From Greenfield to Fab – Infrastructure & Facility Requirements for Semiconductor Manufacturing SEMI Vietnam Semiconductor Strategy Summit Ho Chi Minh City, 10th September, 2013
M+W Group GmbH
Peter Csatáry
Global Technology Services
© M+W Group 2 GER-GTS-PP-130909-CNS Vietnam Semi Summit_Sept10-Cs.pptx / 09.09.2013
Contents
M+W Group Profile
Success Factors for the Establishment of a
Semiconductor Fab
Fab Concept Development
Infrastructural Pre-Requisites and Prospects
Challenges and Opportunities for Vietnam
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M+W Group at a Glance
The leading global engineering
and project company with…
- more than 7,700 employees worldwide
- world class EHS records and awards
- technical expertise in process and automation
- sales exceeding 3 bn USD in 2012
…. for high-tech production facilities,
mission critical infrastructure and
energy & environmental solutions ….
- more than 200 Semiconductor Fabs realized
- more than 10 GWp Photovoltaic Fab capacity realized
- largest Nanotechnology Research Center built
- over 300 successfully completed turnkey projects
…. committed to deliver customer value
Proven capability to manage
complex projects
Energy-efficient & environmentally friendly
solutions
Integrated solutions focused on
customer value Global presence
EHS as core value
Over 7,700 highly skilled and experienced employees
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Recognitions and Strategic Initiatives
Gold Recipient of
“Safety and Health National
Award” in Malaysia
“Safety and Health Award
2011” for M+W Singapore
“Facility of the Year 2011”
Award for our Customer
Novartis Vaccines
“Excellent Contractor Award”
for M+W Group by Beijing
Orient Electronics
“Supplier of the Year Award 2008”
for M+W Group by Carl Zeiss
“Solar Industry Award ” 2010 and
2011 in the Turnkey Category
“TOP 100” of Germany’s
World Market Leaders
“Global Growth Company”
World Economic Forum,
Dalian, China, 2011
“Construct Secure”
Platinum Award
for M+W US
Founding Donor of Trust
“2 Degrees for Climate Protection”
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Our Industries
Process Automation
Products & Services
Energy & Environment Technologies
Semiconductor Flat Panel Display Photovoltaics Battery Cells
Pharma & Biotech Food & Nutrition Consumer Care Chemicals
Renewable Energy Waste to Energy Power Plants Oil & Gas
Science & Research IT & Telecom Space & Security General Industries
Advanced Technology Facilities
Life Science & Chemicals
High Tech Infrastructure
Cleanroom Products Air Handling Units Contracting
Controlled Environments Technology Center Operation & Maintenance
Chemicals Pharma & Biotech Food & Nutrition
Automotive Semiconductor Oil & Gas, Paper
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M+W Group as an Enabler in Emerging Markets
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Identify Target Markets & Products
Process Technology Licensing
Process Equipment & Automation
Personnel Recruitment & Training
Available Services, Materials & Consumables
Financing Options
Site Selection
Building Facilities Engineering & Construction
Process Equipment Installation & Qualification
Process Technology Implement. & Qualification
Operations Concept & Ramp-up
Key Factors for Success Semiconductor Fab Development
VIABLE COST MODEL
AND BUSINESS PLAN
Feasibility Study /
Business Model
Define Technology /
Fab Planning / Design
Site Evaluation /
Fab Final Design
Fab Construction /
Tool Installation
Technology Transfer,
Ramp-up Production,
Facility Management
Set-up Concept Planning Construction Ramp-up
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New Wafer Fab Project in Vietnam Baseline Data
Location
Saigon High Tech Park (SHTP), Vietnam
Product
Integrated Circuits, tbd.
Key manufacturing data
Process technology: CMOS
Target technology node: 180 / 100 nm
Wafer size: 200 mm
Target manufacturing capacity: 5,000 -10,000 WSPM*
Additional functions under discussion:
R&D, Assembly & Test, Training, Parts Clean, etc.
