Research-educational and innovation complex MIET

Zelenograd Innovation

Technologies CenterMoscow Institute of Electronic

Technology (Technical

University)

Special Economic

Zone

in Moscow

RUSNANO

Russian corporation of

nanotechnologies

• Number of employees – 1840

• Professors – 450

• Research fellows – 550

• PhD – 116

• MBA – 334

• Candidates – 300

Currently studying 6100 students

Annual number of graduates is more then

1000 highly-skilled specialists with the

highest level of demand on labor market

Staff

Among Officers

State prize laureates - 50

RF President’s Prize laureates - 4

RF Government’s Prize in the field of

education laureates - 2

General education and research activities

•Nanotechnology

•Electronics and microelectronics

•Nano and MEMS

•Computer-aided design systems

•Informatics and computer engineering

•Radio-engineering

•Telecommunications

•Bio-medical electronics

•Automation and control

•Material science and technology

•Applied mathematics

•Standardization, certification and metrology

•Quality control

•Management and economics

•Municipal management

•Linguistics and intercultural communication

Cutting edge instructional

technologies applied in

Research-educational and

innovation complex MIET allow to

train world standard specialist in

microelectronics and

nanotechnology, electronic

instrument engineering and

telecommunications.

Moscow Institute of Electronic Technology (Technical University)

ИСП РАН

Ангстрем

ИППМ РАН

НИИСИ РАН

Designing ICs, micro- and nanosystems

Design and manufacturing of

photomasks

Manufacturing ICs, micro- and nanosystems

Designing and modeling

equipment and devices

Designing and manufacturing printed boards

High accuracy assembling, pac

kaging andmeasurement of radio-electronic

devices

Research-educational and innovation complex MIET

Specialists Research Designing Manufacturing Commercialization

End-to-end innovative cycle of staff training and manufacturing electronics,

microelectronics, nano and MEMS production

MIET - National research university

Peopleware and scientific support for high-technology sector of Russian economy

Instructional setting Scientific environment

Base

Chairs

Scientific research institutes

development laboratories

Scientific research laboratories

Technological center

MIET

7 Competence

forming centers

postgraduate studies and doctorate

Faculties

Chairs

Research-educational

centers

Russian corporation of nanotechnologies finances the realization

of advanced programs of professional training in MIET. These

programs are oriented on investment projects in design and

manufacturing of VLSI with the topological rules up to 90 nm

High-skilled specialist training jointly with RUSNANO

Customers – subjects of innovation activities in electronics, microelectronics,

nano- and MEMS.

Ангстрем

Plant facilities

Scientific

organizations

Small and medium

companies

Resi

den

ts o

f S

EZ

«Z

ele

no

gra

d»

НИИСИ РАНИППМ РАН (Воронеж)

ИСП РАН

«МКС Плюс»

«Нанотех-Актив»

«НИИ Компонент»

НИИ ФП (Зеленоград)

«МЭШ плюс»

НИИ «Субмикрон»

«ЭСТО-Вакуум»Оптолинк

Foreign companies

Ministry of Education and Science RF

The Foundation for assistance to small innovative enterprises

Ministry of economic development

Federal agency of atomic energy

Federal agency of industry

Russian Union of Innovation and technology centres

MIET

JSC « Concern « Sitronics »

JSC «NIIME and plant «MIKRON»

«Roselektronika»

JSC «Plant «Proton-MIET»

Cadence Design Systems (USA)

Synopsys Inc. (USA)

The Activity of ZITC is accomplishing with a support of:Partners:

Activity categories of Zelenograd ITC

- Implementation of R&D with the subsequent organization manufacturing of created

scientific and technical production.

- Support of small innovative companies by means of rendering innovation

infrastructure and services including technological service on the base the network of

Multi-access centers.

Was established in 1998 in the context of interdepartmental programm «The activation of innovational activity in scientific and technical sphere in RF» with the participation of

Ministry of Education and Science and The Foundation for assistance to small innovative enterprises

JSC «Zelenograd Innovation Technologies Center» -

- key element of innovation infrastructure MIET

• Staff – 176 employees, including 6 PhD and 16 MBA.

• Sales in 2009 – 9,1 million dollars.

• Research-and-production and office-laboratorial areas - 25 000 sq.m.

• 7 Multi-access centers serving about 3000 innovative companies, including more than

100 Zelenograd companies.

• 85 innovative companies, which are integrated into innovation activity.

• Companies’ annual sales – 98 million dollars.

• Widespread complex projects are implementing.

