, this field must match the parameter type. If a formula has been specified for a variable, you cannot enter information in this field.

LOW ABSOLUTE LIMITS – Identifies the lower-bound sanity limits for numeric data fields. This field is optional.

HIGH ABSOLUTE LIMITS – Identifies the higher-bound sanity limits for numeric data fields. This field is optional.

Operation To update variable definitions:

1. Access 1UVD from 1FMM or any other WorkStream screen.



3. Press Return to store the information in a buffer and go to the next page.

4. To delete the definitions for all variables, press SFK9. At the confirmation message, press SFK9 again to confirm the deletion, or any other key to prevent it.


5. To process the current page and complete the transaction without displaying any more pages, press SFK7. The data will now be stored in the database.

6. To page through additional screens, press SFK4 and SFK6.



9. To set up access to prior data, press SFK0. The following screen appears:


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1UVD – Screen Two This second 1UVD screen allows you to access prior data which can be used for display or in the calculation at the runtime. Because access prior data affects performance at the runtime, be selective in using this feature.

CDC122S UPDATE VARIABLE DEFINITIONS - 2 (1UVD) SYS 3/24/94 19:07:33

CUSTOM SERVICES F06 PAGE 1


PRIOR DATA ATTRIBUTE ATTRIBUTE OCCUR

VAR ACTIVE PARAMETER ROUTE OPER LOT ENTITY EVENT TYPE NUMBER/NAME NO.

--- ------ ----------- ---------- ---- ----------- ------------- ------------ --------- ------------------------ ------

A _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

B Y ___________ __________ ____ ___________ _____________ ____________ E LOCATION________________ ____

C _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

D Y DATA_______ 618%______ 1000 H-8________ _____________ ____________ _ ________________________ ____

E _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

F _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

G _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

H _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

I _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

J _ ___________ __________ ____ ___________ _____________ ____________ _ ________________________ ____

RETURN = PROCESS + CONTINUE SFK7 = PROCESS + FINISH SFK4 = NEXT PAGE

SFK1 = EXIT SFK0 = 1ST SCREEN SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT

FUNCTION...____

CDC424 YOU ARE MODIFYING THE EXISTING PRIOR DATA FOR A SETUP ID.


Fields CUSTOM FORM SETUP ID – Identifies the setup whose variable definitions you want defined, modified, or deleted. This field, carried forward from the 1FMM screen, is protected.



VAR – Identifies the variable assigned using 1UVA.


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ACTIVE – Determines if prior data for that variable is to be retrieved at runtime. Valid values are:

Y – For active; meaning the prior data for that variable is retrieved at runtime.

N or “ ” – Not active; the prior data for that variable is not retrieved at runtime (default).

L – The prior data for the current lot is retrieved at runtime. All fields are blank except parameter.

O – The prior data for the current operation is retrieved at runtime. All fields are blank except parameter.

PARAMETER – Identifies RTC or DEC parameter for the prior data retrieval. This field can be used by itself, or with the Route, Oper, Lot, Entity, or Event fields. This field cannot be used with the Attribute Type and Attribute Number/Name fields.

ROUTE – The route for prior data retrieval. When a route is entered, you must also enter a parameter. If the Oper and/or Lot fields are left blank, prior data for the current Oper and/or Lot being processed is assumed. Entity/Event or Attribute data cannot be entered.

OPER – The operation for prior data retrieval. When an operation is entered, you must also enter a parameter. If the Route and/or Lot fields are left blank, prior data for the current Route and/or Lot being processed is assumed. Entity/Event or Attribute data cannot be entered.

LOT – The lot for prior data retrieval. When a lot is entered, you must also enter a parameter. If the Route and/or Oper fields are left blank, prior data for the current Route and/or Oper being processed is assumed. Entity/Event or Attribute data cannot be entered.

ENTITY – The entity for prior data retrieval. When an entity is entered, you must also enter a parameter. If the Event field is left blank, prior data for the current Event being processed is assumed. Route/Oper/Lot or Attribute data cannot be entered.

EVENT – The event for prior data retrieval. When an event is entered, you must also enter a parameter. If the Entity field is left blank, prior data for the current Entity being processed is assumed. Route/Oper/Lot or Attribute data cannot be entered.

ATTRIBUTE TYPE – The type of attribute for prior data retrieval. The Valid types are:

R – route attribute.


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O – operation attribute. L – lot attribute. E – entity attribute.

ATTRIBUTE NAME – The attribute name/number for prior data retrieval. Attribute Type and Attribute Name must be entered together. The Active field must be Y or N. All other fields must be left blank.

OCCURENCE NUMBER – Enter the number of prior occurrences for retrieving data. Spaces is the default, and will retrieve the most recent data collected. The number 2 for example, will retrieve data that was collected just prior to the last collection.

Warning

This feature can cause a reduction in response time during the data collection, due to the amount of database activity required to retrieve prior data.

Operation To set up access to prior data: 1. Enter the necessary information on 1UVD – Screen Two. 2. Press Return to store the information in a buffer and go to the next page. 3. To process the current page and complete the transaction without displaying any

more pages, press SFK7. The data will now be stored in the database. 4. To page through additional screens, press SFK4 and SFK6. 5. To access Help, press SFK2. 6. Press SFK1 to exit or SFK3 to access the next function. 7. To return to the first 1UVD screen, press SFK0.


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Step 4 – Defining Default Values You have the option of using the Update Field Defaults (1UFD) function to define default values for fields on the custom form.

This functionality is similar to the DEF Value/Mask field on the ULPD screen where you can predefine a value that can be written over during data entry. This feature is also useful for previewing the custom form.

CDC990S FMS-BASED DATA COLLECTION EXAMPLE *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D WAFER ID _TOP _CENTER _BOTTOM WAFER AVERAGE -------- ------------ ------------ ------------ ------------- OVERALL AVERAGE... LOCATION LOC. AVERAGE -------- ------------ _TOP _CENTER LOW SHUTDOWN LIMIT....@LSL _BOTTOM HIGH SHUTDOWN LIMIT...@HSL RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK5 = REVIEW *ML1 *ML2


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Operation To define default values for each field on the custom form:

1. Access 1UFD from 1FMM or any other WorkStream screen.

2. Enter default values in the fields you want to display at the time of data collection. It is not necessary that every field has a default.

If the field has been assigned a variable defined as numeric, the default value must be numeric.


3. Press Return.

4. Press SFK5 to return to the initial transaction that activated the collection screen.




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Step 5 – Locking the Setup ID Use the Lock/Unlock Custom Form Setup ID (1LCF) function to lock or unlock the custom form setup ID. The custom form setup ID must be locked before it can be attached to an EDC collection point for data collection, and unlocked before any changes can be made.

If there are inconsistencies in the custom form setup or mismatches with the EDC setup, the setup is unlocked.

CDC130S LOCK/UNLOCK CUSTOM FORM SETUP ID (1LCF) SYS 3/02/94 23:25:51 CUSTOM SERVICES F06 CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION............EXAMPLE OF FMS DATA COLL. FORM NAME..............CDC990 HELP CODE.............. CURRENT LOCK STATUS....UNLOCKED DIAGNOSTIC FILENAME.. .ABC_____ SFK7 = LOCK CUSTOM FORM SETUP ID SFK8 = UNLOCK CUSTOM FORM SETUP ID SFK5 = VIEW DIAGNOSTIC FILE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...___

1LCF Fields CUSTOM FORM SETUP ID – Identifies the custom form setup you want locked or unlocked. This field, carried forward from the 1FMM screen, is protected.



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HELP CODE – Indicates a file in the COMETS$HELP directory that is displayed if you request Help from the CDC screen during data collection. This is a protected field.

CURRENT LOCK STATUS – Displays the current lock status (locked or unlocked) of the setup ID. This is a protected field.

DIAGNOSTIC FILENAME – Identifies the filename to which the diagnostics are written. This is a required entry if you want to lock the setup ID.

Operation To lock or unlock the custom form setup ID:

1. Access 1LCF from 1FMM or any other WorkStream screen.


3. Press SFK7 to lock the custom form setup ID or SFK8 to unlock it.

4. Press SFK5 to view the diagnostic file to verify the status, and thus ensure the success, of the locking function.

Warning

You should view the diagnostic file even when you receive a message indicating a successful lock/unlock procedure because the same setup ID can be attached to several EDC collection points.



The following are descriptions of the corresponding View screens and the Copy Custom Form Setup (1CFS) function.

View Custom Form Setup ID (1VCF) Use 1VCF to view the definition of an existing custom form setup ID. The screen layout is identical to that of Update Custom Form Setup ID (1UCF). Refer to this screen for field descriptions. Because this is a view screen, all fields are protected.


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CDC111S VIEW CUSTOM FORM SETUP ID (1VCF) SYS 3/24/94 19:22:13 CUSTOM SERVICES F06 CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION............EXAMPLE OF FMS DATA COLL. FORM NAME..............CDC990 HELP CODE.............. SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____

Operation 1. Access 1VCF from 1FMM or any other WorkStream screen. The definition of

the custom form setup ID will be displayed.



View Variable Assignments (1VVA) Use 1VVA to view the variables assigned to each field on the custom form. The form attached to the custom form setup ID is displayed.


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CDC990S FMS-BASED DATA COLLECTION EXAMPLE *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D WAFER ID A A A WAFER AVERAGE -------- ------------ ------------ ------------ ------------- B D D D E B D D D E B D D D E OVERALL AVERAGE...F LOCATION LOC. AVERAGE -------- ------------ G H G H LOW SHUTDOWN LIMIT....I G H HIGH SHUTDOWN LIMIT...J *ML1 *ML2

Operation 1. Access 1VVA from 1FMM or any other WorkStream screen. The variable

definitions assigned to the custom form is displayed.



View Variable Definitions (1VVD) Use 1VVD – Screen One to view the variable definitions assigned to the custom form. The screen layout is identical to that of Update Variable Definitions (1UVD) – Screen One. Refer to this screen for field descriptions. Because this is a view screen, all fields are protected.


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From 1VVD – Screen One , you can access 1VVD – Screen Two to view the setup of access to prior data. Again, the screen layout is identical to Update Variable Definitions (1UVD) – Screen Two. Refer to this screen for field descriptions. Because this is a view screen, all fields are protected.

1VVD – Screen One

CDC121S VIEW VARIABLE DEFINITIONS (1VVD) SYS 3/02/94 23:34:38




VAR DESCRIPTION PARAMETER D/P/S TRANS ROWS COLS FORMULA OPT A/N LOW HIGH --- --------------- ------------ --- ----- ---- ---- ----------------------------------- --- --- ------------ ------------

A PROMPT LOCATION D N 1 3 @DEF

B WAFER NUMBER D N 3 1 Y N 1 25

C DATA PROMPT IDS DATA P N 3 3 %STR(#B) & (#A)

D INPUT DATA DATA D N 3 3 N N 0 100

E WAFER AVERAGES WAFER AVG D N 3 1 %AVG(#D)

F LOT AVERAGE LOT AVG D N 1 1 %AVG(#E)

G PROMPT LOCATION D N 1 3 @DEF

H AVERAGE BY LOC LOC AVG D Y 3 1 %AVG(#D)

I LOW SHUTDOWN DATA D N 1 1 @LSL

J HIGH SHUTDOWN DATA D N 1 1 @HSL

SFK1 = EXIT SFK4 = NEXT PAGE

SFK2 = HELP SFK0 = 2ND SCREEN SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...____

Operation 1. Access 1VVD from 1FMM or any other WorkStream screen. The current

definitions for the variable will be displayed.




5. To view 1VVD – Screen 2, press SFK0.


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1VVD – Screen Two

CDC122S VIEW VARIABLE DEFINITIONS - 2 (1VVD) SYS 6/24/92 19:07:33



PRIOR DATA ATTRIBUTE ATTRIBUTE OCCUR

VAR ACTIVE PARAMETER ROUTE OPER LOT ENTITY EVENT TYPE NUMBER/NAME NO.

--- ------ ----------- ---------- ---- ----------- ------------- ------------ --------- ------------------------ ------

A

B Y E LOCATION

C

D Y DATA 618X 1000 M-8

E

F

G

H

I

J

SFK1 = EXIT SFK4 = NEXT PAGE

SFK2 = HELP SFK0 = 1ST SCREEN SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...____

Operation 1. After accessing the second 1VVD screen, the current definitions for the variable

will be displayed.




5. To return to the first 1VVD screen, press SFK0.

View Field Defaults (1VFD) Use 1VFD to view the default values for fields on the custom form.


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CDC990S FMS-BASED DATA COLLECTION EXAMPLE *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D WAFER ID _TOP _CENTER _BOTTOM WAFER AVERAGE -------- ------------ ------------ ------------ ------------- OVERALL AVERAGE... LOCATION LOC. AVERAGE -------- ------------ _TOP _CENTER LOW SHUTDOWN LIMIT....@LSL _BOTTOM HIGH SHUTDOWN LIMIT...@HSL RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK5 = REVIEW *ML1 *ML2

Operation 1. Access 1VFD from 1FMM or any other WorkStream screen. The default values

for fields on the custom form are displayed.




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View Custom Form Setup IDs Using Form (1VIF) Use 1VIF to view all the custom form setup IDs assigned to a specified form. This screen is similar to the Update Custom Form Setup ID (1UCF) screen. Refer to this screen for field descriptions. Because this is a view screen, all fields are protected.

