Transaction Information
ToolId DC08ToolStatus Running WafersLocation East Fishkill, NYWaferSize 300 mmFabSection Clean
General Product Information
VendorSupplier SCREEN/DNSModel SU-3100Vintage 2011SerialNo 530L00394AAssetDescription SINGLE WAFER WET STATIONSoftwareVersion NACIM NAProcess SP-SC1-SC2-HF
Hardware Configuration (Fab)
SystemType Description Quantity StatusMain System 8 CHAMBER AQUASPIN OK Factory Interface FOUP 4 OK Handler System Yasakawa 1 OK Options System naOthers na
Hardware Configuration (Subfab / Auxilliary Units)
Description Quantity StatusCooling Unit 1 OK
Missing/Faulty Parts / Accesorries List
Description Quantitynone 1
Tool Pictures
general Main Body
manufactureserial S/N MFG Plate
Additional Configuration Files