Key parameters:

Since 2006 Zelenograd ITC is a resident in SEZ “Zelenograd”

Special Economic Zone «Zelenograd» – preferential development

conditions

JSC «Zelenograd Innovation Technologies Center» -

- key element of innovation infrastructure MIET

Partners and customers Innovative companies

95 companies

Multi-access centers MIET

MAC «Microsystem

technics and electronic

component base»

MAC «High-accuracy

assembling of electronic

components»

MAC «Measurement

and control»

MAC «High accuracy

printed boards»

Total square - 6 000 sq.m.

MAC «Machining process and

packaging of electronic frames»

MAC «Center of designing,

prototyping and manufacturing

photomasks»

Assembly section of electronic

component base and Microsystem

technics

Complex innovative projects

Complex

innovative projects

Projects parties: MIET, Zelenograd ITC, Ministry of Education and Science RF, Small and medium

companies.

The following advantages were detected by results of beta testing:

Wireless system for calculation of heating and energy resources

The further realization of pilot projects is planned to take place in Chelyabinsk , Voronezh , Yaroslavl,

Moscow and other regions where the letter contract with public authorities was achieved.

A commercialization of a project is realizing by «ZITC energy efficient technologies» inc.

Economy on heating resources and water – 15-20%

Economy on heating resources at night – 13%

Economy on cold and hot water consumption – 25-30%

System

components:

Domestic display

Local

concentrator

Domestic

concentrator

Water-temperature

sending unit

Intellectual

transformer

The development of medical equipment of new generation

A commercialization of a project is realizing by «ZITC medical equipment »

A portable device to assist circulation of left ventricle of heart

Technical characteristics of the workable device correspond to world standards. An estimated value of domestic device is 1.0 million roubles

, that is 7 times

lower than the value of INCOR device , the nearest analog

Branch out – 2012 yearThe developed implantable

electromechanical blood pump

Smart dialytic device

It is the first domestic smart dialytic device , that not only corresponds to

world standards, but also may substitute foreign analogs .

Branch out – 2011 year

A prototype of

developed dialytic

device

Branch out – 2010 year

Automatic smart external defibrillators

It was Venin and Gourvich, Russian scientists, who could realize electropulse with probability of

successful defibrillation 0.9 after the first impact, regardless of the electric resistance of the

patient ‘s thoracic cage .

AED-K

for clinical usage

AED-H for use in housetops

16-bit microcontroller

1894ВЦ1У

With mask program memory

Low consuming 16-bit microcontroller

К1894ВГ2Т

16-bit microcontroller

К1894ВГ1Т

Development of high-performance systems-on-chip

Main products

LSI accelerometer

IC Smoke detector IPS101

LSI Hall sensor

LSI wireless transceiver

A commercialization of a project is realizing by «CJSC «IDM+»

Military aeronautics Commercial and sport

aviation

SpaceMissile systems

Fields

of application:

Optic fiber gyroscopes MEMS- accelerometerMEMS-gyroscopes

Development of microsystem sensors

Inertia mass

One of 4 fine (10mkm)

silicon balks

Sensetive

Чувствительные

resistance elements on

fine (0,2 mkm) post

dielectric bridges

Technological air

chamber

Elements of extensional and surface micromechanics:

Micronozzles for injection of bio preparations

(aperture size – 20 mkm)

The development of modern microsystem devices :

A commercialization of a project is realizing by «Nanotechnology laboratory» Ltd.

Activity categories : designing and manufacturing Integrated optics components on lithium niobate and silicon

Market segment: navigation systems and optical fiber communication systems.

Major developments:

I. Integrated optics phase modulator on lithium niobate for fiber-

optical gyroscope.

II. Manufacturing of optical fiber supporting radiation polarization.

III. Fiber optical gyroscope.

IV. Micromechanical gyroscope.

V. Integrated electro-optic channel switch on lithium niobate for

spectral compression systems (DWDM) in optical fiber

communication lines.

Major technological operations:

I. Metals and dielectrics

deposition.

II. Plasmachemical etching.

III. Optical photolithography.

IV. Diffusion.

V. Optical measurements and fibre

joining.

VI. Assembling.

Development of microsensorics and fiber optics technologies

A commercialization of a project is realizing by «Optolink» Ltd

Development strategy of Zelenograd ITC

A microelectronic center with the

project rules up to 90 nm will be the

first to be established in Russia

Specialized

retraining

center

Technology transfer

center

Innovation center

Realization of project «The establishment

of Nanotechnology Center «Nano- and

Microelectronic devices»

State corporationsMicroelectronic

enterprisesForeign customers

Holding

companies

Commercialization of R&D results

Operation factors of research-and-production areas construction

3-rd stage: research-and-production areas – 900 sq.m. Function – the development of multi-access center «Machining process

and packaging of electronic frames». Deadline - 2010.

