DISCO CORPORATION All rights reservedDISCO CONFIDENTIAL – for customers only 2016/03/03
Approach to satisfy the Requirement of Approach to satisfy the Requirement of
Factory AutomationFactory Automation
Yuki Takayama
Sales Planning Department
Asia Pacific Sales Division
DISCO CORPORATION
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2016/03/03
Contents
Company profile
Approach to Automation
Machine Vender’s Role
Summary
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Company Profile Company Profile oof DIf DISSCOCO
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Company History ~Over 75 years of experience in abrasive technologies~
First Dicing Saw
DAD-2H
Fully Automatic Dicing Saw
Head Office & R&D
Center
New Building, Kuwabata Plant
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Dicing Saw Grinding/Polisher Laser Saw
Precision
Equipment
Precision
Tooling
Dicing BladesGrinding Wheels
Dry Polishing PadLaser Head
Development, Manufacturing, and Sales of Precision EquipmentDevelopment, Manufacturing, and Sales of Precision Equipment and Precision Toolingand Precision Tooling
DISCO Production
(Image)
Bringing faraway science to comfortable living through advanced “Kiru”,”Kezuru”,“Migaku” technologies
Mission
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Approach to AutomationApproach to Automation
~~OEE ImprovementOEE Improvement~~
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Image of Industrial 4.0
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What is Automation
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Automation or automatic control, is the use of various Control System for
operating equipment such as machinery, processes in factories, steering and
stabilization of ships, aircraft and other applications with minimal or
reduced human intervention
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What is Control System
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Control System, is a device, or set of devices, that manages,
commands, directs or regulates the behavior of other devices
or systems.
InformationGathering Response
ThinkingJudgment
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First step to Automation : OEE improvement
OEE: Overall Equipment Efficiency
Definition:
Yield rate× Utilization of Equipment
Improvement of OEE:
Improvement of Yield
� Stabilize Quality of Final Product
Improvement of Utilization
� Increase Machine Productivity
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Approach to the improvement of OEE: EES
EES: Equipment Engineering System
Definition : Information collection / management system of factory
Management by EES
Machine Behavior
Alarm Management
Condition Report
Quality of Final Product
Quality Inspection
Data Acquisition and Analysis
SPC FDC
FDC: Fault Detection and ClassificationSPC: Statistical Process Control
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SPC: Statistical Process Control
Quality control with Statistical Methods
Based on the analysis of data from inspector
Stabilize/ optimize process to improve final quality
FDC: Fault Detection and Classification
A prediction mechanism of equipment condition to reduce
risks (Ex. Machine Alarm and Process Log)
About SPC & FDC
Alarm part!!
Fin
al th
ickn
ess
(us)
SPC : Quality stabilization (Yield Improvement)+ = OEE Improvement
FDC : Risk reduction (Utilization Improvement)
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Image of Factory managed by EES
Processing
Management by EES
Machine Behavior
Alarm Management
Condition Report
Quality of final product
Quality Inspection
Data Acquisition and Analysis
SPC FDC
FDC: Fault Detection and ClassificationSPC: Statistical Process Control
Central Server (EES)
Inspector Tester
Factory
Fundamental of automation is OEE optimization by the implementation of EES, before hardware construction (AGV, OHT etc)
Inspection
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Hierarchical relationship of SPC/FDC and APC
“Advanced Process Control”A systematic approach to control feed-back / feed-forward of process variation caused by
grouped equipments
The approach to APC (smart production) is based on the fundamental of SPC and
FDC
EDA
SPC/FDC
APC
APC: Advanced Process ControlR2R: Run to RunVM: Virtual Metrology
OEE: Overall Equipment EfficiencyFDC: Fault Detection and ClassificationSPC: Statistical Process Control
EDA: Equipment Data AcquisitionEES: Equipment Engineering System
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Automation based on EES
Automation in semiconductor industry , is realized by using of Control System (EES) for operating equipment with minimal or reduced human intervention
Management by EES
Machine Behavior
Alarm Management
Condition Report
Quality of final product
Quality Inspection
Data Acquisition
Production Automation
Host Management(GEM)
Automation Transportation
Quality information
Machine Condition Scheduling
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Machine venderMachine vender’’s roles role
FDC Function providerFDC Function provider
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FDC System(Embedded Or Optional)
FDC System(Embedded Or Optional)
Host on Customer's site
Ideal FDC function provided by equipment vender
Provides different levels of risk alarm for risk reduction
Provides necessary status information for SPC analysis (combing
with data from inspector)
Role of equipment vender in automation: FDC function
EDA
FDC
APC
FDC reports current machine
to the host
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Levels of Machine Condition Management
Level 1:Inherent alarm code Different alarm levels are pre-setup-ed when made
Mainly those represent the 1st machine condition management
Level 2:Extra machine/ process condition monitoring (SPC)Realized by information collection (Host site) of machine condition and inspection result
Level 3:Risk Management (FDC)Advanced machine alarm/ report function by real-time judgment of process condition
Some model adoption might have process dependences (modification required)
Spindle Driving Current Alarm!!
Water Flow abnormalEDA
FDC
APC
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Summary
Way to Smart Manufacturing
Optimize OEE with the implementation of EES
Cooperation network: Accumulation of experience
Equipment Vender
Smart condition report function (FDC)
Device Maker/ OSAT:
Fundamental Software environment construction (EES)
Build the SPC model based on the defect (from inspection)