CDC140S VIEW CUSTOM FORM SETUP IDS USING FORM (1VIF) SYS 3/02/94 23:45:53 CUSTOM SERVICES F06 PAGE 1 FORM NAME...CDC990 CUSTOM FORM SETUP ID DESCRIPTION ------------ ------------------------- EXAMPLE EXAMPLE OF FMS DATA COLL. EXAMPLE2 EXAMPLE OF FMS DATA COLL. SFK1 = EXIT SFK4 = NEXT PAGE SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...____

Operation 1. Access 1VIF from 1FMM or any other WorkStream screen. All custom form

setup IDs assigned to a specified form are displayed.

2. To page through additional screens, press SFK4 or SFK6.




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View All Custom Form Setup IDs (1VFS) Use 1VFS to view all the custom form setup IDs defined in the current facility. The 1VFS screen is similar to the Update Custom Form Setup ID (1UCF) screen. Refer to this screen for field descriptions. Because this is a view screen, all fields are protected.

CDC141S VIEW ALL CUSTOM FORM SETUP IDS (1VFS) SYS 3/24/94 19:36:33 CUSTOM SERVICES F06 PAGE 1 CUSTOM FORM SETUP ID DESCRIPTION FORM STATUS ------------ ------------------------- ------ -------- CDC TEST CDC TEST CPTKDO LOCKED CDC010 TEST FORM FOR 10 VARIABLE CDC010 LOCKED CDC052 TEST FORM FOR 52 VARIABLE CDC052 LOCKED CDC999 TEST NEW HEADER FEATURES CDC999 LOCKED DAVID RTC TEST FORM CDC999 LOCKED ETCHRATES ETCH RATE DATA COLLECTION INT002 LOCKED EXAMPLE EXAMPLE OF FMS DATA COLL. CDC990 UNLOCKED EXAMPLE2 EXAMPLE OF FMS DATA COLL. CDC990 UNLOCKED FINAL CHECK2 FINAL CHECK CD DATA CPT951 UNLOCKED FORM001 TEST FORM FOR 52 VARIABLE CDC052 UNLOCKED GAGE GAGE CAPABILITY CPTGA3 LOCKED INT005 PARTICLE DATA COLLECTION INT005 LOCKED SFK1 = EXIT SFK4 = NEXT PAGE SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...___

Operation 1. Access 1VFS from 1FMM or any other WorkStream screen. All custom form

setup IDs defined in the current facility will be displayed.





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Copy Custom Form Setup (1CFS) Use 1CFS to copy setup information from one custom form setup to another. The resulting duplicate custom form setup ID is unlocked.

CDC135S COPY CUSTOM FORM SETUP (1CFS) SYS 3/02/94 23:27:54 CUSTOM SERVICES F06 COPY CUSTOM FORM SETUP FROM : FACILITY (opt).........F06____________ CUSTOM FORM SETUP ID...EXAMPLE_______________ TO : CUSTOM FORM SETUP ID...EXAMPLE2______________ RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____ CDC353 THE SETUP ID DEFINITION, VARIABLE ASSIGNMENTS, VARIABLE DEFINITIONS, AND FIELD DEFAULTS IF ANY, HAVE BEEN COPIED SUCCESSFULLY.

Fields FROM FACILITY – Identifies the facility in which the existing custom form setup is defined. This is an optional field. If it is left blank, the current facility is used.

FROM CUSTOM FORM SETUP ID – Identifies the custom form setup that you want copied. This is a required field.

TO CUSTOM FORM SETUP ID – Identifies the custom form setup to which you are copying. This name must be for a new custom form setup and is a required field.


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Operation 1. Access 1CFS from 1FMM or any other WorkStream screen.


3. Press Return. The resulting duplicate custom form setup ID is unlocked.



Attaching the Form Setup to a Collection Point After defining and locking the custom form setup ID, use 1UCA to attach it to a collection point. This is similar to attaching a parameter set version to a collection point. A check is performed to ensure consistency between the parameters and parameter set version definitions, and the custom form setup definition.

1UCA and its corresponding view screen are accessible from the Custom Form Setup ID Attachment Menu (1FAM), as shown in Figure 2-2.

1FAM also allows access to 1CCA to copy the setup ID attachment, 1VAS to view attachments for a specified setup ID, and 1LCA to list all attachments. (For the description of 1LCA, see Section 5, Reports.)


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Custom Form Setup ID Attachment Menu (1FAM) Use the 1FAM to perform and maintain the custom form setup ID attachment.

CDC150S CUSTOM FORM SETUP ID ATTACHMENT MENU (1FAM) SYS 3/02/94 23:49:57 CUSTOM SERVICES F06 FUNCTION................1UCA PARAMETER SET ID........EXAMPLE_____ PARAMETER SET VERSION...1______ LEVEL 1.. ENTITY_________ VALUE 1.. USO1____________________ LEVEL 2.. _______________ VALUE 2.. ____________ CUSTOM FORM SETUP ID....____________ UPDATE CUSTOM FORM SETUP ID ATTACHMENT......(1UCA) VIEW CUSTOM FORM SETUP ID ATTACHMENT........(1VCA) VIEW ATTACHMENTS FOR CUSTOM FORM SETUP ID...(1VAS) COPY CUSTOM FORM SETUP ID ATTACHMENTS.......(1CCA) LIST ALL CUSTOM FORM SETUP ID ATTACHMENTS...(1LCA) RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK8 = LEVEL EDIT

Fields FUNCTION – Enter a valid WorkStream function.

PARAMETER SET ID – Identifies the parameter set.

PARAMETER SET DESCRIPTION – Describes the parameter set in a maximum of 35 characters.

PARAMETER SET VERSION – Indicates the version of the parameter set.

LEVEL 1, LEVEL 2 – Indicates level 1 and level 2 additional parameter types.

VALUE 1, VALUE 2 – Indicates values for level 1 and level 2 additional parameter types.


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CUSTOM FORM SETUP ID – Identifies the custom form setup you want attached at the specified processing point.

Operation To access a function on the 1FAM screen:


2. Press Return. The function screen associated with the code you have selected is displayed.



5. Press SFK8 to define valid levels and values with the Choose Level Override/Additional (CLOA) function.

CMT060S CHOOSE LEVEL OVERRIDE/ADDITIONAL (CLOA) SYS 3/07/94 09:20:50 CUSTOM SERVICES 5.2 F06 PARAMETER SET ID...EXAMPLE VERSION...1 PARAMETER... PRODUCT .........___________________ ROUTE .........________ LOT ........._________ OPERATION .........____ ENTITY .........__________ EVENT .........__________ ENTITY TYPE/SCHEME...__________ ENTITY STATUS........__________ RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION..____


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Update Custom Form Setup ID Attachment (1UCA) Use 1UCA to attach a custom form setup ID to an EDC collection parameter set version, or a parameter set version with a single additional parameter level. This function verifies that EDC parameter set version is frozen prior to creating custom form setup ID attachment. For additional parameter level, it verifies that similar EDC additional level exists for at least one parameter. The setup ID has to be locked prior to performing this transaction.

CDC160S UPDATE CUSTOM FORM SETUP ID ATTACHMENT (1UCA) SYS 3/02/94 23:50:56 CUSTOM SERVICES F06 PARAMETER SET ID............EXAMPLE PARAMETER SET DESCRIPTION...EXAMPLE FOR CDC DOCUMENT PARAMETER SET VERSION.......1 LEVEL 1... VALUE 1... LEVEL 2... VALUE 2... CUSTOM FORM SETUP ID........EXAMPLE_____________ RETURN = PROCESS SFK9 = DELETE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION..._____ CDC110 YOU ARE MODIFYING AN EXISTING SETUP ID ATTACHMENT. IF THIS IS CORRECT, PLEASE REVISE THE DATA AND PRESS RETURN. OTHERWISE EXIT.

Fields PARAMETER SET ID – Identifies the parameter set. This is a protected field.

PARAMETER SET DESCRIPTION – Describes the parameter set in a maximum of 35 characters. This is a protected field.


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PARAMETER SET VERSION – Indicates the version of the parameter set. This is a protected field.

LEVEL 1, LEVEL 2 – Indicates level 1 and level 2 additional parameter types. These are protected fields.

VALUE 1, VALUE 2 – Indicates values for level 1 and level 2 additional parameter types. These are protected fields.

CUSTOM FORM SETUP ID – Identifies the custom form setup you want attached at the specified processing point.

Operation To attach the custom form setup ID to an EDC collection point:

1. Access 1UCA from 1FAM or any other WorkStream screen.

2. Enter the custom form setup ID you want attached.

3. Press Return.

4. To delete the custom form setup ID attachment, press SFK9. At the confirmation message, press SFK9 again to confirm the deletion, or any other key to prevent it.





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Copy Custom Form Setup ID Attachment (1CCA) Use 1CCA to copy the custom form setup ID attachment from one EDC collection point to another.

CDC175S COPY CUSTOM FORM SETUP ID ATTACHMENT (1CCA) SYS 3/02/94 23:53:01 CUSTOM SERVICES F06 COPY FROM: FACILITY................... F06_______ PARAMETER SET ID........... EXAMPLE_________ PARAMETER SET VERSION...... 1____ LEVEL 1.._______________ VALUE 1..________________________ LEVEL 2.._______________ VALUE 2.._____________ COPY FOR ALL ADDITIONAL PARAMETERS...Y TO: PARAMETER SET ID........... EXAMPLE2____________ PARAMETER SET VERSION...... 1____ LEVEL 1.._______________ VALUE 1..________________________ LEVEL 2.._______________ VALUE 2.._____________ CUSTOM FORM SETUP ID NAME...... CDC-TEST____________ DIAGNOSTIC FILENAME........ ... TEST________ RETURN = PROCESS SFK5 = VIEW DIAGNOSTIC FILE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____

Fields FROM FACILITY – Identifies the facility in which the existing custom form setup ID attachment is defined. This is an optional field. If it is left blank, the current facility is used.

FROM PARAMETER SET ID – Identifies the parameter set for which the custom form setup ID attachment is defined. This is a required field.

FROM PARAMETER SET VERSION – Indicates the version of the parameter set for which the custom form setup ID attachment is defined. This is a required field.


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FROM LEVEL 1, LEVEL 2 – Indicates level 1 and level 2 additional parameter types, if any, defined for the custom form setup ID attachment. These are optional fields.

FROM VALUE 1, VALUE 2 – Indicates values for the level 1 and level 2 additional parameter types. These are required fields if From Level 1 and From Level 2 have entries.

COPY FOR ALL ADDITIONAL PARAMETERS – Indicates the flag which, if set to Y, will copy the setup ID attachments for all additional parameters for a given parameter set ID and version. If you enter specific additional parameters, this flag must be set to N. This is a required field.

TO PARAMETER SET ID – Identifies the parameter set to which the custom form setup ID attachment will be copied. This is a required field.

TO PARAMETER SET VERSION – Identifies the version of the parameter set to which the custom form setup ID attachment will be copied. This is a required field.

TO LEVEL 1, LEVEL 2 – Indicates level 1 and level 2 additional parameter types, if the new attachment is to be defined for additional levels. These are optional fields.

TO VALUE 1, VALUE 2 – Indicates values for the level 1 and level 2 additional parameter types. These are required fields if To Level 1 and To Level 2 have entries.

CUSTOM FORM SETUP ID NAME – Allows you to rename the custom form setup ID for the new collection points. The setup ID must be defined in the facility. If the field is left blank, the new attachment records will have the same setup ID. This is an optional field.

DIAGNOSTIC FILENAME – Identifies the filename in which the diagnostics are written. This is a required field.


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Operation To copy the custom form setup ID attachment from one EDC collection point to another:

1. Access 1CCA from 1FAM or any other WorkStream screen.


3. Press Return.

4. Press SFK5 to view the diagnostic file to verify that all attachments copied successfully.



Warning

You should view the diagnostic file after each copy. This is because attachment is copied with invalid status when there is no major error condition. However, at run time, this setup id cannot be processed until error condition is resolved and 1UCA is performed to change the attachment status from invalid to valid.


2-43

View Custom Form Setup ID Attachment (1VCA) Use 1VCA to view the attachment of a custom form setup ID to an EDC collection point. This screen is similar to the Update Custom Form Setup ID Attachment (1UCA) screen. Refer to 1UCA for field descriptions. Because this is a view screen, all fields are protected.

CDC161S VIEW CUSTOM FORM SETUP ID ATTACHMENT (1VCA) SYS 3/02/94 23:54:30 CUSTOM SERVICES F06 PARAMETER SET ID............EXAMPLE PARAMETER SET DESCRIPTION...EXAMPLE FOR CDC DOCUMENT PARAMETER SET VERSION.......1 LEVEL 1... VALUE 1... LEVEL 2... VALUE 2... CUSTOM FORM SETUP ID......EXAMPLE DESCRIPTION...............EXAMPLE OF FMS DATA COLL. FORM NAME.................CDC990 SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____

Operation 1. Access 1VCA from 1FAM or any other WorkStream screen. The custom form

setup ID for the processing point will be displayed.




2-44

View Attachments for Custom Form Setup ID (1VAS) Use 1VAS to view the attachments for a specified custom form setup ID. The fields for this screen are similar to the Copy Custom Form Setup ID Attachment (1CCA) fields. Refer to the 1CCA screen for field descriptions. Because this is a view screen, all fields are protected.

CDC165S VIEW ATTACHMENTS FOR CUSTOM FORM SETUP ID (1VAS) SYS 3/02/94 23:55:48 CUSTOM SERVICES F06 PAGE 1 CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION...EXAMPLE OF FMS DATA COLL. FORM NAME..............CDC990 LOCK STATUS...UNLOCKED PARAMETER SET VERSION LEVEL VALUE 1 VALUE 2 ------------- ------- ---------------- ------------------------- ------------ EXAMPLE 1 SFK1 = EXIT SFK4 = NEXT PAGE SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...____

Operation 1. Access 1VAS from 1FAM or any other WorkStream screen. All processing

points where the specified custom form setup ID is attached is displayed.