4-th stage а: research-and-production areas – 900 sq.m. Function – the development of multi-access center «Microsystem

technics and electronic component base». Deadline - 2011.

4-th stage b: research-and-production areas – 2600 sq.m. Function – the development of multi-access center «High accuracy

printed boards». Deadline – 2012. Operator– Resident of SEZ JSC «Plant PROTON-MIET».

- Implemented areas ZITC Projects under construction ZITC

Indices of existing infrastructure:

•7 branch-wise multi-access centers;

•Research-and-production areas – 6900 sq.m.;

•Office-laboratorial areas–18 000 sq.m.;

•Equipment cost of multi-access centers – 0,7 billion rubles;

•Annual production sales of multi-access centers – 800 million roubles

The development of innovative infrastructure of Zelenograd ITC

- Treatment facilities developments SEZ

4-th stage а3-rd stage

Treatment facilities

•A considerable part of office-laboratorial areas is corresponded to the world standards. These areas are appropriate for innovation activity and it is let on

hire for innovative companies which develop high-technology products.

•7 branch-wise multi-access centers have 6,9 sq.m. territory. MACs provide access to modern equipment and technologies for research teams and Start-ups.

4-th stage b

Total area will be

31 000 sq.m. by 2012

Area MIET

MAC indicesAvailable

MACsEstimated

MACs Total

Project implementation period 2003-2009 2010-2013 Since 2014

Areas, sq.m. 6 900 3 500 10 400

Number of employees 165 60 225

Equipment cost of multi-access centers, billion rubles 4,7 1,8 6,5

Lineup, types 800 450 1250

Production sales, million rubles/year 740 800 1540

Number of customers More than 3000

The development of Multi-access centers network

Project appraisal is completed, land clearing is in progress. It is provided to mobilize

investment to build the object.

Group of buildings: innovation center, specialized retraining center,

center of technology transfer

Total area – 27 000 sq.m.Parking places:

carport 125 places

plaza – 138 places

Organization of area

for technology

transfer

Innovation

companies

placement

Training and retraining of

highly skilled

personnel

Implementation is

planned on

2015

Area – 3800 sq.m.Area – 6700 sq.m.

Area – 7300 sq.m.

Peopleware for

«Nanoelectronics» field

(MIET, ZITC, RUSNANO)

Area – 3000 sq.m.

Center of nanoelectronics

Research-and-production areas–

2000 sq.m.

Office-laboratorial areas– 2300

sq.m.

Project of establishment of Nanotechnological center «Nano- and

microsystem technics»

Project is oriented to the development of innovation activity

and to manufacturing of competitive nanotechnological

products with the participation of small and medium science

intensive companies

Training of

personnel

Equipage with high-

technology equipment

Scientific and production

areas

Commercialization of

technologies

Investment

generation

Start-ups

incubation

Project of establishment of Nanotechnological center «Nano- and

microsystem technics»

Nanotechnological

center

Incubation of 10 Start-ups annually

Key Project Results

Commercialization

Rendering of technological and и

engineering service

Technology transfer

1. A suite of modern equipment for microelectronics .

2. Basic process for mass production of electronic sensors on the base of nano- and micro

systems.

3. Mass production of NEMS and MEMS physical quantity sensors, biological quantity sensors,

chemical quantity sensors and devices, based on these sensors.

4. Establishment of Start-ups and small innovative companies in nanotechnology and assistance for

their development

Will be created more than 500 new workplaces in nanotechnology field

Project of establishment of Nanotechnological center «Nano- and

microsystem technics»

PROJECT:

«Center of designing, prototyping and manufacturing of

photomasks for the production of ICs with the project rules

up to 90 nm»

A specialized center for manufacturing of photomasks with the project rules up to

90 nm will be the first to be established in Russia.

Information protectionagainst improper access provides

guarantee of confidentiality and

information integrity

Infrastructure - overstability of

securing of technological process

parameters

Equipment -

securing of technical

processes at the level of

project rules up to 90 nm

Center of designing, prototyping and manufacturing of

photomasks for the production of ICs with the project rules up to 90 nm

Photo masks consumers

JSC «Angstrem»Microelectronic enterprises JSC «NIIME and

plant «MIKRON»

Second stage – 2010-2011

Technology level 180 nm

First stage – 2007-2008

Technology level 350 nm

Preparation of control information

Photomask production

Photomask control and rectification

Photo masks manufacturingprocess flow

Clean rooms Class

10 - 10 000

Third stage – 2012-2013

Technology level 90 nm

Center of designing, prototyping and manufacturing of

photomasks for the production of ICs with the project rules up to 90 nm

JSC «Roselektronika»

Thank you for your attention

JSC «Zelenograd Innovation Technologies Center»

Contact telephone number: +7(499)720-69-17