Process equipment will be refurbished
*WSPM: Wafer Starts per Month
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New Wafer Fab Project in Vietnam Manufacturing Environment - Requirements
Manufacturing environment
SMIF / Minienvironment (ME)
Cleanroom specification
Class 1,000 / Class 1 (in ME)
Material transportation and storage
Trolleys and WIP shelves
Vibration criteria
VC-D in critical areas
Floor load of main production area
20 to 25 kN/m²
Mode of operation
24/7/, 365 days per year
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New Wafer Fab Project in Vietnam Key Facility Design Considerations
1,00E-03
1,00E-02
1,00E-01
1,00E+00
1,00E+01
1,00E+02
1 10 100 1000
Frequency in Hz
Dis
pla
ce
me
nt in
µm
(rm
s)
ASML PAS 5500/900
Nikon NSR-S202/203/204A/B vertical
Nikon NSR-S202/203/204A/B horizontal
Canon FPA-5000ES2
Class A: v=50 µm/s
Class B: v=25 µm/s
Class C: v=12 µm/s
Class D: v=6 µm/s
Class E: v=3 µm/s
Environmental Requirements
Facilities Specifications
Equipment
Layout
Material Handling
Concept
Logistics
Requirements
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Cross-Section through a Typical Wafer Fab 2-Level Fab Concept
Catwalk Subfab Level
Cleanroom Level Raised Floor with
flow-thru waffle or
closed slab Utility Supply
Systems
Sub Equipment
Sub Fab Equipment
Equipment Cleanroom with FFU
recirculation air concept
Open room (Ballroom), no
cleanroom walls required
(except for segregation)
7.2m
7.0m
4.8m
5.5m
1.5m
0.9m
0.5m20
.2m
3.6m 3.6m
93.6m
7.2m2.4m
Cooling Coil Waffle Slab MCC Exhaust Air ElectricalPumpProcess EquipmentClean Support
Service Corridor
Make Up Air Unit Filter Fan Units Blanks Stockers
Make Up Air
Gas Cabinets
Air Return Process SupplySystem
Level 1
Level 2
Level 3
© M+W Group 12 GER-GTS-PP-130909-CNS Vietnam Semi Summit_Sept10-Cs.pptx / 09.09.2013
Typical Wafer Fab Complex Fab Building Impressions
Plenum
Cleanroom
Raised Floor
Sub-Fab
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Typical Wafer Fab Complex Site Master Plan (2 Fab Modules)
Key considerations for the
site requirements include:
Geotechnical compliance
Traffic flow
Connectivity to public
infrastructure
Utility supply
Future expandability
Code compliance
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Pre-Requisites for the Establishment of a Semiconductor Fab Complex
Workforce
Financial Aspects
Others
Overall Infrastructure
Technical Infrastructure Market
Overall
Infrastructure Technical
Infrastructure
Availability and
quality of
• Electrical supply
• Water supply
• Waste water
disposal
• Natural gas supply
• Road infrastructure
• Airports
• Seaports
• Railway infrastructure
• Hospitals
• Development funds &
government incentives
• Tax & regulatory
policies
• Market introduction
programs
• Cost of labor
• Cost of land
• Cost of
- electricity
- water
- waste water
- natural gas
• Availability of
qualified workforce
• Education system
• Union‘s influence
• Labor productivity
• Attractiveness for
expatriates
• Political climate
- Investment situation
- Financial governance
- Legislation adherence
- Property rights
- Competition and
regulation
• Environmental regulations
- Exhaust air
- Waste water
- Noise
• Codes and
permitting process
Market Financial
Aspects Workforce Others
• Clients
• End users
• Suppliers
• Business partners
• Competitors
• Universities
• R&D centers
FACILITY
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Semiconductor Front End Manufacturing Multiplier for Infrastructure & Employment
800 employees
+ 1,500 employees
+ 1,500 employees
Wafer Fab
Managers
Engineers
Technicians
Operators
Administration
Supply Chain and
Finishing Industry
Back end
OEM’s / service providers
Photomask suppliers
Materials suppliers
Electronics industry
Social Infrastructure
Domestic construction
Retail
Health care
Research and education
Local suppliers
Typical Leverage
1:4 to 1:6 Source: M+W Group data
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The Supply Chain and it‘s Participants
Design
Services
Design Tool
Vendors
IP Vendors
Equipment
Vendors
Materials
Vendors (Si,
Consumables)
Semiconductor
Vendors
(IDMs)
Fabless
Semiconductor
Vendors
Foundries
Distributors
Manufacturing
and Design
Services
(EMS, ODM)
Test and
Packaging
Services
Subcomponent
OEMs
OEMs
Equipment
Distribution
Channel
Service
Providers
Software
and Content
Providers
E
N
D
U
S
E
R
S
Research & Development
Automotive
Entertainment
Electronics Industry
Computers & Software
Medical Applications
Source: Based on Gartner, 2005
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Semiconductors Enable Diversification into New but Related Technologies
Nano
Semiconductor 1. System design
2. Manufacturing
3. Research Competence
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Summary Challenges and Opportunities for Vietnam
The major challenge is to evaluate and consider all key success factors by:
Developing a feasible business plan
Selecting a compatible manufacturing and process technology provider
Assembling global best-in-class players for project planning and execution
Continuing co-operation with the region and existing infrastructure
Recruiting industry professionals and local talents for first wafer fab start-up
Key opportunities for Vietnam:
Front end wafer fab as the key enabler to accelerate development of
it’s high-tech industry
The growth of domestic infrastructure and supply chain
Upstream and downstream development of the supply chain
Diversification of the product portfolio through new companies & spin-offs
Creation of new highly qualified job opportunities with a high multiplier
International recognition of Vietnam as a new player in the high-tech sector
© M+W Group 19 GER-GTS-PP-130909-CNS Vietnam Semi Summit_Sept10-Cs.pptx / 09.09.2013
THANK YOU !
Contact:
Peter Csatáry
Head of Group
Global Technology Services
M+W Germany GmbH
E-Mail: [email protected]
Phone: +49 711 8804 1441
Dr. Phi Do Duy
Business Development Director
M+W Vietnam Ltd.
E-Mail: [email protected]
Phone: +84 4 785 6339