2-45

Using FMS-Based Data Collection Once the custom form setup ID is attached, the custom form assigned to that setup is displayed at process time for data collection.

Data may be collected for all parameters associated with the parameter set version. Parameters not defined for data entry or calculated value at the variable definition level will be marked with the Not Available code (N/A) in the database.

If the Only Collect Highest Precedence Level field on the UPSV screen is set to Y, only the additional parameters defined at the highest precedence level will be collected.

The following is an example of an FMS-based data collection screen:

CDC990S FMS-BASED DATA COLLECTION EXAMPLE SYS 3/16/94 11:07:14 CUSTOM DERVICES F06 PARAMETER SET ID.......EXAMPLE VERSION.....1 ENTITY.......US02 EVENT.....1370 WAFER ID _TOP _CENTER _BOTTOM WAFER AVERAGE -------- ------------ ------------ ------------ ------------- 2 21 22 23 22.00 3 31 32 33 32.00 4 41 42 43 42.00 OVERALL AVERAGE...32.00 LOCATION LOC. AVERAGE -------- ------------ _TOP 3.10000E+01 _CENTER 3.20000E+01 LOW SHUTDOWN LIMIT....10.00 _BOTTOM 3.30000E+01 HIGH SHUTDOWN LIMIT...90.00 RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK5 = REVIEW CDC106 ALL CALCULATED AND USER INPUT DATA ARE DISPLAYED. PRESS RETURN TO STORE THE DATA COLLECTED OR SFK1 TO EXIT


To perform FMS-based data collection:

1. Press Return to process the entered data.

The custom collection screen is redisplayed with all the user entries and calculated values.

2. Press Return again to store these values. If changes are made, the screen is redisplayed for storage confirmation.

3. If necessary, press SFK5 to review the initial transaction that activated the collection screen.

4. Press SFK8 for partial data collection.

5. To access user-defined Help, press SFK2.

6. To view spec associated with this processing point, press SFK7.


If an error occurs while data is being processed on the screen, an error message is displayed in reverse video. If the error occurs on a data entry field, the cursor returns to the field in error. If the error occurs on a calculated field, the cursor moves to the first data entry field on the screen.

If the field is not large enough to display a data value, ***** is displayed. This occurs when the data value field is less than 11 characters on the form. If the field length is at least 11 characters and the dummy variables are used, then the data is converted in the exponential form and displayed. EDC stores data values up to 12 characters. To avoid truncation, define parameter format that match the expected value in the variable field.

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3

GTS-Based Data Collection

This section describes GTS-based data collection which uses WorkStream GTS table entries to collect data for engineering parameters. CDC supports five levels of GTS-based data collection.

GTS collection is best suited for repair data because you can collect subsystem, sub-subsystem, component, and sub-component data, as shown in Figure 3-1.

This application supports up to four levels of collection based on prior collection values. Additionally, level 0 is used to collect EDC parameter data that is not in the GTS table.

You can access parameters defined for GTS collection in a FMS-based data collection setup by setting the formula to @GTS on the 1UVD screen.

3-1


Figure 3-1. GTS-Based Repair Data Application

ULPD: Create All Parameters

Parameter: Level: Validation Table: ACTION 1 ACTION SUB_xxxx 1 CDC$xxxx SSB_xxxx 2 CDC$xxxx TIME TO RPR 0

UFVCChange Additional Parameter

Allowed After Freeze to Y

UPSIParameter Set: MAINT-DETAIL

UPSVHighest Precedence Level Y Alternate Coll Method G

UTDGTable Name:

ACTION

Enter Table Values for ACTION

ATEG

UTEGTable Name:

CDC$xxx

ATEGEnter Table Values

for CDC$xxxx

ULPD: Create All Parameters

Parameter: Level: Validation Table: ACTION 1 ACTION SUB_xxxx 1 CDC$xxxx SSB_xxxx 2 CDC$xxxx TIME TO RPR 0

AEGP ACTION

General Parameter

FRPSFreeze Parameter Set:

MAINT-DETAIL

UEPSAssociate Event to

Parameter Set

AEAPLevel 1: Entity Value <m/CID>

Level 2: Event Value Repair Data * SUB_xxxx SSB_xxxx

TIME TO RPR

UFVCChange flag - Additional Parameter After Freeze to N if Changed Above

System Ready To Run

Repeat This For Every Equipment Group (for example, UT Stepper, SSI Coater)

Repeat This for Each Entry

GTS-Based Repair Data

3-2


3-3

To set up GTS-based data collection:

1. Set up the GTS table, as described in the Facility Setup Guide.

2. Define EDC parameters and parameter sets.

Setting Up the Table To set up the GTS table, create a GTS table name for the parameter data values by using the UTDG function. Then load these values into the new table by using ATEG.

Update Table Description (UTDG) Use UTDG to create a GTS table name for the parameter data values.

GTS056S UPDATE TABLE DESCRIPTION (UTDG) SYS 3/24/94 20:07:15 CUSTOM SERVICES F06 TABLE NAME.. CDC$TMXTUBE TABLE DESCRIPTION..TMXTUBE VALIDATION TABLE__________________________________ ALLOW PROMPT MESSAGE: SIZE: ALPHA NEG(Y/N) DIGIT DECIMAL KEY 1...........PARENT SUBSYSTEM________ 12 KEY 2...........SUB SUBSYSTEM___________ 12 KEY 2 FORMAT (A/N)..A ALPHA DATA 1....DESCRIPTION_____________ 30 ALPHA DATA 2....COMPONENT TABLE_________ 12 ALPHA DATA 3...._ _ ________________________ _ NUMERIC DATA 1.._ _ _ _ NUMERIC DATA 2..________________________ _ _ _ SECURITY(Y/N)...N LAST SECURITY UPDATE BY USER.......... LAST SECURITY UPDATE DATE AND TIME.... RETURN = PROCESS SFK9 = DELETE SFK3 = NEXT FUNCTION.._ SFK1 = EXIT SFK2 = HELP ___

Fields KEY 1 – Defines the parent subsystem.


3-4

KEY 2 – Defines the sub-subsystem.

KEY 2 FORMAT (A/N) – Indicates format for the Key 2 value.

ALPHA DATA 1 – Describes levels 1 and 2 collection values.

ALPHA DATA 2 – Collects component level data for levels 3 and 4.

Operation 1. Enter the necessary table prompts in the Key 1, Key 2, Key 2 Format (A/N),

Alpha Data 1 and Alpha Data 2 fields.

2. Press Return.

Table names for GTS-based data collection should start with CDC$ (for example, CDC$TMXTUBE).

The Key 1 and Key 2 fields correspond to level 1 and level 2 collection values, respectively. The descriptions for level 1 and level 2 values are entered in the Alpha Data 1 field of the GTS table.


3-5

Add Table Entries (ATEG) Use ATEG to load valid parameter data values into the GTS table created with UTDG.

GTS064S ADD TABLE ENTRIES (ATEG) SYS 3/03/94 00:01:38 CUSTOM SERVICES F06 TABLE NAME..CDC$TMXTUBE PARENT SUBSYSTEM BOAT________ SUB-SUBSYSTEM _*____________ DESCRIPTION BOAT CONTROL_____________________________________ COMPONENT TABLE ____________________________ PARENT SUBSYSTEM COMPUTE_____ SUB-SUBSYSTEM _*____________ DESCRIPTION DESCRIBE COMPUTER________________________________ COMPONENT TABLE ____________________________ PARENT SUBSYSTEM COMPUTER_____ SUB-SUBSYSTEM _*____________ DESCRIPTION GAS CONTROL SYSTEM_______________________________ COMPONTENT TABLE ____________________________ RETURN = PROCESS SFK2 = HELP SFK3 = NEXT FUNCTION..____ SFK1 = EXIT GTS029 YOU ARE ADDING NEW DATA. PLEASE ENTER IT ON THE LINES PROVIDED THEN PRESS RETURN.

Operation 1. Enter the name of the parent subsystem.

2. Place an asterisk (*) in the Sub-Subsystem field to differentiate the parent subsystem from the sub-subsystem entry.

3. Repeat steps 1 and 2 (entering the name of the respective sub-subsystem instead of the asterisk) to define all sub-subsystems associated with the parent subsystem just defined.


3-6

4. Press Return.


The maximum character length of data value fields is 12, and of description fields, 20. If entries exceed these lengths, the data will be truncated.

If you use UTEG to update table data, you will need to change facility or log off and log in to WorkStream again.

Defining Parameters Use the ULPD and UPSV functions in the EDC Module to define the parameters and parameter sets for GTS-based data collection. (For details on EDC setup, refer to the Engineering Data Collection User’s Guide.)

Update Engineering Parameter Definition (ULPD) Use ULPD to define the EDC parameters for GTS-based data collection.


CUSTOM SERVICES F06

PARAMETER NAME.....SUB-UTSTEPPR PAM PARAMETER ID (opt).._____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...SUB SYSTEM TMX TUBES_______________ REQUESTOR (OPT).........DAVID________ PARAMETER PROMPT...SUB SYSTEM TMX_______


READINGS/ENTITY OR LOT..1_ FILE FORMAT (LEC-1,2,3; RTC-4; 0).._ LIMIT CHECKING APPLIED AGAINST (SELECT ONE):

or USE AUTOMATIC FILENAME (Y/N)......._ SINGLE VALUE...X RANGE.........._

SAMPLES/ENTITY OR LOT...__OR ____% PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST. DEV. ......_


or MAXIMUM........_

PROMPT CODES (TABLE)...._____________ FORMAT (A,D,E,F,0-9)....A_ STORE CALCULATED VALUE (Y/N)...N

READINGS/PROMPT.........__ VALIDATION TABLE (opt)..CDC$TMXTUBE APPLY CALCULATION TO (SELECT ONE):

SCALING FACTOR (opt)....___ READINGS FOR EACH SAMPLE..._

VALIDATE SAMPLE UNIT ID'S AS : UNIT OF MEASURE (opt)...___________ READINGS FOR ALL SAMPLES..._

NO VALIDATION....X DEF VALUE / MASK (opt)..

AS UNIT IN LOT..._ USER ALPHA DATA SHORT...1

AS COMP IN LOT..._ USER ALPHA DATA LONG....Y__________

RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER.._____________

SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____

LEC245 WARNING - THE PARAMETER HAS BEEN ATTACHED TO ONE OR MORE PARAMETER

SETS. UPDATES OF SELECTED FIELDS WILL BE COPIED TO THE PARM SETS.


3-7

Operation 1. Set the Collection Method field to K.

2. In the Validation Table field, enter the GTS table name from which the valid entries for this parameter are to be displayed.

3. Enter level 0, 1, 2, 3, or 4 in the User Alpha Data Short field.

Level 0, used to collect standard EDC data, may be defined in any order. A level 0 collection screen with prompts defined for each parameter will be displayed for data entry.

Levels 1 through 4 defined for data collection from the same table should be in ascending order.

Level 2 indicates that the prior parameter value (level 1) is used as a filter. Levels 1 and 2 correspond to keys 1 and 2, respectively, in the GTS tables.

More than one parameter can be defined as level 1 in a parameter set. Level 1 will always display key 1 of the validation table associated with it.

Levels 3 and 4, which perform component level collection, correspond to keys 1 and 2, respectively, of the Component Level table.

4. Enter Y in the first column of the User Alpha Data Long field to display the description of the system (in addition to the 12-character description of the value).


3-8

Update EDC Parameter Set ID Version (UPSV) Use UPSV to define the parameter set version characteristics for GTS-based data collection.

EDC011S UPDATE EDC PARAMETER SET ID VERSION (UPSV) SYS 3/14/94 01:32:08 CUSTOM SERVICES F06 PARAMETER SET ID....EXAMPLE VERSION...1 EFFECTIVE PERIOD: START DATE-TIME...02/22/93 07:02 END DATE-TIME... / / : AUTHOR (opt)... PRECEDENCE ORDER OF ADDITIONAL PARAMETERS (Rank 1 through 12): LOT...1 PRODUCT...2 ROUTE...3 OPER...4 ROUTE-OPER...5 PRODUCT-OPER...6 ENTITY-EVENT...7 ENTITY...8 EVENT...9 ENTITY SCHEME/TYPE..-1 ENTITY STATUS..-1 PROD-ENTITY...-1 ENTITY TYPE/SCHEME (0-5)... ENTITY STATUS (0-9)... ONLY COLLECT HIGHEST PRECEDENCE LEVEL (Y/N)...Y USE ALTERNATE COLLECTION METHOD (opt).........G COMMENT: RETURN = PROCESS SFK2 = HELP SFK5 = VIEW ID... VERSION... SFK1 = EXIT SFK9 = TERMINATE SFK3 = NEXT FUNCTION...____ EDC017 ERROR - THE EDC PARAMETER SET VERSION IS FROZEN AND THUS CANNOT BE MODIFIED. PLEASE EXIT OR TERMINATE THIS VERSION.

Operation 1. Set the Only Collect Highest Precedence Level field to Y.

2. Set the Use Alternate Collection Method field to G. If this field is left blank, the standard EDC collection screen will be displayed.


3-9

Using GTS-Based Data Collection Once the GTS table entries are created and the EDC collection point is established, the GTS table choices are displayed at the time of data collection.

The GTS data collection screen is a dynamic screen whose format depends on the flag that indicates whether to display descriptions. (To display a description for each entry, enter Y in the User Alpha Data Long field on the ULPD screen.)

The following is an example of a GTS-based data collection screen without the Description field:

CDC193S GTS BASED DATA COLLECTION (1GTS) SYS 3/02/94 16:25:54 CUSTOM SERVICES F06 PAGE..1 OF 1 TABLE DESC.....CDC TABLE OF ACTIONS PARAMETER SET ID..M-DETAIL-G VERSION..2 SELECTION NUMBER..3 NUM ENTRY NUM ENTRY NUM ENTRY NUM ENTRY ------------------------------------------------------------------------------ 1 ADDED 2 ADJUSTED 3 ALIGNED 4 ANNUAL 5 ASSEMBLED 6 BAKED OUT RETURN = PROCESS SFK2 = HELP SFK4 = NEXT PAGE SFK7 = GO TO PAGE.... SFK1 = EXIT SFK5 = REVIEW SFK6 = PREV PAGE SFK3 = NEXT FUNCTION. CDC213 SELECT ONE ENTRY FOR THE PARAMETER BY ENTERING THE CORRESPONDING SELECTION NUMBER. PRESS SFK1 TO EXIT OR ANY OTHER FUNCTION KEY.


3-10

The following is an example of a GTS-based data collection screen with the Description field:

CDC193S GTS BASED DATA COLLECTION (1GTS) SYS 3/02/94 16:25:59 CUSTOM SERVICES F06 PAGE..1 OF 1 TABLE DESC.....TMXTUBE VALIDATION TABLE PARAMETER SET ID..M-DETAIL-G VERSION..2 SELECTION NUMBER..2 NUM ENTRY DESCRIPTION NUM ENTRY DESCRIPTION ------------------------------------------------------------------------------ 1 BOAT BOAT CONTROL 2 COMPUTER DESCRIBE COMPUTER 3 GAS GAS CONTROL SYSTEM RETURN = PROCESS SFK2 = HELP SFK4 = NEXT PAGE SFK7 = GO TO PAGE.... SFK1 = EXIT SFK5 = REVIEW SFK6 = PREV PAGE SFK3 = NEXT FUNCTION. CDC213 SELECT ONE ENTRY FOR THE PARAMETER BY ENTERING THE CORRESPONDING SELECTION NUMBER. PRESS SFK1 TO EXIT OR ANY OTHER FUNCTION KEY.

Both screens display the list of valid choices when the collection level is 1. A GTS collection screen without the Description field displays a maximum of 40 choices, while one with the Description field displays a maximum of 20 choices.

The header lines display the parameter set ID and version used for data collection at the processing point, and the GTS table description for the table whose entries are displayed on the screen.


Operation To perform GTS-based data collection:

1. Enter the selection number (from those listed on the current screen) in the Selection Number field.

2. Press Return.

3. Repeat steps 1 and 2 until all levels are collected.


5. To return to the initial transaction that activated the collection screen, press SFK5.

6. To go to a specific page, press SFK7.



3-11


3-12

4

FMS/GTS-Based Data Collection

This section describes the setup and use of FMS/GTS-based data collection which combines the methods of data collection described in Sections 2 and 3.

FMS/GTS collection is best suited for repair data because you can collect subsystem, sub-subsystem, component, and sub-component data, as shown in Figure 4-1.

This application supports up to four levels of collection based on prior collection values. Additionally, level 0 is used to collect EDC parameter data that is not in the GTS table.

You can access parameters defined for GTS collection in a FMS-based data collection setup by setting the formula to @GTS on the 1UVD screen.

Because the GTS portion is called from within FMS, set up FMS as described in Section 3.

4-1


Figure 4-1. FMS/GTS-Based Repair Data Application

Complete FMS Form Setup

CPT-xxx

IUCAAttach From Setup ID Level, 1: Entity Value Level 2: Event Value

Repeat This for Every Equipment Group


UFVCChange Additional Parameter

Allowed After Freeze to Y

UPSIParameter Set: MAINT-DETAIL

UPSVHighest Precedence Level Y Alternate Coll Method F

UTDGTable Name:

ACTION

Enter Table Values for ACTION

ATEG

UTEGTable Name:

CDC$xxx

ATEGEnter Table Values

for CDC$xxxx

ULPD: Create All ParametersParameter: Level: Validation Table: ACTION 1 ACTION SUB_xxxx 1 CDC$xxxx SSB_xxxx 2 CDC$xxxx TIME TO RPR 0

AEGP ACTION

General Parameter

FRPSFreeze Parameter Set:

MAINT-DETAIL

UEPSAssociate Event to

Parameter Set

AEAPLevel 1: Entity Value <m/CID> Level 2: Event Value Reapir Data * SUB_xxxx SSB_xxxx TIME TO RPR

UFVCChange flag - Additional Parameter After Freeze to N if Changed Above

System Ready to

Run

Repeat This For Every Equipment Group (for example, UT

Stepper, SSI Coater)


FMS/GTS-Based Repair Data

4-2


4-3

To set up FMS/GTS-based data collection:

1. Set up the GTS table, as described in Section 3.

2. Define EDC parameters and parameter sets as described in Section 3, with the following modifications:

Parameters should follow corresponding characteristics described in FMS- and GTS-based collections because parameter values are collected from both FMS and GTS.


CUSTOM SERVICES F06

PARAMETER NAME.....EXAMPLE PAM PARAMETER ID (opt)..____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........____________ PARAMETER PROMPT...___________________




SAMPLES/ENTITY OR LOT...__ OR __ % PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST. DEV. ......_


or MAXIMUM........_

PROMPT CODES (TABLE)....___________ FORMAT (A,D,E,F,0-9)....E STORE CALCULATED VALUE (Y/N)..._



VALIDATE SAMPLE UNIT ID'S AS : UNIT OF MEASURE (opt)...____________ READINGS FOR ALL SAMPLES..._

NO VALIDATION....X DEF VALUE / MASK (opt)..____________



RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER..




FMS/GTS-based data collection supports only the following parameter set version characteristics defined with UPSV:


4-4


To define the parameter set version characteristics:

a. Set the Only Collect Highest Precedence Level field to Y.

b. Set the Use Alternate Collection Method field to F.

3. Create the FMS setup, as described in Section 3.


4-5

The following is an example of a custom form setup for FMS-based data collection:

TST501S TEST SCREEN FOR GTS CALLS FROM FMS *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D ACTION : A SUB-UTSTEPPR : B SSB-UTSTEPPR : C REPAIR TIME : D :E :F THIS IS A TEST SCREEN FOR PARAMETER SET ID: M-DETAIL-F THIS IS A TEST FOR GTS CALLS FROM AN FMS COLLECTION SCREEN. *ML1 *ML2

Using FMS/GTS-Based Data Collection After the custom form setup ID is attached, the custom form assigned to that setup is displayed at process time for data collection.

GTS-based parameter data is collected on GTS screens, and FMS-based parameter data is collected on FMS screens.

The following is an example of data collected on a GTS-based collection screen:


4-6



The following is an example of data collected on a FMS-based collection screen:

TST501S TEST SCREEN FOR GTS CALLS FROM FMS *DAT CUSTOM SERVICES F06 PARAMETER SET ID.......CDC-FMS VERSION......1 ENTITY......US02 EVENT......REPAIR DATA ACTION : ALIGNED SUB-UTSTEPPR: COMPUTER SSB-UTSTEPPR: BATTERY BAKU REPAIR TIME : 2:11:13 THIS IS A TEST SCREEN FOR PARAMETER SET ID: M-DETAIL-F THIS IS A TEST FOR GTS CALLS FROM AN FMS COLLECTION SCREEN. CDC106 ALL CALCULATED AND USER INPUT DATA ARE DISPLAYED. PRESS RETURN TO STORE THE DATA COLLECTED OR SFK1 TO EXIT

4-7

5

Reports

This section describes the reports available for the CDC setup data. There are three report functions:

1. List All Custom Form Setup IDs (1LFS)

2. List All Custom Form Setup ID Attachments (1LCA)

3. EDC Parameter List Report (E501).

List All Custom Form Setup IDs (1LFS) Use 1LFS to submit a batch job that generates a detailed report of the setup definitions for the custom form setup IDs.

5-1


5-2

CDC145S LIST ALL CUSTOM FORM SETUP IDS (1LFS) SYS 6/15/94 00:08:49 CUSTOM SERVICES F06 ENTER SELECTION CRITERIA FOR REPORT AND PRESS RETURN TO SUBMIT BATCH JOB. _ ALL CUSTOM FORM SETUP IDS IN FACILITY _ ALL CUSTOM FORM SETUP IDS USING FORM..._ _ CUSTOM FORM SETUP ID..................._____ ____________ NUMBER OF COPIES TO PRINT................._ FOR LATER VIEWING, ALSO ENTER FILENAME..._ RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION..._

Fields ALL CUSTOM FORM SETUP IDS IN FACILITY – Lists all custom form setup IDs in the current facility.

ALL CUSTOM FORM SETUP IDS USING FORM – Lists all custom form setup IDs for the specified form.

CUSTOM FORM SETUP ID – Lists only the specified custom form setup ID.

NUMBER OF COPIES TO PRINT – Enter the number of copies you want to print. The default value is 1.

FILENAME – Enter a filename to store a copy of the list. If this field is left blank, the list will not be saved.

List All Custom Form Setup ID Attachments (1LCA) Use 1LCA to submit a batch job that generates a report of the custom form setup ID attachments to EDC collection points.

Reports

5-3

CDC170S LIST ALL CUSTOM FORM SETUP ID ATTACHMENTS (1LCA) SYS 3/24/94 18:44:31 CUSTOM SERVICES F06 ENTER SELECTION CRITERIA FOR REPORT AND PRESS RETURN TO SUBMIT BATCH JOB. _ ALL CUSTOM FORM SETUP ID ATTACHMENTS IN FACILITY _ ALL ATTACHMENTS FOR CUSTOM FORM ...........______ _ ALL ATTACHMENTS FOR CUSTOM FORM SETUP ID...___________ NUMBER OF COPIES TO PRINT.................__ FOR LATER VIEWING, ALSO ENTER FILE NAME... ________ RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____

Fields ALL CUSTOM FORM SETUP ID ATTACHMENTS IN FACILITY – Lists all attachments defined in the current facility.

ALL ATTACHMENTS FOR CUSTOM FORM – Lists all attachments for the specified custom form.

ALL ATTACHMENTS FOR CUSTOM FORM – SETUP ID – Lists all attachments for the specified custom form setup ID.

NUMBER OF COPIES TO PRINT – Enter the number of copies you want to print. The default value is 1. This field is optional.



EDC Parameter List Report (E501) Use E501 to submit a batch job that generates a report of the CDC data. (For more information, refer to the Engineering Data Collection User’s Guide.)

EDC071S SUBMIT EDC PARM SET LIST REPORT (E501) SYS 3/15/94 00:11:46 CUSTOM SERVICES F06 SELECT: _ ALL PARAMETER SETS or _ PARAMETER SET....__________ SELECT: _ ALL VERSIONS or _ VERSION....______ NUMBER OF COPIES.......__ FILENAME FOR VIEWING...________ RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...___

Fields SELECT ALL OR A SPECIFIC PARAMETER SET – Lists all or selected parameter sets defined in the current facility.

SELECT ALL OR A SPECIFIC VERSION – NUMBER – Lists all or selected versions defined in the current facility.

NUMBER OF COPIES TO PRINT – Enter the number of copies you want to print. The default value is 1. This field is optional.


5-4

6

File-Based Data Collection

This section covers other alternate methods of collection from the WorkStream Data Files (WDF). This type of data collection is useful in loading the file-based data generated from any automation devices, such as station controllers, into the WorkStream database.

You can load a new, self describing data transfer file, which can be generated by an automation device, directly into the input fields of already functional manual data entry screens – both standard EDC and FMS based data collection. If the data file is not available, the data can be keyed in manually. If the data file is available, the file is opened and read only one time.

For large data files, you can use transparent mode to load data without viewing. ID numbers that are known to the device can be used to dynamically generate Unit IDs. The feature also allows use of two different versions of the same input filename containing pre and the post data to be loaded with the same WorkStream transaction.

WDF based collection can:

Reduce maintenance by CAM analysts and supervisors ♦

♦

♦

♦

♦

Reduce system impact of several files loading at one time

Reduce response time for data loading

Retain capabilities based upon key-board based data entry

Improve system reliability with a manual data entry backup

6-1


6-2

♦

♦

Setup and Use There are two modes of data entry for the data collection:

1. Standard EDC data entry screens and

2. FMS defined custom data entry screens

Refer to the standard EDC data collection setup or FMS based data collection setup depending upon the desired collection mode. Make sure that parameters are defined as key-board input on the ULPD screen for this feature to work.

The additional setup includes: setting up a parameter set version with an appropriate alternate collection code and defining the GTS table COM$TESTNAME.

Setting Parameter Set Version For each of the two modes of data entry – standard EDC data entry screens and FMS defined custom data entry screens, two options are allowed:

Display data immediately upon loading data files or

Transparent loading of the data files with data display in a Review loop or upon error.

To implement above features, four alternate methods of data collection codes are defined as shown in Table 6-1. These codes are used on the UPSV transaction to indicate alternate mode of collection. The codes S and T are used with the standard EDC data entry screen display mode and transparent mode respectively; whereas, codes C and D are used with the FMS based data entry screen display and transparent mode.

Table 6-1. Alternate Method of Data collection Codes for WDF Based Collection

Display and Enter Collect Transparently

Standard EDC key-board data entry S T FMS based key-board data entry C D


6-3

Defining the COM$TESTNAME table The template table COM$TESTNAME is provided with the release. Copy this table from the COMETS facility to your local facility. This table contains the instructions for finding the correct data files and for assigning the data found in the data file to the correct parameter readings.

GTS056S UPDATE TABLE DESCRIPTION (UTDG) SYS 3/11/94 14:30:39 CUSTOM SERVICES 5.2 F06 TABLE NAME.. COM$TESTNAME TABLE DESCRIPTION..<CDC> LOOKUP TABLE FOR FILE BASED DATA COLLECTION. ALLOW PROMPT MESSAGE: SIZE: ALPHA NEG(Y/N) DIGIT DECIMAL KEY 1...........PARAMETER SET ID 12 KEY 2...........SEQUENCE NUMBER 3 KEY 2 FORMAT (A/N)..N ALPHA DATA 1....FILE PARAMETER NAME 12 ALPHA DATA 2....PARM SET PARAMETER NAME 12 ALPHA DATA 3....TESTNAME ID 10 NUMERIC DATA 1..PREVIOUS VERSION (1/0) N 1 NUMERIC DATA 2.. SECURITY(Y/N)...N LAST SECURITY UPDATE BY USER.......... LAST SECURITY UPDATE DATE AND TIME.... RETURN = PROCESS SFK9 = DELETE SFK3 = NEXT FUNCTION.. SFK1 = EXIT SFK2 = HELP

Fields KEY 1 – Entry is for the Parameter Set ID. The parameter set version is not used so as to allow for the use of most current version.

KEY 2 – Entry is for non-negative sequence number of up to three digits. This allows up to 1000 (including 0) files to be associated with any given Parameter Set. For larger number of files, enter higher number for digits by using UTDG transaction. It is recommended that the first Parameter Set/Testname association record should start with 1 to avoid duplicate entries.


6-4

ALPHA DATA 1, ALPHA DATA 2 – Are optional fields of 12 characters each. The use of these fields provide a mechanism to assign readings of a file parameter (alpha data 1) to the EDC parameter (alpha data 2) in the parameter set id being collected. This feature supersedes the requirement of having a one-to-one correspondence between the EDC parameters and the parameters collected in the file.

If more than one parameter in any testname file requires re-direction, use a new sequence number for the affected parameter set and the testname. The order of the sequence number for the table and the testname they associate with is not important; however, for clarity, use contiguous sequence numbers for the same testname.

ALPHA DATA 3 – Enter up to ten characters to indicate the Testname ID. The Testname ID can be associated with the device that generates the data file. This field is required.

NUMERIC DATA 1– Indicates if the prior version file must be read. If the entry for this field is zero, the most recent/largest version file is read. If the entry for this field is 1 or any positive number, the previous version file will be read in addition to the latest version. This requires that you have at least two versions of the file in the COMETS$ENGDAT directory.


6-5

Setup Scenarios Following are the three different setup scenarios based upon the previously described options.


6-6

1. Basic setup In most cases, one file contains all the information that can be loaded to the identical EDC parameters. This requires adding a record to the COM$TESTNAME table which associates the Parameter Set ID with a Testname ID. In the screen example that follows, the entries for Parameter Set ID DCCD-N show this basic setup. Key 1 is the Parameter Set ID and Key 2 is a sequence number with a value 1. The Testname ID is entered in the alpha data 3 field and the value zero is entered in the numeric data 1 field to indicate the use of most recent version of the filename for load.

GTS058S UPDATE TABLE ENTRIES (UTEG) SYS 3/11/94 14:40:00 CUSTOM SERVICES 5.2 F06 TABLE NAME..COM$TESTNAME PARAMETER SET ID DCCD-N SEQUENCE NUMBER 1 FILE PARAMETER NAME PARM SET PARAMETER NAME TESTNAME ID DEVCHK_CD PREVIOUS VERSION (1/0) 0 PARAMETER SET ID DCCD-N2 SEQUENCE NUMBER 1 FILE PARAMETER NAME XMEAN PARM SET PARAMETER NAME X_MEAN TESTNAME ID DEVCHK_CD PREVIOUS VERSION (1/0) 0 RETURN = PROCESS SFK4 = NEXT PAGE SFK1 = EXIT SFK5 = VIEW ENTRY......... SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION... GTS057 ENTER A SELECTION CODE OF "U" FOR UPDATE OR "D" FOR DELETE.


6-7

2. Redirected Parameters If the parameter name in the file does not match with the EDC parameter setup, then you can redirect the parameter data read from the file to the EDC parameter attached to the Parameter Set ID. To achieve this, use the alpha data 1 and alpha data 2 fields in addition to the fields described in the basic setup. In the previous screen example, the entries for Parameter Set ID DCCD-N2 shows that the EDC parameter X_MEAN, entered in the alpha data 1, gets the values of file parameter XMEAN, entered in alpha data 2, when the file is loaded.

If more than one parameter needs to be redirected, create another table entry with the same parameter set ID and the Testname ID. Create these with the new sequence number and the EDC and the file parameter names. As mentioned earlier, increment the sequence number by one for readability.


6-8

3. Pre and Post data In some instances, there might be a need to combine data generated from two runs (for example, measurement of data before a given step and after the step has completed). This requires redirection of the parameter and a capability to read an earlier version of a file. Because the contents of any given file from the same Testname ID and Parameter Set are the same (provided no changes have occurred in the file output), the redirecting of the parameter is crucial for this modeling.

If redirecting the parameter is not done, then the loading of both files would load the second set of readings for a parameter over the first set of readings. The parameter POST-PART in the screen example below is the same both in the file and in the EDC parameter setup. Sequence number 1 for the Parameter Set ID PARTICLE-CNT maps the readings directly to the EDC parameter POST-PART from the latest version of the file containing the Testname ID PARTICLES.


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Sequence number 2 takes the POST-PART readings from a PARTICLES file that has a prior/smaller VMS version and insert them as a readings for the EDC parameter PRE-PART. Alternatively, the parameter in the file could have been named PART-READING and this would have mapped to POST-PART and PRE-PART EDC parameters. In this case, the use of previous version flag dictates which file contains pre or post data.

GTS058S UPDATE TABLE ENTRIES (UTEG) SYS 3/11/94 14:43:42 CUSTOM SERVICES 5.2 F06 TABLE NAME..COM$TESTNAME PARAMETER SET ID PARTICLE-CNT SEQUENCE NUMBER 1 FILE PARAMETER NAME PARM SET PARAMETER NAME TESTNAME ID PARTICLES PREVIOUS VERSION (1/0) 0 PARAMETER SET ID PARTICLE-CNT SEQUENCE NUMBER 2 FILE PARAMETER NAME POST-PART PARM SET PARAMETER NAME PRE-PART TESTNAME ID PARTICLES PREVIOUS VERSION (1/0) 1 RETURN = PROCESS SFK4 = NEXT PAGE SFK1 = EXIT SFK5 = VIEW ENTRY......... SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION... GTS057 ENTER A SELECTION CODE OF "U" FOR UPDATE OR "D" FOR DELETE.

Dynamic Insertion of Unit IDs The following two options are available to insert the unit IDs with the rest of the readings.

1. If the prompt table is not defined for a parameter that is being loaded, then the Unit ID value from the file is used. If multiple readings are loaded for one or more samples, only the first reading of each sample is filled in with the Unit ID value from the file. If for some reason, the first reading in a sample does not have a Unit ID value in the file, the Unit ID value from the subsequent readings in the same sample will be used.


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2. If the prompt table is defined for the parameter to be loaded, the prompt value is used while loading the data. If the Unit ID from the file needs to be merged with the prompt value from the prompt table, for example, to insert three digit wafer ID number, then define the prompt table with the replacement character string %%%. In this case, the string %%% is replaced with a Unit ID value from the file. The replacement string allows only three characters to be replaced, starting at the first occurrence of %%%.

GTS058S UPDATE TABLE ENTRIES (UTEG) SYS 3/11/94 14:46:50 CUSTOM SERVICES 5.2 F06 TABLE NAME..WDF-PROMPT PROMPT SEQUENCE NUMBER 1 PROMPT TEXT V%%%_TOP PROMPT SEQUENCE NUMBER 2 PROMPT TEXT V%%%_CENTER PROMPT SEQUENCE NUMBER 3 PROMPT TEXT V%%%_FLAT PROMPT SEQUENCE NUMBER 4 PROMPT TEXT V%%%_TOP PROMPT SEQUENCE NUMBER 5 PROMPT TEXT V%%%_CENTER PROMPT SEQUENCE NUMBER 6 PROMPT TEXT V%%%_FLAT RETURN = PROCESS SFK4 = NEXT PAGE SFK1 = EXIT SFK5 = VIEW ENTRY......... SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION... GTS057 ENTER A SELECTION CODE OF "U" FOR UPDATE OR "D" FOR DELETE.

Maintenance Because COMETS$ENGDAT directory is used for the file storage, it is possible that this directory may contain data files that are not current because of load failure or incorrect modeling, etc. Therefore, review the directory contents periodically, and take appropriate actions. By default, all files that are loaded are deleted when transaction is completed. This is controlled by the process level logical COMETS$WDF_DELETE not being defined or having any values other then N or A. The following additional options are available by setting this logical.


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Overriding file deletion By defining the logical COMETS$WDF_DELETE to N prior to invoking WorkStream, the loaded files in COMETS$ENGDAT directory are not deleted. This option is useful while testing the load model.


6-12

Deleting All file Versions By defining the logical COMETS$WDF_DELETE to A prior to invoking WorkStream, the all versions of loaded files in COMETS$ENGDAT directory are deleted. This option provides automatic housekeeping by deleting all versions of a file that are created due to the aborted measurements or remeasurements.

Maintain the GTS table COM$TESTNAME with the changes in the parameter in the parameter set or the file parameters. The table entry might become obsolete and should be deleted if the parameter set and/or Testname ID is deleted.

Limitations 1. A maximum of 100 files may be loaded and subsequently deleted for 1 Parameter

set.

2. A maximum of 100 Parameters may be loaded for 1 Parameter set.

3. A maximum of 1000 readings may be loaded for 1 Parameter set.

4. The model, like other EDC setup, can only be validated at runtime. Therefore, if no data loads, validate the entire model, including the location, protection and contents of the attempted file/s.

Common Errors The following lists a few of the most common errors:

1. No W:RWDE protection on the file.

2. Mismatch of the file and EDC parameter setup with no redirection in the GTS table COM$TESTNAME.

3. Incorrect spelling of the Testname ID in the COM$TESTNAME table entry.

4. Invalid Processing Equipment ID in the Header-2 file record.

5. Transparent mode not expected.

6. All data missing in the file.

7. Earlier versions of files modeled, but not present.

8. FMS based collection is not attached to correct parameter set ID/version.

9. SFK5 (Review) and SFK8 (Partial Data Collection) in CDC does not redisplay changed data because file data supersedes default data.


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WorkStream Data File (WDF) Description The data input for the above described alternate collection codes comes from the self-describing WorkStream Data format (WDF) files as follows:

1. Two file header records describe the collection environment from which the processing Equipment ID can be extracted and used as the Machine ID for WIP based data collection.

2. A Parameter header record immediately precedes all of its readings. It indicates the number of readings that were attempted to be supplied by the device and the data format, either numeric or alphanumeric.

3. Data or Value records immediately follow the Parameter Header. They indicate the Index Number of the Reading (which may have skips), the Wafer ID number associated with that reading, and the actual data value.

4. The value record also contains the date-time the data was collected and a comment which is not used at present.

To be load-capable, the WDF files must be located in the directory defined by the process level logical COMETS$ENGDAT, with W:RWDE protection (all users may read from, rewrite to, delete, or execute the files), and consist of one of the two possible naming constructs based upon WIP or RTC collection.

Type of Collection File Name Construct

WIP <Operation><Testname Id>.<Lot number> RTC <Event><Testname Id>.<Entity>

The File Name components are defined as follows:

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Operation – The WorkStream Operation at which the lot is currently located. This is a number of up to 4 digits.

Testname ID – The ID for the set of data to be collected by the device.

Lot number – The WorkStream lot number.

Event – The WorkStream RTC event that induced the data collection and change in the equipment status.

Entity – The WorkStream RTC entity (equipment) for which the data collection Event was logged.


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General Rules The file has 5 record types: Header_1, Header_2, Parameter name, Data and Comment.

The order of records generally follow:

1. Header_1 record

2.Header_2 record

3.Parameter name record

4.Data value and comment records

The file is an ASCII file of variable length records with implied carriage control.

Each record type has a specific fixed length.

All fields in all records are left justified.

Any unused fields and any unused potion of used fields in any record must be filled with space/s.

Some of the fields in the record are used for the ease of viewing file information and are not used in loading WDF files.


6-15

Header_1 Record Format The Header_1 record is the first record in the WDF file and must be present. It is 66 bytes in length.

Field Length Description

Testname 10 Bytes Mnemonic that describes the analytical operation Operation 4 Bytes WIP = WorkStream Operation number; RTC = spaces Unit ID 12 Bytes WIP = lot number for valid lots; RTC = Entity name Asystem 12 Bytes Mnemonic used to identify the Analytical System that generated the data. This

field is for information only and therefore is optional. Aoper 12 Bytes Operator of the Analytical system SECS_PPID

16 Bytes SECS Process Program ID (recipe name). This field is for information only and therefore is optional.


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Header_2 Record Format This record is 74 bytes in length and follows the Header 1 record.


PTime 20 Bytes Mnemonic used to identify the time required for processing on the Psystem. This field is for information only and therefore is optional.

Psystem 12 Bytes Mnemonic used to identify the process equipment that performed the processing prior to the measurement operation, the results of which are being measured. This field will be loaded as a machine ID on a WorkStream screen and is for information only, therefore it is optional.

Poper 12 Bytes Operator of the Process equipment will be loaded on a WorkStream screen. Product/Event 25 Bytes WIP = product name; RTC = Event name Loopflag 1 Byte Mnemonic to indicate FULL (F), SHORT (S) or MONITOR (M) lot status.

This field is for information only and is optional. Operation 4 Bytes Operation number


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Parameter Name Record Format This record may appear anywhere in the file, excluding the first and second record. It must precede the data record for the parameter. It is 23 bytes in length.


“PAR ” 4 Bytes Denotes record contains parameter information Parameter 15 Bytes The name of parameter to be collected Samplesize 3 Bytes The expected number of data values to be derived for the parameter. It may not

be the actual number of data records that follow, due to possible missing data collection.

Alpha flag 1 Byte Flag for Alpha/Numeric data. A = All data records are Alpha data N = All data records are numeric data


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Data Record Format This record may appear anywhere in the file excluding the first and second record. The first data record of a parameter must follow its parameter name record. This record is 19 bytes in length.


Index 3 Bytes Integer between 1 and 999, inclusive, that corresponds to the parameter reading sequence number of the sample plan.

“*” 1 Byte Identifies data record Wafer 3 Bytes Integer between 1 and 999, inclusive, that corresponds to the wafer number of the

sample. Datum 12 Bytes The measurement results in any standard (ASCII) numeric representation.


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Comment Record Format This record may appear anywhere in the file, excluding the first and second record. WorkStream programs ignore this record. This record is 60 bytes in length.


“COM ” 4 Bytes Identifies comment record Comment 56 Bytes Information entered by the user


Sample WDF Following is the sample WDF file MEASUREMENT WDFTEST.ENTITY02. It logs event MEASUREMENT on entity ENTITY02 with Testname WDFTEST.

Record type Actual record

Header 1 WDFTEST 12345678 BILLS_BOX HARRIS My_SECS_Recipe Header 2 12:34:45 NOVA Wild_Bill MEASUREMENT F9999 Parm Name PAR THICKNESS 12N Data 001*1 11200 Data 002*1 10500 Data 003*1 8450 Data 004*3 10600 Data 005*3 13200 Data 006*3 12200 Data 007*6 14200 Data 008*6 13500 Data 009*6 14450 Data 010*10 11900 Data 011*10 12900 Data 012*10 14200 Parm Name PAR WIDTH 4N Data 001*1 1.7701 Data 002*2 1.7714 Data 003*3 1.7711 Data 004*4 1.7710 Parm Name PAR THKTOT 3N Data 001*1 950 Data 002*5 400 Data 003*7 430

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A

Example of FMS Setup

This appendix provides an example of the FMS-based data collection setup and the WorkStream screens involved.

The example includes a parameter set EXAMPLE comprising four parameters: DATA, WAFER AVG, LOT AVG, and LOC AVG.

The following WorkStream screens are used in the FMS-based data collection setup:

Update Engineering Parameter Definition (ULPD) for all four parameters ♦

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Update EDC Parameter Set ID Version (UPSV) for parameter set EXAMPLE

Update Custom Form Setup ID (1UCF)

Update Variable Assignments (1UVA)

Update Variable Definition (1UVD)

Update Field Defaults (1UFD)

Lock/Unlock Custom Form Setup (1LCF)

Update Custom Form Setup ID Attachment (1UCA)

Run-time custom screen.

A-1


A-2

Update Engineering Parameter Definition (ULPD) The following four ULPD screens are for the DATA, WAFER AVG, LOT AVG, and LOC AVG parameters, respectively.


CUSTOM SERVICES F06

PARAMETER NAME.....DATA PAM PARAMETER ID (opt)..____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........B. NAIR_____ PARAMETER PROMPT...ENTER DATA__________




SAMPLES/ENTITY OR LOT...__ OR ___% PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST.DEV. ......._


or MAXIMUM........_

PROMPT CODES (TABLE)...._____________ FORMAT (A,D,E,F,0-9)....E STORE CALCULATED VALUE (Y/N)...N

READINGS/PROMPT.........__ VALIDATION TABLE (opt)..____________ APPLY CALCULATION TO (SELECT ONE):_










Use this screen to update the engineering parameter definition for the parameter DATA.


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CUSTOM SERVICES F06

PARAMETER NAME.....WAFER AVG PAM PARAMETER ID (opt)..____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........B. NAIR_____ PARAMETER PROMPT...ENTER DATA___________


READINGS/ENTITY OR LOT..__ FILE FORMAT (LEC-1,2,3; RTC-4; 0).._ LIMIT CHECKING APPLIED AGAINST (SELECT ONE):


SAMPLES/ENTITY OR LOT...3_ or ___% PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST. DEV. ......_

READINGS/SAMPLE.........1_ COPY FILE INTO DATABASE (Y/N)......_ MINIMUM........_ USER..........._

or MAXIMUM........_








RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER..___________




Use this screen to update the engineering parameter definition for the parameter WAFER AVG.


A-4


CUSTOM SERVICES F06

PARAMETER NAME.....LOT AVG PAM PARAMETER ID (opt)..____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........B. NAIR_____ PARAMETER PROMPT...ENTER DATA____________


READINGS/ENTITY OR LOT..__ FILE FORMAT (LEC-1,2,3; RTC-4; 0).._ LIMIT CHECKING APPLIED AGAINST (SELECT ONE):_




or MAXIMUM........_

PROMPT CODES (TABLE)...._____________ FORMAT (A,D,E,F,0-9)....2 STORE CALCULATED VALUE (Y/N)...N











Use this screen to update the engineering parameter definition for the parameter LOT AVG.


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CUSTOM SERVICES F06

PARAMETER NAME.....LOC AVG PAM PARAMETER ID (opt)..____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........B. NAIR_____ PARAMETER PROMPT...ENTER DATA___________


READINGS/ENTITY OR LOT..__ FILE FORMAT (LEC-1,2,3; RTC-4; 0).._ LIMIT CHECKING APPLIED AGAINST (SELECT ONE):




or MAXIMUM........_








RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER..____________




Use this screen to update the engineering parameter definition for the parameter LOC AVG.


A-6

Update EDC Parameter Set ID Version (UPSV)

EDC011S UPDATE EDC PARAMETER SET ID VERSION (UPSV) SYS 3/14/94 01:32:08 CUSTOM SERVICES F06 PARAMETER SET ID....EXAMPLE VERSION...1 EFFECTIVE PERIOD: START DATE-TIME...02/22/92 07:02 END DATE-TIME... / / : AUTHOR (opt)... PRECEDENCE ORDER OF ADDITIONAL PARAMETERS (Rank 1 through 12): LOT...1 PRODUCT...2 ROUTE...3 OPER...4 ROUTE-OPER...5 PRODUCT-OPER...6 ENTITY-EVENT...7 ENTITY...8 EVENT...9 ENTITY SCHEME/TYPE..-1 ENTITY STATUS..-1 PROD-ENTITY...-1 ENTITY TYPE/SCHEME (0-5)... ENTITY STATUS (0-9)... ONLY COLLECT HIGHEST PRECEDENCE LEVEL (Y/N)...Y USE ALTERNATE COLLECTION METHOD (opt).........F COMMENT: RETURN = PROCESS SFK2 = HELP SFK5 = VIEW ID... VERSION... SFK1 = EXIT SFK9 = TERMINATE SFK3 = NEXT FUNCTION...___ EDC017 ERROR - THE EDC PARAMETER SET VERSION IS FROZEN AND THUS CANNOT BE MODIFIED. PLEASE EXIT OR TERMINATE THIS VERSION.

Set the Only Collect Highest Precedence Level field to Y for both FMS- and GTS-based data collection.

Set the Use Alternate Collection Method field to F for FMS-based data collection and G for GTS-based data collection. If you leave this field blank, the standard EDC collection screen is displayed.


A-7

Update Custom Form Setup ID (1UCF)

CDC110S UPDATE CUSTOM FORM SETUP ID (1UCF) SYS 3/02/94 18:15:55 CUSTOM SERVICES F06 CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION (opt)......EXAMPLE OF FMS DATA COLL. FORM NAME..............CDC990 HELP CODE (opt)........1XYZ RETURN = PROCESS SFK9 = DELETE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____ CDC301 YOU ARE CREATING A NEW SETUP ID. IF THIS IS CORRECT, ENTER DATA AND PRESS RETURN. OTHERWISE EXIT.

In this example, you are assigning form CDC990.FRM to the setup ID EXAMPLE.

The help text file associated with the custom form CDC990 is 1XYZ.HLP. This file resides in the COMETS$HELP directory.


A-8

Update Variable Assignments (1UVA)

CDC990S FMS-BASED DATA COLLECTION EXAMPLE *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D WAFER ID A A A WAFER AVERAGE -------- ------------ ------------ ------------ ------------- B D D D E B D D D E B D D D E OVERALL AVERAGE...F LOCATION LOC. AVERAGE -------- ------------ G H G H LOW SHUTDOWN LIMIT....I G H HIGH SHUTDOWN LIMIT...J RETURN = PROCESS SFK1 = EXIT SFK2 = HELP SFK5 = REVIEW *ML1 *ML2

When you access 1UVA, the custom form attached to the setup ID is displayed, showing all the fields defined.


A-9

Update Variable Definitions (1UVD)

CDC120S UPDATE VARIABLE DEFINITIONS (1UVD) SYS 3/24/94 19:07:33




VAR DESCRIPTION PARAMETER D/P TRANS ROWS COLS FORMULA OPT A/N LOW HIGH

--- --------------- ------------ --- ----- ---- ---- ----------------------------------- --- --- ------------ ------------

A PROMPT LOCATION ____________ D N 1_ 3_ @DEF_______________________________ _ _ ____________ ___________

B WAFER NUMBER___ ____________ D N 3_ 1_ ___________________________________ Y N 1___________ 25_________

C DATA PROMPT IDS DATA________ P N 3_ 3_ %STR(#B) & (#A)____________________ _ _ ____________ ___________

D INPUT DATA_____ DATA________ D N 3_ 3_ ___________________________________ N N 0___________ 100________

E WAFER AVERAGES_ WAFER AVG___ D N 3_ 1_ %AVG(#D)___________________________ _ _ ____________ ___________

F LOT AVERAGES___ LOT AVG_____ D N 1_ 1_ %AVG(#E)___________________________ _ _ ____________ ___________

G PROMPT LOCATION ____________ D N 1_ 3_ @DEF_______________________________ _ _ ____________ ___________

H AVERAGE BY LOC_ LOC AVG_____ D N 3_ 1_ %AVG(#D)___________________________ _ _ ____________ ___________

I LOT SHUTDOWN___ DATA________ D N 1_ 1_ @LSL_______________________________ _ _ ____________ ___________

J HIGH SHUTDOWN__ DATA________ D N 1_ 1_ @HSL_______________________________ _ _ ____________ ___________


SFK1 = EXIT SFK0 = 2ND SCREEN SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT

FUNCTION...____

CDC327 YOU ARE MODIFYING EXISTING VARIABLE DEFINITIONS FOR A SETUP ID.


Use this screen to define each variable assigned on the custom form CDC990.


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Update Field Defaults (1UFD)

CDC990S FMS-BASED DATA COLLECTION EXAMPLE *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D WAFER ID _TOP _CENTER _BOTTOM WAFER AVERAGE -------- ------------ ------------ ------------ ------------- OVERALL AVERAGE... LOCATION LOC. AVERAGE -------- ------------ _TOP _CENTER LOW SHUTDOWN LIMIT....@LSL _BOTTOM HIGH SHUTDOWN LIMIT...@HSL *ML1 *ML2

When you access 1UFD, the custom form attached to the setup ID is displayed, showing the current default values.

In this example, the default values for wafer locations are _TOP, _CENTER, and _BOTTOM.


A-11

Lock/Unlock Custom Form Setup ID (1LCF)

CDC130S LOCK/UNLOCK CUSTOM FORM SETUP ID (1LCF) SYS 3/02/94 23:25:51 CUSTOM SERVICES F06 CUSTOM FORM SETUP ID...EXAMPLE DESCRIPTION............EXAMPLE OF FMS DATA COLL. FORM NAME..............CDC990 HELP CODE.............. CURRENT LOCK STATUS....UNLOCKED DIAGNOSTIC FILENAME.. .ABC_____ SFK7 = LOCK CUSTOM FORM SETUP ID SFK8 = UNLOCK CUSTOM FORM SETUP ID SFK5 = VIEW DIAGNOSTIC FILE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION...____

You must enter the name of the diagnostic file if you want to lock the setup ID.

In this example, ABC is the diagnostic filename. This creates the diagnostic file ABC.TXT in your default directory.


A-12

Update Custom Form Setup ID Attachment (1UCA)

CDC160S UPDATE CUSTOM FORM SETUP ID ATTACHMENT (1UCA) SYS 3/02/94 23:50:56 CUSTOM SERVICES F06 PARAMETER SET ID............EXAMPLE PARAMETER SET DESCRIPTION...EXAMPLE FOR CDC DOCUMENT PARAMETER SET VERSION.......1 LEVEL 1... VALUE 1... LEVEL 2... VALUE 2... CUSTOM FORM SETUP ID........EXAMPLE__________ RETURN = PROCESS SFK9 = DELETE SFK1 = EXIT SFK2 = HELP SFK3 = NEXT FUNCTION..._____ CDC110 YOU ARE MODIFYING AN EXISTING SETUP ID ATTACHMENT. IF THIS IS CORRECT, PLEASE REVISE THE DATA AND PRESS RETURN. OTHERWISE EXIT.

In this example, you are attaching the setup ID EXAMPLE to an EDC parameter EXAMPLE, version 1.


CDC990S FMS-BASED DATA COLLECTION EXAMPLE SYS 3/16/94 11:07:14 CUSTOM SERVICES F06 PARAMETER SET ID.......EXAMPLE VERSION.....1 ENTITY.......US02 EVENT.....1370 WAFER ID _TOP _CENTER _BOTTOM WAFER AVERAGE -------- ------------ ------------ ------------ ------------- 2 21 22 23 22.00 3 31 32 33 32.00 4 41 42 43 42.00 OVERALL AVERAGE...32.00 LOCATION LOC. AVERAGE -------- ------------ _TOP 3.10000E+01 _CENTER 3.20000E+01 LOW SHUTDOWN LIMIT....10.00 _BOTTOM 3.30000E+01 HIGH SHUTDOWN LIMIT...90.00 CDC106 ALL CALCULATED AND USER INPUT DATA ARE DISPLAYED. PRESS RETURN TO STORE THE DATA COLLECTED OR SFK1 TO EXIT.

When the setup is complete, the custom data collection screen is displayed at run-time, as shown here.

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B

User-Defined Calculations

The FMS-based data collection processing routine calls user exit CDC900. This user exit is used to compute user-defined calculations entered in formulas for calculated fields on the custom form.

The format of the user-defined function is %xxx

where % indicates that it is a calculation function and xxx is the name of the function being calculated.

The user-defined calculations cannot be a standard function. (For a list of standard functions, see Defining Variables in Section 2.)

Included in this appendix is the CDC 900 program listing containing the following user-defined functions:

%YN0 – Returns a NO if the input value is less than or equal to zero and a YES if the input value is greater than 0.

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%CN0 – Changes a negative value to zero and leaves positive values unchanged.

%VAR – Calculates the variance of the sample.

%IN0 – Returns a DECREASE if the input value is less than or equal to zero, and INCREASE if the input value is greater than zero.

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B-2

As you add more user-defined functions, modify the working storage variable that lists valid user-defined calculation functions.


B-3

*I INTERNAL SPECIFICATION AND SOURCE CODE OF CDC900 * *I************************************************************************ *I - INTERNAL START *I *********************** *I Description: *I ************** *I *I This is the user calculation program for FMS-based EDC. *I *I ************** *I Sample Call: *I ************** *I *I CALL "CDC900" USING CDC900C-CALC-CONTROL. *I *I ******************* *I Processing Logic: *I ******************* *I *I The program is passed a buffer containing the function to be performed and *I the contents of either a single value (in position 10 a full array of values *I corresponding to the number of samples and readings indicated for the source *I variable based on the target variable. *I *I The following examples are provided. *I *I %YN0 *I *I This function returns a "NO" if the input value is zero or less, *I returns a "YES" if the input value is greater than 0. *I *I %CN0 *I *I This function changes a negative value to zero and leaves any positive *I values unchanged. *I *I %VAR *I *I This function calculates the variance of the sample. *I *I %IN0 *I *I This function returns a value of "INCREASE" if > 0 *I and a value of "DECREASE" if <= 0. *I *I - INTERNAL END IDENTIFICATION DIVISION. PROGRAM-ID. CDC900.


B-4

This program contains user calculations for FMS-based EDC.

ENVIRONMENT DIVISION. CONFIGURATION SECTION. SOURCE-COMPUTER. VAX-11. OBJECT-COMPUTER. VAX-11. DATA DIVISION. WORKING-STORAGE SECTION. 01 PROCESS-STATUS PIC X. 88 PROGRAM-EXIT-REQUESTED VALUE "1". 01 WS-USER-FUNCTION-TEST PIC X(4). 88 VALID-USER-FUNCTION VALUE "%YN0" "%CN0" "%FX1" "%VAR" "%IN0". 88 YES-NO-MESSAGE-FUNCTION VALUE "%YN0". 88 CHANGE-NEGATIVE-FUNCTION VALUE "%CN0". 88 FILL-WITH-ONES-FUNCTION VALUE "%FX1". 88 VARIANCE-FUNCTION VALUE "%VAR". 88 RETURN-INCREASE-GT-0-FUNCTION VALUE "%IN0". 01 NCOUNT PIC 99. 01 TOTAL COMP-2. 01 AVERAGE COMP-2. 01 VARIANCE COMP-2. 01 WS-X PIC 99. 01 MISSING-VALUE COMP-2. LINKAGE SECTION. COPY "CUSTOM$COPYLIB:CDC900C.LIB". PROCEDURE DIVISION USING CDC900C-CALC-CONTROL. A001-CONTROL.


B-5

MOVE "0" TO PROCESS-STATUS. PERFORM B001-VERIFY THRU B001-EXIT. IF CDC900C-VERIFY OR PROGRAM-EXIT-REQUESTED GO TO A001-EXIT. PERFORM C001-CALCULATE THRU C001-EXIT. IF PROGRAM-EXIT-REQUESTED GO TO A001-EXIT. A001-EXIT. EXIT PROGRAM. B001-VERIFY.

Test to see if this is a valid user function.

MOVE 0 TO CDC900C-RETURN-CODE. MOVE CDC900C-FUNCTION-CODE TO WS-USER-FUNCTION-TEST. IF NOT VALID-USER-FUNCTION MOVE 1 TO CDC900C-RETURN-CODE MOVE "1" TO PROCESS-STATUS GO TO B001-EXIT. B001-EXIT. EXIT. C001-CALCULATE. COMPUTE MISSING-VALUE = 10**38. IF YES-NO-MESSAGE-FUNCTION PERFORM C100-YES-NO-MESSAGE THRU C100-EXIT GO TO C001-EXIT. IF VARIANCE-FUNCTION PERFORM C200-VARIANCE THRU C200-EXIT GO TO C001-EXIT. IF CHANGE-NEGATIVE-FUNCTION PERFORM C300-CHANGE-NEGATIVE THRU C300-EXIT GO TO C001-EXIT.


B-6

IF RETURN-INCREASE-GT-0-FUNCTION PERFORM C400-RETURN-INCREASE-GT-0 THRU C400-EXIT GO TO C001-EXIT. IF FILL-WITH-ONES-FUNCTION PERFORM C500-FILL-WITH-ONES THRU C500-EXIT GO TO C001-EXIT. C001-EXIT. EXIT. C100-YES-NO-MESSAGE.

This sample function enters a "YES" in the alpha return if the input parameter is greater than zero; otherwise, it enters a "NO."

No error checking is done to see if input is non-numeric.

MOVE "A" TO CDC900C-OUTPUT-TYPE. IF CDC900C-INPUT-NUMERIC (1) > 0 MOVE "YES" TO CDC900C-OUTPUT-ALPHA ELSE MOVE "NO" TO CDC900C-OUTPUT-ALPHA. MOVE 0 TO CDC900C-OUTPUT-NUMERIC. C100-EXIT. EXIT. C200-VARIANCE.

This sample function calculates the variance of the sample.


B-7

No error checking is done to see if inputs are non-numeric.

COMPUTE NCOUNT = CDC900C-INPUT-SAMPS * CDC900C-INPUT-READS. MOVE 0 TO TOTAL. PERFORM C210-AVERAGE-LOOP THRU C210-EXIT VARYING WS-X FROM 1 BY 1 UNTIL WS-X > NCOUNT. COMPUTE AVERAGE = TOTAL / NCOUNT. MOVE 0 TO VARIANCE. PERFORM C220-VARIANCE-LOOP THRU C220-EXIT VARYING WS-X FROM 1 BY 1 UNTIL WS-X > NCOUNT. MOVE "N" TO CDC900C-OUTPUT-TYPE. MOVE SPACES TO CDC900C-OUTPUT-ALPHA. MOVE VARIANCE TO CDC900C-OUTPUT-NUMERIC. C200-EXIT. EXIT. C210-AVERAGE-LOOP. IF CDC900C-INPUT-NUMERIC (WS-X) = MISSING-VALUE GO TO C210-EXIT. ADD CDC900C-INPUT-NUMERIC (WS-X) TO TOTAL. C210-EXIT. EXIT. C220-VARIANCE-LOOP. IF CDC900C-INPUT-NUMERIC (WS-X) = MISSING-VALUE GO TO C220-EXIT. COMPUTE VARIANCE = VARIANCE + (CDC900C-INPUT-NUMERIC (WS-X) - AVERAGE) ** 2. C220-EXIT. EXIT. C300-CHANGE-NEGATIVE.

This sample function returns zero if the input is negative; otherwise, it returns the input value unchanged.



MOVE "N" TO CDC900C-OUTPUT-TYPE. IF CDC900C-INPUT-NUMERIC (1) < 0 MOVE 0 TO CDC900C-OUTPUT-NUMERIC ELSE MOVE CDC900C-INPUT-NUMERIC (1) TO CDC900C-OUTPUT-NUMERIC. MOVE SPACES TO CDC900C-OUTPUT-ALPHA. C300-EXIT. EXIT. C400-RETURN-INCREASE-GT-0.

This sample function puts a "INCREASE" in the alpha return if the input parameter is greater than zero; otherwise it puts a "DECREASE".


MOVE "A" TO CDC900C-OUTPUT-TYPE. IF CDC900C-INPUT-NUMERIC (1) > 0 MOVE "INCREASE" TO CDC900C-OUTPUT-ALPHA ELSE MOVE "DECREASE" TO CDC900C-OUTPUT-ALPHA. MOVE 0 TO CDC900C-OUTPUT-NUMERIC. C400-EXIT. EXIT. C500-FILL-WITH-ONES.

This function is used to fill an array with 1 up to the number specified as an input parameter. It is useful for establishing a subset of the data to be used in calculations. It returns a 1 if the number specified by the current sample and reading is not greater than the input parameter; otherwise, it returns a zero (0).

MOVE "N" TO CDC900C-OUTPUT-TYPE. COMPUTE WS-X = CDC900C-TOTAL-VAR-READS * (CDC900C-THIS-VAR-SAMP - 1) + CDC900C-THIS-VAR-READ. IF WS-X > CDC900C-INPUT-NUMERIC (1) MOVE 0 TO CDC900C-OUTPUT-NUMERIC ELSE MOVE 1 TO CDC900C-OUTPUT-NUMERIC. MOVE SPACES TO CDC900C-OUTPUT-ALPHA. C500-EXIT. EXIT.

B-8


B-9

C

Example of GTS Setup

This appendix provides an example of GTS-based data collection setup and the WorkStream screens involved.

The following screens are used:

Update Table Description (UTDG) for table CDC$TMXTUBE ♦

♦

♦

♦

♦

Add Table Entries (ATEG)

Update Engineering Parameter Definition (ULPD) for paramer ACTIONS

Update EDC Parameter Set ID Version (UPSV) for parameter set EXAMPLE

Run-time custom screen.

C-1


C-2

Update Table Description (UTDG)

GTS056S UPDATE TABLE DESCRIPTION (UTDG) SYS 3/24/94 20:07:15 CUSTOM SERVICES F06 TABLE NAME.. CDC$TMXTUBE TABLE DESCRIPTION..TMXTUBE VALIDATION TABLE__________________________________ ALLOW PROMPT MESSAGE: SIZE: ALPHA NEG(Y/N) DIGIT DECIMAL KEY 1...........PARENT SUBSYSTEM________ 12 KEY 2...........SUB SUBSYSTEM___________ 12 KEY 2 FORMAT (A/N)..A ALPHA DATA 1....DESCRIPTION_____________ 30 ALPHA DATA 2....COMPONENT TALBE_________ 12 ALPHA DATA 3...._ _ NUMERIC DATA 1.._ _ _ _ NUMERIC DATA 2.._ _ _ _ SECURITY(Y/N)...N LAST SECURITY UPDATE BY USER.......... LAST SECURITY UPDATE DATE AND TIME.... RETURN = PROCESS SFK9 = DELETE SFK3 = NEXT FUNCTION.._ SFK1 = EXIT SFK2 = HELP

Use this screen to update the table description for the GTS table CDC$TMXTUBE.


C-3

Add Table Entries (ATEG)

GTS064S ADD TABLE ENTRIES (ATEG) SYS 3/03/94 00:01:38 CUSTOM SERVICES F06 TABLE NAME..CDC$TMXTUBE PARENT SUBSYSTEM BOAT________ SUB-SUBSYSTEM ______________ DESCRIPTION BOAT CONTROL______________________________________ COMPONENT TABLE ____________________________ PARENT SUBSYSTEM COMPUTER______ SUB-SUBSYSTEM _______________ DESCRIPTION DESCRIBE COMPUTER_________________________________ COMPONENT TABLE _____________________________ PARENT SUBSYSTEM COMPUTER_______ SUB-SUBSYSTEM _________________ DESCRIPTION GAS CONTROL SYSTEM________________________________ COMPONENT TABLE _____________________________ RETURN = PROCESS SFK2 = HELP SFK3 = NEXT FUNCTION.._____ SFK1 = EXIT GTS029 YOU ARE ADDING NEW DATA. PLEASE ENTER IT ON THE LINES PROVIDED THEN PRESS RETURN.

Use this screen to load valid parameter data values in the GTS table CDC$TMXTUBE.


C-4

Update Engineering Parameter Definition (ULPD)


CUSTOM SERVICES F06

PARAMETER NAME.....CDC990 PAM PARAMETER ID (opt).._____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........RAMESH_______ PARAMETER PROMPT..._____________________




SAMPLES/ENTITY OR LOT...__ or ___% PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST. DEV. ......_


or MAXIMUM........_

PROMPT CODES (TABLE)...._____________ FORMAT (A,D,E,F,0-9)....E STORE CALCULATED VALUE (Y/N)..._







RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER..____________




Use this screen to define the EDC parameter CDC990 for GTS-based data collection.


C-5

Update EDC Parameter Set ID Version (UPSV)

EDC011S UPDATE EDC PARAMETER SET ID VERSION (UPSV) SYS 3/14/94 01:32:08 CUSTOM SERVICES F06 PARAMETER SET ID....M-DETAIL-G VERSION...1 EFFECTIVE PERIOD: START DATE-TIME...02/22/92 07:02 END DATE-TIME... / / : AUTHOR (opt)... PRECEDENCE ORDER OF ADDITIONAL PARAMETERS (Rank 1 through 12): LOT...1 PRODUCT...2 ROUTE...3 OPER...4 ROUTE-OPER...5 PRODUCT-OPER...6 ENTITY-EVENT...7 ENTITY...8 EVENT...9 ENTITY SCHEME/TYPE..-1 ENTITY STATUS..-1 PROD-ENTITY...-1 ENTITY TYPE/SCHEME (0-5)... ENTITY STATUS (0-9)... ONLY COLLECT HIGHEST PRECEDENCE LEVEL (Y/N)...Y USE ALTERNATE COLLECTION METHOD (opt).........G COMMENT: RETURN = PROCESS SFK2 = HELP SFK5 = VIEW ID... VERSION... SFK1 = EXIT SFK9 = TERMINATE SFK3 = NEXT FUNCTION...____ EDC017 ERROR - THE EDC PARAMETER SET VERSION IS FROZEN AND THUS CANNOT BE MODIFIED. PLEASE EXIT OR TERMINATE THIS VERSION.

Use this screen to define the EDC parameter set ID M-DETAIL-G.


Run-Time Custom Screen


When the setup is complete, the custom data collection screen is displayed at run-time, as shown here.

C-6

D

Example of FMS/GTS Setup

This appendix provides an example of FMS/GTS-based data collection setup and the WorkStream screens involved.

The FMS/GTS setup involves four steps:

1. Creating the GTS table setup

2. Creating the EDC setup

3. Creating the FMS setup

4. Executing the custom screens.

Creating the GTS Table Setup The GTS table setup is similar to that described in Section 3, GTS-Based Data Collection. Refer to Appendix C for an example of a GTS-based data collection setup.

D-1


D-2

♦

Creating the EDC Setup The EDC setup is similar to that described in Section 3, with the following modifications:

Parameters should follow corresponding characteristics described in FMS- and GTS-based collections because parameter values are collected from both FMS and GTS.


CUSTOM SERVICES F06

PARAMETER NAME.....CDC990 PAM PARAMETER ID (opt).._____________ LEC ONLY (L) / RTC ONLY (N) (opt).._

DESCRIPTION...___________________________________ REQUESTOR (opt).........REMESH_______ PARAMETER PROMPT..._____________________




SAMPLES/ENTITY OR LOT...__ or ___% PROCESS FILE DATA ONLINE (Y/N)....._ AVERAGE........_ ST. DEV. ......_


or MAXIMUM........_

PROMPT CODES (TABLE)...._____________ FORMAT (A,D,E,F,0-9)....E STORE CALCULATED VALUE (Y/N)..._







RETURN = PROCESS SFK9 = DELETE SFK5 = VIEW PARAMETER..___________




♦ FMS/GTS-based data collection supports only the following parameter set version characteristics defined with UPSV:


D-3


♦

♦

The Only Collect Highest Precedence Level field is set to Y.

The Use Alternate Collection Method field is set to F for FMS-based data collection.


D-4

Creating the FMS Setup Create the FMS setup as described in Section 2, FMS-Based Data Collection. The following is an example of the FMS data collection screen:

TST501S TEST SCREEN FOR GTS CALLS FROM FMS *DAT *COM *FAC *HL1 *HL2 *HL3 *H4A *H4B *H4C *H4D ACTION : A SUB-UTSTEPPR : B SSB-UTSTEPPR : C REPAIR TIME : D :E :F THIS IS A TEST SCREEN FOR PARAMETER SET ID: M-DETAIL-F THIS IS A TEST FOR GTS CALLS FROM AN FMS COLLECTION SCREEN. *ML1 *ML2


D-5

CDC120S UPDATE VARIABLE DEFINITIONS (1UVD) SYS 3/17/94 01:29:15


CUSTOM FORM SETUP ID...TST501 DESCRIPTION...CDC FMS GTS COLLECTION FORM NAME...TST501


VAR DESCRIPTION PARAMETER D/P TRANS ROWS COLS FORMULA OPT A/N LOW HIGH

--- --------------- ------------ --- ----- ---- ---- ----------------------------------- --- --- ------------ ------------

A ACTIONS ACTIONS D N 1 1 @GTS

B SUB-UTSTEPPER SUB-UTSTEPPR D N 1 1 @GTS

C SSB-UTSTEPPER SSB-UTSTEPPR D N 1 1 @GTS

D DAY D N 1 1 Y N

E HOURS D N 1 1 Y N

F MINUTES D N 1 1 Y N

G REPAIR TIME REPAIR TIME D N 1 1 (#D * 60 * 24) + (#E * 60) + #F

H

I

J


SFK1 = EXIT SFK0 = 2ND SCREEN SFK2 = HELP SFK6 = PREVIOUS PAGE SFK3 = NEXT FUNCTION...___

CDC329 ERROR - YOU CANNOT MODIFY THE VARIABLE DEFINITION FOR A LOCKED SETUP

ID. PLEASE UNLOCK THE SETUP ID BEFORE UPDATING ANY INFORMATION.

This screen illustrates corresponding variable definitions assigned to the preceding example custom form.


D-6

Executing the Custom Screens When the setup is complete, the GTS-based parameter data is collected on the following three data collection screens:



D-7

CDC193S GTS BASED DATA COLLECTION (1GTS) SYS 3/02/94 16:25:59 CUSTOM SERVICES F06 PAGE..1 OF 1 TABLE DESC.....TMXTUBE VALIDATION TABLE PARAMETER SET ID..M-DETAIL-G VERSION..2 SELECTION NUMBER..2 NUM ENTRY DESCRIPTION NUM ENTRY DESCRIPTION ------------------------------------------------------------------------------ 1 BOAT BOAT CONTROL 2 COMPUTER DESCRIBE COMPUTER 3 GAS GAS CONTROL SYSTEM RETURN = PROCESS SFK2 = HELP SFK4 = NEXT PAGE SFK7 = GO TO PAGE.... SFK1 = EXIT SFK5 = REVIEW SFK6 = PREV PAGE SFK3 = NEXT FUNCTION. CDC213 SELECT ONE ENTRY FOR THE PARAMETER BY ENTERING THE CORRESPONDING SELECTION NUMBER. PRESS SFK1 TO EXIT OR ANY OTHER FUNCTION KEY.


D-8

CDC193S GTS BASED DATA COLLECTION (1GTS) SYS 3/02/94 16:26:03 CUSTOM SERVICES F06 PAGE..1 OF 1 TABLE DESC.....TMXTUBE VALIDATION TABLE PARAMETER SET ID..M-DETAIL-G VERSION..2 LEVEL 1.....COMPUTER SELECTION NUMBER..1 NUM ENTRY DESCRIPTION NUM ENTRY DESCRIPTION ------------------------------------------------------------------------------ 1 BATTERY BAKU RECHARGEABLE NICAD B RETURN = PROCESS SFK2 = HELP SFK4 = NEXT PAGE SFK7 = GO TO PAGE.... SFK1 = EXIT SFK5 = REVIEW SFK6 = PREV PAGE SFK3 = NEXT FUNCTION. CDC213 SELECT ONE ENTRY FOR THE PARAMETER BY ENTERING THE CORRESPONDING SELECTION NUMBER. PRESS SFK1 TO EXIT OR ANY OTHER FUNCTION KEY.


The FMS-based data is collected on the following data collection screen:

TST501S TEST SCREEN FOR GTS CALLS FROM FMS SYS 3/03/94 13:35:32 CUSTOM SERVICES F06 PARAMETER SET ID.......CDC-FMS VERSION.....1 ENTITY.......US02 EVENT.....REPAIR DATA ACTION : ALIGNED SUB-UTSTEPPR : COMPUTER SSB-UTSTEPPR : BATTERY BAKU REPAIR TIME : 2:11:13 THIS IS A TEST SCREEN FOR PARAMETER SET ID: M-DETAIL-F THIS IS A TEST FOR GTS CALLS FROM AN FMS COLLECTION SCREEN. CDC106 ALL CALCULATED AND USER INPUT DATA ARE DISPLAYED. PRESS RETURN TO STORE THE DATA COLLECTED OR SFK1 TO EXIT.

D-9


D-10

Index

1CCA (Copy Custom Form Setup ID Attachment) 2-41

1CFS (Copy Custom Form Setup ID) 2-35

1FAM (Custom Form Setup ID Attachment Menu) 2-37

1FMM (Custom Form Setup ID Maintenance Menu) 2-10

1LCA (List All Custom Form Setup ID Attachments) 5-3

1LCF (Lock/Unlock Custom Form Setup ID) 2-26, A-11

1LFS (List All Custom Form Setup IDs) 5-2

1UCA (Update Custom Form Setup ID Attachment) 2-39, A-12

1UCF (Update Custom Form Setup ID) 2-11, A-7

1UFD (Update Field Defaults) 2-24, A-10

1UVA (Update Variable Assignments) 2-13, A-8

1UVD (Update Variable Definitions) 2-15, A-9

1VAS (View Attachments for Custom Form Setup ID) 2-45

1VCA (View Custom Form Setup ID Attachment) 2-44

1VCF (View Custom Form Setup ID) 2-28

1VFD (View Field Defaults) 2-32 1VFS (View All Custom Form Setup

IDs) 2-34 1VIF (View Custom Form Setup IDs

Using Form) 2-33 1VVA (View Variable Assignments)

2-29 1VVD (View Variable Definitions)

2-30

A Add Table Entries (ATEG) 3-5, C-3 ATEG (Add Table Entries) 3-5, C-3

C Calculation Formulas 2-18 Calculations, User-Defined B-1 Choose Level Override/Additional

(CLOA) 2-38 CLOA (Choose Level

Override/Additional) 2-38

i


ii

Configuration Options, CMT000-FORMDATA-FILE-FLAG 2-4

Copy Custom Form Setup ID (1CFS) 2-35 Custom Form Setup ID Attachment

(1CCA) 2-41 Custom Forms 2-3

Collection Point Attachment 2-36 Setup Creation 2-8

D Data Collection

File-Based 6-1 FMS-Based 2-1, 2-46 FMS/GTS-Based 4-1, D-1 GTS-Based 3-1, C-1

E E501 (EDC Parameter List Report) 5-5 EDC Parameter List Report (E501) 5-5

F File-Based Data Collection 6-1 FMS-Based Data Collection 2-1, 2-46 FMS/GTS-Based Data Collection 4-1,

D-1 Setup 4-3

Forms Custom 2-3 Setup Creation 2-8

G GTS-Based Data Collection 3-1, C-1

Set Up 3-3

L List

All Custom Form Setup ID Attachments (1LCA) 5-3

All Custom Form Setup IDs (1LFS) 5-2

Lock/Unlock Custom Form Setup ID (1LCF) 2-26, A-11

R Reports

EDC Parameter List Report (E501) 5-5

List All Custom Form Setup ID Attachments (1LCA) 5-3

List All Custom Form Setup IDs (1LFS) 5-2

S Setup ID

Attachment Menu (1FAM) 2-37 Maintenance Menu (1FMM) 2-10

U ULPD (Update Engineering Parameter

Definition) 2-6, 3-6, A-2, C-4, D-2 Update

Custom Form Setup ID (1UCF) 2-11, A-7

Custom Form Setup ID Attachment (1UCA) 2-3, A-12

EDC Parameter Set ID Version (UPSV) 2-6, 3-8, A-6, C-5, D-3

Engineering Parameter Definition (ULPD) 2-6, 3-6, A-2, C-4, D-2

Field Defaults (1UFD) 2-24, A-10 Table Description (UTDG) 3-3, C-2 Variable Assignments (1UVA) 2-

13, A-8 UPSV (Update EDC Parameter Set ID

Version) 2-6, 3-8, A-6, C-5, D-3 User Exit, CDC900 2-19 User-Defined Calculations B-1 UTDG (Update Table Description)

3-3, C-2

Index

iii

V View

All Custom Form Setup IDs (1VFS) 2-34

Attachments for Custom Form Setup ID (1VAS) 2-45

Custom Form Setup ID (1VCF) 2-28

Custom Form Setup ID Attachment (1VCA) 2-44

Custom Form Setup IDs Using Form (1VIF) 2-33

Field Defaults (1VFD) 2-32 Variable Assignments (1VVA) 2-29 Variable Definitions (1VVD) 2-30

W WDF (WorkStream Data File) 6-10 WorkStream Data File (WDF) 6-10

Record Formats 6-12


iv

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